EP3564538A1 - Système à vide et procédé de fabrication d'un tel système à vide - Google Patents

Système à vide et procédé de fabrication d'un tel système à vide Download PDF

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Publication number
EP3564538A1
EP3564538A1 EP19158341.8A EP19158341A EP3564538A1 EP 3564538 A1 EP3564538 A1 EP 3564538A1 EP 19158341 A EP19158341 A EP 19158341A EP 3564538 A1 EP3564538 A1 EP 3564538A1
Authority
EP
European Patent Office
Prior art keywords
pump
rotor
housing
vacuum
chamber
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP19158341.8A
Other languages
German (de)
English (en)
Other versions
EP3564538B1 (fr
Inventor
Jan Hoffmann
Michael Schweighöfer
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Pfeiffer Vacuum GmbH
Original Assignee
Pfeiffer Vacuum GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Pfeiffer Vacuum GmbH filed Critical Pfeiffer Vacuum GmbH
Priority to EP19158341.8A priority Critical patent/EP3564538B1/fr
Publication of EP3564538A1 publication Critical patent/EP3564538A1/fr
Priority to JP2020021459A priority patent/JP7221891B2/ja
Application granted granted Critical
Publication of EP3564538B1 publication Critical patent/EP3564538B1/fr
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/40—Casings; Connections of working fluid
    • F04D29/403—Casings; Connections of working fluid especially adapted for elastic fluid pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/02—Selection of particular materials
    • F04D29/023—Selection of particular materials especially adapted for elastic fluid pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/60—Mounting; Assembling; Disassembling
    • F04D29/601—Mounting; Assembling; Disassembling specially adapted for elastic fluid pumps
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/02—Details
    • H01J49/24—Vacuum systems, e.g. maintaining desired pressures
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05D—INDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
    • F05D2230/00—Manufacture
    • F05D2230/20—Manufacture essentially without removing material
    • F05D2230/24—Manufacture essentially without removing material by extrusion

Definitions

  • the present invention relates to a vacuum system, in particular mass spectrometry system, comprising a vacuum pump, in particular turbomolecular and / or split-flow vacuum pump, with a pump rotor, which is arranged in a rotor housing, and a vacuum chamber, which is surrounded by a chamber housing.
  • a vacuum pump in particular turbomolecular and / or split-flow vacuum pump
  • a pump rotor which is arranged in a rotor housing
  • a vacuum chamber which is surrounded by a chamber housing.
  • the invention also relates to a method for producing a vacuum system, in particular mass spectrometry system, wherein the vacuum system comprises a vacuum pump, in particular turbomolecular and / or split-flow vacuum pump, with a pump rotor which is arranged in a rotor housing, and a vacuum chamber which is surrounded by a chamber housing is included.
  • a vacuum pump in particular turbomolecular and / or split-flow vacuum pump
  • a pump rotor which is arranged in a rotor housing
  • a vacuum chamber which is surrounded by a chamber housing
  • a split-flow pump With recent interpretations of multi-chamber vacuum systems, the question arises as to how a split-flow pump can best be connected to the vacuum chamber (s). Space, number of components, manufacturing costs, testing costs, dimensions and weight, the latter in particular with regard to transport, are here important factors in the course of optimization. It is basically known to equip a split-flow pump with a formed as an extruded rotor housing, which at least one Connecting flange for connecting a chamber housing a vacuum chamber. This is also referred to as a box-type pump. Most systems are simple. For example, a pump is screwed as a box-type to a multi-chamber housing. There are numerous connecting surfaces to be sealed.
  • a vacuum system according to claim 1, and in particular in that the rotor housing and the chamber housing are integrally formed by a housing body, and wherein the housing body is an extrusion.
  • the housing body according to the invention is particularly simple and inexpensive to manufacture and rotor housing and chamber housing do not need to be made separately and then connected consuming and sealed. This not only reduces the assembly effort. Also, separate leakage tests need not be performed for the rotor housing and chamber housing as in the prior art.
  • thin walls can be realized in the connection region between the rotor housing and the chamber housing, whereas a known flange connection between the two occupies a large space.
  • the pump rotor and the vacuum chamber or arranged therein functional elements can be arranged close to each other by the invention, the pump rotor and the vacuum chamber or arranged therein functional elements.
  • thin wall thicknesses are possible in the connection area, which further reduces the required installation space.
  • the size of the chamber is now largely independent of the size of the pump rotor and / or the size of a flange connection.
  • the chamber can be designed to be particularly small and close to the pump rotor, so that the volume to be evacuated and the pumping time required for evacuation are correspondingly small.
  • the chamber housing can thus be made larger and / or wider be considered the rotor housing.
  • the chamber extends at least partially around the pump rotor.
  • the invention also offers a high level of process reliability as well as a particularly low material rejection and thus, in turn, cost advantages.
  • a vacuum system for solving the problem, in particular mass spectrometry system comprising a vacuum pump, in particular turbomolecular and / or split-flow vacuum pump with a pump rotor which is arranged in a rotor housing, and a Vacuum chamber, which is surrounded by a chamber housing, wherein the rotor housing and the chamber housing are integrally formed by a housing body, and wherein the housing body is formed as a profile component, cylinder body and / or an extrusion.
  • the term "cylinder” is not limited to a circular cylinder herein.
  • the profile component has a profile axis
  • the cylinder body has a cylinder axis and / or the extruded part has a strand axis which runs parallel to the pump rotor.
  • the housing body may be formed as a double-extruded profile and / or have at least two sub-strands, one of which forms the rotor housing and another the chamber housing.
  • at least two chambers may be arranged offset around the pump rotor.
  • an opening between the pump rotor and the vacuum chamber is formed in the housing body. Through the opening, the vacuum chamber can be pumped out.
  • This opening can also be referred to as a port, since it establishes the connection between the vacuum chamber and the pump rotor.
  • the port is thus integrated in the housing body.
  • the housing body may in particular have at least two parallel aligned, cylindrical cavities, wherein preferably the pump rotor is arranged in a first of the cavities and the vacuum chamber is formed in a second of the cavities.
  • the cavities can be formed in particular in parallel-aligned partial strands and / or partial profiles of the housing body.
  • the housing body may, for example, also comprise a third cylindrical cavity, in particular wherein a further pump rotor and / or a further vacuum chamber is or are provided in the third cylindrical cavity.
  • two pump rotors may be provided in separate cylindrical cavities, in particular in the first and third cylindrical cavities, by means of which jointly at least one vacuum chamber, in particular in the second cylindrical cavity, can be evacuated.
  • a particularly high pumping speed can be provided for the vacuum chamber.
  • a pump rotor can evacuate two vacuum chambers provided in separate cylindrical cavities.
  • the housing body can also comprise more than three parallel aligned cylindrical cavities.
  • the pump rotor is arranged inserted in the rotor housing. This allows a particularly simple installation of the system. In addition, the pump can thus be maintained without affecting the vacuum chamber and functional elements present therein.
  • the rotor is inserted directly into the rotor housing, ie in particular there is no intermediate sleeve between the pump rotor and the rotor housing.
  • the pump rotor is therefore separated from an inner wall of the rotor housing at most by stator disks and, if appropriate, spacer sleeves.
  • an additional sleeve for the rotor and optionally stator disks may alternatively be provided.
  • a bearing element in particular together with a support provided therefor, in particular a so-called star, can be inserted into the rotor housing.
  • the pump has a pump base element which is fastened to the housing body, in particular by means of at least one fastening element.
  • the pump base member may be bolted to the housing body.
  • the pump base member may be secured to the housing body by screws threaded into the housing body.
  • the pump base element may comprise, for example, a drive, a control and / or a bearing for the pump rotor.
  • the housing body has at least one projection, in particular fastening projection, on which any functional part, in particular the pump base element, can be attached.
  • the functional part or pump base element can be fastened in a particularly simple and reliable manner.
  • the projection on the rotor housing may be formed, in particular integrally formed and / or formed integrally therewith.
  • the projection may be formed projecting radially and / or transversely to the rotor axis.
  • the projection extends with a substantially constant cross section and / or along the entire axial length of the rotor housing, the chamber housing and / or the housing body.
  • the projection may be formed, for example, as a material column extending in the axial direction.
  • the pump base element can be screwed into the projection by means of at least one fastening screw.
  • the pump base element preferably has at least one fastening projection which corresponds to the projection on the housing body, for example with through-holes.
  • a functional element is arranged, wherein preferably the housing body, in particular the chamber housing, may have a mounting opening for the functional element.
  • the functional element can be introduced into the vacuum chamber in a particularly simple manner.
  • the functional element can be, for example, an ion optics, a quadrupole or the like, in particular in a mass spectrometry system.
  • the mounting opening can be arranged in particular transversely and / or radially, which allows a particularly simple installation of the functional element. In principle, the mounting opening can also be designed as an axial opening.
  • an opening in the axial end of the housing body or extruded profile in particular the opening of a cylindrical cavity defining the vacuum chamber, can also be used as a mounting opening.
  • the functional element for example, simply be attached to a support, in particular a cover, which is attached to the mounting hole, in particular spans the mounting hole.
  • the attachment of the functional element on the carrier or cover can be done outside the system, especially in an ergonomic working environment.
  • the lid then only needs to cover the Mounting opening to be attached.
  • the attachment can preferably be done by externally actuated screws, so that it is easy to carry out for the fitter.
  • the housing body is preferably machined in a region encompassing the mounting opening and in particular has a low roughness, so that a seal can be effected effectively.
  • the vacuum system may according to another embodiment have at least one second vacuum chamber, which is preferably also in the housing body, in particular in the same sub-strand as the first vacuum chamber and / or as the pump rotor is formed.
  • the vacuum chambers may for example be arranged axially one behind the other and aligned parallel to the pump rotor and / or be formed by the same cylindrical cavity of the extruded part.
  • one or the vacuum chamber can also be arranged in the axial extension of the rotor housing and / or in the same cylindrical cavity as the pump rotor.
  • the vacuum chamber may be disposed radially and / or axially adjacent thereto with respect to the pump rotor.
  • both a vacuum chamber radially adjacent and a vacuum chamber may be arranged axially adjacent.
  • the vacuum chamber axially adjacent to the pump rotor may be at least partially formed by a cylindrical cavity, which also includes the pump rotor.
  • a vacuum chamber may be formed in a continuation of a rotor housing string.
  • the axially adjacent vacuum chamber may preferably be additionally formed by a strand or cylindrical cavity of the chamber housing, wherein, for example, a passage opening between the continuation of the rotor housing and the chamber housing may be provided.
  • the assembly is further simplified.
  • the chamber housing and the rotor housing can be axially closed by a common, in particular one-piece, lid.
  • the cover may be formed, for example, as a plate, for example on a pump base element facing away from a side. The cover can also be arranged and / or formed on the pump base element.
  • the rotor housing and chamber housing may or may not terminate axially at the same level, which applies to both a low pressure end and a pressure end, such as a fore end, of the system.
  • the rotor housing and the chamber housing and / or cylindrical cavities provided therein are preferably significantly different in size, for example at least 20%, in particular at least 40%, in particular at least 60% difference in size.
  • the cross-sectional area extends in this case in particular perpendicular to the rotor axis.
  • a relatively large pump rotor with a relatively small vacuum chamber can be used and vice versa.
  • the vacuum system can be particularly easy to design as needed, without an intermediate connection flange predefines the sizes or at least influenced.
  • the housing body may be formed, for example, as a double-extruded profile with at least two sub-strands, in particular one each for the rotor housing and for the chamber housing.
  • the housing body is preferably extruded with a common die for the sub strands.
  • an opening in particular a mounting opening, is introduced into the housing body, in particular into the chamber housing, wherein in particular a functional element is introduced through this opening into the vacuum chamber.
  • the opening may, for example, be directed outwards, thus allowing, for example, an assembly of a functional element from the outside.
  • the assembly of a functional element is in principle conceivable, for example, by an opening between the vacuum chamber and the pump rotor, in particular before the pump rotor is inserted.
  • Another example provides that an opening connecting the interior of the rotor housing, in particular the pump rotor, with the vacuum chamber is introduced into the housing body.
  • openings can be introduced in a simple manner, for example by means of a cross-engagement chip tool, in particular a T-slot cutter.
  • a cross-engagement chip tool in particular a T-slot cutter.
  • this is the chip tool axially into the rotor housing, in particular in a cylindrical cavity for the pump rotor, and / or Chamber housing, in particular in a cylindrical cavity for the vacuum chamber, introduced and, in particular subsequently, delivered in the transverse direction against the material to be cut.
  • turbomolecular pump 111 comprises a pump inlet 115 surrounded by an inlet flange 113, to which in a conventional manner, a non-illustrated recipient can be connected.
  • the gas from the recipient may be drawn from the recipient via the pump inlet 115 and conveyed through the pump to a pump outlet 117 to which a backing pump, such as a rotary vane pump, may be connected.
  • the inlet flange 113 forms according to the orientation of the vacuum pump Fig. 1 the upper end of the housing 119 of the vacuum pump 111.
  • the housing 119 comprises a lower part 121, on which an electronics housing 123 is arranged laterally.
  • Housed in the electronics housing 123 are electrical and / or electronic components of the vacuum pump 111, eg for operating an electric motor 125 arranged in the vacuum pump.
  • a plurality of connections 127 for accessories are provided on the electronics housing 123.
  • a data interface 129 for example, according to the RS485 standard, and a power supply terminal 131 on the electronics housing 123 are arranged.
  • a flood inlet 133 On the housing 119 of the turbomolecular pump 111, a flood inlet 133, in particular in the form of a flood valve, is provided, via which the vacuum pump 111 can be flooded.
  • a sealing gas connection 135, which is also referred to as flushing gas connection is furthermore arranged, via which flushing gas for protecting the electric motor 125 (see, for example, US Pat Fig. 3 ) can be brought before the pumped by the pump gas in the engine compartment 137, in which the electric motor 125 is housed in the vacuum pump 111.
  • the Lower part 121 are further arranged two coolant ports 139, wherein one of the coolant ports is provided as an inlet and the other coolant port as an outlet for coolant, which can be passed for cooling purposes in the vacuum pump.
  • the lower side 141 of the vacuum pump can serve as a base, so that the vacuum pump 111 can be operated standing on the bottom 141.
  • the vacuum pump 111 can also be fastened to a recipient via the inlet flange 113 and thus be operated to a certain extent suspended.
  • the vacuum pump 111 can be designed so that it can also be put into operation, if it is aligned differently than in Fig. 1 is shown.
  • Embodiments of the vacuum pump can also be implemented in which the lower side 141 can not be turned down but can be turned to the side or directed upwards.
  • a bearing cap 145 is attached to the bottom 141.
  • mounting holes 147 are arranged, via which the pump 111 can be attached, for example, to a support surface.
  • a coolant line 148 is shown, in which the coolant introduced and discharged via the coolant connections 139 can circulate.
  • a rotor 149 is arranged, which has a about a rotation axis 151 rotatable rotor shaft 153.
  • Turbomolecular pump 111 includes a plurality of turbomolecular pump stages operatively connected in series with a plurality of rotor disks 155 mounted on rotor shaft 153 and stator disks 157 disposed between rotor disks 155 and housed in housing 119.
  • a rotor disk 155 and an adjacent stator disk 157 each form a turbomolecular one pump stage.
  • the stator disks 157 are held by spacer rings 159 at a desired axial distance from each other.
  • the vacuum pump further comprises Holweck pumping stages which are arranged one inside the other in the radial direction and which are pumpingly connected to one another in series.
  • the rotor of the Holweck pump stages comprises a rotor hub 161 arranged on the rotor shaft 153 and two cylinder shell-shaped Holweck rotor sleeves 163, 165 fastened to the rotor hub 161 and oriented coaxially with the rotation axis 151 and nested in the radial direction.
  • two cylinder jacket-shaped Holweck stator sleeves 167, 169 are provided, which are also oriented coaxially to the rotation axis 151 and, as seen in the radial direction, are nested one inside the other.
  • the pump-active surfaces of the Holweck pump stages are formed by the lateral surfaces, ie by the radial inner and / or outer surfaces, the Holweck rotor sleeves 163, 165 and the Holweck stator sleeves 167, 169.
  • the radially inner surface of the outer Holweck stator sleeve 167 rests against the radially outer surface of the outer Holweck rotor sleeve 163 forming a radial Holweck gap 171 and forms with this the turbomolecular pumps subsequent first Holweck pumping stage.
  • a radially extending channel may be provided, via which the radially outer Holweck gap 171 is connected to the middle Holweck gap 173.
  • a radially extending channel may be provided, via which the middle Holweck gap 173 is connected to the radially inner Holweck gap 175.
  • a connecting channel 179 to the outlet 117 may be provided at the lower end of the radially inner Holweck rotor sleeve 165.
  • the above-mentioned pump-active surfaces of the Holweck stator sleeves 163, 165 each have a plurality of Holweck grooves running around the axis of rotation 151 in the axial direction, while the opposite lateral surfaces of the Holweck rotor sleeves 163, 165 are smooth and the gas for operating the Drive vacuum pump 111 in the Holweck grooves.
  • a roller bearing 181 in the region of the pump outlet 117 and a permanent magnet bearing 183 in the region of the pump inlet 115 are provided.
  • a conical spray nut 185 with an outer diameter increasing toward the rolling bearing 181 is provided on the rotor shaft 153.
  • the spray nut 185 is in sliding contact with at least one scraper of a resource storage.
  • the resource storage comprises a plurality of stackable absorbent discs 187 provided with a rolling bearing bearing means 181, e.g. with a lubricant, soaked.
  • the permanent magnet bearing 183 includes a rotor-side bearing half 191 and a stator-side bearing half 193, each comprising a ring stack of a plurality of stacked in the axial direction of permanent magnetic rings 195, 197 include.
  • the ring magnets 195, 197 are opposed to each other to form a radial bearing gap 199, wherein the rotor-side ring magnets 195 are disposed radially outward and the stator-side ring magnets 197 radially inward.
  • the magnetic field present in the bearing gap 199 causes magnetic repulsive forces between the ring magnets 195, 197, which cause a radial bearing of the rotor shaft 153.
  • the stator-side ring magnets 197 are fixed parallel to the axis of rotation 151 in one direction by a fastening ring 209 connected to the carrier section 203 and a fastening ring 211 connected to the carrier section 203. Between the fastening ring 211 and the ring magnet 197, a plate spring 213 may also be provided.
  • an emergency bearing 215 which runs empty in the normal operation of the vacuum pump 111 without contact and engages only with an excessive radial deflection of the rotor 149 relative to the stator to a radial stop for the rotor 149th to form, since a collision of the rotor-side structures with the stator-side structures is prevented.
  • the safety bearing 215 is designed as an unlubricated rolling bearing and forms with the rotor 149 and / or the stator a radial gap, which causes the safety bearing 215 is disengaged in the normal pumping operation.
  • the vacuum pump 111 includes the electric motor 125 for rotationally driving the rotor 149.
  • the armature of the electric motor 125 is formed by the rotor 149 whose rotor shaft 153 extends through the motor stator 217.
  • On the extending through the motor stator 217 through portion of the rotor shaft 153 may be arranged radially outside or embedded a permanent magnet arrangement.
  • a gap 219 is arranged, which comprises a radial motor gap over which the motor stator 217 and the permanent magnet arrangement for the transmission of the drive torque can influence magnetically.
  • FIG. 6 an integrally formed housing body 20 is shown, which is designed as an extruded part and two parallel aligned partial strands 22 and 24, which form a rotor housing 26 and a chamber housing 28.
  • the Part strands 22 and 24 each have a cylindrical cavity 30 and 32, respectively.
  • the cylindrical cavity 30 is provided for receiving a pump rotor, not shown here, whereas the cylindrical cavity 32 forms at least one, preferably a plurality of vacuum chambers.
  • a further housing body 20 is shown in a side view such that the viewing direction through two cylindrical cavities 30 and 32 passes therethrough.
  • the cylindrical cavity 30 forms a receiving space for a pump rotor, not shown, while the cylindrical cavity 32 forms a plurality of vacuum chambers.
  • the housing body 20 of the Fig. 7 also has a rotor housing 26 and a chamber housing 28. These are integrally connected to each other and designed as a common extrusion. The pressed strand runs into the image plane.
  • mounting openings are preferably provided so that functional elements not shown here can be particularly easily introduced into the vacuum chambers.
  • a mounting opening can be aligned transversely, which is in Fig. 7 corresponds to a direction along the image plane.
  • a mounting opening may be provided on the upper, the right and / or the lower wall of the chamber housing 28.
  • two mounting holes 36 are visible, which are arranged here in an example facing away from the rotor housing 26 wall of the chamber housing 28.
  • wall of the extruded profile and the housing body 20 are preferably also a plurality of openings arranged, which in the axial direction, in Fig. 7 So in the direction of the image plane, are spaced. These openings form a plurality of ports between the pump rotor and a respective associated vacuum chamber.
  • a vacuum system 40 having a plurality of vacuum chambers 42 connected to respective ports of a split-flow vacuum pump 44.
  • the ports are realized through openings 46 between a pump rotor 48 of the split-flow vacuum pump 44 and the vacuum chambers 42.
  • the vacuum chambers 42 are axially separated from one another by walls 50 but, in this example, interconnected by small openings in the walls 50 so that a small fluid flow is still possible.
  • a mounting opening 36 is provided for functional elements, which may be provided depending on the application, a plurality of mounting openings 36 for a vacuum chamber and / or a vacuum chamber has no separate mounting opening in the transverse direction, but is equipped, for example by an axial opening with a functional element ,
  • the pump rotor 48 in this example comprises two spaced turbo stages 52 and a Holweck stage 54. Apart from the in Fig. 8 Upper opening 46, the openings 46 are each arranged between spaced pumping stages of the pump rotor 48.
  • the pump rotor 48 is arranged inserted in a rotor housing 26.
  • the vacuum chambers 42 are formed in a chamber housing 28.
  • Rotor housing 26 and chamber housing 28 are formed by a common housing body 20 which is made by extrusion.
  • the openings 46 are provided in a wall of the housing body 20 between the vacuum chambers 42 and the pump rotor 48.
  • the openings can, for example, be introduced into the extruded profile by means of a clamping tool engaging behind, for example a T-slot cutter.
  • a clamping tool engaging behind, for example a T-slot cutter.
  • the cutting tool for this axial, in Fig. 8 from top to bottom or from bottom to top, in the rotor housing 26 and / or the chamber housing 28 retracted and then be delivered towards the wall.
  • a pump base 56 is located at in Fig. 8 arranged lower axial end of the housing body 20 and fixed in a manner not shown here on the housing body 20, for example, on projections 34, as in the 6 and 7 are shown.
  • the pump base element 56 comprises a drive and a bearing for the pump rotor 48.
  • the pump base element 56 opposite end of the pump rotor 48 is preferably also stored, for example via a supported in the rotor housing 26 carrier, in particular a so-called star, and for example by means of a magnetic bearing.
  • no vacuum chamber In an axial region corresponding to the pump base member 56 adjacent to the pump base member 56 and in extension of the vacuum chambers 42 in this example, no vacuum chamber, but an otherwise functional portion 58 is provided, for example, a control for the introduced into the vacuum chambers 42 functional elements or, for example, a control for the Vacuum pump 44 may include.
  • the in Fig. 8 lower vacuum chamber 42 but also project into the axial region of the pump base member 56.
  • the pump base element 56 and the functional section 58 are arranged here at a pressure-side end of the vacuum system 40.
  • the chamber housing 28 is formed longer than the rotor housing 26. The free axial portion in extension of the rotor housing 26 may be removed, for example, after the extrusion of the housing body 20, since it is not used in this embodiment.
  • an axial area not occupied by the vacuum pump 44 and / or the pump rotor 48 can be used for other purposes, for example in order to optimally utilize the entire installation space.
  • a vacuum chamber 42 for example with arranged therein functional elements, is provided in the rotor housing 26 forming sub-strand 22 .
  • the vacuum chamber 42 arranged in the sub-strand 22 is connected in this example through openings to an inlet region of the vacuum pump 44 and to an adjacent vacuum chamber 42 arranged in the other sub-strand 24.
  • the vacuum pump 44 comprises an outlet connection, in particular a pre-vacuum connection 62. At the same pressure level, an opening 64 to a further vacuum chamber 42 is provided. The opening 64 is likewise introduced in the extruded profile or the housing body 20 in this example.
  • the Fig. 10 shows a vacuum system 40, which in the internal structure, for example, at least partially that of Fig. 9 can correspond. While in Fig. 9 the sub-strands aligned vertically during operation, are generally also a horizontal arrangement, eg according to Fig. 10 , and other arrangements possible.
  • FIG. 2 shows an exemplary vacuum system 40 with two vacuum chambers 42 designed as a mass spectrometry system.
  • An in Fig. 11 upper, low-pressure side, the vacuum chambers 42 is both in the sub-strand 22 and formed in the sub-strand 24, wherein an opening 46 connects the arranged in the sub-strands portions of the vacuum chamber 42.
  • a first vacuum chamber 42 a first quadrupole 68 is arranged, wherein the first vacuum chamber 42 is connected to an intermediate inlet of the vacuum pump 44.
  • a second quadrupole 70 is arranged in a second, the low-pressure side vacuum chamber 42.
  • An ion stream to be analyzed first passes through the first and then through the second quadrupole 68, 70, wherein an unillustrated deflection device is provided for the ion current between the quadrupoles. After passage of the second quadrupole 70, the ion current impinges on a detector 72. The quadrupoles and the detector 72 form functional elements in the vacuum chambers 42.

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
EP19158341.8A 2019-02-20 2019-02-20 Système à vide et procédé de fabrication d'un tel système à vide Active EP3564538B1 (fr)

Priority Applications (2)

Application Number Priority Date Filing Date Title
EP19158341.8A EP3564538B1 (fr) 2019-02-20 2019-02-20 Système à vide et procédé de fabrication d'un tel système à vide
JP2020021459A JP7221891B2 (ja) 2019-02-20 2020-02-12 真空システム及びこのような真空システムを製造するための方法

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Application Number Priority Date Filing Date Title
EP19158341.8A EP3564538B1 (fr) 2019-02-20 2019-02-20 Système à vide et procédé de fabrication d'un tel système à vide

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EP3564538A1 true EP3564538A1 (fr) 2019-11-06
EP3564538B1 EP3564538B1 (fr) 2021-04-07

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JP (1) JP7221891B2 (fr)

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
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US6336356B1 (en) * 1998-10-01 2002-01-08 Alcatel Compact leak detector
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EP3067565A1 (fr) * 2015-03-13 2016-09-14 Pfeiffer Vacuum Gmbh Pompe à vide
US20180163732A1 (en) * 2015-06-01 2018-06-14 Edwards Limited Vacuum pump
EP3296571A1 (fr) * 2017-07-21 2018-03-21 Pfeiffer Vacuum Gmbh Pompe à vide

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JP7221891B2 (ja) 2023-02-14
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