EP3335062A1 - Composant optique à élément de déviation de rayonnement, procédé de fabrication de celui-ci et élément de déviation de rayonnement adapté au composant - Google Patents

Composant optique à élément de déviation de rayonnement, procédé de fabrication de celui-ci et élément de déviation de rayonnement adapté au composant

Info

Publication number
EP3335062A1
EP3335062A1 EP16750800.1A EP16750800A EP3335062A1 EP 3335062 A1 EP3335062 A1 EP 3335062A1 EP 16750800 A EP16750800 A EP 16750800A EP 3335062 A1 EP3335062 A1 EP 3335062A1
Authority
EP
European Patent Office
Prior art keywords
radiation
exit
strahlumlenkelements
deflection
causes
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP16750800.1A
Other languages
German (de)
English (en)
Inventor
Ruth Houbertz
Moritz Esslinger
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Multiphoton Optics GmbH
Original Assignee
Multiphoton Optics GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Multiphoton Optics GmbH filed Critical Multiphoton Optics GmbH
Publication of EP3335062A1 publication Critical patent/EP3335062A1/fr
Withdrawn legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/42—Coupling light guides with opto-electronic elements
    • G02B6/4201—Packages, e.g. shape, construction, internal or external details
    • G02B6/4204—Packages, e.g. shape, construction, internal or external details the coupling comprising intermediate optical elements, e.g. lenses, holograms
    • G02B6/4214—Packages, e.g. shape, construction, internal or external details the coupling comprising intermediate optical elements, e.g. lenses, holograms the intermediate optical element having redirecting reflective means, e.g. mirrors, prisms for deflecting the radiation from horizontal to down- or upward direction toward a device
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/42—Coupling light guides with opto-electronic elements
    • G02B6/43—Arrangements comprising a plurality of opto-electronic elements and associated optical interconnections
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29D—PRODUCING PARTICULAR ARTICLES FROM PLASTICS OR FROM SUBSTANCES IN A PLASTIC STATE
    • B29D11/00—Producing optical elements, e.g. lenses or prisms
    • B29D11/00009—Production of simple or compound lenses
    • B29D11/00365—Production of microlenses
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29D—PRODUCING PARTICULAR ARTICLES FROM PLASTICS OR FROM SUBSTANCES IN A PLASTIC STATE
    • B29D11/00—Producing optical elements, e.g. lenses or prisms
    • B29D11/00663—Production of light guides
    • B29D11/00692—Production of light guides combined with lenses
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B33—ADDITIVE MANUFACTURING TECHNOLOGY
    • B33Y—ADDITIVE MANUFACTURING, i.e. MANUFACTURING OF THREE-DIMENSIONAL [3-D] OBJECTS BY ADDITIVE DEPOSITION, ADDITIVE AGGLOMERATION OR ADDITIVE LAYERING, e.g. BY 3-D PRINTING, STEREOLITHOGRAPHY OR SELECTIVE LASER SINTERING
    • B33Y80/00—Products made by additive manufacturing
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/42—Coupling light guides with opto-electronic elements
    • G02B6/4201—Packages, e.g. shape, construction, internal or external details
    • G02B6/4204—Packages, e.g. shape, construction, internal or external details the coupling comprising intermediate optical elements, e.g. lenses, holograms
    • G02B6/4215—Packages, e.g. shape, construction, internal or external details the coupling comprising intermediate optical elements, e.g. lenses, holograms the intermediate optical elements being wavelength selective optical elements, e.g. variable wavelength optical modules or wavelength lockers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00—Semiconductor lasers
    • H01S5/005—Optical components external to the laser cavity, specially adapted therefor, e.g. for homogenisation or merging of the beams or for manipulating laser pulses, e.g. pulse shaping
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00—Semiconductor lasers
    • H01S5/10—Construction or shape of the optical resonator, e.g. extended or external cavity, coupled cavities, bent-guide, varying width, thickness or composition of the active region
    • H01S5/18—Surface-emitting [SE] lasers, e.g. having both horizontal and vertical cavities
    • H01S5/183—Surface-emitting [SE] lasers, e.g. having both horizontal and vertical cavities having only vertical cavities, e.g. vertical cavity surface-emitting lasers [VCSEL]
    • H01S5/18386—Details of the emission surface for influencing the near- or far-field, e.g. a grating on the surface

Definitions

  • the present invention relates to a (micro) optical component, which may be present as such or integrated into a component with further optical and / or electronic components.
  • the device according to the invention comprises a beam deflecting element which is designed such that it emits electromagnetic radiation substantially vertically from a light emitter or via a grating for radiation decoupling or the like (in general: radiation output element) or substantially vertically into a detector or detector Grating for radiation coupling (generally: radiation input element) occurs, under particularly favorable geometric conditions from the light source and in a light-receiving structure (or in the room) direct or from a light-emitting structure (or space) and in the optical Can steer input.
  • a beam deflecting element which is designed such that it emits electromagnetic radiation substantially vertically from a light emitter or via a grating for radiation decoupling or the like (in general: radiation output element) or substantially vertically into a detector or detector Grating for radiation coupling (generally: radiation input element) occurs, under particularly favorable geometric conditions from the light
  • Strahlumschelement is located directly on a radiation input or output of a on or on the optical component located Strahlseingangs- or
  • Optical or optoelectronic components usually contain one or more
  • Radiation input or output elements such as light emitters (e.g., VCSEL,
  • edge emitting laser, LED LED
  • detectors gratings for light coupling
  • gratings for light coupling gratings for light
  • Light extraction and beam deflector in a photonic chip or board. These are usually located on a substrate and send or receive electromagnetic radiation substantially perpendicular or at a slight angle to the substrate surface.
  • a light guide e.g. made of glass, directly on the radiation input or
  • JP 2005/338696 A has a concave mirror, which is incorporated in an inclined surface of a recess to effect a corresponding beam deflection. According to
  • Optoelectronic printed circuit board which is described in JP 2008/250007 A, also contains a waveguide whose core is provided at its end with a mirror having a slope of 45 °, so that the radiation from the waveguide by 90 ° in a
  • the described optical substrate also includes a waveguide on a surface of the substrate; There is an opening with a reflective recess provided, which is coated with metal.
  • US 201 1/0262081 A1 describes an active optical connection of at least one optoelectronic element, which is connected via a wire connection to a substrate.
  • the wire bond is embedded in a polymerized material that has a light deflecting
  • Light deflecting means integral with the VCSEL enclosures, contacting wire terminals, wire bonds and fiber feed channels and end-to-end
  • Feed hopper openings is formed of UV-curable epoxy resin, by means of a PDMS intermediate punch. Its exposed to the atmosphere surface may be flat or curved like a concave mirror, so that a maximum
  • WO 2006/012819 describes a semiconductor laser component with a semiconductor laser chip provided for generating radiation and an optical device which has a semiconductor laser chip
  • Carrier Carrier, a radiation deflecting element arranged on the carrier and an external mirror arranged on the carrier of an external optical resonator.
  • Radiation deflecting element is anodically bonded to the carrier, glued or soldered and is designed for deflecting at least part of a radiation generated by the semiconductor laser chip and reflected by the external mirror radiation. It may be a glass prism, and preferably deflects the incident radiation through an angle of 90 °, with its reflector surface enclosing an angle of approximately 45 ° with the major surface of the carrier. In one alternative, it is highly reflective for a first radiation and highly transmissive for a frequency-converted radiation elsewhere, for which the reflector surface can be coated accordingly. In a further alternative, it may be embodied as a preferably dichroic beam splitter. A printed circuit board element with a substrate, one in a layered one
  • a photopolymerizable optical material embedded optoelectronic component and with a light waveguide optically coupled thereto is described in WO 2007/128022 A2.
  • a prefabricated deflecting mirror is arranged, which is embedded in the optical material.
  • the deflection mirror may be made of silicon or glass, for example
  • Metal coating be prefabricated and preferably consists of a prismatic body with a tapered or concave mirror surface. It is applied in particular by gluing to the substrate.
  • the optical waveguide is patterned within the photopolymerizable optical material by means of TPA (two-photon absorption) such that it ends either directly at the deflection mirror or shortly before.
  • a slightly different deflecting mirror shows WO 2007/128021 A1. It consists of a transparent material that can be molded, for example, an inorganic-organic hybrid polymer or silicone. It has the approximate shape of a hemisphere or is aspherical and is mirrored on its outside or back surface. It is produced in a multi-step process from an optical replication material, ie a not yet finally cross-linked hybrid polymer or silicone, which is preferably present as a sol-gel material. On the unshaped applied sol-gel material, a transparent mask is placed, which has corresponding recesses, and then the material is exposed through the mask and thus solidified.
  • the concave structures proposed in the prior art have the advantage over the simple beam deflection surfaces that they not only redirect the incident beam but can also focus it.
  • focusing mirror remains the following:
  • the emitted light beam from the beam source is deflected and focused on a single surface, such that the light rays emerge as the most parallel bundle of the deflector.
  • the height of the jet thereby determines the diameter of the outgoing bundle.
  • An ideal thin lens or mirror (the concave structure) does not change the beam positions, only the directions.
  • the focusing element collimates the beam in parallel, the beam diameter does not change after hitting the lens. He must therefore already have the target diameter at the position of the lens or the mirror.
  • the distance between the beam source and the lens or the mirror is therefore fixed.
  • Smaller deflection mirrors would be advantageous, however, because they allow the production of more compact, smaller and above all lower optical components and "packages". With smaller deflecting mirrors, however, it may be that either the desired desired jet height or the desired
  • Beam diameter is not reached.
  • An optical deflection structure with mirror and collimator lens with dimensions of 0.5 to 1 mm in diameter is shown in the optoelectronic circuit of US 2006/239605 A1.
  • light incident on a fiber is deflected by 90 ° through a collimator and then coupled into a Si-IC waveguide.
  • the IC has on the collimator lens
  • a focusing Si lens opposite side a focusing Si lens.
  • An optical element for coupling light of a fiber into a light-receiving element is shown in WO 201 1/135877 A1.
  • the element has an area for incident light and a surface for outgoing light, one of which is flat and the other is curved. At a light-reflecting surface, the incident light is deflected by 45 ° and directed to the surface for light failure. With this element, the height of the optical device can be reduced.
  • the object of the invention is to provide optical components for coupling electromagnetic radiation with deflecting elements, in which at low height, the beam height and the diameter of the emitted beam can be set independently. Furthermore, it is the object of the invention to further miniaturization
  • optical component comprising
  • a beam deflecting element (3) disposed on the radiation output / input element (2) and configured to deflect electromagnetic radiation exiting the radiation output element (2) substantially vertically to the substrate surface (1) while transmitting a beam forms, compared to the exit angle, which is the
  • Radiation output element leaving beam forms with the substrate surface has a smaller or even negative angle or is aligned parallel to the substrate surface, or that there is electromagnetic radiation with a certain angle to
  • Substrate surface enters the Strahlumschelement (3), focused and in the
  • Radiation input element (2) directs
  • the Strahlumlenkelement (3) has an entrance surface for incoming radiation and an exit surface for this radiation and at least two the path of the radiation passing through the element influencing surfaces, one of which has a deflection causes at least a portion of the incident radiation and the other causes the beam divergence and / or the beam shape changes, characterized in that at least one of the entrance and the exit surfaces of Strahlumlenkelements is planar, such that they at least partially directly on a Exit or entrance surface of said radiation output or input element is located.
  • the method of manufacturing this device is characterized in that the beam deflecting element (3) is formed by photoinduced solidification of a photopatternable material directly in place from a suitable, generally small, quantity, e.g. a drop of the starting material out on the optical device is generated. This makes it possible for the first time to arrange this deflecting element or coupling element directly on a radiation output and / or input element, without the need for an adhesive or another holding structure.
  • This process reduces the overall height by the height of the adhesive, with which separately manufactured beam deflecting elements had previously to be fastened on the radiation output / input element.
  • this adhesive is of relevance for the beam guidance; its optical properties must be taken into account when calculating the beam guidance.
  • the elimination of the adhesive by the method according to the invention therefore not only leads to a further reduction in height, but also to a simplification of
  • the beam deflecting element is produced by means of 2-photon or multiphoton absorption (TPA, MPA), as shown in more detail below.
  • TPA 2-photon or multiphoton absorption
  • the invention also relates to special Strahlumauchieri that are suitable for the present invention.
  • These beam deflecting elements are designed to be mounted on a radiation output and / or input element of an optical component, e.g. a photonic chip or a photonically integrated circuit (PIC, Photonics Integrated Circuit), provided and therefore have dimensions of less than 1 mm, preferably of less than 600 ⁇ in each of the three spatial directions.
  • the beam deflection elements have an entrance surface for incoming radiation and an exit surface for this radiation and are formed such that at least either the entrance surface or the
  • Exit surface is flat, such that it can come to rest on an exit or entrance surface of a Strahlungsausgangs- or -eingangselements.
  • the entrance surface and the exit surface are arranged at an angle to each other which is preferably between 70 and 110 °, more preferably between 80 and 100 °, and most preferably about 90 °. However, the angle may be less than 70 ° in special cases.
  • Beam deflectors have at least two the way through the element On the passing radiation influencing surfaces, one of which causes a deflection of at least a portion of the incident radiation and the other causes the beam divergence and / or beam shape changes. They are characterized by either:
  • the surface causing a change in the beam divergence and / or the beam shape is a diffractive optical element, a lens, a lens combination, a surface hologram, a volume hologram, a metamaterial or a combination of a plurality of said elements inside the beam deflecting element, or that said surface is a diffractive optical element on a reflective surface of said beam deflecting element, said incident radiation entrance surface and said radiation exit surface preferably being an angle of between 70 and 110 °, more preferably between 80 and 100 ° and particularly preferably about 90 ° to each other, or
  • Strahlumschelements is flat, such that they on an exit or
  • the second part of the Strahlumlenkelements is arranged for mounting on a substrate, wherein the first part of the Strahlumlenkelements has a surface which causes a deflection of at least a portion of the incident radiation, and the second part of the
  • Beam deflecting a surface which causes the beam divergence and / or beam shape changes, or vice versa, or
  • Beam divergence and / or beam shape are components of a lens, a sequence of two or more lenses, a Fresnel zone plate, a grating, a diffractive optical element, a surface hologram, a volume hologram or a metamaterial, or
  • surfaces which influence the radiation are understood to mean the following: an optically effective interface of the element (a) with the ambient atmosphere (eg air) or (b) with a material surrounding the beam deflecting element, such as that of a light guide, wherein the optical efficiency is on the difference in refractive index of the material constituting the element at least at this interface, for
  • Refractive index of the environment or (c) an optically active interface within the element, e.g. can be caused by the fact that two materials with different refractive indices meet within the element.
  • the jet deflection element in question must be arranged at least as far on this surface that the beam guidance, as described herein, is possible. It can be arranged completely (and of course directly) on this surface; However, it may possibly survive, so that a part of it is not arranged on this surface. "Visually effective" means that the aforementioned interfaces the direction of
  • Affect light rays in a beam i. have a refractive power, e.g. by diffractive elements, refractive elements or reflective elements.
  • a single interface may perform several of these functions, e.g. act as a beam splitter.
  • “Focusing” is to be understood according to the invention as a rule the effecting of a beamforming change, wherein the rays behind the focussing surface (the surface with refractive power) run in the direction of a focal point (converging beam).
  • the term is also used in a broader sense of general beamforming, e.g. a beam expansion, used (divergent beam). The respective meaning is readily apparent to a person skilled in the field of optics.
  • colllimation the invention usually understands a parallelization of the beam. However, this expression is also widely used in some contexts of the invention, which recognizes the relevant trained expert readily.
  • a reflection at a reflective effective interface can be effected solely on the basis of the mentioned refractive index difference; alternatively, the corresponding surface may be an outer surface of the deflecting element, e.g. is a coated with a reflective metal surface.
  • the look can be a better one Achieve imaging performance, if the micro-optical device has at least two surfaces with refractive power.
  • the improvement can be made in particular
  • a color correction e.g. by combining a diffractive optical element (DOE) and a lens, and / or
  • DOE diffractive optical element
  • the optical component has a radiation output element on which the beam deflecting element is arranged.
  • the radiation enters from the radiation output element in the Strahlumschelement, is deflected there and thereby forms a beam which is opposite to the exit angle, the
  • Radiation output element leaving beam forms with the substrate surface has a smaller or even negative angle or is aligned parallel to the substrate surface.
  • the beam formed by the deflector may be a parallel or focused (i.e., possibly also flared) beam. It should be understood, however, that the explanation of these embodiments vice versa also apply to those embodiments in which a beam from the outside to the
  • Radiation input element is conducted (coupled). In these cases, the incident beam is deflected and focused so that it can enter the radiation input element.
  • the substrate may be any substrate as commonly used for optical or photonic purposes, e.g. a printed circuit board, a rigid or flexible substrate, e.g. a film, in particular of an organic polymer, or a chip, for example a silicon chip, an InP chip or a triplex chip, or in general a photonically integrated circuit.
  • a substrate On a surface of this substrate is at least one
  • Radiation output element or radiation input element The
  • Radiation output element may be selected from active elements, such as light emitters (e.g., lasers, VCSELs, LEDs), and passive elements, the light supplied to them
  • active elements such as light emitters (e.g., lasers, VCSELs, LEDs), and passive elements, the light supplied to them
  • the radiation input element can also be selected from active elements (eg, sensors, detectors) and passive elements, such as light-introducing gratings or Deflecting mirrors in the substrate.
  • the radiation output and input elements used in accordance with the invention have in common that they couple or decouple light perpendicular or substantially perpendicular to the surface or at small angles to the solder, preferably below 20 °, particularly preferably smaller than or equal to 10 ° ,
  • the substrate and the radiation output element are identical, for example in the case of an LED, which simultaneously serves as a substrate and emits light.
  • the substrate can
  • the components used according to the invention can preferably be assigned to the micro-optics, ie have the smallest possible dimensions.
  • the beam deflecting element according to the invention is arranged, as a rule in such a way that it has a flat surface on the or a planar surface of the radiation output /
  • the beam deflecting element is formed of one or more materials having a refractive index suitable for the desired purposes. Often and in a favorable manner, this is 1, 50 or more, but sometimes less.
  • the suitable materials and manufacturing options are given below.
  • the size is also suitably chosen according to the purpose; However, it should be noted that the invention enables the use of very small Strahlumlenkemia, for example, have dimensions in the range of less than about 1 mm to 500 ⁇ height, preferably less than about 300 ⁇ .
  • Exemplary beam deflecting elements have dimensions of about 200 ⁇ m or below in the "simple” shapes explained in more detail below, some even only about 100 ⁇ m in height and about 150 ⁇ m in width, the "composite" shapes have a similar height but a larger width , Due to the low height of the invention
  • Strahlumschelements is the generation of optical components possible that require extremely little space, but allow for the reasons mentioned above, an extremely accurate light conduction and control.
  • the beam deflecting element is shaped such that the electromagnetic radiation emerging from the radiation output element (which usually has a beam angle of about 7-10 °) (mostly, but not always, first) onto a plane or curved interface the Strahlumlenkelements meets with at least partially reflective properties.
  • This surface may be flat or curved, ie it may additionally have collimative or focussing (also jet-widening) properties.
  • This surface is usually an outer surface of the Strahlumlenkelements, which may optionally be mirrored to improve the reflection effect.
  • this surface serves as a beam splitter, that is to say a part of the radiation is reflected, while another emerges from the beam deflecting element with refraction at this point.
  • this surface is diffractive, ie, it may be formed, for example, as a grating or as a phase plate similar to a Fresnel zone plate or as a DOE or the shape of a volume-structured refractive index modulation
  • the part directed into the interior is reshaped again at the latest on leaving the beam deflection element. This is often done via a lenticular element, wherein either (or more in the case of below described in more detail Strahlumlenkianon: the last) exit surface of the Strahlumlenkelements is curved and / or the beam through a disposed inside the element lens made of a material with a different refractive index is passed.
  • the curvature of the lens in combination with the refractive index difference between the material of the deflecting element and that of the external environment, can be chosen such that a parallel beam, a converging beam or a diverging beam emerges from the element.
  • it is a non-curved exit surface. This is possible if the refractive index difference between the material of the deflecting element and that of the external environment in combination with the angle at which the beam impinges on this surface, an additional deflection, for example, a (stronger) convergence of the radiation beam compared to its shape effected in the interior of the deflecting element.
  • the beam inside the deflecting element is a diffractive optical element, a lens, a lens combination, a surface hologram, a volume hologram, a metamaterial (a microscopically wavelength or sub-wavelength scale structured material), or a combination of several the elements mentioned beam-shaped or focused.
  • This element may alternatively or additionally have a wavelength-dependent optical effect.
  • the beam is first detected by the aforementioned
  • the beam deflecting element is formed in two or more parts, wherein a first part as described above for the entire beam deflecting element directly on or on at least one of the radiation output / input elements is arranged and usually protrudes over this something.
  • a second part is arranged at a position on the surface of the substrate such that it is necessarily located directly in the beam path of the radiation emerging from the first part (or at least a part thereof).
  • the at least two areas influencing the path of the radiation passing through the element are divided between the two parts, so that the part located on the radiation exit / input element has (in most cases) the area which the deflection At least a portion of the incident radiation causes, while the other surface, which causes a change in the beam diameter is located on the second part of the deflecting (in the rarer cases, however, vice versa).
  • the first part of the deflecting element can be formed very simply, with only flat surfaces, one of which serves for the refraction of rays as described above.
  • the second part can then be, for example, a lens, which may be seated on a suitable neck, or a corresponding lens sequence which forms the beam emerging from the first part. This can be used as a parallel beam, as
  • a radiation output element and a radiation input element are located on the surface of the substrate.
  • a Strahlumschelement is arranged, wherein the two deflecting elements are aligned with each other, that of the one
  • Beam deflecting emerging beam enters the other beam deflection.
  • the beam emerging from the first beam deflecting element represents a parallel beam.
  • the two deflection elements may have an identical geometry without this being a necessary criterion, and are thus able to radiate the radiation emitted by the radiation output element into the
  • the two beam deflection elements are arranged on radiation input and output elements which are not located on the same substrate surface, but on eg the substrates of two juxtaposed optical components, which in turn on a further electrical and / or optical component having chip or other substrate are attached.
  • the deflecting serve in this specific variant of the introduction of light emerging from the first optical element, in a detector or a grating for light coupling on the second optical element.
  • the two deflection elements can be geometrically identical or different.
  • Beam deflecting elements which are referred to herein as "simple".
  • the invention also includes so-called “composite elements”. This is not to be understood as meaning the multipart elements described above, but elements which have the necessary functions and geometries of the "simple elements” twice, and often, but not necessarily, in mirror-symmetrical form. They can therefore be formally defined as two "simple" elements.
  • a composite element which is disposed on a radiation output element and a radiation input element as described for the "simple" elements.
  • the radiation beam leaving the output element preferably strikes a first, planar or curved one
  • This surface is usually an outer surface of the Strahlumschelements, which may optionally be mirrored to improve the reflection effect.
  • this surface serves as a beam splitter, i. one part of the radiation is reflected, another one leaves the beam deflection element with refraction at this point.
  • this surface is diffractive, i.e. it is e.g. as a phase plate, grid or DOE trained.
  • Curved mirror surface gives the beam the shape of a parallel beam, which runs parallel to the substrate surface in the Strahlumschelement until it on a
  • this composite element serves to radiation emitted from the radiation output element in the
  • Beam deflection on a second, the beam diameter changing surface is preferably part of a lens made of a material which differs from the rest of the material of the element and has a different refractive index than the latter, the beam exiting again on the other side of the lens.
  • a diverging beam issuing from the mirror can be focused through the lens.
  • This beam is then guided to the opposite mirror surface as described above for the "simple elements" and finally enters the radiation input element.
  • a sequence of lenses or another optical element may also be provided, for example a Fresnel zone plate, a grating, a diffractive optical element, a surface hologram
  • volume hologram or a metamaterial does not serve as a beam guide for emerging from the radiation output element
  • the beam can first be guided by the aforementioned element or the corresponding element combination and only then applies to the planar or curved interface of the Strahlumschelements with at least partially reflective properties.
  • a second such element or such element combination may be provided; but it can also be left out.
  • the beam deflecting element has
  • Recesses or undercuts Such designs are not feasible with the previously proposed for Strahlumschijn manufacturing method. However, a number of the production methods which can be used according to the invention can be used to obtain such designs.
  • the beam emerging from the beam deflecting element can be arbitrarily shaped due to the large number of possible geometrical shapes and refractive index differences; it can be divergent or convergent and within the possible geometry any Have diameter. Also, the beam profile and the wavefront are not geometrically limited. In addition, the beam can be split, wherein a beam splitting in two or more parallel or in different directions pointing partial beams is possible; conversely, several beams can be merged (multiplexing).
  • beam splitting can also take place according to wavelengths.
  • the beam deflection element according to the invention is used to guide radiation from a radiation output element into a waveguide (optical waveguide) (or vice versa). This can start directly on a (then mostly flat) surface of Strahlumlenkelements; However, the light beam can also be passed through an intermediate medium, for example air or an embedding material, before it hits the entrance of the light guide.
  • the radiation may have any wavelengths of the electromagnetic spectrum; Frequently, wavelengths of 1550 or 1310 nm are used, as well as visible or 850 nm, and possibly 980 nm. Materials at these wavelengths
  • the beam deflection element according to the invention can be used in particular for the following tasks:
  • the beam deflecting element of the present invention may be made of various optically suitable materials, which in particular are also highly transmissive to the above wavelengths and thus show only very low damping behavior.
  • These include glasses, organic polymers and inorganic-organic hybrid polymers, which in addition to organically polymerized groups usually contain an inorganic network of Si-O-Si bonds, wherein a part of the Si atoms may be replaced by other metal atoms.
  • Such hybrid polymers are known in the art. Depending on the manufacturing technique, other materials can be used.
  • These materials preferably have refractive indices in the range between 1.3 and 1.6, and it is possible in particular for some purely organic materials to have relatively low refractive indices, while inorganic-organic hybrid materials generally depend on the (specifically adaptable) design
  • Another possibility is the production by means of laser sintering of SiO x powder in SD printing, or by means of 3D printing with organic polymers or inorganic-organic hybrid polymers.
  • a (in some cases structuring) solidification with light eg UV light
  • annealing steps can be used to achieve this
  • the resulting glass or polymer body can then optionally be polished.
  • photopatternable materials are favorable. These may be, for example, organic polymers, such as addition polymers (acrylates, methacrylates, vinyl, allyl or styryl group-containing polymers or epoxy polymers), or inorganic-organic
  • Be hybrid polymers which have an inorganic network (usually with Si-O-Si bridges, in which a part of the Si atoms may be replaced by other metal atoms) and organically crosslinked groups (eg vinyl, allyl, styryl, acrylate, Methacrylate groups, norbornene groups, crosslinked
  • organically crosslinked groups eg vinyl, allyl, styryl, acrylate, Methacrylate groups, norbornene groups, crosslinked
  • Epoxy groups Such materials are disclosed, for example, in WO 03/031499 A2; they often have, as mentioned above, a refractive index of 1, 50 or more, ie a very favorable value for the purposes of the invention. Because of the high variability of the However, inorganically and organically crosslinked hybrid polymers can also be set lower refractive indices. Due to the photostructurability, both the purely organic and the inorganic-organic hybrid materials can be patterned out of a bath material by gray-scale lithography or stereolithography, as known in the art. For this purpose, inorganic-organic hybrid polymers are particularly advantageous, because they usually have a hydrolytic condensation reaction of the monomers
  • a photostructuring such as stereolithography, used, may possibly more
  • Components of the optical component can be generated in this way.
  • the photopatternable material is thermally solidifiable, a combination of photopatterning and thermal consolidation, e.g. one
  • Post consolidation can be used to obtain the final solidified element. Of course, this is preferably done after development.
  • the beam deflecting elements according to the invention should generally
  • Surface roughness ranging from very fine (in the single-digit nm range, i.e. below 10 nm) up to 100 nm, preferably of at most 50 nm.
  • the beam deflecting element if appropriate together with further components of the optical component which can be generated by this technique, are produced with the aid of so-called 2-photon or multiphoton absorption (TPA, MPA, "two-photon absorption").
  • TPA 2-photon or multiphoton absorption
  • This technique is known and described in more detail, for example, in WO 03/037606 A1, namely there by the polymerization of inorganic-organic hybrid polymers (organically modified, organically polymerizable silicic acid (hetero) polycondensates or siloxanes).
  • TPA / MPA can also be used to create bodies from purely organic, photopatternable materials be used.
  • the bodies are generally structured out of a liquid "bath” material.
  • the advantage of this technique over stereolithography lies in the possibility of structuring even very small bodies very precisely and of being able to form free forms with very high surface quality.
  • Roughness values of 10 up to 50 nm, depending on the material can also be achieved from 100 nm.
  • beam deflection elements can be generated separately (possibly also simultaneously in multiple implementation) or directly on the spot from a drop of the starting material on the optical component; At the same time, if necessary, further optical components can be produced from the same drop, for example waveguides or prisms. Also with the help of other photopatterning methods, e.g. the above
  • the Strahlumschelement can be applied directly to a radiation input or output, so that can be dispensed with a height claiming and in the optical calculations incoming material for bonding or the like.
  • TPA or MPA processes may also be used to create embodiments of the beam redirecting element having an inner or outer lens, as described below, for example. shown by the basic form E (Fig. 5-1).
  • This lens may e.g. made of glass and in the TPA / MPA process (in this case from a separate bath) serve as a support for solidifying the photopatternable material.
  • the starting material used can be both photochemically structured and thermally solidified, it is possible to use the beam deflecting element as a shaped body having two regions of different primary structure (i.e., regions extending through
  • the different primary and / or secondary structures may have different refractive indices.
  • the appropriate techniques are eg in WO 2014/108546 A2 and WO 2014/108538 A2:
  • the object, in the present case the beam deflection element is brought into the appropriate (external) form and preferably pre-consolidated thermally (in some cases also by floodlight), then laser and TPA / MPA creates an internal structure with different primary and / or secondary structure ("inscribed"), and finally, if desired, in addition a final consolidation can be carried out, which is mandatory, unless preconsolidation took place.
  • thermally already pre-consolidated material can be further processed and influenced by TPA MPA, even if it must be assumed that the possible polymerization reaction already proceeds completely during the thermal pre-consolidation. Nevertheless, at the locations (voxels) where laser light is irradiated at such an intensity that TPA / MPA is possible, the material changes; In particular, it receives a different refractive index.
  • This method is suitable for the production of all such variants of the Strahlumlenkelements invention, in the interior of a
  • two-dimensional surface e.g. a grating, or a volume element is inscribed, for example a lens, each of which influences the beam path of the radiation passing through, be it by reflection, splitting the beam into different ones
  • a waveguide angled at 90 ° and in the bend a photonic structure, such as e.g. a photonic crystal, or otherwise.
  • the beam deflecting element can be produced with this method integrated in a fixed environment.
  • Radiation input or output element provided with a thermally solidifiable and photopatternable liquid material, such as a drop of such material, or even a layer of this material, which can cover the device to a desired level or completely.
  • a thermally solidifiable and photopatternable liquid material such as a drop of such material, or even a layer of this material, which can cover the device to a desired level or completely.
  • This is then preferably pre-consolidated by flooding with light or thermally.
  • the beam deflection element is patterned on the radiation input or output element by means of TPA / MPA.
  • Beam deflection is embedded in the solid material.
  • the waveguide in particular when the beam exit surface of the Strahlumschelements is flat, are formed directly abutting this;
  • there may be a distance between the two elements which the light beam bridges depending on the design, the medium in the intermediate space may be air or another gaseous ambient medium or a solid material, for example that from which the deflection element and / or the waveguide are also produced was (n) as described above).
  • the space around the waveguide can then be filled with a suitable material, for example a solid, a liquid or a gas.
  • a suitable material for example a solid, a liquid or a gas.
  • This material should preferably be either in terms of chemical composition and / or physical properties, in particular of the
  • the material of the waveguide and preferably also differ from that of the Strahlumschelements.
  • a liquid in particular one which can be crosslinked by photochemical and / or thermal processes is used. This may be beneficial, e.g. a higher NA to achieve a higher refractive index difference and thus a higher efficiency of the waveguide.
  • waveguides or other optical elements can be produced by means of TPA MPA, but alternatively also by means of 1-photon polymerization processes. A combination of the different methods is possible. The invention will be explained in more detail below with reference to specific examples. In it is usually the beam path on the way of a
  • a substrate e.g., a photonic chip or a photonics integrated circuit
  • the element 2 can also act as a substrate itself, in this case 1 and 2 are identical.
  • the beam of such an element usually has a beam angle of about 7-10 °.
  • the Strahlumschelement is in all cases directly on the
  • FIG. 1 -1 an embodiment of a micro-optical device is shown with the basic shape (shape G) of a Strahlumlenkelements using a known from the prior art principle of beam deflection.
  • the beam deflection element 3 has a curved surface, which acts as a focusing mirror (mirror plus lens) for the radiation emerging from the radiation output element.
  • the light beam collimated via this mirror emerges from the element 3 via a further surface of the deflection element, which it passes perpendicular to the surface plane and therefore does not influence the beam shape, and enters the free space here.
  • such Strahlumschetti are also embedded in a solid material whose refractive index is different from that of the for the
  • Beam deflecting material used differs.
  • the beam path does not change as a result.
  • the Strahlumschelement shown has a material-saving
  • Fig. 1-2 shows an embodiment with which the desired narrow nominal diameter is achieved, but not the nominal height of the collimated beam, since the distance between the curved surface and the radiation source for
  • FIG. 1-3 shows the opposite case: Although the desired height is reached, but not the target diameter; Here, too broad a beam is generated due to the higher distance between the curved surface and the radiation source.
  • a basic shape A of such a Strahlumschelements is shown by way of example.
  • the element has two outer surfaces influencing the beam shape.
  • the geometry to be chosen in the specific case also depends on the refractive index possessed by the material of the beam deflection element and on the refractive index difference from the refractive index difference surrounding space.
  • the beam leaving the beam source 2 impinges on an optionally (eg with metal) mirrored, flat oblique (outer) surface on which it is reflected. After reflection, beam expansion necessarily continues within the element.
  • the beam moves in the direction of a second (outer) surface influencing it, which is curved like a lens. There the beam is deflected and collimated. He leaves as
  • Parallel beam 4 the deflection element and enters in this embodiment in the free space (for example, air, vacuum), for example, to meet at a certain distance on an element with an optical input, such as a light guide, a sensor, a detector or a grid.
  • an optical input such as a light guide, a sensor, a detector or a grid.
  • Figure 2-2 shows the further path of the collimated light beam, here in an optical fiber. This can consist of glass or another transparent material and with a
  • Such fibers can be e.g. by structuring with TPA MPA within a liquid or preconsolidated material, as described above.
  • the optical fiber may be part of the optical device on which the deflection element 3 is located, and e.g. However, it does not have to be anchored to its surface 1 (it can connect two such elements or guide the light to another object).
  • FIG. 2-3 An alternative to this is shown in FIG. 2-3.
  • the exiting from the deflection element 3, collimated light beam 4 is guided in a radiation input element 5, which is located on the same optical element as the radiation output element 2, via a mirror image formed and mirror image arranged second deflection element. 3
  • Substrate surface 1 out to enter there via a mirror image formed and mirror image arranged second deflecting element 3 in a located on the substrate surface 1 of the second optical element radiation input element 5, for example, a detector or a grating for light coupling.
  • the beam 4 leaving the deflecting element 3 does not necessarily have to be parallel.
  • the lens may be designed to focus on any object can be, as shown schematically by the basic shape B of Figure 3-1. It is immediately apparent that the geometry of the deflection element and the lens shape can be chosen so that instead of a widening beam is generated.
  • FIG. 3-2 shows a variant of the basic form B, in which the beam is focused on the input of an optical fiber.
  • optical fibers glass fibers or e.g. formed by structuring with TPA MPA fibers as shown for Fig. 2-2.
  • this embodiment is suitable for single-mode fibers.
  • Figure 4-1 gives an insight into such embodiments of the invention, in which the Strahlumschelement is formed two or more parts, wherein a first part is disposed directly on or on at least one of the radiation output elements 2 and usually protrudes slightly above this.
  • the first part 3 of the beam deflecting member has a reflecting surface as described for the shapes A and B (Figs. 2 and 3).
  • the light beam is not collimated or focused at the exit from this part of the deflection. He emerges from an area where he depends on the impact
  • the forms C and D are again basic shapes that can be varied in many ways.
  • a lens instead of a lens, a flock of lenses can be used.
  • the exiting jet may propagate into the free environment or enter a surrounding liquid or solid medium as set forth above for the A and B forms.
  • FIG. 5-1 shows an embodiment (basic form E) in which the lens surface 4 is not an outer surface of the beam deflecting element 3 or in which a separate lens is arranged in the beam path of the beam coming from a first part of the deflecting element, but in FIG inside the element is a lens with the surfaces influencing the beam path.
  • This can be realized by using two optically unequal dense materials for the lens and for the material surrounding the lens
  • Deflection element can be used.
  • This variant can be produced, for example, by forming a glass lens in a liquid or pasty organic polymerizable material which is then polymerized in a suitable form, wherein the polymer formed has a different refractive index than the glass lens.
  • a much more elegant way of making is via "writing in” the lens using TPA MPA.
  • the Strahlumlenkelement is prestructured in its outer shape, for example by polymerizing (by light or heat) in a mold, by a stereolithographic process or a
  • the refractive index difference achieved thereby to the material not exposed to the laser light may be sufficient to cause a deflection of the
  • the lens need not necessarily be completely inside the diverter; instead, one of its surfaces may form that (outer) surface of the beam deflection element through which the light radiation exits.
  • the beam deflecting element may also be assembled from the two components of different material, e.g. the lens is fitted in a concave recess of the remaining beam deflecting element and there, e.g. glued or otherwise secured.
  • the exit surface of the deflection element 3 is connected directly to an optical fiber ("butt coupling").
  • This optical fiber may also be a glass fiber, in particular a multimode fiber, or a waveguide structured by TPA / MPA.
  • the beam deflection generally does not necessarily have to take place in the order "first reflection, then beam forming".
  • a modification of the form E is shown, in which the light beam passes first the lens and only then the reflection surface.
  • an element 4 is integrated into the deflection element according to the invention, which is to stand for any element causing a volume structuring, for example a "classical” lens, a sequence of several lenses, a diffractive optical element, a surface hologram
  • Volume hologram or a metamaterial can also be a device for beam convergence (fan-in element) or a device for beam separation (fan-out element).
  • the light beam passes over a curved surface of the
  • the DOE may, for example, be a phase plate in the form of a Fresnel zone plate for focusing.
  • the basic form F shown in FIG. 6-1, shows a variant of the form E with a lens in which the lens is shaped such that no parallel beam but a convergent light beam emerges from the deflection element. This may be directed to any optical element or object, for example the input of an optical fiber (shown in FIG. 6-2) or to a separate lens forming part of the light-deflecting element as explained for the shapes C and D.
  • Figure 6-3 shows on the basis of the basic form F a variant which in the general part of
  • Composite element i. one
  • Beam deflection element which has the necessary functions and geometries of "simple
  • Basic element E in this case mirror-symmetrical (in this case the two outer surfaces of the lens function as the beam divergence and / or the beam shape changing element respectively, assigning one to the first part and the other to the second part of the composite element
  • Such an element may be used to direct radiation from one on the surface 1 of the substrate
  • Radiation output element 2 (a laser or the like) to a arranged on the same surface radiation input element 5 (a detector or the like) to lead, the lens (or alternatively a lens sequence or the like) can be used to properties such as the beam shape and decoupling direction and numerical aperture on the way from the light source to the detector to change.
  • Beam deflection can of course in the same way light from a
  • Transport radiation input element on the surface of a second substrate.
  • the reflection surface of the element may be curved at the same time such that the light beam collimates and parallel to
  • FIGS. 6-4 can be described as a "composite Element of the known from the prior art basic form G, wherein the inventive development of the composite element does not have the technical disadvantage of the coupled functions deflection and focusing adhering to this basic form, since the light beam, the element on its way from
  • Radiation output element to the radiation input element does not leave and therefore both the desired height and nominal diameter of the beam in the context of the geometry of the
  • Deflection element can be chosen arbitrarily.
  • This variant of the invention is also formally subject to the rule because the deflecting element has a first surface which influences the radiation, which causes a deflection of at least part of the incident radiation, and a second surface which influences the radiation, which causes the beam divergence and / or the beam shape changes.
  • this variant ie a deflecting element with only two surfaces influencing the path of the radiation passing through the element, which are two outer, opposing, curved reflection surfaces
  • the variant shown in Fig. 6-4 does not necessarily have to be constructed symmetrically, which otherwise applies to all "composite" Strahlumschetti the invention. For example, the radiation of the radiation output element hits first on one
  • Reflection surface which is curved so that a (e.g., convergent) light beam is formed, whose center of gravity is at an angle to the substrate surface, this light beam can be recaptured on the opposite side by a suitably inclined mirror surface and guided into the radiation input element, see Figure 6-5.
  • the emitter may be e.g. have a different beam divergence than the detector accepts. For example, if the emitter emits a ⁇ 10 ° cone, but the detector accepts only ⁇ 1 ° vertical light, the beam on the second mirror must be very narrow to couple all light into the detector. An asymmetrical beam path is required
  • FIG. 7-1 shows an embodiment of a beam deflection element with a non-curved exit surface.
  • the beam deflecting element includes additional optically active elements.
  • An example is a so-called “multiplexer", which is the optical Paths of the light beam for different wavelengths separates.
  • Such an element may be a grating, a DOE, a hologram, a photonic crystal or a dichroic mirror.
  • this multiplexer can be "written" by TPA MPA directly into the volume of the Strahlumlenkelements. Otherwise, it can be embedded as a prefabricated element in the not yet final solidified material of Strahlumlenkelements, as described above, for example, for the lenses of variant E, Figure 6-1, 6-3.
  • FIG. 8-1 One possible variant of a diverter element containing a multiplexer is shown in FIG. 8-1.
  • a multiplexer 4 divides the beam into two vertical components 7, 8
  • FIG. 8-2 another variant with a multiplexer 4 is shown, which divides the beam into two horizontal components 7, 8, by corresponding lenses 5, 6 from the
  • Strahlumschelement lying radiation output elements enter the deflection, separated by an element written in the volume.
  • This can be used to form parallel, focusing or divergent light beams, e.g. are composed of light of different wavelengths, wherein different parts of the beam, as seen in cross-section, differently contain light of the different wavelengths.
  • a planar grid or otherwise via a planar grid or otherwise
  • a beam are formed whose core forms a common light path for the light emerging from the two radiation output elements 2 and 3, wherein the two radiation output elements emit light of different wavelengths.
  • the deflecting element is shaped such that the light emerging from 2 light of wavelength 1 is mirrored on a mirror surface such that it forms a wider parallel beam after exiting through the lenticular interface of the deflecting than the light emitted from 3 wavelength of 2, the element 5 is mirrored.
  • the element 5 is formed so that the light of the wavelength 1 can pass.
  • this dispersion can be chosen such that both paths in location, direction and diameter are the same. As shown in Figure 8-4, the collimated beam 6 in this case exists at all locations of its
  • Diameter of the same mixture of the two emitted from 2 and 3 wavelengths is also possible to provide a complex volume-structured element in the deflection element, for example a photonic crystal, a hologram or a metamaterial.
  • a complex volume-structured element in the deflection element for example a photonic crystal, a hologram or a metamaterial.
  • the beam scheme that can be achieved with this is the one with the
  • the two radiation output elements need not be located one behind the other with respect to the radiation path, as shown in the examples of FIGS. 8-4 and 8-5, but they may also be arranged side by side. A corresponding example is shown in FIGS. 8-6.
  • FIG. 9 shows electron micrographs of two beam deflection elements of the basic shape A.
  • the left diverter is formed correctly, the right is incomplete (to give an inside view, the top portion is cut away and the rest of the item is hollow).
  • a radiation output element is located under the back of the elements; the ray of light strikes the oblique surface visible on the left, on which it is reflected, on its way upwards. It runs from behind to diagonally forward through the slightly conical shaped body of the element and exits the front of the curved surface.

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Optical Couplings Of Light Guides (AREA)
  • Diffracting Gratings Or Hologram Optical Elements (AREA)
  • Semiconductor Lasers (AREA)
  • Light Receiving Elements (AREA)

Abstract

La présente invention concerne un composant optique comprenant un substrat pourvu d'une surface (1), un élément de sortie de rayonnement (2) situé sur la surface de substrat et/ou un élément d'entrée de rayonnement (2) situé sur la surface de substrat et un élément de déviation de rayonnement (3), ayant des dimensions inférieures à 1 mm dans les trois directions de l'espace, qui est disposé sur l'élément d'entrée ou de sortie de rayonnement (2) sur la surface (1) du substrat et qui est conçu de façon à dévier un rayonnement électromagnétique qui sort de l'élément de sortie de rayonnement (2) sensiblement perpendiculairement à la surface (1) du substrat et à avoir ainsi un angle plus faible ou même négatif par rapport à l'angle de sortie que le faisceau, quittant l'élément de sortie de rayonnement, forme avec la surface du substrat, ou à être orienté parallèlement à la surface du substrat, ou de façon à focaliser le rayonnement électromagnétique qui entre dans l'élément de déviation de rayonnement (3) en formant un angle déterminé par rapport à la surface du substrat, et le dévier dans l'élément d'entrée de rayonnement. L'élément de déviation de rayonnement (3) possède une face d'entrée du rayonnement entrant et une surface de sortie de ce rayonnement et possède au moins deux faces qui influent sur le trajet du rayonnement traversant l'élément, dont l'une provoque une déviation d'au moins une partie du rayonnement incident et dont l'autre provoque la divergence du faisceau et/ou modifie la forme du faisceau. Au moins une des faces d'entrée et de sortie de l'élément de déviation de faisceau a une conformation plane. L'invention est caractérisée en ce que cette face plane est située au moins en partie directement sur une face de sortie ou d'entrée de l'élément d'entrée ou de sortie de rayonnement. L'invention concerne également un procédé de fabrication de ce composant ainsi que des éléments de déviation de rayonnement appropriés.
EP16750800.1A 2015-08-10 2016-08-08 Composant optique à élément de déviation de rayonnement, procédé de fabrication de celui-ci et élément de déviation de rayonnement adapté au composant Withdrawn EP3335062A1 (fr)

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PCT/EP2016/068897 WO2017025515A1 (fr) 2015-08-10 2016-08-08 Composant optique à élément de déviation de rayonnement, procédé de fabrication de celui-ci et élément de déviation de rayonnement adapté au composant

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CA2994206A1 (fr) 2017-02-16
CN108027482A (zh) 2018-05-11
WO2017025515A1 (fr) 2017-02-16
JP2018533033A (ja) 2018-11-08
US20180239096A1 (en) 2018-08-23
CN108027482B (zh) 2021-09-28
HK1253226A1 (zh) 2019-06-14
HK1253676A1 (zh) 2019-06-28
SG11201800870PA (en) 2018-02-27
TW201721205A (zh) 2017-06-16
US10809468B2 (en) 2020-10-20
TWI709776B (zh) 2020-11-11
KR20180039704A (ko) 2018-04-18
JP6877853B2 (ja) 2021-05-26

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