WO2012143070A1 - Procédé de fabrication d'un guide d'ondes dans un polymère - Google Patents

Procédé de fabrication d'un guide d'ondes dans un polymère Download PDF

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Publication number
WO2012143070A1
WO2012143070A1 PCT/EP2012/001109 EP2012001109W WO2012143070A1 WO 2012143070 A1 WO2012143070 A1 WO 2012143070A1 EP 2012001109 W EP2012001109 W EP 2012001109W WO 2012143070 A1 WO2012143070 A1 WO 2012143070A1
Authority
WO
WIPO (PCT)
Prior art keywords
laser beam
polymer
imaging optics
penetration depth
optical waveguide
Prior art date
Application number
PCT/EP2012/001109
Other languages
German (de)
English (en)
Inventor
Jonas Gortner
Susanna Orlic
Christian Stark
Marc Seifried
Original Assignee
Technische Universität Berlin
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Technische Universität Berlin filed Critical Technische Universität Berlin
Publication of WO2012143070A1 publication Critical patent/WO2012143070A1/fr

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Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/13—Integrated optical circuits characterised by the manufacturing method
    • G02B6/138—Integrated optical circuits characterised by the manufacturing method by using polymerisation
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/0006—Working by laser beam, e.g. welding, cutting or boring taking account of the properties of the material involved
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/0604—Shaping the laser beam, e.g. by masks or multi-focusing by a combination of beams
    • B23K26/0608—Shaping the laser beam, e.g. by masks or multi-focusing by a combination of beams in the same heat affected zone [HAZ]
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/064—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
    • B23K26/0648—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms comprising lenses
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/067—Dividing the beam into multiple beams, e.g. multifocusing
    • B23K26/0676—Dividing the beam into multiple beams, e.g. multifocusing into dependently operating sub-beams, e.g. an array of spots with fixed spatial relationship or for performing simultaneously identical operations
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/50—Working by transmitting the laser beam through or within the workpiece
    • B23K26/53—Working by transmitting the laser beam through or within the workpiece for modifying or reforming the material inside the workpiece, e.g. for producing break initiation cracks
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/12002—Three-dimensional structures
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K2103/00—Materials to be soldered, welded or cut
    • B23K2103/30—Organic material
    • B23K2103/42—Plastics
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B2006/12166—Manufacturing methods
    • G02B2006/12169—Annealing
    • G02B2006/12171—Annealing using a laser beam
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B2006/12166—Manufacturing methods
    • G02B2006/12195—Tapering
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/36—Mechanical coupling means
    • G02B6/38—Mechanical coupling means having fibre to fibre mating means
    • G02B6/3807—Dismountable connectors, i.e. comprising plugs
    • G02B6/3873—Connectors using guide surfaces for aligning ferrule ends, e.g. tubes, sleeves, V-grooves, rods, pins, balls
    • G02B6/3885—Multicore or multichannel optical connectors, i.e. one single ferrule containing more than one fibre, e.g. ribbon type
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/42—Coupling light guides with opto-electronic elements
    • G02B6/4201—Packages, e.g. shape, construction, internal or external details
    • G02B6/4249—Packages, e.g. shape, construction, internal or external details comprising arrays of active devices and fibres
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/42—Coupling light guides with opto-electronic elements
    • G02B6/4292—Coupling light guides with opto-electronic elements the light guide being disconnectable from the opto-electronic element, e.g. mutually self aligning arrangements

Definitions

  • the invention relates to a method for producing an optical waveguide in a polymer, wherein a laser beam is focused in the polymer in a focusing point.
  • US 2009/0218519 discloses a method for producing a refractive index change in a photopolymer, wherein a photopolymer is provided with a photosensitivity with respect to light of a certain wavelength and wherein in one region a refractive index change is produced in the photopolymer by lithography, by the photopolymer in the region is exposed to light of the particular wavelength.
  • the aforementioned object is achieved by a method for producing an optical waveguide, in particular a single-mode optical waveguide, a coupler and / or a taper is dissolved in a polymer, wherein a first laser beam of a first wavelength is focused in the polymer in a focusing point, wherein a second laser beam, in particular the first wavelength, is focused in the polymer in the focusing point and crosses the first laser beam, so that the refractive index of the polymer changes in an area around the focal point or increased, wherein the focal point along a particular three-dimensional trajectory is moved by the polymer, and wherein it is advantageously provided that the cross section of the first laser beam and / or the cross ⁇ cut of the second laser beam (in particular in the focusing point or in the region of the focusing point) is changed during the movement of the focusing point. It is particularly provided that the focus point is equal to the intersection of the two laser beams. After completion of the movement along the trajectory, the polymer is advantageously exposed or cured.
  • An optical waveguide according to the invention is particularly suitable for conducting light having a wavelength between approximately 850 nm and 1550 nm.
  • a coupler in the sense of the invention is in particular a coupling to a waveguide.
  • a coupler according to the invention is in particular a transition from a laser diode (VCSEL) to a waveguide.
  • VCSEL laser diode
  • a taper in the sense of the invention is in particular a component which connects two optical waveguides with different diameters.
  • a polymer in the sense of the invention is in particular a polymer whose refractive index changes upon irradiation of light of the first wavelength or which is particularly sensitive to light of the first wavelength or sensitive to light of this wavelength.
  • a polymer in the sense of the invention is in particular a photopolymer. Suitable polymers can be obtained from the companies InPhase, Aprilis, DuPont or Microresist.
  • a polymer in the sense of the invention may in particular be an organic transparent material.
  • a three-dimensional trajectory in the sense of the invention is in particular a trajectory whose course changes in three spatial directions.
  • the first laser beam is generated in particular by means of a first laser.
  • the second laser beam is generated in particular by means of or another laser.
  • a singlemode optical waveguide in the sense of the invention is in particular an optical waveguide in which no higher transverse modes are formed.
  • a singlemode optical waveguide in the sense of the invention is in particular an optical waveguide in which light propagates in a straight line.
  • a singlemode optical waveguide according to the invention is in particular an optical waveguide in which light propagates without impact at the interface.
  • a singlemode optical waveguide according to the invention is in particular an optical waveguide with a diameter of not more than 10 ⁇ .
  • a singlemode optical waveguide in the sense of the invention is in particular an optical waveguide with a diameter of not less than 3 ⁇ m. Further details of single-mode optical waveguides z. B. the websites
  • the aforementioned object is also achieved by a method for producing an optical waveguide, in particular a singlemode optical waveguide, a coupler and / or a tapers in a polymer, wherein a first laser beam of a first wavelength is irradiated into the polymer, wherein a second laser beam, in particular the first wavelength, is blasted into the polymer and crosses the first laser beam at a crossing point, so that the refractive index of the polymer in a region around the crossing point or increases, the crossing point along a three-dimensional trajectory is moved through the polymer, and wherein is advantageously provided that the cross section of the first laser beam and / or the cross section of the second laser beam (in particular at the crossing point or in the region of the crossing point) is changed during the movement of the crossing point.
  • the polymer After completion of the movement along the trajectory, the polymer is advantageously exposed or cured.
  • the aforementioned object is also achieved by a method for producing a light waveguide ⁇ , or a tapers in a polymer, wherein a first laser beam of a first wavelength is irradiated into the polymer, wherein a second laser beam, in particular the first wavelength, blasted into the polymer and crossing the first laser beam at a crossing point so that the refractive index of the polymer changes in a region around the crossing point, and the crossing point moves along the polymer along a three-dimensional trajectory and the cross section of the first laser beam and / or the first laser beam Cross-section of the second laser beam (in particular at the crossing point or in the region of the crossing point) during the movement of the crossing point for generating a transition between a single-mode optical waveguide and a multi-mode optical waveguide (in particular SMF-28 to OM-4) is changed.
  • the polymer After completion of the movement along the trajectory, the poly
  • the area around the focussing point or the crossing point has a diameter of not more than 10 ⁇ m.
  • the first laser beam and / or the second laser beam impinge obliquely on a surface of the polymer.
  • the first laser beam and / or the second laser beam are distorted before impinging on the surface of the polymer.
  • the first and / or the second laser beam are focused by means of a focusing lens or imaging optics (wherein the focusing lens or imaging optics in a further advantageous embodiment with respect to the axis of the first and / or second laser beam by an angle with an amount between (in about 0.5 ° and 2 ° is inclined).
  • the first laser beam is focused by means of a first imaging optics, which advantageously with respect to the axis of the first laser beam by a first angle with an amount between about 0.1 ° and 4 °, in particular with an amount between (in approximately) 0.5 ° and 2 °, is inclined or inclined in this area.
  • the first angle is set as a function of the penetration depth of the first laser beam into the polymer.
  • the distance between the polymer and the first imaging optics, in particular dynamically and / or automatically, depending on the penetration depth of the first laser beam is set in the polymer.
  • a distance between the polymer and the first imaging optics should in particular designate the path that covers the light of the laser beam from the first imaging optics to the polymer.
  • the distance in particular the length of the light path is set dynamically. Dynamic in the sense of the invention is intended in particular to mean that the angle or the distance with the change or the course of the trajectory is changed. It is provided in particular that the distance between the polymer and the first imaging optics, in particular dynamically and / or automatically, is increased when the penetration depth of the first laser beam into the polymer increases. It is provided in particular that the distance between the polymer and the first imaging optics, in particular dynamically and / or automatically, is reduced when the penetration depth of the first laser beam into the polymer decreases.
  • the first laser beam passes through a first cylindrical lens arrangement.
  • a first cylindrical lens arrangement according to the invention comprises in particular two cylindrical lenses.
  • a first cylindrical lens arrangement in the sense of the invention comprises in particular two cylindrical lenses, which are rotated about their optical axis by 90 ° to each other.
  • the first imaging optics is arranged in the light path of the first laser beam between the first cylindrical lens arrangement and the polymer.
  • the distance between the first cylindrical lens arrangement and the first imaging optics, in particular dynamically and / or automatically, depending on the penetration depth of the first laser beam is set in the polymer.
  • a distance between the first cylindrical lens arrangement and the first imaging optical system is intended in particular to designate the path which covers the light of the laser beam from the first cylindrical lens arrangement to the first imaging optical system. So far the distance in particular the length of the light path dynamically adjusted. It is provided in particular that the distance between the first cylinder arrangement and the first imaging optics, in particular dynamically and / or automatically, is reduced when the penetration depth of the first laser beam into the polymer increases. It is provided in particular that the distance between the first cylinder arrangement and the first imaging optics, in particular dynamically and / or automatically, is increased when the penetration depth of the first laser beam into the polymer decreases.
  • the first cylindrical lens arrangement is adjusted in particular such that a suitable correction of the astigmatism takes place.
  • the positions of the cylindrical lenses of the first cylindrical lens arrangement, in particular dynamically and automatically are set as a function of the penetration depth.
  • the second laser beam is focused by means of a second imaging optics, which advantageously with respect to the axis of the second laser beam by a second angle with an amount between about 0.1 ° and 4 °, in particular with an amount between (in approximately) 0.5 ° and 2 °, is inclined or inclined in this area.
  • the second angle is set as a function of the penetration depth of the second laser beam into the polymer.
  • the distance between the polymer and the second imaging optics, in particular dynamically and / or automatically, depending on the penetration depth of the second laser beam is set in the polymer.
  • a distance between the polymer and the second imaging optics is intended in particular to designate the path which covers the light of the laser beam from the second imaging optics to the polymer.
  • the distance in particular the length of the light path is set dynamically.
  • Dynamic in the sense of the invention is intended in particular to mean that the angle or the distance with the change or the course of the trajectory is changed. It is provided in particular that the distance between the polymer and the second imaging optics, in particular dynamically and / or automatically, is increased when the penetration depth of the second laser beam into the polymer increased. In particular, it is provided that the distance between the polymer and the second imaging optics, in particular dynamically and / or automatically, is reduced when the penetration depth of the second laser beam into the polymer decreases.
  • the second laser beam passes through a second cylindrical lens arrangement.
  • a second cylindrical lens arrangement according to the invention comprises in particular two cylindrical lenses.
  • a second cylindrical lens arrangement according to the invention comprises, in particular, two cylindrical lenses, which are rotated about their optical axis by 90 ° to each other. It is provided in particular that the second imaging optics is arranged in the light path of the second laser beam between the second cylindrical lens arrangement and the polymer.
  • the distance between the second cylindrical lens arrangement and the second imaging optics, in particular dynamically and / or automatically, depending on the penetration depth of the second laser beam is set in the polymer.
  • a distance between the second cylindrical lens arrangement and the second imaging optics in the context of the invention is intended to denote, in particular, the path which covers the light of the laser beam from the second cylindrical lens arrangement to the second imaging optical unit.
  • the distance in particular the length of the light path is set dynamically.
  • the distance between the second cylinder arrangement and the second imaging optics, in particular dynamically and / or automatically is reduced when the penetration depth of the second laser beam into the polymer increases.
  • the distance between the second cylinder arrangement and the second imaging optics, in particular dynamically and / or automatically is increased when the penetration depth of the second laser beam into the polymer decreases.
  • the second cylindrical lens arrangement is adjusted in particular such that a suitable correction of the astigmatism takes place.
  • the positions of the cylindrical lenses of the second cylindrical lens arrangement are set as a function of the penetration depth.
  • the penetration depth of a laser beam into a polymer is to be understood in particular to mean the penetration depth of the laser beam into the polymer up to the point of intersection or up to the focusing point.
  • a setting as a function of the penetration depth also includes, in particular, an adjustment as a function of a desired value of the penetration depth.
  • a setting as a function of the penetration depth comprises, in particular, an adjustment as a function of a position or a desired position of the polymer.
  • a third laser beam of a second wavelength is focused in the polymer in the focusing point.
  • the second wavelength is different in particular from the first wavelength.
  • the first and the second wavelength differ in particular by at least 100 nm.
  • the second wavelength within the meaning of the invention is in particular a wavelength by means of which no change, in particular no significant change, of the refractive index is produced in the polymer.
  • the third laser beam strikes (substantially) perpendicular to the surface of the polymer.
  • the third light beam passes through a QWP (Quarter Wave Plate) and / or a PBS (Polarzing Beam Splitter) before impacting and / or after striking the surface of the polymer.
  • the QWP is arranged with respect to the course of the third laser beam between the polymer and the PBS.
  • the PBS it is possible to observe the focusing point with a confocal microscope.
  • the PBS only couples light (to a detector) whose polarization has been rotated by 90 ° with respect to the incident light.
  • the location of fiber tips in the polymer may be identified and connected to an optical waveguide in the polymer by the prescribed method.
  • the cross section of the first laser beam and / or the cross section of the second laser beam is changed during the movement of the focusing point and / or the crossing point.
  • the inventive method for producing a coupler between at least one optical fiber and an optoelectronic device, a (direct) optical data connection between at least two optical or optoelectronic chips, a multiplexer, a multiplexer or a multiplexer between a singlemode - Optical fiber and a multimode optical fiber used.
  • the adjustment costs can be reduced when constructing optical signal paths.
  • the invention makes it possible to increase or reduce the cross-section of waveguides on coupling surfaces in such a way that the requirement for the precision of the adjustment can be reduced. This reduces the construction costs of optical signal paths.
  • FIG. 1 shows an embodiment of a device for producing an optical waveguide, for producing in particular a single-mode optical waveguide, in a polymer
  • FIG. 2 shows an exemplary embodiment of a focusing point with a diamond-shaped cross-section
  • FIG. 5 shows an exemplary embodiment of an intensity distribution in a focusing point with an elliptical cross section
  • FIG. 7 shows an embodiment of an optical quadrupler coupler integrated in an MT plug
  • FIG. 9 shows an embodiment for a transition between a single-mode optical waveguide and a multimode optical waveguide
  • Fig. 10 shows an embodiment of a suitable relationship between the
  • Fig. 11 shows an embodiment of a suitable relationship between the
  • FIG. 1 shows an exemplary embodiment of a device 100 for carrying out the method according to the invention for producing an optical waveguide, in particular a single-mode optical waveguide, in a polymer 10.
  • a light beam with the wavelength of 405 nm is generated by means of a laser 4 and by means of a semitransparent mirror 6 divided into a laser beam 1 and a laser beam 2.
  • the beam diameter of the laser beam is adjusted by means of a zoom lens 5 by changing the numerical aperture. With the adjustment of the diameter of the laser beam, the effective beam size in a focusing point (focus) 40 in the polymer 10 is also adjusted.
  • Both the laser beam 1 and the laser beam 2 are each distorted by a warper 11 or 21 and then each directed by a rotatable or adjustable mirror 12 and 22 on the polymer 10.
  • the laser beams 1 and 2 are focused in the focusing point 40 by means of focusing lenses 13 and 23, respectively.
  • laser beam 1 and laser beam 2 intersect.
  • the distortors 1 and 21 are each an embodiment of a cylindrical lens arrangement in the sense of the claims.
  • the focusing lenses 13 and 23 are each an embodiment of an imaging optics in the sense of the claims.
  • the apparatus 100 further comprises a laser 30 for emitting a laser beam 3 having a wavelength of 635 nm.
  • the laser beam 3 passes through a PBS 31, a confocal filter 33 and a QWP 34 and is directed to the focusing point 40 by means of a mirror 35.
  • the laser beam 3 is focused by means of a lens 36 into the focusing point 40.
  • the laser 30 serves as the light source of a confocal microscope, the PBS 31 decoupling light in the direction of a detector 32 whose polarization is rotated by 90 ° with respect to the incident light has been.
  • an image signal is generated, which images the polymer 10 in the focusing point 40.
  • fiber tips can be found in the polymer 10 and connected to a waveguide generated by the laser beams 1 and 2.
  • the polymer 10 is chosen to react to 405 nm wavelength light in the sense that it changes its refractive index, whereas 635 nm wavelength light shows no particular reactivity.
  • the focusing point 40 By moving the polymer 10, the focusing point 40, ie the crossing point of the laser beams 1 and 2, can be moved along a three-dimensional trajectory through the polymer 10, so that by changing the refractive index of the polymer in the focusing point 40, a three-dimensionally extending waveguide, in particular a three-dimensional singlemode Optical fiber, arises.
  • the crossing angle 41 of the laser beams 1 and 2 and thus the shape of the optical waveguide can be set.
  • the laser beams 1 and 2 are each aligned with the polymer 10 in such a way that their angles of incidence are the same.
  • round, diamond-shaped (see Fig. 2) or square (see Fig. 3) cross sections of the optical waveguide can be generated.
  • FIGS. 4 and 5 show the intensity distribution of 405 nm wavelength light in the polymer 10 in creating a circular or elliptical cross section for an optical waveguide.
  • FIG. 6 shows an exemplary embodiment for the implementation of the distortors 11 and 21, respectively.
  • the distorters 11 and 21 each comprise two cylindrical lenses NT 47-750 from Edmund Optics, designated by reference numbers 51 and 52, the lens 52 rotated by 90 ° about the z-axis.
  • the focusing lenses 13 and 23 cooperate with the distortors 11 and 21, the focusing lenses 13 and 23 being designed as geltech aspherical lenses 352280 and tilted by -1, 2 ° relative to the x-axis.
  • couplers can be produced between at least one optical fiber and an optoelectronic component, (direct) optical data connections between at least two optical or optoelectronic chips, multiplexers, demultiplexers and transitions between a single-mode optical waveguide and a multimode optical waveguide.
  • four-optical couplers integrated in an MT plug for example as shown by way of example in FIG. 7, can be produced, wherein reference numerals 61, 62, 63 and 64 designate optical waveguides produced by the method according to the invention.
  • Fig. 8 shows a corresponding quadruple coupler without a plug.
  • FIG 9 shows an exemplary embodiment of a transition between a singlemode optical waveguide (on the left) and a multimode optical waveguide (on the right) produced by means of the method according to the invention.
  • the cross section of the laser beam 1 and / or the cross section of the laser beam 2 during the movement of the focusing point 40 are changed to produce the transition between the singlemode optical waveguide (left) and the multimode optical waveguide (right).
  • the distance between the focusing lens 13 and the polymer 10 is increased as the penetration depth of the laser beam 1 into the polymer 10 increases.
  • a suitable relationship between the penetration depth of the laser beam 1 into the polymer 10 and the distance between the focusing lens 13 and the polymer 10 is shown in FIG. 10.
  • the distance between the warper 1 and the focusing lens 13 is reduced when the penetration depth of the laser beam 1 into the polymer 10 is increased.
  • a suitable connection between the penetration depth of the Laser beam 1 in the polymer 10 and the distance between the warper 11 and the focusing lens 13 is shown in FIG. 11.
  • the distance between the focusing lens 23 and the polymer 10 is increased as the penetration depth of the laser beam 1 into the polymer 10 increases.
  • the distance between the warper 21 and the focusing lens 23 is reduced when the penetration depth of the laser beam 1 into the polymer 10 is increased.
  • a suitable relationship between the penetration depth of the laser beam 1 into the polymer 10 and the distance between the distortion 21 and the focusing lens 23 is shown in FIG. 21.

Abstract

L'invention concerne un procédé de fabrication d'un guide d'ondes, en particulier un guide d'ondes à mode unique, dans un polymère (10). Un premier faisceau laser (1) à une première longueur d'onde est focalisé sur un point focal dans le polymère. Un second faisceau laser (2), en particulier à la première longueur d'onde, est focalisé sur le point focal dans le polymère et croise le premier faisceau laser, si bien que l'indice de réfraction du polymère est modifié ou augmenté dans une zone entourant le point focal. Le point focal est déplacé sur une trajectoire dans le polymère. Avantageusement, selon l'invention, la section du premier faisceau laser et/ou la section du second faisceau laser (en particulier au point focal ou au niveau du point focal) varient pendant le déplacement du point focal.
PCT/EP2012/001109 2011-04-16 2012-03-13 Procédé de fabrication d'un guide d'ondes dans un polymère WO2012143070A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102011017329A DE102011017329A1 (de) 2011-04-16 2011-04-16 Verfahren zum Herstellen eines Lichtwellenleiters in einem Polymer
DE102011017329.3 2011-04-16

Publications (1)

Publication Number Publication Date
WO2012143070A1 true WO2012143070A1 (fr) 2012-10-26

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PCT/EP2012/001109 WO2012143070A1 (fr) 2011-04-16 2012-03-13 Procédé de fabrication d'un guide d'ondes dans un polymère

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9470858B2 (en) 2013-01-11 2016-10-18 Multiphoton Optics Gmbh Optical package and a process for its preparation

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102013100888A1 (de) * 2013-01-29 2014-07-31 Schott Ag Licht-Konzentrator oder -Verteiler
WO2018022319A1 (fr) * 2016-07-29 2018-02-01 Corning Optical Communications LLC Éléments de connexion de guides d'ondes et assemblages optiques les incorporant

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2004013668A2 (fr) * 2002-08-02 2004-02-12 Oz Optics Ltd. Dispositifs de guide d'onde optique microstructurants avec impulsions optiques femtosecondes
EP1422541A2 (fr) * 2002-11-25 2004-05-26 Nitto Denko Corporation Procédé de fabrication de guides d'onde tridimensionelles à base de polyimides.
FR2871582A1 (fr) * 2004-06-11 2005-12-16 Univ Louis Pasteur Etablisseme Procede de fabrication d'un bloc optique a circuit optique integre par photopolymerisation localisee d'une matrice organique par absorption a deux photons et bloc optique ainsi obtenu
US20090218519A1 (en) 2005-06-18 2009-09-03 The Regents Of The University Of Colorado Three-Dimensional Direct-Write Lithography

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10155492A1 (de) * 2001-11-13 2003-10-09 Univ Schiller Jena Verfahren zur Herstellung eines optischen Verzweigers, insbesondere eines Mehrfach-Strahlteilers, sowie verfahrensgemäß hergestellter Verzweiger
US6785439B2 (en) * 2002-01-29 2004-08-31 Agilent Technologies, Inc. Switching using three-dimensional rewriteable waveguide in photosensitive media
KR100471380B1 (ko) * 2002-12-23 2005-03-10 한국전자통신연구원 레이저 직접 묘화법을 이용한 광 도파로 제작방법 및 이를이용한 광 도파로

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2004013668A2 (fr) * 2002-08-02 2004-02-12 Oz Optics Ltd. Dispositifs de guide d'onde optique microstructurants avec impulsions optiques femtosecondes
EP1422541A2 (fr) * 2002-11-25 2004-05-26 Nitto Denko Corporation Procédé de fabrication de guides d'onde tridimensionelles à base de polyimides.
FR2871582A1 (fr) * 2004-06-11 2005-12-16 Univ Louis Pasteur Etablisseme Procede de fabrication d'un bloc optique a circuit optique integre par photopolymerisation localisee d'une matrice organique par absorption a deux photons et bloc optique ainsi obtenu
US20090218519A1 (en) 2005-06-18 2009-09-03 The Regents Of The University Of Colorado Three-Dimensional Direct-Write Lithography

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
KOO J-S ET AL: "UV written waveguides using crosslinkable PMMA-based copolymers", OPTICAL MATERIALS, ELSEVIER SCIENCE PUBLISHERS B.V. AMSTERDAM, NL, vol. 23, no. 3-4, 1 September 2003 (2003-09-01), pages 583 - 592, XP004437371, ISSN: 0925-3467, DOI: 10.1016/S0925-3467(03)00025-9 *

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9470858B2 (en) 2013-01-11 2016-10-18 Multiphoton Optics Gmbh Optical package and a process for its preparation

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