DE102011017329A1 - Verfahren zum Herstellen eines Lichtwellenleiters in einem Polymer - Google Patents

Verfahren zum Herstellen eines Lichtwellenleiters in einem Polymer Download PDF

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Publication number
DE102011017329A1
DE102011017329A1 DE102011017329A DE102011017329A DE102011017329A1 DE 102011017329 A1 DE102011017329 A1 DE 102011017329A1 DE 102011017329 A DE102011017329 A DE 102011017329A DE 102011017329 A DE102011017329 A DE 102011017329A DE 102011017329 A1 DE102011017329 A1 DE 102011017329A1
Authority
DE
Germany
Prior art keywords
polymer
laser beam
optical waveguide
wavelength
point
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
DE102011017329A
Other languages
German (de)
English (en)
Inventor
Jonas Gortner
Susanna Orlic
Christian Stark
Marc Seifried
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Technische Universitaet Berlin
Original Assignee
Technische Universitaet Berlin
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Technische Universitaet Berlin filed Critical Technische Universitaet Berlin
Priority to DE102011017329A priority Critical patent/DE102011017329A1/de
Priority to PCT/EP2012/001109 priority patent/WO2012143070A1/fr
Publication of DE102011017329A1 publication Critical patent/DE102011017329A1/de
Withdrawn legal-status Critical Current

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Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/13—Integrated optical circuits characterised by the manufacturing method
    • G02B6/138—Integrated optical circuits characterised by the manufacturing method by using polymerisation
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/0006—Working by laser beam, e.g. welding, cutting or boring taking account of the properties of the material involved
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/0604—Shaping the laser beam, e.g. by masks or multi-focusing by a combination of beams
    • B23K26/0608—Shaping the laser beam, e.g. by masks or multi-focusing by a combination of beams in the same heat affected zone [HAZ]
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/064—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
    • B23K26/0648—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms comprising lenses
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/067—Dividing the beam into multiple beams, e.g. multifocusing
    • B23K26/0676—Dividing the beam into multiple beams, e.g. multifocusing into dependently operating sub-beams, e.g. an array of spots with fixed spatial relationship or for performing simultaneously identical operations
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/50—Working by transmitting the laser beam through or within the workpiece
    • B23K26/53—Working by transmitting the laser beam through or within the workpiece for modifying or reforming the material inside the workpiece, e.g. for producing break initiation cracks
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/12002—Three-dimensional structures
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K2103/00—Materials to be soldered, welded or cut
    • B23K2103/30—Organic material
    • B23K2103/42—Plastics
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B2006/12166—Manufacturing methods
    • G02B2006/12169—Annealing
    • G02B2006/12171—Annealing using a laser beam
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B2006/12166—Manufacturing methods
    • G02B2006/12195—Tapering
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/36—Mechanical coupling means
    • G02B6/38—Mechanical coupling means having fibre to fibre mating means
    • G02B6/3807—Dismountable connectors, i.e. comprising plugs
    • G02B6/3873—Connectors using guide surfaces for aligning ferrule ends, e.g. tubes, sleeves, V-grooves, rods, pins, balls
    • G02B6/3885—Multicore or multichannel optical connectors, i.e. one single ferrule containing more than one fibre, e.g. ribbon type
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/42—Coupling light guides with opto-electronic elements
    • G02B6/4201—Packages, e.g. shape, construction, internal or external details
    • G02B6/4249—Packages, e.g. shape, construction, internal or external details comprising arrays of active devices and fibres
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/42—Coupling light guides with opto-electronic elements
    • G02B6/4292—Coupling light guides with opto-electronic elements the light guide being disconnectable from the opto-electronic element, e.g. mutually self aligning arrangements

Landscapes

  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Plasma & Fusion (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • General Physics & Mathematics (AREA)
  • Oil, Petroleum & Natural Gas (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Chemical & Material Sciences (AREA)
  • Optical Integrated Circuits (AREA)
  • Laser Beam Processing (AREA)
DE102011017329A 2011-04-16 2011-04-16 Verfahren zum Herstellen eines Lichtwellenleiters in einem Polymer Withdrawn DE102011017329A1 (de)

Priority Applications (2)

Application Number Priority Date Filing Date Title
DE102011017329A DE102011017329A1 (de) 2011-04-16 2011-04-16 Verfahren zum Herstellen eines Lichtwellenleiters in einem Polymer
PCT/EP2012/001109 WO2012143070A1 (fr) 2011-04-16 2012-03-13 Procédé de fabrication d'un guide d'ondes dans un polymère

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE102011017329A DE102011017329A1 (de) 2011-04-16 2011-04-16 Verfahren zum Herstellen eines Lichtwellenleiters in einem Polymer

Publications (1)

Publication Number Publication Date
DE102011017329A1 true DE102011017329A1 (de) 2012-10-18

Family

ID=45926508

Family Applications (1)

Application Number Title Priority Date Filing Date
DE102011017329A Withdrawn DE102011017329A1 (de) 2011-04-16 2011-04-16 Verfahren zum Herstellen eines Lichtwellenleiters in einem Polymer

Country Status (2)

Country Link
DE (1) DE102011017329A1 (fr)
WO (1) WO2012143070A1 (fr)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2760053A2 (fr) 2013-01-29 2014-07-30 Schott AG Concentrateur ou répartiteur de lumière
WO2018022319A1 (fr) * 2016-07-29 2018-02-01 Corning Optical Communications LLC Éléments de connexion de guides d'ondes et assemblages optiques les incorporant

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9470858B2 (en) 2013-01-11 2016-10-18 Multiphoton Optics Gmbh Optical package and a process for its preparation

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20030142898A1 (en) * 2002-01-29 2003-07-31 Hoke Charles D. Switching using three-dimensional rewriteable waveguide in photosensitive media
DE10155492A1 (de) * 2001-11-13 2003-10-09 Univ Schiller Jena Verfahren zur Herstellung eines optischen Verzweigers, insbesondere eines Mehrfach-Strahlteilers, sowie verfahrensgemäß hergestellter Verzweiger
US20040120676A1 (en) * 2002-12-23 2004-06-24 Lee Woo Jin Method for manufacturing optical waveguide using laser writing method and optical waveguide manufactured by using the same
US20090218519A1 (en) 2005-06-18 2009-09-03 The Regents Of The University Of Colorado Three-Dimensional Direct-Write Lithography

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CA2396831A1 (fr) * 2002-08-02 2004-02-02 Femtonics Corporation Dispositifs de microstructuration a guide d'ondes optiques avec pulses optiques de l'ordre de la femtoseconde
JP3987787B2 (ja) * 2002-11-25 2007-10-10 日東電工株式会社 三次元ポリイミド光導波路の製造方法
FR2871582B1 (fr) * 2004-06-11 2006-08-25 Univ Louis Pasteur Etablisseme Procede de fabrication d'un bloc optique a circuit optique integre par photopolymerisation localisee d'une matrice organique par absorption a deux photons et bloc optique ainsi obtenu

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10155492A1 (de) * 2001-11-13 2003-10-09 Univ Schiller Jena Verfahren zur Herstellung eines optischen Verzweigers, insbesondere eines Mehrfach-Strahlteilers, sowie verfahrensgemäß hergestellter Verzweiger
US20030142898A1 (en) * 2002-01-29 2003-07-31 Hoke Charles D. Switching using three-dimensional rewriteable waveguide in photosensitive media
US20040120676A1 (en) * 2002-12-23 2004-06-24 Lee Woo Jin Method for manufacturing optical waveguide using laser writing method and optical waveguide manufactured by using the same
US20090218519A1 (en) 2005-06-18 2009-09-03 The Regents Of The University Of Colorado Three-Dimensional Direct-Write Lithography

Non-Patent Citations (2)

* Cited by examiner, † Cited by third party
Title
de.wikipedia.org/wiki/Lichtwellenleiter#Mono-_bzw._Singlemode
de.wikipedia.org/wiki/Singlemode-Faser

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2760053A2 (fr) 2013-01-29 2014-07-30 Schott AG Concentrateur ou répartiteur de lumière
DE102013100888A1 (de) * 2013-01-29 2014-07-31 Schott Ag Licht-Konzentrator oder -Verteiler
WO2018022319A1 (fr) * 2016-07-29 2018-02-01 Corning Optical Communications LLC Éléments de connexion de guides d'ondes et assemblages optiques les incorporant
US10684419B2 (en) 2016-07-29 2020-06-16 Corning Optical Communications LLC Waveguide connector elements and optical assemblies incorporating the same

Also Published As

Publication number Publication date
WO2012143070A1 (fr) 2012-10-26

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Representative=s name: FISCHER, UWE, DIPL.-ING. DR.-ING., DE

R119 Application deemed withdrawn, or ip right lapsed, due to non-payment of renewal fee
R002 Refusal decision in examination/registration proceedings