EP3224556A1 - Table réfrigérée - Google Patents

Table réfrigérée

Info

Publication number
EP3224556A1
EP3224556A1 EP15807599.4A EP15807599A EP3224556A1 EP 3224556 A1 EP3224556 A1 EP 3224556A1 EP 15807599 A EP15807599 A EP 15807599A EP 3224556 A1 EP3224556 A1 EP 3224556A1
Authority
EP
European Patent Office
Prior art keywords
vacuum chamber
chamber
pressure
flexible
table top
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP15807599.4A
Other languages
German (de)
English (en)
Other versions
EP3224556B1 (fr
Inventor
Claudio DAL SAVIO
Khaled Karrai
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Attocube Systems AG
Original Assignee
Attocube Systems AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Attocube Systems AG filed Critical Attocube Systems AG
Publication of EP3224556A1 publication Critical patent/EP3224556A1/fr
Application granted granted Critical
Publication of EP3224556B1 publication Critical patent/EP3224556B1/fr
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25D—REFRIGERATORS; COLD ROOMS; ICE-BOXES; COOLING OR FREEZING APPARATUS NOT OTHERWISE PROVIDED FOR
    • F25D19/00—Arrangement or mounting of refrigeration units with respect to devices or objects to be refrigerated, e.g. infrared detectors
    • F25D19/006—Thermal coupling structure or interface
    • A—HUMAN NECESSITIES
    • A47—FURNITURE; DOMESTIC ARTICLES OR APPLIANCES; COFFEE MILLS; SPICE MILLS; SUCTION CLEANERS IN GENERAL
    • A47B—TABLES; DESKS; OFFICE FURNITURE; CABINETS; DRAWERS; GENERAL DETAILS OF FURNITURE
    • A47B13/00—Details of tables or desks
    • A47B13/08—Table tops; Rims therefor
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25D—REFRIGERATORS; COLD ROOMS; ICE-BOXES; COOLING OR FREEZING APPARATUS NOT OTHERWISE PROVIDED FOR
    • F25D2201/00—Insulation
    • F25D2201/10—Insulation with respect to heat
    • F25D2201/14—Insulation with respect to heat using subatmospheric pressure
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25D—REFRIGERATORS; COLD ROOMS; ICE-BOXES; COOLING OR FREEZING APPARATUS NOT OTHERWISE PROVIDED FOR
    • F25D2400/00—General features of, or devices for refrigerators, cold rooms, ice-boxes, or for cooling or freezing apparatus not covered by any other subclass
    • F25D2400/08—Refrigerator tables

Definitions

  • the invention relates to a table with a table top, in particular an optical table for carrying out experiments in a cryogenic environment.
  • cryostats are placed above or on the table.
  • the object of the invention is to provide a table, in particular an optical table, on which optical experiments of the highest resolution can be carried out in a flexible and simple manner.
  • the table comprises a chiller, wherein at least a portion of the table top is in thermal contact with the chiller and can be cooled thereby. It further comprises an inflatable upper vacuum chamber for thermal isolation of the thermal contact from the environment of the table.
  • the upper vacuum chamber connects a table top facing the top of the refrigerator and the section to be cooled.
  • the upper vacuum chamber includes at least one flexible upper chamber portion.
  • the table has an abpumpbare lower vacuum chamber, which is connected to a remote from the table top underside of the refrigerator, with
  • CONFIRMATION COPY at least one flexible lower chamber section.
  • the table has a rigid stiffening structure, each via the flexible upper chamber portion and the flexible lower chamber portion with the
  • Chiller is connected, thus indirectly connected to the chiller.
  • the adjectives "upper” and “lower” exemplify the case of the preferred because on the table surface space-saving embodiment of the invention that the chiller is arranged below the table top. If, according to an alternative embodiment of the invention, the chiller is arranged above the table top, the adjectives "upper” and “lower” are mutually mutually mutually equivalent. Also conceivable are other equivalent embodiments, in which the cooling machine is connected to the side of the table (along a spatial axis in the plane of the table surface). Therefore, the adjectives "upper” and “lower” in the broadest sense as the tabletop "facing" respectively "averted" side of the
  • a table, in particular an optical table serves the stable and
  • optical examination stations preferably also "cryogenic examination stations” (cryogenic probe station) understood.
  • the tabletop is characterized by great rigidity and has a flat table surface.
  • the table top is integrated with a base
  • the fastening means for fixing the objects may be a particularly regular pattern of threaded holes for receiving claws of the objects or integrated in the tabletop Magnets for fixing magnetic feet of the objects or be adhesive. Attachment means may be provided both in the tabletop and on the top plate surface of the cryogenic plate.
  • the base can consist of one, two, three, four or more legs.
  • the table legs can be height adjustable to align the table surface horizontally, even when the table is standing on uneven ground.
  • the table legs may comprise a common or in each case a damping device for vibration damping of the table top, on the surface of which sensitive optical experiments are to be carried out.
  • a damping device is a system for damping mechanical vibrations such as vibrations, shocks and shocks, which can usually convert kinetic energy into thermal energy.
  • fastening means may be provided for the attachment of objects.
  • the table legs are equipped with a damping device for damping vibrations.
  • the table also has integrated cooling.
  • a chiller for cooling a cryogenic plate is provided under the table top, wherein the cryogenic plate is in thermal contact with the chiller and can be cooled by this.
  • the chiller is supported on the stiffening structure and is connected to this.
  • An opening in the table top is provided above the chiller. In this opening, the cryogenic plate - in particular form-fitting - arranged.
  • damping devices may preferably be provided between table legs and table top.
  • a damping device may comprise, for example, a friction brake and / or resonant systems. You can, for example, a mat of elastic material we rubber or a spring device, a hydraulic suspension, an active
  • Piezoelectric damping control unit which detects, for example, time and direction resolved the forces acting on the table piezoelectrically and compensated by means of a control unit with counteracting forces also generated by acting on the table piezoelectric actuators, the
  • the table according to the invention also has an integrated chiller for cooling e.g. a cryogenic plate under the table top.
  • Chiller can be a construction of refrigeration systems and a pumping station.
  • the cooling systems consist for example of absorption refrigeration systems, adsorption refrigeration systems, diffusion absorption refrigeration machines,
  • the pumping station can be a construction of moving pumps such as turbopumps and diaphragm pumps as well as stationary pumps like
  • the thermal contact may be, for example, a structure of materials of high thermal conductivity, which the
  • Chiller and the section of the tabletop to be cooled mechanically and thermally connects.
  • the thermal contact may be a flexible copper strand, aluminum strand or a copper wire, aluminum wire or a silver wire or silver wire mesh.
  • a vacuum chamber is a container that closes a volume on all sides and hermetically from an environment, so that by pumping gases from the vacuum chamber by means of a pumping station within the vacuum chamber, a lower pressure than the ambient pressure generated and maintained can be.
  • They are usually made of steel and bear for connection to other components such as the table preferably standardized flanges (eg an ISO 100 mm flange).
  • the upper and lower vacuum chambers each comprise at least one flexible upper or lower chamber section. These chamber sections may be, for example, vacuum-compatible bellows or hoses made of steel, which may each be terminated at the top and bottom with a connecting flange, and which are at least extendable and / or compressible lengthwise.
  • the stiffening structure according to the invention each flexible over the upper chamber portion and the lower chamber portion with the
  • Chiller is connected, is rigid and preferably also each rigid to rigid chamber sections of the upper vacuum chamber and lower
  • the stiffening structure can consist of one or, for better distribution of the force and stabilization, of a plurality of components
  • the stiffening structure can consist of two or three preferably length-adjustable steel carriers which are each equally angularly distributed parallel to the plane of the table surface.
  • connection may be, for example, a releasable connection such as a screw connection, which allows a simpler and more flexible assembly.
  • connection may be, for example, a releasable connection such as a screw connection, which allows a simpler and more flexible assembly.
  • Embodiments of the invention include the features of one or more the following embodiments.
  • the upper chamber portion and lower chamber portion at least along the same spatial axis, for example, the normal of the table surface, flexible. For example, this has the advantage of being on the top and bottom
  • Vacuum chamber acting forces that act in particular by the evacuation, along the one spatial axis can be compensated, the overall structure of the table otherwise rigid with respect to other complementary spatial axes and thus can be made more stable.
  • the upper chamber portion and lower chamber portion are flexible and otherwise rigid at least along a normal of a table surface of the table top so that a lower vacuum volume of the lower vacuum chamber and an upper vacuum volume of the upper vacuum chamber are variable.
  • Vacuum parts are usually expensive and error-prone.
  • This embodiment has, for example, the advantage that the flexibility of the upper and lower
  • Vacuum chamber can be realized by only one flexible chamber section. According to another embodiment of the invention is the
  • Stiffening structure each rigidly connected to the upper vacuum chamber and the lower vacuum chamber.
  • the upper vacuum volume and the lower vacuum volume can be pumped off by the chiller and / or an external pumping station or various external pumping stations, for example via corresponding pumping lines.
  • a pumping station may consist of a plurality of pumps arranged in series or in parallel in the direction of flow of the pumped-off gas.
  • backing pumps such as membrane pumps, although only a fore-vacuum pressure (eg, about 10 "4 mbar) but may produce a gas flow can carry load,
  • High vacuum pumps such as turbopumps or ion getter pumps in Be downstream flow direction.
  • the pumping lines can be, for example, flexible bellows tubes with end flanges. This has the advantage that the table is decoupled from the vibrations of the pumps.
  • According to another embodiment of the invention is a
  • Pressure regulating means for adjusting an upper pressure in and / or upper gas flow from the upper vacuum chamber and a lower pressure in and / or lower gas flow provided from the upper vacuum chamber.
  • the pressure regulating device can in the simplest case a fluid
  • Pressure regulating means may also be an electronic control system of pumps and / or controllable valves of external gas supplies of the upper and lower vacuum chambers, through which the gas flow in or out of the upper and / or lower vacuum chamber is adjustable.
  • Pressure regulating means a fluid connection between the upper vacuum chamber and the lower vacuum chamber, so that the upper pressure and / or upper gas flow with the lower pressure and the lower gas flow are compensated.
  • Base surface of the lower vacuum volume which are aligned parallel to the table surface, essentially the same area, so that an upper force and a lower force, by pumping the upper vacuum chamber respectively lower vacuum chamber along the normal of the table surface can be generated, at least partially compensate.
  • Pressure regulating means a cavity in the stiffening structure which opens into the upper vacuum chamber and the lower vacuum chamber respectively.
  • the stiffening structure then acts as a fluid compound according to the invention. It can be connected in each case via vacuum flanges to counterflanges of the upper and lower vacuum chamber, so that the cavity connects the upper and lower vacuum volume fluid and with respect to the
  • Pressure regulating device a control unit to be tuned
  • the coolable by the refrigerator section is at least one held in the table top cryogenic plate.
  • the cryogenic plate is preferably removable and thermally decoupled from the remainder of the table, for example by means of mounts made of a material of low thermal conductivity such as
  • a hood may be provided on a portion of the cryogenic plate such that an evacuable volume is defined around the sample.
  • vacuum-tight optical windows, manipulators, electrical feedthroughs and measuring probes can be arranged.
  • Chiller supported on at least one table leg of the table, on the table top and / or on a floor.
  • a hood with at least one optical window, pumping leads is provided.
  • the hood mounted on the cryogenic plate may have a cavity bounded at least by a partial surface of the upper plate surface of the cryogenic plate
  • the hood may in particular be a vacuum-compatible chamber, at whose open bottom corresponding counter-flanges are provided to the flanges of the cryogenic plate, so that a portion of the upper
  • Damping control be provided, which is in operative connection with the damping device and the damping device in dependence
  • Table surface is kept free of vibration.
  • the pressure regulating device can be integrated into a control circuit of the damping control.
  • the invention further relates to a method for the mechanical decoupling of a table top of a table and a chiller, which on one of the table top facing upper side with the table top via a flexible upper chamber, and which is remote from the tabletop underside connected to a lower chamber.
  • the inventive method is characterized in that by means of a pressure regulating device, an upper pressure in and / or an upper gas flow from the upper vacuum chamber and a lower pressure in and / or a lower gas flow from the lower
  • Vacuum chamber are controlled in such a way that an upper force and a lower force, by pumping the upper vacuum chamber and the lower vacuum chamber along a normal of a
  • Table surface of the table top act, at least partially compensate.
  • the invention is subject to the basic idea, the upper pressure in the upper
  • the upper and lower force can be a
  • the upper / lower force results essentially from the quotient of upper / lower pressure and the effective base area of the upper / lower vacuum chamber.
  • the effective base area refers to the plane whose normal is parallel to the aforementioned spatial axis. For the same base areas, the balance of forces, for example by a fluid
  • connection between upper and lower chamber to be effected by pressure equalization In this case, the top and the bottom could be
  • Vacuum chamber are pumped through the same pumping station.
  • the upper and lower forces are out of balance, so that movements, such as vibrations, are generated in the table, which can compromise the fault-prone measurements on the table top.
  • movements such as vibrations
  • the compensation of the lower and upper force acting at least indirectly on the table a deformation of mechanical stress on the table top is avoided.
  • FIG. 1 shows a schematic sectional view of an exemplary embodiment of the table according to the invention
  • Figure 2 is a schematic sectional view of another
  • Figure 3 is a schematic sectional view of another
  • Figure 4 is a schematic sectional view of another
  • Figure 5 is a schematic sectional view of another
  • Figure 6 is a perspective view of an inventive
  • FIG. 1 shows a schematic sectional view of a table 1 according to the invention, here an optical table 1.
  • a table top 9 with an overhead table top surface 2 is supported by legs 4. Between each table leg 4 and the table top 9 each have a damping device 5 is arranged.
  • a cryogenic plate 10 is rigidly fastened by fasteners, x so that an upper plate surface is flush with the table surface 2.
  • a flange (not shown) of a flexible upper chamber portion of an upper vacuum chamber 50 is connected to an upper surface 26 of a chiller 20 in mechanical and / or fluid communication.
  • the lower plate surface is connected via a flexible element 22 of a thermally conductive material such as copper, which may carry a designed for efficient cooling of the cryogenic plate 10 heat flow in
  • the chiller 20 and the cryogenic plate 10 are mechanically not rigidly connected and therefore at least orthogonal to the table plane against each other and movable
  • the underside 27 of the refrigerator 20 is in mechanical and fluid communication with a flange (not shown) of a flexible chamber portion 61 of a lower vacuum chamber 60.
  • Vacuum chamber 60 are relative to a normal 70 of a table surface. 2 the tabletop 9 on opposite sides of the refrigerator.
  • An upper / lower vacuum volume 52/62 of the upper / lower vacuum chamber 50/60 may be evacuated to an upper / lower pressure 50P / 60P by a pumping station (not shown) of the chiller 20 or via an external pumping line 81 through an external pumping station (80) become.
  • a pumping station not shown
  • an external pumping line 81 through an external pumping station (80) become.
  • Stiffening structure 30 connects from the environment 100 and rigidly connects the upper vacuum chamber 50 to the lower vacuum chamber 60, the connection engaging above the upper flexible chamber portion 51 and below the lower flexible chamber portion 61.
  • FIG. 2 shows a sectional view of a table 1 according to the invention as already described in FIG.
  • the flexible upper chamber portion 51 and the flexible lower chamber portion 61 are compressible along the normal 70 and extendable.
  • an upper force 50K and a lower force 60K appear, which act on the chiller 20 along the normal 70 in opposite directions . If the lower force 60K is equal to the upper force 50K, the chiller 20 is not moved against the table top 9. This suppressed movement could, for example, cause vibratory disturbances for the experiments taking place on the tabletop 9 (experimental setup not shown).
  • the upper force 50K is equal to the lower force 60K when the quotient of the difference of the ambient pressure P and the lower pressure 60P P2 and the difference of the ambient pressure P and the upper pressure 50P P1 is equal to the quotient of upper base 53 A1 and lower
  • Base area 63 A2, A1 / A2 (P-P2) / (P-P1).
  • Figure 3 shows a sectional view of a table 1 according to the invention.
  • the stiffening structure 30 acts as a pressure regulating means 90 to equalize the upper pressure 50P and the lower pressure 60P.
  • a cavity 31 of the stiffening structure has respective mouths 32 in the upper
  • This cavity 31st acts as a fluid connection 91 for an upper gas flow 50F from the upper vacuum chamber 50 and a lower gas flow 60F from the lower one
  • Vacuum chamber 60 to an external pumping station 80 or alternatively to a pumping station (not shown) of the chiller 20. It is also conceivable to design the pressure regulating device 90 as a separate component of the stiffening device 30, for example as a flexible
  • FIG. 4 shows a sectional view of a table according to the invention 1.
  • a cryogenic plate 10 On an opening 3 in the table top 9, a cryogenic plate 10 is arranged, on which the upper vacuum chamber 50 is flanged from below.
  • the flexible upper chamber portion 51 for example, as vacuum technology of the upper vacuum chamber 50 is flanged from above to the chiller 20.
  • the chiller 20 is supported in a rigid frame 28 standing on the floor 82.
  • a flexible lower chamber portion 61 of a lower vacuum chamber 60 is flanged to the chiller 20 and to the frame 28 rigidly connected thereto.
  • the flexible upper chamber portion 51 and the flexible lower chamber portion 61 may, for example, as a flexible Bellows (flexible bellows) with each end
  • Connection flanges can have, for example, an outside diameter of 6 "OD (about 152 mm) and an inside diameter of the free opening 5" ID (127 mm) 4 “ID (101, 6 mm) or 3.5" ID (89 mm).
  • FIG. 5 shows a sectional view of a table 1 according to the invention.
  • the frame 28 is connected via a number of damping devices 5 to the table top 9.
  • Figure 6 shows a perspective view of a table 1 according to the invention with table legs 4, a table top 9 and a mounted hood 40 for receiving, for example, a sample to be examined (not shown).
  • the refrigerator is arranged in a housing 25 under the table.
  • In the upper part of the hood 40 carries a window 46 and more
  • limiting table top 9 a volume that can be evacuated, in particular via an external pumping station 80.
  • the hood 40 is fastened via a flange 44 on the surface 2 of the table.
  • a sample can be examined via the windows 41, 46, whereby the sample can be kept in a cryogenic atmosphere.

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Combustion & Propulsion (AREA)
  • Physics & Mathematics (AREA)
  • Mechanical Engineering (AREA)
  • Thermal Sciences (AREA)
  • General Engineering & Computer Science (AREA)
  • Vibration Prevention Devices (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Sampling And Sample Adjustment (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)

Abstract

Table (1) comprenant un plateau de table (9) et une machine frigorifique (20), au moins une zone (10) du plateau de table (9) pouvant être réfrigérée au moyen de la machine frigorifique (20), par le biais d'un contact thermique (22); une chambre à vide supérieure (50) pouvant être mise sous vide par pompage, destinée à isoler thermiquement le contact thermique (22) de l'environnement (100) de la table (1), et qui relie le côté supérieur (26) de la machine frigorifique (20), tourné vers le plateau de table (9), à la zone à réfrigérer (10), et qui comporte au moins une section de chambre souple supérieure (51); une chambre à vide inférieure (60) pouvant être mise sous vide par pompage, qui est reliée au côté inférieur (27) de la machine frigorifique (20), tourné à l'opposé du plateau de table (9), et qui comprend au moins une section de chambre souple inférieure (61); une structure de renforcement (30) rigide, reliée à la machine frigorifique (20) par l'intermédiaire de la section de chambre souple supérieure (51), et de la section de chambre souple inférieure (61).
EP15807599.4A 2014-11-24 2015-11-23 Table réfrigérée Active EP3224556B1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102014017374.7A DE102014017374B4 (de) 2014-11-24 2014-11-24 Tisch
PCT/EP2015/002346 WO2016082926A1 (fr) 2014-11-24 2015-11-23 Table réfrigérée

Publications (2)

Publication Number Publication Date
EP3224556A1 true EP3224556A1 (fr) 2017-10-04
EP3224556B1 EP3224556B1 (fr) 2018-12-19

Family

ID=54838306

Family Applications (1)

Application Number Title Priority Date Filing Date
EP15807599.4A Active EP3224556B1 (fr) 2014-11-24 2015-11-23 Table réfrigérée

Country Status (6)

Country Link
US (1) US10794626B2 (fr)
EP (1) EP3224556B1 (fr)
JP (1) JP6649381B2 (fr)
DE (1) DE102014017374B4 (fr)
DK (1) DK3224556T3 (fr)
WO (1) WO2016082926A1 (fr)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US11396980B2 (en) * 2018-11-13 2022-07-26 Quantum Design International, Inc. Low vibration cryocooled cryostat
AT522172B1 (de) * 2019-04-23 2020-09-15 Univ Linz Vorrichtung zur Lagerung eines Objekthalters

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JPS6065288A (ja) * 1983-09-21 1985-04-15 Hitachi Ltd クライオポンプ
JPH0519588Y2 (fr) * 1988-03-30 1993-05-24
US4930318A (en) * 1988-07-05 1990-06-05 General Electric Company Cryocooler cold head interface receptacle
JPH0372271U (fr) * 1989-11-10 1991-07-22
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JPH0714855Y2 (ja) * 1991-08-23 1995-04-10 岩谷産業株式会社 低温測定装置での試料固定装置
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JP2831936B2 (ja) * 1994-07-22 1998-12-02 長瀬産業株式会社 半導体ウエハ冷却装置及び該装置を用いた半導体ウエハ冷却方法
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DE102012019688A1 (de) 2012-10-01 2014-04-03 Dietrich Roscher Anordnung und Verfahren für die Dämpfung von Schwingungen bei mikroskopischen Untersuchungen
DE102014015665B4 (de) * 2014-10-23 2016-05-19 Attocube Systems Ag Optischer Tisch

Also Published As

Publication number Publication date
WO2016082926A1 (fr) 2016-06-02
DE102014017374A1 (de) 2016-05-25
US10794626B2 (en) 2020-10-06
JP6649381B2 (ja) 2020-02-19
JP2018507531A (ja) 2018-03-15
DE102014017374B4 (de) 2016-09-15
DK3224556T3 (en) 2019-04-01
EP3224556B1 (fr) 2018-12-19
US20170314843A1 (en) 2017-11-02

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