EP3224556A1

EP3224556A1 - Cooled table

Info

Publication number: EP3224556A1
Application number: EP15807599.4A
Authority: EP
Inventors: Claudio DAL SAVIO; Khaled Karrai
Original assignee: Attocube Systems AG
Current assignee: Attocube Systems AG
Priority date: 2014-11-24
Filing date: 2015-11-23
Publication date: 2017-10-04
Anticipated expiration: 2035-11-23
Also published as: WO2016082926A1; JP2018507531A; US20170314843A1; JP6649381B2; DK3224556T3; DE102014017374A1; EP3224556B1; DE102014017374B4; US10794626B2

Abstract

The invention relates to a table (1) having a tabletop (9) and comprising - a refrigerating machine (20), at least one section (10) of the tabletop (9) being coolable by means of the refrigerating machine (20) via a thermal contact (22); - an upper vacuum chamber (50), which can be evacuated, for thermally insulating the thermal contact (22) from a surrounding area (100) of the table (1), said chamber connecting an upper face (26) of the refrigerating machine (20) facing the tabletop (9) and the section (10) to be cooled, and which has at least one flexible upper chamber section (51); - a lower vacuum chamber (60), which can be evacuated, which is connected to a lower face (27) of the refrigerating machine (20) facing away from the tabletop (9), and which has at least one flexible lower chamber section (61); and - a rigid stiffening structure (30), which is connected to the refrigerating machine (20) via the flexible upper chamber section (51) and via the flexible lower chamber section (61).

Description

COOLED TABLE

The invention relates to a table with a table top, in particular an optical table for carrying out experiments in a cryogenic environment.

In many high-precision and correspondingly highly sensitive optical

Experiments such as those of the super-resolution and thus highly susceptible to interference Super Resolution Optical Microscopy or quantum optics are arranged on tables complex measurement setups from a variety of optical components. The measuring accuracy is determined by environmental influences such as vibrations, thermal effects or

limited electromagnetic noise. Therefore many will be

Experiments under at the place of a sample to be measured if possible

low-vibration and also cryogenic conditions. In the prior art chillers such as cryostats are placed above or on the table.

The object of the invention is to provide a table, in particular an optical table, on which optical experiments of the highest resolution can be carried out in a flexible and simple manner.

This task is solved by a table with a table top, which

for example, is worn by a number of table legs. The table comprises a chiller, wherein at least a portion of the table top is in thermal contact with the chiller and can be cooled thereby. It further comprises an inflatable upper vacuum chamber for thermal isolation of the thermal contact from the environment of the table. The upper vacuum chamber connects a table top facing the top of the refrigerator and the section to be cooled. The upper vacuum chamber includes at least one flexible upper chamber portion. Likewise, the table has an abpumpbare lower vacuum chamber, which is connected to a remote from the table top underside of the refrigerator, with

CONFIRMATION COPY at least one flexible lower chamber section. In addition, the table has a rigid stiffening structure, each via the flexible upper chamber portion and the flexible lower chamber portion with the

Chiller is connected, thus indirectly connected to the chiller.

The adjectives "upper" and "lower" exemplify the case of the preferred because on the table surface space-saving embodiment of the invention that the chiller is arranged below the table top. If, according to an alternative embodiment of the invention, the chiller is arranged above the table top, the adjectives "upper" and "lower" are mutually mutually mutually equivalent. Also conceivable are other equivalent embodiments, in which the cooling machine is connected to the side of the table (along a spatial axis in the plane of the table surface). Therefore, the adjectives "upper" and "lower" in the broadest sense as the tabletop "facing" respectively "averted" side of the

To understand refrigerating machine, wherein the facing and opposite side with respect to a spatial axis opposite sides of the refrigerator designate.

A table, in particular an optical table serves the stable and

low-vibration mechanical mounting of objects that make up an optical system. These objects may be optical elements such as mirrors, lenses, laser sources or sample holders. As a table, preferably also "cryogenic examination stations" (cryogenic probe station) understood.

The tabletop is characterized by great rigidity and has a flat table surface. The table top is integrated with a base

Damping device connected. The fastening means for fixing the objects may be a particularly regular pattern of threaded holes for receiving claws of the objects or integrated in the tabletop Magnets for fixing magnetic feet of the objects or be adhesive. Attachment means may be provided both in the tabletop and on the top plate surface of the cryogenic plate. The base can consist of one, two, three, four or more legs. The table legs can be height adjustable to align the table surface horizontally, even when the table is standing on uneven ground. The table legs may comprise a common or in each case a damping device for vibration damping of the table top, on the surface of which sensitive optical experiments are to be carried out. A damping device is a system for damping mechanical vibrations such as vibrations, shocks and shocks, which can usually convert kinetic energy into thermal energy. In the table surface of the table top fastening means may be provided for the attachment of objects. The table legs are equipped with a damping device for damping vibrations. The table also has integrated cooling. For this purpose, a chiller for cooling a cryogenic plate is provided under the table top, wherein the cryogenic plate is in thermal contact with the chiller and can be cooled by this.

Furthermore, a stiffening structure between the chiller and

provided at least one table leg, wherein the stiffening structure is rigidly connected below the damping device with the table legs, so that the damping device, the table top against the

Chiller and the areas with which the table legs can stand on the ground. The chiller is supported on the stiffening structure and is connected to this. An opening in the table top is provided above the chiller. In this opening, the cryogenic plate - in particular form-fitting - arranged.

According to the invention damping devices may preferably be provided between table legs and table top. A damping device may comprise, for example, a friction brake and / or resonant systems. You can, for example, a mat of elastic material we rubber or a spring device, a hydraulic suspension, an active

Piezoelectric damping control unit, which detects, for example, time and direction resolved the forces acting on the table piezoelectrically and compensated by means of a control unit with counteracting forces also generated by acting on the table piezoelectric actuators, the

Table motion forces or a compressed air bearing or a combination thereof. The table according to the invention also has an integrated chiller for cooling e.g. a cryogenic plate under the table top. The

Chiller can be a construction of refrigeration systems and a pumping station. The cooling systems consist for example of absorption refrigeration systems, adsorption refrigeration systems, diffusion absorption refrigeration machines,

Compression refrigeration systems, steam jet refrigeration, Joule-Thomson effect, Gifford-MaMahon (GM) coolers, pulse tube coolers, ion getter pumps, Peltier elements, magnetic cooling elements, evaporation condensers and / or cryostats. The pumping station can be a construction of moving pumps such as turbopumps and diaphragm pumps as well as stationary pumps like

be ion getter pumps or cryopumps. Advantageously, these are

Components of the refrigerator designed vibration and / or mechanically decoupled from the table top. The thermal contact may be, for example, a structure of materials of high thermal conductivity, which the

Chiller and the section of the tabletop to be cooled mechanically and thermally connects. In particular, the thermal contact may be a flexible copper strand, aluminum strand or a copper wire, aluminum wire or a silver wire or silver wire mesh.

A vacuum chamber is a container that closes a volume on all sides and hermetically from an environment, so that by pumping gases from the vacuum chamber by means of a pumping station within the vacuum chamber, a lower pressure than the ambient pressure generated and maintained can be. They are usually made of steel and bear for connection to other components such as the table preferably standardized flanges (eg an ISO 100 mm flange). The upper and lower vacuum chambers each comprise at least one flexible upper or lower chamber section. These chamber sections may be, for example, vacuum-compatible bellows or hoses made of steel, which may each be terminated at the top and bottom with a connecting flange, and which are at least extendable and / or compressible lengthwise. The stiffening structure according to the invention, each flexible over the upper chamber portion and the lower chamber portion with the

Chiller is connected, is rigid and preferably also each rigid to rigid chamber sections of the upper vacuum chamber and lower

Connected vacuum chamber. As a result of this rigid mechanical coupling, a force acting on one vacuum chamber also acts on the other vacuum chamber via the stiffening structure. A volume of a vacuum chamber tends to be more easily and efficiently maintained at a low negative pressure (eg, about 10 ^-8 mbar) than the ambient pressure, the smaller the volume to be pumped and the area surrounding it. The stiffening structure can consist of one or, for better distribution of the force and stabilization, of a plurality of components For example, the stiffening structure can consist of two or three preferably length-adjustable steel carriers which are each equally angularly distributed parallel to the plane of the table surface. The connection may be, for example, a releasable connection such as a screw connection, which allows a simpler and more flexible assembly. Embodiments of the invention include the features of one or more the following embodiments. According to an embodiment of the invention, the upper chamber portion and lower chamber portion at least along the same spatial axis, for example, the normal of the table surface, flexible. For example, this has the advantage of being on the top and bottom

Vacuum chamber acting forces that act in particular by the evacuation, along the one spatial axis can be compensated, the overall structure of the table otherwise rigid with respect to other complementary spatial axes and thus can be made more stable. According to a further embodiment of the invention, the upper chamber portion and lower chamber portion are flexible and otherwise rigid at least along a normal of a table surface of the table top so that a lower vacuum volume of the lower vacuum chamber and an upper vacuum volume of the upper vacuum chamber are variable. portable

Vacuum parts are usually expensive and error-prone. This embodiment has, for example, the advantage that the flexibility of the upper and lower

Vacuum chamber can be realized by only one flexible chamber section. According to another embodiment of the invention is the

Stiffening structure each rigidly connected to the upper vacuum chamber and the lower vacuum chamber.

According to a further embodiment of the invention, the upper vacuum volume and the lower vacuum volume can be pumped off by the chiller and / or an external pumping station or various external pumping stations, for example via corresponding pumping lines. A pumping station may consist of a plurality of pumps arranged in series or in parallel in the direction of flow of the pumped-off gas. For example, backing pumps such as membrane pumps, although only a fore-vacuum pressure (eg, about 10 ^"4 mbar) but may produce a gas flow can carry load,

High vacuum pumps such as turbopumps or ion getter pumps in Be downstream flow direction. The pumping lines can be, for example, flexible bellows tubes with end flanges. This has the advantage that the table is decoupled from the vibrations of the pumps. According to another embodiment of the invention is a

Pressure regulating means for adjusting an upper pressure in and / or upper gas flow from the upper vacuum chamber and a lower pressure in and / or lower gas flow provided from the upper vacuum chamber. The pressure regulating device can in the simplest case a fluid

Connection between the upper and lower vacuum volume of the upper and lower vacuum chamber, respectively. As a result, the same pressure arises in the upper and lower vacuum volumes. Depending on the gas load and the length of the fluid connection, a minimal cross-section of the fluid connection should be sufficiently large in area so that the pressure compensation can take place sufficiently quickly in accordance with the application. The

Pressure regulating means may also be an electronic control system of pumps and / or controllable valves of external gas supplies of the upper and lower vacuum chambers, through which the gas flow in or out of the upper and / or lower vacuum chamber is adjustable.

According to another embodiment of the invention is the

Pressure regulating means a fluid connection between the upper vacuum chamber and the lower vacuum chamber, so that the upper pressure and / or upper gas flow with the lower pressure and the lower gas flow are compensated. This has the advantage, for example, that a complex electronic control system for pressure equalization becomes unnecessary.

According to a particularly simple embodiment of the invention have an upper base of the upper vacuum volume and a lower

Base surface of the lower vacuum volume, which are aligned parallel to the table surface, essentially the same area, so that an upper force and a lower force, by pumping the upper vacuum chamber respectively lower vacuum chamber along the normal of the table surface can be generated, at least partially compensate.

According to another embodiment of the invention is the

Pressure regulating means a cavity in the stiffening structure which opens into the upper vacuum chamber and the lower vacuum chamber respectively. The stiffening structure then acts as a fluid compound according to the invention. It can be connected in each case via vacuum flanges to counterflanges of the upper and lower vacuum chamber, so that the cavity connects the upper and lower vacuum volume fluid and with respect to the

Environment is complete.

According to a further embodiment of the invention comprises the

Pressure regulating device a control unit to be tuned

Regulation of the upper pressure and / or the upper gas flow and the lower pressure or lower gas flow, so that an upper force and a lower force, which can be generated by pumping the upper vacuum chamber or lower vacuum chamber along the normal of the table surface, at least partially compensated ,

According to a further embodiment of the invention, the coolable by the refrigerator section is at least one held in the table top cryogenic plate. The cryogenic plate is preferably removable and thermally decoupled from the remainder of the table, for example by means of mounts made of a material of low thermal conductivity such as

Ceramics or plastics. On the opposite side of the refrigerator chiller can be arranged to be measured and for this purpose to be cooled sample. For thermal insulation of the sample from the environment of the table, which usually has room temperature and atmospheric pressure, a hood may be provided on a portion of the cryogenic plate such that an evacuable volume is defined around the sample. In the hood, vacuum-tight optical windows, manipulators, electrical feedthroughs and measuring probes can be arranged.

According to another embodiment of the invention is the

Chiller supported on at least one table leg of the table, on the table top and / or on a floor.

According to a further embodiment of the invention, a hood with at least one optical window, pumping leads,

preferably vacuum-tight passages for electrical cables or mechanical devices such as manipulators for the objects and / or optical shutter be provided. In particular, the hood mounted on the cryogenic plate may have a cavity bounded at least by a partial surface of the upper plate surface of the cryogenic plate

enclose, so that an evacuable space is created.

The hood may in particular be a vacuum-compatible chamber, at whose open bottom corresponding counter-flanges are provided to the flanges of the cryogenic plate, so that a portion of the upper

Plate surface together with the inner surface of the hood one

form a closed and evacuable space.

According to another embodiment of the invention, a

Damping control be provided, which is in operative connection with the damping device and the damping device in dependence

detected vibrations, so that the table top and their

Table surface is kept free of vibration. In particular, the pressure regulating device can be integrated into a control circuit of the damping control.

The invention further relates to a method for the mechanical decoupling of a table top of a table and a chiller, which on one of the table top facing upper side with the table top via a flexible upper chamber, and which is remote from the tabletop underside connected to a lower chamber. The inventive method is characterized in that by means of a pressure regulating device, an upper pressure in and / or an upper gas flow from the upper vacuum chamber and a lower pressure in and / or a lower gas flow from the lower

Vacuum chamber are controlled in such a way that an upper force and a lower force, by pumping the upper vacuum chamber and the lower vacuum chamber along a normal of a

Table surface of the table top act, at least partially compensate.

The invention is subject to the basic idea, the upper pressure in the upper

To regulate the vacuum volume and the lower pressure in the lower vacuum volume such that the upper force acting by evacuation of the upper vacuum chamber sufficiently compensates for the lower force acting by evacuation of the lower vacuum chamber in accordance with the experiment to be performed on the table. Along the spatial axis, in which the upper and lower vacuum chambers are flexible, the upper and lower force can be a

Cause movement. The upper / lower force results essentially from the quotient of upper / lower pressure and the effective base area of the upper / lower vacuum chamber. The effective base area refers to the plane whose normal is parallel to the aforementioned spatial axis. For the same base areas, the balance of forces, for example by a fluid

Connection between upper and lower chamber to be effected by pressure equalization. In this case, the top and the bottom could be

Vacuum chamber are pumped through the same pumping station.

It is also conceivable to balance forces by using the lower base area (e.g.

ten times) larger than the upper base area is designed and the lower pressure (eg, about 10 ^"4 mbar) is set correspondingly lower than the upper pressure (eg, about 10 ^{" 5} mbar). In detail, the pressure in the chambers P1 and P2 at the areas A1 and A2 at the atmospheric pressure P can be determined by the relationship (P-P1) A1 = (P-P2) A2.

This has the advantage that the upper vacuum volume remains closed, so that the lowest possible vacuum can be produced less expensively, so that the thermal contact is thermally insulated as well as possible and the cooling power acting on the section of the table to be cooled is optimized. In addition, a pumping station to produce a higher pressure tends to be cheaper and less expensive. As regards the adjustment of the upper and lower pressure, the same applies to the adjustment of the upper and lower gas flow in or out of the upper or lower vacuum chamber. Because a pressure equalization between lower and upper vacuum chamber does not take place instantaneously. Rather, the pressure-compensating gas flows take time. During this time, the upper and lower forces are out of balance, so that movements, such as vibrations, are generated in the table, which can compromise the fault-prone measurements on the table top. Advantageously, by the compensation of the lower and upper force acting at least indirectly on the table, a deformation of mechanical stress on the table top is avoided.

The invention and advantageous developments are exemplified in the accompanying figures. Identical and equivalent features are only partially provided with reference numerals. FIG. 1 shows a schematic sectional view of an exemplary embodiment of the table according to the invention;

Figure 2 is a schematic sectional view of another

Embodiment of the table according to the invention;

Figure 3 is a schematic sectional view of another

Embodiment of the table according to the invention; Figure 4 is a schematic sectional view of another

Ausführungsbeispieis the table according to the invention; Figure 5 is a schematic sectional view of another

Embodiment of the table according to the invention; and

Figure 6 is a perspective view of an inventive

Table with a mounted hood.

FIG. 1 shows a schematic sectional view of a table 1 according to the invention, here an optical table 1. A table top 9 with an overhead table top surface 2 is supported by legs 4. Between each table leg 4 and the table top 9 each have a damping device 5 is arranged. In one (or more) opening 3 in the table top 9 (each) a cryogenic plate 10 is rigidly fastened by fasteners, _x so that an upper plate surface is flush with the table surface 2. A flange (not shown) of a flexible upper chamber portion of an upper vacuum chamber 50 is connected to an upper surface 26 of a chiller 20 in mechanical and / or fluid communication.

Furthermore, the lower plate surface is connected via a flexible element 22 of a thermally conductive material such as copper, which may carry a designed for efficient cooling of the cryogenic plate 10 heat flow in

mechanical and thermal connection. As a result, the chiller 20 and the cryogenic plate 10 are mechanically not rigidly connected and therefore at least orthogonal to the table plane against each other and movable

vibration-isolated or vibration-insulated from each other. The underside 27 of the refrigerator 20 is in mechanical and fluid communication with a flange (not shown) of a flexible chamber portion 61 of a lower vacuum chamber 60. The upper vacuum chamber 50 and the lower

Vacuum chamber 60 are relative to a normal 70 of a table surface. 2 the tabletop 9 on opposite sides of the refrigerator. An upper / lower vacuum volume 52/62 of the upper / lower vacuum chamber 50/60 may be evacuated to an upper / lower pressure 50P / 60P by a pumping station (not shown) of the chiller 20 or via an external pumping line 81 through an external pumping station (80) become. A

Stiffening structure 30 connects from the environment 100 and rigidly connects the upper vacuum chamber 50 to the lower vacuum chamber 60, the connection engaging above the upper flexible chamber portion 51 and below the lower flexible chamber portion 61.

FIG. 2 shows a sectional view of a table 1 according to the invention as already described in FIG. The flexible upper chamber portion 51 and the flexible lower chamber portion 61 are compressible along the normal 70 and extendable. By the upper / lower pressure 50P / 60P acting on the upper / lower surface 53/63 orthogonal to the normal 70, an upper force 50K and a lower force 60K appear, which act on the chiller 20 along the normal 70 in opposite directions , If the lower force 60K is equal to the upper force 50K, the chiller 20 is not moved against the table top 9. This suppressed movement could, for example, cause vibratory disturbances for the experiments taking place on the tabletop 9 (experimental setup not shown).

induce. The upper force 50K is equal to the lower force 60K when the quotient of the difference of the ambient pressure P and the lower pressure 60P P2 and the difference of the ambient pressure P and the upper pressure 50P P1 is equal to the quotient of upper base 53 A1 and lower

Base area 63 A2, A1 / A2 = (P-P2) / (P-P1).

Figure 3 shows a sectional view of a table 1 according to the invention. The stiffening structure 30 acts as a pressure regulating means 90 to equalize the upper pressure 50P and the lower pressure 60P. A cavity 31 of the stiffening structure has respective mouths 32 in the upper

Vacuum chamber 50 and the lower vacuum chamber 60. This cavity 31st acts as a fluid connection 91 for an upper gas flow 50F from the upper vacuum chamber 50 and a lower gas flow 60F from the lower one

Vacuum chamber 60 to an external pumping station 80 or alternatively to a pumping station (not shown) of the chiller 20. It is also conceivable to design the pressure regulating device 90 as a separate component of the stiffening device 30, for example as a flexible

Balgschlauch.

Figure 4 shows a sectional view of a table according to the invention 1. On an opening 3 in the table top 9, a cryogenic plate 10 is arranged, on which the upper vacuum chamber 50 is flanged from below. The flexible upper chamber portion 51, for example, as vacuum technology of the upper vacuum chamber 50 is flanged from above to the chiller 20. In this embodiment, the chiller 20 is supported in a rigid frame 28 standing on the floor 82. From below, a flexible lower chamber portion 61 of a lower vacuum chamber 60 is flanged to the chiller 20 and to the frame 28 rigidly connected thereto. The flexible upper chamber portion 51 and the flexible lower chamber portion 61 may, for example, as a flexible Bellows (flexible bellows) with each end

welded annular connecting flanges be configured. The

Connection flanges can have, for example, an outside diameter of 6 "OD (about 152 mm) and an inside diameter of the free opening 5" ID (127 mm) 4 "ID (101, 6 mm) or 3.5" ID (89 mm). With typical setting of the upper / lower pressure 50P / 60P in the upper / lower vacuum chamber 50/60, due to the atmospheric pressure (usually 1 bar) of the environment 100, an upper force 50K and a lower force 60K of the same amount act in FIG

opposite direction, so that they compensate each other and compress the lower and upper flexible bellows. For an upper / lower base 53/63 corresponding to the free inner diameter of the end flanges of the bladder of 101 (127) mm, then the upper / lower force 50K 60K is 80 (127) Newton. FIG. 5 shows a sectional view of a table 1 according to the invention. In a modification of the embodiment shown in Figure 4, the frame 28 is connected via a number of damping devices 5 to the table top 9.

Figure 6 shows a perspective view of a table 1 according to the invention with table legs 4, a table top 9 and a mounted hood 40 for receiving, for example, a sample to be examined (not shown). The refrigerator is arranged in a housing 25 under the table. In the upper part of the hood 40 carries a window 46 and more

Viewing window 41 in the side area to inspect its interior by an experimenter. The hood 40 defines together with the them

limiting table top 9 a volume that can be evacuated, in particular via an external pumping station 80. The hood 40 is fastened via a flange 44 on the surface 2 of the table. Within the hood 40, a sample can be examined via the windows 41, 46, whereby the sample can be kept in a cryogenic atmosphere.

As far as is technically possible, the person skilled in the art will also be inspired by the invention disclosed herein to combine features which are described in the context of various embodiments according to the invention.

List of reference table

table surface

perforation

table legs

Damping device fastening means

Table top Cryogenic plate chiller

Thermal contact

top

bottom

Frame stiffening structure

cavity

Mouth hood

window

cavity

Room temperature counter flange Cryogenic counter flange View window Upper vacuum chamberF Upper gas flow

K Upper force P Upper pressure

Flexible upper chamber section Upper vacuum volume Upper base Lower vacuum chamber F Lower gas flow

K Lower force

P Lower pressure

Flexible lower chamber section Lower vacuum volume Lower base Spatial axis, normal External pumping station

External pumping line

Bottom pressure regulating device fluid connection 0 environment

Claims

claims

Table (1) with a table top (9),

marked by

A chiller (20), wherein at least a portion (10) of the table top (9) with the chiller (20) via a thermal contact (22) is cooled;

A pumpable upper vacuum chamber (50) for thermal insulation of the thermal contact (22) from an environment (100) of the table (1), one of the table top (9) facing the top (26) of the chiller (20) and to be cooled Section (10) connects to at least one flexible upper chamber section (51);

A pumpable lower vacuum chamber (60) which is connected to an underside (27) of the refrigerating machine (20) facing away from the table top (9), with at least one flexible lower one

Chamber section (61);

A rigid stiffening structure (30) connected to the chiller (20) via the flexible upper chamber portion (51) and the flexible lower chamber portion (61), respectively.

A table (1) according to claim 1, wherein the upper chamber portion (51) and lower chamber portion (61) are flexible at least along the same spatial axis (70).

A table (1) according to any one of the preceding claims, wherein the upper chamber portion (51) and the lower chamber portion (61) are flexible and otherwise rigid at least along a normal (70) of a table surface (2) of the table top (9) lower vacuum volume (62) of the lower vacuum chamber (60) and an upper vacuum volume (52) of the upper vacuum chamber (50) are variable.

A table (1) as claimed in any one of the preceding claims, wherein the stiffening structure (30) is rigidly connected to each of the upper vacuum chamber (50) and the lower vacuum chamber (60).

A table (1) according to claim 3 or claim 4 in combination with claim 3, wherein the upper vacuum volume (52) and the lower vacuum volume (62) are determined by the chiller (20) and / or an external pumping station (80) or various external pumping stations (62). 80) are pumpable.

A table (1) according to any one of the preceding claims, wherein a pressure regulating means (90) for adjusting an upper pressure (50P) in the upper vacuum chamber (50) and / or an upper gas flow (50F) from the upper vacuum chamber (50) and a lower Pressure (60P) in the upper vacuum chamber (60) and / or a lower gas flow (60F) from the upper one

Vacuum chamber (60) is provided.

A table (1) according to claim 6, wherein the pressure regulating means (90) has a fluid connection (91) between the upper one

Vacuum chamber (50) and the lower vacuum chamber (60), so that the upper pressure (50P) and / or the upper gas flow (50F) with the lower pressure (60P) and the lower gas flow (60F) are compensated.

A table (1) according to claim 3 or claim 3 in combination with any one of claims 1, 2, 4 to 7, wherein an upper base (53) of the upper vacuum volume (52) and a lower base (63) of the lower vacuum volume (62). , which are aligned parallel to the table surface (2), have substantially the same area, so that an upper force (50K) and a lower force (60K), which can be generated by pumping the upper vacuum chamber (50) and lower vacuum chamber (60) along the normal (70) of the table surface (2), at least partially compensate.

Table (1) according to one of claims 6 or 7 or according to claim 8 in combination with claim 6 or 7, wherein the

Pressure regulating device (90) has a cavity (31) in the

Stiffening structure (30) which opens into the upper vacuum chamber (50) and the lower vacuum chamber (60) respectively.

10. Table (1) according to any one of claims 6, 7 or 9 or claim 8 in combination with claim 6, 7 or 9, wherein the

Pressure regulating means (90) comprises a control unit for tunable control of the upper pressure (50P) and / or the upper gas flow (50F) and the lower pressure (60P) and lower gas flow (60F), so that an upper force (50K) and a lower force (50 K), which can be generated by pumping the upper vacuum chamber (50) or lower vacuum chamber (60) along the normal (70) of the table surface (2), at least partially compensate.

Table (1) according to one of the preceding claims, wherein the section (10) which can be cooled by the refrigerating machine (20) is a cryogenic plate (10) held in the table top (9).

Table (1) according to one of the preceding claims, wherein the chiller (20) on at least one table leg (4) of the table (1), on the table top (9) and / or on a bottom (82) is supported.

13. A method for the mechanical decoupling of a table top (9) of a table (1) and a chiller (20), which on one of the table top (9) facing top (26) with the table top (9) via a flexible upper chamber (50). , and the underside (27) remote from the table top (9) is connected to a lower chamber (60), wherein an upper pressure (50P) in the upper vacuum chamber (50) and / or an upper pressure (50P) is achieved by means of a pressure regulating device (90) Gas flow (50F) from the upper vacuum chamber (50) and a lower pressure (60P) in the lower vacuum chamber (60) and / or a lower gas flow (60F) from the lower

Vacuum chamber (60) are adjusted in such a way that an upper force (50K) and a lower force (60K), by

Pumping the upper vacuum chamber (50) and the lower vacuum chamber (60) along a normal (70) of a

Table surface (2) of the table top (9) act, at least partially compensate.