EP3069027A1 - Dispositif à rotor de pompe à vide et pompe à vide - Google Patents

Dispositif à rotor de pompe à vide et pompe à vide

Info

Publication number
EP3069027A1
EP3069027A1 EP14796740.0A EP14796740A EP3069027A1 EP 3069027 A1 EP3069027 A1 EP 3069027A1 EP 14796740 A EP14796740 A EP 14796740A EP 3069027 A1 EP3069027 A1 EP 3069027A1
Authority
EP
European Patent Office
Prior art keywords
rotor
vacuum pump
shaft
rotor shaft
elements
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP14796740.0A
Other languages
German (de)
English (en)
Other versions
EP3069027B1 (fr
Inventor
Markus Henry
Jürgen BREZINA
Robert Stolle
Peter Koeppel
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Leybold GmbH
Original Assignee
Oerlikon Leybold Vacuum GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Oerlikon Leybold Vacuum GmbH filed Critical Oerlikon Leybold Vacuum GmbH
Publication of EP3069027A1 publication Critical patent/EP3069027A1/fr
Application granted granted Critical
Publication of EP3069027B1 publication Critical patent/EP3069027B1/fr
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D25/00—Pumping installations or systems
    • F04D25/02—Units comprising pumps and their driving means
    • F04D25/06—Units comprising pumps and their driving means the pump being electrically driven
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/02—Selection of particular materials
    • F04D29/023—Selection of particular materials especially adapted for elastic fluid pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/26—Rotors specially for elastic fluids
    • F04D29/32—Rotors specially for elastic fluids for axial flow pumps
    • F04D29/321—Rotors specially for elastic fluids for axial flow pumps for axial flow compressors
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05D—INDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
    • F05D2300/00—Materials; Properties thereof
    • F05D2300/10—Metals, alloys or intermetallic compounds
    • F05D2300/17—Alloys
    • F05D2300/173—Aluminium alloys, e.g. AlCuMgPb
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05D—INDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
    • F05D2300/00—Materials; Properties thereof
    • F05D2300/10—Metals, alloys or intermetallic compounds
    • F05D2300/17—Alloys
    • F05D2300/174—Titanium alloys, e.g. TiAl
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05D—INDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
    • F05D2300/00—Materials; Properties thereof
    • F05D2300/40—Organic materials
    • F05D2300/43—Synthetic polymers, e.g. plastics; Rubber
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05D—INDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
    • F05D2300/00—Materials; Properties thereof
    • F05D2300/60—Properties or characteristics given to material by treatment or manufacturing
    • F05D2300/603—Composites; e.g. fibre-reinforced

Definitions

  • the invention relates to a vacuum pump rotor device and a vacuum pump.
  • Vacuum pumps such as turbomolecular pumps have a rotor shaft in a pump housing.
  • the rotor shaft which is usually driven by an electric motor, carries at least one rotor element.
  • a turbomolecular pump a plurality of rotor elements in the form of rotor disks are arranged on the rotor shaft.
  • the rotor shaft is rotatably mounted in the pump housing via bearing elements.
  • the vacuum pump has a stator element arranged in the housing.
  • a plurality of stator elements designed as stator disks are provided.
  • the stator disks and the rotor disks are arranged alternately in the longitudinal direction of the pump or in the flow direction of the medium to be pumped.
  • the individual rotor elements When constructed from individual rotor disks rotors, the individual rotor elements must be firmly connected to the rotor shaft. Corresponding fixed positionally accurate connections between the rotor shaft and the rotor elements must be ensured in all operating conditions, that is, especially in the event of strong temperature and speed fluctuations. In the case of known multi-part rotors, in particular rotors having a plurality of rotor disks, this is achieved in that the rotor disk has a great excess in relation to the rotor shaft for joining. To the Joining, it is then required to cool the rotor shaft strong and to heat the rotor elements strongly to allow pressing the rotor elements on the shaft.
  • the rotor elements in an oven such as a convection oven, to be heated to about 120 ° C.
  • the corresponding warm-up time is 1 - 2 hours.
  • the heat-up times of the assembly after joining are about 1 to 2 hours to reach room temperature. This known joining method is time consuming and costly.
  • the object of the invention is to provide a vacuum pump rotor device whose production is more cost-effective even with high reliability, preferably a joining of the components at room temperature or only a small difference in temperature of the components should be possible.
  • the vacuum pump rotor device has a rotor shaft. At least one rotor element is arranged on the rotor shaft.
  • a plurality of rotor elements designed as rotor disks are arranged on the rotor shaft in the longitudinal direction of the rotor shaft.
  • the rotor or the rotor element comprises aluminum, titanium and / or CFRP and the rotor shaft has a chromium-nickel steel (Cr-Ni). Steel).
  • Cr-Ni chromium-nickel steel
  • the use of aluminum, titanium and / or CFRP as a material for a rotor or a rotor element has the advantage that the required strength and stability can be realized in relation to the density of the material required by the high speeds and thus To be able to realize connected high forces and voltages.
  • the required properties of the shaft can be realized by a steel shaft, in particular a stainless steel shaft.
  • the shaft comprises Cr-Ni steel with a sulfur additive and is most preferably made from chromium-nickel steels with added sulfur.
  • the rotor or the rotor element is made in a preferred embodiment of aluminum, an aluminum alloy and / or high-strength aluminum.
  • high-strength aluminum with a high tensile strength value of in particular at least 250 N / mm.
  • High-strength aluminum also has the advantage that it has a high fatigue strength even at use temperatures of 100-120 ° C.
  • Particularly preferred is the use of AW-Al Cu 2Mg 1.5 Ni.
  • the at least one rotor element is made of titanium or a titanium alloy and / or of CFRP.
  • a significant reduction in assembly costs can be realized according to the invention in that the coefficient of thermal expansion of the rotor shaft differs as little as possible from the thermal expansion coefficient of the at least one rotor element.
  • Thermal expansion coefficient ensures that even at high temperature and speed fluctuations, the reliability is guaranteed. It is particularly preferred to provide a pairing of material, in particular high-strength aluminum and stainless steel, as the material pairing. It is preferred that the at least one rotor element made of aluminum and the Rotor shaft made of stainless steel, in particular Cr-Ni steel with sulfur additive, are produced.
  • the at least one rotor element with respect to the rotor shaft has an excess, can occur in the expansions in the circumferential direction of 0.25% to 0.35%. Due to this excess reliability can be ensured despite the high temperature fluctuations, while still allowing joining of the components at room temperature.
  • a plurality of rotor elements are arranged in particular in the longitudinal direction on the rotor shaft, in particular pressed.
  • a corresponding rotor element may, for example, also be a disc-shaped carrier of a Holweck stage. This carrier carries the tubular elements of the Holweck stage, or is integrally formed therewith.
  • Such a rotor element or such a rotor element carrier according to the invention from the above material, in particular aluminum, prepared and joined to a stainless steel shaft by pressing.
  • the rotor elements may be rotor disks, spacer elements optionally additionally being provided between rotor elements or rotor disks. These elements can be used in particular for forming an intermediate inlet in a multi-inlet pump.
  • the invention relates to a vacuum pump which is in particular a turbomolecular pump.
  • the vacuum pump according to the invention has a rotor device according to the invention, as described above, in particular in one of the preferred developments.
  • the vacuum pump has a pump housing in which the rotor shaft is mounted via bearing elements.
  • a drive device is provided which drives the rotor shaft.
  • at least one stator element is arranged in the pump housing, it being possible for the stator element to be a stator disk.
  • a turbomolecular pump a plurality of stator disks are then arranged alternately in connection with a plurality of rotor disks.
  • the figure shows a highly simplified schematic sectional view of a turbomolecular pump.
  • stator elements 16 are arranged in which it acts in the illustrated embodiment to stator 16.
  • the rotor shaft 10 is mounted in the pump housing 16 via bearing elements 18, 20 and is driven by a drive device 22.
  • a sleeve-shaped spacer element 24 is further provided between two rotor disks 12.
  • an intermediate inlet 26 is formed.
  • the vacuum pump shown schematically in the drawing thus sucks the medium to be conveyed in the direction of an arrow 28 through a main inlet. Furthermore, medium is sucked in via the intermediate inlet 26 in the direction of an arrow 30. The two sucked media are, as shown by the arrow 32 conveyed in the direction of an outlet.
  • the rotor shaft 10 is made in a preferred embodiment of stainless steel.
  • the individual rotor elements 12 and the spacer element 24 are made in a preferred embodiment of aluminum.
  • the joining of the rotor elements 12 and the spacer element 24 takes place by pressing at room temperature.
  • the individual rotor elements 12 as well as the spacer element 24 have an excessively elongated expansion in the circumferential direction of 0.07% to 0.2%.
  • the pressing force with which the components can be joined at room temperature is in a range of 5 to 50 kN.

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)

Abstract

L'invention concerne un dispositif à rotor de pompe à vide comprenant un arbre de rotor (10) et au moins un élément de rotor (12) disposé sur l'arbre de rotor (10). Selon l'invention, le ou les éléments de rotor (12) comportent de l'aluminium, du titane et/ou une matière plastique renforcée de fibres de carbone et l'arbre de rotor (10) un acier chrome-nickel. Ainsi, il est en particulier possible d'assembler le ou les éléments de rotor (12) sur l'arbre de rotor (10) par compression à température ambiante.
EP14796740.0A 2013-11-12 2014-11-05 Dispositif à rotor de pompe à vide et pompe à vide Active EP3069027B1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE202013010195.4U DE202013010195U1 (de) 2013-11-12 2013-11-12 Vakuumpumpen-Rotoreinrichtung sowie Vakuumpumpe
PCT/EP2014/073771 WO2015071143A1 (fr) 2013-11-12 2014-11-05 Dispositif à rotor de pompe à vide et pompe à vide

Publications (2)

Publication Number Publication Date
EP3069027A1 true EP3069027A1 (fr) 2016-09-21
EP3069027B1 EP3069027B1 (fr) 2020-09-09

Family

ID=51897252

Family Applications (1)

Application Number Title Priority Date Filing Date
EP14796740.0A Active EP3069027B1 (fr) 2013-11-12 2014-11-05 Dispositif à rotor de pompe à vide et pompe à vide

Country Status (7)

Country Link
US (1) US20160290343A1 (fr)
EP (1) EP3069027B1 (fr)
JP (1) JP6532461B2 (fr)
KR (1) KR102202936B1 (fr)
CN (1) CN105765231B (fr)
DE (1) DE202013010195U1 (fr)
WO (1) WO2015071143A1 (fr)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106762713B (zh) * 2017-03-09 2018-12-14 苏州摩星真空科技有限公司 立式复合径流分子泵
US11519419B2 (en) 2020-04-15 2022-12-06 Kin-Chung Ray Chiu Non-sealed vacuum pump with supersonically rotatable bladeless gas impingement surface

Family Cites Families (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2654055B2 (de) * 1976-11-29 1979-11-08 Kernforschungsanlage Juelich Gmbh, 5170 Juelich Rotor- und Statorscheibe für Turbomolekularpumpe
JPS59113990A (ja) * 1982-12-22 1984-06-30 Hitachi Ltd タ−ボ分子ポンプのロ−タ製造方法
JP3486000B2 (ja) * 1995-03-31 2004-01-13 日本原子力研究所 ねじ溝真空ポンプ
JP3792318B2 (ja) * 1996-10-18 2006-07-05 株式会社大阪真空機器製作所 真空ポンプ
US6095754A (en) * 1998-05-06 2000-08-01 Applied Materials, Inc. Turbo-Molecular pump with metal matrix composite rotor and stator
DE19915307A1 (de) * 1999-04-03 2000-10-05 Leybold Vakuum Gmbh Reibungsvakuumpumpe mit aus Welle und Rotor bestehender Rotoreinheit
DE10008691B4 (de) * 2000-02-24 2017-10-26 Pfeiffer Vacuum Gmbh Gasreibungspumpe
DE10039006A1 (de) * 2000-08-10 2002-02-21 Leybold Vakuum Gmbh Zweiwellenvakuumpumpe
DE10053663A1 (de) * 2000-10-28 2002-05-08 Leybold Vakuum Gmbh Mechanische kinetische Vakuumpumpe mit Rotor und Welle
GB0412667D0 (en) * 2004-06-07 2004-07-07 Boc Group Plc Vacuum pump impeller
GB2420379A (en) * 2004-11-18 2006-05-24 Boc Group Plc Vacuum pump having a motor combined with an impeller
DE102005008643A1 (de) * 2005-02-25 2006-08-31 Leybold Vacuum Gmbh Holweck-Vakuumpumpe
EP1978582A1 (fr) * 2007-04-05 2008-10-08 Atotech Deutschland Gmbh Procédé pour la préparation d'électrodes à utiliser dans une pile à combustible
US20090095436A1 (en) * 2007-10-11 2009-04-16 Jean-Louis Pessin Composite Casting Method of Wear-Resistant Abrasive Fluid Handling Components
EP2096317B1 (fr) * 2008-02-27 2012-08-15 Agilent Technologies, Inc. Procédé de fabrication d'un ensemble rotor d'une pompe à vide rotative
US8109744B2 (en) * 2008-03-26 2012-02-07 Ebara Corporation Turbo vacuum pump
DE102008063131A1 (de) * 2008-12-24 2010-07-01 Oerlikon Leybold Vacuum Gmbh Vakuumpumpe
WO2012105116A1 (fr) * 2011-02-04 2012-08-09 エドワーズ株式会社 Corps rotatif de pompe à vide, élément fixe placé pour être opposé à celui-ci, et pompe à vide les comportant

Also Published As

Publication number Publication date
CN105765231B (zh) 2018-10-26
JP2016537552A (ja) 2016-12-01
EP3069027B1 (fr) 2020-09-09
CN105765231A (zh) 2016-07-13
US20160290343A1 (en) 2016-10-06
WO2015071143A1 (fr) 2015-05-21
KR20160081921A (ko) 2016-07-08
DE202013010195U1 (de) 2015-02-18
KR102202936B1 (ko) 2021-01-13
JP6532461B2 (ja) 2019-06-19

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