EP3069027B1 - Dispositif à rotor de pompe à vide et pompe à vide - Google Patents

Dispositif à rotor de pompe à vide et pompe à vide Download PDF

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Publication number
EP3069027B1
EP3069027B1 EP14796740.0A EP14796740A EP3069027B1 EP 3069027 B1 EP3069027 B1 EP 3069027B1 EP 14796740 A EP14796740 A EP 14796740A EP 3069027 B1 EP3069027 B1 EP 3069027B1
Authority
EP
European Patent Office
Prior art keywords
rotor
vacuum pump
elements
shaft
rotor shaft
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
EP14796740.0A
Other languages
German (de)
English (en)
Other versions
EP3069027A1 (fr
Inventor
Markus Henry
Jürgen BREZINA
Robert Stolle
Peter Koeppel
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Leybold GmbH
Original Assignee
Leybold GmbH
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Filing date
Publication date
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Publication of EP3069027A1 publication Critical patent/EP3069027A1/fr
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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D25/00—Pumping installations or systems
    • F04D25/02—Units comprising pumps and their driving means
    • F04D25/06—Units comprising pumps and their driving means the pump being electrically driven
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/02—Selection of particular materials
    • F04D29/023—Selection of particular materials especially adapted for elastic fluid pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/26—Rotors specially for elastic fluids
    • F04D29/32—Rotors specially for elastic fluids for axial flow pumps
    • F04D29/321—Rotors specially for elastic fluids for axial flow pumps for axial flow compressors
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05D—INDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
    • F05D2300/00—Materials; Properties thereof
    • F05D2300/10—Metals, alloys or intermetallic compounds
    • F05D2300/17—Alloys
    • F05D2300/173—Aluminium alloys, e.g. AlCuMgPb
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05D—INDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
    • F05D2300/00—Materials; Properties thereof
    • F05D2300/10—Metals, alloys or intermetallic compounds
    • F05D2300/17—Alloys
    • F05D2300/174—Titanium alloys, e.g. TiAl
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05D—INDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
    • F05D2300/00—Materials; Properties thereof
    • F05D2300/40—Organic materials
    • F05D2300/43—Synthetic polymers, e.g. plastics; Rubber
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05D—INDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
    • F05D2300/00—Materials; Properties thereof
    • F05D2300/60—Properties or characteristics given to material by treatment or manufacturing
    • F05D2300/603—Composites; e.g. fibre-reinforced

Definitions

  • the invention relates to a vacuum pump rotor device and a vacuum pump.
  • Vacuum pumps such as turbo molecular pumps have a rotor shaft in a pump housing.
  • the rotor shaft which is usually driven by an electric motor, carries at least one rotor element.
  • several rotor elements in the form of rotor disks are arranged on the rotor shaft.
  • the rotor shaft is rotatably mounted in the pump housing via bearing elements.
  • the vacuum pump also has a stator element arranged in the housing.
  • several stator elements designed as stator disks are provided.
  • the stator disks and the rotor disks are arranged alternately in the longitudinal direction of the pump or in the flow direction of the medium to be pumped.
  • the cooling time is approx. 5 minutes.
  • the rotor elements must be heated to approx. 120 ° C in an oven such as a convection oven.
  • the corresponding warm-up time is 1 - 2 hours.
  • the soaking times for the assembly after joining are around 1 - 2 hours to achieve room temperature. This known joining method is time-consuming and costly.
  • the pamphlet US 2009/0214348 A1 describes a method for manufacturing a rotor of a vacuum pump.
  • the aluminum rotor unit is connected to the shaft with the aid of a plug connection that engages in the steel shaft.
  • the pamphlet US 2009/0246038 A1 discloses another vacuum pump.
  • the object of the invention is to create a vacuum pump rotor device, the production of which is more cost-effective even with high operational reliability, whereby preferably joining of the components at room temperature or with only a small temperature difference between the components should be possible.
  • the vacuum pump rotor device has a rotor shaft.
  • Several rotor elements are arranged in the longitudinal direction on the rotor shaft.
  • it is a rotor device of a turbo molecular pump.
  • the rotor or rotor element is made of aluminum, titanium and / or CFRP and the rotor shaft is made of chrome-nickel steel (Cr-Ni Steel).
  • the use of aluminum, titanium and / or CFRP as a material for rotors or rotor elements has the advantage that the required strength and stability can be achieved in relation to the density of the material, which is required for the high speeds and the associated high To be able to realize forces and tensions.
  • the required properties of the shaft can be realized by a steel shaft, in particular a stainless steel shaft.
  • the shaft has JZ Cr-Ni steel with an addition of sulfur and is particularly preferably made from chromium-nickel steels with an addition of sulfur.
  • the rotor elements are made of aluminum, an aluminum alloy and / or high-strength aluminum.
  • the use of high-strength aluminum with a high tensile strength value of in particular at least 250 N / mm is particularly preferred.
  • High-strength aluminum also has the advantage that it has a high fatigue strength even at operating temperatures of 100-120 ° C.
  • the use of AW-Al Cu 2Mg 1.5 Ni is particularly preferred.
  • the rotor elements are made from titanium or a titanium alloy and / or from CFRP.
  • a significant reduction in assembly costs can be achieved according to the invention in that the coefficient of thermal expansion of the rotor shaft differs as little as possible from the coefficient of thermal expansion of the rotor elements.
  • a material pairing is used which does not tend to seize and whose thermal expansion coefficients have a small difference, so that a smaller excess is required for joining than in the prior art.
  • joining at room temperature is possible due to the small oversize required, or the components need at least only have a small temperature difference.
  • the rotor elements are made of aluminum and the rotor shaft of stainless steel, in particular Cr-Ni steel with added sulfur.
  • a preferred embodiment is a rotor device for a turbo molecular pump, in which a plurality of rotor elements are arranged in the longitudinal direction on the rotor shaft, in particular are pressed on.
  • the rotor elements can be rotor disks, with additional spacer elements being provided between rotor elements or rotor disks, if necessary. These elements can be used in particular to form an intermediate inlet in a multi-inlet pump.
  • the invention also relates to a vacuum pump which is in particular a turbo molecular pump.
  • the vacuum pump according to the invention has a rotor device according to the invention, as described above, in particular in one of the preferred developments.
  • the vacuum pump has a pump housing in which the rotor shaft is mounted via bearing elements.
  • a drive device is provided which drives the rotor shaft.
  • at least one stator element is arranged in the pump housing, it being possible for the stator element to be a stator disk. In the case of a turbo molecular pump, several stator disks are then arranged alternately in connection with several rotor disks.
  • the figure shows a greatly simplified schematic sectional view of a turbo molecular pump.
  • stator elements 16 are arranged, which in the illustrated embodiment are stator disks 16.
  • the rotor shaft 10 is mounted in the pump housing 14 via bearing elements 18, 20 and is driven by a drive device 22.
  • a sleeve-shaped spacer element 24 is also provided between two rotor disks 12. An intermediate inlet 26 is thereby formed.
  • the vacuum pump shown schematically in the drawing thus sucks in the medium to be conveyed in the direction of an arrow 28 through a main inlet. Furthermore, medium is sucked in via the intermediate inlet 26 in the direction of an arrow 30. The two media sucked in are conveyed in the direction of an outlet, as shown by arrow 32.
  • the rotor shaft 10 is made of stainless steel.
  • the individual rotor elements 12 and the spacer element 24 are made from aluminum in a preferred embodiment.
  • the rotor elements 12 and the spacer element 24 are joined by pressing on at room temperature.
  • the individual rotor elements 12 and also the spacer element 24 have an elongation due to oversize in the circumferential direction of 0.07% to 0.2%.
  • the pressing force with which the components can be joined at room temperature is in a range from 5 to 50 kN.

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)

Claims (9)

  1. Dispositif de rotor pour pompe à vide, doté
    d'un arbre de rotor (10) et
    de plusieurs éléments de rotor (12) agencés sur l'arbre de rotor (10) dans la direction longitudinale,
    dans lequel les éléments de rotor (12) comporte de l'aluminium, du titane et/ou du plastique renforcé de fibres de carbone,
    caractérisé en ce que l'arbre de rotor (10) comporte un acier chrome-nickel avec additif soufré et est en particulier fabriqué en un acier chrome-nickel avec additif soufré.
  2. Dispositif de rotor pour pompe à vide selon la revendication 1, caractérisé en ce que les éléments de rotor (12) sont fabriqués en aluminium, en un alliage d'aluminium et/ou en aluminium à haute résistance.
  3. Dispositif de rotor pour pompe à vide selon la revendication 1, caractérisé en ce que les éléments de rotor (12) sont fabriqués en titane et/ou en un alliage de titane.
  4. Dispositif de rotor pour pompe à vide selon la revendication 1, caractérisé en ce que les éléments de rotor (12) sont fabriqués en plastique renforcé de fibres de carbone.
  5. Dispositif de rotor pour pompe à vide selon l'une des revendications 1-4, caractérisé en ce que l'arbre de rotor (10) comporte un alliage d'acier inoxydable avec additif soufré, dans lequel il s'agit en particulier d'acier inoxydable X8CrNiS18-9.
  6. Dispositif de rotor pour pompe à vide selon l'une des revendications 1-5, caractérisé en ce que l'association de matériaux est sélectionnée de telle sorte que les éléments de rotor (12) peuvent être attachés sur l'arbre de rotor (10) par pressage.
  7. Dispositif de rotor pour pompe à vide selon l'une des revendications 1- 6, caractérisé en ce que les éléments de rotor sont réalisés comme disques de rotor (12).
  8. Dispositif de rotor pour pompe à vide selon l'une des revendications 1- 7, caractérisé en ce qu'au moins un élément d'écartement (24) est agencé entre deux des éléments de rotor (12).
  9. Pompe à vide, en particulier pompe turbomoléculaire, dotée d'un dispositif de rotor pour pompe à vide selon l'une des revendications 1- 8,
    dans laquelle l'arbre de rotor (10) est disposé dans un carter de pompe (14) par le biais d'éléments porteurs (28),
    d'un dispositif d'entraînement (22) raccordé à l'arbre de rotor (10) et
    d'au moins un élément de stator (16) agencé dans le carter de pompe (14).
EP14796740.0A 2013-11-12 2014-11-05 Dispositif à rotor de pompe à vide et pompe à vide Active EP3069027B1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE202013010195.4U DE202013010195U1 (de) 2013-11-12 2013-11-12 Vakuumpumpen-Rotoreinrichtung sowie Vakuumpumpe
PCT/EP2014/073771 WO2015071143A1 (fr) 2013-11-12 2014-11-05 Dispositif à rotor de pompe à vide et pompe à vide

Publications (2)

Publication Number Publication Date
EP3069027A1 EP3069027A1 (fr) 2016-09-21
EP3069027B1 true EP3069027B1 (fr) 2020-09-09

Family

ID=51897252

Family Applications (1)

Application Number Title Priority Date Filing Date
EP14796740.0A Active EP3069027B1 (fr) 2013-11-12 2014-11-05 Dispositif à rotor de pompe à vide et pompe à vide

Country Status (7)

Country Link
US (1) US20160290343A1 (fr)
EP (1) EP3069027B1 (fr)
JP (1) JP6532461B2 (fr)
KR (1) KR102202936B1 (fr)
CN (1) CN105765231B (fr)
DE (1) DE202013010195U1 (fr)
WO (1) WO2015071143A1 (fr)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106762713B (zh) * 2017-03-09 2018-12-14 苏州摩星真空科技有限公司 立式复合径流分子泵
US11519419B2 (en) 2020-04-15 2022-12-06 Kin-Chung Ray Chiu Non-sealed vacuum pump with supersonically rotatable bladeless gas impingement surface

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20010018018A1 (en) * 2000-02-24 2001-08-30 Armin Conrad Gas friction pump
US20090246038A1 (en) * 2008-03-26 2009-10-01 Ebara Corporation Turbo vacuum pump

Family Cites Families (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2654055B2 (de) * 1976-11-29 1979-11-08 Kernforschungsanlage Juelich Gmbh, 5170 Juelich Rotor- und Statorscheibe für Turbomolekularpumpe
JPS59113990A (ja) * 1982-12-22 1984-06-30 Hitachi Ltd タ−ボ分子ポンプのロ−タ製造方法
JP3486000B2 (ja) * 1995-03-31 2004-01-13 日本原子力研究所 ねじ溝真空ポンプ
JP3792318B2 (ja) * 1996-10-18 2006-07-05 株式会社大阪真空機器製作所 真空ポンプ
US6095754A (en) * 1998-05-06 2000-08-01 Applied Materials, Inc. Turbo-Molecular pump with metal matrix composite rotor and stator
DE19915307A1 (de) * 1999-04-03 2000-10-05 Leybold Vakuum Gmbh Reibungsvakuumpumpe mit aus Welle und Rotor bestehender Rotoreinheit
DE10039006A1 (de) * 2000-08-10 2002-02-21 Leybold Vakuum Gmbh Zweiwellenvakuumpumpe
DE10053663A1 (de) * 2000-10-28 2002-05-08 Leybold Vakuum Gmbh Mechanische kinetische Vakuumpumpe mit Rotor und Welle
GB0412667D0 (en) * 2004-06-07 2004-07-07 Boc Group Plc Vacuum pump impeller
GB2420379A (en) * 2004-11-18 2006-05-24 Boc Group Plc Vacuum pump having a motor combined with an impeller
DE102005008643A1 (de) * 2005-02-25 2006-08-31 Leybold Vacuum Gmbh Holweck-Vakuumpumpe
EP1978582A1 (fr) * 2007-04-05 2008-10-08 Atotech Deutschland Gmbh Procédé pour la préparation d'électrodes à utiliser dans une pile à combustible
US20090095436A1 (en) * 2007-10-11 2009-04-16 Jean-Louis Pessin Composite Casting Method of Wear-Resistant Abrasive Fluid Handling Components
EP2096317B1 (fr) * 2008-02-27 2012-08-15 Agilent Technologies, Inc. Procédé de fabrication d'un ensemble rotor d'une pompe à vide rotative
DE102008063131A1 (de) * 2008-12-24 2010-07-01 Oerlikon Leybold Vacuum Gmbh Vakuumpumpe
US20130309076A1 (en) * 2011-02-04 2013-11-21 Edwards Japan Limited Rotating Body of Vacuum Pump, Fixed Member Disposed Opposite Rotating Body, and Vacuum Pump Provided with Rotating Body and Fixed Member

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20010018018A1 (en) * 2000-02-24 2001-08-30 Armin Conrad Gas friction pump
US20090246038A1 (en) * 2008-03-26 2009-10-01 Ebara Corporation Turbo vacuum pump

Also Published As

Publication number Publication date
CN105765231B (zh) 2018-10-26
JP2016537552A (ja) 2016-12-01
JP6532461B2 (ja) 2019-06-19
KR102202936B1 (ko) 2021-01-13
CN105765231A (zh) 2016-07-13
EP3069027A1 (fr) 2016-09-21
DE202013010195U1 (de) 2015-02-18
KR20160081921A (ko) 2016-07-08
US20160290343A1 (en) 2016-10-06
WO2015071143A1 (fr) 2015-05-21

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