EP2935100A1 - Verfahren zur aufbereitung feinteiliger feststoffe bei der herstellung von chlorsilanen - Google Patents
Verfahren zur aufbereitung feinteiliger feststoffe bei der herstellung von chlorsilanenInfo
- Publication number
- EP2935100A1 EP2935100A1 EP13795225.5A EP13795225A EP2935100A1 EP 2935100 A1 EP2935100 A1 EP 2935100A1 EP 13795225 A EP13795225 A EP 13795225A EP 2935100 A1 EP2935100 A1 EP 2935100A1
- Authority
- EP
- European Patent Office
- Prior art keywords
- pressure
- finely divided
- divided solids
- pressing
- different
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
- 239000007787 solid Substances 0.000 title claims abstract description 40
- 238000000034 method Methods 0.000 title claims abstract description 39
- 239000005046 Chlorosilane Substances 0.000 title claims abstract description 20
- KOPOQZFJUQMUML-UHFFFAOYSA-N chlorosilane Chemical class Cl[SiH3] KOPOQZFJUQMUML-UHFFFAOYSA-N 0.000 title claims abstract description 20
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 20
- 238000003825 pressing Methods 0.000 claims description 34
- 238000013022 venting Methods 0.000 claims description 9
- 239000000919 ceramic Substances 0.000 claims description 8
- 238000011049 filling Methods 0.000 claims description 6
- 238000002360 preparation method Methods 0.000 claims description 5
- 229910052581 Si3N4 Inorganic materials 0.000 claims description 4
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 claims description 4
- 230000000740 bleeding effect Effects 0.000 claims 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 12
- 229910052710 silicon Inorganic materials 0.000 description 12
- 239000010703 silicon Substances 0.000 description 12
- 239000007789 gas Substances 0.000 description 10
- VEXZGXHMUGYJMC-UHFFFAOYSA-N Hydrochloric acid Chemical compound Cl VEXZGXHMUGYJMC-UHFFFAOYSA-N 0.000 description 7
- 239000011230 binding agent Substances 0.000 description 7
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 6
- 230000015572 biosynthetic process Effects 0.000 description 6
- 239000008188 pellet Substances 0.000 description 6
- 239000000428 dust Substances 0.000 description 5
- 239000000203 mixture Substances 0.000 description 5
- VSCWAEJMTAWNJL-UHFFFAOYSA-K aluminium trichloride Chemical compound Cl[Al](Cl)Cl VSCWAEJMTAWNJL-UHFFFAOYSA-K 0.000 description 4
- 238000006243 chemical reaction Methods 0.000 description 4
- 229910000041 hydrogen chloride Inorganic materials 0.000 description 4
- IXCSERBJSXMMFS-UHFFFAOYSA-N hydrogen chloride Substances Cl.Cl IXCSERBJSXMMFS-UHFFFAOYSA-N 0.000 description 4
- 239000000047 product Substances 0.000 description 4
- 150000001805 chlorine compounds Chemical class 0.000 description 3
- 229910052742 iron Inorganic materials 0.000 description 3
- 150000002894 organic compounds Chemical class 0.000 description 3
- 239000000843 powder Substances 0.000 description 3
- VXEGSRKPIUDPQT-UHFFFAOYSA-N 4-[4-(4-methoxyphenyl)piperazin-1-yl]aniline Chemical compound C1=CC(OC)=CC=C1N1CCN(C=2C=CC(N)=CC=2)CC1 VXEGSRKPIUDPQT-UHFFFAOYSA-N 0.000 description 2
- 229910000760 Hardened steel Inorganic materials 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- 239000006227 byproduct Substances 0.000 description 2
- OSGAYBCDTDRGGQ-UHFFFAOYSA-L calcium sulfate Chemical compound [Ca+2].[O-]S([O-])(=O)=O OSGAYBCDTDRGGQ-UHFFFAOYSA-L 0.000 description 2
- 239000007795 chemical reaction product Substances 0.000 description 2
- 239000000460 chlorine Substances 0.000 description 2
- 230000006835 compression Effects 0.000 description 2
- 238000007906 compression Methods 0.000 description 2
- 239000008187 granular material Substances 0.000 description 2
- 239000007791 liquid phase Substances 0.000 description 2
- 210000004400 mucous membrane Anatomy 0.000 description 2
- 239000002994 raw material Substances 0.000 description 2
- RMAQACBXLXPBSY-UHFFFAOYSA-N silicic acid Chemical class O[Si](O)(O)O RMAQACBXLXPBSY-UHFFFAOYSA-N 0.000 description 2
- 239000005049 silicon tetrachloride Substances 0.000 description 2
- ZDHXKXAHOVTTAH-UHFFFAOYSA-N trichlorosilane Chemical compound Cl[SiH](Cl)Cl ZDHXKXAHOVTTAH-UHFFFAOYSA-N 0.000 description 2
- 239000005052 trichlorosilane Substances 0.000 description 2
- 239000002699 waste material Substances 0.000 description 2
- ZAMOUSCENKQFHK-UHFFFAOYSA-N Chlorine atom Chemical compound [Cl] ZAMOUSCENKQFHK-UHFFFAOYSA-N 0.000 description 1
- 229910021578 Iron(III) chloride Inorganic materials 0.000 description 1
- BLRPTPMANUNPDV-UHFFFAOYSA-N Silane Chemical compound [SiH4] BLRPTPMANUNPDV-UHFFFAOYSA-N 0.000 description 1
- 229910000831 Steel Inorganic materials 0.000 description 1
- 230000002378 acidificating effect Effects 0.000 description 1
- 238000005273 aeration Methods 0.000 description 1
- 150000004645 aluminates Chemical class 0.000 description 1
- 238000000418 atomic force spectrum Methods 0.000 description 1
- 238000007664 blowing Methods 0.000 description 1
- 238000001354 calcination Methods 0.000 description 1
- AXCZMVOFGPJBDE-UHFFFAOYSA-L calcium dihydroxide Chemical compound [OH-].[OH-].[Ca+2] AXCZMVOFGPJBDE-UHFFFAOYSA-L 0.000 description 1
- 239000000920 calcium hydroxide Substances 0.000 description 1
- 229910001861 calcium hydroxide Inorganic materials 0.000 description 1
- BRPQOXSCLDDYGP-UHFFFAOYSA-N calcium oxide Chemical compound [O-2].[Ca+2] BRPQOXSCLDDYGP-UHFFFAOYSA-N 0.000 description 1
- 239000000292 calcium oxide Substances 0.000 description 1
- ODINCKMPIJJUCX-UHFFFAOYSA-N calcium oxide Inorganic materials [Ca]=O ODINCKMPIJJUCX-UHFFFAOYSA-N 0.000 description 1
- 239000004568 cement Substances 0.000 description 1
- 229910052801 chlorine Inorganic materials 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 239000000356 contaminant Substances 0.000 description 1
- 239000002178 crystalline material Substances 0.000 description 1
- 238000005137 deposition process Methods 0.000 description 1
- MROCJMGDEKINLD-UHFFFAOYSA-N dichlorosilane Chemical compound Cl[SiH2]Cl MROCJMGDEKINLD-UHFFFAOYSA-N 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000000605 extraction Methods 0.000 description 1
- 239000012065 filter cake Substances 0.000 description 1
- 229910021485 fumed silica Inorganic materials 0.000 description 1
- 229910052736 halogen Inorganic materials 0.000 description 1
- FBAFATDZDUQKNH-UHFFFAOYSA-M iron chloride Chemical compound [Cl-].[Fe] FBAFATDZDUQKNH-UHFFFAOYSA-M 0.000 description 1
- RBTARNINKXHZNM-UHFFFAOYSA-K iron trichloride Chemical compound Cl[Fe](Cl)Cl RBTARNINKXHZNM-UHFFFAOYSA-K 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 238000000465 moulding Methods 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 150000001282 organosilanes Chemical class 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- JTJMJGYZQZDUJJ-UHFFFAOYSA-N phencyclidine Chemical class C1CCCCN1C1(C=2C=CC=CC=2)CCCCC1 JTJMJGYZQZDUJJ-UHFFFAOYSA-N 0.000 description 1
- 229920001223 polyethylene glycol Polymers 0.000 description 1
- 230000001681 protective effect Effects 0.000 description 1
- 239000000376 reactant Substances 0.000 description 1
- 239000004576 sand Substances 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- 239000011856 silicon-based particle Substances 0.000 description 1
- 229920002545 silicone oil Polymers 0.000 description 1
- 238000005245 sintering Methods 0.000 description 1
- 239000002002 slurry Substances 0.000 description 1
- 239000007858 starting material Substances 0.000 description 1
- 230000003068 static effect Effects 0.000 description 1
- 239000010959 steel Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 239000000725 suspension Substances 0.000 description 1
- 238000003786 synthesis reaction Methods 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B33/00—Silicon; Compounds thereof
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B33/00—Silicon; Compounds thereof
- C01B33/08—Compounds containing halogen
- C01B33/107—Halogenated silanes
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B33/00—Silicon; Compounds thereof
- C01B33/08—Compounds containing halogen
- C01B33/107—Halogenated silanes
- C01B33/1071—Tetrachloride, trichlorosilane or silicochloroform, dichlorosilane, monochlorosilane or mixtures thereof
- C01B33/10742—Tetrachloride, trichlorosilane or silicochloroform, dichlorosilane, monochlorosilane or mixtures thereof prepared by hydrochlorination of silicon or of a silicon-containing material
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08K—Use of inorganic or non-macromolecular organic substances as compounding ingredients
- C08K11/00—Use of ingredients of unknown constitution, e.g. undefined reaction products
- C08K11/005—Waste materials, e.g. treated or untreated sewage sludge
Definitions
- the invention relates to a process for the preparation of finely divided solids, which in the
- Chlorosilanes such as silicon tetrachloride (SiC, abbreviated STC), trichlorosilane (HS1CI3, abbreviated to TCS) and dichlorosilane (H 2 SiCl 2 ) represent an important class of substances with a broad class
- Silicon (Si) and hydrogen chloride (HCl) and / or chlorine (Cl) are dissolved in a reactor, e.g. As fluidized bed reactor or fixed bed reactor or stirred bed reactor, which forms inorganic chlorosilanes such as S1CI 4 and / or HS1CI3 and / or H 2 SiCl 2 or mixtures thereof and leave as product gases the reactor and then treated further.
- a reactor e.g. As fluidized bed reactor or fixed bed reactor or stirred bed reactor, which forms inorganic chlorosilanes such as S1CI 4 and / or HS1CI3 and / or H 2 SiCl 2 or mixtures thereof and leave as product gases the reactor and then treated further.
- the product gases contain production-related solids such as powder and / or dust containing silicon, iron, iron chloride and / or aluminum chloride.
- production-related solids such as powder and / or dust containing silicon, iron, iron chloride and / or aluminum chloride.
- ferric chloride and aluminum chloride are reaction by-products resulting from the fact that the raw silicon used contains these metals in small amounts as contaminants, which remain in the liquid phase after liquefaction of the product gases, the so-called vapors and settle in the container for the liquid phase. As a result, they can be separated from the chlorosilane mixture formed.
- Silicon tetrachloride these solids in the form of powder, dust, for example, filter dust, and / or ash, for example hot gas filter ash on.
- Such solids are summarized in the context of the invention by the term "/ one-part solids".
- the particulate solids are mainly silicon and iron, and may also contain chlorine compounds. Together with the chlorine compounds which are gaseous reaction products under the reaction conditions, for example TCS and STC, the finely divided solids are carried out of the reactor.
- ground metallurgical silicon having a diameter of about 500 ⁇ m is reacted with hydrogen chloride. During the course of the reaction, the silicon particles become smaller and smaller and can finally exit the reactor as dusts. These dusts are usually separated by means of filters or cyclones before the
- TCS and STC are condensed. Because they are very fine and besides iron still contain a large amount of silicon, they are a valuable raw material.
- silicon-containing solids accumulate in the production of silicon from monosilane by deposition processes. Such solids are often mixtures of product coarse fractions which are separated from the process via sieves, are also analytical residues and goods which do not conform to specifications. The silicon content is often more than 99%.
- the patent DE 10 2009 037 155 B3 provides for the dust discharged from the fluidized bed to be converted into a second connected fluidized bed reactor. This method has the disadvantage that the bulk of the solid is discharged due to its extreme fineness also from the second reactor without being materially reacted.
- the object is achieved by a process for the preparation of finely divided solids and by the compacts obtained according to this method.
- the invention relates to a process for the preparation of finely divided solids in the production of chlorosilanes, which is characterized in that the finely divided
- Solids are pressed hydraulically to bodies of increased density.
- the procedure of hydraulically pressing the finely divided solids is in the context of the invention synonymous with the fact that the finely divided solids are pressed in a hydraulic press.
- a cylindrical sleeve of ceramic preferably of high-strength silicon nitride ceramic, as press-vacuum.
- the upper and lower punches of the hydraulic press can be selected from hardened steel be.
- stamps can be used in cylindrical form, but also any other shape is possible, for example, edged stamp, which give cube or cuboid compacts, or hemispherical shapes. Since the finely divided solids contain chlorine compounds, the pellets on contact with water or moisture on their surface hydrochloric acid, which decomposes both insufficiently alloyed steel and unpainted components of the hydraulic press. Therefore, the use of a ceramic sleeve is made
- Silicon nitride, S1 3 N 4 as a press vacuum advantageous.
- Hydrogen chloride also attacks the mucous membranes, skin and eyes of humans. It is therefore important to ensure that in the case of a manual implementation of the method personal protective equipment is worn, which prevents the direct contact of the finely divided solids used and the compacts obtained according to the invention with skin, eyes and mucous membranes.
- inorganic binders preferably silicas, aluminates,
- binders containing organic compounds for example silicic acid esters, or a mixture of these binders. If organic binders are used, the organic portion must be removed in a calcination step prior to use in chlorosilane production.
- hydrolyzable silicon-halogen bonds which adhere to the solids, which thus have an acidic pH. This is neutralized by the binder (s). The unpleasant property of the compacts to release hydrogen chloride can thus be at least partially lifted.
- a pressing pressure in the process according to the invention which is at most 14 kN / cm 2 , preferably from 10 kN / cm 2 to 12 kN / cm 2 .
- Ambient pressure of 1013 hPa at 20 ° C which is applied to the finely divided solids in the hydraulic press. At a pressing pressure of zero so just the ambient pressure is exerted and thus achieved no compression. At a pressing pressure of at most 14 kN / cm 2 surprisingly stable pellets are obtained, because they can be handled, for example, conveyed via a conveyor belt in a reactor for the production of chlorosilanes without breaking or breaking into chunks.
- Density gradients so-called layers have.
- the layers can be extended transversely, longitudinally or in any other direction within the volume of the compact and with respect to the direction of action of the pressing pressure and have a non-woven or lens-like shape.
- the formation of such layers, the so-called layer formation occurs particularly increased above a
- the pressing pressure can be expended by the pressure beginning at zero with a selected one
- Press speed is approached.
- the pressing speed is within the scope of the invention, the quotient of pressing pressure and the time during which the pressure is increased monotonically increasing up to the pressing pressure, synonymous with the fact that the pressing pressure is started during this period.
- Pressing speed of 0.1 to 1 kN / cm 2 s, preferably from 0.5 kN / cm 2 s are approached until the pressing pressure is reached, and then for a period of 0.5 to 1.5 s, preferably from 1 s, and then degraded to zero over a period of 0.5 to 1.5 seconds, preferably 1 second.
- the initial pressure is selected smaller than the pressing pressure. It has been found that when filling a press vacuum with the finely divided solids before starting the pressure, the press vacuum up to 77 vol .-% air or gas. As the pressure starts to rise, the finely divided solids are gradually compressed and the air or trapped gas must escape. However, the smaller the sizes of the particles of finely divided solids are, the longer it takes for trapped air or gas to escape. If at least one venting stroke is carried out in the process according to the invention, compacts having greater strength are obtained than without at least one venting stroke.
- a at an initial pressure pi a with the durations Ai a and 5i a , b at an initial pressure pi b , with the periods Ai b and 5i b , and pi a and pi b are the same or different , are preferably different, and the durations Ai a and ⁇ ⁇ are the same or different, preferably different, and the periods 5i a and 5i b are the same or different, preferably different.
- Each venting stroke can be carried out with or without vacuum, preferably without vacuum, and with 0.2 to 1 kN / cm 2 , preferably 0.5 kN / cm 2 pressing pressure, and for 2 to 10 s, preferably 5 s duration.
- a fill factor is understood to mean the ratio of the height at which the press vacuum is filled with the finely divided solids to the height of the compact produced according to the invention. If, for example, the vacancy has been filled up to a height of 96 mm and, after carrying out the method according to the invention, a compact having a height of about 22 mm is obtained, this compact lies with a filling factor of
- This filling factor is unexpectedly high compared to filling factors of ordinary molding compounds, for example commercial sands, ceramic granules for the sintering for the production of tiles. For example, it is about 2 times lower for pure sand and the same pressure.
- the subject of the invention is also a compact obtained according to the claimed process and characterized by a filling factor of the finely divided solids to be hydraulically pressed from 3.9 to 4.5.
- the finely divided solids were filter dust from the hot filter of a fluidized-bed reactor for the production of chlorosilanes, so-called hot gas filter ash, in the examples described below.
- Each press vacuum was filled up to a height of 96 mm with the hot gas filter ash.
- the tests differed by the pressing pressure, which was 6, 8, 10, 12 or 14 kN / cm 2 and each had been started at a pressing speed of 0.5 kN / cm 2 s.
- the ejection force was 7.5 kN / cm 2 in each case.
- Table 1 Overview of the determined sizes of the compacts as a function of the pressing pressure.
- the second venting stroke was started at 4 kN / cm 2 pressure at 0.5 kN / cm 2 s for 8 s, held for 1 s and degraded within 1 s.
- the pellets obtained according to the invention Withstood a drop from about 2 m in height without shattering. Thus, they had a sufficiently good stability to be able to return them to the reactor.
Landscapes
- Chemical & Material Sciences (AREA)
- Organic Chemistry (AREA)
- Inorganic Chemistry (AREA)
- Silicon Compounds (AREA)
- Press-Shaping Or Shaping Using Conveyers (AREA)
Abstract
Description
Claims
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE102012224182.5A DE102012224182A1 (de) | 2012-12-21 | 2012-12-21 | Verfahren zur Aufbereitung feinteiliger Feststoffe bei der Herstellung von Chlorsilanen |
| PCT/EP2013/074376 WO2014095220A1 (de) | 2012-12-21 | 2013-11-21 | Verfahren zur aufbereitung feinteiliger feststoffe bei der herstellung von chlorsilanen |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| EP2935100A1 true EP2935100A1 (de) | 2015-10-28 |
Family
ID=49639873
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| EP13795225.5A Withdrawn EP2935100A1 (de) | 2012-12-21 | 2013-11-21 | Verfahren zur aufbereitung feinteiliger feststoffe bei der herstellung von chlorsilanen |
Country Status (8)
| Country | Link |
|---|---|
| US (1) | US9593021B2 (de) |
| EP (1) | EP2935100A1 (de) |
| JP (1) | JP6049905B2 (de) |
| KR (1) | KR101760584B1 (de) |
| CN (1) | CN104854025B (de) |
| CA (1) | CA2895836C (de) |
| DE (1) | DE102012224182A1 (de) |
| WO (1) | WO2014095220A1 (de) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP3088358A1 (de) * | 2015-04-28 | 2016-11-02 | Evonik Degussa GmbH | Verfahren zur aufbereitung feinteiliger feststoffe bei der herstellung von chlorsilanen |
| EP3100979A1 (de) * | 2015-06-02 | 2016-12-07 | Evonik Degussa GmbH | Aufbereitung feinteiliger feststoffe bei der herstellung von chlorsilanen durch sintern bei niedrigen temperaturen |
| EP3100978A1 (de) * | 2015-06-02 | 2016-12-07 | Evonik Degussa GmbH | Aufbereitung feinteiliger feststoffe bei der herstellung von chlorsilanen durch agglomerieren und kompaktierung |
Family Cites Families (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4892694A (en) * | 1987-04-22 | 1990-01-09 | General Electric Company | Deactivation of spent silicon powder |
| US5126203A (en) * | 1987-04-22 | 1992-06-30 | General Electric Company | Deactivation of spent silicon powder |
| EP0287934A3 (de) * | 1987-04-22 | 1989-03-22 | General Electric Company | Entaktivierung von verbrauchten Siliziumpulver |
| JPH0214882A (ja) * | 1988-06-30 | 1990-01-18 | Hitachi Metals Ltd | 乾電池の電解質剤成形用ダイス |
| CN1205266A (zh) * | 1997-07-16 | 1999-01-20 | 卢文开 | 热固性荧光或夜光塑料制品的制造方法及其制品 |
| JP4630993B2 (ja) * | 2008-08-31 | 2011-02-09 | 北京中晶華業科技有限公司 | 高純度シリコンの製造方法 |
| DE102009020143A1 (de) | 2009-05-04 | 2010-11-11 | Pv Silicon Forschungs- Und Produktionsgesellschaft Mbh | Verfahren zur Aufbereitung von Sägeabfällen zur Rückgewinnung von Silizium für die Herstellung von Solarsilizium |
| DE102009037155B3 (de) | 2009-08-04 | 2010-11-04 | Schmid Silicon Technology Gmbh | Verfahren und Anlage zur Herstellung von Trichlorsilan |
| CN102686514A (zh) * | 2009-12-22 | 2012-09-19 | Jnc株式会社 | 多晶硅的制造方法及四氯化硅的制造方法 |
| JP2012017247A (ja) * | 2010-06-08 | 2012-01-26 | Osaka Titanium Technologies Co Ltd | シリコン含有ペレットの製造方法 |
| WO2012109459A1 (en) | 2011-02-09 | 2012-08-16 | Hariharan Alleppey V | Recovery of silicon value from kerf silicon waste |
| DE102013201742A1 (de) | 2012-12-21 | 2014-06-26 | Evonik Industries Ag | Verfahren zur Aufbereitung von Silizium-haltigem feinkörnigen Material bei der Herstellung von Chlorsilanen |
-
2012
- 2012-12-21 DE DE102012224182.5A patent/DE102012224182A1/de not_active Withdrawn
-
2013
- 2013-11-21 CA CA2895836A patent/CA2895836C/en not_active Expired - Fee Related
- 2013-11-21 CN CN201380066528.2A patent/CN104854025B/zh not_active Expired - Fee Related
- 2013-11-21 EP EP13795225.5A patent/EP2935100A1/de not_active Withdrawn
- 2013-11-21 JP JP2015548310A patent/JP6049905B2/ja not_active Expired - Fee Related
- 2013-11-21 US US14/649,353 patent/US9593021B2/en not_active Expired - Fee Related
- 2013-11-21 KR KR1020157016069A patent/KR101760584B1/ko not_active Expired - Fee Related
- 2013-11-21 WO PCT/EP2013/074376 patent/WO2014095220A1/de not_active Ceased
Non-Patent Citations (2)
| Title |
|---|
| None * |
| See also references of WO2014095220A1 * |
Also Published As
| Publication number | Publication date |
|---|---|
| WO2014095220A1 (de) | 2014-06-26 |
| US9593021B2 (en) | 2017-03-14 |
| CN104854025B (zh) | 2017-03-22 |
| JP2016506319A (ja) | 2016-03-03 |
| DE102012224182A1 (de) | 2014-07-10 |
| US20150315030A1 (en) | 2015-11-05 |
| KR20150097518A (ko) | 2015-08-26 |
| CA2895836C (en) | 2017-05-16 |
| CN104854025A (zh) | 2015-08-19 |
| JP6049905B2 (ja) | 2016-12-21 |
| KR101760584B1 (ko) | 2017-07-21 |
| CA2895836A1 (en) | 2014-06-26 |
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