EP2820356B1 - Installation de ventilation de salles blanches - Google Patents

Installation de ventilation de salles blanches Download PDF

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Publication number
EP2820356B1
EP2820356B1 EP13707611.3A EP13707611A EP2820356B1 EP 2820356 B1 EP2820356 B1 EP 2820356B1 EP 13707611 A EP13707611 A EP 13707611A EP 2820356 B1 EP2820356 B1 EP 2820356B1
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EP
European Patent Office
Prior art keywords
plenum
air
clean
clean room
clean rooms
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
EP13707611.3A
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German (de)
English (en)
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EP2820356A1 (fr
Inventor
Jo NELISSEN
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Abn Cleanroom Technology NV
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Abn Cleanroom Technology NV
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Publication date
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Publication of EP2820356A1 publication Critical patent/EP2820356A1/fr
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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F24—HEATING; RANGES; VENTILATING
    • F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
    • F24F7/00—Ventilation
    • F24F7/04—Ventilation with ducting systems, e.g. by double walls; with natural circulation
    • F24F7/06—Ventilation with ducting systems, e.g. by double walls; with natural circulation with forced air circulation, e.g. by fan positioning of a ventilator in or against a conduit
    • F24F7/10—Ventilation with ducting systems, e.g. by double walls; with natural circulation with forced air circulation, e.g. by fan positioning of a ventilator in or against a conduit with air supply, or exhaust, through perforated wall, floor or ceiling
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F24—HEATING; RANGES; VENTILATING
    • F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
    • F24F3/00—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems
    • F24F3/12—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems characterised by the treatment of the air otherwise than by heating and cooling
    • F24F3/16—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems characterised by the treatment of the air otherwise than by heating and cooling by purification, e.g. by filtering; by sterilisation; by ozonisation
    • F24F3/167—Clean rooms, i.e. enclosed spaces in which a uniform flow of filtered air is distributed
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F24—HEATING; RANGES; VENTILATING
    • F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
    • F24F13/00—Details common to, or for air-conditioning, air-humidification, ventilation or use of air currents for screening
    • F24F13/02—Ducting arrangements
    • F24F13/029—Duct comprising an opening for inspection, e.g. manhole

Definitions

  • the invention relates to a plant for the ventilation of clean rooms with at least two clean rooms and a plenum above these clean rooms, the clean rooms and the plenum are separated by a load-bearing ceiling
  • air ducts are used both for the supply of air to the clean room and for the removal of air from the clean room.
  • air ducts are expensive, including their installation and maintenance. Cleaning the air ducts is expensive.
  • Equally complex is the maintenance of the individual devices that are used for the suction, cleaning, filtering and discharge of air. These devices include at least one supply air device and an exhaust air device. At the plant after the mentioned DE 10 2004 049 520 A1 is an installation and maintenance of these individual devices consuming. There is no direct access to these devices. In case of failure of one or the other device, a complex work is required. A regular check of the individual devices is also expensive.
  • a system for ventilating clean rooms with at least two clean rooms and a plenum above these clean rooms, the clean rooms and the plenum being separated by a load-bearing ceiling characterized in that the plenum is a closed room containing a lockable door for personnel and equipment, which is accessible to personnel, having an inlet for primary air and an outlet for outgoing air, that in the ceiling above each clean room is a recess into each of which a supply air device is inserted from the plenum ago, wherein the supply air device has an inflow opening and an outflow opening, the inflow opening communicates with the plenum, and the outflow opening is located above the clean room, and that there is a recess in the ceiling above each clean room into which an exhaust air device is inserted from the plenum, wherein the Abluftgerä t has an intake port and an exit port, communicates the suction port with the clean room and communicates the exit port with the plenum, and the Zuluft- and exhaust air device each have access for maintenance
  • This system can operate completely without special air channels known from the prior art. It does not require metallic components for air ducts.
  • the individual devices namely the supply air devices and exhaust air devices, which supply the individual clean rooms, are completely accessible from the plenum. They are assembled by and in plenary and can be maintained and checked there. Access to the clean rooms is not required for installation and maintenance of the equipment.
  • the plenary session is also called a technical plenary, and all work on the equipment is feasible within this plenary session.
  • the door is provided. She closes tight. It is sized so that the equipment and personnel can get through the door.
  • the ceiling separates the clean rooms from the plenum above. Preferably, the clean rooms are all located on a common floor or level.
  • the system In plenary there is an inlet for air intake. Fresh air is supplied via this inlet opening. Furthermore, the plenum has an outlet for air outlet. Exhaust air is directed outwards into the environment via this outlet opening.
  • the system is assigned a control unit that controls and preferably also monitors all functions, in particular all devices. It is connected to the individual devices, temperature and pressure sensors and other components.
  • the devices are each modular. In this case, they are preferably constructed in layers. This makes it possible to exchange individual assemblies and to assemble the components of larger devices only within the plenary to a finished device.
  • the air pressure within the plenum is in the range zero (pressure of the outside air) up to 1,200 mm of water, preferably at zero or about 1,000 mm of water compared to the pressure of the outside air.
  • the pressure within the clean rooms is at least 1000 mm water column above the pressure in the plenum and is overall above the pressure of the ambient air, the difference is at least 200 mm water column, preferably 1000 mm water column.
  • the plenary has a ceiling height that is at least man-high. It is at least 1.80 m, preferably at least 2.00 m.
  • the plenum preferably has a volume greater than the volume of all clean rooms combined. It is at least 20%, preferably at least 100% in volume greater than the volume of all clean rooms together.
  • the extraction of air from the clean rooms takes place through the ceiling and to the plenum.
  • the extraction is preferably carried out in a suction area, which is located in the floor level of the clean rooms.
  • This intake opens into a vertical channel, this channel is in communication with the suction port of the exhaust device.
  • the channel can be cleaned from the plenum. He is accessible from the plenary.
  • the channel is preferably formed so that at least a portion of a wall of the clean room is part of the channel.
  • the channel is bounded by two adjacent walls of the clean room, which collide in an inner edge of the clean room. He is then still limited by a partition that connects the two walls.
  • Of the horizontal cross section of the channel is triangular. Other channel shapes are possible.
  • the individual devices have access for maintenance work. These include control panels; Flaps behind which are interchangeable parts such as e.g. Filters and the like are located; understood mechanical connections of individual modules of the respective device and electrical connection areas.
  • the plenum is directly connected to the outside air. But it is also possible to provide in plenary devices that process the air in plenary, for example, provide behind the inlet opening a filter that filters the incoming air. Also may be provided in plenary a system for heating and / or cooling of the air in plenary. It is possible to maintain an overpressure with respect to the outside air already in plenary. It is possible that a pre-cleaning of the incoming air takes place in the plenum, so that the devices assigned in respective clean rooms are no longer exclusively responsible for a complete cleaning or other complete treatment of the air.
  • air pressure and / or temperature are detected within each individual clean room by means of sensors and fed to the control unit.
  • control unit usually there are adjustment means for air pressure and / or temperature within each individual clean room. All these values are sent to the controller.
  • the individual devices are otherwise constructed according to the prior art. They usually have a stage for air purification, for example UV and / or a coarse filter, followed by a filtration stage, for example F5, a fan and a subsequent fine filter stage, for example H14.
  • a stage for air purification for example UV and / or a coarse filter
  • a filtration stage for example F5
  • a fan for example
  • a subsequent fine filter stage for example H14.
  • a plenum 20 Below a plenum 20 are three clean rooms 22, 23, 24. They are separated from the plenum 20 by a supporting ceiling 26. The clean rooms 22 to 24 are located on one level.
  • the volume of the plenum 20 is preferably significantly larger, at least twice, preferably four times as large as the volume of all three clean rooms 22 to 24 together.
  • the plenum 20 is a closed room. This room is accessible through a door 28.
  • the door can be closed airtight.
  • the door 28 is chosen so large that a person and also devices, at least parts of devices still to be discussed, can pass through the door 28.
  • the plenum 20 has an inlet opening 30 for fresh air. It has an outlet opening 32 for exhaust air. All air, which is in the plenum 20 and in the clean rooms 22 to 24, has flowed through the inlet opening 30. The only outlet for air is the outlet opening 32. Behind the inlet opening 30 is an air treatment 34 in plenary 20. The air treatment has an F9 filter 36, behind an activated carbon filter 28, behind a fan 40 and behind it finally a UV station 42. In addition is in plenary 20 still a heating and cooling stage 44 arranged. It conditions the air within the plenum 20. In the example shown, it consists of an outer part 46 arranged outside the plenum 20 and an inner part 48. This is a so-called split air conditioner. The inner part contains a UV stage and a blower.
  • the supply air device 52 has an inflow opening 54 and an outflow opening 56.
  • the inflow opening 54 is located in the plenum 20 and communicates with the plenum 20.
  • the outflow opening 56 is located above in the respective clean room 22 to 24.
  • the outflow opening 56 fills the recess 50.
  • the supply air device 52 closes the recess 50 in this respect, when air can pass through the recess 50 only through the supply air device 52.
  • the supply air device 52 is modular. It has a number of assemblies. These modules are arranged one above the other in layers. Top assembly is a UV stage 58, including an F5 filter 60, including a conveyor step 62 and below a H14 filter 64, which also defines the outflow opening 56. The UV stage 58 defines the inflow opening 54.
  • the supply air unit 52 has a number of access points 68, through which individual areas of at least one module of the supply air device 52 are accessible. Access 58 is used for maintenance, connection and installation. All accesses 68 are within plenum 20.
  • each supply air device 52 conveys air from the plenum 20 into the clean room 22, 23 or 24 below it.
  • each individual clean room 22, 23 or 24 located in the ceiling 26 above each individual clean room 22, 23 or 24 at least one recess 70, in the embodiment shown there are two recesses 70.
  • an exhaust device 72 is used in each recess 70.
  • the exhaust device 72 is inserted tightly into the recess 70, so that all the air that passes through the recess 70, the exhaust device 72 must pass.
  • the exhaust air device 72 is designed as an air conveyor or fan 40.
  • the exhaust air device 72 has an intake port 74 and an output port 76.
  • the intake port 76 communicates with the respective clean room 22, 23 or 24. In the concrete embodiment, it communicates via a channel 78 with the respective clean room 22, 23 or 24.
  • the channel 78 is through two adjacent walls 80 of the clean room 22, 23 or 24 and a partition 80 connecting these two walls bounded 87. He is triangular in cross section.
  • the channel 78 is vertical. He is above tightly connected to the exhaust device 72.
  • At the bottom of the channel 78 is an intake area 84, where the channel 78 communicates with the actual clean room 22, 23 and 24, respectively.
  • a filter 86 is assigned to the intake area in each case.
  • plenum 20 there is a pressure of zero Pa compared to the pressure of the ambient air. In each clean room there is a pressure of 20 Pa.
  • All air flowing into a single clean room 22, 23 or 24 and all the air flowing out of this room goes through the ceiling 26 therethrough.
  • all air entering a single clean room 22, 23 or 24 flows through at least one inlet opening 30 in the ceiling 26 of the respective clean room.
  • the entire air discharged from a single clean room 22, 23 or 24 flows through at least one exit opening 32 located in the ceiling above the clean room.
  • the floor of the clean rooms 22, 23 or 24 is therefore passive, it is not designed for any air circulation through it.
  • the plant is preferably designed so that a complete exchange of air in each clean room 22, 23 or 24 takes place 22 times to 100 times per hour.
  • the clear height of the plenum can also be only 1 m or, for example, only 1.20 m. Then, although a person can no longer stand in this room, he can still carry out work. Preferably, the height is greater than 1.80 m. For example, it is 2 m.
  • the air pressure in the plenum 20 may be slightly greater than the air pressure of the outside air, for example in the range of greater than zero to 2 Pa.
  • the air pressure of the plenum 20 should preferably not be less than the air pressure of the ambient air.
  • the individual clean rooms 22, 23, 24, etc. can be designed differently.
  • the first clean room 22 may be designed as a lock for material, it then has a first door to the outside environment (not shown) and a second door (not shown) to the clean room 24, which is the actual working space.
  • the second clean room 23 is designed as a lock for personnel and constructed similarly, it has a first door (not shown) for access from the outside for staff and a second door (not shown), which connects him to the clean room for working 24.
  • the inlet opening 30 is preferably associated with a valve which is set to a constant volume of air.
  • the intake opening 74 of the exhaust air device 72 is not visible within the channel 78 and therefore for normal users of the respective clean room 22, 23, 24. For them no special aperture, diffuser or the like is used.
  • the outflow opening 56 of the supply air device 52 is optically covered by a grid 90.
  • This grid 80 is designed, for example, as a diffuser. Through the grid 90, the air flows into the clean room 24.
  • the grid 90 is visible, it is designed visually appealing.
  • the grid 90 can be mounted and dismounted from above, ie from the plenum 20. All cleaning work on grid 90 can be performed in plenum 20.
  • the outer boundaries of the system shown may be external boundaries of the respective building.
  • the left and right walls may be an outer wall 92.
  • the conclusion above can be a roof.
  • each channel 78 is now formed as a simple opening.
  • the exhaust air devices 72 have an F5 filter 60, above which there is a fan, above which there is a HEPA filter 94, which terminates upwards with the outlet opening 76. In contrast to the first embodiment, the exhaust air devices 72 are therefore formed consuming.
  • the respective air flows are represented by arrows.
  • All exhaust air devices in FIG. 1 and also all exhaust air devices 72 in FIG. 2 are identical.
  • the channels 78 of the individual clean rooms 22, 23, 24 are identical.
  • the supply air devices 52 in FIG. 2 do not differ in their structure, only in their size. They are constructed as follows, starting from the inflow opening 54: Below the inflow opening 54 is an F5 filter 60. Beneath there is a UV stage 58. Below it, a conveyor stage 62 is provided. Below this, a HEPA filter 94 is arranged.
  • the outlet opening is covered by a filter to prevent dust or animals can penetrate.

Claims (9)

  1. Système de ventilation de salles blanches (22, 23, 24) comprenant au moins deux salles blanches (22, 23) et un collecteur (20) situé au-dessus de ces salles blanches (22, 23, 24), les salles blanches (22, 23, 24) et le collecteur (20) étant séparés par un plafond porteur (26), le collecteur (20) étant un espace fermé qui comporte une ouverture d'entrée d'air frais (30) et une ouverture de sortie d'air sortant (32), et au moins un évidement (50) étant ménagé dans le plafond (26) au-dessus de chaque salle blanche (22, 23, 24), évidement dans lequel un dispositif d'alimentation en air (52) est inséré depuis le collecteur (20), le dispositif d'alimentation en air (52) comportant une ouverture d'entrée (54) et une ouverture de sortie (56), l'ouverture d'entrée (54) communiquant avec le collecteur (20) et l'ouverture de sortie (56) étant ménagée dans la partie supérieure de la salle blanche (22, 23, 24), caractérisé en ce que l'espace fermé comporte une porte verrouillable (28) qui est destinée au personnel et aux dispositif et qui est accessible au personnel, et en ce que au moins un évidement (70) est ménagé dans le plafond (26) au-dessus de chaque salle blanche (22, 23, 24), évidement dans lequel un dispositif d'évacuation d'air (72) est inséré depuis le collecteur (20), le dispositif d'évacuation d'air (72) comportant une ouverture d'aspiration (74) et une ouverture de sortie (76), l'ouverture d'aspiration (74) communiquant avec la salle blanche (22, 23, 24) et l'ouverture de sortie (76) communiquant avec le collecteur (20), et en ce que le dispositif d'alimentation en air (52) et le dispositif d'évacuation d'air (72) comportant chacun des accès (68) pour les travaux de maintenance et ces accès (68) étant situés exclusivement dans le collecteur (20).
  2. Système selon la revendication 1, caractérisé en ce que dans le collecteur (20) règne la même pression d'air qu'à extérieur.
  3. Système selon l'une des revendications précédentes, caractérisé en ce que la pression d'air dans chaque salle blanche (22, 23, 24) est supérieure d'au moins 10 Pa, de préférence de 20 Pa, à la pression dans le collecteur (20).
  4. Système selon l'une des revendications précédentes, caractérisée en ce que le volume total de toutes les salles blanches (22, 23, 24) est inférieur d'au moins 20 % au volume du collecteur (20).
  5. Système selon l'une des revendications précédentes, caractérisé en ce que le collecteur (20) est situé au-dessus des salles blanches (22, 23, 24) et est séparé des salles blanches (22, 23, 24) uniquement par le plafond (26).
  6. Système selon l'une des revendications précédentes, caractérisé en ce qu'un conduit (78) est situé dans la salle blanche (22, 23, 24) au-dessous de chaque ouverture d'aspiration (74), lequel conduit est partiellement délimité par au moins une paroi de la salle blanche (22) et est relié au reste de la salle blanche (22, 23, 24) par une zone d'aspiration inférieure (84).
  7. Système selon la revendication précédente, caractérisé en ce que le conduit (78) est délimité par une paroi de séparation (82) qui relie deux parois latérales adjacentes de la salle blanche (22, 23, 24) entre elles.
  8. Système selon l'une des deux revendications précédentes, caractérisé en ce que le conduit (78) a une section transversale triangulaire.
  9. Système selon l'une des revendications précédentes, caractérisé en ce que le collecteur (20) est nettement plus grand, au moins deux fois, de préférence quatre fois, plus grand que le volume de trois salles blanches (22-24) réunies.
EP13707611.3A 2012-03-02 2013-03-01 Installation de ventilation de salles blanches Active EP2820356B1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102012203346 2012-03-02
PCT/EP2013/054125 WO2013127979A1 (fr) 2012-03-02 2013-03-01 Installation de ventilation de salles blanches

Publications (2)

Publication Number Publication Date
EP2820356A1 EP2820356A1 (fr) 2015-01-07
EP2820356B1 true EP2820356B1 (fr) 2019-11-13

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Application Number Title Priority Date Filing Date
EP13707611.3A Active EP2820356B1 (fr) 2012-03-02 2013-03-01 Installation de ventilation de salles blanches

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EP (1) EP2820356B1 (fr)
WO (1) WO2013127979A1 (fr)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102017103468A1 (de) * 2017-02-21 2018-08-23 Mecora Medizintechnik Gmbh Raum und Verfahren zum Herstellen eines Raums
BE1028094B1 (nl) 2020-02-26 2021-09-23 Abn Cleanroom Tech N V Klimaatkamer
BE1029823B1 (nl) 2021-10-06 2023-05-08 Abn Cleanroom Tech N V Cleanroom en werkwijze voor het zuiveren van een cleanroom
CN116608574B (zh) * 2023-06-19 2023-10-27 江苏嘉合建设有限公司 一种洁净室排风调节系统

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JPS58165531U (ja) * 1982-04-28 1983-11-04 東京プレス工業株式会社 二重天井をサプライチヤンバとした空気調和装置
GB2132308B (en) * 1982-11-02 1986-01-15 Actionair Equip Access hatch
JPS59157432A (ja) * 1983-02-23 1984-09-06 Hitachi Plant Eng & Constr Co Ltd 組替式局所環境制御室
FR2560672B1 (fr) * 1984-03-02 1989-01-13 Gms Sa Salle modulaire a atmosphere controlee
JPS6196344A (ja) * 1984-10-18 1986-05-15 Toshiba Corp クリ−ンル−ム
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JPH09137979A (ja) 1995-11-13 1997-05-27 Takenaka Komuten Co Ltd クリーンルーム
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EP2820356A1 (fr) 2015-01-07

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