EP2820356B1 - System for ventilation of clean rooms - Google Patents

System for ventilation of clean rooms Download PDF

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Publication number
EP2820356B1
EP2820356B1 EP13707611.3A EP13707611A EP2820356B1 EP 2820356 B1 EP2820356 B1 EP 2820356B1 EP 13707611 A EP13707611 A EP 13707611A EP 2820356 B1 EP2820356 B1 EP 2820356B1
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EP
European Patent Office
Prior art keywords
plenum
air
clean
clean room
clean rooms
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EP13707611.3A
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German (de)
French (fr)
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EP2820356A1 (en
Inventor
Jo NELISSEN
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Abn Cleanroom Technology NV
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Abn Cleanroom Technology NV
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    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F24—HEATING; RANGES; VENTILATING
    • F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
    • F24F7/00—Ventilation
    • F24F7/04—Ventilation with ducting systems, e.g. by double walls; with natural circulation
    • F24F7/06—Ventilation with ducting systems, e.g. by double walls; with natural circulation with forced air circulation, e.g. by fan positioning of a ventilator in or against a conduit
    • F24F7/10—Ventilation with ducting systems, e.g. by double walls; with natural circulation with forced air circulation, e.g. by fan positioning of a ventilator in or against a conduit with air supply, or exhaust, through perforated wall, floor or ceiling
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F24—HEATING; RANGES; VENTILATING
    • F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
    • F24F3/00—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems
    • F24F3/12—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems characterised by the treatment of the air otherwise than by heating and cooling
    • F24F3/16—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems characterised by the treatment of the air otherwise than by heating and cooling by purification, e.g. by filtering; by sterilisation; by ozonisation
    • F24F3/167—Clean rooms, i.e. enclosed spaces in which a uniform flow of filtered air is distributed
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F24—HEATING; RANGES; VENTILATING
    • F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
    • F24F13/00—Details common to, or for air-conditioning, air-humidification, ventilation or use of air currents for screening
    • F24F13/02—Ducting arrangements
    • F24F13/029—Duct comprising an opening for inspection, e.g. manhole

Definitions

  • the invention relates to a plant for the ventilation of clean rooms with at least two clean rooms and a plenum above these clean rooms, the clean rooms and the plenum are separated by a load-bearing ceiling
  • air ducts are used both for the supply of air to the clean room and for the removal of air from the clean room.
  • air ducts are expensive, including their installation and maintenance. Cleaning the air ducts is expensive.
  • Equally complex is the maintenance of the individual devices that are used for the suction, cleaning, filtering and discharge of air. These devices include at least one supply air device and an exhaust air device. At the plant after the mentioned DE 10 2004 049 520 A1 is an installation and maintenance of these individual devices consuming. There is no direct access to these devices. In case of failure of one or the other device, a complex work is required. A regular check of the individual devices is also expensive.
  • a system for ventilating clean rooms with at least two clean rooms and a plenum above these clean rooms, the clean rooms and the plenum being separated by a load-bearing ceiling characterized in that the plenum is a closed room containing a lockable door for personnel and equipment, which is accessible to personnel, having an inlet for primary air and an outlet for outgoing air, that in the ceiling above each clean room is a recess into each of which a supply air device is inserted from the plenum ago, wherein the supply air device has an inflow opening and an outflow opening, the inflow opening communicates with the plenum, and the outflow opening is located above the clean room, and that there is a recess in the ceiling above each clean room into which an exhaust air device is inserted from the plenum, wherein the Abluftgerä t has an intake port and an exit port, communicates the suction port with the clean room and communicates the exit port with the plenum, and the Zuluft- and exhaust air device each have access for maintenance
  • This system can operate completely without special air channels known from the prior art. It does not require metallic components for air ducts.
  • the individual devices namely the supply air devices and exhaust air devices, which supply the individual clean rooms, are completely accessible from the plenum. They are assembled by and in plenary and can be maintained and checked there. Access to the clean rooms is not required for installation and maintenance of the equipment.
  • the plenary session is also called a technical plenary, and all work on the equipment is feasible within this plenary session.
  • the door is provided. She closes tight. It is sized so that the equipment and personnel can get through the door.
  • the ceiling separates the clean rooms from the plenum above. Preferably, the clean rooms are all located on a common floor or level.
  • the system In plenary there is an inlet for air intake. Fresh air is supplied via this inlet opening. Furthermore, the plenum has an outlet for air outlet. Exhaust air is directed outwards into the environment via this outlet opening.
  • the system is assigned a control unit that controls and preferably also monitors all functions, in particular all devices. It is connected to the individual devices, temperature and pressure sensors and other components.
  • the devices are each modular. In this case, they are preferably constructed in layers. This makes it possible to exchange individual assemblies and to assemble the components of larger devices only within the plenary to a finished device.
  • the air pressure within the plenum is in the range zero (pressure of the outside air) up to 1,200 mm of water, preferably at zero or about 1,000 mm of water compared to the pressure of the outside air.
  • the pressure within the clean rooms is at least 1000 mm water column above the pressure in the plenum and is overall above the pressure of the ambient air, the difference is at least 200 mm water column, preferably 1000 mm water column.
  • the plenary has a ceiling height that is at least man-high. It is at least 1.80 m, preferably at least 2.00 m.
  • the plenum preferably has a volume greater than the volume of all clean rooms combined. It is at least 20%, preferably at least 100% in volume greater than the volume of all clean rooms together.
  • the extraction of air from the clean rooms takes place through the ceiling and to the plenum.
  • the extraction is preferably carried out in a suction area, which is located in the floor level of the clean rooms.
  • This intake opens into a vertical channel, this channel is in communication with the suction port of the exhaust device.
  • the channel can be cleaned from the plenum. He is accessible from the plenary.
  • the channel is preferably formed so that at least a portion of a wall of the clean room is part of the channel.
  • the channel is bounded by two adjacent walls of the clean room, which collide in an inner edge of the clean room. He is then still limited by a partition that connects the two walls.
  • Of the horizontal cross section of the channel is triangular. Other channel shapes are possible.
  • the individual devices have access for maintenance work. These include control panels; Flaps behind which are interchangeable parts such as e.g. Filters and the like are located; understood mechanical connections of individual modules of the respective device and electrical connection areas.
  • the plenum is directly connected to the outside air. But it is also possible to provide in plenary devices that process the air in plenary, for example, provide behind the inlet opening a filter that filters the incoming air. Also may be provided in plenary a system for heating and / or cooling of the air in plenary. It is possible to maintain an overpressure with respect to the outside air already in plenary. It is possible that a pre-cleaning of the incoming air takes place in the plenum, so that the devices assigned in respective clean rooms are no longer exclusively responsible for a complete cleaning or other complete treatment of the air.
  • air pressure and / or temperature are detected within each individual clean room by means of sensors and fed to the control unit.
  • control unit usually there are adjustment means for air pressure and / or temperature within each individual clean room. All these values are sent to the controller.
  • the individual devices are otherwise constructed according to the prior art. They usually have a stage for air purification, for example UV and / or a coarse filter, followed by a filtration stage, for example F5, a fan and a subsequent fine filter stage, for example H14.
  • a stage for air purification for example UV and / or a coarse filter
  • a filtration stage for example F5
  • a fan for example
  • a subsequent fine filter stage for example H14.
  • a plenum 20 Below a plenum 20 are three clean rooms 22, 23, 24. They are separated from the plenum 20 by a supporting ceiling 26. The clean rooms 22 to 24 are located on one level.
  • the volume of the plenum 20 is preferably significantly larger, at least twice, preferably four times as large as the volume of all three clean rooms 22 to 24 together.
  • the plenum 20 is a closed room. This room is accessible through a door 28.
  • the door can be closed airtight.
  • the door 28 is chosen so large that a person and also devices, at least parts of devices still to be discussed, can pass through the door 28.
  • the plenum 20 has an inlet opening 30 for fresh air. It has an outlet opening 32 for exhaust air. All air, which is in the plenum 20 and in the clean rooms 22 to 24, has flowed through the inlet opening 30. The only outlet for air is the outlet opening 32. Behind the inlet opening 30 is an air treatment 34 in plenary 20. The air treatment has an F9 filter 36, behind an activated carbon filter 28, behind a fan 40 and behind it finally a UV station 42. In addition is in plenary 20 still a heating and cooling stage 44 arranged. It conditions the air within the plenum 20. In the example shown, it consists of an outer part 46 arranged outside the plenum 20 and an inner part 48. This is a so-called split air conditioner. The inner part contains a UV stage and a blower.
  • the supply air device 52 has an inflow opening 54 and an outflow opening 56.
  • the inflow opening 54 is located in the plenum 20 and communicates with the plenum 20.
  • the outflow opening 56 is located above in the respective clean room 22 to 24.
  • the outflow opening 56 fills the recess 50.
  • the supply air device 52 closes the recess 50 in this respect, when air can pass through the recess 50 only through the supply air device 52.
  • the supply air device 52 is modular. It has a number of assemblies. These modules are arranged one above the other in layers. Top assembly is a UV stage 58, including an F5 filter 60, including a conveyor step 62 and below a H14 filter 64, which also defines the outflow opening 56. The UV stage 58 defines the inflow opening 54.
  • the supply air unit 52 has a number of access points 68, through which individual areas of at least one module of the supply air device 52 are accessible. Access 58 is used for maintenance, connection and installation. All accesses 68 are within plenum 20.
  • each supply air device 52 conveys air from the plenum 20 into the clean room 22, 23 or 24 below it.
  • each individual clean room 22, 23 or 24 located in the ceiling 26 above each individual clean room 22, 23 or 24 at least one recess 70, in the embodiment shown there are two recesses 70.
  • an exhaust device 72 is used in each recess 70.
  • the exhaust device 72 is inserted tightly into the recess 70, so that all the air that passes through the recess 70, the exhaust device 72 must pass.
  • the exhaust air device 72 is designed as an air conveyor or fan 40.
  • the exhaust air device 72 has an intake port 74 and an output port 76.
  • the intake port 76 communicates with the respective clean room 22, 23 or 24. In the concrete embodiment, it communicates via a channel 78 with the respective clean room 22, 23 or 24.
  • the channel 78 is through two adjacent walls 80 of the clean room 22, 23 or 24 and a partition 80 connecting these two walls bounded 87. He is triangular in cross section.
  • the channel 78 is vertical. He is above tightly connected to the exhaust device 72.
  • At the bottom of the channel 78 is an intake area 84, where the channel 78 communicates with the actual clean room 22, 23 and 24, respectively.
  • a filter 86 is assigned to the intake area in each case.
  • plenum 20 there is a pressure of zero Pa compared to the pressure of the ambient air. In each clean room there is a pressure of 20 Pa.
  • All air flowing into a single clean room 22, 23 or 24 and all the air flowing out of this room goes through the ceiling 26 therethrough.
  • all air entering a single clean room 22, 23 or 24 flows through at least one inlet opening 30 in the ceiling 26 of the respective clean room.
  • the entire air discharged from a single clean room 22, 23 or 24 flows through at least one exit opening 32 located in the ceiling above the clean room.
  • the floor of the clean rooms 22, 23 or 24 is therefore passive, it is not designed for any air circulation through it.
  • the plant is preferably designed so that a complete exchange of air in each clean room 22, 23 or 24 takes place 22 times to 100 times per hour.
  • the clear height of the plenum can also be only 1 m or, for example, only 1.20 m. Then, although a person can no longer stand in this room, he can still carry out work. Preferably, the height is greater than 1.80 m. For example, it is 2 m.
  • the air pressure in the plenum 20 may be slightly greater than the air pressure of the outside air, for example in the range of greater than zero to 2 Pa.
  • the air pressure of the plenum 20 should preferably not be less than the air pressure of the ambient air.
  • the individual clean rooms 22, 23, 24, etc. can be designed differently.
  • the first clean room 22 may be designed as a lock for material, it then has a first door to the outside environment (not shown) and a second door (not shown) to the clean room 24, which is the actual working space.
  • the second clean room 23 is designed as a lock for personnel and constructed similarly, it has a first door (not shown) for access from the outside for staff and a second door (not shown), which connects him to the clean room for working 24.
  • the inlet opening 30 is preferably associated with a valve which is set to a constant volume of air.
  • the intake opening 74 of the exhaust air device 72 is not visible within the channel 78 and therefore for normal users of the respective clean room 22, 23, 24. For them no special aperture, diffuser or the like is used.
  • the outflow opening 56 of the supply air device 52 is optically covered by a grid 90.
  • This grid 80 is designed, for example, as a diffuser. Through the grid 90, the air flows into the clean room 24.
  • the grid 90 is visible, it is designed visually appealing.
  • the grid 90 can be mounted and dismounted from above, ie from the plenum 20. All cleaning work on grid 90 can be performed in plenum 20.
  • the outer boundaries of the system shown may be external boundaries of the respective building.
  • the left and right walls may be an outer wall 92.
  • the conclusion above can be a roof.
  • each channel 78 is now formed as a simple opening.
  • the exhaust air devices 72 have an F5 filter 60, above which there is a fan, above which there is a HEPA filter 94, which terminates upwards with the outlet opening 76. In contrast to the first embodiment, the exhaust air devices 72 are therefore formed consuming.
  • the respective air flows are represented by arrows.
  • All exhaust air devices in FIG. 1 and also all exhaust air devices 72 in FIG. 2 are identical.
  • the channels 78 of the individual clean rooms 22, 23, 24 are identical.
  • the supply air devices 52 in FIG. 2 do not differ in their structure, only in their size. They are constructed as follows, starting from the inflow opening 54: Below the inflow opening 54 is an F5 filter 60. Beneath there is a UV stage 58. Below it, a conveyor stage 62 is provided. Below this, a HEPA filter 94 is arranged.
  • the outlet opening is covered by a filter to prevent dust or animals can penetrate.

Description

Die Erfindung bezieht sich auf eine Anlage zur Belüftung von Reinräumen mit mindestens zwei Reinräumen und einem Plenum oberhalb dieser Reinräume, wobei die Reinräume und das Plenum durch eine tragende Decke getrennt sindThe invention relates to a plant for the ventilation of clean rooms with at least two clean rooms and a plenum above these clean rooms, the clean rooms and the plenum are separated by a load-bearing ceiling

Derartige Anlagen zur Belüftung von Reinräumen sind allgemein bekannt. Zum Stand der Technik wird verwiesen auf DE 10 2004 049 520 A1 . Sie beschreibt eine Anlage mit nur einem einzigen Reinraum. Oberhalb des Reinraums befinden sich ein Plenum und mindestens ein Zwischenplenum. Im Ausführungsbeispiel sind von Letzerem zwei vorgesehen. Eine Anlage zur Belüftung von Reinräumen gemäß dem Oberbegriff von Anspruch 1 ist aus Dokument US 4 553 696 bekannt.Such systems for the ventilation of clean rooms are well known. Reference is made to the prior art DE 10 2004 049 520 A1 , It describes a system with only a single clean room. Above the cleanroom there is a plenum and at least one Zwischenplenum. In the embodiment of the latter two are provided. A plant for the ventilation of clean rooms according to the preamble of claim 1 is known from document US 4,553,696 known.

Weiterhin wird auf den Stand der Technik aus DE 20 2007 001 644 U1 , JP 09-137979 , JP-2001227788 A , JP 05-288378 A und FR 2 560 672 verwiesen.Furthermore, it is based on the state of the art DE 20 2007 001 644 U1 . JP 09-137979 . JP-2001227788 A . JP 05-288378 A and FR 2 560 672 directed.

Typischerweise werden bei derartigen Anlagen Luftkanäle sowohl für die Zufuhr von Luft in den Reinraum als auch für die Abfuhr von Luft aus dem Reinraum verwendet. Derartige Luftkanäle sind teuer, hierzu gehört auch ihre Installation und insbesondere Wartung. Ein Reinigen der Luftkanäle ist aufwendig.Typically, in such systems, air ducts are used both for the supply of air to the clean room and for the removal of air from the clean room. Such air ducts are expensive, including their installation and maintenance. Cleaning the air ducts is expensive.

Ebenso aufwendig ist die Wartung der einzelnen Geräte, die für das Ansaugen, Reinigen, Filtern und Ableiten der Luft verwendet werden. Zu diesen Geräten gehören mindestens ein Zuluftgerät und ein Abluftgerät. Bei der Anlage nach der genannten DE 10 2004 049 520 A1 ist eine Installation und Wartung dieser einzelnen Geräte aufwendig. Ein unmittelbarer Zugang zu diesen Geräten besteht nicht. Bei Ausfall des einen oder anderen Gerätes ist eine aufwendige Arbeit erforderlich. Eine regelmäßige Überprüfung der einzelnen Geräte ist ebenfalls aufwendig.Equally complex is the maintenance of the individual devices that are used for the suction, cleaning, filtering and discharge of air. These devices include at least one supply air device and an exhaust air device. At the plant after the mentioned DE 10 2004 049 520 A1 is an installation and maintenance of these individual devices consuming. There is no direct access to these devices. In case of failure of one or the other device, a complex work is required. A regular check of the individual devices is also expensive.

Hier setzt nun die Erfindung ein. Sie hat es sich zur Aufgabe gemacht, die Anlagen, wie sie aus dem vorbekannten Stand der Technik bekannt sind, zu verbessern und so weiterzuentwickeln, dass ausgehen von einer normalen Gebäudesituation unter möglichst weitgehender Vermeidung von Luftkanälen eine Anlage zur Belüftung von Reinräumen erreicht wird, die einfach zu installieren ist, die bei Wartung und Reparaturen einfach zugänglich ist und bei der ein Zugang zu denThis is where the invention begins. It has set itself the task to improve the systems, as they are known from the prior art, and further develop so that starting from a normal building situation with the greatest possible avoidance of air ducts a system for the ventilation of clean rooms is achieved easy to install, which is easily accessible during maintenance and repairs and gives access to the

Reinräumen nicht erforderlich ist, wenn die Geräte montiert oder gewartet werden.Clean rooms are not required when mounting or servicing equipment.

Diese Aufgabe wird gelöst durch eine Anlage zur Belüftung von Reinräumen mit mindestens zwei Reinräumen und einem Plenum oberhalb dieser Reinräume, wobei die Reinräume und das Plenum durch eine tragende Decke getrennt sind, dadurch gekennzeichnet, dass das Plenum ein abgeschlossener Raum ist, der eine verschließbare Tür für Personal und Geräte aufweist, der für Personal begehbar ist, der eine Eintrittsöffnung für primäre Luft und eine Austrittsöffnung für abgehende Luft aufweist, dass sich in der Decke oberhalb jedes Reinraumes eine Ausnehmung befindet, in die jeweils ein Zuluftgerät vom Plenum her eingesetzt ist, wobei das Zuluftgerät eine Einströmöffnung und eine Ausströmöffnung aufweist, die Einströmöffnung mit dem Plenum kommuniziert und die Ausströmöffnung sich oberhalb des Reinraumes befindet, und dass sich in der Decke oberhalb jedes Reinraumes jeweils eine Aussparung befindet, in die ein Abluftgerät vom Plenum her eingesetzt ist, wobei das Abluftgerät eine Ansaugöffnung und eine Ausgangsöffnung aufweist, die Ansaugöffnung mit dem Reinraum kommuniziert und die Ausgangsöffnung mit dem Plenum kommuniziert, und das Zuluft- und Abluftgerät jeweils Zugänge für Wartungsarbeiten aufweisen und sich diese Zugänge ausschließlich im Plenum befinden.This object is achieved by a system for ventilating clean rooms with at least two clean rooms and a plenum above these clean rooms, the clean rooms and the plenum being separated by a load-bearing ceiling, characterized in that the plenum is a closed room containing a lockable door for personnel and equipment, which is accessible to personnel, having an inlet for primary air and an outlet for outgoing air, that in the ceiling above each clean room is a recess into each of which a supply air device is inserted from the plenum ago, wherein the supply air device has an inflow opening and an outflow opening, the inflow opening communicates with the plenum, and the outflow opening is located above the clean room, and that there is a recess in the ceiling above each clean room into which an exhaust air device is inserted from the plenum, wherein the Abluftgerä t has an intake port and an exit port, communicates the suction port with the clean room and communicates the exit port with the plenum, and the Zuluft- and exhaust air device each have access for maintenance and these accesses are exclusively in plenary.

Diese Anlage kann vollständig ohne spezielle, aus dem Stand der Technik bekannte Luftkanäle arbeiten. Sie benötigt keine metallischen Bauteile für Luftkanäle. Die einzelnen Geräte, nämlich die Zuluftgeräte und Abluftgeräte, die die einzelnen Reinräume versorgen, sind vollständig vom Plenum her zugänglich. Sie werden vom und im Plenum montiert und können dort gewartet und überprüft werden. Ein Zugang zu den Reinräumen ist für die Montage und Wartung der Geräte nicht erforderlich.This system can operate completely without special air channels known from the prior art. It does not require metallic components for air ducts. The individual devices, namely the supply air devices and exhaust air devices, which supply the individual clean rooms, are completely accessible from the plenum. They are assembled by and in plenary and can be maintained and checked there. Access to the clean rooms is not required for installation and maintenance of the equipment.

Das Plenum wird auch als technisches Plenum bezeichnet, alle Arbeiten an den Geräten sind innerhalb dieses Plenums durchführbar. Um Zugang zum Plenum zu haben, ist die Tür vorgesehen. Sie schließt dicht ab. Sie ist so bemessen, dass die Geräte und das Personal durch die Tür gelangen können. Die Decke trennt die Reinräume von dem darüber befindlichen Plenum. Vorzugsweise befinden sich die Reinräume alle auf einer gemeinsamen Etage oder Ebene.The plenary session is also called a technical plenary, and all work on the equipment is feasible within this plenary session. To have access to the plenary, the door is provided. She closes tight. It is sized so that the equipment and personnel can get through the door. The ceiling separates the clean rooms from the plenum above. Preferably, the clean rooms are all located on a common floor or level.

Im Plenum befindet sich eine Eintrittsöffnung für Lufteintritt. Über diese Eintrittsöffnung wird Frischluft zugeführt. Weiterhin hat das Plenum eine Austrittsöffnung für Luftaustritt. Über diese Austrittsöffnung wird Abluft nach außen in die Umgebung geleitet. Üblicherweise ist der Anlage ein Steuergerät zugeordnet, das alle Funktionen, insbesondere alle Geräte, steuert und vorzugsweise auch überwacht. Es ist mit den einzelnen Geräten, Sensoren für Temperatur sowie Druck und mit sonstigen Bauteilen verbunden.In plenary there is an inlet for air intake. Fresh air is supplied via this inlet opening. Furthermore, the plenum has an outlet for air outlet. Exhaust air is directed outwards into the environment via this outlet opening. Usually, the system is assigned a control unit that controls and preferably also monitors all functions, in particular all devices. It is connected to the individual devices, temperature and pressure sensors and other components.

Vorzugsweise sind die Geräte jeweils modular aufgebaut. Hierbei sind sie vorzugsweise schichtweise aufgebaut. Dies ermöglicht es, einzelne Baugruppen auszutauschen und bei größeren Geräten die Bauteile erst innerhalb des Plenums zu einem fertigen Gerät zusammenzusetzen.Preferably, the devices are each modular. In this case, they are preferably constructed in layers. This makes it possible to exchange individual assemblies and to assemble the components of larger devices only within the plenary to a finished device.

Der Luftdruck innerhalb des Plenums liegt im Bereich null (Druck der Außenluft) bis zu 1.200 mm Wassersäule, vorzugsweise bei null oder ca. 1.000 mm Wassersäule gegenüber dem Druck der Außenluft. Der Druck innerhalb der Reinräume liegt mindestens 1.000 mm Wassersäule oberhalb des Drucks im Plenum und liegt insgesamt oberhalb des Drucks der Umgebungsluft, der Unterschied beträgt mindestens 200 mm Wassersäule, vorzugsweise 1.000 mm Wassersäule.The air pressure within the plenum is in the range zero (pressure of the outside air) up to 1,200 mm of water, preferably at zero or about 1,000 mm of water compared to the pressure of the outside air. The pressure within the clean rooms is at least 1000 mm water column above the pressure in the plenum and is overall above the pressure of the ambient air, the difference is at least 200 mm water column, preferably 1000 mm water column.

Das Plenum hat eine Raumhöhe, die mindestens mannshoch ist. Sie liegt bei mindestens 1,80 m, vorzugsweise mindestens 2,00 m. Das Plenum hat vorzugsweise ein Volumen, das größer ist als das Volumen aller Reinräume zusammen. Es ist um mindestens 20%, vorzugsweise mindestens 100% im Volumen größer als das Volumen aller Reinräume zusammen.The plenary has a ceiling height that is at least man-high. It is at least 1.80 m, preferably at least 2.00 m. The plenum preferably has a volume greater than the volume of all clean rooms combined. It is at least 20%, preferably at least 100% in volume greater than the volume of all clean rooms together.

Auch die Absaugung der Luft aus den Reinräumen erfolgt durch die Decke und zum Plenum hin. Die Absaugung erfolgt vorzugsweise in einem Ansaugbereich, der sich jeweils in Fußbodenhöhe der Reinräume befindet. Dieser Ansaugbereich mündet in einen vertikalen Kanal, dieser Kanal ist mit der Ansaugöffnung des Abluftgerätes in Verbindung. Der Kanal kann vom Plenum her gereinigt werden. Er ist vom Plenum her zugänglich. Der Kanal wird vorzugsweise so gebildet, dass mindestens ein Teilstück einer Wand des Reinraums Bestandteil des Kanals ist. Vorzugsweise wird der Kanal von zwei benachbarten, in einer Innenkante des Reinraums zusammenstoßenden Wänden des Reinraums begrenzt. Er wird dann weiterhin durch eine Trennwand begrenzt, die die beiden Wände verbindet. Der horizontale Querschnitt des Kanals ist dreieckförmig. Andere Kanalformen sind möglich.Also, the extraction of air from the clean rooms takes place through the ceiling and to the plenum. The extraction is preferably carried out in a suction area, which is located in the floor level of the clean rooms. This intake opens into a vertical channel, this channel is in communication with the suction port of the exhaust device. The channel can be cleaned from the plenum. He is accessible from the plenary. The channel is preferably formed so that at least a portion of a wall of the clean room is part of the channel. Preferably, the channel is bounded by two adjacent walls of the clean room, which collide in an inner edge of the clean room. He is then still limited by a partition that connects the two walls. Of the horizontal cross section of the channel is triangular. Other channel shapes are possible.

Die einzelnen Geräte haben Zugänge für Wartungsarbeiten. Hierunter werden Bedienungsfelder; Klappen, hinter denen sich austauschbare Teile wie z.B. Filter und dergleichen befinden; mechanische Verbindungen einzelner Baugruppen des jeweiligen Geräts und auch elektrische Anschlussbereiche verstanden.The individual devices have access for maintenance work. These include control panels; Flaps behind which are interchangeable parts such as e.g. Filters and the like are located; understood mechanical connections of individual modules of the respective device and electrical connection areas.

Es ist möglich, dass das Plenum direkt mit der Außenluft verbunden ist. Es ist aber auch möglich, im Plenum Geräte vorzusehen, die die Luft im Plenum aufbereiten, beispielsweise hinter der Eintrittsöffnung einen Filter vorzusehen, der die eintretende Luft filtert. Ebenfalls kann im Plenum eine Anlage für Heizung und/oder Kühlung der Luft im Plenum vorgesehen sein. Es ist möglich, bereits im Plenum einen Überdruck gegenüber der Außenluft einzuhalten. Es ist möglich, dass im Plenum eine Vorreinigung der einströmenden Luft stattfindet, so dass die in jeweiligen Reinräumen zugeordneten Geräte nicht mehr für eine vollständige Reinigung oder anderweitige vollständige Aufbereitung der Luft ausschließlich zuständig sind.It is possible that the plenum is directly connected to the outside air. But it is also possible to provide in plenary devices that process the air in plenary, for example, provide behind the inlet opening a filter that filters the incoming air. Also may be provided in plenary a system for heating and / or cooling of the air in plenary. It is possible to maintain an overpressure with respect to the outside air already in plenary. It is possible that a pre-cleaning of the incoming air takes place in the plenum, so that the devices assigned in respective clean rooms are no longer exclusively responsible for a complete cleaning or other complete treatment of the air.

Üblicherweise werden Luftdruck und/oder Temperatur innerhalb jedes einzelnen Reinraums mittels Sensoren erfasst und dem Steuergerät zugeleitet. Üblicherweise befinden sich Einstellmittel für Luftdruck und/oder Temperatur innerhalb jedes einzelnen Reinraums. Alle diese Werte werden dem Steuergerät zugeleitet.Usually, air pressure and / or temperature are detected within each individual clean room by means of sensors and fed to the control unit. Usually there are adjustment means for air pressure and / or temperature within each individual clean room. All these values are sent to the controller.

Die einzelnen Geräte sind ansonsten nach dem Stand der Technik aufgebaut. Sie haben üblicherweise eine Stufe für die Luftreinigung, beispielsweise UV und/oder einen Grobfilter, darauf folgend eine Stufe für die Filtrierung, beispielsweise F5, einen Ventilator und eine darauf folgende Feinfilterstufe, beispielsweise H14.The individual devices are otherwise constructed according to the prior art. They usually have a stage for air purification, for example UV and / or a coarse filter, followed by a filtration stage, for example F5, a fan and a subsequent fine filter stage, for example H14.

Weitere Vorteile und Merkmale der Erfindung ergeben sich aus den übrigen Ansprüchen sowie der nun folgenden Beschreibung von zwei nicht einschränkend zu verstehenden Ausführungsbeispielen der Erfindung, die im Folgenden unter Bezugnahme auf die Zeichnung näher erläutert werden. In der Zeichnung zeigen:

Fig. 1:
einen Querschnitt mit vertikaler Schnittebene durch drei Reinräume und ein darüber befindliches Plenum und
Fig. 2:
einen Schnitt wie Figur 1 für eine Ausführung mit druckfreiem Plenum.
Further advantages and features of the invention will become apparent from the other claims and the following description of two non-limiting embodiments of the invention, which are explained in more detail below with reference to the drawings. In the drawing show:
Fig. 1:
a cross-section with a vertical sectional plane through three clean rooms and a Plenum located above and
Fig. 2:
a cut like FIG. 1 for a design with pressure-free plenum.

Unterhalb eines Plenums 20 befinden sich drei Reinräume 22, 23, 24. Sie sind vom Plenum 20 durch eine tragende Decke 26 getrennt. Die Reinräume 22 bis 24 befinden sich auf einer Ebene.Below a plenum 20 are three clean rooms 22, 23, 24. They are separated from the plenum 20 by a supporting ceiling 26. The clean rooms 22 to 24 are located on one level.

Wie aus den Figuren ersichtlich ist, ist vorzugsweise das Volumen des Plenums 20 deutlich größer, mindestens doppelt, vorzugsweise vierfach so groß wie das Volumen aller drei Reinräume 22 bis 24 zusammen.As can be seen from the figures, the volume of the plenum 20 is preferably significantly larger, at least twice, preferably four times as large as the volume of all three clean rooms 22 to 24 together.

Das Plenum 20 ist ein abgeschlossener Raum. Dieser Raum ist durch eine Tür 28 zugänglich. Die Tür ist luftdicht verschließbar. Die Tür 28 ist so groß gewählt, dass ein Mensch und auch Geräte, zumindest Teile von noch zu besprechenden Geräten, durch die Tür 28 gelangen können.The plenum 20 is a closed room. This room is accessible through a door 28. The door can be closed airtight. The door 28 is chosen so large that a person and also devices, at least parts of devices still to be discussed, can pass through the door 28.

Das Plenum 20 hat eine Eintrittsöffnung 30 für Frischluft. Es hat eine Austrittsöffnung 32 für Abluft. Alle Luft, die sich im Plenum 20 und in den Reinräumen 22 bis 24 befindet, ist durch die Eintrittsöffnung 30 eingeströmt. Der einzige Austritt für Luft ist die Austrittsöffnung 32. Hinter der Eintrittsöffnung 30 befindet sich eine Luftaufbereitung 34 im Plenum 20. Die Luftaufbereitung hat ein F9 Filter 36, dahinter ein Aktivkohlefilter 28, dahinter ein Ventilator 40 und dahinter schließlich eine UV-Station 42. Zudem ist im Plenum 20 noch eine Heiz- und Kühlstufe 44 angeordnet. Sie konditioniert die Luft innerhalb des Plenums 20. Im gezeigten Beispiel besteht sie aus einem außerhalb des Plenums 20 angeordneten Außenteil 46 und einem Innenteil 48. Es handelt sich um ein sogenanntes Split-Klimagerät. Der Innenteil enthält eine UV-Stufe und ein Gebläse.The plenum 20 has an inlet opening 30 for fresh air. It has an outlet opening 32 for exhaust air. All air, which is in the plenum 20 and in the clean rooms 22 to 24, has flowed through the inlet opening 30. The only outlet for air is the outlet opening 32. Behind the inlet opening 30 is an air treatment 34 in plenary 20. The air treatment has an F9 filter 36, behind an activated carbon filter 28, behind a fan 40 and behind it finally a UV station 42. In addition is in plenary 20 still a heating and cooling stage 44 arranged. It conditions the air within the plenum 20. In the example shown, it consists of an outer part 46 arranged outside the plenum 20 and an inner part 48. This is a so-called split air conditioner. The inner part contains a UV stage and a blower.

In der Decke 26 oberhalb des Reinraumes 22 bis 24 ist mindestens eine Ausnehmung vorgesehen. Sie verbindet das Plenum 20 mit dem jeweiligen Reinraum. Sie ist verschlossen durch ein Zuluftgerät 52, das vom Plenum 20 her eingesetzt ist. Das Zuluftgerät 52 hat eine Einströmöffnung 54 und eine Ausströmöffnung 56. Die Einströmöffnung 54 befindet sich im Plenum 20 und kommuniziert mit dem Plenum 20. Die Ausströmöffnung 56 befindet sich oben im jeweiligen Reinraum 22 bis 24. Vorteilhafterweise füllt die Ausströmöffnung 56 die Ausnehmung 50 aus. Das Zuluftgerät 52 verschließt die Ausnehmung 50 insoweit, als nur durch das Zuluftgerät 52 Luft durch die Ausnehmung 50 passieren kann.In the ceiling 26 above the clean room 22 to 24 at least one recess is provided. It connects the plenum 20 with the respective clean room. It is closed by a Zuluftgerät 52, which is inserted from the plenum 20 ago. The supply air device 52 has an inflow opening 54 and an outflow opening 56. The inflow opening 54 is located in the plenum 20 and communicates with the plenum 20. The outflow opening 56 is located above in the respective clean room 22 to 24. Advantageously, the outflow opening 56 fills the recess 50. The supply air device 52 closes the recess 50 in this respect, when air can pass through the recess 50 only through the supply air device 52.

Das Zuluftgerät 52 ist modular aufgebaut. Es hat eine Anzahl von Baugruppen. Diese Baugruppen sind schichtweise übereinander angeordnet. Oberste Baugruppe ist eine UV-Stufe 58, darunter befindet sich ein F5 Filter 60, darunter eine örderstufe 62 und darunter ein H14 Filter 64, das zugleich die Ausströmöffnung 56 definiert. Die UV-Stufe 58 definiert die Einströmöffnung 54. Das Zuluftgerät 52 hat eine Anzahl von Zugängen 68, durch diese sind einzelne Bereiche mindestens einer Baugruppe des Zuluftgeräts 52 zugänglich. Über die Zugänge 58 erfolgen die Wartung, der Anschluss und die Montage. Alle Zugänge 68 befinden sich innerhalb des Plenums 20.The supply air device 52 is modular. It has a number of assemblies. These modules are arranged one above the other in layers. Top assembly is a UV stage 58, including an F5 filter 60, including a conveyor step 62 and below a H14 filter 64, which also defines the outflow opening 56. The UV stage 58 defines the inflow opening 54. The supply air unit 52 has a number of access points 68, through which individual areas of at least one module of the supply air device 52 are accessible. Access 58 is used for maintenance, connection and installation. All accesses 68 are within plenum 20.

Im Betrieb fördert jedes Zuluftgerät 52 Luft aus dem Plenum 20 in den darunter befindlichen Reinraum 22, 23 oder 24.In operation, each supply air device 52 conveys air from the plenum 20 into the clean room 22, 23 or 24 below it.

Weiterhin befindet sich in der Decke 26 oberhalb jedes einzelnen Reinraums 22, 23 oder 24 mindestens eine Aussparung 70, in dem gezeigten Ausführungsbeispiel sind es jeweils zwei Aussparungen 70. In jede Aussparung 70 ist ein Abluftgerät 72 eingesetzt. Das Abluftgerät 72 ist dicht in die Aussparung 70 eingesetzt, so dass alle Luft, die durch die Aussparung 70 hindurchgeht, das Abluftgerät 72 passieren muss. Im gezeigten Ausführungsbeispiel der Fig. 1 ist das Abluftgerät 72 als ein Luftförderer bzw. Ventilator 40 ausgebildet. Das Abluftgerät 72 hat eine Ansaugöffnung 74 und eine Ausgangsöffnung 76. Die Ansaugöffnung 76 kommuniziert mit dem jeweiligen Reinraum 22, 23 oder 24. Im konkreten Ausführungsbeispiel kommuniziert sie über einen Kanal 78 mit dem jeweiligen Reinraum 22, 23 oder 24. Der Kanal 78 wird durch zwei aneinander grenzende Wände 80 des Reinraums 22, 23 oder 24 und eine diese beiden Wände 80 verbindende Trennwand 87 begrenzt. Er ist im Querschnitt dreieckförmig. Der Kanal 78 verläuft vertikal. Er ist oben dicht mit dem Abluftgerät 72 verbunden. Unten im Kanal 78 befindet sich ein Ansaugbereich 84, dort kommuniziert der Kanal 78 mit dem eigentlichen Reinraum 22, 23 bzw. 24. Im gezeigten Ausführungsbeispiel ist dem Ansaugbereich ein Filter 86 jeweils zugeordnet.Furthermore, located in the ceiling 26 above each individual clean room 22, 23 or 24 at least one recess 70, in the embodiment shown there are two recesses 70. In each recess 70, an exhaust device 72 is used. The exhaust device 72 is inserted tightly into the recess 70, so that all the air that passes through the recess 70, the exhaust device 72 must pass. In the illustrated embodiment of the Fig. 1 the exhaust air device 72 is designed as an air conveyor or fan 40. The exhaust air device 72 has an intake port 74 and an output port 76. The intake port 76 communicates with the respective clean room 22, 23 or 24. In the concrete embodiment, it communicates via a channel 78 with the respective clean room 22, 23 or 24. The channel 78 is through two adjacent walls 80 of the clean room 22, 23 or 24 and a partition 80 connecting these two walls bounded 87. He is triangular in cross section. The channel 78 is vertical. He is above tightly connected to the exhaust device 72. At the bottom of the channel 78 is an intake area 84, where the channel 78 communicates with the actual clean room 22, 23 and 24, respectively. In the exemplary embodiment shown, a filter 86 is assigned to the intake area in each case.

Vorzugsweise befindet sich im Plenum 20 ein Druck von null Pa, verglichen mit dem Druck der Umgebungsluft. Im jeweiligen Reinraum befindet sich ein Druck von 20 Pa.Preferably, in plenum 20 there is a pressure of zero Pa compared to the pressure of the ambient air. In each clean room there is a pressure of 20 Pa.

Sämtliche Luft, die in einen einzelnen Reinraum 22, 23 oder 24 einströmt und sämtliche Luft, die aus diesem Raum ausströmt, geht durch die Decke 26 hindurch. Insbesondere strömt alle in einen einzelnen Reinraum 22, 23 oder 24 eintretende Luft durch mindestens eine Eintrittsöffnung 30 in der Decke 26 des betreffenden Reinraums. Ebenfalls strömt die komplette Luft, die aus einem einzelnen Reinraum 22, 23 oder 24 abgeführt wird, durch mindestens eine Austrittsöffnung 32, die sich in der Decke oberhalb des Reinraums befindet. Der Fußboden der Reinräume 22, 23 oder 24 ist daher passiv, er ist nicht für irgendwelche Luftzirkulationen durch ihn hindurch ausgelegt.All air flowing into a single clean room 22, 23 or 24 and all the air flowing out of this room goes through the ceiling 26 therethrough. In particular, all air entering a single clean room 22, 23 or 24 flows through at least one inlet opening 30 in the ceiling 26 of the respective clean room. Also, the entire air discharged from a single clean room 22, 23 or 24 flows through at least one exit opening 32 located in the ceiling above the clean room. The floor of the clean rooms 22, 23 or 24 is therefore passive, it is not designed for any air circulation through it.

Die Anlage ist vorzugsweise so ausgelegt, dass 22 mal bis 100 mal pro Stunde ein kompletter Austausch der Luft in jedem einzelnen Reinraum 22, 23 oder 24 erfolgt.The plant is preferably designed so that a complete exchange of air in each clean room 22, 23 or 24 takes place 22 times to 100 times per hour.

Die lichte Höhe des Plenums kann auch nur 1 m oder beispielsweise nur 1,20 m betragen. Dann kann zwar eine Person nicht mehr in diesem Raum stehen, kann aber immer noch Arbeiten durchführen. Vorzugsweise ist die Höhe größer als 1,80 m. Beispielsweise beträgt sie 2 m.The clear height of the plenum can also be only 1 m or, for example, only 1.20 m. Then, although a person can no longer stand in this room, he can still carry out work. Preferably, the height is greater than 1.80 m. For example, it is 2 m.

Der Luftdruck im Plenum 20 kann etwas größer als der Luftdruck der Außenluft sein, beispielsweise im Bereich von größer als null bis zu 2 Pa liegen. Der Luftdruck des Plenums 20 soll vorzugsweise nicht geringer sein als der Luftdruck der Umgebungsluft.The air pressure in the plenum 20 may be slightly greater than the air pressure of the outside air, for example in the range of greater than zero to 2 Pa. The air pressure of the plenum 20 should preferably not be less than the air pressure of the ambient air.

Die einzelnen Reinräume 22, 23, 24 usw. können unterschiedlich ausgebildet sein. So kann beispielsweise der erste Reinraum 22 als Schleuse für Material ausgelegt sein, er hat dann eine erste Tür zur äußeren Umgebung hin (nicht dargestellt) und eine zweite Tür (nicht dargestellt) zum Reinraum 24 hin, der der tatsächliche Arbeitsraum ist. Der zweite Reinraum 23 ist als Schleuse für Personal ausgelegt und ähnlich aufgebaut, er hat eine erste Tür (nicht dargestellt) für den Zugang von außen her für Personal und eine zweite Tür (nicht dargestellt), die ihn mit dem Reinraum für Arbeiten 24 verbindet.The individual clean rooms 22, 23, 24, etc. can be designed differently. For example, the first clean room 22 may be designed as a lock for material, it then has a first door to the outside environment (not shown) and a second door (not shown) to the clean room 24, which is the actual working space. The second clean room 23 is designed as a lock for personnel and constructed similarly, it has a first door (not shown) for access from the outside for staff and a second door (not shown), which connects him to the clean room for working 24.

Der Eintrittsöffnung 30 ist vorzugsweise ein Ventil zugeordnet, das auf konstantes Luftvolumen eingestellt ist. Die Ansaugöffnung 74 des Abluftgerätes 72 ist innerhalb des Kanals 78 und daher für normale Nutzer des jeweiligen Reinraums 22, 23, 24 nicht sichtbar. Für sie wird keine besondere Blende, Diffusor oder dergleichen eingesetzt. Dagegen ist die Ausströmöffnung 56 des Zuluftgerätes 52 durch ein Gitter 90 optisch abgedeckt. Dieses Gitter 80 ist beispielsweise als Diffusor ausgeführt. Durch das Gitter 90 strömt die Luft in den Reinraum 24. Das Gitter 90 ist sichtbar, es ist optisch ansprechend ausgebildet. Vorzugsweise kann das Gitter 90 von oben, also vom Plenum 20 her montiert und demontiert werden. Alle Reinigungsarbeiten am Gitter 90 können im Plenum 20 durchgeführt werden.The inlet opening 30 is preferably associated with a valve which is set to a constant volume of air. The intake opening 74 of the exhaust air device 72 is not visible within the channel 78 and therefore for normal users of the respective clean room 22, 23, 24. For them no special aperture, diffuser or the like is used. In contrast, the outflow opening 56 of the supply air device 52 is optically covered by a grid 90. This grid 80 is designed, for example, as a diffuser. Through the grid 90, the air flows into the clean room 24. The grid 90 is visible, it is designed visually appealing. Preferably, the grid 90 can be mounted and dismounted from above, ie from the plenum 20. All cleaning work on grid 90 can be performed in plenum 20.

Die äußeren Begrenzungen der gezeigten Anlage können äußerliche Begrenzungen des jeweiligen Gebäudes sein. So kann die linke und rechte Wand eine Außenwand 92 sein. Ebenfalls kann der Abschluss oben ein Dach sein.The outer boundaries of the system shown may be external boundaries of the respective building. Thus, the left and right walls may be an outer wall 92. Also, the conclusion above can be a roof.

Im Folgenden wird das Ausführungsbeispiel nach Figur 2 besprochen. Es wird jedoch nur insoweit besprochen, als es sich vom Ausführungsbeispiel nach Figur 1 unterscheidet. Ein wichtiger Unterschied liegt darin, dass die durch die Eintrittsöffnung 30 in das Plenum 20 eintretende Luft nun nicht mehr in einer Luftaufbereitung 34 aufbereitet wird und damit im Plenum 20 sauberer ist als die Umgebungsluft außerhalb der Anlage, vielmehr ist der Eintrittsöffnung 30 lediglich das Ventil 88 zugeordnet. Damit ist die Qualität der Luft, die sich im Plenum 20 befindet, keine andere als die Qualität der Außenluft. Es ist aber vorteilhaft, dem Ventil 88 zumindest ein Grobfilter, wie das Filter 36, zuzuordnen. Weiterhin ist im Plenum keine Heiz- und Kühlstufe 44 vorgesehen.The following is the embodiment after FIG. 2 discussed. However, it is discussed only insofar as it is from the embodiment FIG. 1 different. An important difference is that the air entering through the inlet opening 30 into the plenum 20 is no longer treated in an air treatment 34 and thus is cleaner in the plenum 20 than the ambient air outside the system, but the inlet opening 30 is only the valve 88th assigned. Thus, the quality of the air, which is in plenary 20, no other than the quality of the outside air. However, it is advantageous to associate with the valve 88 at least one coarse filter, such as the filter 36. Furthermore, no heating and cooling stage 44 is provided in plenary.

Der Ansaugbereich 84 jedes Kanals 78 ist nun als einfache Öffnung ausgebildet. Die Abluftgeräte 72 weisen ein F5-Filter 60 auf, darüber befindet sich ein Ventilator, oberhalb dessen sich ein HEPA-Filter 94 befindet, das nach oben mit der Ausgangsöffnung 76 abschließt. Im Gegensatz zum ersten Ausführungsbeispiel sind die Abluftgeräte 72 daher aufwendiger ausgebildet. Die jeweiligen Luftströmungen werden durch Pfeile dargestellt.The suction area 84 of each channel 78 is now formed as a simple opening. The exhaust air devices 72 have an F5 filter 60, above which there is a fan, above which there is a HEPA filter 94, which terminates upwards with the outlet opening 76. In contrast to the first embodiment, the exhaust air devices 72 are therefore formed consuming. The respective air flows are represented by arrows.

Es werden möglichst viele Gleichteile verwendet. So sind alle Zuluftgeräte 52 für Figur 1 baugleich. Auch die beiden Zuluftgeräte 52 für die Reinräume 22, 23 in Figur 2 sind baugleich, dagegen ist das Zuluftgerät 52 für den Reinraum 24 gemäß Figur 2 deutlich größer und aufwendiger ausgeführt als die sonstigen Zuluftgeräte.As many as possible identical parts are used. So are all supply air devices 52 for FIG. 1 identical. The two supply air devices 52 for the clean rooms 22, 23 in FIG. 2 are identical, however, the supply air device 52 for the clean room 24 according to FIG. 2 significantly larger and more expensive than the other supply air devices.

Alle Abluftgeräte in Figur 1 und auch alle Abluftgeräte 72 in Figur 2 sind baugleich. Vorzugsweise sind auch die Kanäle 78 der einzelnen Reinräume 22, 23, 24 baugleich. Die Zuluftgeräte 52 in Figur 2 unterscheiden sich in ihrem Aufbau nicht, lediglich in ihrer Größe. Sie sind wie folgt ausgehend von der Einströmöffnung 54 aufgebaut: Unter der Einströmöffnung 54 befindet sich ein F5-Filter 60. Darunter befindet sich eine UV-Stufe 58. Unter ihr ist eine Förderstufe 62 vorgesehen. Unter dieser ist ein HEPA-Filter 94 angeordnet.All exhaust air devices in FIG. 1 and also all exhaust air devices 72 in FIG. 2 are identical. Preferably, the channels 78 of the individual clean rooms 22, 23, 24 are identical. The supply air devices 52 in FIG. 2 do not differ in their structure, only in their size. They are constructed as follows, starting from the inflow opening 54: Below the inflow opening 54 is an F5 filter 60. Beneath there is a UV stage 58. Below it, a conveyor stage 62 is provided. Below this, a HEPA filter 94 is arranged.

Vorzugsweise ist auch die Austrittsöffnung durch ein Filter abgedeckt, um zu vermeiden, dass Staub oder Tiere eindringen können.Preferably, the outlet opening is covered by a filter to prevent dust or animals can penetrate.

Claims (9)

  1. A system for ventilation of clean rooms (22, 23, 24), including at least two clean rooms (22, 23) and a plenum (20) above these clean rooms (22, 23, 24), wherein the clean rooms (22, 23, 24) and the plenum (20) are separated by a load-bearing ceiling (26),
    wherein the plenum (20) is an enclosed space, which has an inlet opening (30) for fresh air and an outlet opening (32) for outgoing air, and wherein at least one recess (50) is provided in the ceiling (26) above each clean room (22, 23, 24), and a supply air unit (52) has an inlet opening (54) and an outlet opening (56), the inlet opening (54) communicating with the plenum (20), and the outlet opening (56) being situated at the top of the clean room (22, 23, 24), characterized in that the enclosed space has a closable door (28) for personnel and equipment that is accessible for personnel, and
    wherein at least one gap (70) is provided in the ceiling (26) above each clean room (22, 23, 24), and the exhaust air unit (72) has an intake opening (74) and an exhaust opening (76), the intake opening (74) communicating with the clean room (22, 23, 24), and the exhaust opening (76) communicating with the plenum (20), and
    the supply air unit (52) and the exhaust air unit (72) each have access points (68) for maintenance jobs, and these access points (68) are situated only in the plenum (20).
  2. The system according to claim 1, characterized in that the air pressure in the plenum (20) is the same as that in the outside air.
  3. The system according to any of the preceding claims, characterized in that the air pressure in each clean room (22, 23, 24) is at least 10 Pa, preferably 20 Pa, above the pressure in the plenum (20).
  4. The system according to any one of the preceding claims,
    characterized in that the total volume of all the clean rooms (22, 23, 24) is at least 20% smaller than the volume of the plenum (20).
  5. The system according to any one of the preceding claims,
    characterized in that the plenum (20) is situated above the clean rooms (22, 23, 24) and is separated from the clean rooms (22, 23, 24) only by the ceiling (26).
  6. The system according to any one of the preceding claims,
    characterized in that a channel (78) provided beneath each intake opening (74) in the clean room (22, 23, 24) is bordered in part by at least one wall of the clean room (22), and is connected to the remaining clean rooms (22, 23, 24) by a lower intake area (84).
  7. The system according to any one of the preceding claims,
    characterized in that the channel (78) is bordered in part by a partition (82) connecting the two neighboring side walls of the clean room (22, 23, 24) to one another.
  8. The system according to any one of the preceding claims,
    characterized in that the channel (78) has a triangular cross section.
  9. The system according to any one of the preceding claims,
    characterized in that the plenum (20) is much larger, at least twice as large, preferably four times larger than the volume of three clean rooms (22-24).
EP13707611.3A 2012-03-02 2013-03-01 System for ventilation of clean rooms Active EP2820356B1 (en)

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