JPS6196344A - Clean room - Google Patents

Abstract

PURPOSE:To reduce the area necessary for installation of an air-conditioning mechanism and further facilitate its management and operation by a structure wherein a plurality of clean rooms are built up in stories, while filters provided between clean rooms, at the ceiling of a clean room and at the floor of a clean room, being put into operation by the single system air conditioning mechanism. CONSTITUTION:A high efficiency filter 42 is mounted at the ceiling part of a down-flow type upper story clean room 41. The high efficiency filter 42 is connected through a plenum chamber 43 to an air conditioner 44. A lower story clean room 47 is provided just below filter 46, which is provided under the floor 45 of the upper story clean room 41. A high efficiency filter 48 is arranged between the filter 46 and the ceiling part of the lower story clean room 47. A filter 50, which is connected through an exhaust chamber 51 to the air conditioner 44, is provided under the floor 49 of the lower story clean room 47.

Description

[Detailed description of the invention] [Technical field of invention] The present invention relates to clean rooms.

[Technical background of the invention and its problems]

Currently, the manufacturing process of semiconductor devices is carried out in a clean room to avoid the adhesion of dust, bacteria, etc. in the air. The clean room includes a convection type 10 shown in FIG. 3, a cross 70-type 20° shown in FIG. 4, and a downflow type 30 shown in FIG.

Respective clean rooms 10, 20. :in differs in the cleanliness inside the clean room 11, 21, and 31.

The cleanliness inside the clean room 10, 20, 30 is expressed as a class by the number of particles with a diameter of 0.5 μm or more present per cubic foot.

Ina Mini, Convenge 1Nal/Lee-7A/-A1
In 0, the pure people are class 1000 or higher and cross 7
0-1 Cleanliness of Deaf Clean Room 20 is class 100
~1000G range.

In addition, the cleanliness level of the down 70-type clean room 30 is kept at a level of 100 or below. In this way, each clean room 11, 21, 31 has a different level of cleanliness, and each of the clean rooms 10, 20, and 31 naturally has an air supply and exhaust system, and each needs to be constructed separately.
A designated clean room 10.2 depending on the content of the manufacturing process.
0.30 is used. In recent years, with the miniaturization of semiconductor devices, high cleanliness is required, and down-flow type clean rooms 30 are often used. However, this clean room 30 has disadvantages in that it requires higher investment costs and operating costs than the first two, and is also troublesome to manage.

Additionally, some semiconductor device manufacturing processes do not require very high cleanliness, so providing a downflow clean room 30 for all processes would result in a lot of economic waste. become. For this reason, clean rooms 10 with different degrees of cleanliness depending on the content of the manufacturing process.
゜20.30 types are used together. However, such means require a large footprint and
Furthermore, it is troublesome to operate and manage air conditioning mechanisms with different contents at the same time. Furthermore, it is troublesome to transfer products between clean rooms 10 #20 r30.

In addition, 12 in FIG. 3 is a high-performance filter attached to the upper part of the clean room 11, and 13 is a high-performance filter 1.
This is an air conditioner connected to 2.

Further, reference numeral 22 in FIG. 4 is an exhaust chamber provided at one end of the clean chamber 21, which communicates with an air compressor 23. The air f4 moderator 23 is connected to the clean room 21 via the air supply room 2a.
It is connected to the high-performance filter 25 inside.

Further, in FIG. 5, 32 is a high performance filter provided above the clean room 31, and 33 is a filter provided below the floor 34 of the clean room 3. The high-performance filter 32 is connected to the air conditioner 36 through an air supply chamber 35, and the filter 33 is connected to the air conditioner 36 through an exhaust chamber 37.

[Purpose of the invention]

An object of the present invention is to provide a clean room that has a plurality of clean rooms with different cleanliness levels, requires a small area for installation, is economical, and is easy to manage and operate. It is.

[Summary of the invention]

The present invention consists of stacking a plurality of clean rooms in multiple stages, providing filters between the clean rooms and on the ceiling and floor of the clean rooms, and pressuring these filters to operate with a single air conditioning system. Therefore, the clean room has a plurality of clean rooms with different cleanliness levels, requires a small area for installation, is economical, and is easy to manage and operate.

[Embodiments of the invention]

Embodiments of the present invention will be described below with reference to the drawings. FIG. 1 is an explanatory diagram showing a schematic configuration of an embodiment of the present invention. In the figure, 41 is a down-flow type upper clean room. A high-performance filter 4 is attached to the ceiling of the upper clean room 41. The high-performance filter 42 is connected to an air conditioner 44 via an air supply chamber 43.

A filter 46 is installed under the floor 45 of the upper clean room 410.
is provided. A lower clean chamber 47 is provided directly below the filter 46. A high-performance filter 48 is provided between the filter 46 and the ceiling of the lower clean room 42. Lower clean room 470 beds 49
A filter 50 is provided below. The filter 50 is connected to the air conditioner 44 via the exhaust chamber 5.

According to the clean room 60 configured in this way, the air supplied from the air conditioner 44 through the air supply chamber 43 is sufficiently purified by the high performance filter 42 before entering the upper clean room 41 . Further, the air in the upper clean chamber 41 is sufficiently purified through a filter 46 under the floor 45 and a high performance filter 48 provided directly below it, and then supplied into the lower clean chamber 42 . The air in the lower clean room 47 is purified by a filter 50 under the floor 50 and then led to the air conditioner 44 through an exhaust chamber 51.

When the cleanliness of the upper clean room 41 and the lower clean room 41 was examined at point a in each room, as shown in FIG. 2, the cleanliness of the upper clean room 4J was below class 100. The lower clean room 42 is of class 100 to 10.
It was experimentally confirmed that the cleanliness level was maintained at 0.000. In addition, the upper clean room 41 is controlled by the air conditioner 44.
When the temperature was maintained at 22±0.5° C. and the humidity was maintained at 40±5%, it was found that in the lower clean room 47, the temperature was maintained at 25±2° C. and the humidity was maintained at 50±10%. From this, it can be seen that both the upper clean room 4 and the lower clean room 47 can provide an environment suitable for the manufacturing process of semiconductor devices. Therefore, processes that require high cleanliness are performed in the upper clean room 41, and processes that do not require such high cleanliness are performed in the lower clean room 47.
Semiconductor devices can be manufactured in a clean room consisting of two consecutive rooms. As a result, the installation area of the clean room 60 can be reduced and economical efficiency can be improved.

Moreover, since the air conditioning mechanism can be integrated into one system, its operation and management can be facilitated, and operating costs can be significantly reduced.

In the embodiment, a two-layer structure including the upper clean chamber 4 and the lower clean chamber 47 has been described, but a plurality of layers of clean chambers may be stacked as necessary. Similarly, a plurality of filters 46 and high performance filters 47 between the upper clean chamber 41 and the lower clean chamber 42 may be stacked.

Also, between the upper clean room 41 and the lower clean room 47,
It is also possible to facilitate the transfer of articles between each clean room by interposing a dusbic tube.

Alternatively, instead of a path, a conveyance path may be provided between each clean room.

〔Effect of the invention〕

As explained above, the clean room according to the present invention has a plurality of clean rooms with different cleanliness levels, and
It requires a small area for installation, is economical, and has remarkable effects such as being easy to manage and operate.

[Brief explanation of drawings]

FIG. 1 is an explanatory diagram showing a schematic configuration of an embodiment of the present invention,
FIG. 2 is a characteristic diagram showing the cleanliness of each clean room, and Figures 3 to 5 are explanatory diagrams showing the schematic configuration of a conventional clean room. 41... Upper clean room, 42... High performance filter, 43... Air supply room, 44... Air conditioner, 45...
...floor, 46...filter, 47...lower clean room, 48...high performance filter, 49...floor, 5
0... Filter, 51... Exhaust lid %60... Clean room. Applicant's agent Patent attorney Takehiko Suzue Seal in figure 1

Claims (1)

[Claims] A plurality of clean rooms are stacked in multiple stages so that they communicate with each other through filters, and filters are installed on the ceiling of the top clean room and the floor of the bottom clean room. A clean room characterized in that the filters provided in the top and bottom clean rooms are connected to one system of air conditioning mechanism.