EP2815195B1 - Dispositif de traitement thermique - Google Patents

Dispositif de traitement thermique Download PDF

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Publication number
EP2815195B1
EP2815195B1 EP13702328.9A EP13702328A EP2815195B1 EP 2815195 B1 EP2815195 B1 EP 2815195B1 EP 13702328 A EP13702328 A EP 13702328A EP 2815195 B1 EP2815195 B1 EP 2815195B1
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EP
European Patent Office
Prior art keywords
quartz glass
heating
wall element
wall
sio
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EP13702328.9A
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German (de)
English (en)
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EP2815195A1 (fr
Inventor
Jürgen Weber
Frank Diehl
Sven Linow
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Heraeus Noblelight GmbH
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Heraeus Noblelight GmbH
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Priority to PL13702328T priority Critical patent/PL2815195T3/pl
Publication of EP2815195A1 publication Critical patent/EP2815195A1/fr
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    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F27—FURNACES; KILNS; OVENS; RETORTS
    • F27D—DETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS, OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
    • F27D1/00—Casings; Linings; Walls; Roofs
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F27—FURNACES; KILNS; OVENS; RETORTS
    • F27D—DETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS, OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
    • F27D1/00—Casings; Linings; Walls; Roofs
    • F27D1/0003—Linings or walls
    • F27D1/0006—Linings or walls formed from bricks or layers with a particular composition or specific characteristics
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B3/00—Ohmic-resistance heating
    • H05B3/62—Heating elements specially adapted for furnaces
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B6/00—Heating by electric, magnetic or electromagnetic fields

Definitions

  • the invention relates to a device for heat treatment, comprising a process chamber surrounded by a quartz glass furnace lining, a heating device and a reflector.
  • Devices in this sense are particularly suitable for heating substrates to temperatures above 600 ° C.
  • infrared heaters are often used as heating elements that emit entertaining, medium-wave and / or long-wave infrared radiation.
  • the infrared radiators are often arranged within the process space and thus exposed to high temperatures; they therefore have a limited life.
  • furnaces In order to ensure high process temperatures and low energy losses, these furnaces are provided with an insulating furnace lining, which, for example, consists of fireclay insulating stoves in many classic furnaces.
  • Furnace linings made of chamotte have a comparatively high heat capacity. Since the furnace lining must first be heated after switching on the furnace, the high heat capacity of the lining leads to a relatively long heating time of the furnace with simultaneously high energy consumption.
  • the use of furnace linings made of chamotte also limits the purity conditions in the process area. Furnaces with a furnace lining made of chamotte have a high weight and are therefore only limited mobile use.
  • An electrically heated muffle furnace with a furnace lining of fireclay is for example from the DE 1 973 753 U known.
  • the muffle furnace has as a heater infrared radiator with quartz-enclosed heating coils, which are arranged in the top wall of the process space.
  • the arrangement of the infrared radiator within the process chamber although a short heating time and a uniform heating of the fuel to be achieved.
  • the heating as well as the cooling time is extended by the furnace lining.
  • the furnace lining must first be heated to operating temperature here.
  • ovens with a fireclay furnace lining have low thermal shock resistance, so that premature opening of the furnace can cause cracks in the furnace lining.
  • the furnaces should only be opened when their process space has cooled to a temperature below 400 ° C.
  • furnace linings In addition to chamotte, other refractory materials, usually ceramic products and materials with an operating temperature of over 600 ° C are used as furnace linings.
  • furnace linings made of quartz glass are used.
  • a device for heat treatment of a substrate with a furnace lining of quartz glass is for example from US 4,883,424 known.
  • the furnace lining should allow a quick heating and cooling of the heating material; it is cylindrical and surrounded by a reflector provided with a cover for cooling.
  • a heater made of a nichrome alloy is arranged within the furnace lining.
  • furnace linings made of quartz glass especially those with larger dimensions, expensive to manufacture. They usually have a cylindrical shape and are therefore only of limited use for many applications in which electric heating furnaces are used.
  • the invention has for its object to provide a device for heat treatment with a furnace lining, which is easy to manufacture and in variable form, which allows a fast heating and cooling of the heating material and short process times and is characterized by a long service life.
  • the furnace lining comprises a plurality of wall elements with a process chamber facing away from the process space and a side facing away from the process space, and that at least one of the wall elements comprises a plurality of quartz glass tubes, which via a SiO 2 -containing bonding compound are interconnected.
  • the modification according to the invention has two significant additional features, firstly the furnace lining comprises a plurality of wall elements, and secondly at least one of the wall elements has a plurality of quartz glass tubes which are connected to one another via an SiO 2 -containing bonding compound ,
  • the furnace lining can be made in variable form, for example in the form of a cuboid, a sphere, a cylinder, a pyramid or a cube.
  • the shape of the furnace lining can also be adapted to the heating material to be heated.
  • the individual wall elements are detachably or firmly connected to each other.
  • the connection can be made, for example, via a joint connection, which comprises, for example, the purely mechanical, form-fitting assembly, the pressing or pressing in or the gluing of the wall elements.
  • At least one of the wall elements has a plurality of quartz glass tubes. Quartz glass tubes are easy and inexpensive to manufacture. The quartz glass tubes have a cavity, which contributes to an insulation of the furnace lining; they can be stretched or bent. By connecting the quartz glass tubes with a SiO 2 -containing bonding compound, a wall element is obtained, which consists essentially of quartz glass. Such a wall element has a high temperature resistance. It allows high operating temperatures above 1,000 ° C.
  • the furnace lining according to the invention has a low weight and thus a low heat capacity in comparison to a furnace lining made of chamotte. As a result, a rapid heating and cooling of the device is made possible.
  • the device is also characterized by a high thermal shock resistance, so that it can be opened, for example, even at high temperatures. The life of the device is not affected by frequent, rapid temperature changes.
  • the device according to the invention is suitable both for batch operation and for continuous operation.
  • the SiO 2 -containing bonding compound simultaneously serves as a reflector and as a connecting means.
  • a SiO 2 -containing compound compound is used which, for example, in the form of a slip, is applied to the quartz glass tubes to be joined, dried and optionally sintered.
  • the SiO 2 -containing bonding compound preferably forms an opaque, diffusely highly reflective and porous quartz glass layer which has reflective properties and which therefore simultaneously serves as a reflector.
  • the reflective properties of the bonding compound enable energy efficient operation of the device.
  • the heating material can be heated faster by the reflector layer provided, so that in batch processes, the process times are shortened.
  • the SiO 2 -containing bonding compound has a high temperature stability and thermal shock resistance. Due to the fact that the SiO 2 -containing bonding compound is applied to the side of the wall element facing the process space, an energy-efficient heat treatment of the heating material is made possible. In this case, both occurring energy losses are minimized and an energy input into the wall elements is reduced, so that the energy introduced by the heating device into the process space is increasingly available for the heat treatment of the heating material.
  • the SiO 2 -containing bonding compound is applied to the side of a wall element facing away from the process space.
  • a SiO 2 -containing bonding compound applied to the side facing away from the process space also leads to a reduction of occurring energy losses. Because the coating is applied to the side of the wall element facing away from the process space, it is exposed to lower temperatures and temperature fluctuations. In comparison with a coating which is applied to the side facing the process space, such a coating has a longer service life.
  • the quartz glass tubes have a round cross section and if the outer diameter of the quartz glass tubes in the range of 4 mm to 50 mm.
  • Round diameter quartz glass tubes are simple and inexpensive to manufacture.
  • a quartz glass tube with an outer diameter of less than 4 mm has only a comparatively small cavity, so that loses the effect of the cavity on the isolation of the process chamber.
  • a quartz glass tube with an outer diameter of more than 50 mm is expensive to process and affects a compact design of the device.
  • a heating element is arranged, which is part of the heating device.
  • one or more heating elements can be arranged and it can be equipped with heating elements several quartz glass tubes.
  • the arrangement of the heating element in a quartz glass tube a small distance between the heating element and Schugut is achieved without affecting the quality of the irradiation intensity.
  • the heating element is an infrared radiator having a radiator tube and a heating filament.
  • a heating element in the form of an infrared radiator causes the material to be heated directly, so that a rapid and uniform heating of the heating material is achieved.
  • the infrared radiator used can be designed, for example, for short-wave, medium-wave and / or long-wave infrared radiation emission; it has at least one Schufilament, which is surrounded by a radiator tube, for example made of quartz glass.
  • quartz glass tube is the radiator tube of the infrared radiator.
  • the quartz glass tube of the wall element is at the same time the radiator tube of the infrared radiator, the smallest possible distance between the heating element and the material to be heated can be achieved. In addition, the radiation losses occurring on the quartz glass tube and the radiator tube are minimized, so that the energy efficiency of the device is improved.
  • the heating element is designed for medium-wave infrared radiation emission.
  • the radiator tube of a medium-wave radiant heater can be open.
  • the heating filament is directly accessible and can therefore be exchanged particularly easily and inexpensively. This embodiment thus facilitates assembly and maintenance of the device.
  • the wall elements form a cuboid hollow body.
  • the wall elements are part of the furnace lining.
  • the wall elements are arranged such that they form a cuboid hollow body.
  • the cuboid hollow body is surrounded on all sides by wall elements in the sense of the invention.
  • Such a holster body is particularly suitable as a furnace lining for a furnace which is used in discontinuous operation.
  • the cuboid hollow body can also be open on one or two sides.
  • a furnace lining open on two sides is suitable for use in continuous continuous operation.
  • the cuboid hollow body is a wall element forming the bottom plate, a wall element forming the cover plate and four, the side walls of the hollow body forming wall elements comprises.
  • a furnace lining in the form of a cuboid hollow body with a bottom plate, a cover plate and four wall elements is particularly suitable as a furnace lining for a furnace which is used in discontinuous operation.
  • the wall elements surround the process space, making the furnace lining suitable for applications with high purity requirements. Since the furnace lining is made of quartz glass, under process conditions no appreciable contamination through the furnace lining is to be expected.
  • the wall elements of the furnace lining are connected in block construction, for example by galvanizing or toothing.
  • the wall elements protrude alternately at the corpus corners or they finish flush at the corners.
  • the connection of the wall elements in block construction a joint is obtained, which withstands high mechanical stresses and at the same time allows the replacement of individual wall elements.
  • the oven casing comprises an insulation, for example in the form of a mineral fiber mat, and a sheet metal casing.
  • the towering wall elements may be loosely or firmly connected to the oven shell for their fixation. In the simplest case, a fixing of the wall elements is already made possible by the fact that the wall elements are surrounded by the insulation and the sheet metal jacket.
  • the furnace lining is cylindrical, and a wall surface forming the cylinder surface with a plurality of annularly curved quartz glass tubes, a wall forming the cover plate and a wall plate forming the bottom plate includes.
  • a hollow-cylindrical furnace lining allows uniform illumination of the heating material on all sides, in particular if the material to be heated also has a cylindrical shape.
  • the furnace lining also has wall elements in the form of a bottom and a cover plate.
  • bottom plate and / or the cover plate have a plurality of quartz glass cylinders, which are connected to one another via the SiO 2 -containing bonding compound.
  • a bottom and / or top plate made of quartz glass cylinders is easy and inexpensive to manufacture.
  • the quartz glass cylinders also have a cavity which contributes to a thermal insulation of the device.
  • a plurality of heating elements can be arranged in a bottom and / or a cover plate made of a plurality of quartz glass cylinders, so that the most uniform possible irradiation intensity relative to the heating material is achieved.
  • the furnace lining is surrounded by a refractory high-temperature mat.
  • FIG. 1 schematically shows a wall element of the device according to the invention for heat treatment, the total, the reference numeral 1 is assigned.
  • the wall element 1 consists of four quartz glass tubes 4a-4d of transparent quartz glass.
  • a single quartz glass tube 4a-4d has the dimensions length x width x height (L x W x H) 350 mm x 34 mm x 14 mm.
  • the quartz glass tubes 4a-4d are arranged next to one another and connected to one another via an SiO 2 -containing bonding compound 5.
  • the quartz glass tubes 4a-4d are alternately offset by 50 mm in the plane, so that the quartz glass tubes 4a and 4c on the one hand and the quartz glass tubes 4b and 4d on the other hand protrude from the composite.
  • the entire wall element 1 is 140 mm wide and 400 mm long.
  • the juxtaposed quartz glass tubes 4a-4d are in a fragile green state after coating; They are therefore transferred together with the tray in a sintering furnace afterwards.
  • the sintering of the green body takes place at 1240 ° C for two hours in air atmosphere.
  • the quartz glass tubes 4a-4d are mechanically stably connected to one another, so that a wall element 1 is obtained which consists of more than 99.9% quartz glass (SiO 2 ).
  • the coating is applied to the side facing away from the process space 3 of the wall element 1; it is opaque and serves as a reflector layer.
  • FIG. 2 A second embodiment of a wall element is in FIG. 2 shown schematically, which shows the wall element 20 in side view.
  • the wall element 20 comprises four quartz glass cylinders 21a, 21b, 21c, 21d, which are connected to one another via an SiO 2 -containing compound 5.
  • the quartz glass cylinders are arranged side by side and alternately offset by 50 mm.
  • the side 22 as well as the opposite side (not shown) of the wall element 20 are coated only in the region of the connection with the SiO 2 -containing bonding compound 5.
  • the individual quartz glass cylinders 21a, 21b, 21c, 21d have the following dimensions: (L x W x H) 350 mm x 34 mm x 14 mm; the entire wall element 20 is 140 mm wide and 400 mm long.
  • the apparatus for heat treatment (not shown) on a furnace lining in the form of a cuboid hollow body;
  • the furnace lining comprises a plurality of wall elements 1 made of quartz glass, a bottom plate and a cover plate.
  • FIG. 3 shows a plan view of four vertically placed, connected to each other via a joint connection wall elements 1.
  • the composite is the total reference numeral 30 assigned.
  • the wall elements 1 are composed so that the mutually offset by 50 mm from each other ends of the wall elements 1 are nested and connected to each other in block construction.
  • Each wall element 1 has a side 2 facing away from the process space 31 and a side 3 facing the process space 31.
  • the process space 31 facing side 3 is coated with the SiO 2 -containing compound compound 5.
  • the composite 30 is covered with a rectangular cover plate (not shown) consisting of eleven tubes of quartz glass.
  • the tubes have a length of 400 mm, a width of 34 mm and a height of 14 mm; they are connected to each other via a SiO 2 -containing compound compound 5.
  • the connection is made as for the wall elements 1 to FIG. 1 described.
  • the individual tubes of the cover plate are arranged side by side. In contrast to the wall elements 1, the individual tubes of the cover plate are not offset from each other.
  • the process space facing side of the rectangular cover plate is coated with the SiO 2 -containing bonding compound; the process space facing away from the side has no coating.
  • the rectangular cover plate has the following dimensions: LxWxH 400x400x14 mm.
  • the area of the lid is 0.16 m 2 .
  • the bottom plate (not shown) is also made of round tubes made of quartz glass, which are connected to each other via the SiO 2 -containing compound compound 5.
  • the base plate ten round tubes with an outer diameter of 10 mm and a length of 400 mm are connected to each other.
  • the round tubes are arranged in a plane next to each other, but not offset from one another.
  • each of the ten round tubes of the bottom plate a 350 mm long filament is inserted.
  • the ends of the round tubes are finished with a ceramic base.
  • the area difference (0.12 m 2 ) of the floor slab to the ceiling slab is designed with pipe sections.
  • the tube sections are coated on the top with opaque, diffusely highly reflective quartz glass.
  • the coating consists of very many and small quartz beads with a diameter of about 10 nanometers to 50 micrometers.
  • the solid sintered and correspondingly porous SiO 2 material whose pores are filled with air, has an enormous surface due to the tiny structures: about 5 m 2 per gram of material. In the construction described here, approximately 670 grams of the opaque material are firmly applied, resulting in a surface in the furnace interior of approximately 3,350 m 2 . This large surface promotes the rapid indirect heating of the air in the pores via the direct heating of the quartz glass via infrared radiation.
  • the furnace lining is surrounded by a single-layer thermal insulation.
  • the insulation consists of a refractory high-temperature mat based on aluminum and silicon oxide; it has a thickness of 25 mm.
  • the outside of the thermal insulation is surrounded by a sheet metal jacket. To allow the stove to be charged over the top, the lid can be opened.
  • the entire irradiation device weighs about 10 kilograms and is suitable for mobile use.
  • the process space 31 has a length of 320 mm, a width of 320 mm and a height of 145 mm.
  • FIG. 5 is the temperature-time course of a sample shown, which has been positioned in the middle of the process chamber 31 of the device according to the invention.
  • the sample is a quartz glass round tube with an outer diameter of 10 mm and a length of 50 mm.
  • a ceramic NiCrNi thermocouple is provided within the quartz glass round tube.
  • the outside of the quartz glass round tube has an encircling gold coating.
  • the sample was placed on a quartz glass shelf spaced 30 mm from the heater.
  • the device was put into operation at room temperature (so-called cold start), and the full electrical power (4 kW) was switched on. After 2 minutes, the temperature of the heating medium reaches 260 ° C, after 4 minutes 540 ° C. 900 ° C are reached after about 17.5 minutes, the maximum temperature of 950 ° C after 22 minutes.
  • the maximum temperature was limited to 950 ° C and then the heating phase ended. If the quartz components and the heater wires are permanently operated below 1,000 ° C, the maintenance-free life of the furnace lining can reach 10,000 operating hours and more.
  • the electrical power was lowered to a steady 1.6 kW.
  • This temperature is suitable, for example, for applying directional reflectors to glass substrates, ie metallic layers such as gold.
  • the closed structure not only uses the radiant energy, but also the resulting convective heat of the heated air contributes to the overall warming.
  • the temperature gradient in the linear range (260 to 560 ° C) during heating is about 2.3 K / min; the required heating times are minimized.
  • the lid of the structure removed and removed the sample with a pair of pliers.
  • the sample still has a temperature greater than 600 ° C. Due to the excellent thermal shock resistance of the inner lining of the furnace made of pure quartz glass, a time-consuming cooling phase is not necessary, the total process time is reduced by several hours compared to conventional muffle furnaces, see Comparative Example 1.
  • the sample can be changed immediately, so that the process can be started directly again can.
  • the new inner lining of the furnace is made of quartz glass and the material and the radiators survive even temperatures up to almost 1000 ° C, cooling of the individual components by means of fans or cooling liquids is not necessary.
  • the structure of the device differs from the structure of the device of embodiment 1 in that two, opposite wall elements 1 are completely removed.
  • the openings are the preparation for a continuous introduction of the heating material to be heated.
  • the furnace with the new interior lining in the form of the remaining two walls with lid and bottom is loaded centrally in the warm and switched-on state (electrical continuous power 1.5 kW).
  • the product carrier has a distance of 60 mm to the heating field (floor).
  • the quartz glass sample as described in Example 1 initially heats up from room temperature with a gradient of about 9 K / min and reaches the temperature of 600 ° C after only three minutes and a maximum temperature of 740 ° C after 14 minutes.
  • the difference to the maximum temperature of 800 ° C from Example 1 is explained by convective losses through the two lateral openings and the slightly larger distance between the material to be heated and the radiation source.
  • the structure of the furnace according to Example 3 corresponds to that of the device of Example 2.
  • the furnace is operated in the warm and on state (continuous electric power 1.5 kW) and used for a continuous sintering process.
  • the component is manually moved through the oven with a holder located outside the oven.
  • the pipe moves at a distance of 60 mm to the heating field of the base plate.
  • the coating on the tube After passing through the oven, the coating on the tube has a visually homogeneous surface with very good surface adhesion.
  • the adhesion of the gold to the surface was determined by the tape peel test. This test involves that a commercially available adhesive tape, for example a 3M Scotch tape, is applied to the gilded surface and pulled off again with a jerk. If the adhesion of the gold is insufficient, metallic residues remain on the adhesive surface of the strip.
  • the metallically coated surface showed no adverse effects from particles or foreign substances, since the new furnace lining made of SiO 2 works without contamination and without particle generation.
  • a quartz tube coated on one side with a metal having a length of 300 mm, a width of 34 mm and a height of 14 mm was introduced for baking the coating, and the temperature-time course of the sample was determined.
  • the heating curve (not shown) shows a gradient of 6.6 K / min between 700 and 1000 ° C, the furnace temperature is held at a maximum of 1000 ° C.
  • the oven After switching off the oven, it takes 5.5 hours until the temperature reaches 600 ° C and the oven can be opened at the earliest to take the sample. To ensure a long service life of the lining (> 1 year) without cracking, the oven should not be opened below 400 ° C, as the bricks do not have a high thermal shock resistance.
  • the structure of the device differs from that of Example 1 in that three juxtaposed bottom plates are provided as surface radiators.
  • Each base plate consists of 10 round tubes, each with a filament of 400 watts.
  • the total electrical power of the device is 12 kW.
  • Ceramic bases are provided at the ends of the round tubes.
  • the difference to the opposite surface of the cover (0.16 m 2 ) is designed with individual, on one side coated at the top pipe sections.
  • the shortest distance between plate and surface spotlight is 30mm.
  • the target temperature of 800 ° C, starting from room temperature 20 ° C, is reached after four minutes.
  • the heating gradient is approximately 4.5 K / s in the linear range.
  • a steel plate according to Example 4 with the same size and quality is heated in a conventional infrared module with nine short-wave radiators from one side.
  • the infrared module has a power density of 100 kW / m 2 and a total electrical power of 38 kW.
  • the heating gradient is initially about 14 K / s and then flattens off sharply.
  • the maximum temperature of 640 ° C is reached after about 2 minutes. Due to the high convection losses on all sides and the high reflectivity, a higher temperature of the steel plate is only possible by heating by means of radiation, the target temperature of 800 ° C can not be achieved. A smaller distance between the plate and the heating field is not practicable, since the environment including the radiator heats up inadmissibly despite cooling in this temperature range.
  • a steel plate of the same dimensions and identical quality from Comparative Example 2 is heated by two conventional infrared modules with short-wave radiators from two sides.
  • the infrared modules have a power density of 100 kW / m 2 ; the electric power is 75 kW in total.
  • the distance of the heating field from the material to be heated is 120 mm.
  • the heating gradient is initially about 25-30 K / s, the maximum temperature of about 680 ° C sets after about 1.5 minutes, the target temperature of 800 ° C can not be achieved. From 500 ° C a significant warming (smoke) is the environment too observe.
  • a wall element is designed such that it itself functions as a radiant heater and simultaneously heats the material to be heated from several sides.
  • Five individual twin tubes of quartz glass with a length of 875 mm, a width of 34 mm and a height of 14 mm are bent annularly and then coated on the outside and connected to each other.
  • the inner radius of the process chamber thus obtained is about 120 mm.
  • the circular arc is opened a gap (about 30 mm); Through the gap, the electrical connections for power supply are led into a zone outside the process space.
  • the five annular twin tubes are each equipped with two heating coils of a length of 70 cm each; they are assembled vertically one above the other in direct contact with a composite. Each heating coil has a power of 0.9 kW.
  • the total power of the device is 9 kW.
  • the bottom plate and the cover plate consist of joined individual tubes without heating elements, as described in Example 1.
  • a steel plate as described in Embodiment 4 or Comparative Examples 2 or 3 is centrally placed vertically in the chamber.
  • the mean distance between the steel plate and the inner wall is approx. 120 mm.
  • a heating gradient of approx. 30 K / s achieves more than 1000 ° C after approx. 35 seconds.
  • the electrical power is reduced to 1.6 kW.
  • the furnace lining differs from the furnace lining according to embodiment 1 in that a wall element 1 is removed.
  • the loading of the process space is favored by the open side; it is done by means of an automatic robot arm.
  • the robot keeps the component to be heated in the hot zone for a defined time until the target temperature is reached. Thereafter, the component is placed in a mold. Finally, the next component in the infrared oven is brought to the target temperature again.
  • a carbon fiber reinforced plastic (CFRP) is heated, here with the thermoplastic PPS (polyphenylsulfide).
  • the surface spotlights After switching on, the surface spotlights will be operated with an electrical feed of 4 kW.
  • the process room is initially heated for five minutes before the CFRP is kept in the hot zone.
  • the heating gradient in the linear heating range is approximately 4.8 K / s on the side of the CFRP facing away from the radiator.
  • the electrical heating is switched off to prevent premature overheating of the CFRP surface. Due to the internal lining of the furnace, the inside of the furnace continues to rise despite the open side due to the radiation of the walls with the help of warm air (convection).
  • the target temperature of 260 ° C is reached reached to the spotlight side.
  • the temperature continues to rise with a gradient of about 0.2 K / s up to 280 ° C and keeps the temperature in the following minute. Due to the homogeneous heating to 260 ° C, the PPS softens, so that a transformation of the material is easily possible.

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Furnace Housings, Linings, Walls, And Ceilings (AREA)
  • Resistance Heating (AREA)
  • Furnace Details (AREA)

Claims (16)

  1. Dispositif de traitement thermique, comportant une chambre de traitement entourée d'un revêtement de four constitué de verre de quartz, un dispositif de chauffage et un réflecteur, caractérisé en ce, que le revêtement de four comporte plusieurs éléments de paroi (1) dotés d'une face dirigée (3) vers la chambre de traitement et d'une face opposée (2) à la chambre de traitement, au moins un des éléments de paroi comportant plusieurs tubes en verre de quartz, qui sont reliés entre eux par une matière d'assemblage (5) contenant du SiO2.
  2. Dispositif selon la revendication 1, caractérisé en ce, que la matière d'assemblage (5) contenant du SiO2 serve simultanément de réflecteur et de moyen de liaison.
  3. Dispositif selon la revendication 1 ou 2, caractérisé en ce, que la matière d'assemblage (5) contenant du SiO2 soit appliquée sur la face d'un élément de paroi dirigée vers la chambre de traitement.
  4. Dispositif selon l'une des revendications 1 ou 2, caractérisé en ce, que la matière d'assemblage (5) contenant du SiO2 soit appliquée sur la face d'un élément de paroi opposée à la chambre de traitement.
  5. Dispositif selon l'une des revendications précédentes, caractérisé en ce, que les tubes en verre de quartz aient une section circulaire et que le diamètre extérieur des tubes en verre de quartz soit situé dans une plage de valeurs de 4 à 50 mm.
  6. Dispositif selon l'une des revendications précédentes, caractérisé en ce, qu'au moins un des tubes en verre de quartz comporte un élément chauffant qui fait partie du dispositif de chauffage.
  7. Dispositif selon la revendication 6, caractérisé en ce, que tous les tubes en verre de quartz d'un élément de paroi (1) comportent des éléments chauffants.
  8. Dispositif selon la revendication 6 ou 7, caractérisé en ce, que l'élément chauffant soit un émetteur infrarouge qui comporte un tube d'émetteur et un filament chauffant.
  9. Dispositif selon la revendication 8, caractérisé en ce, que le tube en verre de quartz soit le tube d'émetteur de l'émetteur infrarouge.
  10. Dispositif selon l'une des revendications précédentes 6 à 9, caractérisé en ce, que l'élément chauffant soit conçu pour une émission de rayonnement infrarouge à ondes moyennes.
  11. Dispositif selon l'une des revendications précédentes, caractérisée en ce, que les éléments de paroi (1) forment un corps creux parallélépipédique.
  12. Dispositif selon la revendication 11, caractérisé en ce, que le corps creux parallélépipédique comporte un élément de paroi (1) formant la plaque de fond, un élément de paroi formant la plaque supérieure et quatre éléments de parois formant les parois latérales du corps creux.
  13. Dispositif selon l'une des revendications précédentes, caractérisé en ce, qu'au moins deux éléments de parois soient assemblés en mode de construction par blocs, de préférence par endentement à des angles du corps de deux éléments de parois (1) et/ou par le dépassement en forme de saillies en alternance à des angles du corps par les cylindres en verre de quartz d'un premier et d'un deuxième élément de paroi.
  14. Dispositif selon la revendication 13, caractérisé en ce, que les éléments de paroi (1) en saillie soient liés pour leur fixation à une enveloppe de four qui entoure le revêtement de four.
  15. Dispositif selon l'une des revendications précédentes 1 à 10, caractérisé en ce, que le revêtement de four soit de forme cylindrique, et qu'un élément de paroi (1), formant la surface de l'enveloppe du cylindre avec plusieurs tubes en verre de quartz courbés de manière annulaire, comporte un élément de paroi formant la plaque supérieure et un élément de paroi formant la plaque de fond.
  16. Dispositif selon l'une des revendications précédentes 12 ou 15, caractérisé en ce, que la plaque de fond et/ou la plaque supérieure comportent plusieurs cylindres en verre de quartz, reliés entre eux par la matière d'assemblage (5) contenant du SiO2.
EP13702328.9A 2012-02-17 2013-01-12 Dispositif de traitement thermique Not-in-force EP2815195B1 (fr)

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DE102012003030A DE102012003030A1 (de) 2012-02-17 2012-02-17 Vorrichtung zur Wärmebehandlung
PCT/EP2013/000074 WO2013120571A1 (fr) 2012-02-17 2013-01-12 Dispositif de traitement thermique

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DE102015104932B3 (de) 2015-03-31 2016-06-02 Heraeus Noblelight Gmbh Vorrichtung zur Wärmebehandlung
DE102015113766B4 (de) * 2015-08-19 2019-07-04 Heraeus Noblelight Gmbh Strahlermodul sowie Verwendung des Strahlermoduls
DE102015119763A1 (de) 2015-11-16 2017-05-18 Heraeus Quarzglas Gmbh & Co. Kg Infrarotstrahler
WO2022013137A1 (fr) * 2020-07-13 2022-01-20 Heraeus Noblelight Gmbh Émetteur infrarouge à ondes moyennes et son procédé de fabrication

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AT157690B (de) * 1938-02-04 1940-01-10 Siemens Schuckertwerke Wien Induktionsofen zum Schmelzen von Metallen, Legierungen u. dgl.
DE1973753U (de) 1967-08-30 1967-11-30 Berthold Widmaier Fa Elektrisch beheizter kleiner muffelbrennoften fuer emaillierzwecke, beipielsweise zur herstellung von schmuckstuecken u. dgl.
DE2522160A1 (de) 1975-05-17 1976-11-25 Philips Patentverwaltung Sonnenkollektor
DE2934106A1 (de) 1979-08-23 1981-03-26 Karl-Heinrich Prof. Dr.-Ing. 5100 Aachen Hausmann Rohrwaermetauscher und verfahren zu dessen herstellung
JPS5917587U (ja) 1982-04-21 1984-02-02 株式会社デンコー 板状赤外線輻射加熱装置
JPS6451619A (en) 1987-08-21 1989-02-27 Dainippon Screen Mfg Heat treatment equipment for substrate
CN2138260Y (zh) * 1991-06-24 1993-07-14 周永椒 石英红外电子炉
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DE10227566B4 (de) * 2002-06-20 2007-09-27 Dentsply Detrey Gmbh Heizmuffel für einen Brennofen zur Herstellung eines Titan enthaltenden Dentalkeramikerzeugnisses, Verfahren zu seiner Herstellung und Verwendung, sowie Brennofen enthaltend die Heizmuffel
JP2005127628A (ja) 2003-10-24 2005-05-19 Murata Mfg Co Ltd 熱処理炉
US7563512B2 (en) * 2004-08-23 2009-07-21 Heraeus Quarzglas Gmbh & Co. Kg Component with a reflector layer and method for producing the same
DE102004054392A1 (de) * 2004-08-28 2006-03-02 Heraeus Quarzglas Gmbh & Co. Kg Verfahren zum Verbinden von Bauteilen aus hochkieselsäurehaltigem Werkstoff, sowie aus derartigen Bauteilen zusammengefügter Bauteil-Verbund
JP4623416B2 (ja) * 2004-11-12 2011-02-02 国立大学法人長岡技術科学大学 赤外線放射融雪方法及びその装置
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CN104220830B (zh) 2016-06-15
US9976807B2 (en) 2018-05-22
PL2815195T3 (pl) 2016-03-31
EP2815195A1 (fr) 2014-12-24
KR101734630B1 (ko) 2017-05-11
CN104220830A (zh) 2014-12-17
DE102012003030A1 (de) 2013-08-22
KR20140112084A (ko) 2014-09-22
JP6073376B2 (ja) 2017-02-01
WO2013120571A1 (fr) 2013-08-22
JP2015513058A (ja) 2015-04-30
US20150010294A1 (en) 2015-01-08

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