EP2746585A1 - Système à vide - Google Patents

Système à vide Download PDF

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Publication number
EP2746585A1
EP2746585A1 EP13192442.5A EP13192442A EP2746585A1 EP 2746585 A1 EP2746585 A1 EP 2746585A1 EP 13192442 A EP13192442 A EP 13192442A EP 2746585 A1 EP2746585 A1 EP 2746585A1
Authority
EP
European Patent Office
Prior art keywords
vacuum pump
vacuum
recipient
vacuum system
projection
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP13192442.5A
Other languages
German (de)
English (en)
Other versions
EP2746585B1 (fr
Inventor
Tobias Stoll
Michael Schweighöfer
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Pfeiffer Vacuum GmbH
Original Assignee
Pfeiffer Vacuum GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
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Application filed by Pfeiffer Vacuum GmbH filed Critical Pfeiffer Vacuum GmbH
Publication of EP2746585A1 publication Critical patent/EP2746585A1/fr
Application granted granted Critical
Publication of EP2746585B1 publication Critical patent/EP2746585B1/fr
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C25/00—Adaptations of pumps for special use of pumps for elastic fluids
    • F04C25/02—Adaptations of pumps for special use of pumps for elastic fluids for producing high vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
    • F04B37/10—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use
    • F04B37/14—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use to obtain high vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C11/00—Combinations of two or more machines or pumps, each being of rotary-piston or oscillating-piston type; Pumping installations
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C27/00—Sealing arrangements in rotary-piston pumps specially adapted for elastic fluids
    • F04C27/001—Radial sealings for working fluid
    • F04C27/003—Radial sealings for working fluid of resilient material
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C27/00—Sealing arrangements in rotary-piston pumps specially adapted for elastic fluids
    • F04C27/005—Axial sealings for working fluid
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/08—Sealings
    • F04D29/083—Sealings especially adapted for elastic fluid pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/60—Mounting; Assembling; Disassembling
    • F04D29/601—Mounting; Assembling; Disassembling specially adapted for elastic fluid pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05D—INDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
    • F05D2260/00—Function
    • F05D2260/60—Fluid transfer
    • F05D2260/602—Drainage
    • F05D2260/6022—Drainage of leakage having past a seal

Definitions

  • the invention relates to a vacuum system with a vacuum pump and at least one recipient to be evacuated.
  • sealing element for vacuum purposes is known.
  • This sealing element is made of metal, since sealing elements made of an elastomeric material are not heat-resistant and therefore can not be used at high temperatures.
  • elastomer seals are not applicable because these gaskets either outgas and thus "contaminate" the vacuum or the elastomer seals take damage during heating, so that the sealing effect is no longer present.
  • metal seals belonging to the prior art have the disadvantage that they can usually only be used once or at most a few times, since metal does not have the advantage of the elastomer seals, namely the elastic deformability. Therefore, after every major deformation, a new sealing element must be used. Since the metal sealing rings often consist of costly materials (copper, indium, gold or the like), the cost of metal seals is relatively large.
  • UHV flanges are known (ultrahigh vacuum). These flanges have cutting edges and, for example, copper seals. Between two flanges a copper ring is laid. The concentric circumferential cutting edges of the flanges penetrate into the copper and form a metallic seal, which is characterized by an extremely low leakage and permeation rate and high temperature resistance. These flanges are also called Conflat ® (registered trademark of Agilent Technologies Inc. USA) or CF flanges. These flanges also have the disadvantage that they work with cutting edges and metal seals. A repeated use of the metal seals is no longer possible because of the permanent deformation of the same after use. In addition is For reasons of strength, stainless steel is required instead of, for example, aluminum.
  • the technical problem underlying the invention is to enable a weight-, cost- and suction-optimized interface of a vacuum system with a preferably heatable ultra-high vacuum chamber. It is an O-ring seal for a vacuum system can be specified, which consists of an elastomer and still counteract any pollution effects the ultra-high vacuum.
  • the vacuum system according to the invention with a vacuum pump and at least one recipient to be evacuated, which has a housing and at least one outlet opening for evacuating the recipient, wherein the vacuum pump is connected to the outlet opening of the recipient, is characterized in that between the vacuum pump and the housing of the Recipient is arranged as an intermediate approach that the approach is firmly and vacuum-tightly disposed on the housing of the recipient that at the opposite end of the recipient of the neck, the vacuum pump is releasably fixedly arranged on the approach that between the vacuum pump associated end of the approach and the Vacuum pump at least one O-ring is provided for sealing, and that the O-ring seal is formed as an elastomeric O-ring.
  • the inventive construction has the advantage that a low-cost elastomeric O-ring can be used as an O-ring seal, but that no pollution effects Counteract the ultrahigh vacuum through the O-ring seal.
  • the vacuum system according to the invention has the advantage that the seal is displaced by the arrangement of the approach to the housing of the recipient in the direction of the backing vacuum to a higher pressure. If the UHV range is baked out, the O-ring seal is not stressed too much by the axial distance which the insert according to the invention causes between the recipient and the vacuum pump.
  • the approach is advantageous as a tubular approach, for example as a pipe formed.
  • the housing of the vacuum pump is advantageously formed at least partially made of aluminum. This makes the pump lighter as the aluminum housing is lighter than the usual heavy duty stainless steel housings used in CF seals, as known in the art.
  • connection flange of the vacuum pump for the recipient is formed from aluminum. This also already a weight reduction is possible.
  • the formation of aluminum is possible because no CF flanges with metal gasket must be used, but at least one O-ring seal with at least one elastomeric O-ring.
  • the arranged between the housing of the recipient and the vacuum pump approach advantageously has a wall thickness of one to ten millimeters.
  • the neck and the housing are advantageously welded together.
  • the approach advantageously has a flange for connection to the vacuum pump on the side facing the vacuum pump.
  • the at least one O-ring seal is provided.
  • the usual flange connection can be made with the vacuum pump.
  • the flange of the approach is advantageously formed screwed to the flange of the vacuum pump. This is a simple way of connecting. It is also possible to provide brackets or other fastening means for releasably connecting the flanges.
  • At least one O-ring is arranged as a seal. This has the advantage that the O-ring is axially displaced from the housing of the recipient in the direction of the vacuum pump and a heating of the recipient has no negative effects on the elastomer O-ring.
  • the vacuum pump on a pipe piece which is at least partially disposed in the arranged between the housing of the recipient and the vacuum pump approach.
  • this piece of pipe effects a shut-off of outgassing and permeation leaking rates, which may occur when provided with an O-ring seal in a vacuum.
  • a narrow gap between the pipe section of the vacuum pump and the arranged between the recipient and the vacuum pump approach is advantageously provided.
  • an intermediate suction is provided from this narrow gap.
  • the pipe section of the vacuum pump advantageously has at least one opening for the extraction of gases. The number of particles arriving in the UHV range due to outgassing can thus be minimized.
  • a collection groove is advantageously provided for the extraction of gases.
  • the suction openings are advantageously arranged.
  • the tube piece arranged on the vacuum pump can advantageously be formed from aluminum or stainless steel.
  • the vacuum system according to the invention advantageously has a vacuum pump, which is designed as a turbomolecular pump. Particularly preferably, the vacuum system to a pump which is designed as a split-flow pump. Turbomolecular pumps and split-flow pumps are particularly advantageously used in the UHV range.
  • the design according to the invention additionally has the advantage that the pump can be placed closer to the recipient as a whole since the two CF flanges known from practice are saved in the axial length and, moreover, the space for the screw connection can be accommodated in the region of the pump housing , As a result, the space is reduced and the conductance or the effective pumping speed are increased.
  • Another particular advantage of the invention lies in the reusability of the seal.
  • Fig. 1 shows a vacuum pump 1 and a recipient 2.
  • the recipient 2 has a housing 3, which is shown in view on.
  • the housing 3 has an outlet opening 4.
  • the tube 5 is fixedly and vacuum-tightly arranged by means of a welded joint 6 on the housing 3.
  • the tube 5 has a flange 7 which is detachably connected to a flange 8 of the vacuum pump 1. Between the flanges 7, 8, an O-ring seal 9 is arranged.
  • a pipe section 10 is arranged, which is shown in view and which is part of the vacuum pump 1. Between the pipe section 10 and the tube 5, a narrow gap 11 is provided.
  • 10 suction openings 12 are arranged for an intermediate suction in the pipe section.
  • the suction openings 12 are arranged in grooves 14, which are formed as collecting grooves.
  • Fig. 2 shows the vacuum system with the vacuum pump 1 and the recipient 2. The same parts are with the in Fig. 1 provided reference numbers.
  • the housing 3 of the recipient 2 is formed integrally with the tube 5.

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Gasket Seals (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
EP13192442.5A 2012-12-18 2013-11-12 Système à vide Active EP2746585B1 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE102012112492.2A DE102012112492A1 (de) 2012-12-18 2012-12-18 Vakuumsystem

Publications (2)

Publication Number Publication Date
EP2746585A1 true EP2746585A1 (fr) 2014-06-25
EP2746585B1 EP2746585B1 (fr) 2016-05-04

Family

ID=49619802

Family Applications (1)

Application Number Title Priority Date Filing Date
EP13192442.5A Active EP2746585B1 (fr) 2012-12-18 2013-11-12 Système à vide

Country Status (4)

Country Link
US (1) US20140170001A1 (fr)
EP (1) EP2746585B1 (fr)
JP (1) JP5739971B2 (fr)
DE (1) DE102012112492A1 (fr)

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2416808A1 (de) 1974-04-06 1975-10-16 Leybold Heraeus Gmbh & Co Kg Dichtungselement fuer vakuumzwecke
EP0943807A1 (fr) * 1998-03-16 1999-09-22 Alcatel Pompe turbomoléculaire
EP1231383A1 (fr) * 2001-02-01 2002-08-14 Seiko Instruments Inc. Pompe a vide
WO2007042842A1 (fr) * 2005-10-12 2007-04-19 Edwards Limited Configuration de pompage a vide
EP1837521A1 (fr) * 2004-12-20 2007-09-26 BOC Edwards Japan Limited Structure pour relier des parties d'extrémité et système de vide utilisant cette structure
EP2520807A2 (fr) * 2011-05-05 2012-11-07 Pfeiffer Vacuum GmbH Pompe à vide avec rotor

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3982864A (en) * 1975-09-15 1976-09-28 Robinair Manufacturing Corporation Vacuum pump
US4767265A (en) * 1983-10-07 1988-08-30 Sargent-Welch Scientific Co. Turbomolecular pump with improved bearing assembly
EP0603694A1 (fr) * 1992-12-24 1994-06-29 BALZERS-PFEIFFER GmbH Système à vide
US5773841A (en) * 1995-01-13 1998-06-30 High Yield Technology, Inc. Self aligning vacuum seal assembly
JP2003083249A (ja) * 2001-09-17 2003-03-19 Boc Edwards Technologies Ltd 真空ポンプ
DE60304870T2 (de) * 2003-11-18 2006-11-30 Varian S.P.A., Leini Vakuumpumpe mit Schwingungsdämpfer
DE102005019054A1 (de) * 2005-04-23 2006-10-26 Pfeiffer Vacuum Gmbh Schwingungsreduzierendes Bauteil und damit ausgerüstetes Vakuumpumpsystem
DE102005059208A1 (de) * 2005-12-12 2007-06-28 Pfeiffer Vacuum Gmbh Vakuumgehäuse
EP2017480A1 (fr) * 2007-06-15 2009-01-21 VARIAN S.p.A. Joint divisé pour pompes sous vide et procédé d'obtention d'un tel joint
JP5480545B2 (ja) * 2009-07-03 2014-04-23 倉敷化工株式会社 防振継手
IT1399567B1 (it) * 2010-04-16 2013-04-19 Varian Spa Smorzatore di vibrazioni per pompe di vuoto
JP5632992B2 (ja) * 2010-11-22 2014-12-03 日本電子株式会社 ターボ分子ポンプの接続装置

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2416808A1 (de) 1974-04-06 1975-10-16 Leybold Heraeus Gmbh & Co Kg Dichtungselement fuer vakuumzwecke
EP0943807A1 (fr) * 1998-03-16 1999-09-22 Alcatel Pompe turbomoléculaire
EP1231383A1 (fr) * 2001-02-01 2002-08-14 Seiko Instruments Inc. Pompe a vide
EP1837521A1 (fr) * 2004-12-20 2007-09-26 BOC Edwards Japan Limited Structure pour relier des parties d'extrémité et système de vide utilisant cette structure
WO2007042842A1 (fr) * 2005-10-12 2007-04-19 Edwards Limited Configuration de pompage a vide
EP2520807A2 (fr) * 2011-05-05 2012-11-07 Pfeiffer Vacuum GmbH Pompe à vide avec rotor

Also Published As

Publication number Publication date
JP2014118971A (ja) 2014-06-30
US20140170001A1 (en) 2014-06-19
JP5739971B2 (ja) 2015-06-24
DE102012112492A1 (de) 2014-06-18
EP2746585B1 (fr) 2016-05-04

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