EP2746585A1 - Vacuum system - Google Patents

Vacuum system Download PDF

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Publication number
EP2746585A1
EP2746585A1 EP13192442.5A EP13192442A EP2746585A1 EP 2746585 A1 EP2746585 A1 EP 2746585A1 EP 13192442 A EP13192442 A EP 13192442A EP 2746585 A1 EP2746585 A1 EP 2746585A1
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EP
European Patent Office
Prior art keywords
vacuum pump
vacuum
recipient
vacuum system
projection
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Granted
Application number
EP13192442.5A
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German (de)
French (fr)
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EP2746585B1 (en
Inventor
Tobias Stoll
Michael Schweighöfer
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Pfeiffer Vacuum GmbH
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Pfeiffer Vacuum GmbH
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Application filed by Pfeiffer Vacuum GmbH filed Critical Pfeiffer Vacuum GmbH
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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C25/00—Adaptations of pumps for special use of pumps for elastic fluids
    • F04C25/02—Adaptations of pumps for special use of pumps for elastic fluids for producing high vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
    • F04B37/10—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use
    • F04B37/14—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use to obtain high vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C11/00—Combinations of two or more machines or pumps, each being of rotary-piston or oscillating-piston type; Pumping installations
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C27/00—Sealing arrangements in rotary-piston pumps specially adapted for elastic fluids
    • F04C27/001—Radial sealings for working fluid
    • F04C27/003—Radial sealings for working fluid of resilient material
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C27/00—Sealing arrangements in rotary-piston pumps specially adapted for elastic fluids
    • F04C27/005—Axial sealings for working fluid
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/08—Sealings
    • F04D29/083—Sealings especially adapted for elastic fluid pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/60—Mounting; Assembling; Disassembling
    • F04D29/601—Mounting; Assembling; Disassembling specially adapted for elastic fluid pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05D—INDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
    • F05D2260/00—Function
    • F05D2260/60—Fluid transfer
    • F05D2260/602—Drainage
    • F05D2260/6022—Drainage of leakage having past a seal

Definitions

  • the invention relates to a vacuum system with a vacuum pump and at least one recipient to be evacuated.
  • sealing element for vacuum purposes is known.
  • This sealing element is made of metal, since sealing elements made of an elastomeric material are not heat-resistant and therefore can not be used at high temperatures.
  • elastomer seals are not applicable because these gaskets either outgas and thus "contaminate" the vacuum or the elastomer seals take damage during heating, so that the sealing effect is no longer present.
  • metal seals belonging to the prior art have the disadvantage that they can usually only be used once or at most a few times, since metal does not have the advantage of the elastomer seals, namely the elastic deformability. Therefore, after every major deformation, a new sealing element must be used. Since the metal sealing rings often consist of costly materials (copper, indium, gold or the like), the cost of metal seals is relatively large.
  • UHV flanges are known (ultrahigh vacuum). These flanges have cutting edges and, for example, copper seals. Between two flanges a copper ring is laid. The concentric circumferential cutting edges of the flanges penetrate into the copper and form a metallic seal, which is characterized by an extremely low leakage and permeation rate and high temperature resistance. These flanges are also called Conflat ® (registered trademark of Agilent Technologies Inc. USA) or CF flanges. These flanges also have the disadvantage that they work with cutting edges and metal seals. A repeated use of the metal seals is no longer possible because of the permanent deformation of the same after use. In addition is For reasons of strength, stainless steel is required instead of, for example, aluminum.
  • the technical problem underlying the invention is to enable a weight-, cost- and suction-optimized interface of a vacuum system with a preferably heatable ultra-high vacuum chamber. It is an O-ring seal for a vacuum system can be specified, which consists of an elastomer and still counteract any pollution effects the ultra-high vacuum.
  • the vacuum system according to the invention with a vacuum pump and at least one recipient to be evacuated, which has a housing and at least one outlet opening for evacuating the recipient, wherein the vacuum pump is connected to the outlet opening of the recipient, is characterized in that between the vacuum pump and the housing of the Recipient is arranged as an intermediate approach that the approach is firmly and vacuum-tightly disposed on the housing of the recipient that at the opposite end of the recipient of the neck, the vacuum pump is releasably fixedly arranged on the approach that between the vacuum pump associated end of the approach and the Vacuum pump at least one O-ring is provided for sealing, and that the O-ring seal is formed as an elastomeric O-ring.
  • the inventive construction has the advantage that a low-cost elastomeric O-ring can be used as an O-ring seal, but that no pollution effects Counteract the ultrahigh vacuum through the O-ring seal.
  • the vacuum system according to the invention has the advantage that the seal is displaced by the arrangement of the approach to the housing of the recipient in the direction of the backing vacuum to a higher pressure. If the UHV range is baked out, the O-ring seal is not stressed too much by the axial distance which the insert according to the invention causes between the recipient and the vacuum pump.
  • the approach is advantageous as a tubular approach, for example as a pipe formed.
  • the housing of the vacuum pump is advantageously formed at least partially made of aluminum. This makes the pump lighter as the aluminum housing is lighter than the usual heavy duty stainless steel housings used in CF seals, as known in the art.
  • connection flange of the vacuum pump for the recipient is formed from aluminum. This also already a weight reduction is possible.
  • the formation of aluminum is possible because no CF flanges with metal gasket must be used, but at least one O-ring seal with at least one elastomeric O-ring.
  • the arranged between the housing of the recipient and the vacuum pump approach advantageously has a wall thickness of one to ten millimeters.
  • the neck and the housing are advantageously welded together.
  • the approach advantageously has a flange for connection to the vacuum pump on the side facing the vacuum pump.
  • the at least one O-ring seal is provided.
  • the usual flange connection can be made with the vacuum pump.
  • the flange of the approach is advantageously formed screwed to the flange of the vacuum pump. This is a simple way of connecting. It is also possible to provide brackets or other fastening means for releasably connecting the flanges.
  • At least one O-ring is arranged as a seal. This has the advantage that the O-ring is axially displaced from the housing of the recipient in the direction of the vacuum pump and a heating of the recipient has no negative effects on the elastomer O-ring.
  • the vacuum pump on a pipe piece which is at least partially disposed in the arranged between the housing of the recipient and the vacuum pump approach.
  • this piece of pipe effects a shut-off of outgassing and permeation leaking rates, which may occur when provided with an O-ring seal in a vacuum.
  • a narrow gap between the pipe section of the vacuum pump and the arranged between the recipient and the vacuum pump approach is advantageously provided.
  • an intermediate suction is provided from this narrow gap.
  • the pipe section of the vacuum pump advantageously has at least one opening for the extraction of gases. The number of particles arriving in the UHV range due to outgassing can thus be minimized.
  • a collection groove is advantageously provided for the extraction of gases.
  • the suction openings are advantageously arranged.
  • the tube piece arranged on the vacuum pump can advantageously be formed from aluminum or stainless steel.
  • the vacuum system according to the invention advantageously has a vacuum pump, which is designed as a turbomolecular pump. Particularly preferably, the vacuum system to a pump which is designed as a split-flow pump. Turbomolecular pumps and split-flow pumps are particularly advantageously used in the UHV range.
  • the design according to the invention additionally has the advantage that the pump can be placed closer to the recipient as a whole since the two CF flanges known from practice are saved in the axial length and, moreover, the space for the screw connection can be accommodated in the region of the pump housing , As a result, the space is reduced and the conductance or the effective pumping speed are increased.
  • Another particular advantage of the invention lies in the reusability of the seal.
  • Fig. 1 shows a vacuum pump 1 and a recipient 2.
  • the recipient 2 has a housing 3, which is shown in view on.
  • the housing 3 has an outlet opening 4.
  • the tube 5 is fixedly and vacuum-tightly arranged by means of a welded joint 6 on the housing 3.
  • the tube 5 has a flange 7 which is detachably connected to a flange 8 of the vacuum pump 1. Between the flanges 7, 8, an O-ring seal 9 is arranged.
  • a pipe section 10 is arranged, which is shown in view and which is part of the vacuum pump 1. Between the pipe section 10 and the tube 5, a narrow gap 11 is provided.
  • 10 suction openings 12 are arranged for an intermediate suction in the pipe section.
  • the suction openings 12 are arranged in grooves 14, which are formed as collecting grooves.
  • Fig. 2 shows the vacuum system with the vacuum pump 1 and the recipient 2. The same parts are with the in Fig. 1 provided reference numbers.
  • the housing 3 of the recipient 2 is formed integrally with the tube 5.

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Gasket Seals (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)

Abstract

The system has vacuum pump (1) that is connected with outlet opening of recipient (2) for evacuating same. An attachment (5) provided between vacuum pump and recipient housing (3) is formed as an intermediate piece. The attachment is vacuum-tightly secured on the recipient, and the vacuum pump is releasably secured to the attachment at an end of the attachment opposite the recipient. An elastomeric O-ring sealing element (9) is provided between end of attachment opposite recipient and vacuum pump, for sealing the vacuum pump.

Description

Die Erfindung betrifft ein Vakuumsystem mit einer Vakuumpumpe und wenigstens einem zu evakuierenden Rezipienten.The invention relates to a vacuum system with a vacuum pump and at least one recipient to be evacuated.

Aus dem Stand der Technik ( DE 24 16 808 A1 ) ist ein Dichtungselement für Vakuumzwecke bekannt. Dieses Dichtungselement besteht aus Metall, da Dichtungselemente, die aus einem elastomeren Material bestehen, nicht hitzebeständig sind und deshalb bei hohen Temperaturen nicht einsetzbar sind. Insbesondere, wenn der Rezipient ausgeheizt wird, sind Elastomerdichtungen nicht einsetzbar, da diese Dichtungen entweder ausgasen und damit das Vakuum "verunreinigen" oder die Elastomerdichtungen nehmen beim Ausheizen Schaden, so dass die Dichtwirkung nicht mehr gegeben ist.From the prior art ( DE 24 16 808 A1 ) a sealing element for vacuum purposes is known. This sealing element is made of metal, since sealing elements made of an elastomeric material are not heat-resistant and therefore can not be used at high temperatures. In particular, when the recipient is baked out, elastomer seals are not applicable because these gaskets either outgas and thus "contaminate" the vacuum or the elastomer seals take damage during heating, so that the sealing effect is no longer present.

Die zum Stand der Technik gehörenden Metalldichtungen weisen den Nachteil auf, dass sie in der Regel nur einmal oder allenfalls einige Male verwendet werden können, da Metall den Vorteil der Elastomerdichtungen, nämlich den der elastischen Verformbarkeit, nicht aufweist. Nach jeder stärkeren Verformung muss deshalb ein neues Dichtungselement verwendet werden. Da die Metalldichtringe häufig aus kostspieligen Materialien (Kupfer, Indium, Gold oder dergleichen) bestehen, ist der Aufwand für Metalldichtungen relativ groß.The metal seals belonging to the prior art have the disadvantage that they can usually only be used once or at most a few times, since metal does not have the advantage of the elastomer seals, namely the elastic deformability. Therefore, after every major deformation, a new sealing element must be used. Since the metal sealing rings often consist of costly materials (copper, indium, gold or the like), the cost of metal seals is relatively large.

Gemäß dem Stand der Technik ( DE 24 16 808 A1 ) ist deshalb vorgeschlagen, einen Dichtring aus Metall auszubilden und den Zentrierring als Federring mit einem Radialspalt. Auch diese Ausführungsform ist sehr aufwändig und damit sehr kostspielig.According to the prior art ( DE 24 16 808 A1 ) is therefore proposed to form a sealing ring made of metal and the centering ring as a spring ring with a radial gap. This embodiment is very complex and therefore very expensive.

Aus der Praxis sind UHV-Flansche bekannt (Ultrahochvakuum). Diese Flansche weisen Schneidkanten und beispielsweise Kupferdichtungen auf. Zwischen zwei Flanschen wird ein Kupferring gelegt. Die konzentrisch umlaufenden Schneidkanten der Flansche dringen in das Kupfer ein und bilden eine metallische Abdichtung, die sich durch eine extrem niedrige Leck- und Permeationsrate sowie eine hohe Temperaturbeständigkeit auszeichnet. Diese Flansche werden auch Conflat®-Flansche (eingetragene Marke der Agilent Technologies Inc. USA) oder CF-Flansche genannt. Auch diese Flansche weisen den Nachteil auf, dass sie mit Schneidkanten und Metalldichtungen arbeiten. Ein mehrmaliger Einsatz der Metalldichtungen ist wegen der dauerhaften Verformung derselben nach einem Einsatz nicht mehr möglich. Zudem ist aus Festigkeitsgründen Edelstahl anstelle von zum Beispiel Aluminium erforderlich.From practice, UHV flanges are known (ultrahigh vacuum). These flanges have cutting edges and, for example, copper seals. Between two flanges a copper ring is laid. The concentric circumferential cutting edges of the flanges penetrate into the copper and form a metallic seal, which is characterized by an extremely low leakage and permeation rate and high temperature resistance. These flanges are also called Conflat ® (registered trademark of Agilent Technologies Inc. USA) or CF flanges. These flanges also have the disadvantage that they work with cutting edges and metal seals. A repeated use of the metal seals is no longer possible because of the permanent deformation of the same after use. In addition is For reasons of strength, stainless steel is required instead of, for example, aluminum.

Das der Erfindung zugrunde liegende technische Problem besteht darin, eine gewichts-, kosten- und saugvermögensoptimierte Schnittstelle eines Vakuumsystems mit einer vorzugsweise aufheizbaren Ultrahochvakuumkammer zu ermöglichen. Es soll eine O-Ring-Abdichtung für ein Vakuumsystem angegeben werden, die aus einem Elastomer besteht und bei der trotzdem keine Verschmutzungseffekte dem Ultrahochvakuum entgegenwirken.The technical problem underlying the invention is to enable a weight-, cost- and suction-optimized interface of a vacuum system with a preferably heatable ultra-high vacuum chamber. It is an O-ring seal for a vacuum system can be specified, which consists of an elastomer and still counteract any pollution effects the ultra-high vacuum.

Dieses technische Problem wird durch ein Vakuumsystem mit den Merkmalen gemäß Anspruch 1 gelöst.This technical problem is solved by a vacuum system with the features according to claim 1.

Das erfindungsgemäße Vakuumsystem mit einer Vakuumpumpe und wenigstens einem zu evakuierenden Rezipienten, der ein Gehäuse und mindestens eine Auslassöffnung zur Evakuierung des Rezipienten aufweist, wobei die Vakuumpumpe mit der Auslassöffnung des Rezipienten verbunden ist, zeichnet sich dadurch aus, dass zwischen der Vakuumpumpe und dem Gehäuse des Rezipienten ein Ansatz als zwischenstück angeordnet ist, dass der Ansatz fest und vakuumdicht an dem Gehäuse des Rezipienten angeordnet ist, dass an dem dem Rezipienten gegenüberliegenden Ende des Ansatzes die Vakuumpumpe lösbar fest an dem Ansatz angeordnet ist, dass zwischen dem der Vakuumpumpe zugeordnetem Ansatzende und der Vakuumpumpe wenigstens ein O-Ring zur Abdichtung vorgesehen ist, und dass die O-Ring-Dichtung als Elastomer-O-Ring ausgebildet ist.The vacuum system according to the invention with a vacuum pump and at least one recipient to be evacuated, which has a housing and at least one outlet opening for evacuating the recipient, wherein the vacuum pump is connected to the outlet opening of the recipient, is characterized in that between the vacuum pump and the housing of the Recipient is arranged as an intermediate approach that the approach is firmly and vacuum-tightly disposed on the housing of the recipient that at the opposite end of the recipient of the neck, the vacuum pump is releasably fixedly arranged on the approach that between the vacuum pump associated end of the approach and the Vacuum pump at least one O-ring is provided for sealing, and that the O-ring seal is formed as an elastomeric O-ring.

Die erfindungsgemäße Ausbildung weist den Vorteil auf, dass ein preiswerter Elastomer-O-Ring als O-Ring-Abdichtung eingesetzt werden kann, dass jedoch keine Verschmutzungseffekte durch die O-Ring-Abdichtung dem Ultrahochvakuum entgegenwirken.The inventive construction has the advantage that a low-cost elastomeric O-ring can be used as an O-ring seal, but that no pollution effects Counteract the ultrahigh vacuum through the O-ring seal.

Das erfindungsgemäße Vakuumsystem weist den Vorteil auf, dass die Dichtung durch die Anordnung des Ansatzes an dem Gehäuse des Rezipienten in Richtung des Vorvakuums zu einem höheren Druck hin verlagert wird. Wird der UHV-Bereich ausgeheizt, so wird die O-Ring-Dichtung durch den axialen Abstand, den der erfindungsgemäße Einsatz des Ansatzes zwischen Rezipient und Vakuumpumpe bewirkt, nicht zu stark beansprucht.The vacuum system according to the invention has the advantage that the seal is displaced by the arrangement of the approach to the housing of the recipient in the direction of the backing vacuum to a higher pressure. If the UHV range is baked out, the O-ring seal is not stressed too much by the axial distance which the insert according to the invention causes between the recipient and the vacuum pump.

Hierzu ist es besonders vorteilhaft, den Ansatz aus Edelstahl oder Aluminium oder einem anderen Material, welches vorteilhaft einen geringeren Wärmeleitwert aufweist, auszubilden, damit der Ansatz die Wärme nicht auf die O-Ring-Dichtung überträgt.For this purpose, it is particularly advantageous to form the approach of stainless steel or aluminum or other material, which advantageously has a lower heat conductivity, form, so that the approach does not transfer the heat to the O-ring seal.

Vorteilhaft ist der Ansatz als rohrförmiger Ansatz, beispielsweise als Rohr, ausgebildet.The approach is advantageous as a tubular approach, for example as a pipe formed.

Auch das Gehäuse der Vakuumpumpe ist vorteilhaft wenigstens teilweise aus Aluminium gebildet. Hierdurch wird die Pumpe leichter, da das Aluminiumgehäuse leichter ist als die üblichen schweren Edelstahlgehäuse, die bei CF-Dichtungen, wie aus der Praxis bekannt, verwendet werden.Also, the housing of the vacuum pump is advantageously formed at least partially made of aluminum. This makes the pump lighter as the aluminum housing is lighter than the usual heavy duty stainless steel housings used in CF seals, as known in the art.

Gemäß einer weiteren vorteilhaften Ausführungsform der Erfindung ist wenigstens der Anschlussflansch der Vakuumpumpe für den Rezipienten aus Aluminium gebildet. Auch hierdurch ist schon eine Gewichtsreduzierung möglich. Die Ausbildung aus Aluminium ist möglich, da keine CF-Flansche mit Metalldichtung verwendet werden müssen, sondern wenigstens eine O-Ring-Dichtung mit wenigstens einem Elastomer-O-Ring.According to a further advantageous embodiment of the invention, at least the connection flange of the vacuum pump for the recipient is formed from aluminum. This also already a weight reduction is possible. The formation of aluminum is possible because no CF flanges with metal gasket must be used, but at least one O-ring seal with at least one elastomeric O-ring.

Der zwischen dem Gehäuse des Rezipienten und der Vakuumpumpe angeordnete Ansatz weist vorteilhaft eine Wandstärke von einem bis zehn Millimeter auf.The arranged between the housing of the recipient and the vacuum pump approach advantageously has a wall thickness of one to ten millimeters.

Um eine luftdichte und feste Verbindung zwischen dem Ansatz und dem Gehäuse des Rezipienten zu erreichen, werden der Ansatz und das Gehäuse vorteilhaft miteinander verschweißt. Es ist jedoch auch möglich, andere vakuumdichte Verbindungen zwischen Ansatz und Gehäuse vorzusehen.In order to achieve an airtight and firm connection between the neck and the housing of the recipient, the neck and the housing are advantageously welded together. However, it is also possible to provide other vacuum-tight connections between the neck and the housing.

Gemäß einer weiteren vorteilhaften Ausgestaltung der Erfindung ist es auch möglich, den Ansatz und das Gehäuse des Rezipienten einstückig auszubilden.According to a further advantageous embodiment of the invention, it is also possible to form the neck and the housing of the recipient in one piece.

Der Ansatz weist an der der Vakuumpumpe zugewandten Seite vorteilhaft einen Flansch zur Verbindung mit der Vakuumpumpe auf. In diesem Bereich ist die wenigstens eine O-Ring-Dichtung vorgesehen. Hier kann die übliche Flanschverbindung mit der Vakuumpumpe hergestellt werden.The approach advantageously has a flange for connection to the vacuum pump on the side facing the vacuum pump. In this area, the at least one O-ring seal is provided. Here, the usual flange connection can be made with the vacuum pump.

Der Flansch des Ansatzes ist mit dem Flansch der Vakuumpumpe vorteilhaft verschraubbar ausgebildet. Dieses ist eine einfache Art der Verbindung. Es ist auch möglich, Klammern oder andere Befestigungsmittel zur lösbaren Verbindung der Flansche vorzusehen.The flange of the approach is advantageously formed screwed to the flange of the vacuum pump. This is a simple way of connecting. It is also possible to provide brackets or other fastening means for releasably connecting the flanges.

Zwischen den Flanschen des Ansatzes und der Vakuumpumpe ist vorteilhaft wenigstens ein O-Ring als Dichtung angeordnet. Dies hat den Vorteil, dass der O-Ring axial von dem Gehäuse des Rezipienten in Richtung der Vakuumpumpe verschoben ist und ein Ausheizen des Rezipienten keine negativen Auswirkungen auf den Elastomer-O-Ring aufweist.Between the flanges of the neck and the vacuum pump advantageously at least one O-ring is arranged as a seal. This has the advantage that the O-ring is axially displaced from the housing of the recipient in the direction of the vacuum pump and a heating of the recipient has no negative effects on the elastomer O-ring.

Gemäß einer vorteilhaften Ausführungsform der Erfindung weist die Vakuumpumpe ein Rohrstück auf, welches wenigstens teilweise in dem zwischen dem Gehäuse des Rezipienten und der Vakuumpumpe angeordneten Ansatz angeordnet ist. Dieses Rohrstück bewirkt zusätzlich eine Absperrung von Ausgasungen und Permeationsleckraten, die bei Vorsehen bei einer O-Ring-Dichtung im Vakuum auftreten können.According to an advantageous embodiment of the invention, the vacuum pump on a pipe piece, which is at least partially disposed in the arranged between the housing of the recipient and the vacuum pump approach. In addition, this piece of pipe effects a shut-off of outgassing and permeation leaking rates, which may occur when provided with an O-ring seal in a vacuum.

Durch das höhere Druckniveau im Bereich der O-Ring-Dichtung ist darüber hinaus der Vorteil vorhanden, dass die O-Ring-Dichtung deutlich weniger oder überhaupt nicht ausgast.Due to the higher pressure level in the area of the O-ring seal, there is also the advantage that the O-ring seal significantly less or not at all outgassing.

Hierzu ist vorteilhaft ein enger Spalt zwischen dem Rohrstück der Vakuumpumpe und dem zwischen dem Rezipienten und der Vakuumpumpe angeordneten Ansatz vorgesehen. Gemäß einer besonders vorteilhaften Ausführungsform der Erfindung ist eine Zwischenabsaugung aus diesem engen Spalt vorgesehen. Hierzu weist das Rohrstück der Vakuumpumpe vorteilhaft wenigstens eine Öffnung für die Absaugung von Gasen auf. Die Anzahl der im UHV-Bereich ankommenden Teilchen aufgrund der Ausgasungen kann so minimiert werden.For this purpose, a narrow gap between the pipe section of the vacuum pump and the arranged between the recipient and the vacuum pump approach is advantageously provided. According to a particularly advantageous embodiment of the invention, an intermediate suction is provided from this narrow gap. For this purpose, the pipe section of the vacuum pump advantageously has at least one opening for the extraction of gases. The number of particles arriving in the UHV range due to outgassing can thus be minimized.

Vorteilhaft ist darüber hinaus eine Sammelnut zur Absaugung von Gasen vorgesehen. In dieser Sammelnut sind vorteilhaft die Absaugöffnungen angeordnet.In addition, a collection groove is advantageously provided for the extraction of gases. In this collecting groove, the suction openings are advantageously arranged.

Das an der Vakuumpumpe angeordnete Rohrstück kann vorteilhaft aus Aluminium oder Edelstahl gebildet sein. Das erfindungsgemäße Vakuumsystem weist vorteilhaft eine Vakuumpumpe auf, die als Turbomolekularpumpe ausgebildet ist. Besonders bevorzugt weist das Vakuumsystem eine Pumpe auf, die als Splitflow-Pumpe ausgebildet ist. Turbomolekularpumpen und Splitflow-Pumpen werden besonders vorteilhaft im UHV-Bereich eingesetzt.The tube piece arranged on the vacuum pump can advantageously be formed from aluminum or stainless steel. The vacuum system according to the invention advantageously has a vacuum pump, which is designed as a turbomolecular pump. Particularly preferably, the vacuum system to a pump which is designed as a split-flow pump. Turbomolecular pumps and split-flow pumps are particularly advantageously used in the UHV range.

Die erfindungsgemäße Bauform weist zusätzlich den Vorteil auf, dass die Pumpe insgesamt näher am Rezipienten platziert werden kann, da die beiden aus der Praxis bekannten CF-Flansche in axialer Baulänge eingespart werden und darüber hinaus der Platz für die Schraubenverbindung im Bereich des Pumpengehäuses untergebracht werden kann. Hierdurch wird der Bauraum verkleinert und der Leitwert beziehungsweise das effektive Saugvermögen werden erhöht. Ein weiterer besonderer Vorteil der Erfindung liegt in der Wiederverwendbarkeit der Dichtung.The design according to the invention additionally has the advantage that the pump can be placed closer to the recipient as a whole since the two CF flanges known from practice are saved in the axial length and, moreover, the space for the screw connection can be accommodated in the region of the pump housing , As a result, the space is reduced and the conductance or the effective pumping speed are increased. Another particular advantage of the invention lies in the reusability of the seal.

Weitere Merkmale und Vorteile der Erfindung ergeben sich anhand der zugehörigen Zeichnung, in der ein Ausführungsbeispiel eines erfindungsgemäßen Vakuumssystems nur beispielhaft dargestellt ist. In der Zeichnung zeigen:

Fig. 1
ein Vakuumsystem mit Vakuumpumpe und Rezipienten teilweise geschnitten;
Fig. 2
ein geändertes Ausführungsbeispiel.
Further features and advantages of the invention will become apparent from the accompanying drawings, in which an embodiment of a vacuum system according to the invention is shown only by way of example. In the drawing show:
Fig. 1
a vacuum system with vacuum pump and recipient partially cut;
Fig. 2
a modified embodiment.

Fig. 1 zeigt eine Vakuumpumpe 1 sowie einen Rezipienten 2. Der Rezipient 2 weist ein Gehäuse 3, welches in Ansicht dargestellt ist, auf. Das Gehäuse 3 weist eine Auslassöffnung 4 auf. An dem Gehäuse 3 des Rezipienten 2 ist ein die Auslassöffnung 4 überdeckendes Rohr 5 angeordnet. Das Rohr 5 ist mittels einer Schweißverbindung 6 an dem Gehäuse 3 fest und vakuumdicht angeordnet. Das Rohr 5 weist einen Flansch 7 auf, der mit einem Flansch 8 der Vakuumpumpe 1 lösbar verbunden ist. Zwischen den Flanschen 7, 8 ist eine O-Ring-Dichtung 9 angeordnet. Fig. 1 shows a vacuum pump 1 and a recipient 2. The recipient 2 has a housing 3, which is shown in view on. The housing 3 has an outlet opening 4. On the housing 3 of the recipient 2, a the outlet opening 4 overlapping tube 5 is arranged. The tube 5 is fixedly and vacuum-tightly arranged by means of a welded joint 6 on the housing 3. The tube 5 has a flange 7 which is detachably connected to a flange 8 of the vacuum pump 1. Between the flanges 7, 8, an O-ring seal 9 is arranged.

Durch das Rohr 5 erfolgt eine axiale Verschiebung der O-Ring-Dichtung 9 in Richtung des Vorvakuums zu einem höheren Druck hin. In dem Rohr 5 ist ein Rohrstück 10 angeordnet, welches in Ansicht dargestellt ist und welches Bestandteil der Vakuumpumpe 1 ist. Zwischen dem Rohrstück 10 und dem Rohr 5 ist ein enger Spalt 11 vorgesehen. Darüber hinaus sind in dem Rohrstück 10 Absaugöffnungen 12 für eine Zwischenabsaugung angeordnet. Die Absaugöffnungen 12 sind in Nuten 14, die als Sammelnuten ausgebildet sind, angeordnet. Hierdurch werden Ausgasungen und Permeationsleckraten, die bei einer O-Ring-Dichtung 9 im Vakuum auftreten können, vom UHV (Ultrahochvakuum) des Rezepienten 2 abgesperrt. Durch die Absaugöffnungen 12 werden austretende Teilchen in den Turbobereich der Turbomolekularpumpe 1 abgesaugt. Die Anzahl der im UHV-Bereich ankommenden Teilchen wird so minimiert.Through the tube 5, an axial displacement of the O-ring seal 9 takes place in the direction of the backing vacuum to a higher pressure. In the tube 5, a pipe section 10 is arranged, which is shown in view and which is part of the vacuum pump 1. Between the pipe section 10 and the tube 5, a narrow gap 11 is provided. In addition, 10 suction openings 12 are arranged for an intermediate suction in the pipe section. The suction openings 12 are arranged in grooves 14, which are formed as collecting grooves. As a result, outgassing and Permeationsleckraten, which may occur in an O-ring seal 9 in vacuum, shut off by the UHV (ultra-high vacuum) of the recipient 2. Exiting particles are sucked through the suction openings 12 into the turbo zone of the turbomolecular pump 1. The number of particles arriving in the UHV range is thus minimized.

Fig. 2 zeigt das Vakuumsystem mit der Vakuumpumpe 1 und dem Rezipienten 2. Gleiche Teile sind mit den in Fig. 1 verwendeten Bezugszahlen versehen. Fig. 2 shows the vacuum system with the vacuum pump 1 and the recipient 2. The same parts are with the in Fig. 1 provided reference numbers.

Das Gehäuse 3 des Rezipienten 2 ist einstückig mit dem Rohr 5 ausgebildet.The housing 3 of the recipient 2 is formed integrally with the tube 5.

Bezugszahlenreference numerals

11
Vakuumpumpevacuum pump
22
Rezipientrecipient
33
Gehäuse des RezipientenCase of the recipient
44
Auslassöffnungoutlet
55
Rohrpipe
66
Schweißverbindungwelded joint
77
Flansch des RohresFlange of the pipe
88th
Flansch der VakuumpumpeFlange of the vacuum pump
99
O-Ring-DichtungO-ring seal
1010
Rohrstückpipe section
1111
Spaltgap
1212
Absaugöffnungensuction
1414
Sammelnutcollecting groove

Claims (17)

Vakuumsystem mit einer Vakuumpumpe und wenigstens einem zu evakuierenden Rezipienten, der ein Gehäuse und wenigstens eine Auslassöffnung zur Evakuierung des Rezipienten aufweist, wobei die Vakuumpumpe mit der Auslassöffnung des Rezipienten verbunden ist,
dadurch gekennzeichnet, dass zwischen der Vakuumpumpe (1) und dem Gehäuse (3) des Rezipienten (2) ein Ansatz (5) als Zwischenstück angeordnet ist, dass der Ansatz (5) fest und vakuumdicht an dem Gehäuse (3) des Rezipienten (2) angeordnet ist, dass an dem dem Rezipienten (2) gegenüberliegenden Ende des Ansatzes (5) die Vakuumpumpe (1) lösbar fest an dem Ansatz (5) angeordnet ist, dass zwischen einem der Vakuumpumpe (1) zugeordneten Ansatzende und der Vakuumpumpe (1) wenigstens ein O-Ring (9) zur Abdichtung vorgesehen ist, und dass die O-Ring-Dichtung (9) als Elastomer-O-Ring ausgebildet ist.Vacuum system with a vacuum pump and at least one recipient to be evacuated, which has a housing and at least one outlet opening for evacuating the recipient, the vacuum pump being connected to the outlet opening of the recipient,
characterized in that between the vacuum pump (1) and the housing (3) of the recipient (2) a projection (5) is arranged as an intermediate piece, that the projection (5) fixed and vacuum-tight to the housing (3) of the recipient (2 ) is arranged at the opposite end of the neck (5) of the recipient (5), the vacuum pump (1) releasably fixed to the approach (5) is arranged between one of the vacuum pump (1) associated end of the approach and the vacuum pump (1 ) is provided for sealing at least one O-ring (9), and that the O-ring seal (9) is formed as an elastomeric O-ring. Vakuumsystem nach Anspruch 1, dadurch gekennzeichnet, dass der Ansatz (5) als rohrförmiger Ansatz oder als Rohr ausgebildet ist.Vacuum system according to claim 1, characterized in that the projection (5) is designed as a tubular projection or as a tube. Vakuumsystem nach Anspruch 1 oder 2, dadurch gekennzeichnet, dass der Ansatz (5) aus Edelstahl oder Aluminium gebildet ist.Vacuum system according to claim 1 or 2, characterized in that the projection (5) is made of stainless steel or aluminum. Vakuumsystem nach einem der Ansprüche 1 bis 3, dadurch gekennzeichnet, dass das Gehäuse der Vakuumpumpe (1) wenigstens teilweise aus Aluminium gebildet ist.Vacuum system according to one of claims 1 to 3, characterized in that the housing of the vacuum pump (1) is at least partially formed from aluminum. Vakuumsystem nach Anspruch 4, dadurch gekennzeichnet, dass wenigstens ein Anschlussflansch der Vakuumpumpe (1) für den Rezipienten (2) aus Aluminium gebildet ist.Vacuum system according to claim 4, characterized in that at least one connecting flange of the vacuum pump (1) for the recipient (2) is formed of aluminum. Vakuumsystem nach Anspruch 3, dadurch gekennzeichnet, dass der Ansatz (5) eine Wandstärke von ein bis zehn Millimeter aufweist.Vacuum system according to claim 3, characterized in that the projection (5) has a wall thickness of one to ten millimeters. Vakuumsystem nach einem der vorhergehenden Ansprüche, dadurch gekennzeichnet, dass der Ansatz (5) mit dem Gehäuse (3) des Rezipienten (2) verschweißt ist.Vacuum system according to one of the preceding claims, characterized in that the projection (5) with the housing (3) of the recipient (2) is welded. Vakuumsystem nach einem der Ansprüche 1 bis 6, dadurch gekennzeichnet, dass der Ansatz (5) einstückig mit dem Gehäuse (3) des Rezipienten (2) ausgebildet ist.Vacuum system according to one of claims 1 to 6, characterized in that the projection (5) is formed integrally with the housing (3) of the recipient (2). Vakuumsystem nach einem der vorhergehenden Ansprüche, dadurch gekennzeichnet, dass der Ansatz (5) an der der Vakuumpumpe (1) zugewandten Seite einen Flansch (7) zur Verbindung mit der Vakuumpumpe (1) aufweist.Vacuum system according to one of the preceding claims, characterized in that the projection (5) on the vacuum pump (1) side facing a flange (7) for connection to the vacuum pump (1). Vakuumsystem nach Anspruch 9, dadurch gekennzeichnet, dass der Flansch (7) des Ansatzes (5) mit dem Flansch (8) der Vakuumpumpe (1) verschraubbar ausgebildet ist.Vacuum system according to claim 9, characterized in that the flange (7) of the projection (5) with the flange (8) of the vacuum pump (1) is screwed. Vakuumsystem nach Anspruch 10, dadurch gekennzeichnet, dass zwischen den Flanschen (7, 8) des Ansatzes (5) und der Vakuumpumpe (1) der wenigstens eine O-Ring als Dichtung angeordnet ist.Vacuum system according to claim 10, characterized in that between the flanges (7, 8) of the projection (5) and the vacuum pump (1), the at least one O-ring is arranged as a seal. Vakuumsystem nach einem der vorhergehenden Ansprüche, dadurch gekennzeichnet, dass ein Rohrstück (10) der Vakuumpumpe (1) wenigstens teilweise in dem an dem Gehäuse (3) des Rezipienten (2) angeordneten Ansatz (5) angeordnet ist.Vacuum system according to one of the preceding claims, characterized in that a pipe section (10) of the vacuum pump (1) at least partially in the on the housing (3) of the recipient (2) arranged projection (5) is arranged. Vakuumsystem nach Anspruch 12, dadurch gekennzeichnet, dass das Rohrstück (10) der Vakuumpumpe (1) wenigstens eine Öffnung (12) für eine Absaugung von Gasen aufweist.Vacuum system according to claim 12, characterized in that the pipe section (10) of the vacuum pump (1) at least has an opening (12) for a suction of gases. Vakuumsystem nach Anspruch 13, dadurch gekennzeichnet, dass das Rohrstück (10) der Vakuumpumpe (1) wenigstens eine Sammelnut (14) aufweist und dass die wenigstens eine Öffnung (12) für die Absaugung von Gasen in der wenigstens einen Sammelnut (14) angeordnet ist.Vacuum system according to claim 13, characterized in that the pipe section (10) of the vacuum pump (1) has at least one collecting groove (14) and that the at least one opening (12) for the suction of gases in the at least one collecting groove (14) is arranged , Vakuumsystem nach Anspruch 12, dadurch gekennzeichnet, dass das Rohrstück (10) aus Aluminium oder Edelstahl gebildet ist.Vacuum system according to claim 12, characterized in that the pipe section (10) is formed of aluminum or stainless steel. Vakuumsystem nach einem der vorhergehenden Ansprüche, dadurch gekennzeichnet, dass die Vakuumpumpe (1) als Turbomolekularpumpe ausgebildet ist.Vacuum system according to any one of the preceding claims, characterized in that the vacuum pump (1) is designed as a turbomolecular pump. Vakuumsystem nach einem der vorhergehenden Ansprüche, dadurch gekennzeichnet, dass die Vakuumpumpe (1) als Splitflow-Pumpe ausgebildet ist.Vacuum system according to one of the preceding claims, characterized in that the vacuum pump (1) is designed as a split-flow pump.
EP13192442.5A 2012-12-18 2013-11-12 Vacuum system Active EP2746585B1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE102012112492.2A DE102012112492A1 (en) 2012-12-18 2012-12-18 vacuum system

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EP2746585A1 true EP2746585A1 (en) 2014-06-25
EP2746585B1 EP2746585B1 (en) 2016-05-04

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ID=49619802

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US (1) US20140170001A1 (en)
EP (1) EP2746585B1 (en)
JP (1) JP5739971B2 (en)
DE (1) DE102012112492A1 (en)

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EP1231383A1 (en) * 2001-02-01 2002-08-14 Seiko Instruments Inc. Vacuum pump
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Also Published As

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JP2014118971A (en) 2014-06-30
EP2746585B1 (en) 2016-05-04
JP5739971B2 (en) 2015-06-24
DE102012112492A1 (en) 2014-06-18
US20140170001A1 (en) 2014-06-19

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