EP0943807A1 - Turbomolecular pump - Google Patents
Turbomolecular pump Download PDFInfo
- Publication number
- EP0943807A1 EP0943807A1 EP99400484A EP99400484A EP0943807A1 EP 0943807 A1 EP0943807 A1 EP 0943807A1 EP 99400484 A EP99400484 A EP 99400484A EP 99400484 A EP99400484 A EP 99400484A EP 0943807 A1 EP0943807 A1 EP 0943807A1
- Authority
- EP
- European Patent Office
- Prior art keywords
- valve
- pump
- casing
- turbomolecular pump
- inlet
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
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Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D19/00—Axial-flow pumps
- F04D19/02—Multi-stage pumps
- F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D17/00—Radial-flow pumps, e.g. centrifugal pumps; Helico-centrifugal pumps
- F04D17/08—Centrifugal pumps
- F04D17/16—Centrifugal pumps for displacing without appreciable compression
- F04D17/168—Pumps specially adapted to produce a vacuum
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D27/00—Control, e.g. regulation, of pumps, pumping installations or pumping systems specially adapted for elastic fluids
- F04D27/02—Surge control
- F04D27/0292—Stop safety or alarm devices, e.g. stop-and-go control; Disposition of check-valves
Definitions
- the present invention relates to a turbomolecular pump.
- turbomolecular pump any secondary vacuum pump mechanical type with rotating rotor, whether finned or drum-type, or mixed.
- the pumping group includes in particular a turbomolecular pump connected to the enclosure to be emptied via a valve.
- the present invention aims to reduce the size of such assembly, and reduce the number of seals.
- the subject of the invention is therefore a turbomolecular pump comprising a rotor housed inside a housing comprising an inlet for suction and a outlet for discharge, said pump being associated with its inlet to a valve comprising a valve mechanism inside an enclosure, characterized in that said valve cover is in one piece with said pump housing.
- FIG. 1 shows a turbomolecular pump according to the invention connected to an enclosure to empty.
- Figure 2 is an enlarged view of the valve.
- turbomolecular pump 1 comprising a rotor 2 housed inside a casing 3.
- the rotor 2 comprises a plurality of stages 4 of movable fins and the casing 3 supports a plurality of stages of stator fins 5.
- the casing 3 of the pump has a discharge outlet 8 comprising a connecting flange 9 for its assembly with a pump primary.
- the pump 1 is associated, at its suction inlet 10, with a valve 11 comprising a valve mechanism 12 located inside an envelope 13.
- the casing 13 of the valve 11 is in one piece with the casing 3 of the pump 1.
- the casing 13 and the casing 3 therefore constitute a one and the same piece without assembly.
- the assembly is connected to an enclosure to be emptied 14 by means of flanges 15A-15B with a seal 16 between the two flanges 15A and 15B.
- the arrangement according to the invention makes it possible to avoid assembly by flanges between the pump 1 and the valve 11, and therefore to reduce the space requirement and remove a seal between the pump and the valve. Deleting a joint is beneficial, because it reduces pollution of enclosure 14.
- the valve shown is a slide valve, the mechanism of which comprises two movable valves 17 and 18 subjected to a force of approach one towards the other by a return spring 19. Between the two valves, is located a carriage 20 linked to a control axis 21.
- the carriage comprises balls 22 which, in position valve open ( Figure 2), are partly housed in grooves 22 arranged in the valves, and allowing mutual reconciliation of the valves by the force of the return spring 19.
- valve In Figure 1, the valve is in the closed position, the valves are in abutment against the bottom of the casing 13 allowing, by pushing the axis 21, to bring out the balls of the grooves 12, and therefore of spreading the valves 17 and 18.
- This slide valve is an all-or-nothing valve.
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Non-Positive Displacement Air Blowers (AREA)
- Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
- Sliding Valves (AREA)
Abstract
Description
La présente invention concerne une pompe turbomoléculaire.The present invention relates to a turbomolecular pump.
Par pompe turbomoléculaire, on entend toute pompe à vide secondaire d'un type mécanique à rotor tournant, qu'elle soit à ailettes ou à tambour, ou mixte.By turbomolecular pump is meant any secondary vacuum pump mechanical type with rotating rotor, whether finned or drum-type, or mixed.
Dans les procédés industriels où une enceinte doit être mise sous vide, le groupe de pompage comporte notamment une pompe turbomoléculaire reliée à l'enceinte à vider par l'intermédiaire d'une vanne.In industrial processes where an enclosure must be evacuated, the pumping group includes in particular a turbomolecular pump connected to the enclosure to be emptied via a valve.
La présente invention a pour but de diminuer l'encombrement d'un tel assemblage, et de réduire le nombre de joints d'étanchéité.The present invention aims to reduce the size of such assembly, and reduce the number of seals.
L'invention a ainsi pour objet une pompe turbomoléculaire comprenant un rotor logé à l'intérieur d'un carter comportant une entrée pour l'aspiration et une sortie pour le refoulement, ladite pompe étant associée à son entrée à une vanne comportant un mécanisme de vanne à l'intérieur d'une enveloppe, caractérisée en ce que ladite enveloppe de la vanne est monobloc avec ledit carter de la pompe.The subject of the invention is therefore a turbomolecular pump comprising a rotor housed inside a housing comprising an inlet for suction and a outlet for discharge, said pump being associated with its inlet to a valve comprising a valve mechanism inside an enclosure, characterized in that said valve cover is in one piece with said pump housing.
On va maintenant donner la description d'un exemple particulier de mise en oeuvre de l'invention en se référant au dessin annexé dans lequel :We will now give the description of a particular example of setting of the invention with reference to the appended drawing in which:
La figure 1 montre une pompe turbomoléculaire selon l'invention reliée à une enceinte à vider.FIG. 1 shows a turbomolecular pump according to the invention connected to an enclosure to empty.
La figure 2 est une vue agrandie de la vanne.Figure 2 is an enlarged view of the valve.
En se référant aux figures, on voit une pompe turbomoléculaire 1
comportant un rotor 2 logé à l'intérieur d'un carter 3.Referring to the figures, we see a
Le rotor 2 comprend une pluralité d'étages 4 d'ailettes mobiles et le carter
3 supporte une pluralité d'étages d'ailettes statoriques 5.The
En 6 a été figuré le rotor du moteur électrique d'entraínement, et en 7 le stator de ce même moteur.In 6 was shown the rotor of the electric drive motor, and in 7 the stator of this same motor.
Le carter 3 de la pompe comporte une sortie 8 de refoulement
comprenant une bride de liaison 9 pour son assemblage avec une pompe
primaire.The
La pompe 1 est associée, à son entrée d'aspiration 10, à une vanne 11
comportant un mécanisme de vanne 12 situé à l'intérieur d'une enveloppe 13.The
Conformément à l'invention, l'enveloppe 13 de la vanne 11 est monobloc
avec le carter 3 de la pompe 1. L'enveloppe 13 et le carter 3 constituent donc une
seule et même pièce sans assemblage. According to the invention, the
L'ensemble est relié à une enceinte à vider 14 par le moyen de brides
d'assemblage 15A-15B avec un joint d'étanchéité 16 entre les deux brides 15A et
15B.The assembly is connected to an enclosure to be emptied 14 by means of flanges
15A-15B with a
Ainsi, la disposition selon l'invention permet d'éviter un assemblage par
brides entre la pompe 1 et la vanne 11, et donc de diminuer l'encombrement et de
supprimer un joint d'étanchéité entre la pompe et la vanne. La suppression d'un
joint est bénéfique, car cela permet de diminuer la pollution de l'enceinte 14.Thus, the arrangement according to the invention makes it possible to avoid assembly by
flanges between the
En effet, dans le cas où l'on pompe des gaz condensables, ceux-ci se condensent notamment sur les joints d'étanchéité difficiles à réchauffer.Indeed, in the case where condensable gases are pumped, these are condensate in particular on seals which are difficult to heat.
La réduction de l'encombrement résultant de la suppression d'un assemblage permet en outre d'augmenter légèrement la conductance.The reduction in size resulting from the removal of a assembly further increases the conductance slightly.
La vanne représentée est une vanne tiroir dont le mécanisme comprend
deux clapets mobiles 17 et 18 soumis à un effort de rapprochement l'un vers
l'autre par un ressort de rappel 19. Entre les deux clapets, est situé un chariot 20
lié à un axe de commande 21. Le chariot comprend des billes 22 qui, en position
ouverte de la vanne (figure 2), sont en partie logées dans des gorges 22
aménagées dans les clapets, et permettant le rapprochement mutuel des clapets
par l'effort du ressort de rappel 19.The valve shown is a slide valve, the mechanism of which comprises
two
Sur la figure 1, la vanne est en position fermée, les clapets sont en butée
contre le fond de l'enveloppe 13 permettant, en poussant l'axe 21, de faire sortir
les billes des gorges 12, et donc d'écarter les clapets 17 et 18.In Figure 1, the valve is in the closed position, the valves are in abutment
against the bottom of the
Cette vanne tiroir est une vanne à fonctionnement en tout ou rien.This slide valve is an all-or-nothing valve.
Il est cependant bien évident que l'invention s'applique à n'importe quel type de vanne, et en particulier au cas d'une vanne de régulation de débit, l'invention consistant dans le fait que l'enveloppe de la vanne et le carter de la pompe sont en une seule et même pièce sans assemblage.It is however quite obvious that the invention applies to any valve type, and in particular in the case of a flow control valve, the invention consisting in the fact that the casing of the valve and the casing of the pump are in one piece without assembly.
Claims (1)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR9803191 | 1998-03-16 | ||
FR9803191A FR2776029B1 (en) | 1998-03-16 | 1998-03-16 | TURBOMOLECULAR PUMP |
Publications (2)
Publication Number | Publication Date |
---|---|
EP0943807A1 true EP0943807A1 (en) | 1999-09-22 |
EP0943807B1 EP0943807B1 (en) | 2003-08-20 |
Family
ID=9524085
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP99400484A Expired - Lifetime EP0943807B1 (en) | 1998-03-16 | 1999-03-01 | Turbomolecular pump |
Country Status (5)
Country | Link |
---|---|
US (1) | US6186749B1 (en) |
EP (1) | EP0943807B1 (en) |
JP (1) | JPH11303791A (en) |
DE (1) | DE69910475T2 (en) |
FR (1) | FR2776029B1 (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP2746585A1 (en) * | 2012-12-18 | 2014-06-25 | Pfeiffer Vacuum GmbH | Vacuum system |
Families Citing this family (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE19951954A1 (en) * | 1999-10-28 | 2001-05-03 | Pfeiffer Vacuum Gmbh | Turbomolecular pump |
JP4672204B2 (en) * | 2001-08-03 | 2011-04-20 | エドワーズ株式会社 | Vacuum pump connection structure and vacuum pump |
DE102004047930A1 (en) * | 2004-10-01 | 2006-04-06 | Leybold Vacuum Gmbh | Friction vacuum pump |
DE102016114983A1 (en) * | 2016-08-12 | 2018-02-15 | Pfeiffer Vacuum Gmbh | vacuum system |
JP6951640B2 (en) * | 2017-05-29 | 2021-10-20 | 株式会社島津製作所 | Vacuum exhaust system, vacuum pump and vacuum valve |
US10704715B2 (en) * | 2017-05-29 | 2020-07-07 | Shimadzu Corporation | Vacuum pumping device, vacuum pump, and vacuum valve |
GB2575450B (en) * | 2018-07-09 | 2022-01-26 | Edwards Ltd | A variable inlet conductance vacuum pump, vacuum pump arrangement and method |
GB2591814A (en) * | 2020-02-10 | 2021-08-11 | Edwards Vacuum Llc | Housing for a vacuum pump |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0332107A1 (en) * | 1988-03-07 | 1989-09-13 | Kabushiki Kaisha Toshiba | Turbomolecular pump and method of operating the same |
EP0397051A1 (en) * | 1989-05-09 | 1990-11-14 | Kabushiki Kaisha Toshiba | Evacuation apparatus and evacuation method |
JPH0633874A (en) * | 1992-07-16 | 1994-02-08 | Ulvac Kuraio Kk | Cryopump device equipped with turbomolecular pump |
-
1998
- 1998-03-16 FR FR9803191A patent/FR2776029B1/en not_active Expired - Fee Related
-
1999
- 1999-02-26 JP JP11051084A patent/JPH11303791A/en active Pending
- 1999-03-01 DE DE69910475T patent/DE69910475T2/en not_active Expired - Fee Related
- 1999-03-01 EP EP99400484A patent/EP0943807B1/en not_active Expired - Lifetime
- 1999-03-12 US US09/266,729 patent/US6186749B1/en not_active Expired - Fee Related
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0332107A1 (en) * | 1988-03-07 | 1989-09-13 | Kabushiki Kaisha Toshiba | Turbomolecular pump and method of operating the same |
EP0397051A1 (en) * | 1989-05-09 | 1990-11-14 | Kabushiki Kaisha Toshiba | Evacuation apparatus and evacuation method |
JPH0633874A (en) * | 1992-07-16 | 1994-02-08 | Ulvac Kuraio Kk | Cryopump device equipped with turbomolecular pump |
Non-Patent Citations (1)
Title |
---|
PATENT ABSTRACTS OF JAPAN vol. 18, no. 249 (M - 1604) 12 May 1994 (1994-05-12) * |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP2746585A1 (en) * | 2012-12-18 | 2014-06-25 | Pfeiffer Vacuum GmbH | Vacuum system |
Also Published As
Publication number | Publication date |
---|---|
FR2776029A1 (en) | 1999-09-17 |
DE69910475D1 (en) | 2003-09-25 |
FR2776029B1 (en) | 2000-06-23 |
EP0943807B1 (en) | 2003-08-20 |
JPH11303791A (en) | 1999-11-02 |
US6186749B1 (en) | 2001-02-13 |
DE69910475T2 (en) | 2004-06-17 |
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