EP0943807A1 - Turbomolecular pump - Google Patents

Turbomolecular pump Download PDF

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Publication number
EP0943807A1
EP0943807A1 EP99400484A EP99400484A EP0943807A1 EP 0943807 A1 EP0943807 A1 EP 0943807A1 EP 99400484 A EP99400484 A EP 99400484A EP 99400484 A EP99400484 A EP 99400484A EP 0943807 A1 EP0943807 A1 EP 0943807A1
Authority
EP
European Patent Office
Prior art keywords
valve
pump
casing
turbomolecular pump
inlet
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP99400484A
Other languages
German (de)
French (fr)
Other versions
EP0943807B1 (en
Inventor
André Bouille
Jean-François Guilbert
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Alcatel CIT SA
Alcatel Lucent SAS
Original Assignee
Alcatel CIT SA
Alcatel SA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Alcatel CIT SA, Alcatel SA filed Critical Alcatel CIT SA
Publication of EP0943807A1 publication Critical patent/EP0943807A1/en
Application granted granted Critical
Publication of EP0943807B1 publication Critical patent/EP0943807B1/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D17/00—Radial-flow pumps, e.g. centrifugal pumps; Helico-centrifugal pumps
    • F04D17/08—Centrifugal pumps
    • F04D17/16—Centrifugal pumps for displacing without appreciable compression
    • F04D17/168—Pumps specially adapted to produce a vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D27/00—Control, e.g. regulation, of pumps, pumping installations or pumping systems specially adapted for elastic fluids
    • F04D27/02—Surge control
    • F04D27/0292—Stop safety or alarm devices, e.g. stop-and-go control; Disposition of check-valves

Definitions

  • the present invention relates to a turbomolecular pump.
  • turbomolecular pump any secondary vacuum pump mechanical type with rotating rotor, whether finned or drum-type, or mixed.
  • the pumping group includes in particular a turbomolecular pump connected to the enclosure to be emptied via a valve.
  • the present invention aims to reduce the size of such assembly, and reduce the number of seals.
  • the subject of the invention is therefore a turbomolecular pump comprising a rotor housed inside a housing comprising an inlet for suction and a outlet for discharge, said pump being associated with its inlet to a valve comprising a valve mechanism inside an enclosure, characterized in that said valve cover is in one piece with said pump housing.
  • FIG. 1 shows a turbomolecular pump according to the invention connected to an enclosure to empty.
  • Figure 2 is an enlarged view of the valve.
  • turbomolecular pump 1 comprising a rotor 2 housed inside a casing 3.
  • the rotor 2 comprises a plurality of stages 4 of movable fins and the casing 3 supports a plurality of stages of stator fins 5.
  • the casing 3 of the pump has a discharge outlet 8 comprising a connecting flange 9 for its assembly with a pump primary.
  • the pump 1 is associated, at its suction inlet 10, with a valve 11 comprising a valve mechanism 12 located inside an envelope 13.
  • the casing 13 of the valve 11 is in one piece with the casing 3 of the pump 1.
  • the casing 13 and the casing 3 therefore constitute a one and the same piece without assembly.
  • the assembly is connected to an enclosure to be emptied 14 by means of flanges 15A-15B with a seal 16 between the two flanges 15A and 15B.
  • the arrangement according to the invention makes it possible to avoid assembly by flanges between the pump 1 and the valve 11, and therefore to reduce the space requirement and remove a seal between the pump and the valve. Deleting a joint is beneficial, because it reduces pollution of enclosure 14.
  • the valve shown is a slide valve, the mechanism of which comprises two movable valves 17 and 18 subjected to a force of approach one towards the other by a return spring 19. Between the two valves, is located a carriage 20 linked to a control axis 21.
  • the carriage comprises balls 22 which, in position valve open ( Figure 2), are partly housed in grooves 22 arranged in the valves, and allowing mutual reconciliation of the valves by the force of the return spring 19.
  • valve In Figure 1, the valve is in the closed position, the valves are in abutment against the bottom of the casing 13 allowing, by pushing the axis 21, to bring out the balls of the grooves 12, and therefore of spreading the valves 17 and 18.
  • This slide valve is an all-or-nothing valve.

Abstract

The rotor (1) for the turbo-molecular pump is located within a casing (3), which has one inlet (10) for aspiration and an outlet (8) for delivery. A valve (11) is fitted on the inlet and consists of a valve mechanism (12), fitted into an envelope (13). The envelope is produced so as to be a single piece with the casing of the pump.

Description

La présente invention concerne une pompe turbomoléculaire.The present invention relates to a turbomolecular pump.

Par pompe turbomoléculaire, on entend toute pompe à vide secondaire d'un type mécanique à rotor tournant, qu'elle soit à ailettes ou à tambour, ou mixte.By turbomolecular pump is meant any secondary vacuum pump mechanical type with rotating rotor, whether finned or drum-type, or mixed.

Dans les procédés industriels où une enceinte doit être mise sous vide, le groupe de pompage comporte notamment une pompe turbomoléculaire reliée à l'enceinte à vider par l'intermédiaire d'une vanne.In industrial processes where an enclosure must be evacuated, the pumping group includes in particular a turbomolecular pump connected to the enclosure to be emptied via a valve.

La présente invention a pour but de diminuer l'encombrement d'un tel assemblage, et de réduire le nombre de joints d'étanchéité.The present invention aims to reduce the size of such assembly, and reduce the number of seals.

L'invention a ainsi pour objet une pompe turbomoléculaire comprenant un rotor logé à l'intérieur d'un carter comportant une entrée pour l'aspiration et une sortie pour le refoulement, ladite pompe étant associée à son entrée à une vanne comportant un mécanisme de vanne à l'intérieur d'une enveloppe, caractérisée en ce que ladite enveloppe de la vanne est monobloc avec ledit carter de la pompe.The subject of the invention is therefore a turbomolecular pump comprising a rotor housed inside a housing comprising an inlet for suction and a outlet for discharge, said pump being associated with its inlet to a valve comprising a valve mechanism inside an enclosure, characterized in that said valve cover is in one piece with said pump housing.

On va maintenant donner la description d'un exemple particulier de mise en oeuvre de l'invention en se référant au dessin annexé dans lequel :We will now give the description of a particular example of setting of the invention with reference to the appended drawing in which:

La figure 1 montre une pompe turbomoléculaire selon l'invention reliée à une enceinte à vider.FIG. 1 shows a turbomolecular pump according to the invention connected to an enclosure to empty.

La figure 2 est une vue agrandie de la vanne.Figure 2 is an enlarged view of the valve.

En se référant aux figures, on voit une pompe turbomoléculaire 1 comportant un rotor 2 logé à l'intérieur d'un carter 3.Referring to the figures, we see a turbomolecular pump 1 comprising a rotor 2 housed inside a casing 3.

Le rotor 2 comprend une pluralité d'étages 4 d'ailettes mobiles et le carter 3 supporte une pluralité d'étages d'ailettes statoriques 5.The rotor 2 comprises a plurality of stages 4 of movable fins and the casing 3 supports a plurality of stages of stator fins 5.

En 6 a été figuré le rotor du moteur électrique d'entraínement, et en 7 le stator de ce même moteur.In 6 was shown the rotor of the electric drive motor, and in 7 the stator of this same motor.

Le carter 3 de la pompe comporte une sortie 8 de refoulement comprenant une bride de liaison 9 pour son assemblage avec une pompe primaire.The casing 3 of the pump has a discharge outlet 8 comprising a connecting flange 9 for its assembly with a pump primary.

La pompe 1 est associée, à son entrée d'aspiration 10, à une vanne 11 comportant un mécanisme de vanne 12 situé à l'intérieur d'une enveloppe 13.The pump 1 is associated, at its suction inlet 10, with a valve 11 comprising a valve mechanism 12 located inside an envelope 13.

Conformément à l'invention, l'enveloppe 13 de la vanne 11 est monobloc avec le carter 3 de la pompe 1. L'enveloppe 13 et le carter 3 constituent donc une seule et même pièce sans assemblage. According to the invention, the casing 13 of the valve 11 is in one piece with the casing 3 of the pump 1. The casing 13 and the casing 3 therefore constitute a one and the same piece without assembly.

L'ensemble est relié à une enceinte à vider 14 par le moyen de brides d'assemblage 15A-15B avec un joint d'étanchéité 16 entre les deux brides 15A et 15B.The assembly is connected to an enclosure to be emptied 14 by means of flanges 15A-15B with a seal 16 between the two flanges 15A and 15B.

Ainsi, la disposition selon l'invention permet d'éviter un assemblage par brides entre la pompe 1 et la vanne 11, et donc de diminuer l'encombrement et de supprimer un joint d'étanchéité entre la pompe et la vanne. La suppression d'un joint est bénéfique, car cela permet de diminuer la pollution de l'enceinte 14.Thus, the arrangement according to the invention makes it possible to avoid assembly by flanges between the pump 1 and the valve 11, and therefore to reduce the space requirement and remove a seal between the pump and the valve. Deleting a joint is beneficial, because it reduces pollution of enclosure 14.

En effet, dans le cas où l'on pompe des gaz condensables, ceux-ci se condensent notamment sur les joints d'étanchéité difficiles à réchauffer.Indeed, in the case where condensable gases are pumped, these are condensate in particular on seals which are difficult to heat.

La réduction de l'encombrement résultant de la suppression d'un assemblage permet en outre d'augmenter légèrement la conductance.The reduction in size resulting from the removal of a assembly further increases the conductance slightly.

La vanne représentée est une vanne tiroir dont le mécanisme comprend deux clapets mobiles 17 et 18 soumis à un effort de rapprochement l'un vers l'autre par un ressort de rappel 19. Entre les deux clapets, est situé un chariot 20 lié à un axe de commande 21. Le chariot comprend des billes 22 qui, en position ouverte de la vanne (figure 2), sont en partie logées dans des gorges 22 aménagées dans les clapets, et permettant le rapprochement mutuel des clapets par l'effort du ressort de rappel 19.The valve shown is a slide valve, the mechanism of which comprises two movable valves 17 and 18 subjected to a force of approach one towards the other by a return spring 19. Between the two valves, is located a carriage 20 linked to a control axis 21. The carriage comprises balls 22 which, in position valve open (Figure 2), are partly housed in grooves 22 arranged in the valves, and allowing mutual reconciliation of the valves by the force of the return spring 19.

Sur la figure 1, la vanne est en position fermée, les clapets sont en butée contre le fond de l'enveloppe 13 permettant, en poussant l'axe 21, de faire sortir les billes des gorges 12, et donc d'écarter les clapets 17 et 18.In Figure 1, the valve is in the closed position, the valves are in abutment against the bottom of the casing 13 allowing, by pushing the axis 21, to bring out the balls of the grooves 12, and therefore of spreading the valves 17 and 18.

Cette vanne tiroir est une vanne à fonctionnement en tout ou rien.This slide valve is an all-or-nothing valve.

Il est cependant bien évident que l'invention s'applique à n'importe quel type de vanne, et en particulier au cas d'une vanne de régulation de débit, l'invention consistant dans le fait que l'enveloppe de la vanne et le carter de la pompe sont en une seule et même pièce sans assemblage.It is however quite obvious that the invention applies to any valve type, and in particular in the case of a flow control valve, the invention consisting in the fact that the casing of the valve and the casing of the pump are in one piece without assembly.

Claims (1)

Pompe turbomoléculaire (1) comprenant un rotor (2) logé à l'intérieur d'un carter (3) comportant une entrée (10) pour l'aspiration, et une sortie (8) pour le refoulement, ladite pompe étant associée, à son entrée, à une vanne (11) comportant un mécanisme de vanne (12) à l'intérieur d'une enveloppe (13), caractérisée en ce que ladite enveloppe (13) de la vanne est monobloc avec ledit carter (3) de la pompe.Turbomolecular pump (1) comprising a rotor (2) housed inside a casing (3) comprising an inlet (10) for the suction, and an outlet (8) for the delivery, said pump being associated, at its inlet, with a valve (11) comprising a valve mechanism (12) inside an envelope (13), characterized in that said casing (13) of the valve is in one piece with said pump housing (3).
EP99400484A 1998-03-16 1999-03-01 Turbomolecular pump Expired - Lifetime EP0943807B1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FR9803191 1998-03-16
FR9803191A FR2776029B1 (en) 1998-03-16 1998-03-16 TURBOMOLECULAR PUMP

Publications (2)

Publication Number Publication Date
EP0943807A1 true EP0943807A1 (en) 1999-09-22
EP0943807B1 EP0943807B1 (en) 2003-08-20

Family

ID=9524085

Family Applications (1)

Application Number Title Priority Date Filing Date
EP99400484A Expired - Lifetime EP0943807B1 (en) 1998-03-16 1999-03-01 Turbomolecular pump

Country Status (5)

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US (1) US6186749B1 (en)
EP (1) EP0943807B1 (en)
JP (1) JPH11303791A (en)
DE (1) DE69910475T2 (en)
FR (1) FR2776029B1 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2746585A1 (en) * 2012-12-18 2014-06-25 Pfeiffer Vacuum GmbH Vacuum system

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19951954A1 (en) * 1999-10-28 2001-05-03 Pfeiffer Vacuum Gmbh Turbomolecular pump
JP4672204B2 (en) * 2001-08-03 2011-04-20 エドワーズ株式会社 Vacuum pump connection structure and vacuum pump
DE102004047930A1 (en) * 2004-10-01 2006-04-06 Leybold Vacuum Gmbh Friction vacuum pump
DE102016114983A1 (en) * 2016-08-12 2018-02-15 Pfeiffer Vacuum Gmbh vacuum system
US10704715B2 (en) * 2017-05-29 2020-07-07 Shimadzu Corporation Vacuum pumping device, vacuum pump, and vacuum valve
JP6951640B2 (en) * 2017-05-29 2021-10-20 株式会社島津製作所 Vacuum exhaust system, vacuum pump and vacuum valve
GB2575450B (en) * 2018-07-09 2022-01-26 Edwards Ltd A variable inlet conductance vacuum pump, vacuum pump arrangement and method
GB2591814A (en) * 2020-02-10 2021-08-11 Edwards Vacuum Llc Housing for a vacuum pump

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0332107A1 (en) * 1988-03-07 1989-09-13 Kabushiki Kaisha Toshiba Turbomolecular pump and method of operating the same
EP0397051A1 (en) * 1989-05-09 1990-11-14 Kabushiki Kaisha Toshiba Evacuation apparatus and evacuation method
JPH0633874A (en) * 1992-07-16 1994-02-08 Ulvac Kuraio Kk Cryopump device equipped with turbomolecular pump

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0332107A1 (en) * 1988-03-07 1989-09-13 Kabushiki Kaisha Toshiba Turbomolecular pump and method of operating the same
EP0397051A1 (en) * 1989-05-09 1990-11-14 Kabushiki Kaisha Toshiba Evacuation apparatus and evacuation method
JPH0633874A (en) * 1992-07-16 1994-02-08 Ulvac Kuraio Kk Cryopump device equipped with turbomolecular pump

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
PATENT ABSTRACTS OF JAPAN vol. 18, no. 249 (M - 1604) 12 May 1994 (1994-05-12) *

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2746585A1 (en) * 2012-12-18 2014-06-25 Pfeiffer Vacuum GmbH Vacuum system

Also Published As

Publication number Publication date
US6186749B1 (en) 2001-02-13
FR2776029B1 (en) 2000-06-23
JPH11303791A (en) 1999-11-02
EP0943807B1 (en) 2003-08-20
FR2776029A1 (en) 1999-09-17
DE69910475T2 (en) 2004-06-17
DE69910475D1 (en) 2003-09-25

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