EP2693466B1 - Dispositif de régulation de la température d'un récipient dans une chambre - Google Patents

Dispositif de régulation de la température d'un récipient dans une chambre Download PDF

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Publication number
EP2693466B1
EP2693466B1 EP13003760.9A EP13003760A EP2693466B1 EP 2693466 B1 EP2693466 B1 EP 2693466B1 EP 13003760 A EP13003760 A EP 13003760A EP 2693466 B1 EP2693466 B1 EP 2693466B1
Authority
EP
European Patent Office
Prior art keywords
leg
sealing
chamber
contact surface
contact
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Not-in-force
Application number
EP13003760.9A
Other languages
German (de)
English (en)
Other versions
EP2693466A1 (fr
Inventor
Klaus-Dieter Fiebig
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Dockweiler AG
Original Assignee
Dockweiler AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Dockweiler AG filed Critical Dockweiler AG
Publication of EP2693466A1 publication Critical patent/EP2693466A1/fr
Application granted granted Critical
Publication of EP2693466B1 publication Critical patent/EP2693466B1/fr
Not-in-force legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q3/00—Devices holding, supporting, or positioning work or tools, of a kind normally removable from the machine
    • B23Q3/18—Devices holding, supporting, or positioning work or tools, of a kind normally removable from the machine for positioning only
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67017—Apparatus for fluid treatment
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E60/00—Enabling technologies; Technologies with a potential or indirect contribution to GHG emissions mitigation
    • Y02E60/30—Hydrogen technology
    • Y02E60/32—Hydrogen storage

Definitions

  • the present invention relates to a device for tempering a vessel in a chamber.
  • a vessel also referred to as a bubbler
  • a doping gas is produced, in a temperature control device with very high precision.
  • the vessel is arranged in the temperature control device and sealed to the outside. Since bubblers have tolerances in their circumferential diameter and, for example, irregularities caused by welding seams, the sealing in the temperature control device may be impaired.
  • the tempering device is well insulated and is tempered in its chamber via a medium, such as water or other tempering.
  • a lid closure for a pressure vessel which has an L-shaped lip seal, which is arranged with a leg in an annular recess of the inner surface of the container attached to the lid.
  • a sealing lip abuts an inner surface of a flat annular groove of the lid closure.
  • a device for tempering a vessel in a chamber in which for sealing the vessel inserted into the chamber, an O-ring is arranged around the vessel in a circumferential recess and sealed by an annular clamping element.
  • the invention has for its object to provide a device for controlling the temperature of a vessel in a chamber, which allows a simple and effective means a proper and effective sealing of the chamber in the interior of the device.
  • the device according to the invention is intended and intended to temper a vessel, in particular a bubbler, in a chamber.
  • the device has a cylindrical shell surrounding the chamber. Further, a bottom is provided, which is arranged at one end of the shell and connected thereto. Furthermore, at the end opposite the bottom there is an opening with a bearing surface extending parallel to the bottom, which limits the diameter of the opening with respect to the inner diameter of the chamber.
  • the vessel to be tempered is placed over the opening in the chamber.
  • an annular sealing element is provided, which has an L-shaped cross-section with a sealing leg and a bearing limb, wherein the bearing limb rests on the contact surface.
  • annular clamping element which, mounted on the sealing element, rests against the sealing leg on the outside thereof.
  • the seal can be removed and so the vessel can be particularly easily arranged in the chamber and removed therefrom.
  • different outer diameter of the vessel can be compensated by the clamping element.
  • the entire device can be used by choosing a suitable sealing element and the appropriate clamping element for vessels with different diameters.
  • the seal according to the invention via a braced sealing element also creates the possibility of operating the tempering device with overpressure, that is to introduce a pressurized tempering medium into the intermediate space between the vessel and the inside of the chamber wall.
  • the device further comprises connecting means with which the abutment leg can be fastened to the contact surface.
  • the contact leg of the seal has bores for the connection means.
  • connection means which, in addition to the tensioning element, fix the sealing element on the device, the sealing element can be fixed in the axial direction, relative to the longitudinal direction of the chamber, on the contact surface.
  • a pressure plate and screws are provided as connecting means, which are placed on the contact leg of the sealing element and fastened with the screws through the sealing element.
  • a quick-release device may be provided which, for example, presses the plant leg or a pressing ring arranged thereon against the contact surface of the tempering device via a toggle mechanism.
  • the sealing element is designed as a circumferential ring on which sealing leg and bearing limb are substantially perpendicular to each other.
  • the sealing element is dimensioned such that it protrudes radially inwards the contact surface.
  • the sealing element is particularly elastic in the radial direction and can adapt to different diameters of the vessel. The seal of the chamber is then carried out by the voltage applied to the vessel inside the sealing leg and pointing to the chamber bottom of the contact surface.
  • the device is also provided with at least one inlet and / or outlet for a tempering in the chamber.
  • the tempering medium is preferably preheated externally and introduced into the chamber at the desired temperature.
  • the jacket and / or the bottom of the device is double-walled and thermally insulated.
  • an insulating sheath consisting of half-shells can additionally be provided, which is arranged on the outside of the device and additionally insulates it.
  • an inflow pipe for the temperature control medium opens at the bottom of the chamber, preferably centrally at the bottom below a vessel arranged in the chamber. By introduced below the vessel temperature control this can be well distributed in the chamber and temper the vessel evenly.
  • the sealing leg of the sealing element has a wedge or trapezoidal shape.
  • the inside of the sealing leg is to be attached to the provided to be tempered vessel.
  • the outside is inclined to the inside.
  • the clamping element has an inclined pressure surface, which preferably extends corresponding to the inclined outside of the sealing leg.
  • the clamping element is preferably on the plant leg of the seal and with its pressure surface on the sealing leg.
  • the clamping element is annular and can be connected to the contact surface at three or more points in order to press the pressure surface against the outside of the sealing leg.
  • the clamping element on its radially inwardly facing side at least one hold-down, which rests against one of the vessels arranged in the chamber and prevents their lifting.
  • Fig. 2 shows in a cross section a cylindrical bubbler 10 with its supply and discharge lines 12 and 14. Via the supply line 12, for example, H 2 gas is introduced into the bubbler, where it reacts chemically and exits as doping gas via the discharge line 14 again.
  • a centrally located handle 16 which is designed as a ring segment.
  • the bubbler is inserted into the temperature control, so that the connections for the inlet and outlet and the handle protrude from the temperature control.
  • the tempering device is designed double-walled in the illustrated example, wherein an inner bottom wall 18 and an outer bottom wall 20 are provided.
  • the outer bottom wall 20 is welded to an outer cylindrical shell wall 22.
  • the inner bottom wall 18 is provided with a cylindrical inner wall 24 welded.
  • the interior 26 between the outer and inner wall and between the outer and inner bottom wall is filled with insulating material (not shown).
  • an inflow pipe 27 is disposed in the inner space 26.
  • the inflow pipe 27 protrudes from the tempering device at the upper end 35 and extends parallel to the casing wall 22 and the inner wall 24 into the ground, where, under a 90 ° bend, it passes centrally into the chamber through the inner bottom wall 18 in FIG exit.
  • the bubbler 10 has a foot 29, which consists of a circumferential wall with radial openings 31.
  • the tempering medium emerging in the foot region of the bubbler at its end 33 is distributed within the foot 29 and flows via the openings 31 into a ring-cylindrical intermediate space 50 which is formed by the bubbler 10 in the chamber.
  • the outer shell wall 22 has a flange 28 which extends radially inwardly to the inner shell wall 24 and projects radially inwardly into the chamber formed by the inner shell wall.
  • the flange 28 has on its upper side a contact surface 30, on which a cross-sectionally L-shaped sealing element 32 rests.
  • the sealing element 32 has a vertically standing sealing leg 34 and a horizontally disposed sealing leg 36.
  • the sealing leg 36 is flat on the contact surface 30.
  • a flat clamping element 38 abuts against the outside of the sealing leg 34. By pressing the clamping element 38, this is stretched radially inwardly in the direction of the arrow A, so that the inside of the sealing leg 34 bears sealingly against the outer surface of the bubbler 40.
  • the turnbuckle 38 is shown by the clamping element.
  • the clamping element itself is as flat Ring formed.
  • a circumferential ring 42 is provided for fixing the abutment leg 36 on the abutment surface 30, a circumferential ring 42 is provided.
  • the ring 42 can be screwed by a screw 44 with the flange 28 '.
  • the screw 44 is guided through a bore 46 in the abutment leg 36 of the sealing element 32 and thus fixes the sealing element.
  • the in Fig. 5 provided quick-clamping device 52 may be provided which has a lever 54 and a pressing arm 56. By clamping in the direction V via the toggle mechanism 58, the ring 42 is pressed onto the abutment leg 36 of the sealing element.
  • a gap 48 can be seen between the outside of the bubbler 40 and the flange 28, 28 '.
  • the gap is bounded above by the plant leg 36.
  • the gap 48 may vary in size and at the same time be sealed effectively via the sealing element 32.
  • the temperature control medium exits via the outlet pipe 58 arranged at the upper end of the temperature control device.
  • the discharge pipe 58 is connected via its opening 60 to the chamber and has at its end led out of the temperature control device a line adapter 62nd
  • Fig. 7 shows a tempering device 64, in which a bubbler 10 with its supply and discharge lines 12 and 14 and its handle 16 is arranged.
  • the detailed detail D shown is a screwed to the jacket of Temperiervorrichtrung 64 clamping element 66.
  • the clamping element 66 has, as in the view Fig. 8 to recognize three connecting bridges 68, which on one circumferential profile edge 70 of the temperature control device are fastened by bolts 72.
  • a holding-down device 74 is provided, which rests on an end face of the bubbler 10. From the connecting bridge 68, a clamping ring 82 is pressed against the L-shaped seal.
  • FIG. 9 shows the detailed structure: A circular profile 70 is screwed by bolts 76 with an upper cover 78 of the tempering. A fastening bolt 72 is guided through the connecting bridge 68 and connects it to the profile and the tempering device.
  • the connecting bridge 68 is connected on its side facing the tempering device via a screw 80 with the clamping ring 82.
  • the clamping ring 82 has on its radially inwardly projecting side an inclined pressure surface 84.
  • the L-shaped sealing ring 86 has a plant leg 88 and a sealing leg 90.
  • the sealing leg 90 has a wedge-shaped contour, wherein the thickness of the sealing leg 90 of the plant leg 88th from decreasing to its free end.
  • the sealing leg 90 rests on its radially inwardly pointing leg side on the bubbler 10 to be tempered along its peripheral surface.
  • a force in the direction A via the connecting bridge 68 is exerted on the clamping ring 82.
  • the force in the direction P is deflected radially inwardly, so that the sealing leg 90 is pressed against the peripheral wall of the bubbler 10.
  • the hold-down 74 has a thread, via which its position is adjustable relative to the connecting bridge.
  • the pointing to the bubbler 10 end 70 of the blank holder 74 is as in Fig. 9 shown on the top of the bubbler, so that it does not even in the axial direction can move. As a result, the contact pressure of the sealing leg 90 is maintained.
  • the intermediate space 50 between the inner wall and the vessel is flushed with a temperature control medium, for example with water.
  • a temperature control medium for example with water.

Landscapes

  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Physics & Mathematics (AREA)
  • Power Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Pressure Vessels And Lids Thereof (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Heat Treatment Of Articles (AREA)
  • Apparatus For Disinfection Or Sterilisation (AREA)

Claims (15)

  1. Dispositif (10) assurant la régulation thermique d'un récipient dans une chambre, présentant les éléments suivants :
    - un manteau cylindrique (22,24) enveloppant la chambre (26),
    - un fond (18, 20), installé à une extrémité du manteau (22, 24) et est relié à ce dernier,
    - une ouverture située sur une extrémité du manteau faisant face au fond, et limitée par une surface d'appui (30) parallèle au fond,
    - un élément d'étanchéité (32) circulaire,
    - un élément de serrage (38) circulaire, caractérisé en ce que l'élément d'étanchéité (32) présente une coupe transversale en L avec une branche d'étanchéité (36) et une branche d'appui (34) sur laquelle repose la surface d'appui (30), à savoir que l'élément de serrage placé sur l'élément d'étanchéité (32) repose sur la partie extérieure de la branche d'étanchéité.
  2. Dispositif selon la revendication 1, caractérisé en ce que des dispositifs de raccord sont prévus afin de permettre une fixation de la branche d'appui (34) à la surface d'appui (30).
  3. Dispositif selon la revendication 2, caractérisé en ce que la branche d'appui (34) présente des forures (46) pour les éléments de raccord.
  4. Dispositif selon la revendication 2 ou 3, caractérisé en ce que les éléments de raccord présentent une plaque de pression et des vis (44).
  5. Dispositif selon la revendication 2, caractérisé en ce qu'au moins un dispositif de serrage rapide (52) est prévu à titre de raccord et qui, lorsqu'il est tendu, presse la branche d'appui (34) contre la surface d'appui (30).
  6. Dispositif selon la revendication 5, caractérisé en ce que le dispositif de serrage rapide (52) présente un mécanisme à levier articulé (58) installé sur la surface d'appui (30) et peut appuyer la branche d'appui contre la surface d'appui (30) via un levier.
  7. Dispositif selon une des revendications 1 à 6, caractérisé en ce que la branche d'étanchéité (36) et la branche d'appui (34) de l'élément d'étanchéité (34) font face l'un à l'autre verticalement.
  8. Dispositif selon une des revendications 1 à 7, caractérisé en ce que l'élément d'étanchéité (32) dépasse transversalement vers l'intérieur au-dessus de la surface d'appui (30).
  9. Dispositif selon une des revendications 1 à 8, caractérisé en ce que au moins un tuyau d'alimentation et/ou d'évacuation (12,14) soit prévu dans la chambre pour un fluide de régulation thermique.
  10. Dispositif selon la revendication 9, caractérisé en ce que le tuyau d'alimentation (27) débouche dans le fond de la chambre.
  11. Dispositif selon une des revendications 1 à 10, caractérisé en ce que le manteau (22, 24) et/ou le fond (18,20) soit équipé d'une double paroi.
  12. Dispositif selon une des revendications susmentionnées, caractérisé en ce que la branche d'étanchéité (90) ait une forme en coin ou trapézoïdale sur laquelle est prévue la partie intérieure de la branche d'étanchéité (90) allant vers l'installation orientée vers le récipient à tempérer, et la partie extérieure soit inclinée dans la direction de la partie intérieure, et que l'élément de serrage soit doté d'une surface de pression inclinée.
  13. Dispositif selon la revendication 12, caractérisé en ce que l'élément de serrage, en position montée, repose sur la branche d'appui (88) et repose avec sa surface de pression contre une branche d'étanchéité (90).
  14. Dispositif selon la revendication 12 ou 13, caractérisé en ce que l'élément de serrage a une forme annulaire est peut être relié à la surface d'appui en trois points ou plus afin de presser la surface de pression contre la partie extérieure de la branche d'étanchéité.
  15. Dispositif selon la revendication 14, caractérisé en ce que l'élément de serrage (74) est doté, sur sa partie orientée transversalement vers l'intérieur, d'un dispositif de maintien vers le bas pour un récipient situé dans la chambre.
EP13003760.9A 2012-07-31 2013-07-29 Dispositif de régulation de la température d'un récipient dans une chambre Not-in-force EP2693466B1 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE102012015045.8A DE102012015045A1 (de) 2012-07-31 2012-07-31 Vorrichtung zum Temperieren eines Gefäßes in einer Kammer

Publications (2)

Publication Number Publication Date
EP2693466A1 EP2693466A1 (fr) 2014-02-05
EP2693466B1 true EP2693466B1 (fr) 2016-12-14

Family

ID=48915798

Family Applications (1)

Application Number Title Priority Date Filing Date
EP13003760.9A Not-in-force EP2693466B1 (fr) 2012-07-31 2013-07-29 Dispositif de régulation de la température d'un récipient dans une chambre

Country Status (4)

Country Link
US (1) US9266206B2 (fr)
EP (1) EP2693466B1 (fr)
DE (1) DE102012015045A1 (fr)
TW (1) TWM479508U (fr)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2988319B1 (fr) * 2013-04-15 2018-02-14 Lanxess Electronic Materials LLC Refroidisseur pour bidon

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DE624396C (de) * 1933-06-01 1936-01-20 Franz Lautenschlaeger Verschlusseinrichtung fuer unter UEberdruck arbeitende Sterilisationsapparate
DE1750549C3 (de) * 1968-05-13 1974-06-06 Norman Howard Dallas Tex. Kemp (V.St.A.) Deckel Verschluß für Druckbehälter
US4248514A (en) * 1979-10-10 1981-02-03 Watkins James L Photographic processing apparatus
CA1179144A (fr) * 1981-04-04 1984-12-11 Hiroshi Ishizuka Methode et dispositif d'extraction du titane metallique en presence dans le tetrachlorure titanifere
DE8133803U1 (de) * 1981-11-19 1982-06-03 Silit-Werke Gmbh & Co Kg, 7940 Riedlingen Vorrichtung zum konservieren von nahrungsmitteln und hierfuer vorgesehenes konservierungsgefaess
DE3407112C2 (de) * 1984-02-28 1987-04-09 Aesculap-Werke Ag Vormals Jetter & Scheerer, 7200 Tuttlingen Sterilisierbehälter
DE58901441D1 (de) * 1988-02-11 1992-06-25 Siemens Ag Thermostatisierte anordnung zur sicheren und kontrollierten verdampfung von giftigen oder an der luft hochreaktiven fluessigen reaktionsmedien, vorzugsweise fuer niederdruckdampfabscheideanlagen in der halbleitertechnik.
DE3812085A1 (de) * 1988-04-12 1989-10-26 Gaf Corp Filter fuer unter druck stehendes fluid
JPH03107A (ja) * 1989-05-26 1991-01-07 Oobayashi Tekkosho:Kk 濾過装置の容器
DE19735399C2 (de) * 1997-08-14 2002-01-17 Infineon Technologies Ag Gasleitungssystem für einen Prozeßreaktor, insbesondere Vertikalofen, zur Behandlung von Wafern und Verfahren zur Behandlung von Wafern in einem Prozeßreaktor
DE602004006984T2 (de) * 2003-04-30 2008-02-21 Sistem Teknik Endustriyel Elektronik Sis.San. Ve Tic. Ltd. Sti., Dudullu Schnellschliessende tür für druckbehälter
KR20050040969A (ko) * 2003-10-29 2005-05-04 삼성전자주식회사 확산 시스템
DE202004010834U1 (de) 2004-06-18 2004-09-23 Dockweiler Ag Vorrichtung zur Temperierung eines Gutes in einer zylindrischen Kammer
EP1866458A4 (fr) * 2005-03-17 2010-10-20 Noah Prec Llc Unite de regulation de temperature pour barboteurs

Non-Patent Citations (1)

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Title
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Also Published As

Publication number Publication date
TWM479508U (zh) 2014-06-01
DE102012015045A1 (de) 2014-02-06
US9266206B2 (en) 2016-02-23
EP2693466A1 (fr) 2014-02-05
US20140159297A1 (en) 2014-06-12

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