EP2606317A1 - Positionsmessvorrichtung - Google Patents

Positionsmessvorrichtung

Info

Publication number
EP2606317A1
EP2606317A1 EP11748877.5A EP11748877A EP2606317A1 EP 2606317 A1 EP2606317 A1 EP 2606317A1 EP 11748877 A EP11748877 A EP 11748877A EP 2606317 A1 EP2606317 A1 EP 2606317A1
Authority
EP
European Patent Office
Prior art keywords
light
housing
sensor head
sensor
shaft
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP11748877.5A
Other languages
German (de)
English (en)
French (fr)
Inventor
Jean-Jacques Wagner
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Elesta GmbH
Original Assignee
Elesta Relays GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from CH01342/10A external-priority patent/CH703663A1/de
Priority claimed from CH01341/10A external-priority patent/CH703647A1/de
Priority claimed from CH01343/10A external-priority patent/CH703664A1/de
Application filed by Elesta Relays GmbH filed Critical Elesta Relays GmbH
Publication of EP2606317A1 publication Critical patent/EP2606317A1/de
Withdrawn legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/14—Measuring arrangements characterised by the use of optical techniques for measuring distance or clearance between spaced objects or spaced apertures
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q7/00—Arrangements for handling work specially combined with or arranged in, or specially adapted for use in connection with, machine tools, e.g. for conveying, loading, positioning, discharging, sorting
    • B23Q7/06—Arrangements for handling work specially combined with or arranged in, or specially adapted for use in connection with, machine tools, e.g. for conveying, loading, positioning, discharging, sorting by means of pushers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
    • G01D5/244—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing characteristics of pulses or pulse trains; generating pulses or pulse trains
    • G01D5/24428—Error prevention
    • G01D5/24433—Error prevention by mechanical means
    • G01D5/24442—Error prevention by mechanical means by mounting means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
    • G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
    • G01D5/347—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells using displacement encoding scales
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
    • G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
    • G01D5/347—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells using displacement encoding scales
    • G01D5/34707—Scales; Discs, e.g. fixation, fabrication, compensation
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
    • G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
    • G01D5/347—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells using displacement encoding scales
    • G01D5/3473—Circular or rotary encoders
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F30/00—Individual radiation-sensitive semiconductor devices in which radiation controls the flow of current through the devices, e.g. photodetectors
    • H10F30/20—Individual radiation-sensitive semiconductor devices in which radiation controls the flow of current through the devices, e.g. photodetectors the devices having potential barriers, e.g. phototransistors
    • H10F30/21—Individual radiation-sensitive semiconductor devices in which radiation controls the flow of current through the devices, e.g. photodetectors the devices having potential barriers, e.g. phototransistors the devices being sensitive to infrared, visible or ultraviolet radiation
    • H10F30/22—Individual radiation-sensitive semiconductor devices in which radiation controls the flow of current through the devices, e.g. photodetectors the devices having potential barriers, e.g. phototransistors the devices being sensitive to infrared, visible or ultraviolet radiation the devices having only one potential barrier, e.g. photodiodes
    • H10F30/223—Individual radiation-sensitive semiconductor devices in which radiation controls the flow of current through the devices, e.g. photodetectors the devices having potential barriers, e.g. phototransistors the devices being sensitive to infrared, visible or ultraviolet radiation the devices having only one potential barrier, e.g. photodiodes the potential barrier being a PIN barrier
    • H10F30/2235—Individual radiation-sensitive semiconductor devices in which radiation controls the flow of current through the devices, e.g. photodetectors the devices having potential barriers, e.g. phototransistors the devices being sensitive to infrared, visible or ultraviolet radiation the devices having only one potential barrier, e.g. photodiodes the potential barrier being a PIN barrier the devices comprising Group IV amorphous materials
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F77/00—Constructional details of devices covered by this subclass
    • H10F77/50—Encapsulations or containers

Definitions

  • a substrate plate is provided with a plurality of light-receiving elements and then divided into smaller units (substrates). This dicing can be done very accurately, e.g. by sawing the substrate plate. This results in a defined position of the light receiving elements relative to the edge of the substrates, ie the place where the division has taken place.
  • the sensor head holder is formed with a first structural element which positively cooperates with the sensor head, when the sensor head is connected to the sensor head holder, wherein it is preferably a (preferably continuous) opening in the first structural element, and
  • the position measuring device is characterized in that the displacement means for moving the sensor head are formed by a motor, which is in operative connection with the sensor head.
  • the optical elements 27, 33 are designed as focusing lenses or mirrors, which reflect incident light in bundled fashion onto the sensor head 11. According to the embodiment shown, the optical elements 27, 33 have the shape of a circular half-cylinder.
  • the first track 25 serves the
  • a number of dashes on the code disk of 360 to 3000 and in the case of an encoder with a case diameter of about 6 mm would correspond to a number of bars from 64 to 380 (a bar may be defined, for example, by an optical element or a division).
  • the light source 21 e.g. an LED
  • a spacer element 75 keeps the light source 21 at a distance from the glass substrate 19, so that an air gap 77 is provided between the light aperture or aperture 49.
  • the air gap 77 serves to reduce the internal reflection present in the substrate 19, and thus to achieve better utilization of the light energy.
  • the rear side of the LED light source 21 can be contacted by means of an electrically conductive adhesive 79 (FIG. 4e).
  • the sensor region is preferably coated with a protective layer 93, preferably a SiO 2 layer (FIG. 3 d).
  • a protective layer 93 preferably a SiO 2 layer
  • the contact points 89,91 are each left by etching or in the lift-off - method.
  • FIGS. 3 and 4 serve exclusively to illustrate the production process and that the layer thicknesses shown do not coincide with the actual layer thicknesses.
  • Said tool is advantageously made of a (preferably circular cylindrical) workpiece having a diameter which is 0.02 to 0.2 mm larger than the diameter of the shaft 157.
  • the workpiece can then be placed in several places e.g. be provided by flattening with flat sides which form the flat portions 271 in the preparation of the through hole 272.
  • 1 to 10, in particular 2 to 5 and particularly preferably 3 channels 275 are provided.
  • FIG. 10 shows an arrangement of the light receiver elements 23 for a 3-channel encoder (channel A, channel B, channel Z or index), wherein the main axis 45 of the emitted light beam passing through the center of the light source coincides with the center line 43 of the material measure (FIG , 2) covers (see Fig. 1).
  • the sensor area 29 which cooperates with the first track 25 of the scale
  • the light receiver elements for the incremental signal and in the sensor area 35 (which cooperates with the second track 31 of the scale) those for the index signal.
  • the "stud bumps" can be arranged on the uppermost metal layer (see Figure 51 in Figure 3a) by ultrasonic welding, for example , so when using a conductive
  • the width of the light source 21 respectively. the aperture 49 selected between 60 and 150%, preferably 10% to 120% of the width of a division. If the width of the aperture 49 is too small, too little light energy is transmitted. If the width of the aperture 49 is too large, then the width of the light spot is too large, so that the signals are too shallow to be reliably evaluated.
  • a further embodiment of the invention is therefore that means are provided which allow movement of the sensor head relative to the material measure internally in the sensor, so that at the touch of a button determination of the position value is possible without the machine must be set in motion.
  • This is achieved by the sensor head or the carrier (for example a swivel arm 182) on which the sensor head is arranged being rotated by approximately 3 °.
  • This can be done for example with a motor 185 and an eccentric 184, which preferably engages positively in a slot 183 of the pivot arm 182.
  • a motor with lever and excenter actuators of different types can be used.
  • the signals generated by this movement (channel A, channel B and M code) can then be used to determine the position values.
  • Figs. 15 to 17 show a position measuring device.
  • Codewheel 155 between the inside of the housing 143 (or the inside of said part of the housing) and the sensor head 11 or the circuit board 251 arranged.
  • Fabric code disc on a metal shaft is not so easy considering the requirements for concentricity and interference fit. Excessive interference can cause the plastic disc to break. This can also only after a certain period of time, that is, for example, several

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Optical Transform (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Microelectronics & Electronic Packaging (AREA)
EP11748877.5A 2010-08-19 2011-08-19 Positionsmessvorrichtung Withdrawn EP2606317A1 (de)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
CH01342/10A CH703663A1 (de) 2010-08-19 2010-08-19 Positionsmessvorrichtung, insbesondere Encoder.
CH01341/10A CH703647A1 (de) 2010-08-19 2010-08-19 Positionsmessvorrichtung und Verfahren zu deren Herstellung.
CH01343/10A CH703664A1 (de) 2010-08-20 2010-08-20 Positionsmessvorrichtung, insbesondere Encoder, mit Sensorkopfhalter.
PCT/CH2011/000189 WO2012022004A1 (de) 2010-08-19 2011-08-19 Positionsmessvorrichtung

Publications (1)

Publication Number Publication Date
EP2606317A1 true EP2606317A1 (de) 2013-06-26

Family

ID=45604666

Family Applications (4)

Application Number Title Priority Date Filing Date
EP11748877.5A Withdrawn EP2606317A1 (de) 2010-08-19 2011-08-19 Positionsmessvorrichtung
EP11748875.9A Not-in-force EP2606315B1 (de) 2010-08-19 2011-08-19 Positionsmessvorrichtung
EP11748876.7A Withdrawn EP2606316A1 (de) 2010-08-19 2011-08-19 Sensorkopfhalter
EP11748874.2A Withdrawn EP2606314A2 (de) 2010-08-19 2011-08-19 Positionsmessvorrichtung und verfahren zur ermittlung einer absoluten position

Family Applications After (3)

Application Number Title Priority Date Filing Date
EP11748875.9A Not-in-force EP2606315B1 (de) 2010-08-19 2011-08-19 Positionsmessvorrichtung
EP11748876.7A Withdrawn EP2606316A1 (de) 2010-08-19 2011-08-19 Sensorkopfhalter
EP11748874.2A Withdrawn EP2606314A2 (de) 2010-08-19 2011-08-19 Positionsmessvorrichtung und verfahren zur ermittlung einer absoluten position

Country Status (5)

Country Link
US (4) US20130148132A1 (cg-RX-API-DMAC7.html)
EP (4) EP2606317A1 (cg-RX-API-DMAC7.html)
JP (4) JP2013535695A (cg-RX-API-DMAC7.html)
CN (4) CN103080700A (cg-RX-API-DMAC7.html)
WO (4) WO2012022001A2 (cg-RX-API-DMAC7.html)

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JP6071881B2 (ja) 2017-02-01
WO2012022004A1 (de) 2012-02-23
JP2013539019A (ja) 2013-10-17
WO2012022002A1 (de) 2012-02-23
JP2013534318A (ja) 2013-09-02
CN103119402A (zh) 2013-05-22
CN103080700A (zh) 2013-05-01
CN103210283A (zh) 2013-07-17
EP2606315B1 (de) 2019-01-09
JP2013535695A (ja) 2013-09-12
WO2012022001A3 (de) 2012-07-05
WO2012022003A1 (de) 2012-02-23
CN103119402B (zh) 2016-08-03
US8902434B2 (en) 2014-12-02
WO2012022001A2 (de) 2012-02-23
US20130155420A1 (en) 2013-06-20
US20130146755A1 (en) 2013-06-13
US8982361B2 (en) 2015-03-17
US20130148132A1 (en) 2013-06-13
CN103168212A (zh) 2013-06-19
US20130148131A1 (en) 2013-06-13
EP2606314A2 (de) 2013-06-26
CN103168212B (zh) 2016-03-09
EP2606316A1 (de) 2013-06-26
JP2013534319A (ja) 2013-09-02
EP2606315A1 (de) 2013-06-26

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