EP2565902A3 - Elektronenstrahl-Belichtungssystem - Google Patents

Elektronenstrahl-Belichtungssystem Download PDF

Info

Publication number
EP2565902A3
EP2565902A3 EP12188366.4A EP12188366A EP2565902A3 EP 2565902 A3 EP2565902 A3 EP 2565902A3 EP 12188366 A EP12188366 A EP 12188366A EP 2565902 A3 EP2565902 A3 EP 2565902A3
Authority
EP
European Patent Office
Prior art keywords
beamlet
focusing
beamlets
array
optical system
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP12188366.4A
Other languages
English (en)
French (fr)
Other versions
EP2565902A2 (de
Inventor
Marco Jan-Jaco Wieland
Bert Jan Kampherbeek
Alexander Hendrik Vincent Van Veen
Pieter Kruit
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mapper Lithopraphy IP BV
Original Assignee
Mapper Lithopraphy IP BV
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mapper Lithopraphy IP BV filed Critical Mapper Lithopraphy IP BV
Publication of EP2565902A2 publication Critical patent/EP2565902A2/de
Publication of EP2565902A3 publication Critical patent/EP2565902A3/de
Withdrawn legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/302—Controlling tubes by external information, e.g. program control
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J3/00—Details of electron-optical or ion-optical arrangements common to two or more basic types of discharge tubes or lamps
    • H01J3/02—Electron guns
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y10/00—Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y40/00—Manufacture or treatment of nanostructures
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/06—Electron sources; Electron guns
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/304—Controlling tubes by information coming from the objects or from the beam, e.g. correction signals
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/317—Electron-beam or ion-beam tubes for localised treatment of objects for changing properties of the objects or for applying thin layers thereon, e.g. for ion implantation
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/317—Electron-beam or ion-beam tubes for localised treatment of objects for changing properties of the objects or for applying thin layers thereon, e.g. for ion implantation
    • H01J37/3174—Particle-beam lithography, e.g. electron beam lithography
    • H01J37/3177—Multi-beam, e.g. fly's eye, comb probe
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/04—Means for controlling the discharge
    • H01J2237/043—Beam blanking
    • H01J2237/0435—Multi-aperture
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/06—Sources
    • H01J2237/063—Electron sources
    • H01J2237/06308—Thermionic sources
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/06—Sources
    • H01J2237/063—Electron sources
    • H01J2237/06375—Arrangement of electrodes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/30—Electron or ion beam tubes for processing objects
    • H01J2237/304—Controlling tubes
    • H01J2237/30433—System calibration
    • H01J2237/3045—Deflection calibration

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Analytical Chemistry (AREA)
  • Nanotechnology (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Mathematical Physics (AREA)
  • Theoretical Computer Science (AREA)
  • Electron Beam Exposure (AREA)
  • X-Ray Techniques (AREA)
EP12188366.4A 2002-10-30 2003-10-30 Elektronenstrahl-Belichtungssystem Withdrawn EP2565902A3 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US42275802P 2002-10-30 2002-10-30
EP03809889.3A EP1556881B1 (de) 2002-10-30 2003-10-30 Elektronenstrahlbelichtungssystem

Related Parent Applications (2)

Application Number Title Priority Date Filing Date
EP03809889.3 Division 2003-10-30
EP03809889.3A Division EP1556881B1 (de) 2002-10-30 2003-10-30 Elektronenstrahlbelichtungssystem

Publications (2)

Publication Number Publication Date
EP2565902A2 EP2565902A2 (de) 2013-03-06
EP2565902A3 true EP2565902A3 (de) 2017-07-05

Family

ID=32230384

Family Applications (5)

Application Number Title Priority Date Filing Date
EP03809889.3A Expired - Lifetime EP1556881B1 (de) 2002-10-30 2003-10-30 Elektronenstrahlbelichtungssystem
EP12188366.4A Withdrawn EP2565902A3 (de) 2002-10-30 2003-10-30 Elektronenstrahl-Belichtungssystem
EP13179104.8A Expired - Lifetime EP2701178B1 (de) 2002-10-30 2003-10-30 Elektronenstrahlbelichtungssystem
EP20150683.9A Withdrawn EP3671804A1 (de) 2002-10-30 2003-10-30 Elektronenstrahlbelichtungssystem
EP12179910.0A Withdrawn EP2523207A3 (de) 2002-10-30 2003-10-30 Elektronenstrahlgenerator

Family Applications Before (1)

Application Number Title Priority Date Filing Date
EP03809889.3A Expired - Lifetime EP1556881B1 (de) 2002-10-30 2003-10-30 Elektronenstrahlbelichtungssystem

Family Applications After (3)

Application Number Title Priority Date Filing Date
EP13179104.8A Expired - Lifetime EP2701178B1 (de) 2002-10-30 2003-10-30 Elektronenstrahlbelichtungssystem
EP20150683.9A Withdrawn EP3671804A1 (de) 2002-10-30 2003-10-30 Elektronenstrahlbelichtungssystem
EP12179910.0A Withdrawn EP2523207A3 (de) 2002-10-30 2003-10-30 Elektronenstrahlgenerator

Country Status (7)

Country Link
US (5) US6897458B2 (de)
EP (5) EP1556881B1 (de)
JP (2) JP5053514B2 (de)
KR (5) KR101077098B1 (de)
CN (11) CN101414129B (de)
AU (1) AU2003276779A1 (de)
WO (1) WO2004040614A2 (de)

Families Citing this family (148)

* Cited by examiner, † Cited by third party
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US8890094B2 (en) 2008-02-26 2014-11-18 Mapper Lithography Ip B.V. Projection lens arrangement
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