EP2477775A1 - Formatkreissäge mit direktantrieb - Google Patents
Formatkreissäge mit direktantriebInfo
- Publication number
- EP2477775A1 EP2477775A1 EP10754338A EP10754338A EP2477775A1 EP 2477775 A1 EP2477775 A1 EP 2477775A1 EP 10754338 A EP10754338 A EP 10754338A EP 10754338 A EP10754338 A EP 10754338A EP 2477775 A1 EP2477775 A1 EP 2477775A1
- Authority
- EP
- European Patent Office
- Prior art keywords
- circular saw
- saw blade
- axis
- unit
- rotation
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23D—PLANING; SLOTTING; SHEARING; BROACHING; SAWING; FILING; SCRAPING; LIKE OPERATIONS FOR WORKING METAL BY REMOVING MATERIAL, NOT OTHERWISE PROVIDED FOR
- B23D45/00—Sawing machines or sawing devices with circular saw blades or with friction saw discs
- B23D45/06—Sawing machines or sawing devices with circular saw blades or with friction saw discs with a circular saw blade arranged underneath a stationary work-table
- B23D45/068—Sawing machines or sawing devices with circular saw blades or with friction saw discs with a circular saw blade arranged underneath a stationary work-table the saw blade being adjustable according to depth or angle of cut
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23D—PLANING; SLOTTING; SHEARING; BROACHING; SAWING; FILING; SCRAPING; LIKE OPERATIONS FOR WORKING METAL BY REMOVING MATERIAL, NOT OTHERWISE PROVIDED FOR
- B23D45/00—Sawing machines or sawing devices with circular saw blades or with friction saw discs
- B23D45/06—Sawing machines or sawing devices with circular saw blades or with friction saw discs with a circular saw blade arranged underneath a stationary work-table
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23D—PLANING; SLOTTING; SHEARING; BROACHING; SAWING; FILING; SCRAPING; LIKE OPERATIONS FOR WORKING METAL BY REMOVING MATERIAL, NOT OTHERWISE PROVIDED FOR
- B23D47/00—Sawing machines or sawing devices working with circular saw blades, characterised only by constructional features of particular parts
- B23D47/12—Sawing machines or sawing devices working with circular saw blades, characterised only by constructional features of particular parts of drives for circular saw blades
Definitions
- the invention relates to a sliding table saw, comprising a support surface for receiving a workpiece, a circular saw unit with a circular saw blade mounting unit rotatably mounted about an axis below the support surface, in which a circular saw blade can be clamped in a circular saw blade plane and a drive unit which is so coupled to the circular saw blade clamping unit in that a rotational movement of the drive unit is transferable to the circular saw blade tension unit, a pivot bearing which pivotally supports the circular saw unit about a pivot axis which is perpendicular to the axis of rotation and parallel to the circular saw blade plane, an adjusting device which moves the circular saw blade clamping unit between a first, lowered position and a second, raised position in which the circular saw blade clamping unit is closer to the support surface than in the second, lowered position, adjusted.
- a further aspect of the invention is a method for driving a circular saw blade of a sliding table saw, comprising the steps of: providing a circular saw blade clamping unit rotatably mounted about an axis of rotation, which is designed to make the circular saw blade torsionally stiff around the circular saw blade To tighten the axis of rotation, transmitting a torque from a drive unit to the circular saw blade clamping unit.
- Sliding table saws of this type are used to tailor large or small workpieces true to size and precisely at right angles or at an angle.
- Sliding table saws for this purpose typically have a bearing surface which is aligned horizontally and on which a workpiece to be cut can be deposited. Through this bearing surface, a circular saw blade can be passed from the bottom to the top partially through a circular saw blade slot to cut the workpiece.
- the circular saw blade in its height by which it protrudes above the support surface can be adjusted by the circular saw blade tensioning unit, in which the circular saw blade tensioned is, can be moved in a vertical direction.
- Sliding table saws of the aforementioned construction are known with specific further developments, for example from EP 0 651 690 B1 and EP 7 1 16 638 B1.
- Another panel saw designed as a panel saw is known from EP 1 990 1 19 A1 and DE 102007021410 B3.
- the circular saw blade storage or clamping unit is typically pivotally mounted in sliding table saws in such a way that the circular saw blade level can be pivoted in an angle different from 90 ° to the workpiece support surface. In this case, it is desirable for the pivoting to be possible by at least 45 °.
- the V-ribbed belt can be axially displaced between two or more gear ratios in order to be able to adapt the cutting speed to different circular saw blade diameters or workpiece materials. Due to the high power to be transferred and the pollution caused by sawdust during operation, the V-ribbed belt is subject to high wear and has to be renewed with intensive use of the sliding table saw at regular intervals. A tearing of the V-ribbed belt regularly leads to a breakage of the cut, whereby the workpiece being processed can be irreversibly damaged. It is therefore a first object of the invention to provide a sliding table saw which avoids these disadvantages.
- Sliding table saws are also subject to high competitive pressure as capital goods, which results in the requirement of economical construction and manufacturing with a view to cost-effective production of the sliding table saw. It is therefore a further object of the invention to provide a design and manufacturing technology, but at the same time also maintenance technically improved sliding table saw.
- the drive unit is a drive motor with an axis of rotation which is coupled directly to the circular saw blade clamping unit.
- a direct coupling between the drive motor and the circular saw blade tensioning unit is understood to mean a coupling which does not require a V-ribbed belt and does not use any other traction mechanism transmission for transmitting torque.
- the direct coupling can, for example, in one direct flange connection between the output shaft of the motor and the saw blade clamping unit.
- the axis of rotation of the drive motor and the axis of rotation of the circular saw blade are parallel to one another, and in particular can be embodied in a coaxial position relative to one another.
- Another type of direct coupling can be realized for example via an angle gear, in which the axis of rotation of the drive motor and the axis of rotation of the circular saw blade are at an angle to each other, in particular can be perpendicular to each other.
- gearwheel gear can be interposed, such as planetary gear, bevel gear, axially parallel gear like helical gear or the like.
- a structurally simpler structure is achieved by the direct drive, which reduces the manufacturing cost of the sliding table saw.
- the direct drive that a V-ribbed belt is not required for torque transmission, thereby avoiding wear-related disadvantages of the V-ribbed belt.
- this is not achieved by replacing the V-ribbed belt with another traction mechanism transmission. Rather, the concept of the V-ribbed belt fundamentally avoids the concept of a direct drive.
- the axis of rotation has at least one common point with the axis of rotation.
- the rotation axis and the rotation axis intersect or are coaxial with each other.
- This embodiment can be realized for example by means of an angular gear, whereby the rotation and rotation axis have an intersection.
- the axis of rotation of the drive motor is coaxial or angled to the axis of rotation of the circular saw blade clamping unit. This embodiment enables a compact direct flanging of the drive unit to the circular saw blade clamping unit.
- the drive motor is torque-rigid mechanically and directly coupled via a flange with the circular saw blade tensioning unit gearless.
- this training is suitable for use of a drive motor, the speed of which is adjustable in at least two stages, preferably a plurality of steps or infinitely variable to make an adjustment of the cutting speed depending on the circular saw blade diameter used and the workpiece materials to be cut.
- the drive motor is mechanically rigidly coupled directly to the circular saw blade clamping unit via an angular gear.
- This embodiment makes it possible to arrange the drive motor so that its often in the direction of rotation long extension does not come to rest in a horizontal position, but in this inclined, in particular vertical orientation.
- the drive motor can thereby be arranged, for example, with a vertical axis of rotation below the bearing surface and in this case extend from the point of torque transmission into the axis of rotation of the circular saw blade by means of the angular gear downwards.
- the drive motor is a fluid motor, in particular a hydraulically or pneumatically operated fluid motor.
- a fluid motor By means of a fluid motor, the design and dimension of the drive motor can be adapted and reduced in a particularly favorable manner to the existing space conditions. At the same time allows a fluid motor speed control and thus is particularly suitable for direct coupling.
- the fluid motor may, for example, an axial piston motor, a radial piston motor, a gear motor or a turbine of axial design, radial design or an axial-radial design or vice versa.
- the saw unit for pivoting by means of the pivot bearing or adjustment by means of the adjusting device is pivotally mounted in a rocker frame and that fluid ducts which at least partially extend as channels within struts of the rocker frame, fluid supplied to the fluid motor and / or fluid discharged from the fluid motor.
- This embodiment advantageously uses a maintenance-free oscillating rack mounting, in which the saw unit is attached to the end of a rocker, which is pivotable at its other end about a swing axis.
- the swing frame can be realized with a swing frame and the pivoting of the circular saw unit about a horizontal, perpendicular to the axis of rotation pivot axis to thereby bring the circular saw blade in a required for miter cuts pivoted position, ie the swing arm frame is part of the pivot bearing.
- the adjusting device and the pivot bearing by means of a respective rocker frame, wherein in such a combined embodiment it is particularly preferred if the rocker frame, which is part of the adjusting device, by the rocker frame, which is part of the pivot bearing, mitverschwenkt to ensure that the up and down movement of the circular saw blade by the adjusting device is always parallel to the saw blade plane.
- the embodiment is further characterized in that the fluid channels, which supply fluid to the fluid motor and remove fluid flowing back from the fluid motor, are at least partially guided in channels which run within the struts of the rocker frame.
- fluid is supplied to the fluid motor via three or more fluid hoses.
- a fluid motor needs at least one supply hose and at least one discharge hose and, if a liquid medium is used as the drive fluid, a leakage hose which discharges leaked medium from the fluid motor.
- two feed hoses and two discharge hoses are required.
- relatively large tube cross-sections must be provided, resulting in very stiff hoses in the operating condition.
- This disadvantage is counteracted by the preferred embodiment by using three or more fluid tubes of correspondingly reduced cross-section. This larger number of fluid tubes with smaller cross-section offers less resistance to the desired pivoting and adjusting movements of the circular saw unit and must absorb lower voltages during pivoting or adjustment than a few tubes with a large cross section.
- the saw unit for pivoting by means of the pivot bearing or adjustment by means of the adjusting device is pivotally mounted in a swing frame and the fluid motor via a fluid hose fluid is supplied, which extends at least partially, preferably a total of coaxial with the pivot axis of the rocker frame.
- the saw unit for pivoting by means of the pivot bearing or adjustment by means of the adjusting device is pivotally mounted in a rocker frame and the fluid motor via a fluid hose fluid is supplied, which is pivotally mounted in a connection screw, preferably a Verschraubungs- pivot axis which is coaxial with the pivot axis of the rocker frame.
- This configuration makes it possible to carry out a movement even when not coaxial with the pivot axis or a pivot axis used for the adjustment, without having to work against increased resistance through the hoses.
- this embodiment can be combined with the aforementioned embodiment in order to achieve both a pivoting movement and an adjusting movement as low as possible resistance and a low load through the hoses.
- the fluid motor is a Schrägachsen axial piston pump with a housing having a first housing portion and a second, relative to the first angled housing portion and the first housing portion extending in the direction of the axis of rotation and coaxial with the axis of rotation and the second housing section is angled relative to the first housing section about an axis lying parallel to the pivot axis such that its end opposite the first section is further away from the support surface than its end facing the first housing section.
- An axial piston pump in this design can be designed with an angled housing design and installed in this design in a particularly favorable manner for the purposes and space within a circular saw unit.
- the second housing section may be angled 30 ° or more relative to the first housing section and enters hereby by, in the raised position of the circular saw unit and at the same time in a pivoting for a miter cut position of the circular saw unit much later with the underside of the support surface in contact as would be the case if the fluid motor would be flanged with a purely horizontal extension.
- the axial piston motor can be designed as a bent axis machine with a fixed pivot angle between the drive and pump axis or adjustable pivot angle, thereby also performing a torque and speed adjustment, which would be required for different circular saw blade diameter, for example.
- the axial piston machine can also be designed as a swashplate machine.
- the drive motor is provided on one side of the circular saw blade plane and a second drive motor on the opposite side of the circular saw blade plane
- a single drive motor instead of a single drive motor, two individual drive motors are used, which are arranged opposite to each other with respect to the circular saw blade clamping unit. Due to the addition of their services, these two drive motors can each be dimensioned correspondingly smaller than a single drive motor
- the circular saw blade clamping unit has a flange on which air guide elements are arranged, which are designed to form a cooling air movement effective for the drive unit when the flange rotates about the axis of rotation.
- an axial air guide along the drive motor can be realized, wherein the air guide elements as radial-axial guide vanes similar to comp Ressor blades can be designed to suck air in the radial direction and to flow in the axial direction of the drive motor.
- cooling of the drive motors can take place by branching off from a suction connection, which serves for chip removal, an air component via a bypass and is supplied to the drive motor as cooling air or by a serial arrangement of the cooling air flow to the drive motors with the suction device a double use of this air promotion takes place.
- Another aspect of the invention is a method of the type mentioned, which is characterized in that the torque is transmitted directly from the drive unit to the circular saw blade tensioning unit, in particular by the drive unit rotates about an axis of rotation which is coaxial with the axis of rotation or the drive unit by means of a Angular gear is coupled to the circular saw blade clamping unit.
- the method can be further developed by the torque is transmitted without the interposition of a traction mechanism, in particular gearless.
- the method is particularly suitable for being carried out on a sliding table saw of the previously described type.
- the advantages and specific embodiments that occur or can be realized in connection with the direct transmission of the torque from the drive unit to the circular saw blade clamping unit, can be realized in analogy to the advantages and design refinements of the sliding table saw and their training in the method according to the invention ,
- Fig. 1 is a partially longitudinal sectional side view of a first embodiment of the invention
- Fig. 2 is a partially cross-sectional front view of the embodiment of FIG. 1;
- Fig. 3 is a view according to FIG. 2 in a pivoted position of the saw unit
- FIG. 4 shows a second embodiment of the invention in a view according to FIG. 2.
- a preferred embodiment of the sliding table saw 1 comprises a supporting surface 10, on the upper side 11 of which a workpiece 100 rests and can be displaced in a cutting direction 101.
- the support surface shown simplified in the figures can be functionally trained, for example, by a linearly mounted and displaceable in the cutting direction trolley and slidably mounted on a trolley Parallelogrammquertisch with stop rail and stop flaps.
- a slot 12 is inserted in a central position, through which a circular saw blade 20 can protrude.
- the circular saw blade 20 is rotatable about an axis of rotation 21 which extends below the top 1 1 of the support surface 10.
- the circular saw blade 20 is clamped by means of a clamping device 31, 32, which clamps the circular saw blade 20 firmly in the region of the axis of rotation 21.
- the clamping device 31, 32 is rotatably mounted about the rotation axis 21 and thus allows the rotation of the circular saw blade to produce the cutting speed at the periphery of the circular saw blade.
- the saw shaft which is arranged within the drive-side clamping flange 32, is connected to an axial-piston hydraulic motor 40 and is interrupted by its removal. driven by a drive shaft.
- the axial piston hydraulic motor 40 has a housing which has a first, horizontally extending housing section 41 and a second housing section 42 angled away at 45 ° thereto.
- the second, angled housing portion 42 is inclined downwards and thus extends away from the support surface 10.
- the hydraulic motor 40 is mounted vertically adjustable by means of a lifting linkage 50 and thus enables a lowering of the circular saw blade in a low position, in which the upper peripheral portion of the circular saw blade below the top 1 1 of the support surface 10 comes to rest and raising the circular saw blade 20 in a raised Position in which the circular saw blade for performing a cut on the top 1 1 of the support surface 10 protrudes.
- the lifting device 50 is connected by means of an angled frame with a semicircular arc rail 60 and pivotally mounted about the pivot axis formed by this.
- the lifting device 50 can be pivoted together with the fluid motor 40 and the circular saw blade 20 flanged thereto about a pivot axis 73 which extends horizontally along the slot 12 of the support surface 10.
- the circular saw blade 20 can be pivoted from the position shown in Fig. 2 for vertical cuts in the position shown in Fig. 3 for miter cuts.
- the hydraulic motor 40 is supplied with hydraulic oil under high pressure by supply hoses 43 and discharge hoses 44.
- the feed hoses 43 and discharge hoses 44 are resilient and guided in an arc from the lower end face of the hydraulic motor 40 to a port 61 in the rocker frame.
- a respective pressure channel 63, 64 runs within the rocker frame to the pivot bearing axis of the semicircular arc rails 70, 71.
- the pressure channels are connected in this area via corresponding slot channels pressure-tight with hydraulic hoses 81, 82, the in turn connected to a hydraulic pump 80 for generating the pressure and volume flow required by the fluid motor.
- the hoses 43, 44 only have to follow the vertical movement of the circular saw blade 20 made possible by the lifting device 50, but are not deformed by the pivoting movement of the circular saw unit about the pivot axis of the semicircular arc rail 70.
- the axis of rotation 21 of the circular saw blade is coaxial with the axis of rotation 45 of the hydraulic motor 40.
- the hydraulic motor 40 is coupled with its output shaft directly to the saw shaft of the circular saw blade 20, which extends within the clamping device 31, 32.
- On the peripheral surface of the drive-side clamping flange 32 a plurality of air guide elements are arranged, which generate an air flow along the outside of the fluid motor 40 during rotation of the clamping flange 32 and cool it in this way.
- a controlled via a flow sensor forced ventilation via a suction device (not shown) of the sliding table saw is also provided.
- Fig. 4 shows a second embodiment of the sliding table saw according to the invention.
- This embodiment is in terms of a lifting device 150, a rocker frame 160 which is pivotally mounted on a semicircular rail guide 170 about a pivot axis lying in the slot slot 1 12, running in accordance with the previously explained embodiment according to Figures 1 and 3.
- the rocker frame 160 can be pivoted by means of an actuator 190, it being understood that a similar actuator can also be provided in the embodiment shown in FIGS. 1 to 3.
- the second embodiment has an electric drive motor 140 whose axis of rotation 145 is perpendicular to the axis of rotation 121 of the circular saw blade.
- the rotation axis 145 and the rotation axis 121 intersect at one point.
- the rotation axis 145 of the electric motor 140 is parallel to the stroke direction, which performs the lifting device 150 to adjust the circular saw blade from a lowered to a raised position and vice versa.
- the output shaft of the electric motor 140 is coupled to an angle gear 146, which translates the rotational movement of the output shaft by 90 ° from the vertical orientation shown in Fig. 4 in a horizontal orientation and the output shaft of the angular gear 146 is connected to the clamping flange 131, 132 for the circular saw blade 120 coupled.
- the drive-side clamping flange 132 is provided on its outer circumference with air guide elements, which allow cooling air to flow along the outside of the electric motor 140 when the clamping flange 132 rotates.
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Sawing (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE202009012444U DE202009012444U1 (de) | 2009-09-16 | 2009-09-16 | Formatkreissäge mit Direktantrieb |
PCT/EP2010/063644 WO2011033038A1 (de) | 2009-09-16 | 2010-09-16 | Formatkreissäge mit direktantrieb |
Publications (1)
Publication Number | Publication Date |
---|---|
EP2477775A1 true EP2477775A1 (de) | 2012-07-25 |
Family
ID=43301368
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP10754338A Withdrawn EP2477775A1 (de) | 2009-09-16 | 2010-09-16 | Formatkreissäge mit direktantrieb |
Country Status (6)
Country | Link |
---|---|
EP (1) | EP2477775A1 (zh) |
KR (1) | KR20120079467A (zh) |
CN (1) | CN102639272A (zh) |
BR (1) | BR112012005759A2 (zh) |
DE (1) | DE202009012444U1 (zh) |
WO (1) | WO2011033038A1 (zh) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US9409793B2 (en) | 2014-01-14 | 2016-08-09 | Az Electronic Materials (Luxembourg) S.A.R.L. | Spin coatable metallic hard mask compositions and processes thereof |
Families Citing this family (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN106827087B (zh) * | 2016-12-23 | 2018-12-25 | 重庆坤秀门窗有限公司 | 门板切割锯 |
KR200484727Y1 (ko) | 2017-03-15 | 2017-11-15 | 우리샤링 (주) | 절단 장치 |
CN207189852U (zh) | 2017-06-05 | 2018-04-06 | 米沃奇电动工具公司 | 台锯 |
CN107553602B (zh) * | 2017-10-23 | 2020-05-19 | 青岛昊润木业设备有限公司 | 一种电锯直接驱动装置 |
CN108515590B (zh) * | 2018-03-28 | 2020-08-18 | 重庆市健隆家具有限公司 | 板材加工用装置 |
CN111331745A (zh) * | 2020-04-13 | 2020-06-26 | 上海银汀创新不锈钢发展有限公司 | 一种用于高档茶几加工的石料切割设备 |
CN113670392B (zh) * | 2021-07-28 | 2024-05-14 | 余姚市银环流量仪表有限公司 | 一种涡街流量计 |
CN114260981B (zh) * | 2021-11-26 | 2023-09-26 | 嘉美瑞智能家居科技东台有限公司 | 一种板材加工够用角度可调式易维护切割装置 |
Family Cites Families (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3356111A (en) * | 1961-10-31 | 1967-12-05 | Rockwell Mfg Co | Power tool improvements |
DE1901181U (de) * | 1964-05-19 | 1964-09-24 | Hans Zachskorn | Universaltischkreissaege. |
US3670788A (en) * | 1970-05-22 | 1972-06-20 | Henry M Pollak | Arbor saw |
FR2431901A1 (fr) * | 1978-07-28 | 1980-02-22 | Fabr Indles Centre | Perfectionnements aux tronconneuses a fraise-scie |
DE9306681U1 (de) | 1993-05-04 | 1994-09-15 | Altendorf Wilhelm Gmbh Co Kg | Doppelseitiger Gehrungsanschlag für Werkzeugmaschinen, insbesondere Formatkreissägen |
DE9416468U1 (de) | 1994-10-13 | 1995-02-02 | Wilhelm Altendorf GmbH & Co KG, 32429 Minden | Werkstück-Vorschubwagen einer Werkzeugmaschine, insbesondere einer Kreissäge |
DE29519336U1 (de) * | 1995-12-06 | 1996-04-04 | Lindenmüller, Helge, 86949 Windach | Vorrichtung zur Besäumung von Brettern und Balken aus Holz oder ähnlichen Werkstoffen, für mobile Bandsägewerke |
DE29901333U1 (de) * | 1999-01-27 | 1999-04-22 | Rath, Johann, 74906 Bad Rappenau | Zugsäge |
CN2719487Y (zh) * | 2004-01-20 | 2005-08-24 | 圣杰机器工业股份有限公司 | 具有防护结构的锯切机台 |
US7287453B2 (en) * | 2005-03-10 | 2007-10-30 | Sheng-Hsien Kuo | Woodworking table with an auxiliary device |
US20060288836A1 (en) * | 2005-06-28 | 2006-12-28 | Positec Power Tools (Suzhou) Co., Ltd. | Bench-top power tool |
DE102007021410B3 (de) | 2007-05-04 | 2008-06-19 | Keusch, Siegfried, Dipl.-Ing. | Horizontale Plattensäge |
-
2009
- 2009-09-16 DE DE202009012444U patent/DE202009012444U1/de not_active Expired - Lifetime
-
2010
- 2010-09-16 KR KR1020127008834A patent/KR20120079467A/ko not_active Application Discontinuation
- 2010-09-16 BR BR112012005759A patent/BR112012005759A2/pt not_active Application Discontinuation
- 2010-09-16 WO PCT/EP2010/063644 patent/WO2011033038A1/de active Application Filing
- 2010-09-16 CN CN2010800412232A patent/CN102639272A/zh active Pending
- 2010-09-16 EP EP10754338A patent/EP2477775A1/de not_active Withdrawn
Non-Patent Citations (1)
Title |
---|
See references of WO2011033038A1 * |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US9409793B2 (en) | 2014-01-14 | 2016-08-09 | Az Electronic Materials (Luxembourg) S.A.R.L. | Spin coatable metallic hard mask compositions and processes thereof |
Also Published As
Publication number | Publication date |
---|---|
DE202009012444U1 (de) | 2011-02-10 |
BR112012005759A2 (pt) | 2016-02-16 |
KR20120079467A (ko) | 2012-07-12 |
CN102639272A (zh) | 2012-08-15 |
WO2011033038A1 (de) | 2011-03-24 |
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Legal Events
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PUAI | Public reference made under article 153(3) epc to a published international application that has entered the european phase |
Free format text: ORIGINAL CODE: 0009012 |
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17P | Request for examination filed |
Effective date: 20120416 |
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