EP2415906A4 - DEVICE FOR PRODUCING FLUORESCENT - Google Patents

DEVICE FOR PRODUCING FLUORESCENT

Info

Publication number
EP2415906A4
EP2415906A4 EP10758387A EP10758387A EP2415906A4 EP 2415906 A4 EP2415906 A4 EP 2415906A4 EP 10758387 A EP10758387 A EP 10758387A EP 10758387 A EP10758387 A EP 10758387A EP 2415906 A4 EP2415906 A4 EP 2415906A4
Authority
EP
European Patent Office
Prior art keywords
generation device
gas generation
fluorine gas
fluorine
generation
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP10758387A
Other languages
German (de)
English (en)
French (fr)
Other versions
EP2415906A1 (en
Inventor
Isamu Mori
Akifumi Yao
Tatsuo Miyazaki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Central Glass Co Ltd
Original Assignee
Central Glass Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Central Glass Co Ltd filed Critical Central Glass Co Ltd
Publication of EP2415906A1 publication Critical patent/EP2415906A1/en
Publication of EP2415906A4 publication Critical patent/EP2415906A4/en
Withdrawn legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25B—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES FOR THE PRODUCTION OF COMPOUNDS OR NON-METALS; APPARATUS THEREFOR
    • C25B1/00—Electrolytic production of inorganic compounds or non-metals
    • C25B1/01—Products
    • C25B1/24—Halogens or compounds thereof
    • C25B1/245—Fluorine; Compounds thereof
    • C—CHEMISTRY; METALLURGY
    • C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25B—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES FOR THE PRODUCTION OF COMPOUNDS OR NON-METALS; APPARATUS THEREFOR
    • C25B15/00—Operating or servicing cells
    • C25B15/02—Process control or regulation
    • C25B15/021—Process control or regulation of heating or cooling
    • C—CHEMISTRY; METALLURGY
    • C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25B—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES FOR THE PRODUCTION OF COMPOUNDS OR NON-METALS; APPARATUS THEREFOR
    • C25B15/00—Operating or servicing cells
    • C25B15/08—Supplying or removing reactants or electrolytes; Regeneration of electrolytes
    • C—CHEMISTRY; METALLURGY
    • C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25B—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES FOR THE PRODUCTION OF COMPOUNDS OR NON-METALS; APPARATUS THEREFOR
    • C25B9/00—Cells or assemblies of cells; Constructional parts of cells; Assemblies of constructional parts, e.g. electrode-diaphragm assemblies; Process-related cell features

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • Automation & Control Theory (AREA)
  • Electrolytic Production Of Non-Metals, Compounds, Apparatuses Therefor (AREA)
EP10758387A 2009-04-01 2010-03-04 DEVICE FOR PRODUCING FLUORESCENT Withdrawn EP2415906A4 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2009089444A JP5572981B2 (ja) 2009-04-01 2009-04-01 フッ素ガス生成装置
PCT/JP2010/054061 WO2010113611A1 (ja) 2009-04-01 2010-03-04 フッ素ガス生成装置

Publications (2)

Publication Number Publication Date
EP2415906A1 EP2415906A1 (en) 2012-02-08
EP2415906A4 true EP2415906A4 (en) 2012-08-29

Family

ID=42827911

Family Applications (1)

Application Number Title Priority Date Filing Date
EP10758387A Withdrawn EP2415906A4 (en) 2009-04-01 2010-03-04 DEVICE FOR PRODUCING FLUORESCENT

Country Status (5)

Country Link
EP (1) EP2415906A4 (ja)
JP (1) JP5572981B2 (ja)
KR (1) KR20110129914A (ja)
CN (1) CN102369311A (ja)
WO (1) WO2010113611A1 (ja)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101198350B1 (ko) 2011-04-05 2012-11-08 (주)원익머트리얼즈 고순도 헥사플루오르프로필렌 정제용기
JP5757168B2 (ja) * 2011-06-10 2015-07-29 セントラル硝子株式会社 フッ素ガス生成装置
CN117160179B (zh) * 2023-10-26 2024-02-13 福建德尔科技股份有限公司 一种电子级三氟化氯制备用原材料纯化设备

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04143288A (ja) * 1990-10-03 1992-05-18 Kawamura Inst Of Chem Res 電解フッ素化方法およびその装置
WO2003046244A2 (en) * 2001-11-26 2003-06-05 Fluorine On Call, Ltd. Generation, distribution, and use of molecular fluorine within a fabrication facility
US20040099537A1 (en) * 2002-11-08 2004-05-27 Toyo Tanso Co., Ltd. Fluorine gas generator and method of electrolytic bath liquid level control
US20040151656A1 (en) * 2001-11-26 2004-08-05 Siegele Stephen H. Modular molecular halogen gas generation system

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6843258B2 (en) * 2000-12-19 2005-01-18 Applied Materials, Inc. On-site cleaning gas generation for process chamber cleaning
JP3855081B2 (ja) * 2002-07-01 2006-12-06 株式会社日立国際電気 フッ素ガスによるクリーニング機構を備えたｃｖｄ装置およびｃｖｄ装置のフッ素ガスによるクリーニング方法
JP3905433B2 (ja) 2002-07-11 2007-04-18 レール・リキード−ソシエテ・アノニム・ア・ディレクトワール・エ・コンセイユ・ドゥ・スールベイランス・プール・レテュード・エ・レクスプロワタシオン・デ・プロセデ・ジョルジュ・クロード フッ素ガス生成装置
JP4624699B2 (ja) * 2004-03-18 2011-02-02 レール・リキード−ソシエテ・アノニム・プール・レテュード・エ・レクスプロワタシオン・デ・プロセデ・ジョルジュ・クロード フッ素ガス生成装置
JP5055484B2 (ja) 2009-01-28 2012-10-24 株式会社メガチップス 撮像システム

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04143288A (ja) * 1990-10-03 1992-05-18 Kawamura Inst Of Chem Res 電解フッ素化方法およびその装置
JP2986885B2 (ja) * 1990-10-03 1999-12-06 財団法人川村理化学研究所 電解フッ素化方法およびその装置
WO2003046244A2 (en) * 2001-11-26 2003-06-05 Fluorine On Call, Ltd. Generation, distribution, and use of molecular fluorine within a fabrication facility
US20040151656A1 (en) * 2001-11-26 2004-08-05 Siegele Stephen H. Modular molecular halogen gas generation system
US20040099537A1 (en) * 2002-11-08 2004-05-27 Toyo Tanso Co., Ltd. Fluorine gas generator and method of electrolytic bath liquid level control

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
See also references of WO2010113611A1 *

Also Published As

Publication number Publication date
JP5572981B2 (ja) 2014-08-20
EP2415906A1 (en) 2012-02-08
KR20110129914A (ko) 2011-12-02
WO2010113611A1 (ja) 2010-10-07
CN102369311A (zh) 2012-03-07
JP2010242127A (ja) 2010-10-28

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Legal Events

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PUAI Public reference made under article 153(3) epc to a published international application that has entered the european phase

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Effective date: 20111007

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A4 Supplementary search report drawn up and despatched

Effective date: 20120730

RIC1 Information provided on ipc code assigned before grant

Ipc: C25B 1/24 20060101AFI20120724BHEP

Ipc: C25B 15/08 20060101ALI20120724BHEP

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Effective date: 20140626