JP5757168B2 - フッ素ガス生成装置 - Google Patents
フッ素ガス生成装置 Download PDFInfo
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- JP5757168B2 JP5757168B2 JP2011129663A JP2011129663A JP5757168B2 JP 5757168 B2 JP5757168 B2 JP 5757168B2 JP 2011129663 A JP2011129663 A JP 2011129663A JP 2011129663 A JP2011129663 A JP 2011129663A JP 5757168 B2 JP5757168 B2 JP 5757168B2
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- adsorbent
- hydrogen fluoride
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- 239000011737 fluorine Substances 0.000 title claims description 69
- 229910052731 fluorine Inorganic materials 0.000 title claims description 69
- YCKRFDGAMUMZLT-UHFFFAOYSA-N Fluorine atom Chemical compound [F] YCKRFDGAMUMZLT-UHFFFAOYSA-N 0.000 title claims description 68
- 239000007789 gas Substances 0.000 claims description 203
- KRHYYFGTRYWZRS-UHFFFAOYSA-N Fluorane Chemical compound F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 claims description 75
- 229910000040 hydrogen fluoride Inorganic materials 0.000 claims description 74
- 239000003463 adsorbent Substances 0.000 claims description 71
- 238000003756 stirring Methods 0.000 claims description 34
- 238000000746 purification Methods 0.000 claims description 33
- 150000003839 salts Chemical class 0.000 claims description 27
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 claims description 14
- 230000002093 peripheral effect Effects 0.000 claims description 8
- 238000004519 manufacturing process Methods 0.000 claims description 5
- PUZPDOWCWNUUKD-UHFFFAOYSA-M sodium fluoride Chemical compound [F-].[Na+] PUZPDOWCWNUUKD-UHFFFAOYSA-M 0.000 description 38
- 235000013024 sodium fluoride Nutrition 0.000 description 17
- 239000011775 sodium fluoride Substances 0.000 description 17
- 239000008188 pellet Substances 0.000 description 12
- 238000001784 detoxification Methods 0.000 description 9
- 238000000034 method Methods 0.000 description 9
- 238000001179 sorption measurement Methods 0.000 description 9
- 239000002994 raw material Substances 0.000 description 8
- 238000012360 testing method Methods 0.000 description 8
- 239000006227 byproduct Substances 0.000 description 7
- 239000000203 mixture Substances 0.000 description 6
- 239000011698 potassium fluoride Substances 0.000 description 6
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 5
- 229910001873 dinitrogen Inorganic materials 0.000 description 5
- 238000010438 heat treatment Methods 0.000 description 5
- 238000005192 partition Methods 0.000 description 5
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 4
- 239000012159 carrier gas Substances 0.000 description 4
- 238000003795 desorption Methods 0.000 description 4
- 230000006866 deterioration Effects 0.000 description 4
- 238000005868 electrolysis reaction Methods 0.000 description 4
- 238000002156 mixing Methods 0.000 description 4
- 239000002699 waste material Substances 0.000 description 4
- 239000003795 chemical substances by application Substances 0.000 description 3
- 239000003595 mist Substances 0.000 description 3
- 238000012545 processing Methods 0.000 description 3
- 238000010298 pulverizing process Methods 0.000 description 3
- 238000005033 Fourier transform infrared spectroscopy Methods 0.000 description 2
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 2
- 229910000792 Monel Inorganic materials 0.000 description 2
- 229910017855 NH 4 F Inorganic materials 0.000 description 2
- 238000006243 chemical reaction Methods 0.000 description 2
- 230000000052 comparative effect Effects 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 229910052759 nickel Inorganic materials 0.000 description 2
- NROKBHXJSPEDAR-UHFFFAOYSA-M potassium fluoride Chemical compound [F-].[K+] NROKBHXJSPEDAR-UHFFFAOYSA-M 0.000 description 2
- 239000000047 product Substances 0.000 description 2
- 238000007670 refining Methods 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 238000007711 solidification Methods 0.000 description 2
- 230000008023 solidification Effects 0.000 description 2
- -1 stainless steel Chemical class 0.000 description 2
- 239000010935 stainless steel Substances 0.000 description 2
- 229910001220 stainless steel Inorganic materials 0.000 description 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- KEAYESYHFKHZAL-UHFFFAOYSA-N Sodium Chemical compound [Na] KEAYESYHFKHZAL-UHFFFAOYSA-N 0.000 description 1
- 230000000274 adsorptive effect Effects 0.000 description 1
- 229910001515 alkali metal fluoride Inorganic materials 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 230000000903 blocking effect Effects 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 230000015556 catabolic process Effects 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 230000006835 compression Effects 0.000 description 1
- 238000007906 compression Methods 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 238000006731 degradation reaction Methods 0.000 description 1
- 230000002542 deteriorative effect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000007599 discharging Methods 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 238000011049 filling Methods 0.000 description 1
- 150000002222 fluorine compounds Chemical group 0.000 description 1
- 125000001153 fluoro group Chemical group F* 0.000 description 1
- 230000004927 fusion Effects 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 239000011261 inert gas Substances 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- QKCGXXHCELUCKW-UHFFFAOYSA-N n-[4-[4-(dinaphthalen-2-ylamino)phenyl]phenyl]-n-naphthalen-2-ylnaphthalen-2-amine Chemical compound C1=CC=CC2=CC(N(C=3C=CC(=CC=3)C=3C=CC(=CC=3)N(C=3C=C4C=CC=CC4=CC=3)C=3C=C4C=CC=CC4=CC=3)C3=CC4=CC=CC=C4C=C3)=CC=C21 QKCGXXHCELUCKW-UHFFFAOYSA-N 0.000 description 1
- 235000003270 potassium fluoride Nutrition 0.000 description 1
- 239000003507 refrigerant Substances 0.000 description 1
- 230000003252 repetitive effect Effects 0.000 description 1
- 239000012266 salt solution Substances 0.000 description 1
- 229910000104 sodium hydride Inorganic materials 0.000 description 1
- 239000012312 sodium hydride Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 230000009897 systematic effect Effects 0.000 description 1
- 238000011144 upstream manufacturing Methods 0.000 description 1
Images
Classifications
-
- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25B—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES FOR THE PRODUCTION OF COMPOUNDS OR NON-METALS; APPARATUS THEREFOR
- C25B9/00—Cells or assemblies of cells; Constructional parts of cells; Assemblies of constructional parts, e.g. electrode-diaphragm assemblies; Process-related cell features
-
- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25B—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES FOR THE PRODUCTION OF COMPOUNDS OR NON-METALS; APPARATUS THEREFOR
- C25B1/00—Electrolytic production of inorganic compounds or non-metals
- C25B1/01—Products
- C25B1/24—Halogens or compounds thereof
- C25B1/245—Fluorine; Compounds thereof
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
- B01D53/02—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by adsorption, e.g. preparative gas chromatography
- B01D53/04—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by adsorption, e.g. preparative gas chromatography with stationary adsorbents
- B01D53/0407—Constructional details of adsorbing systems
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
- B01D53/34—Chemical or biological purification of waste gases
- B01D53/46—Removing components of defined structure
- B01D53/68—Halogens or halogen compounds
- B01D53/685—Halogens or halogen compounds by treating the gases with solids
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B7/00—Halogens; Halogen acids
- C01B7/19—Fluorine; Hydrogen fluoride
- C01B7/20—Fluorine
-
- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25B—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES FOR THE PRODUCTION OF COMPOUNDS OR NON-METALS; APPARATUS THEREFOR
- C25B15/00—Operating or servicing cells
- C25B15/08—Supplying or removing reactants or electrolytes; Regeneration of electrolytes
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D2253/00—Adsorbents used in seperation treatment of gases and vapours
- B01D2253/10—Inorganic adsorbents
- B01D2253/112—Metals or metal compounds not provided for in B01D2253/104 or B01D2253/106
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D2256/00—Main component in the product gas stream after treatment
- B01D2256/26—Halogens or halogen compounds
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D2257/00—Components to be removed
- B01D2257/20—Halogens or halogen compounds
- B01D2257/204—Inorganic halogen compounds
- B01D2257/2047—Hydrofluoric acid
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Organic Chemistry (AREA)
- Electrochemistry (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Inorganic Chemistry (AREA)
- Analytical Chemistry (AREA)
- General Chemical & Material Sciences (AREA)
- Oil, Petroleum & Natural Gas (AREA)
- Health & Medical Sciences (AREA)
- Biomedical Technology (AREA)
- Environmental & Geological Engineering (AREA)
- Electrolytic Production Of Non-Metals, Compounds, Apparatuses Therefor (AREA)
- Separation Of Gases By Adsorption (AREA)
- Solid-Sorbent Or Filter-Aiding Compositions (AREA)
Description
上記の本発明の実施の形態以外に、他の変形例として、筒状部材31a内から排出される主生ガスの一部を循環させ、再び筒状部材31a内に導入させる循環経路53aを設けるようにしてもよい。
ガスを循環又は拡散させるガス流案内筒を装着した直径200mmφ×長さ1500mmの筒状部材(反応容積量15L)の内部に、メッシュ(網目間隔1mm)で作製したトレイ型容器(吸着剤保持具201)を、筒状部材の内部にガスの流路を確保する空間を形成するようにして5段設置した。なお、トレイ型容器には、角型盆状の形状のものを使用し、容器の高さ20mmに対して、ペレット状のフッ化ナトリウム(NaFペレット)の嵩が50%となるように充填した。なお、ガス流案内筒およびトレイ型容器はステンレス製のものを使用した。
筒状部材内に、攪拌羽根及びガス流案内筒を設置しない以外は実施例1と同様な実験条件で精製能力試験を行った。
1 電解槽
2 フッ素ガス供給系
3 副生ガス供給系
4 外部装置
5 原料供給系
7 陽極
8 陰極
11a 第1気室
12a 第2気室
15 第1メイン通路
17 第1ポンプ
20 精製装置
30 第2メイン通路
31 第2ポンプ
51a 主生ガス導入口
52a 主生ガス導出口
201 吸着剤保持具
202 攪拌羽根
203 ガス流案内筒
205 吸着剤
Claims (4)
- フッ化水素を含む溶融塩中のフッ化水素を電気分解することによって、フッ素ガスを生成するフッ素ガス生成装置であって、
前記フッ素ガス生成装置は、
フッ化水素を含む溶融塩からなる電解浴中でフッ化水素を電解することによって陽極側にフッ素ガスを主成分とする主生ガスを発生させると共に、陰極側に水素ガスを主成分とする副生ガスを発生させる電解槽と、
前記主生ガスに混入したフッ化水素を吸着剤によって除去する精製装置と、を備え、
前記精製装置は、
前記主生ガスを流通させる筒状部材と、
前記筒状部材に前記主生ガスを導入するガス導入口と、
前記筒状部材から前記主生ガスを導出するガス導出口と、
前記筒状部材を流通する前記主生ガスの流路を確保する空間を形成するように配置された吸着剤保持具と、
前記ガス導入口から流入した前記主生ガスを攪拌するための攪拌手段と、
前記主生ガスを前記筒状部材内の空間に循環又は拡散させるためのガス流案内筒と、を有することを特徴とするフッ素ガス生成装置。 - 前記ガス流案内筒が、両端面が開口した筒形状であり、前記筒状部材の内周面に沿うように設けられたことを特徴とする請求項1に記載のフッ素ガス生成装置。
- 前記攪拌手段が、前記ガス導入口から流入する前記主生ガスの流入方向において、前記ガス導入口と前記吸着剤保持具の間に位置していることを特徴とする請求項1又は請求項2に記載のフッ素ガス生成装置。
- 前記筒状部材内から排出される前記主生ガスの一部を循環させ、再び前記筒状部材内に導入させる循環経路を設けたことを特徴とする請求項1乃至請求項3の何れかに記載のフッ素ガス生成装置。
Priority Applications (6)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2011129663A JP5757168B2 (ja) | 2011-06-10 | 2011-06-10 | フッ素ガス生成装置 |
US14/112,850 US9194050B2 (en) | 2011-06-10 | 2012-05-17 | Fluorine gas generator |
CN201280028631.3A CN103597122A (zh) | 2011-06-10 | 2012-05-17 | 氟气生成装置 |
KR1020137033044A KR20140013074A (ko) | 2011-06-10 | 2012-05-17 | 불소 가스 생성 장치 |
PCT/JP2012/062592 WO2012169330A1 (ja) | 2011-06-10 | 2012-05-17 | フッ素ガス生成装置 |
EP12797054.9A EP2719798A4 (en) | 2011-06-10 | 2012-05-17 | FLUOR GAS GENERATOR |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2011129663A JP5757168B2 (ja) | 2011-06-10 | 2011-06-10 | フッ素ガス生成装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2012255195A JP2012255195A (ja) | 2012-12-27 |
JP5757168B2 true JP5757168B2 (ja) | 2015-07-29 |
Family
ID=47295899
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2011129663A Active JP5757168B2 (ja) | 2011-06-10 | 2011-06-10 | フッ素ガス生成装置 |
Country Status (6)
Country | Link |
---|---|
US (1) | US9194050B2 (ja) |
EP (1) | EP2719798A4 (ja) |
JP (1) | JP5757168B2 (ja) |
KR (1) | KR20140013074A (ja) |
CN (1) | CN103597122A (ja) |
WO (1) | WO2012169330A1 (ja) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR20230152693A (ko) | 2021-03-02 | 2023-11-03 | 가부시끼가이샤 레조낙 | 불화수소 가스 제거 장치 및 불화수소 가스의 제거 방법 |
KR20230152694A (ko) | 2021-03-02 | 2023-11-03 | 가부시끼가이샤 레조낙 | 불화수소 가스 제거 장치 및 불화수소 가스의 제거 방법 |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR20220065832A (ko) * | 2019-12-27 | 2022-05-20 | 쇼와 덴코 가부시키가이샤 | 불소 가스의 제조 방법 및 불소 가스 제조 장치 |
CN113880049B (zh) * | 2021-11-01 | 2023-05-26 | 衢州市鼎盛化工科技有限公司 | 一种回收氟化氢的方法及系统 |
Family Cites Families (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS62171728A (ja) | 1986-01-22 | 1987-07-28 | Babcock Hitachi Kk | ガス吸収分離装置 |
JPH09276649A (ja) | 1996-04-12 | 1997-10-28 | Ishikawajima Harima Heavy Ind Co Ltd | 排ガス処理装置 |
US8147590B2 (en) * | 2000-08-17 | 2012-04-03 | Bayne Carew | Fluid filter separator and method |
JP2002102649A (ja) | 2000-09-28 | 2002-04-09 | Kashiyama Kogyo Kk | ガス処理方法及びガス処理装置 |
US6468321B2 (en) * | 2001-01-10 | 2002-10-22 | John W. Kinsel | Blade and skirt assembly for directional gas cleaning and drying system |
JP3905433B2 (ja) * | 2002-07-11 | 2007-04-18 | レール・リキード−ソシエテ・アノニム・ア・ディレクトワール・エ・コンセイユ・ドゥ・スールベイランス・プール・レテュード・エ・レクスプロワタシオン・デ・プロセデ・ジョルジュ・クロード | フッ素ガス生成装置 |
JP2007190544A (ja) | 2005-11-15 | 2007-08-02 | Chiba Univ | 硫酸ピッチの処理方法およびその装置ならびに中和処理装置 |
JP5238299B2 (ja) | 2008-03-10 | 2013-07-17 | 東洋炭素株式会社 | フッ素ガス発生装置 |
JP5659491B2 (ja) * | 2009-01-30 | 2015-01-28 | セントラル硝子株式会社 | フッ素ガス発生装置を含む半導体製造設備 |
JP5572981B2 (ja) * | 2009-04-01 | 2014-08-20 | セントラル硝子株式会社 | フッ素ガス生成装置 |
JP2011017077A (ja) * | 2009-06-12 | 2011-01-27 | Central Glass Co Ltd | フッ素ガス生成装置 |
-
2011
- 2011-06-10 JP JP2011129663A patent/JP5757168B2/ja active Active
-
2012
- 2012-05-17 WO PCT/JP2012/062592 patent/WO2012169330A1/ja active Application Filing
- 2012-05-17 US US14/112,850 patent/US9194050B2/en not_active Expired - Fee Related
- 2012-05-17 KR KR1020137033044A patent/KR20140013074A/ko not_active Application Discontinuation
- 2012-05-17 CN CN201280028631.3A patent/CN103597122A/zh active Pending
- 2012-05-17 EP EP12797054.9A patent/EP2719798A4/en not_active Withdrawn
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR20230152693A (ko) | 2021-03-02 | 2023-11-03 | 가부시끼가이샤 레조낙 | 불화수소 가스 제거 장치 및 불화수소 가스의 제거 방법 |
KR20230152694A (ko) | 2021-03-02 | 2023-11-03 | 가부시끼가이샤 레조낙 | 불화수소 가스 제거 장치 및 불화수소 가스의 제거 방법 |
Also Published As
Publication number | Publication date |
---|---|
KR20140013074A (ko) | 2014-02-04 |
US9194050B2 (en) | 2015-11-24 |
WO2012169330A1 (ja) | 2012-12-13 |
EP2719798A4 (en) | 2015-03-11 |
EP2719798A1 (en) | 2014-04-16 |
JP2012255195A (ja) | 2012-12-27 |
CN103597122A (zh) | 2014-02-19 |
US20140083844A1 (en) | 2014-03-27 |
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