EP2415906A4 - Fluorine gas generation device - Google Patents

Fluorine gas generation device

Info

Publication number
EP2415906A4
EP2415906A4 EP10758387A EP10758387A EP2415906A4 EP 2415906 A4 EP2415906 A4 EP 2415906A4 EP 10758387 A EP10758387 A EP 10758387A EP 10758387 A EP10758387 A EP 10758387A EP 2415906 A4 EP2415906 A4 EP 2415906A4
Authority
EP
European Patent Office
Prior art keywords
generation device
gas generation
fluorine gas
fluorine
generation
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP10758387A
Other languages
German (de)
French (fr)
Other versions
EP2415906A1 (en
Inventor
Isamu Mori
Akifumi Yao
Tatsuo Miyazaki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Central Glass Co Ltd
Original Assignee
Central Glass Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Central Glass Co Ltd filed Critical Central Glass Co Ltd
Publication of EP2415906A1 publication Critical patent/EP2415906A1/en
Publication of EP2415906A4 publication Critical patent/EP2415906A4/en
Withdrawn legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25B—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES FOR THE PRODUCTION OF COMPOUNDS OR NON-METALS; APPARATUS THEREFOR
    • C25B1/00—Electrolytic production of inorganic compounds or non-metals
    • C25B1/01—Products
    • C25B1/24—Halogens or compounds thereof
    • C25B1/245—Fluorine; Compounds thereof
    • C—CHEMISTRY; METALLURGY
    • C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25B—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES FOR THE PRODUCTION OF COMPOUNDS OR NON-METALS; APPARATUS THEREFOR
    • C25B15/00—Operating or servicing cells
    • C25B15/02—Process control or regulation
    • C25B15/021—Process control or regulation of heating or cooling
    • C—CHEMISTRY; METALLURGY
    • C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25B—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES FOR THE PRODUCTION OF COMPOUNDS OR NON-METALS; APPARATUS THEREFOR
    • C25B15/00—Operating or servicing cells
    • C25B15/08—Supplying or removing reactants or electrolytes; Regeneration of electrolytes
    • C—CHEMISTRY; METALLURGY
    • C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25B—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES FOR THE PRODUCTION OF COMPOUNDS OR NON-METALS; APPARATUS THEREFOR
    • C25B9/00—Cells or assemblies of cells; Constructional parts of cells; Assemblies of constructional parts, e.g. electrode-diaphragm assemblies; Process-related cell features

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • Automation & Control Theory (AREA)
  • Electrolytic Production Of Non-Metals, Compounds, Apparatuses Therefor (AREA)
EP10758387A 2009-04-01 2010-03-04 Fluorine gas generation device Withdrawn EP2415906A4 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2009089444A JP5572981B2 (en) 2009-04-01 2009-04-01 Fluorine gas generator
PCT/JP2010/054061 WO2010113611A1 (en) 2009-04-01 2010-03-04 Fluorine gas generation device

Publications (2)

Publication Number Publication Date
EP2415906A1 EP2415906A1 (en) 2012-02-08
EP2415906A4 true EP2415906A4 (en) 2012-08-29

Family

ID=42827911

Family Applications (1)

Application Number Title Priority Date Filing Date
EP10758387A Withdrawn EP2415906A4 (en) 2009-04-01 2010-03-04 Fluorine gas generation device

Country Status (5)

Country Link
EP (1) EP2415906A4 (en)
JP (1) JP5572981B2 (en)
KR (1) KR20110129914A (en)
CN (1) CN102369311A (en)
WO (1) WO2010113611A1 (en)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101198350B1 (en) 2011-04-05 2012-11-08 (주)원익머트리얼즈 Purifying Cold trap for High Purity HexaFluoroPropylen
JP5757168B2 (en) * 2011-06-10 2015-07-29 セントラル硝子株式会社 Fluorine gas generator
CN117160179B (en) * 2023-10-26 2024-02-13 福建德尔科技股份有限公司 Raw material purification equipment for preparing electronic grade chlorine trifluoride

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04143288A (en) * 1990-10-03 1992-05-18 Kawamura Inst Of Chem Res Method and device for electrolytic fluorinating
WO2003046244A2 (en) * 2001-11-26 2003-06-05 Fluorine On Call, Ltd. Generation, distribution, and use of molecular fluorine within a fabrication facility
US20040099537A1 (en) * 2002-11-08 2004-05-27 Toyo Tanso Co., Ltd. Fluorine gas generator and method of electrolytic bath liquid level control
US20040151656A1 (en) * 2001-11-26 2004-08-05 Siegele Stephen H. Modular molecular halogen gas generation system

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6843258B2 (en) * 2000-12-19 2005-01-18 Applied Materials, Inc. On-site cleaning gas generation for process chamber cleaning
JP3855081B2 (en) * 2002-07-01 2006-12-06 株式会社日立国際電気 CVD apparatus equipped with fluorine gas cleaning mechanism and method of cleaning CVD apparatus with fluorine gas
JP3905433B2 (en) 2002-07-11 2007-04-18 レール・リキード−ソシエテ・アノニム・ア・ディレクトワール・エ・コンセイユ・ドゥ・スールベイランス・プール・レテュード・エ・レクスプロワタシオン・デ・プロセデ・ジョルジュ・クロード Fluorine gas generator
JP4624699B2 (en) * 2004-03-18 2011-02-02 レール・リキード−ソシエテ・アノニム・プール・レテュード・エ・レクスプロワタシオン・デ・プロセデ・ジョルジュ・クロード Fluorine gas generator
JP5055484B2 (en) 2009-01-28 2012-10-24 株式会社メガチップス Imaging system

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04143288A (en) * 1990-10-03 1992-05-18 Kawamura Inst Of Chem Res Method and device for electrolytic fluorinating
JP2986885B2 (en) * 1990-10-03 1999-12-06 財団法人川村理化学研究所 Electrolytic fluorination method and apparatus
WO2003046244A2 (en) * 2001-11-26 2003-06-05 Fluorine On Call, Ltd. Generation, distribution, and use of molecular fluorine within a fabrication facility
US20040151656A1 (en) * 2001-11-26 2004-08-05 Siegele Stephen H. Modular molecular halogen gas generation system
US20040099537A1 (en) * 2002-11-08 2004-05-27 Toyo Tanso Co., Ltd. Fluorine gas generator and method of electrolytic bath liquid level control

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
See also references of WO2010113611A1 *

Also Published As

Publication number Publication date
WO2010113611A1 (en) 2010-10-07
EP2415906A1 (en) 2012-02-08
KR20110129914A (en) 2011-12-02
CN102369311A (en) 2012-03-07
JP5572981B2 (en) 2014-08-20
JP2010242127A (en) 2010-10-28

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Legal Events

Date Code Title Description
PUAI Public reference made under article 153(3) epc to a published international application that has entered the european phase

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17P Request for examination filed

Effective date: 20111007

AK Designated contracting states

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Designated state(s): AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO SE SI SK SM TR

DAX Request for extension of the european patent (deleted)
A4 Supplementary search report drawn up and despatched

Effective date: 20120730

RIC1 Information provided on ipc code assigned before grant

Ipc: C25B 1/24 20060101AFI20120724BHEP

Ipc: C25B 15/08 20060101ALI20120724BHEP

Ipc: C25B 9/00 20060101ALI20120724BHEP

STAA Information on the status of an ep patent application or granted ep patent

Free format text: STATUS: THE APPLICATION HAS BEEN WITHDRAWN

18W Application withdrawn

Effective date: 20140626