EP2193538B1 - Anode à rayons x à dissipation thermique améliorée - Google Patents
Anode à rayons x à dissipation thermique améliorée Download PDFInfo
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- EP2193538B1 EP2193538B1 EP08799932A EP08799932A EP2193538B1 EP 2193538 B1 EP2193538 B1 EP 2193538B1 EP 08799932 A EP08799932 A EP 08799932A EP 08799932 A EP08799932 A EP 08799932A EP 2193538 B1 EP2193538 B1 EP 2193538B1
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- diamond
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- strength
- ray anode
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- 229910002480 Cu-O Inorganic materials 0.000 description 1
- 229910017945 Cu—Ti Inorganic materials 0.000 description 1
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- 230000009471 action Effects 0.000 description 1
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Images
Classifications
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- C—CHEMISTRY; METALLURGY
- C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
- C22C—ALLOYS
- C22C26/00—Alloys containing diamond or cubic or wurtzitic boron nitride, fullerenes or carbon nanotubes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J35/00—X-ray tubes
- H01J35/02—Details
- H01J35/04—Electrodes ; Mutual position thereof; Constructional adaptations therefor
- H01J35/08—Anodes; Anti cathodes
- H01J35/10—Rotary anodes; Arrangements for rotating anodes; Cooling rotary anodes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2235/00—X-ray tubes
- H01J2235/08—Targets (anodes) and X-ray converters
- H01J2235/081—Target material
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2235/00—X-ray tubes
- H01J2235/08—Targets (anodes) and X-ray converters
- H01J2235/083—Bonding or fixing with the support or substrate
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2235/00—X-ray tubes
- H01J2235/08—Targets (anodes) and X-ray converters
- H01J2235/086—Target geometry
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2235/00—X-ray tubes
- H01J2235/12—Cooling
- H01J2235/1204—Cooling of the anode
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2235/00—X-ray tubes
- H01J2235/12—Cooling
- H01J2235/1225—Cooling characterised by method
- H01J2235/1291—Thermal conductivity
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2235/00—X-ray tubes
- H01J2235/12—Cooling
- H01J2235/1225—Cooling characterised by method
- H01J2235/1291—Thermal conductivity
- H01J2235/1295—Contact between conducting bodies
Definitions
- the invention relates to an X-ray anode, which consists of a X-rays by bombardment with focused electrons generating coating, which is connected to a carrier body.
- the carrier body comprises a strength-giving region of a material with a strength at 500 ° C greater than 100 MPa.
- the overwhelming majority of the radiation sources used today in X-ray computed tomography are X-ray rotary anodes in which the energy of the electron beam introduced in the line focus is distributed to a ring, the so-called focal path, by rotation of the anode at high speed.
- the supplied during recording energy of up to several megajoules is initially largely stored in the X-ray anode and delivered especially in the pause time between shots by radiation in rotary anodes with Gleitrillenlager also by heat conduction into the camp to the surrounding cooling medium.
- Rotary anodes consist of a X-radiation by the bombardment with focused electrons generating coating, for example of a tungsten-rhenium alloy, on a support body, such as a disc of a Molybdenum-based material is applied.
- a molybdenum base material customary for this application is TZM with the composition Mo-0.5% by weight Ti-0.08% by weight Zr-0.04% by weight CI, as is known from, for example, US Pat EP 0 874 385 A1 evident.
- the anode can be soldered to increase the heat storage capacity and heat radiation on the back of the metal disc a graphite body.
- the thermal conductivities of W-10Gew.% Re, TZM and graphite are at about 85, 125 and 135 W / m ⁇ K, but decrease significantly with increasing anode temperature.
- the anode In a new generation of X-ray tubes, the so-called rotary tubes, the anode is firmly connected to the floor as a whole with a rotating tube and actively cooled at its rear. The energy balance of the anode is dominated by the heat dissipation into the cooling medium. The heat storage plays a minor role.
- the DE 10 2005 039 188 B4 describes an X-ray tube with a cathode and an anode made of a first material, wherein the anode is provided on its side facing away from the cathode at least partially with a heat conducting element for removing heat, which is made of a second material having a higher heat conductivity than the first material, wherein the second material has a thermal conductivity of at least 500 W / mK and the second material is made of titanium doped graphite.
- the DE 10 2004 003 370 A1 describes a high-performance anode plate for a directly cooled rotary tube, which consists of a high-temperature resistant material, such as tungsten, molybdenum or a composite of both materials, wherein formed in the Brennfteckbahn the bottom of the anode plate and / or in this another highly thermally conductive material or it is appropriate that results in an improved heat dissipation and thus a lower temperature gradient within this material range.
- a material with high thermal conductivity while copper is mentioned.
- the heat sink has a metallic matrix containing diamond particles.
- the metallic matrix is inserted in a dense metallic shell.
- the JP 2002 093355 A describes an anode for an X-ray tube, in which a heat-dissipating layer is arranged between the focal track and the main body. This layer may also comprise Cu-Ti with diamond admixtures.
- the X-ray anode consists of a coating and a carrier body, wherein the carrier body comprises a region of a diamond-metal composite material in addition to a strength-giving region.
- the diamond-metal composite consists of diamond grains surrounded by binder phase (s).
- the binder phase (s) consists of a binder metal based on copper, silver, aluminum and alloys of these materials, and optionally up to 20% by volume of carbides.
- Diamond-metal composite material wherein the proportion of diamond to the top is highest and decreases in the direction of maximum heat flow.
- a minimization of the bond stresses, caused by different thermal expansion coefficients of the materials used can be achieved.
- diamond powder having a wide grain size spectrum can be processed. Preferred particle sizes are in the range of 50 to 400 ⁇ m, ideally 100 to 250 ⁇ m.
- cheaper synthetic diamonds can also be processed accordingly.
- the volume fraction of the diamond grains is 40 to 90 vol.%, That of the binder phase (s) 10 to 60 vol.%.
- a diamond content of 40 to 90 vol.% Ensures that the bond stresses are reliably reduced to an uncritical level for the application.
- Particularly advantageous diamond and binder phase contents are 50 to 70% by volume and 30 to 50% by volume.
- the binder metal consists of 80 to 100 At.% Of at least one matrix metal from the group Cu, Ag, Al, and preferably 0 to 20 at.% Of a metal having a solubility at room temperature in the matrix metal less than 1 At.% And 0 to 1 At. % of a metal with a solubility at room temperature in the matrix metal greater than 1 At%., Remaining impurities. Alloying elements with a solubility at room temperature in the matrix metal smaller than 1 at.% Reduce the thermal conductivity to a small extent and can therefore be present up to 20 at.%, While alloying elements with a solubility greater than 1 at.% Due to their negative influence on the thermal conductivity with 1 At% are limited.
- Carbide-forming elements have the elements of the group 4b- (Ti, Zr, Hf), 5b- (V, Nb, Ta), 6b (Cr, Mo, W) metals of the periodic table, as well as B and Si proven. Particularly suitable for this purpose are the weak carbide formers Si and B.
- the matrix metal is a carbide-forming element, such as aluminum
- the element forming the carbide phase is also contained in the binder metal.
- the carbide-forming elements which have a solubility of less than 1 at.% In the respective matrix metal. If the solubility is greater, in turn, the thermal conductivity of the binder metal and thus the diamond-metal composite material is reduced.
- Present invention binder metal compositions are 0.005 to 3At% aluminum materials. one or more elements of the group V, Nb, Ta, Ti, Zr Hf, B, Cr, Mo, W and / or with 0.005 to 20 At.% Si.
- these materials with 0.005 to 5 at.% Of one or more elements of the group Zr, Hf and / or 0.005 to 10 at% of one or more elements of the group V, Nb, Ta, Cr, Mo, W and /. or 0.005 to 20 at.% Si.
- Particularly advantageous properties are achieved with Cu-base matrix metals containing from 0.005 to 3 at.% Of one or more elements of the group Ti, Zr, Hf and / or 0.005 to 10 at.% Of one or more elements of the group Mo, W, B, V, Nb, Ta, Cr, and / or 0.005 to 20 At.% B are alloyed.
- binder metals are Ag alloys with 0.1 to 12 At.% Si, and Cu alloys with 0.1 to 14 at.% Boron, balance usual impurities proved.
- a particularly advantageous effect can also be achieved if already coated diamond powders (metallic or carbide coating) are used.
- the support body in addition to the diamond-metal composite material still a strength giving region of a structural material having a strength at 500 ° C of greater than 100 MPa.
- the diamond-metal composite is protected against destructive deformation or crack initiation by centrifugal forces or thermo-mechanical stresses due to the structural rigidity of the structural component. This makes it possible to optimize the diamond-metal composite on the one hand in terms of thermal conductivity, in particular by increasing the proportion of diamond.
- the thermal expansion of the diamond-metal composite material can be adapted to the structural material.
- the functions of the carrier body can be decoupled in terms of structural strength and bursting strength on the one hand and on heat dissipation on the other hand.
- Structural materials according to the invention are Mo, Mo alloys, W, W alloys, W-Cu composite materials, Mo-Cu composite materials, particle-reinforced Cu and particle-reinforced Al alloys.
- Particularly advantageous molybdenum alloys are TZM (Mo-0.5% by weight, titanium-0.08% by weight, zirconium-0.04% by weight C) and MHC (Mo-1.2% by weight Hf-O) , 08 wt.% C).
- the area of the diamond-metal composite material can connect directly to the covering. This is possible and useful if the temperature on the backing surface can be lowered by the diamond-metal composite so far that no material damage, such as melting of the binder phase (s) of the diamond-metal composite occur. If this is not the case, it is advantageous if the strength-giving region consists of a structural material which is dimensionally stable under conditions of use, preferably molybdenum, tungsten or an alloy thereof Metals, between the Diamond-metal composite material and the covering extends.
- the diamond-metal composite material is preferably arranged under that region of the covering in which the heat is generated by the action of the electron beam. For an X-ray rotary anode, this is the annular focal track. This results in preferred embodiments for the area of the Diamond-metal composite, namely those with axially symmetric geometry, such as a disc or a ring.
- the cross section is preferably approximately rectangular or trapezoidal.
- a further heat-dissipating region of a highly thermally conductive metal follows, which in the final shaping, especially with regard to attachment of cooling structures with conventional machining processes can be edited shaping.
- highly thermally conductive metals are copper, aluminum, silver and their alloys to mention.
- This heat-dissipating area is again preferably designed as a ring element or as a disk and with the Diamond-metal composite material and / or materially bonded to the strength-giving area.
- Diamond-metal composite material have reduced thermal conductivity. It is particularly advantageous if the thickness of the covering is 0.2 to 0.4 mm or that of the strength-giving area is 0.5 to 4 mm.
- the construction according to the invention of an X-ray anode can be used particularly advantageously in the case of rotating anodes and, in turn, when the rotary anode is used as the actively cooled bottom of a rotary-piston tube.
- the center is formed only from the structural material.
- the region made of the diamond-metal composite material is embedded as a ring-shaped or disc-shaped element in a corresponding recess of the strength-giving region of the carrier body and is thus supported by this with respect to the mechanical loads occurring.
- the structural material on the one hand with the coating, on the other hand materially connected to the diamond-metal composite material.
- the cohesive bonding between the structural component and the diamond-metal composite can advantageously already be carried out in situ during its synthesis in suitable recesses of the strengthening region of the anode body (for example by pressure infiltration or by hot isostatic pressing).
- the composite material can be synthesized on its own and a filler material can be produced therefrom in a suitable form, which is then adhesively bonded to the structural component, for example by soldering or another known joining process.
- the binder metal is bonded to the diamond either via the melt phase or via the solid phase.
- the processes advantageously proceed by means of pressure infiltration. Typical infiltration temperatures are about 100 ° C above the respective melting point of the binder metal. From the reactions with the diamond grain, the carbide phases which surround the diamond grains may then optionally be formed.
- the attachment of the diamond grain to the binder metal is caused by diffusion.
- Suitable methods are, for example, hot pressing or hot isostatic pressing of Diamond-metal powder mixtures.
- the connection is advantageously improved or accelerated by suitable coatings of the diamond grains.
- the contents of filler metals can be reduced orders of magnitude or possibly completely omitted with suitable pretreatment of the diamond grains and choice of consolidation conditions, whereby the high thermal conductivity of the pure binder phase can be largely maintained.
- Combinations of both reaction paths for example passing through the melt phase under pressure for pore-free backfilling of the diamond bed followed by a solid-pressure diffusion phase at lowered temperatures, may also be advantageous, in particular for realizing high diamond fractions of the composite material.
- a diamond bed having a mean grain diameter (determined laser-optically) of 150 ⁇ m was introduced into the resulting recess for the production of the diamond-metal composite material and the ring mold was infiltrated via gas pressure infiltration with Cu alloys of the following compositions: Cu-O, 5At.% B, Cu-2At.% B and Cu-8At.% B.
- diamond powder with a mean grain diameter (determined by laser optics) of 150 .mu.m coated with Nb (layer thickness about 1 .mu.m) was introduced into the ring mold and above that pure Cu was positioned in lumpy form.
- the gas pressure infiltration was carried out in each case under Ar protective gas atmosphere at 1100 ° C with a gas pressure of 2 bar.
- the volume fraction diamond was about 55% for all samples.
- the thermal conductivity of the Cu-diamond composites at 500 ° C was between 290 and 350 W / m.K.
- Diamond-metal composite material in each case a diamond bed with a mean grain diameter (determined by laser optics) of 150 microns introduced and the ring mold infiltrated via gas pressure infiltration with Ag alloys of the following compositions: Ag-0.5At.% Si, Ag-3At.% Si, Ag-11At.% Si and Ag-18At.% Si.
- diamond powder with a mean grain diameter (determined laser-optically) of 150 .mu.m coated with Nb was introduced into the ring mold and above this pure Ag was positioned in lumpy form. Idente experiments were carried out with Cr, Ti and Mo coated powders. The gas pressure infiltration was carried out under Ar protective gas atmosphere at 1000 ° C with a gas pressure of 2 bar. The volume fraction diamond was about 55% for all samples.
- the thermal conductivity of Ag-diamond composites was between 340 and 440 W / mK at 500 ° C.
- Example 2 To set the Al-based binder phase, blanks were prepared according to Example 1.
- a diamond bed having a mean grain diameter (determined laser-optically) of 150 ⁇ m was introduced into the depression and the ring mold was infiltrated by gas pressure infiltration with Al materials of the following compositions: Al, Al-3At.% Si, Al-12At.% Si and Al-15At.% Si.
- diamond powder with a mean grain diameter (determined by laser optics) of 150 ⁇ m coated with Nb (layer thickness about 1 ⁇ m) was introduced into the ring mold and above this Rein-Al was positioned in lumpy form. Idente experiments were carried out with Cr, Ti and Mo coated powders.
- the gas pressure infiltration was carried out in each case under Ar protective gas atmosphere at 700 ° C with a gas pressure of 2 bar.
- the volume fraction diamond was about 55% for all samples.
- the thermal conductivity of the Al-diamond composites at RT was between 400 and 450 W / m.K.
- a rotary anode -1- with a structure according to Fig. 1 The strengthening region -4- of the support body -3- was prepared from TZM by the usual powder metallurgical method via powder pressing / sintering / forging and overdriving the precontour (with external diameter 125 mm). Then the X-ray generating coating -2- from W-5Gew.% Re was applied by means of vacuum plasma spraying. From the strength-giving area -4- of the support body -3- below the covering -2- an annular area of 25 mm width was turned out with a residual thickness of the festtechnikssellden range -4- of 1 mm.
- the resulting diamond-metal composite region -5- had a volume fraction of about 55% diamond and an expansion coefficient at RT of 6.5 E -6 / ° K.
- the thermal conductivity of the Cu-diamond composite was 480 W / mK at 22 ° C and 350 W / mK at 500 ° C, respectively.
- a rotary anode -1- with a structure according to Fig. 2 was made as follows.
- the festtechniksstagede range -4- of the support body -3- was made of the high-strength Mo alloy MHC (Mo-1.2Gew.% Hf-0.04 to 0.15 wt.% C), wherein the X-ray generating coating - 2- from W10Gew.% Re was bonded by the usual powder metallurgical method via co-pressing / sintering and composite forging with the strength-giving range -4-.
- the production of the annular groove was carried out as described in Example 4.
- a diamond bed with a mean grain diameter of 150 (determined by laser optics) was introduced into the machined annular groove to produce the region -5- of the diamond-metal composite material.
- an Ag-11 At.% Si alloy was positioned in particulate form.
- the infiltration was carried out under Ar protective gas atmosphere at 1000 ° C with a gas pressure of 2 bar.
- the area -5- was completed on the underside of the rotary anode -1- with an excess of molten metal with a thickness of about 2 mm.
- a thermal conductivity of 590 W / mK at 22 ° C or 420 W / mK at 500 ° C was achieved.
- a rotary anode -1- with a structure according to Fig. 3 was prepared as follows.
- the production of the strength-giving area -4- from TZM (thickness 15 mm, diameter 140 mm) and the application of the coating -2- from W-5Gew.% Re was carried out according to Example 4.
- the strength-giving area -4- of the support body -3- was turned in the diamond-metal composite to be backfilled ring area (outer diameter 125 mm, inner diameter 80 mm) to a residual thickness of the TZM of 1 mm.
- the strength-giving area -4- formed together with an annular washer built thereon a portion of the hot-pressing tool, with a mixture of 50 vol.%. Diamond and 50 vol.% Of high purity copper to form the
- Area -5- was backfilled.
- the diamond grains had a diameter of 150 ⁇ m (measured by laser optics) and were coated with 1 ⁇ m SiC for subsequent attachment of the matrix.
- the high-purity Cu powder likewise had a grain diameter of 150 ⁇ m.
- a cover fill of 3 mm copper powder of the same grain size was used to form the heat-dissipating area -6-. This bed was pre-pressed at room temperature and hot-pressed at a temperature of 900 ° C for 1.5 hours at a pressure of 40 MPa and thereby compressed to 99.8% of the theoretical density. At the same time by diffusion between SiC and Cu, a firm and good thermal conductivity bond of the diamond grains to the copper matrix, and the matrix to the support body -3-.
- the thermal conductivity measured on the copper-diamond composite thus obtained was 490 W / m.K (at 22 ° C).
- a rotary anode -1- with a structure according to Fig. 3 was prepared as follows. The production of the strength-giving area -4-, application of the lining - 2- and production of the ring area was carried out as described in Example 5. A powder bed of a mixture of 70% by volume of diamond and 30% by volume of silver to form the region -5- was made into a compact by means of die pressing in the approximate shape of the twisted ring area of the strength-giving area -4- and inserted into the twisted ring area. The diamond grains had a diameter of 300 ⁇ m and were coated with 3 to 5 ⁇ m SiC. The Ag powder had a grain diameter of 150 ⁇ m.
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- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Powder Metallurgy (AREA)
- Cooling Or The Like Of Semiconductors Or Solid State Devices (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
- Polishing Bodies And Polishing Tools (AREA)
- X-Ray Techniques (AREA)
Abstract
Claims (8)
- Anode (1) à rayons X de génération de rayonnement radiographique, composée d'un revêtement (2) qui génère le rayonnement radiographique par bombardement d'électrons focalisés et qui est assemblé avec un corps porteur (3) qui comprend une zone (4) communiquant une résistance mécanique consistant en une matière à résistance mécanique supérieure à 100 Mpa à 500°C, du groupe formé par Mo, un alliage de Mo, W, un alliage de W, une matière composite W-Cu, une matière composite de Cu, un alliage de Cu renforcé de particules et un alliage d'Al renforcé de particules, où le corps porteur (3) comprend en outre une zone (5) en matière composite métal-diamant à teneurs volumiques de 40 à 90% de grains de diamant et 10 à 80% de phase(s) liante(s), où les teneurs volumiques dans la ou les phase(s) liante(s) sont de 80 à 100% de métal liant à base de cuivre, d'argent, d'aluminium ou d'alliages de ces matières et de facultativement jusqu'à 20% d'au moins un carbure d'un élément du groupe formé par B, Si, et les métaux des colonne 4b, 5b, 6b du système périodique,
caractérisée en ce que le métal liant inclut, lorsque Cu est la base, des teneurs atomiques de 0,005 à 3% d'un ou plusieurs éléments du groupe Ti, Zr, Hf, et/ou 0,005 à 10% d'un ou plusieurs éléments du groupe Mo, W, V, Ta, Nb, Cr et/ou 0,005 à 20%de B, le métal liant inclut, lorsque Ag est la base, des teneurs atomiques de 0,005 à 5% d'un ou plusieurs éléments du groupe Zr, Hf, et/ou 0,005 à 10% d'un ou plusieurs éléments du groupe V, Nb, Ta, Cr, Mo, W, et/ou 0,005 à 20%de Si, et le métal liant inclut, lorsque Al est la base, des teneurs atomiques de 0,005 à 3% d'un ou plusieurs éléments du groupe V, Nb, Ta, Ti, Zr, Hf, Cr, Mo, W, B, et/ou 0,005 à 20%de Si. - Anode (1) à rayons X selon la revendication 1, caractérisée en ce que la zone (5) est disposée au dessous du revêtement (2) dans la zone de charge thermique maximale.
- Anode (1) à rayons X selon la revendication 1 ou 2, caractérisée en ce que les zones (4, 5) sont assemblées par jonction par matériau au moins dans des zones partielles par un processus de coulée en remplissage, d'infiltration sous pression, de soudure par diffusion ou de brasage.
- Anode (1) à rayons X selon la revendication 1, 2 ou 3, caractérisée en ce que l'épaisseur de la zone (4) communiquant une résistance mécanique est de 0,5 à 3 mm.
- Anode (1) à rayons X selon la revendication 4, caractérisée en ce que la zone (4) communiquant une résistance mécanique se compose de Mo à 0,5% en poids de Ti, 0,08% en poids de Zr et 0,01 à 0,06% en poids de C ou de Mo à 1,2% en poids de Hf et 0,04 à 0,15% en poids de C.
- Anode (1) à rayons X selon l'une quelconque des revendications précédentes, caractérisée en ce que le revêtement (2) consiste en un alliage W-Re à 1 à 10% en poids de Re.
- Anode (1) à rayons X selon l'une quelconque des revendications précédentes, caractérisée en ce qu'elle est exécutée sous forme d'anode tournante à symétrie axiale et que la zone (4) communiquant la résistance mécanique et la zone (5) sont disposées selon cette symétrie axiale.
- Anode (1) à rayons X selon la revendication 7, caractérisée en ce que la zone (5) est en forme de bague ou de disque, est positionnée dans une cavité de géométrie correspondante de la zone (4) communiquant la résistance mécanique et est assemblée avec celle-ci par jonction de matériau au moins dans la zone sous- jacente à la trace focale.
Applications Claiming Priority (2)
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AT0058307U AT10598U1 (de) | 2007-09-28 | 2007-09-28 | Ríntgenanode mit verbesserter warmeableitung |
PCT/AT2008/000343 WO2009039545A1 (fr) | 2007-09-28 | 2008-09-25 | Anode à rayons x à dissipation thermique améliorée |
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EP2193538A1 EP2193538A1 (fr) | 2010-06-09 |
EP2193538B1 true EP2193538B1 (fr) | 2011-08-31 |
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US (1) | US8243884B2 (fr) |
EP (1) | EP2193538B1 (fr) |
JP (1) | JP5450421B2 (fr) |
AT (2) | AT10598U1 (fr) |
WO (1) | WO2009039545A1 (fr) |
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DE102011079878A1 (de) * | 2011-07-27 | 2013-01-31 | Siemens Aktiengesellschaft | Röntgenröhre und Verfahren zu deren Herstellung |
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- 2008-09-25 AT AT08799932T patent/ATE522920T1/de active
- 2008-09-25 WO PCT/AT2008/000343 patent/WO2009039545A1/fr active Application Filing
Also Published As
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JP2010541134A (ja) | 2010-12-24 |
AT10598U1 (de) | 2009-06-15 |
JP5450421B2 (ja) | 2014-03-26 |
US20100316193A1 (en) | 2010-12-16 |
US8243884B2 (en) | 2012-08-14 |
ATE522920T1 (de) | 2011-09-15 |
EP2193538A1 (fr) | 2010-06-09 |
WO2009039545A1 (fr) | 2009-04-02 |
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