EP2191699B1 - Hochspannungsisolatoranordnung und ionenbeschleunigeranordnung mit einer solchen hochspannungsisolatoranordnung - Google Patents
Hochspannungsisolatoranordnung und ionenbeschleunigeranordnung mit einer solchen hochspannungsisolatoranordnung Download PDFInfo
- Publication number
- EP2191699B1 EP2191699B1 EP08804107.4A EP08804107A EP2191699B1 EP 2191699 B1 EP2191699 B1 EP 2191699B1 EP 08804107 A EP08804107 A EP 08804107A EP 2191699 B1 EP2191699 B1 EP 2191699B1
- Authority
- EP
- European Patent Office
- Prior art keywords
- gas
- insulator body
- arrangement
- ionization chamber
- high voltage
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Links
- 239000012212 insulator Substances 0.000 title claims description 88
- 150000002500 ions Chemical class 0.000 claims description 15
- 238000009413 insulation Methods 0.000 claims description 10
- 230000005684 electric field Effects 0.000 claims description 7
- 239000011148 porous material Substances 0.000 claims description 7
- 238000011144 upstream manufacturing Methods 0.000 claims description 6
- 239000000919 ceramic Substances 0.000 claims description 3
- 210000002381 plasma Anatomy 0.000 description 19
- 239000004020 conductor Substances 0.000 description 13
- 238000002955 isolation Methods 0.000 description 7
- 238000013461 design Methods 0.000 description 3
- 230000005686 electrostatic field Effects 0.000 description 3
- 239000011796 hollow space material Substances 0.000 description 3
- 238000009434 installation Methods 0.000 description 3
- 230000015572 biosynthetic process Effects 0.000 description 2
- 230000015556 catabolic process Effects 0.000 description 2
- 229910010293 ceramic material Inorganic materials 0.000 description 2
- 230000001419 dependent effect Effects 0.000 description 2
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- 238000012986 modification Methods 0.000 description 2
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- 238000004382 potting Methods 0.000 description 2
- 238000012360 testing method Methods 0.000 description 2
- 102000005717 Myeloma Proteins Human genes 0.000 description 1
- 108010045503 Myeloma Proteins Proteins 0.000 description 1
- 238000009825 accumulation Methods 0.000 description 1
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- 238000000429 assembly Methods 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 230000018109 developmental process Effects 0.000 description 1
- 238000007599 discharging Methods 0.000 description 1
- 238000010891 electric arc Methods 0.000 description 1
- 230000008030 elimination Effects 0.000 description 1
- 238000003379 elimination reaction Methods 0.000 description 1
- 238000005538 encapsulation Methods 0.000 description 1
- 239000000835 fiber Substances 0.000 description 1
- 239000002657 fibrous material Substances 0.000 description 1
- 239000012530 fluid Substances 0.000 description 1
- 239000006260 foam Substances 0.000 description 1
- 239000003574 free electron Substances 0.000 description 1
- 238000003780 insertion Methods 0.000 description 1
- 230000037431 insertion Effects 0.000 description 1
- 239000011810 insulating material Substances 0.000 description 1
- 239000012774 insulation material Substances 0.000 description 1
- 230000007774 longterm Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 230000000149 penetrating effect Effects 0.000 description 1
- 239000004033 plastic Substances 0.000 description 1
- 239000004810 polytetrafluoroethylene Substances 0.000 description 1
- 229920001343 polytetrafluoroethylene Polymers 0.000 description 1
- 230000035939 shock Effects 0.000 description 1
- 238000013022 venting Methods 0.000 description 1
- 229910052724 xenon Inorganic materials 0.000 description 1
- FHNFHKCVQCLJFQ-UHFFFAOYSA-N xenon atom Chemical compound [Xe] FHNFHKCVQCLJFQ-UHFFFAOYSA-N 0.000 description 1
Images
Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01R—ELECTRICALLY-CONDUCTIVE CONNECTIONS; STRUCTURAL ASSOCIATIONS OF A PLURALITY OF MUTUALLY-INSULATED ELECTRICAL CONNECTING ELEMENTS; COUPLING DEVICES; CURRENT COLLECTORS
- H01R13/00—Details of coupling devices of the kinds covered by groups H01R12/70 or H01R24/00 - H01R33/00
- H01R13/46—Bases; Cases
- H01R13/53—Bases or cases for heavy duty; Bases or cases for high voltage with means for preventing corona or arcing
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B03—SEPARATION OF SOLID MATERIALS USING LIQUIDS OR USING PNEUMATIC TABLES OR JIGS; MAGNETIC OR ELECTROSTATIC SEPARATION OF SOLID MATERIALS FROM SOLID MATERIALS OR FLUIDS; SEPARATION BY HIGH-VOLTAGE ELECTRIC FIELDS
- B03C—MAGNETIC OR ELECTROSTATIC SEPARATION OF SOLID MATERIALS FROM SOLID MATERIALS OR FLUIDS; SEPARATION BY HIGH-VOLTAGE ELECTRIC FIELDS
- B03C3/00—Separating dispersed particles from gases or vapour, e.g. air, by electrostatic effect
- B03C3/34—Constructional details or accessories or operation thereof
- B03C3/38—Particle charging or ionising stations, e.g. using electric discharge, radioactive radiation or flames
- B03C3/383—Particle charging or ionising stations, e.g. using electric discharge, radioactive radiation or flames using radiation
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F03—MACHINES OR ENGINES FOR LIQUIDS; WIND, SPRING, OR WEIGHT MOTORS; PRODUCING MECHANICAL POWER OR A REACTIVE PROPULSIVE THRUST, NOT OTHERWISE PROVIDED FOR
- F03H—PRODUCING A REACTIVE PROPULSIVE THRUST, NOT OTHERWISE PROVIDED FOR
- F03H1/00—Using plasma to produce a reactive propulsive thrust
- F03H1/0006—Details applicable to different types of plasma thrusters
- F03H1/0012—Means for supplying the propellant
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J27/00—Ion beam tubes
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
- H05H7/00—Details of devices of the types covered by groups H05H9/00, H05H11/00, H05H13/00
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01R—ELECTRICALLY-CONDUCTIVE CONNECTIONS; STRUCTURAL ASSOCIATIONS OF A PLURALITY OF MUTUALLY-INSULATED ELECTRICAL CONNECTING ELEMENTS; COUPLING DEVICES; CURRENT COLLECTORS
- H01R4/00—Electrically-conductive connections between two or more conductive members in direct contact, i.e. touching one another; Means for effecting or maintaining such contact; Electrically-conductive connections having two or more spaced connecting locations for conductors and using contact members penetrating insulation
- H01R4/70—Insulation of connections
Definitions
- the invention relates to a high voltage insulator assembly and an ion accelerator assembly having such a high voltage insulator assembly.
- the high voltage acts not only between anode and cathode, but also between the anode including the high voltage supply line and other conductive components at a different potential from the anode potential, in particular the ground potential. While separated components are generally sufficiently insulated against flashovers by the vacuum of the surrounding space, in areas in which the working gas occurs, in particular between the anode and a conductive component located upstream of the gas flow in the gas supply line, there is the risk of corona discharges through the corona working gas.
- Corona discharges can also occur in vacuum applications in other areas and situations between two conductive components which are at potentials separated by a high voltage, wherein in an intermediate pressure region (Paschen Hoch) a voltage flashover by existing gas is facilitated. In between the conductive components continuously open paths can then ignite discharges carrying high currents. A plasma arising in the discharges is able to penetrate into small cracks or gaps. By venting against a surrounding vacuum such areas can indeed be made coronafest by lowering the gas pressure below the critical pressure range, but again in areas with changing gas pressure discharges in the intermediate pressure region may occur, which then can pass through the continuously open paths forming vent openings. Furthermore, it can also come below the critical pressure range by free electrons to a shunt, which z. B. is disturbed by Stromwertverbibschept or power consumption or can ignite a vacuum arc discharge.
- a pressure-independent isolation between two components, in particular a high-voltage leading component to ground, can be achieved by completely gas-tight enclosing a component, so that there are no continuously open paths between the two components, eg. B. by potting or embedding a component in an insulator body, but this eliminates for releasable conductor connections as a component. It also shows that over such a long period damage also occurs in such potted high-voltage insulator arrangements, which, in particular when used in spacecraft without the possibility of exchanging components, can result in serious damage.
- a metallic electrode is surrounded by a ceramic tube whose porosity is adjusted so that a fluid, which is typically a transformer oil, but may also be formed by a gas that can pass through the porous tube walls and rinses out any metallic deposits.
- the present invention has for its object to provide a high-voltage insulator arrangement and an ion accelerator arrangement with such a high-voltage insulator arrangement with improved high-voltage insulation.
- an insulator body in the gas supply which contains a gas-permeable, open-porous (open-pored) dielectric, such a corona discharge is prevented and at the same time allows a supply of working gas into the ionization chamber.
- Electrically conductive, in particular metallic, second components of the gas supply including an advantageously provided controllable valve, are arranged inside the gas flow path upstream of the insulator body, whereas the anode electrode and electrically conductive first components located in the flow path of the working gas are arranged downstream of the insulator body.
- the first components form the electrically conductive, in particular metallic, components located downstream of the insulator body downstream
- the second components form the conductive, in particular metallic, components located upstream of the insulator body.
- the gas flow is forced through the gas-permeable insulator body.
- the gas-permeable insulator body can advantageously be inserted into one or more gas-impermeable insulating dielectric bodies and enclosed laterally by them.
- the insertion of the gas-permeable insulator body in the flow path of the gas stream in particular also allows a compact design of the gas supply in the ion accelerator, since only a small distance between the grounded gas supply and lying on high voltage anode assembly must be adhered to interposing the insulator body.
- the distance of the insulator body to conductive parts of the anode assembly and / or the gas supply may be less than the smallest dimension of the insulator body transverse to the main flow direction of the working gas through the insulator body, in particular smaller than the smallest dimension of the insulator body in the main flow direction of the working gas.
- the insulator body is preferably disk-shaped and aligned with the disk surface transversely to the main flow direction of the working gas.
- the insulator body is advantageously arranged on the side of the anode arrangement facing away from the ionization chamber.
- a high voltage insulator assembly having a gas permeable, open porous insulator body between two conductive members on high voltage disconnected potentials, as particularly advantageous between an electrode of an ionization chamber and a conductive member upstream of a gas supply, is commonly used in vacuum applications High voltages and the occurrence of gas in a space between the conductive components, in turn, in an ion accelerator arrangement as a drive in a spacecraft advantageous. It is provided in general application that two conductive components, which are separated by a high voltage different Potentials are isolated by an insulating device against each other and at least part of the insulation device is formed by a gas-permeable, open-porous insulator body.
- the isolation device can in particular surround one of the conductive components on all sides.
- Such a high-voltage insulator arrangement is important if gas can occur in a space interspersed by the electrostatic field of the high voltage between the mutually insulated components. If certain pressure and high-voltage conditions exist, a current path, in particular a DC path, can arise via plasma in the gas. A gas flow is possible between the first subspace on the side of the first conductive component and the second subspace on the side of the second conductive component via the gas-permeable insulator body. Gas Finestrompfade over which flow gas bypassing the gas-permeable insulator body and a direct current path could occur, are not provided.
- Such a Hochnapssisolatoran extract is particularly advantageous for a detachable plug connection between a high voltage source and a z in operation.
- the connector advantageously allows that from the separate production of a high voltage source and one or more drive modules on test measures to installation in a spacecraft, a conductor connection, especially via an insulated cable, between the high voltage source to an electrode of the drive module repeatedly solved and the overall device significantly can be handled easier than a one-time Isolatorverguss a conductor connection.
- the gas-permeable, open-porous insulator body in the insulation device proves overall as a long-term resistant as encapsulated or other non-gas-permeable insulation sheaths of a conductive component.
- This is based on the finding that conventional plastic insulation materials, which are suitable for spacecraft and high voltage applications, often still gas inclusions, in particular between conductors and insulation, in which microplasmas can arise, which can damage the isolation device so far over time, that corona discharges can occur between conductive components.
- the gas-permeable insulator body such possibly existing gas pockets are easier degraded by discharging the gas into the surrounding space.
- the gas-permeable porous insulator body is of particular advantage.
- a plasma can be ignited both inside and outside the cavity of the isolation device, but it is not possible to form a continuous DC path between the conductive components. If the intermediate pressure region left again, which is because of the gas permeability of the porous insulator body inside and outside the cavity of the isolation device takes place, extinguishes an existing plasma or ignites a new one.
- the gas-permeable insulator body may, for. B. be formed by an open-cell foam or preferably by an open-cell ceramic material.
- the mean pore size of the open porous dielectric in the direction of the high voltage caused by the electric field between the components is advantageously less than 100 microns.
- the insulator body is particularly advantageous if the dimensions of the cavities in the gas-permeable insulator body in the direction of the electrical field built up by the high voltage are smaller than the Debye length.
- the flow paths of the gas through the insulator body are advantageously deflected in relation to a straight path between gas inlet side and gas outlet side.
- the gas-permeable insulator body can also be formed by a plurality of partial bodies.
- Fig. 1 is schematically outlined a drive arrangement of an electrostatic ion accelerator for driving a spacecraft.
- the arrangement has, in a conventional and conventional manner, an ionization chamber IK which is open in one longitudinal direction LR to one side at a jet exit opening AO and in the longitudinal direction of the jet exit opening AO contains an anode arrangement AN at the foot of the ionization chamber.
- the ionization chamber is laterally through a chamber wall KW of preferably dielectric, z. B. ceramic material limited and may in particular have an annular cross-section.
- the anode arrangement AN consists in the example outlined of an anode electrode AE and an anode support body AT.
- a cathode arrangement KA is arranged in the region of the jet outlet opening, preferably laterally offset from the jet outlet opening. Between anode electrode AE and cathode assembly KA there is a high voltage which generates in the ionization chamber an electric field pointing in the longitudinal direction LR, through which ions of a working gas ionized in the ionization chamber are accelerated and ejected as plasma jet PB in the longitudinal direction out of the chamber.
- the cathode is at ground potential of the spacecraft containing the drive assembly and the anode assembly is at a high voltage potential HV of a high voltage source.
- a magnetic field is still present, the course of which depends on the design of the drive arrangement and, in a particularly advantageous manner, known per se in the longitudinal direction, contains a plurality of cusp structures with alternating polarity.
- the magnetic field generating magnet assemblies are known per se, for example from the aforementioned prior art, and in Fig. 1 for the sake of clarity not shown.
- a working gas AG such as xenon is stored in a Vörrats as a gas source and fed via a gas supply line GL and a controllable valve GV of the ionization chamber IK, wherein in the example sketched the introduction of the working gas into the ionization chamber of the ionization chamber side facing away from the anode assembly and laterally takes place at this past, which is illustrated by the arrows indicating the flow directions.
- the gas supply line GL and other components of the gas supply are typically at ground potential, so that between these components and the anode assembly AN, the high voltage is effective and during the supply of working gas from the gas source GQ in the Ionisationsuze the risk of corona discharges between the anode assembly and on Ground potential M lying components by the present in an intermediate pressure range working gas.
- the intermediate pressure range is understood to be the pressure range in which a gas discharge can ignite through a gas.
- the intermediate pressure range is u. a. dependent on the high voltage.
- a gas-permeable insulator body IS inserted from an open-porous dielectric, which preferably as open-cell ceramic Body is executed.
- the insulator body is in an advantageous embodiment, as sketched disk-shaped and aligned with the disk plane transverse to the main flow direction through the insulator body between a gas inlet surface EF and a gas outlet surface AF.
- the main flow direction through the insulator body extends in the example outlined parallel to the longitudinal direction LR.
- the disk plane of the insulator body is parallel to the advantageously also disk-shaped components anode electrode and anode support body of the anode assembly.
- a gas-conducting diaphragm arrangement GB is advantageously inserted, which is preferably metallic and is at anode potential with high voltage to ground.
- the insulator body is resistant to breakdown for the high voltage occurring during operation of the drive assembly.
- the high potential potential HV of the anode arrangement and the gas inlet area EF essentially become ground potential M at the gas outlet area AF, so that the gas-filled volumes VM are connected between grounded gas supply line GL and the gas inlet area EF of the isolator.
- VA between the anode assembly and the gas outlet surface AF are substantially field-free and arise in these volumes VM, VA no corona discharges.
- the insulator body advantageously has no open structures continuous in a straight line between the gas inlet surface EF and the gas outlet surface.
- the flow paths of the working gas between the gas inlet surface and gas outlet surface are deflected against a straight course and are formed in particular by interconnected, distributed within the insulator body pore cavities and usually branched.
- the mean dimension of such pore cavities in the direction perpendicular to the gas inlet surface and gas outlet surface is advantageously less than 100 ⁇ m.
- the pore size in the direction parallel to the gas inlet surface and gas outlet surface and thus substantially transversely to the direction of the high voltage resulting field is of less importance, so that insulator body of z.
- fibrous material with fiber direction transverse to the electric field direction can be used.
- the average dimension of such cavities in the direction perpendicular to the gas inlet surface and gas outlet surface is advantageously smaller than the Debye length, which at given operating parameters, in particular at known maximum pressure of the working gas, which on the side of the gas inlet surface EF typically in the order of 30-150 mbar and on the gas outlet side, for example, below 1 mbar results from known formulas.
- the smallest transverse dimension of the insulator body in the disk plane is in an advantageous embodiment greater than the distance of the gas outlet surface of the anode assembly and / or the gas inlet surface of the gas supply line, so that can be realized in the flow direction of the working gas small overall length.
- the insulator body is arranged in an insulator assembly with one or more substantially gas-tight insulator KK, which are mechanically or directly mechanically connected in a schematically illustrated manner with the chamber wall.
- the insulator body IS fills the entire Cross-section of the gas supply in the arrangement of the insulator KK, so that no leading past the insulator body path is given, over which a corona discharge, a plasma propagation or other current-conducting path could arise.
- the plug connection is surrounded by an insulation device IV, which extends in the longitudinal direction LL of the two conductors via their insulating jackets M1, M2 and surrounds the plug connection on all sides.
- an insulation device IV which extends in the longitudinal direction LL of the two conductors via their insulating jackets M1, M2 and surrounds the plug connection on all sides.
- the insulating device is sealed against the cable sheaths M1, M2 so far that at the junctions no plasma possibly arising in the hollow space HO can penetrate and cause a flashover to the ground potential M.
- At least part of the cavity HO surrounding the plug connection wall of the insulating device is formed by a gas-permeable open porous insulator body VK, which with comparable properties as the insulating body IS from the example according to Fig. 1 Gas from the cavity HO can escape into the surrounding vacuum, but prevents that a plasma possibly formed in the cavity to strike through to a ground potential lying outside the cavity conductive component.
- An end cap EK can be placed on the insulating jacket M11 encompassing the end of the insulator body IR and braced in the longitudinal direction against the outer tube AR, if it is ensured that a gas can escape through the insulator body in the surrounding vacuum VA from the cavity to the plug connection and on the other hand, there is no path for a plasma from the cavity to the outside in the vacuum or to a conductive component.
- the Debye length is in arrangements Fig. 2 and Fig. 3 typically larger than in the example below Fig. 1 , so when aligned with the average pore size of the open porous dielectric for applications Fig. 2 or Fig. 3 a larger value is tolerable than in the example below Fig. 1 ,
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- Engineering & Computer Science (AREA)
- Combustion & Propulsion (AREA)
- Plasma & Fusion (AREA)
- Physics & Mathematics (AREA)
- Chemical & Material Sciences (AREA)
- General Health & Medical Sciences (AREA)
- Health & Medical Sciences (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Toxicology (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Plasma Technology (AREA)
- Particle Accelerators (AREA)
- Physical Or Chemical Processes And Apparatus (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE102007044070A DE102007044070A1 (de) | 2007-09-14 | 2007-09-14 | Ionenbeschleunigeranordnung und dafür geeignete Hochspannungsisolatoranordnung |
PCT/EP2008/062142 WO2009037195A1 (de) | 2007-09-14 | 2008-09-12 | Hochspannungsisolatoranordnung und ionenbeschleunigeranordnung mit einer solchen hochspannungsisolatoranordnung |
Publications (2)
Publication Number | Publication Date |
---|---|
EP2191699A1 EP2191699A1 (de) | 2010-06-02 |
EP2191699B1 true EP2191699B1 (de) | 2015-11-11 |
Family
ID=40040047
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP08804107.4A Active EP2191699B1 (de) | 2007-09-14 | 2008-09-12 | Hochspannungsisolatoranordnung und ionenbeschleunigeranordnung mit einer solchen hochspannungsisolatoranordnung |
Country Status (8)
Country | Link |
---|---|
US (1) | US8587202B2 (ru) |
EP (1) | EP2191699B1 (ru) |
JP (1) | JP5449166B2 (ru) |
KR (1) | KR101468118B1 (ru) |
CN (1) | CN101855948B (ru) |
DE (1) | DE102007044070A1 (ru) |
RU (1) | RU2481753C2 (ru) |
WO (1) | WO2009037195A1 (ru) |
Families Citing this family (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102767497B (zh) | 2012-05-22 | 2014-06-18 | 北京卫星环境工程研究所 | 基于空间原子氧的无燃料航天器推进系统及推进方法 |
US9212785B2 (en) * | 2012-10-11 | 2015-12-15 | Varian Semiconductor Equipment Associates, Inc. | Passive isolation assembly and gas transport system |
CN103775297B (zh) * | 2014-03-04 | 2016-06-01 | 哈尔滨工业大学 | 多级尖端会切磁场等离子体推力器分段陶瓷通道 |
DE102016207370A1 (de) * | 2016-04-29 | 2017-11-02 | Airbus Ds Gmbh | Gaseinlass für ein Ionentriebwerk |
DE102016223746B4 (de) * | 2016-11-30 | 2018-08-30 | Arianegroup Gmbh | Gaseinlass für ein Ionentriebwerk |
CN108187913B (zh) * | 2018-01-31 | 2024-03-12 | 佛山市科蓝环保科技股份有限公司 | 一种工业油烟净化设备的电场瓷瓶保护装置 |
CN113874288A (zh) * | 2019-12-12 | 2021-12-31 | 渋谷弘树 | 静电去除装置 |
Family Cites Families (19)
Publication number | Priority date | Publication date | Assignee | Title |
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US2775640A (en) * | 1952-10-01 | 1956-12-25 | Exxon Research Engineering Co | Method and means for insulating high voltage electrodes |
US3270498A (en) * | 1963-11-05 | 1966-09-06 | Gen Electric | Controllable vaporizing gas accelerator |
US3343022A (en) * | 1965-03-16 | 1967-09-19 | Lockheed Aircraft Corp | Transpiration cooled induction plasma generator |
US3328960A (en) * | 1965-08-16 | 1967-07-04 | Thomas W Martin | Ion propulsion system employing lifecycle wastes as a source of ionizable gas |
DE2052014A1 (de) * | 1970-10-23 | 1972-04-27 | Messerschmitt Boelkow Blohm | Ionentriebwerk |
JPS60264016A (ja) * | 1984-06-12 | 1985-12-27 | Mitsubishi Electric Corp | ホロ−カソ−ド |
JPS6477764A (en) * | 1987-09-18 | 1989-03-23 | Toshiba Corp | Hall type ion thruster |
US5490910A (en) * | 1992-03-09 | 1996-02-13 | Tulip Memory Systems, Inc. | Circularly symmetric sputtering apparatus with hollow-cathode plasma devices |
FR2692730B1 (fr) * | 1992-06-19 | 1994-08-19 | Air Liquide | Dispositif de formation de molécules gazeuses excitées ou instables et utilisations d'un tel dispositif. |
RU2079985C1 (ru) * | 1995-05-03 | 1997-05-20 | Институт электрофизики Уральского отделения РАН | Вакуумный диод с бегущей волной (варианты) |
US6215124B1 (en) * | 1998-06-05 | 2001-04-10 | Primex Aerospace Company | Multistage ion accelerators with closed electron drift |
DE69903425T2 (de) * | 1998-06-05 | 2003-08-14 | Gen Dynamics Ots Aerospace Inc | Gleichmässige gasverteilung in ionenbeschleunigern mit geschlossener ionenbahn |
US6612105B1 (en) * | 1998-06-05 | 2003-09-02 | Aerojet-General Corporation | Uniform gas distribution in ion accelerators with closed electron drift |
DE10130464B4 (de) * | 2001-06-23 | 2010-09-16 | Thales Electron Devices Gmbh | Plasmabeschleuniger-Anordnung |
US6982520B1 (en) * | 2001-09-10 | 2006-01-03 | Aerojet-General Corporation | Hall effect thruster with anode having magnetic field barrier |
US20030157000A1 (en) * | 2002-02-15 | 2003-08-21 | Kimberly-Clark Worldwide, Inc. | Fluidized bed activated by excimer plasma and materials produced therefrom |
DE10215660B4 (de) * | 2002-04-09 | 2008-01-17 | Eads Space Transportation Gmbh | Hochfrequenz-Elektronenquelle, insbesondere Neutralisator |
ATE454553T1 (de) * | 2004-09-22 | 2010-01-15 | Elwing Llc | Antriebssystem für raumfahrzeuge |
KR20080041285A (ko) * | 2005-08-30 | 2008-05-09 | 어드밴스드 테크놀러지 머티리얼즈, 인코포레이티드 | 저압 가스 이송 장치 및 방법 |
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2007
- 2007-09-14 DE DE102007044070A patent/DE102007044070A1/de not_active Ceased
-
2008
- 2008-09-12 WO PCT/EP2008/062142 patent/WO2009037195A1/de active Application Filing
- 2008-09-12 RU RU2010114721/07A patent/RU2481753C2/ru active
- 2008-09-12 JP JP2010524501A patent/JP5449166B2/ja not_active Expired - Fee Related
- 2008-09-12 CN CN2008801158405A patent/CN101855948B/zh active Active
- 2008-09-12 KR KR1020107008164A patent/KR101468118B1/ko active IP Right Grant
- 2008-09-12 EP EP08804107.4A patent/EP2191699B1/de active Active
- 2008-09-12 US US12/733,628 patent/US8587202B2/en active Active
Also Published As
Publication number | Publication date |
---|---|
CN101855948B (zh) | 2012-11-21 |
RU2481753C2 (ru) | 2013-05-10 |
KR101468118B1 (ko) | 2014-12-03 |
RU2010114721A (ru) | 2011-10-20 |
KR20100098594A (ko) | 2010-09-08 |
EP2191699A1 (de) | 2010-06-02 |
US20110089836A1 (en) | 2011-04-21 |
DE102007044070A1 (de) | 2009-04-02 |
JP2010539373A (ja) | 2010-12-16 |
WO2009037195A1 (de) | 2009-03-26 |
CN101855948A (zh) | 2010-10-06 |
US8587202B2 (en) | 2013-11-19 |
JP5449166B2 (ja) | 2014-03-19 |
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