EP2013482A1 - Rotors ou stators d'une pompe turbomoléculaire - Google Patents

Rotors ou stators d'une pompe turbomoléculaire

Info

Publication number
EP2013482A1
EP2013482A1 EP07728626A EP07728626A EP2013482A1 EP 2013482 A1 EP2013482 A1 EP 2013482A1 EP 07728626 A EP07728626 A EP 07728626A EP 07728626 A EP07728626 A EP 07728626A EP 2013482 A1 EP2013482 A1 EP 2013482A1
Authority
EP
European Patent Office
Prior art keywords
weight
alloy
rotors
stators
alloys
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP07728626A
Other languages
German (de)
English (en)
Other versions
EP2013482B1 (fr
Inventor
Rainer Hölzer
Michael Froitzheim
Lars Etschenberg
Ishan Roth
Gernot Fischer
Dieter Sauer
Gregor Terlinde
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Otto Fuchs KG
Leybold GmbH
Original Assignee
Otto Fuchs KG
Oerlikon Leybold Vacuum GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Otto Fuchs KG, Oerlikon Leybold Vacuum GmbH filed Critical Otto Fuchs KG
Publication of EP2013482A1 publication Critical patent/EP2013482A1/fr
Application granted granted Critical
Publication of EP2013482B1 publication Critical patent/EP2013482B1/fr
Not-in-force legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • C—CHEMISTRY; METALLURGY
    • C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
    • C22C—ALLOYS
    • C22C21/00—Alloys based on aluminium
    • C22C21/12—Alloys based on aluminium with copper as the next major constituent
    • C22C21/14—Alloys based on aluminium with copper as the next major constituent with silicon
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/02—Selection of particular materials
    • F04D29/023—Selection of particular materials especially adapted for elastic fluid pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/26—Rotors specially for elastic fluids
    • F04D29/32—Rotors specially for elastic fluids for axial flow pumps
    • F04D29/321—Rotors specially for elastic fluids for axial flow pumps for axial flow compressors
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05D—INDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
    • F05D2300/00—Materials; Properties thereof
    • F05D2300/10—Metals, alloys or intermetallic compounds
    • F05D2300/17—Alloys
    • F05D2300/173—Aluminium alloys, e.g. AlCuMgPb
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49316—Impeller making
    • Y10T29/4932—Turbomachine making
    • Y10T29/49325—Shaping integrally bladed rotor

Definitions

  • the invention relates to rotors or stators of a turbomolecular pump with rotor blades made of a special aluminum alloy.
  • DE 101 03 230 Al describes rotors in which a part of the rotor blades has a rear side which is convex on the suction side and concave on the pressure side, or that at least part of the Rotor blades has a front side, which is concave on the suction side and convex on the pressure side.
  • disk-shaped segments are machined Span working in a cylindrical solid body, which are then slotted axially spark erosion. In this way, disk-shaped structures per disk segment, which receive a defined angle of attack by a subsequent plastic torsion about the wing longitudinal axis.
  • Aluminum is copper which further contains magnesium, manganese, zirconium and silver, and optionally titanium.
  • WO 2004/003244 A1 describes an Al-Cu-Mg-Mn alloy for the production of semi-finished products with high static and dynamic strength properties. Surprisingly, it has been found that the alloys described here, on the one hand, are particularly heat-resistant and, on the other hand, have such high ductility in the cold-aged state that cost-effective rotor production by chip removal or thermal removal processes and forming (for example twisting or bending) is possible.
  • the invention therefore relates, in a first embodiment, to rotors or stators of a turbomolecular pump having rotor blades of an aluminum alloy, which is characterized in that the alloy comprises an Al-Cu-Mg-Mn-Knet alloy.
  • Multi-stage, one-piece rotors or stators are thus also available with the aid of the present invention, such as rotors or stators, which are composed of individual stages segments.
  • the rotors or stators have a low specific weight with high strength and good processability.
  • the kneading alloy used has the following composition:
  • Si silicon
  • Fe iron
  • zirconium (Zr) 0.1 to 0.25% by weight zirconium (Zr),
  • the kneading alloys used have a higher static and dynamic heat resistance and improved creep resistance with very good fracture mechanical properties compared to other prior art alloys and are therefore particularly suitable for the rotors or stators of turbomolecular pumps according to the invention.
  • the kneading alloy used according to the invention has an elongation at break of at least 14%, in particular 17 to 20% in the cold-aged state, determined in the tensile test according to DIN EN 10002.
  • wrought alloy in the sense of the invention comprises a special treatment of the alloy used according to the invention, in which the cast structure is converted and "kneaded” by, for example, extrusion, rolling or forging at elevated temperature.
  • the copper content is preferably in the range of 3.8 and 4.2 wt .-% and the magnesium content in the range of 0.45 and 0.6 wt .-%.
  • the copper content is clearly above the maximum solubility for copper in the presence of the claimed magnesium content. This has the consequence that the proportion of insoluble copper-containing phases is very low, even taking into account the other alloying and accompanying elements. This results in an improvement in the dynamic properties and the fracture toughness of the rotors made from such an alloy.
  • the proportion of the claimed kneading alloy in silver is between 0.3 and 0.7% by weight, preferably 0.45 and 0.6% by weight.
  • silicon 0.3 to 0.7 wt .-%, preferably 0.4 to 0.6 wt .-% curing takes place via the same mechanisms as in silver-free Al-Cu-Mg alloys.
  • the precipitation profile is different due to the addition of silver.
  • the manganese content of the alloy used is 0.1 to 0.5% by weight, preferably 0.2 to 0.4% by weight.
  • the manganese content is limited to 0.5% by weight. In principle, however, manganese is an alloying constituent required for microstructure control.
  • the alloy contains zirconium in an amount of 0.10 to 0.25 wt .-%, in particular 0.14 to 0.2 wt .-%.
  • the secreting zirconium aluminides are generally even more finely dispersed than manganese aluminides. Moreover, it has been shown that the zirconium aluminides contribute to the thermal stability of the alloy.
  • the alloy is added 0.05 to 0.15 wt .-%, preferably 0.10 to 0.15 wt .-% titanium.
  • the titanium is added to the alloy in the form of an Al-5Ti-1B master alloy, whereby the alloy automatically contains boron. This results in finely divided, insoluble titanium diborides. These contribute to the thermal stability of the alloy.
  • the alloy may have a maximum of 0.15% iron, preferably 0.10% iron.
  • the rotors or stators according to the invention of a turbomolecular pump with rotor blades made of the above-defined aluminum alloy can be produced, for example, by producing the rotor blades from individual disks or solid bodies by radial separation, which are subsequently formed by forming (for example twisting, bending, embossing, forging, etc.). be made to a desired angle of attack.
  • the production of the desired angle of attack also includes, where appropriate, the production of a defined wing contour.
  • the steps of cutting and forming can also be carried out in one operation, for example by stamping.
  • Separation methods in the sense of the present invention include cutting methods, such as laser or water jet as well as eroding, machining, punching or stamping.
  • the material was in the state "solution-annealed, quenched and cold-aged.” In this state it possessed a high formability.
  • 070545wo HPJ / ko 27.04.2007 included at the wellgelfuß and then carried out a torsional movement about the wing longitudinal axis up to the desired angle of attack.
  • the wing segment experienced a plastic deformation in the area close to the wings. In this way, torsion or angle of attack of about 45 [°] to the starting position was easily achieved without cracks in the wing root area being observed.
  • stator disks are produced by stamping as follows:
  • Semicircular ring segments are punched out of Al sheets in thicknesses between 0.5 and 1.0 [mm]. Condition of the sheets: "solution-annealed, quenched and cold-aged”.

Abstract

L'invention concerne des rotors ou des stators d'une pompe turbomoléculaire, les pales de rotor étant constituées d'un alliage d'aluminium spécifique.
EP07728626.8A 2006-04-29 2007-04-27 Rotors ou stators d'une pompe turbomoléculaire Not-in-force EP2013482B1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102006020100 2006-04-29
PCT/EP2007/054171 WO2007125104A1 (fr) 2006-04-29 2007-04-27 Rotors ou stators d'une pompe turbomoléculaire

Publications (2)

Publication Number Publication Date
EP2013482A1 true EP2013482A1 (fr) 2009-01-14
EP2013482B1 EP2013482B1 (fr) 2014-11-05

Family

ID=38221387

Family Applications (2)

Application Number Title Priority Date Filing Date
EP07728629A Active EP2013483B1 (fr) 2006-04-29 2007-04-27 Procédé pour produire des rotors ou des stators d'une pompe turbomoléculaire
EP07728626.8A Not-in-force EP2013482B1 (fr) 2006-04-29 2007-04-27 Rotors ou stators d'une pompe turbomoléculaire

Family Applications Before (1)

Application Number Title Priority Date Filing Date
EP07728629A Active EP2013483B1 (fr) 2006-04-29 2007-04-27 Procédé pour produire des rotors ou des stators d'une pompe turbomoléculaire

Country Status (7)

Country Link
US (2) US20100199495A1 (fr)
EP (2) EP2013483B1 (fr)
JP (2) JP5274446B2 (fr)
CN (2) CN101438063A (fr)
DE (1) DE502007003011D1 (fr)
RU (2) RU2435076C2 (fr)
WO (2) WO2007125104A1 (fr)

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102009015652A1 (de) * 2009-03-31 2010-10-07 Light Style Gmbh Verfahren zur Herstellung eines Gebrauchsproduktes aus Aluminium und danach hergestelltes Produkt
CN102465890A (zh) * 2010-11-04 2012-05-23 致扬科技股份有限公司 改良的涡轮分子泵的定子结构及其制造方法
JP5879181B2 (ja) 2011-06-10 2016-03-08 株式会社神戸製鋼所 高温特性に優れたアルミニウム合金
US20130084190A1 (en) * 2011-09-30 2013-04-04 General Electric Company Titanium aluminide articles with improved surface finish and methods for their manufacture
US9011205B2 (en) * 2012-02-15 2015-04-21 General Electric Company Titanium aluminide article with improved surface finish
DE102012222230A1 (de) 2012-12-04 2014-06-05 Pfeiffer Vacuum Gmbh Vakuumpumpe
ES2642118T5 (es) 2015-03-27 2020-12-30 Fuchs Kg Otto Aleación de Al-Cu-Mg-Li así como producto de aleación fabricado a partir de la misma
CN104847684A (zh) * 2015-04-24 2015-08-19 张金荣 一种车辆用耐腐蚀水泵
CN105958671A (zh) * 2016-06-23 2016-09-21 无锡新大力电机有限公司 一种新型电机定子
GB2552793A (en) * 2016-08-08 2018-02-14 Edwards Ltd Vacuum pump
JP6906941B2 (ja) * 2016-12-16 2021-07-21 エドワーズ株式会社 真空ポンプとこれに用いられるステータコラムとその製造方法

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JPS61215492A (ja) * 1985-03-22 1986-09-25 Mitsubishi Heavy Ind Ltd タ−ボ分子ポンプの翼の製造方法
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Also Published As

Publication number Publication date
CN101432525A (zh) 2009-05-13
RU2455529C2 (ru) 2012-07-10
EP2013483A2 (fr) 2009-01-14
EP2013483B1 (fr) 2010-03-03
CN101438063A (zh) 2009-05-20
US20100199495A1 (en) 2010-08-12
WO2007125106A2 (fr) 2007-11-08
WO2007125104A1 (fr) 2007-11-08
JP2009535551A (ja) 2009-10-01
RU2008146813A (ru) 2010-06-10
RU2435076C2 (ru) 2011-11-27
RU2008146811A (ru) 2010-06-10
WO2007125106A3 (fr) 2008-01-31
JP5274446B2 (ja) 2013-08-28
JP2009535550A (ja) 2009-10-01
JP5274447B2 (ja) 2013-08-28
US20090180890A1 (en) 2009-07-16
DE502007003011D1 (de) 2010-04-15
EP2013482B1 (fr) 2014-11-05

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