GB0314692D0 - Improvements in turbomolecular pumps - Google Patents

Improvements in turbomolecular pumps

Info

Publication number
GB0314692D0
GB0314692D0 GBGB0314692.5A GB0314692A GB0314692D0 GB 0314692 D0 GB0314692 D0 GB 0314692D0 GB 0314692 A GB0314692 A GB 0314692A GB 0314692 D0 GB0314692 D0 GB 0314692D0
Authority
GB
United Kingdom
Prior art keywords
turbomolecular pumps
turbomolecular
pumps
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
GBGB0314692.5A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
BOC Group Ltd
Original Assignee
BOC Group Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by BOC Group Ltd filed Critical BOC Group Ltd
Priority to GBGB0314692.5A priority Critical patent/GB0314692D0/en
Publication of GB0314692D0 publication Critical patent/GB0314692D0/en
Priority to EP04736844A priority patent/EP1636496A1/en
Priority to PCT/GB2004/002495 priority patent/WO2005001294A1/en
Priority to JP2006516403A priority patent/JP2007516372A/en
Priority to TW093118324A priority patent/TW200506221A/en
Ceased legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/02—Selection of particular materials
    • F04D29/023—Selection of particular materials especially adapted for elastic fluid pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05D—INDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
    • F05D2300/00—Materials; Properties thereof
    • F05D2300/10—Metals, alloys or intermetallic compounds
    • F05D2300/17—Alloys
    • F05D2300/173—Aluminium alloys, e.g. AlCuMgPb
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05D—INDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
    • F05D2300/00—Materials; Properties thereof
    • F05D2300/40—Organic materials
    • F05D2300/43—Synthetic polymers, e.g. plastics; Rubber
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05D—INDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
    • F05D2300/00—Materials; Properties thereof
    • F05D2300/40—Organic materials
    • F05D2300/43—Synthetic polymers, e.g. plastics; Rubber
    • F05D2300/436—Polyetherketones, e.g. PEEK
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05D—INDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
    • F05D2300/00—Materials; Properties thereof
    • F05D2300/60—Properties or characteristics given to material by treatment or manufacturing
    • F05D2300/603—Composites; e.g. fibre-reinforced
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05D—INDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
    • F05D2300/00—Materials; Properties thereof
    • F05D2300/60—Properties or characteristics given to material by treatment or manufacturing
    • F05D2300/611—Coating
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05D—INDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
    • F05D2300/00—Materials; Properties thereof
    • F05D2300/70—Treatment or modification of materials
    • F05D2300/702—Reinforcement

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Structures Of Non-Positive Displacement Pumps (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
GBGB0314692.5A 2003-06-25 2003-06-25 Improvements in turbomolecular pumps Ceased GB0314692D0 (en)

Priority Applications (5)

Application Number Priority Date Filing Date Title
GBGB0314692.5A GB0314692D0 (en) 2003-06-25 2003-06-25 Improvements in turbomolecular pumps
EP04736844A EP1636496A1 (en) 2003-06-25 2004-06-15 Rotary impeller for a turbomolecular pump
PCT/GB2004/002495 WO2005001294A1 (en) 2003-06-25 2004-06-15 Rotary impeller for a turbomolecular pump
JP2006516403A JP2007516372A (en) 2003-06-25 2004-06-15 Rotor blade for turbomolecular pump
TW093118324A TW200506221A (en) 2003-06-25 2004-06-24 Rotary impeller for a turbomolecular pump

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GBGB0314692.5A GB0314692D0 (en) 2003-06-25 2003-06-25 Improvements in turbomolecular pumps

Publications (1)

Publication Number Publication Date
GB0314692D0 true GB0314692D0 (en) 2003-07-30

Family

ID=27637232

Family Applications (1)

Application Number Title Priority Date Filing Date
GBGB0314692.5A Ceased GB0314692D0 (en) 2003-06-25 2003-06-25 Improvements in turbomolecular pumps

Country Status (5)

Country Link
EP (1) EP1636496A1 (en)
JP (1) JP2007516372A (en)
GB (1) GB0314692D0 (en)
TW (1) TW200506221A (en)
WO (1) WO2005001294A1 (en)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4865321B2 (en) * 2005-12-19 2012-02-01 エドワーズ株式会社 Vacuum pump
WO2007125104A1 (en) * 2006-04-29 2007-11-08 Oerlikon Leybold Vacuum Gmbh Rotors or stators of a turbomolecular pump
JP2014031734A (en) * 2012-08-01 2014-02-20 Edwards Kk Component for vacuum pump, and vacuum pump
DE202013002970U1 (en) * 2013-03-27 2014-06-30 Oerlikon Leybold Vacuum Gmbh Tool for producing a multiple rotor blades having rotor disk and rotor disk
DE102014203172A1 (en) * 2014-02-21 2015-08-27 Oerlikon Leybold Vacuum Gmbh Coated CFRP surfaces of turbomolecular pumps
CN107646076B (en) * 2015-06-08 2020-06-09 莱宝有限公司 Vacuum pump rotor
GB2570925B (en) * 2018-02-12 2021-07-07 Edwards Ltd Reinforced vacuum system component

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4239391C2 (en) * 1991-11-27 1996-11-21 Electro Chem Eng Gmbh Objects made of aluminum, magnesium or titanium with an oxide ceramic layer filled with fluoropolymers and process for their production
DK98393D0 (en) * 1993-08-31 1993-08-31 Andersen F S As A FAN ASSEMBLY
US5938406A (en) * 1997-04-18 1999-08-17 Varian, Inc. Rotor for turbomolecular pump
JP2000220595A (en) * 1999-01-27 2000-08-08 Seiko Seiki Co Ltd Vacuum pump device
GB2367596A (en) * 2000-10-06 2002-04-10 Nmb Fan rotor construction

Also Published As

Publication number Publication date
TW200506221A (en) 2005-02-16
JP2007516372A (en) 2007-06-21
EP1636496A1 (en) 2006-03-22
WO2005001294A1 (en) 2005-01-06

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Legal Events

Date Code Title Description
AT Applications terminated before publication under section 16(1)