EP1609990A4 - Vacuum device and vacuum pump - Google Patents

Vacuum device and vacuum pump

Info

Publication number
EP1609990A4
EP1609990A4 EP04716009A EP04716009A EP1609990A4 EP 1609990 A4 EP1609990 A4 EP 1609990A4 EP 04716009 A EP04716009 A EP 04716009A EP 04716009 A EP04716009 A EP 04716009A EP 1609990 A4 EP1609990 A4 EP 1609990A4
Authority
EP
European Patent Office
Prior art keywords
vacuum
pump
vacuum pump
vacuum device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP04716009A
Other languages
German (de)
French (fr)
Other versions
EP1609990A1 (en
EP1609990B1 (en
Inventor
Tadahiro Ohmi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Individual
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Individual filed Critical Individual
Publication of EP1609990A1 publication Critical patent/EP1609990A1/en
Publication of EP1609990A4 publication Critical patent/EP1609990A4/en
Application granted granted Critical
Publication of EP1609990B1 publication Critical patent/EP1609990B1/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
    • F04B37/10—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use
    • F04B37/14—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use to obtain high vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C23/00—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids
    • F04C23/005—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids of dissimilar working principle
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/046—Combinations of two or more different types of pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04F—PUMPING OF FLUID BY DIRECT CONTACT OF ANOTHER FLUID OR BY USING INERTIA OF FLUID TO BE PUMPED; SIPHONS
    • F04F5/00—Jet pumps, i.e. devices in which flow is induced by pressure drop caused by velocity of another fluid flow
    • F04F5/14—Jet pumps, i.e. devices in which flow is induced by pressure drop caused by velocity of another fluid flow the inducing fluid being elastic fluid
    • F04F5/16—Jet pumps, i.e. devices in which flow is induced by pressure drop caused by velocity of another fluid flow the inducing fluid being elastic fluid displacing elastic fluids
    • F04F5/20—Jet pumps, i.e. devices in which flow is induced by pressure drop caused by velocity of another fluid flow the inducing fluid being elastic fluid displacing elastic fluids for evacuating
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04F—PUMPING OF FLUID BY DIRECT CONTACT OF ANOTHER FLUID OR BY USING INERTIA OF FLUID TO BE PUMPED; SIPHONS
    • F04F5/00—Jet pumps, i.e. devices in which flow is induced by pressure drop caused by velocity of another fluid flow
    • F04F5/54—Installations characterised by use of jet pumps, e.g. combinations of two or more jet pumps of different type
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
    • F04C18/12—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
    • F04C18/14—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with toothed rotary pistons
    • F04C18/16—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with toothed rotary pistons with helical teeth, e.g. chevron-shaped, screw type
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2220/00—Application
    • F04C2220/10—Vacuum
    • F04C2220/12—Dry running
EP04716009A 2003-03-03 2004-03-01 Vacuum device and vacuum pump Expired - Fee Related EP1609990B1 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2003055749 2003-03-03
JP2003055749A JP2004263635A (en) 2003-03-03 2003-03-03 Vacuum device and vacuum pump
PCT/JP2004/002484 WO2004079192A1 (en) 2003-03-03 2004-03-01 Vacuum device and vacuum pump

Publications (3)

Publication Number Publication Date
EP1609990A1 EP1609990A1 (en) 2005-12-28
EP1609990A4 true EP1609990A4 (en) 2007-07-18
EP1609990B1 EP1609990B1 (en) 2009-08-12

Family

ID=32958669

Family Applications (1)

Application Number Title Priority Date Filing Date
EP04716009A Expired - Fee Related EP1609990B1 (en) 2003-03-03 2004-03-01 Vacuum device and vacuum pump

Country Status (6)

Country Link
US (1) US20060182638A1 (en)
EP (1) EP1609990B1 (en)
JP (1) JP2004263635A (en)
DE (1) DE602004022519D1 (en)
TW (1) TW200506205A (en)
WO (1) WO2004079192A1 (en)

Families Citing this family (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB0418771D0 (en) * 2004-08-20 2004-09-22 Boc Group Plc Evacuation of a load lock enclosure
JP4745779B2 (en) * 2005-10-03 2011-08-10 神港精機株式会社 Vacuum equipment
FR2952683B1 (en) * 2009-11-18 2011-11-04 Alcatel Lucent METHOD AND APPARATUS FOR PUMPING WITH REDUCED ENERGY CONSUMPTION
TW201118259A (en) * 2009-11-19 2011-06-01 Ji Ee Industry Co Ltd Water pump
CN102062088B (en) * 2011-01-19 2012-11-28 西安交通大学 Two-screw multiphase pump device suitable for working condition with high air void
US20120261011A1 (en) * 2011-04-14 2012-10-18 Young Man Cho Energy reduction module using a depressurizing vacuum apparatus for vacuum pump
EP2644264A1 (en) * 2012-03-28 2013-10-02 Aurotec GmbH Pressure-controlled multi-reactor system
DE102012220442A1 (en) * 2012-11-09 2014-05-15 Oerlikon Leybold Vacuum Gmbh Vacuum pump system for evacuating a chamber and method for controlling a vacuum pump system
FR3008145B1 (en) * 2013-07-04 2015-08-07 Pfeiffer Vacuum Sas DRY PRIMARY VACUUM PUMP
CN103900376B (en) * 2014-04-15 2015-11-18 吴江市赛纳电子科技有限公司 A kind of manual vacuum stove
DK3161318T3 (en) 2014-06-27 2020-03-09 Ateliers Busch S A PROCEDURE FOR PUMPING IN A SYSTEM OF VACUUM PUMPS AND SYSTEM OF VACUUM PUMPS
WO2016050313A1 (en) * 2014-10-02 2016-04-07 Ateliers Busch Sa Pumping system for generating a vacuum and method for pumping by means of this pumping system
US11209024B2 (en) * 2015-06-24 2021-12-28 Itt Manufacturing Enterprises Llc Discharge casing insert for pump performance characteristics control
US10155600B2 (en) * 2015-12-28 2018-12-18 Starvac Systems Pty Ltd Apparatus for vacuum sealing products
FR3077343B1 (en) * 2018-01-29 2020-02-14 Norauto France SUCTION PLANT FOR THE COLLECTION OF WASTE FLUIDS FROM A MOTOR VEHICLE, DEVICE COMPRISING THE PLANT AND COLLECTION METHOD

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4714418A (en) * 1984-04-11 1987-12-22 Hitachi, Ltd. Screw type vacuum pump
US4718240A (en) * 1985-03-01 1988-01-12 Helix Technology Corporation Cryopump regeneration method and apparatus
EP0256234A2 (en) * 1986-06-12 1988-02-24 Hitachi, Ltd. Vacuum generating system
JPS6385292A (en) * 1986-09-29 1988-04-15 Hitachi Ltd Vacuum pump
EP1234982A1 (en) * 2001-02-22 2002-08-28 VARIAN S.p.A. Vacuum pump

Family Cites Families (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US1495762A (en) * 1923-05-28 1924-05-27 Emma Rosenhagen Vacuum pump
US2335109A (en) * 1942-06-02 1943-11-23 F E Myers & Bro Co Combination centrifugal ejector pump
US2452874A (en) * 1945-10-24 1948-11-02 Deming Co Pumping system
US2923458A (en) * 1956-11-01 1960-02-02 Sone Tamotsu Diffusion pumps
US2913120A (en) * 1957-03-26 1959-11-17 J P Glasby Mfg Co Inc Vacuum operated apparatus for moving fluid material
US3536418A (en) * 1969-02-13 1970-10-27 Onezime P Breaux Cryogenic turbo-molecular vacuum pump
JPH0353039Y2 (en) * 1987-05-30 1991-11-19
JPS6429690A (en) * 1987-07-22 1989-01-31 Hitachi Ltd Shaft sealing device for screw vacuum pump
JPH0726623B2 (en) * 1990-03-28 1995-03-29 日本碍子株式会社 Vacuum unit
US5611673A (en) * 1994-07-19 1997-03-18 Shin-Ei Kabushiki Kaisha Vacuum jet pump for recovering a mixed fluid of gas and liquid condensates from steam-using apparatus
JPH09125227A (en) * 1995-10-27 1997-05-13 Tokyo Electron Ltd Evacuation apparatus and vacuum treatment equipment
US5944049A (en) * 1997-07-15 1999-08-31 Applied Materials, Inc. Apparatus and method for regulating a pressure in a chamber
US5960775A (en) * 1997-12-08 1999-10-05 Walbro Corporation Filtered fuel pump module
TW504548B (en) * 1998-06-30 2002-10-01 Ebara Corp Turbo molecular pump
RU2142917C1 (en) * 1998-06-30 1999-12-20 Попов Алексей Юрьевич Method and device for electrochemical treatment of water
WO2000060428A1 (en) * 1999-04-07 2000-10-12 Alcatel System for regulating pressure in a vacuum chamber, vacuum pumping unit equipped with same
DE10009164C1 (en) * 2000-02-26 2001-07-19 Festo Ag & Co Combined vacuum generator units has housing of each unit provided with ejector socket for fitting with ejector inserts of varying type
JP4107364B2 (en) * 2000-07-25 2008-06-25 大亜真空株式会社 Vacuum equipment
JP2002234861A (en) * 2001-02-09 2002-08-23 Nippon Shokubai Co Ltd Method for producing hydroxyalkyl ester

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4714418A (en) * 1984-04-11 1987-12-22 Hitachi, Ltd. Screw type vacuum pump
US4718240A (en) * 1985-03-01 1988-01-12 Helix Technology Corporation Cryopump regeneration method and apparatus
EP0256234A2 (en) * 1986-06-12 1988-02-24 Hitachi, Ltd. Vacuum generating system
JPS6385292A (en) * 1986-09-29 1988-04-15 Hitachi Ltd Vacuum pump
EP1234982A1 (en) * 2001-02-22 2002-08-28 VARIAN S.p.A. Vacuum pump

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
See also references of WO2004079192A1 *

Also Published As

Publication number Publication date
EP1609990A1 (en) 2005-12-28
JP2004263635A (en) 2004-09-24
US20060182638A1 (en) 2006-08-17
TW200506205A (en) 2005-02-16
WO2004079192A1 (en) 2004-09-16
DE602004022519D1 (en) 2009-09-24
EP1609990B1 (en) 2009-08-12

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