EP1609990A4 - Vakuumvorrichtung und vakuumpumpe - Google Patents

Vakuumvorrichtung und vakuumpumpe

Info

Publication number
EP1609990A4
EP1609990A4 EP04716009A EP04716009A EP1609990A4 EP 1609990 A4 EP1609990 A4 EP 1609990A4 EP 04716009 A EP04716009 A EP 04716009A EP 04716009 A EP04716009 A EP 04716009A EP 1609990 A4 EP1609990 A4 EP 1609990A4
Authority
EP
European Patent Office
Prior art keywords
vacuum
pump
vacuum pump
vacuum device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP04716009A
Other languages
English (en)
French (fr)
Other versions
EP1609990B1 (de
EP1609990A1 (de
Inventor
Tadahiro Ohmi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Individual
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Individual filed Critical Individual
Publication of EP1609990A1 publication Critical patent/EP1609990A1/de
Publication of EP1609990A4 publication Critical patent/EP1609990A4/de
Application granted granted Critical
Publication of EP1609990B1 publication Critical patent/EP1609990B1/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
    • F04B37/10—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use
    • F04B37/14—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use to obtain high vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C23/00—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids
    • F04C23/005—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids of dissimilar working principle
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/046—Combinations of two or more different types of pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04F—PUMPING OF FLUID BY DIRECT CONTACT OF ANOTHER FLUID OR BY USING INERTIA OF FLUID TO BE PUMPED; SIPHONS
    • F04F5/00—Jet pumps, i.e. devices in which flow is induced by pressure drop caused by velocity of another fluid flow
    • F04F5/14—Jet pumps, i.e. devices in which flow is induced by pressure drop caused by velocity of another fluid flow the inducing fluid being elastic fluid
    • F04F5/16—Jet pumps, i.e. devices in which flow is induced by pressure drop caused by velocity of another fluid flow the inducing fluid being elastic fluid displacing elastic fluids
    • F04F5/20—Jet pumps, i.e. devices in which flow is induced by pressure drop caused by velocity of another fluid flow the inducing fluid being elastic fluid displacing elastic fluids for evacuating
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04F—PUMPING OF FLUID BY DIRECT CONTACT OF ANOTHER FLUID OR BY USING INERTIA OF FLUID TO BE PUMPED; SIPHONS
    • F04F5/00—Jet pumps, i.e. devices in which flow is induced by pressure drop caused by velocity of another fluid flow
    • F04F5/54—Installations characterised by use of jet pumps, e.g. combinations of two or more jet pumps of different type
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
    • F04C18/12—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
    • F04C18/14—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with toothed rotary pistons
    • F04C18/16—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with toothed rotary pistons with helical teeth, e.g. chevron-shaped, screw type
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2220/00—Application
    • F04C2220/10—Vacuum
    • F04C2220/12—Dry running
EP04716009A 2003-03-03 2004-03-01 Vakuumvorrichtung und vakuumpumpe Expired - Fee Related EP1609990B1 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2003055749 2003-03-03
JP2003055749A JP2004263635A (ja) 2003-03-03 2003-03-03 真空装置および真空ポンプ
PCT/JP2004/002484 WO2004079192A1 (ja) 2003-03-03 2004-03-01 真空装置および真空ポンプ

Publications (3)

Publication Number Publication Date
EP1609990A1 EP1609990A1 (de) 2005-12-28
EP1609990A4 true EP1609990A4 (de) 2007-07-18
EP1609990B1 EP1609990B1 (de) 2009-08-12

Family

ID=32958669

Family Applications (1)

Application Number Title Priority Date Filing Date
EP04716009A Expired - Fee Related EP1609990B1 (de) 2003-03-03 2004-03-01 Vakuumvorrichtung und vakuumpumpe

Country Status (6)

Country Link
US (1) US20060182638A1 (de)
EP (1) EP1609990B1 (de)
JP (1) JP2004263635A (de)
DE (1) DE602004022519D1 (de)
TW (1) TW200506205A (de)
WO (1) WO2004079192A1 (de)

Families Citing this family (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB0418771D0 (en) * 2004-08-20 2004-09-22 Boc Group Plc Evacuation of a load lock enclosure
JP4745779B2 (ja) * 2005-10-03 2011-08-10 神港精機株式会社 真空装置
FR2952683B1 (fr) * 2009-11-18 2011-11-04 Alcatel Lucent Procede et dispositif de pompage a consommation d'energie reduite
TW201118259A (en) * 2009-11-19 2011-06-01 Ji Ee Industry Co Ltd Water pump
CN102062088B (zh) * 2011-01-19 2012-11-28 西安交通大学 一种适应用高含气率工况的双螺杆混输泵装置
US20120261011A1 (en) * 2011-04-14 2012-10-18 Young Man Cho Energy reduction module using a depressurizing vacuum apparatus for vacuum pump
EP2644264A1 (de) * 2012-03-28 2013-10-02 Aurotec GmbH Druckreguliertes Mehrreaktorsystem
DE102012220442A1 (de) * 2012-11-09 2014-05-15 Oerlikon Leybold Vacuum Gmbh Vakuumpumpensystem zur Evakuierung einer Kammer sowie Verfahren zur Steuerung eines Vakuumpumpensystems
FR3008145B1 (fr) * 2013-07-04 2015-08-07 Pfeiffer Vacuum Sas Pompe a vide primaire seche
CN103900376B (zh) * 2014-04-15 2015-11-18 吴江市赛纳电子科技有限公司 一种手动真空炉
KR102223057B1 (ko) 2014-06-27 2021-03-05 아뜰리에 부쉬 에스.아. 진공 펌프들의 시스템에서의 펌핑 방법 및 진공 펌프들의 시스템
PT3201469T (pt) * 2014-10-02 2020-04-23 Ateliers Busch S A Sistema de bombagem para gerar um vácuo e processo de bombagem por meio deste sistema de bombagem
US11209024B2 (en) 2015-06-24 2021-12-28 Itt Manufacturing Enterprises Llc Discharge casing insert for pump performance characteristics control
US10155600B2 (en) * 2015-12-28 2018-12-18 Starvac Systems Pty Ltd Apparatus for vacuum sealing products
FR3077343B1 (fr) * 2018-01-29 2020-02-14 Norauto France Centrale d'aspiration pour la collecte de fluides uses d'un vehicule automobile, dispositif comprenant la centrale et procede de collecte

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4714418A (en) * 1984-04-11 1987-12-22 Hitachi, Ltd. Screw type vacuum pump
US4718240A (en) * 1985-03-01 1988-01-12 Helix Technology Corporation Cryopump regeneration method and apparatus
EP0256234A2 (de) * 1986-06-12 1988-02-24 Hitachi, Ltd. Vakuumerzeugungssystem
JPS6385292A (ja) * 1986-09-29 1988-04-15 Hitachi Ltd 真空ポンプ
EP1234982A1 (de) * 2001-02-22 2002-08-28 VARIAN S.p.A. Vakuumpumpe

Family Cites Families (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US1495762A (en) * 1923-05-28 1924-05-27 Emma Rosenhagen Vacuum pump
US2335109A (en) * 1942-06-02 1943-11-23 F E Myers & Bro Co Combination centrifugal ejector pump
US2452874A (en) * 1945-10-24 1948-11-02 Deming Co Pumping system
US2923458A (en) * 1956-11-01 1960-02-02 Sone Tamotsu Diffusion pumps
US2913120A (en) * 1957-03-26 1959-11-17 J P Glasby Mfg Co Inc Vacuum operated apparatus for moving fluid material
US3536418A (en) * 1969-02-13 1970-10-27 Onezime P Breaux Cryogenic turbo-molecular vacuum pump
JPH0353039Y2 (de) * 1987-05-30 1991-11-19
JPS6429690A (en) * 1987-07-22 1989-01-31 Hitachi Ltd Shaft sealing device for screw vacuum pump
JPH0726623B2 (ja) * 1990-03-28 1995-03-29 日本碍子株式会社 真空ユニット
US5611673A (en) * 1994-07-19 1997-03-18 Shin-Ei Kabushiki Kaisha Vacuum jet pump for recovering a mixed fluid of gas and liquid condensates from steam-using apparatus
JPH09125227A (ja) * 1995-10-27 1997-05-13 Tokyo Electron Ltd 真空排気装置及び真空処理装置
US5944049A (en) * 1997-07-15 1999-08-31 Applied Materials, Inc. Apparatus and method for regulating a pressure in a chamber
US5960775A (en) * 1997-12-08 1999-10-05 Walbro Corporation Filtered fuel pump module
RU2142917C1 (ru) * 1998-06-30 1999-12-20 Попов Алексей Юрьевич Способ и устройство для электрохимической обработки воды
TW504548B (en) * 1998-06-30 2002-10-01 Ebara Corp Turbo molecular pump
US6419455B1 (en) * 1999-04-07 2002-07-16 Alcatel System for regulating pressure in a vacuum chamber, vacuum pumping unit equipped with same
DE10009164C1 (de) * 2000-02-26 2001-07-19 Festo Ag & Co Mehrzahl von Vakuumerzeugereinheiten
JP4107364B2 (ja) * 2000-07-25 2008-06-25 大亜真空株式会社 真空装置
JP2002234861A (ja) * 2001-02-09 2002-08-23 Nippon Shokubai Co Ltd ヒドロキシアルキルエステルの製造方法

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4714418A (en) * 1984-04-11 1987-12-22 Hitachi, Ltd. Screw type vacuum pump
US4718240A (en) * 1985-03-01 1988-01-12 Helix Technology Corporation Cryopump regeneration method and apparatus
EP0256234A2 (de) * 1986-06-12 1988-02-24 Hitachi, Ltd. Vakuumerzeugungssystem
JPS6385292A (ja) * 1986-09-29 1988-04-15 Hitachi Ltd 真空ポンプ
EP1234982A1 (de) * 2001-02-22 2002-08-28 VARIAN S.p.A. Vakuumpumpe

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
See also references of WO2004079192A1 *

Also Published As

Publication number Publication date
US20060182638A1 (en) 2006-08-17
EP1609990B1 (de) 2009-08-12
JP2004263635A (ja) 2004-09-24
DE602004022519D1 (de) 2009-09-24
TW200506205A (en) 2005-02-16
EP1609990A1 (de) 2005-12-28
WO2004079192A1 (ja) 2004-09-16

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