JP2004263635A - 真空装置および真空ポンプ - Google Patents

真空装置および真空ポンプ Download PDF

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Publication number
JP2004263635A
JP2004263635A JP2003055749A JP2003055749A JP2004263635A JP 2004263635 A JP2004263635 A JP 2004263635A JP 2003055749 A JP2003055749 A JP 2003055749A JP 2003055749 A JP2003055749 A JP 2003055749A JP 2004263635 A JP2004263635 A JP 2004263635A
Authority
JP
Japan
Prior art keywords
pump
vacuum
vacuum pump
ejector
stage
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2003055749A
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English (en)
Japanese (ja)
Inventor
Tadahiro Omi
忠弘 大見
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Individual
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Individual filed Critical Individual
Priority to JP2003055749A priority Critical patent/JP2004263635A/ja
Priority to DE602004022519T priority patent/DE602004022519D1/de
Priority to PCT/JP2004/002484 priority patent/WO2004079192A1/ja
Priority to EP04716009A priority patent/EP1609990B1/de
Priority to US10/548,225 priority patent/US20060182638A1/en
Priority to TW093105511A priority patent/TW200506205A/zh
Publication of JP2004263635A publication Critical patent/JP2004263635A/ja
Pending legal-status Critical Current

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
    • F04B37/10—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use
    • F04B37/14—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use to obtain high vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C23/00—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids
    • F04C23/005—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids of dissimilar working principle
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/046—Combinations of two or more different types of pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04F—PUMPING OF FLUID BY DIRECT CONTACT OF ANOTHER FLUID OR BY USING INERTIA OF FLUID TO BE PUMPED; SIPHONS
    • F04F5/00—Jet pumps, i.e. devices in which flow is induced by pressure drop caused by velocity of another fluid flow
    • F04F5/14—Jet pumps, i.e. devices in which flow is induced by pressure drop caused by velocity of another fluid flow the inducing fluid being elastic fluid
    • F04F5/16—Jet pumps, i.e. devices in which flow is induced by pressure drop caused by velocity of another fluid flow the inducing fluid being elastic fluid displacing elastic fluids
    • F04F5/20—Jet pumps, i.e. devices in which flow is induced by pressure drop caused by velocity of another fluid flow the inducing fluid being elastic fluid displacing elastic fluids for evacuating
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04F—PUMPING OF FLUID BY DIRECT CONTACT OF ANOTHER FLUID OR BY USING INERTIA OF FLUID TO BE PUMPED; SIPHONS
    • F04F5/00—Jet pumps, i.e. devices in which flow is induced by pressure drop caused by velocity of another fluid flow
    • F04F5/54—Installations characterised by use of jet pumps, e.g. combinations of two or more jet pumps of different type
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
    • F04C18/12—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
    • F04C18/14—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with toothed rotary pistons
    • F04C18/16—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with toothed rotary pistons with helical teeth, e.g. chevron-shaped, screw type
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2220/00—Application
    • F04C2220/10—Vacuum
    • F04C2220/12—Dry running

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
  • Jet Pumps And Other Pumps (AREA)
  • Structures Of Non-Positive Displacement Pumps (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
JP2003055749A 2003-03-03 2003-03-03 真空装置および真空ポンプ Pending JP2004263635A (ja)

Priority Applications (6)

Application Number Priority Date Filing Date Title
JP2003055749A JP2004263635A (ja) 2003-03-03 2003-03-03 真空装置および真空ポンプ
DE602004022519T DE602004022519D1 (de) 2003-03-03 2004-03-01 Vakuumvorrichtung und vakuumpumpe
PCT/JP2004/002484 WO2004079192A1 (ja) 2003-03-03 2004-03-01 真空装置および真空ポンプ
EP04716009A EP1609990B1 (de) 2003-03-03 2004-03-01 Vakuumvorrichtung und vakuumpumpe
US10/548,225 US20060182638A1 (en) 2003-03-03 2004-03-01 Vacuum device and vacuum pump
TW093105511A TW200506205A (en) 2003-03-03 2004-03-03 Vacuum apparatus and vacuum pump

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2003055749A JP2004263635A (ja) 2003-03-03 2003-03-03 真空装置および真空ポンプ

Publications (1)

Publication Number Publication Date
JP2004263635A true JP2004263635A (ja) 2004-09-24

Family

ID=32958669

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2003055749A Pending JP2004263635A (ja) 2003-03-03 2003-03-03 真空装置および真空ポンプ

Country Status (6)

Country Link
US (1) US20060182638A1 (de)
EP (1) EP1609990B1 (de)
JP (1) JP2004263635A (de)
DE (1) DE602004022519D1 (de)
TW (1) TW200506205A (de)
WO (1) WO2004079192A1 (de)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007100562A (ja) * 2005-10-03 2007-04-19 Shinko Seiki Co Ltd 真空装置
JP2015518416A (ja) * 2012-03-28 2015-07-02 オーロテック ゲゼルシャフト ミット ベシュレンクテル ハフツングＡＵＲＯＴＥＣ ＧｍｂＨ 圧力調整されたマルチリアクタシステム
KR20160033134A (ko) * 2013-07-04 2016-03-25 파이퍼 배큠 건식 저진공 펌프
KR20180019723A (ko) * 2015-06-24 2018-02-26 아이티티 매뉴팩츄어링 엔터프라이즈, 엘엘씨 펌프 성능 특성 제어를 위한 배출 케이싱 인서트

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB0418771D0 (en) * 2004-08-20 2004-09-22 Boc Group Plc Evacuation of a load lock enclosure
FR2952683B1 (fr) * 2009-11-18 2011-11-04 Alcatel Lucent Procede et dispositif de pompage a consommation d'energie reduite
TW201118259A (en) * 2009-11-19 2011-06-01 Ji Ee Industry Co Ltd Water pump
CN102062088B (zh) * 2011-01-19 2012-11-28 西安交通大学 一种适应用高含气率工况的双螺杆混输泵装置
US20120261011A1 (en) * 2011-04-14 2012-10-18 Young Man Cho Energy reduction module using a depressurizing vacuum apparatus for vacuum pump
DE102012220442A1 (de) * 2012-11-09 2014-05-15 Oerlikon Leybold Vacuum Gmbh Vakuumpumpensystem zur Evakuierung einer Kammer sowie Verfahren zur Steuerung eines Vakuumpumpensystems
CN103900376B (zh) * 2014-04-15 2015-11-18 吴江市赛纳电子科技有限公司 一种手动真空炉
WO2015197138A1 (fr) 2014-06-27 2015-12-30 Ateliers Busch Sa Méthode de pompage dans un système de pompes à vide et système de pompes à vide
WO2016050313A1 (fr) * 2014-10-02 2016-04-07 Ateliers Busch Sa Systeme de pompage pour generer un vide et procede de pompage au moyen de ce systeme de pompage
US10155600B2 (en) * 2015-12-28 2018-12-18 Starvac Systems Pty Ltd Apparatus for vacuum sealing products
FR3077343B1 (fr) * 2018-01-29 2020-02-14 Norauto France Centrale d'aspiration pour la collecte de fluides uses d'un vehicule automobile, dispositif comprenant la centrale et procede de collecte

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6385292A (ja) * 1986-09-29 1988-04-15 Hitachi Ltd 真空ポンプ
JPH0726623B2 (ja) * 1990-03-28 1995-03-29 日本碍子株式会社 真空ユニット
JPH09125227A (ja) * 1995-10-27 1997-05-13 Tokyo Electron Ltd 真空排気装置及び真空処理装置

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US1495762A (en) * 1923-05-28 1924-05-27 Emma Rosenhagen Vacuum pump
US2335109A (en) * 1942-06-02 1943-11-23 F E Myers & Bro Co Combination centrifugal ejector pump
US2452874A (en) * 1945-10-24 1948-11-02 Deming Co Pumping system
US2923458A (en) * 1956-11-01 1960-02-02 Sone Tamotsu Diffusion pumps
US2913120A (en) * 1957-03-26 1959-11-17 J P Glasby Mfg Co Inc Vacuum operated apparatus for moving fluid material
US3536418A (en) * 1969-02-13 1970-10-27 Onezime P Breaux Cryogenic turbo-molecular vacuum pump
EP0166851B1 (de) * 1984-04-11 1989-09-20 Hitachi, Ltd. Vakuumpumpe der Schraubenbauart
US4718240A (en) * 1985-03-01 1988-01-12 Helix Technology Corporation Cryopump regeneration method and apparatus
JPH0784871B2 (ja) * 1986-06-12 1995-09-13 株式会社日立製作所 真空排気装置
JPH0353039Y2 (de) * 1987-05-30 1991-11-19
JPS6429690A (en) * 1987-07-22 1989-01-31 Hitachi Ltd Shaft sealing device for screw vacuum pump
US5611673A (en) * 1994-07-19 1997-03-18 Shin-Ei Kabushiki Kaisha Vacuum jet pump for recovering a mixed fluid of gas and liquid condensates from steam-using apparatus
US5944049A (en) * 1997-07-15 1999-08-31 Applied Materials, Inc. Apparatus and method for regulating a pressure in a chamber
US5960775A (en) * 1997-12-08 1999-10-05 Walbro Corporation Filtered fuel pump module
TW504548B (en) * 1998-06-30 2002-10-01 Ebara Corp Turbo molecular pump
RU2142917C1 (ru) * 1998-06-30 1999-12-20 Попов Алексей Юрьевич Способ и устройство для электрохимической обработки воды
US6419455B1 (en) * 1999-04-07 2002-07-16 Alcatel System for regulating pressure in a vacuum chamber, vacuum pumping unit equipped with same
DE10009164C1 (de) * 2000-02-26 2001-07-19 Festo Ag & Co Mehrzahl von Vakuumerzeugereinheiten
JP4107364B2 (ja) * 2000-07-25 2008-06-25 大亜真空株式会社 真空装置
JP2002234861A (ja) * 2001-02-09 2002-08-23 Nippon Shokubai Co Ltd ヒドロキシアルキルエステルの製造方法
DE60101368T2 (de) * 2001-02-22 2004-10-14 Varian S.P.A., Leini Vakuumpumpe

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6385292A (ja) * 1986-09-29 1988-04-15 Hitachi Ltd 真空ポンプ
JPH0726623B2 (ja) * 1990-03-28 1995-03-29 日本碍子株式会社 真空ユニット
JPH09125227A (ja) * 1995-10-27 1997-05-13 Tokyo Electron Ltd 真空排気装置及び真空処理装置

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007100562A (ja) * 2005-10-03 2007-04-19 Shinko Seiki Co Ltd 真空装置
JP2015518416A (ja) * 2012-03-28 2015-07-02 オーロテック ゲゼルシャフト ミット ベシュレンクテル ハフツングＡＵＲＯＴＥＣ ＧｍｂＨ 圧力調整されたマルチリアクタシステム
JP2018108588A (ja) * 2012-03-28 2018-07-12 オーロテック ゲゼルシャフト ミット ベシュレンクテル ハフツングＡＵＲＯＴＥＣ ＧｍｂＨ 圧力調整されたマルチリアクタシステム
KR20160033134A (ko) * 2013-07-04 2016-03-25 파이퍼 배큠 건식 저진공 펌프
JP2016523343A (ja) * 2013-07-04 2016-08-08 ファイファー バキユーム ドライ低真空ポンプ
KR102199323B1 (ko) * 2013-07-04 2021-01-06 파이퍼 배큠 건식 저진공 펌프
KR20180019723A (ko) * 2015-06-24 2018-02-26 아이티티 매뉴팩츄어링 엔터프라이즈, 엘엘씨 펌프 성능 특성 제어를 위한 배출 케이싱 인서트
KR102624357B1 (ko) 2015-06-24 2024-01-11 아이티티 매뉴팩츄어링 엔터프라이즈, 엘엘씨 펌프 성능 특성 제어를 위한 배출 케이싱 인서트

Also Published As

Publication number Publication date
WO2004079192A1 (ja) 2004-09-16
EP1609990B1 (de) 2009-08-12
DE602004022519D1 (de) 2009-09-24
TW200506205A (en) 2005-02-16
US20060182638A1 (en) 2006-08-17
EP1609990A1 (de) 2005-12-28
EP1609990A4 (de) 2007-07-18

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