EP1861408A4 - Verfahren zur herstellung von hydrochlorsilanen - Google Patents

Verfahren zur herstellung von hydrochlorsilanen

Info

Publication number
EP1861408A4
EP1861408A4 EP05725398A EP05725398A EP1861408A4 EP 1861408 A4 EP1861408 A4 EP 1861408A4 EP 05725398 A EP05725398 A EP 05725398A EP 05725398 A EP05725398 A EP 05725398A EP 1861408 A4 EP1861408 A4 EP 1861408A4
Authority
EP
European Patent Office
Prior art keywords
hydrochlorosilanes
production
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP05725398A
Other languages
English (en)
French (fr)
Other versions
EP1861408A1 (de
Inventor
William C Breneman
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Advanced Silicon Materials LLC
Original Assignee
Advanced Silicon Materials LLC
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=36991997&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=EP1861408(A4) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by Advanced Silicon Materials LLC filed Critical Advanced Silicon Materials LLC
Publication of EP1861408A1 publication Critical patent/EP1861408A1/de
Publication of EP1861408A4 publication Critical patent/EP1861408A4/de
Withdrawn legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C07—ORGANIC CHEMISTRY
    • C07F—ACYCLIC, CARBOCYCLIC OR HETEROCYCLIC COMPOUNDS CONTAINING ELEMENTS OTHER THAN CARBON, HYDROGEN, HALOGEN, OXYGEN, NITROGEN, SULFUR, SELENIUM OR TELLURIUM
    • C07F7/00—Compounds containing elements of Groups 4 or 14 of the Periodic Table
    • C07F7/02—Silicon compounds
    • C07F7/08—Compounds having one or more C—Si linkages
    • C07F7/12—Organo silicon halides
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B33/00—Silicon; Compounds thereof
    • C01B33/08—Compounds containing halogen
    • C01B33/107—Halogenated silanes
    • C01B33/1071—Tetrachloride, trichlorosilane or silicochloroform, dichlorosilane, monochlorosilane or mixtures thereof
    • C01B33/10742—Tetrachloride, trichlorosilane or silicochloroform, dichlorosilane, monochlorosilane or mixtures thereof prepared by hydrochlorination of silicon or of a silicon-containing material
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J23/00—Catalysts comprising metals or metal oxides or hydroxides, not provided for in group B01J21/00
    • B01J23/38—Catalysts comprising metals or metal oxides or hydroxides, not provided for in group B01J21/00 of noble metals
    • B01J23/40—Catalysts comprising metals or metal oxides or hydroxides, not provided for in group B01J21/00 of noble metals of the platinum group metals
    • B01J23/42—Platinum
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J23/00—Catalysts comprising metals or metal oxides or hydroxides, not provided for in group B01J21/00
    • B01J23/70—Catalysts comprising metals or metal oxides or hydroxides, not provided for in group B01J21/00 of the iron group metals or copper
    • B01J23/72—Copper
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J27/00—Catalysts comprising the elements or compounds of halogens, sulfur, selenium, tellurium, phosphorus or nitrogen; Catalysts comprising carbon compounds
    • B01J27/06—Halogens; Compounds thereof
    • B01J27/08—Halides
    • B01J27/122—Halides of copper
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J37/00—Processes, in general, for preparing catalysts; Processes, in general, for activation of catalysts
    • B01J37/16—Reducing
    • B01J37/18—Reducing with gases containing free hydrogen
    • C—CHEMISTRY; METALLURGY
    • C07—ORGANIC CHEMISTRY
    • C07F—ACYCLIC, CARBOCYCLIC OR HETEROCYCLIC COMPOUNDS CONTAINING ELEMENTS OTHER THAN CARBON, HYDROGEN, HALOGEN, OXYGEN, NITROGEN, SULFUR, SELENIUM OR TELLURIUM
    • C07F7/00—Compounds containing elements of Groups 4 or 14 of the Periodic Table
    • C07F7/02—Silicon compounds
    • C07F7/08—Compounds having one or more C—Si linkages
    • C07F7/12—Organo silicon halides
    • C07F7/16—Preparation thereof from silicon and halogenated hydrocarbons direct synthesis

Landscapes

  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Inorganic Chemistry (AREA)
  • Silicon Compounds (AREA)
  • Catalysts (AREA)
  • Low-Molecular Organic Synthesis Reactions Using Catalysts (AREA)
EP05725398A 2005-03-09 2005-03-09 Verfahren zur herstellung von hydrochlorsilanen Withdrawn EP1861408A4 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/US2005/008204 WO2006098722A1 (en) 2005-03-09 2005-03-09 Process for the production of hydrochlorosilanes

Publications (2)

Publication Number Publication Date
EP1861408A1 EP1861408A1 (de) 2007-12-05
EP1861408A4 true EP1861408A4 (de) 2011-08-03

Family

ID=36991997

Family Applications (1)

Application Number Title Priority Date Filing Date
EP05725398A Withdrawn EP1861408A4 (de) 2005-03-09 2005-03-09 Verfahren zur herstellung von hydrochlorsilanen

Country Status (8)

Country Link
EP (1) EP1861408A4 (de)
JP (1) JP4813545B2 (de)
KR (1) KR101176088B1 (de)
CN (1) CN101189245B (de)
DE (1) DE112005003497T5 (de)
NO (1) NO20076030L (de)
TW (1) TWI454424B (de)
WO (1) WO2006098722A1 (de)

Families Citing this family (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101279734B (zh) * 2008-05-30 2010-06-02 广州吉必盛科技实业有限公司 合成多晶硅原料三氯氢硅的方法
DE102008002537A1 (de) * 2008-06-19 2009-12-24 Evonik Degussa Gmbh Verfahren zur Entfernung von Bor enthaltenden Verunreinigungen aus Halogensilanen sowie Anlage zur Durchführung des Verfahrens
US7927984B2 (en) * 2008-11-05 2011-04-19 Hemlock Semiconductor Corporation Silicon production with a fluidized bed reactor utilizing tetrachlorosilane to reduce wall deposition
US8178051B2 (en) * 2008-11-05 2012-05-15 Stephen Michael Lord Apparatus and process for hydrogenation of a silicon tetrahalide and silicon to the trihalosilane
US8778292B2 (en) * 2009-05-12 2014-07-15 Procedyne Corporation Fluidized bed process for synthesizing trichlorosilane and a trichlorosilane synthesizer
KR101672796B1 (ko) * 2009-11-10 2016-11-07 주식회사 케이씨씨 염소가스 혹은 염화수소를 이용하여 다결정실리콘 제조원료인 고순도의 삼염화실란을 제조하는 방법
JP5542026B2 (ja) 2010-10-27 2014-07-09 信越化学工業株式会社 クロロシラン類の精製方法
EP2768774B1 (de) * 2011-10-20 2017-03-22 REC Silicon Inc Verschmutzungsminderung bei der hydrochlorosilan-herstellung
CN104203821A (zh) * 2012-03-14 2014-12-10 森特瑟姆光伏美国有限公司 三氯甲硅烷生产
KR101462634B1 (ko) * 2013-03-07 2014-11-17 한화케미칼 주식회사 트리클로로실란의 제조방법
WO2014172102A1 (en) * 2013-04-19 2014-10-23 Rec Silicon Inc Corrosion and fouling reduction in hydrochlorosilane production
KR101519498B1 (ko) * 2013-06-19 2015-05-12 한화케미칼 주식회사 트리클로로실란의 제조방법
CN105080434B (zh) * 2014-04-18 2018-02-27 新特能源股份有限公司 一种催化反应器、系统、四氯化硅催化氢化反应的方法
KR101616043B1 (ko) * 2014-07-22 2016-04-27 한화케미칼 주식회사 삼염화실란의 제조방법
CN107108236A (zh) * 2014-12-18 2017-08-29 赫姆洛克半导体运营有限责任公司 氢化卤代硅烷的方法
JP6874218B2 (ja) * 2017-10-05 2021-05-19 ワッカー ケミー アクチエンゲゼルシャフトＷａｃｋｅｒ Ｃｈｅｍｉｅ ＡＧ クロロシラン類の製造方法
CN113651844B (zh) * 2021-08-20 2023-09-12 唐山偶联硅业有限公司 连续法制备二甲基氢氯硅烷的工艺

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2499009A (en) * 1947-02-15 1950-02-28 Linde Air Prod Co Chlorosilanes
EP0489441A1 (de) * 1990-12-06 1992-06-10 Dow Corning Corporation Metallkatalysierte Herstellung von Siliziumtetrachlorsilan
DE19654154A1 (de) * 1995-12-25 1997-06-26 Tokuyama Corp Verfahren zur Herstellung von Trichlorsilan
WO2002022500A1 (de) * 2000-09-14 2002-03-21 Solarworld Ag Verfahren zur herstellung von trichlorsilan
DE10049963A1 (de) * 2000-10-10 2002-04-11 Bayer Ag Verfahren zur Herstellung von Trichlorsilan

Family Cites Families (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4676967A (en) * 1978-08-23 1987-06-30 Union Carbide Corporation High purity silane and silicon production
US4314908A (en) * 1979-10-24 1982-02-09 Union Carbide Corporation Preparation of reaction mass for the production of methylchlorosilane
JPS58161915A (ja) * 1982-03-17 1983-09-26 Shin Etsu Chem Co Ltd トリクロロシランの製造方法
US4526769A (en) * 1983-07-18 1985-07-02 Motorola, Inc. Trichlorosilane production process
JPS62288109A (ja) * 1986-06-05 1987-12-15 Mitsubishi Metal Corp トリクロルシランの製造方法
JPH0788214B2 (ja) * 1986-10-15 1995-09-27 三井東圧化学株式会社 トリクロロシランの製造方法
JP2613259B2 (ja) * 1988-06-09 1997-05-21 三井東圧化学株式会社 トリクロロシランの製造方法
JP2613260B2 (ja) * 1988-06-09 1997-05-21 三井東圧化学株式会社 トリクロロシランの製造方法
JPH01313318A (ja) * 1988-06-10 1989-12-18 Mitsui Toatsu Chem Inc トリクロロシランの製造方法
US4973725A (en) * 1988-06-28 1990-11-27 Union Carbide Chemicals And Plastics Company Inc. Direct synthesis process for organohalohydrosilanes
US5051248A (en) * 1990-08-15 1991-09-24 Dow Corning Corporation Silane products from reaction of silicon monoxide with hydrogen halides
US5250716A (en) * 1992-05-28 1993-10-05 Mui Jeffrey Y P Method for making a silicon/copper contact mass suitable for direct reaction
US5329038A (en) * 1993-12-29 1994-07-12 Dow Corning Corporation Process for hydrogenation of chlorosilane
JP3708648B2 (ja) * 1995-12-25 2005-10-19 株式会社トクヤマ トリクロロシランの製造方法
JP3708649B2 (ja) * 1995-12-25 2005-10-19 株式会社トクヤマ 銅シリサイドを有する金属珪素粒子の製造方法
KR100210261B1 (ko) * 1997-03-13 1999-07-15 이서봉 발열반응을 이용한 다결정 실리콘의 제조 방법
US6057469A (en) * 1997-07-24 2000-05-02 Pechiney Electrometallurgie Process for manufacturing active silicon powder for the preparation of alkyl- or aryl-halosilanes

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2499009A (en) * 1947-02-15 1950-02-28 Linde Air Prod Co Chlorosilanes
EP0489441A1 (de) * 1990-12-06 1992-06-10 Dow Corning Corporation Metallkatalysierte Herstellung von Siliziumtetrachlorsilan
DE19654154A1 (de) * 1995-12-25 1997-06-26 Tokuyama Corp Verfahren zur Herstellung von Trichlorsilan
WO2002022500A1 (de) * 2000-09-14 2002-03-21 Solarworld Ag Verfahren zur herstellung von trichlorsilan
DE10049963A1 (de) * 2000-10-10 2002-04-11 Bayer Ag Verfahren zur Herstellung von Trichlorsilan

Non-Patent Citations (2)

* Cited by examiner, † Cited by third party
Title
A.E. SCHWEIZER, G.T. KERR: "Thermal Descomposition of Hexachloroplatinic Acid", INORGANIC CHEMISTRY, vol. 17, 1978, pages 2326 - 2327, XP002629605, DOI: 10.1021/ic50186a067 *
See also references of WO2006098722A1 *

Also Published As

Publication number Publication date
CN101189245B (zh) 2012-06-13
EP1861408A1 (de) 2007-12-05
NO20076030L (no) 2007-12-07
TWI454424B (zh) 2014-10-01
TW200704589A (en) 2007-02-01
CN101189245A (zh) 2008-05-28
JP2008532907A (ja) 2008-08-21
DE112005003497T5 (de) 2008-01-24
KR101176088B1 (ko) 2012-08-22
JP4813545B2 (ja) 2011-11-09
KR20080008323A (ko) 2008-01-23
WO2006098722A1 (en) 2006-09-21

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DAX Request for extension of the european patent (deleted)
A4 Supplementary search report drawn up and despatched

Effective date: 20110705

RIC1 Information provided on ipc code assigned before grant

Ipc: C07F 7/04 20060101AFI20110628BHEP

17Q First examination report despatched

Effective date: 20120619

STAA Information on the status of an ep patent application or granted ep patent

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18D Application deemed to be withdrawn

Effective date: 20141001