EP1843043A3 - Vakuumpumpe mit Antriebsgerät - Google Patents
Vakuumpumpe mit Antriebsgerät Download PDFInfo
- Publication number
- EP1843043A3 EP1843043A3 EP07006199.9A EP07006199A EP1843043A3 EP 1843043 A3 EP1843043 A3 EP 1843043A3 EP 07006199 A EP07006199 A EP 07006199A EP 1843043 A3 EP1843043 A3 EP 1843043A3
- Authority
- EP
- European Patent Office
- Prior art keywords
- interior
- vacuum pump
- drive device
- environment
- separating element
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D19/00—Axial-flow pumps
- F04D19/02—Multi-stage pumps
- F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D17/00—Radial-flow pumps, e.g. centrifugal pumps; Helico-centrifugal pumps
- F04D17/08—Centrifugal pumps
- F04D17/16—Centrifugal pumps for displacing without appreciable compression
- F04D17/168—Pumps specially adapted to produce a vacuum
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D25/00—Pumping installations or systems
- F04D25/02—Units comprising pumps and their driving means
- F04D25/06—Units comprising pumps and their driving means the pump being electrically driven
- F04D25/0693—Details or arrangements of the wiring
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D29/00—Details, component parts, or accessories
- F04D29/08—Sealings
- F04D29/083—Sealings especially adapted for elastic fluid pumps
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Non-Positive Displacement Air Blowers (AREA)
- Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
- Applications Or Details Of Rotary Compressors (AREA)
- Compressor (AREA)
Abstract
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE102006016405A DE102006016405A1 (de) | 2006-04-07 | 2006-04-07 | Vakuumpumpe mit Antriebsgerät |
Publications (3)
Publication Number | Publication Date |
---|---|
EP1843043A2 EP1843043A2 (de) | 2007-10-10 |
EP1843043A3 true EP1843043A3 (de) | 2014-04-23 |
EP1843043B1 EP1843043B1 (de) | 2018-05-16 |
Family
ID=38051875
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP07006199.9A Active EP1843043B1 (de) | 2006-04-07 | 2007-03-27 | Vakuumpumpe mit Antriebsgerät |
Country Status (4)
Country | Link |
---|---|
US (1) | US8651838B2 (de) |
EP (1) | EP1843043B1 (de) |
JP (1) | JP5303114B2 (de) |
DE (1) | DE102006016405A1 (de) |
Families Citing this family (35)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE102006058843A1 (de) * | 2006-12-13 | 2008-06-19 | Pfeiffer Vacuum Gmbh | Vakuumpumpe |
WO2008096622A1 (ja) * | 2007-02-06 | 2008-08-14 | Edwards Japan Limited | 真空ポンプ |
DE202007012070U1 (de) * | 2007-08-30 | 2009-01-08 | Oerlikon Leybold Vacuum Gmbh | Stromdurchführung einer Vakuumpumpe |
DE102009031983A1 (de) | 2009-07-06 | 2011-01-13 | Lti Drives Gmbh | An eine Vakuumpumpe anschließbare elektrische Verbindungseinheit |
JP2011144788A (ja) * | 2010-01-18 | 2011-07-28 | Toyota Industries Corp | 電動圧縮機 |
WO2011111209A1 (ja) * | 2010-03-11 | 2011-09-15 | 株式会社島津製作所 | ターボ分子ポンプ装置 |
JP5353838B2 (ja) | 2010-07-07 | 2013-11-27 | 株式会社島津製作所 | 真空ポンプ |
KR101848528B1 (ko) * | 2010-10-19 | 2018-04-12 | 에드워즈 가부시키가이샤 | 진공 펌프 |
KR101848529B1 (ko) * | 2010-10-19 | 2018-04-12 | 에드워즈 가부시키가이샤 | 진공 펌프 |
ITCO20100067A1 (it) * | 2010-12-23 | 2012-06-24 | Nuovo Pignone Spa | Connessione elettrica per turbomacchina e metodo |
CN103047152B (zh) * | 2011-10-17 | 2016-06-22 | 株式会社岛津制作所 | 真空泵 |
JP5673497B2 (ja) * | 2011-11-08 | 2015-02-18 | 株式会社島津製作所 | 一体型ターボ分子ポンプ |
JP5768670B2 (ja) * | 2011-11-09 | 2015-08-26 | 株式会社島津製作所 | ターボ分子ポンプ装置 |
JP5963459B2 (ja) * | 2012-01-31 | 2016-08-03 | 住友重機械工業株式会社 | クライオポンプおよびクライオポンプの修理方法 |
JP5511915B2 (ja) * | 2012-08-28 | 2014-06-04 | 株式会社大阪真空機器製作所 | 分子ポンプ |
JP6069981B2 (ja) * | 2012-09-10 | 2017-02-01 | 株式会社島津製作所 | ターボ分子ポンプ |
DE102013222905A1 (de) * | 2013-11-11 | 2015-05-13 | Oerlikon Leybold Vacuum Gmbh | Antriebs- und Steuereinrichtung für eine Vakuumpumpe, Vakuumpumpe sowie Verfahren zum Herstellen einer Steuerplatine für eine Vakuumpumpe |
JP6449551B2 (ja) * | 2014-03-12 | 2019-01-09 | エドワーズ株式会社 | 真空ポンプの制御装置とこれを備えた真空ポンプ |
EP3088737B1 (de) * | 2015-04-30 | 2020-06-17 | Pfeiffer Vacuum Gmbh | Vakuumpumpe und verfahren zur herstellung einer vakuumpumpe |
JP6753759B2 (ja) | 2016-10-21 | 2020-09-09 | エドワーズ株式会社 | 真空ポンプ及び該真空ポンプに適用される防水構造、制御装置 |
EP3333429B1 (de) | 2016-12-09 | 2022-02-09 | Pfeiffer Vacuum Gmbh | Vakuumgerät |
EP3339652B1 (de) | 2016-12-22 | 2020-07-01 | Pfeiffer Vacuum Gmbh | Vakuumpumpe mit einer innenverkleidung zur aufnahme von ablagerungen |
JP6852457B2 (ja) * | 2017-02-27 | 2021-03-31 | 株式会社島津製作所 | 電源一体型真空ポンプ |
EP3431769B1 (de) | 2017-07-21 | 2022-05-04 | Pfeiffer Vacuum Gmbh | Vakuumpumpe |
EP3462034A1 (de) | 2017-09-28 | 2019-04-03 | Pfeiffer Vacuum Gmbh | Vakuumpumpe |
EP3470681B1 (de) * | 2017-10-10 | 2021-09-22 | Pfeiffer Vacuum Gmbh | Elektrische durchführung für ein vakuumgerät, in der form einer dichtungsplatine |
CN111213316B (zh) * | 2017-10-31 | 2021-07-13 | 株式会社爱发科 | 真空泵及其控制方法 |
CN107986264B (zh) * | 2017-11-28 | 2020-06-30 | 瑞安市任奇科技有限公司 | 一种基于物联网的安全的超声波石墨烯剥离制备装置 |
JP7096006B2 (ja) * | 2018-02-16 | 2022-07-05 | エドワーズ株式会社 | 真空ポンプと真空ポンプの制御装置 |
JP7088688B2 (ja) * | 2018-02-16 | 2022-06-21 | エドワーズ株式会社 | 真空ポンプと真空ポンプの制御装置 |
GB201808893D0 (en) | 2018-05-31 | 2018-07-18 | Micromass Ltd | Bench-top time of flight mass spectrometer |
GB201808932D0 (en) | 2018-05-31 | 2018-07-18 | Micromass Ltd | Bench-top time of flight mass spectrometer |
JP7244328B2 (ja) * | 2019-03-28 | 2023-03-22 | エドワーズ株式会社 | 真空ポンプ及び該真空ポンプの制御装置 |
EP3626971B1 (de) * | 2019-08-30 | 2022-05-11 | Pfeiffer Vacuum Gmbh | Vakuumpumpe |
DE102021129376A1 (de) | 2021-03-17 | 2022-09-22 | Hanon Systems | Gehäuseeinheit für ein elektronisches Bauteil eines elektrischen Kältemittelverdichters |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE4237971A1 (de) * | 1992-11-11 | 1994-05-19 | Leybold Ag | Vakuumpumpe mit Wandler |
DE69717231T2 (de) * | 1996-10-08 | 2003-09-11 | Varian Spa | Vakuumpumpgerät |
US20030175132A1 (en) * | 2002-03-13 | 2003-09-18 | Takaharu Ishikawa | Vacuum pump |
EP1757825A1 (de) * | 2005-08-24 | 2007-02-28 | Mecos Traxler AG | Magnetlagereinrichtung mit verbesserter Gehäusedurchführung bei Vakuum |
Family Cites Families (29)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE2119857A1 (de) * | 1971-04-23 | 1972-11-02 | Leybold-Heraeus GmbH & Co KG, 5000 Köln | Einrichtung zur Ölversorgung von Lagerstellen |
DE2349033C3 (de) * | 1973-09-29 | 1984-08-30 | Leybold-Heraeus Gmbh, 5000 Koeln | Turbomolekularpumpe |
GB8622878D0 (en) * | 1986-09-23 | 1986-10-29 | Marconi Instruments Ltd | Electrical interface arrangement |
US4804330A (en) * | 1987-05-14 | 1989-02-14 | The United States Of America As Represented By The Secretary Of The Air Force | Hermetic, vacuum and pressure tight electrical feedthru |
US4797007A (en) * | 1987-12-18 | 1989-01-10 | Emhart Industries, Inc. | Temperature and line pressure probe |
GB8830057D0 (en) * | 1988-12-23 | 1989-02-22 | Lucas Ind Plc | An electrical connection arrangement and a method of providing an electrical connection |
JPH0434873U (de) * | 1990-07-16 | 1992-03-24 | ||
US5247424A (en) * | 1992-06-16 | 1993-09-21 | International Business Machines Corporation | Low temperature conduction module with gasket to provide a vacuum seal and electrical connections |
US5393931A (en) * | 1993-03-04 | 1995-02-28 | Photmetrics, Ltd. | Electrical access to a hermetically sealed chamber using a printed circuit board |
JP2778894B2 (ja) * | 1993-03-12 | 1998-07-23 | 山洋電気株式会社 | ブラシレス直流モータ及び軸受ホルダ |
US6902378B2 (en) * | 1993-07-16 | 2005-06-07 | Helix Technology Corporation | Electronically controlled vacuum pump |
KR0140034B1 (ko) * | 1993-12-16 | 1998-07-15 | 모리시다 요이치 | 반도체 웨이퍼 수납기, 반도체 웨이퍼의 검사용 집적회로 단자와 프로브 단자와의 접속방법 및 그 장치, 반도체 집적회로의 검사방법, 프로브카드 및 그 제조방법 |
JP3572117B2 (ja) * | 1995-06-12 | 2004-09-29 | 光洋精工株式会社 | 磁気軸受装置を含む真空ポンプ |
US6316768B1 (en) * | 1997-03-14 | 2001-11-13 | Leco Corporation | Printed circuit boards as insulated components for a time of flight mass spectrometer |
JP3456426B2 (ja) * | 1998-11-24 | 2003-10-14 | 住友電気工業株式会社 | 電子制御ユニット |
EP1024294A3 (de) * | 1999-01-29 | 2002-03-13 | Ibiden Co., Ltd. | Motor und Turbomolekularpumpe |
US6251471B1 (en) * | 1999-05-12 | 2001-06-26 | University Of New Hampshire | Surface trace electrical feedthru |
JP2001241393A (ja) * | 1999-12-21 | 2001-09-07 | Seiko Seiki Co Ltd | 真空ポンプ |
US6793466B2 (en) * | 2000-10-03 | 2004-09-21 | Ebara Corporation | Vacuum pump |
US6305975B1 (en) * | 2000-10-12 | 2001-10-23 | Bear Instruments, Inc. | Electrical connector feedthrough to low pressure chamber |
US6350964B1 (en) * | 2000-11-09 | 2002-02-26 | Applied Materials, Inc. | Power distribution printed circuit board for a semiconductor processing system |
JP2002276587A (ja) * | 2001-03-19 | 2002-09-25 | Boc Edwards Technologies Ltd | ターボ分子ポンプ |
JP2003269369A (ja) * | 2002-03-13 | 2003-09-25 | Boc Edwards Technologies Ltd | 真空ポンプ |
JP4409892B2 (ja) * | 2003-09-11 | 2010-02-03 | 日本電産コパル株式会社 | ファンモータ |
FR2861142B1 (fr) * | 2003-10-16 | 2006-02-03 | Mecanique Magnetique Sa | Pompe a vide turbo moleculaire |
EP1768237A3 (de) * | 2003-12-30 | 2007-08-29 | Emerson Climate Technologies, Inc. | Verdichterschutz- und Kontroll-System |
JP4211658B2 (ja) * | 2004-03-31 | 2009-01-21 | 株式会社島津製作所 | ターボ分子ポンプ |
JP4594689B2 (ja) * | 2004-09-27 | 2010-12-08 | エドワーズ株式会社 | 真空ポンプ |
JP4661278B2 (ja) * | 2005-03-10 | 2011-03-30 | 株式会社島津製作所 | ターボ分子ポンプ |
-
2006
- 2006-04-07 DE DE102006016405A patent/DE102006016405A1/de active Granted
-
2007
- 2007-03-06 JP JP2007055265A patent/JP5303114B2/ja active Active
- 2007-03-27 EP EP07006199.9A patent/EP1843043B1/de active Active
- 2007-03-28 US US11/729,767 patent/US8651838B2/en not_active Expired - Fee Related
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE4237971A1 (de) * | 1992-11-11 | 1994-05-19 | Leybold Ag | Vakuumpumpe mit Wandler |
DE69717231T2 (de) * | 1996-10-08 | 2003-09-11 | Varian Spa | Vakuumpumpgerät |
US20030175132A1 (en) * | 2002-03-13 | 2003-09-18 | Takaharu Ishikawa | Vacuum pump |
EP1757825A1 (de) * | 2005-08-24 | 2007-02-28 | Mecos Traxler AG | Magnetlagereinrichtung mit verbesserter Gehäusedurchführung bei Vakuum |
Also Published As
Publication number | Publication date |
---|---|
EP1843043A2 (de) | 2007-10-10 |
US20070237650A1 (en) | 2007-10-11 |
JP2007278278A (ja) | 2007-10-25 |
JP5303114B2 (ja) | 2013-10-02 |
US8651838B2 (en) | 2014-02-18 |
EP1843043B1 (de) | 2018-05-16 |
DE102006016405A1 (de) | 2007-10-11 |
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