EP1836714B1 - Mikrosystem mit elektromagnetischer steuerung - Google Patents

Mikrosystem mit elektromagnetischer steuerung Download PDF

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Publication number
EP1836714B1
EP1836714B1 EP06700703A EP06700703A EP1836714B1 EP 1836714 B1 EP1836714 B1 EP 1836714B1 EP 06700703 A EP06700703 A EP 06700703A EP 06700703 A EP06700703 A EP 06700703A EP 1836714 B1 EP1836714 B1 EP 1836714B1
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EP
European Patent Office
Prior art keywords
microsystem
substrate
magnetic
membrane
magnetic field
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Not-in-force
Application number
EP06700703A
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English (en)
French (fr)
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EP1836714A1 (de
Inventor
Sylvain Paineau
Caroline Coutier
Amalia Garnier
Benoit Grappe
Laurent Chiesi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Schneider Electric Industries SAS
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Schneider Electric Industries SAS
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Filing date
Publication date
Application filed by Schneider Electric Industries SAS filed Critical Schneider Electric Industries SAS
Publication of EP1836714A1 publication Critical patent/EP1836714A1/de
Application granted granted Critical
Publication of EP1836714B1 publication Critical patent/EP1836714B1/de
Not-in-force legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H50/00—Details of electromagnetic relays
    • H01H50/005—Details of electromagnetic relays using micromechanics
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H1/00—Contacts
    • H01H1/0036—Switches making use of microelectromechanical systems [MEMS]
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H36/00—Switches actuated by change of magnetic field or of electric field, e.g. by change of relative position of magnet and switch, by shielding
    • H01H2036/0093—Micromechanical switches actuated by a change of the magnetic field
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H50/00—Details of electromagnetic relays
    • H01H50/005—Details of electromagnetic relays using micromechanics
    • H01H2050/007—Relays of the polarised type, e.g. the MEMS relay beam having a preferential magnetisation direction

Definitions

  • the present invention relates to a microsystem comprising at least one magnetic microactuator actuated by means of an external excitation coil.
  • a microsystem can be used as electrical switch device, in particular of the switch, contactor or relay type. This type of microsystem is particularly adapted to be realized by MEMS technology.
  • the document US 6,320,145 describes a magnetostatic relay.
  • This relay operates using a monostable and magnetisable beam. Under the action of a magnetic field, this beam bends to tend to align in the direction of this magnetic field and closes an electrical circuit.
  • the beam being made of an elastic material, it returns to its initial position simply by mechanical effect when the interaction of the magnetic field with the beam is zero.
  • the restoring force of the beam towards its initial position is therefore of purely mechanical origin and is imposed solely by the nature of the material of manufacture of the beam and by the geometry of the elements involved.
  • This rest position is maintained thanks to the magnetic field produced on the magnetizable beam by a permanent magnet.
  • the electromagnet When energizing the electromagnet, it produces a second magnetic field oriented to cause the beam to tilt from its first position to its second position. Once the beam in its second position, the electromagnet is deactivated and the beam is maintained in this second position under the effect of the permanent magnetic field.
  • the object of the invention is therefore to provide a microsystem for overcoming the aforementioned drawbacks, which is of a simple design, a moderate cost and which may include, if necessary, a large number of microactuators.
  • the microactuator is thus placed in the center of the solenoid coil.
  • the coil is external to the substrate, that is to say not integrated therewith, which makes it possible to overcome some of the disadvantages listed above.
  • the manufacture of an external coil by printed circuit techniques, by winding copper wire or any other three-dimensional packaging solution does not have the disadvantages of an integrated coil and the yields for these techniques are very well controlled.
  • the movable element comprises a membrane mounted on the substrate, having a longitudinal axis and able to pivot between its different positions along an axis perpendicular to the longitudinal axis, said membrane having at least one layer made of a magnetic material .
  • the magnetic field is generated using a permanent magnet, for example glued on the substrate.
  • a permanent magnet for example glued on the substrate.
  • one step is to correctly position the permanent magnet relative to the microactuator, so that the magnetic field generated by the magnet has the desired influence on the mobile element of the microactuator .
  • the use of an air gap in which the first magnetic field generated is uniform makes it possible to dispense with this step during assembly.
  • the first magnetic field created in the air gap is uniform and is oriented perpendicular to the surface of the substrate supporting the microactuator.
  • This first magnetic field generates in the membrane a magnetic component along its axis.
  • the magnetic torque resulting from this field and the magnetic component in the membrane forces the latter to remain in a position.
  • the second magnetic field created by the excitation coil is perpendicular to the direction of the first magnetic field.
  • This second field generates a magnetic component in the membrane along its axis which opposes the first component generated by the magnetic field. If this new magnetic component is of greater amplitude, the membrane pivots to its other position.
  • the solenoid-type excitation coil has a variable coil density along its length.
  • the excitation coil comprises a greater number of turns at each of its ends. This makes it possible to standardize the second axial magnetic field generated in the solenoid and thus to increase the useful volume of the solenoid.
  • the magnetic source of the magnetic circuit for generating the first magnetic field is a permanent magnet or an electromagnetic coil.
  • the substrate is subjected to a uniform magnetic field whose field lines follow a direction not perpendicular to the plane defined by the surface of the substrate supporting the magnetic microactuator.
  • a uniform magnetic field whose field lines follow a direction not perpendicular to the plane defined by the surface of the substrate supporting the magnetic microactuator.
  • MEMS Micro Electro-Mechanical System
  • the inclination of the microactuator membrane is guaranteed by the arrangement of the microsystem in the magnetic circuit generating the uniform field and not by the thickness of the sacrificial layer.
  • the sacrificial layer between the membrane and the substrate can therefore be thin.
  • the microsystem can control the opening and closing of two electrical circuits.
  • the microsystem can be manufactured at least partly according to a MEMS type technology.
  • the substrate supports a plurality of identical magnetic microactuators able to be controlled simultaneously by said excitation coil.
  • a solenoid-type excitation coil surrounding the substrate therefore acts on a matrix of microactuators.
  • the matrix is placed in the center of the solenoid coil.
  • the microactuators are for example micro-relays connected by electrical tracks and arranged in series to increase the insulation voltage or in parallel to divide the intensity of the current.
  • a microsystem according to the invention controls the opening or closing of an electrical circuit using a microactuator 2, 2 'magnetic.
  • a microsystem comprises a microactuator 2, 2 'supported by a substrate 3.
  • the substrate 3 is for example made of materials such as glass, plastic or, for power applications, in materials that are good thermal conductors based on silicon. or ceramic.
  • the substrate 3 has a flat surface 30 on which is fixed the microactuator 2, 2 '.
  • the substrate 3 carries for example at least two electrodes 31, 32 ( FIGS. 2A and 2B ) intended to be electrically connected in order to obtain the closure of the electric circuit.
  • the microactuator 2, 2 'magnetic carries at least one contact 21, 21 'movable adapted to come electrically connect the two electrodes 31, 32 when the microactuator 2, 2' is activated.
  • the microactuator 2 is composed of a movable element consisting of a membrane 20, for example parallelepipedal, having a longitudinal axis (A) and connected by one of its ends to an anchor stud 23 secured to the substrate 3, by intermediate two arms 22a, 22b of parallel connection.
  • the contact 21 is for example formed on the membrane 20 near the free end of the membrane 20 and faces the surface 30 of the substrate 3.
  • the membrane 20 is able to pivot relative to the substrate 3 along an axis (P) parallel to the axis described by the points of contact of the membrane 20 with the electrodes 31, 32, parallel to the surface 30 of the substrate and perpendicular to its longitudinal axis (A).
  • the link arms 22a, 22b form an elastic connection between the membrane 20 and the anchor stud 23.
  • the pivoting of the membrane 20 is thus obtained by bending the connecting arms 22a, 22b.
  • the membrane 20 is parallel to the plane formed by the surface 30 of the substrate 3.
  • a microactuator 2 'can be used in a microsystem according to the invention comprises a movable element consisting of a rigid membrane for example parallelepiped, having a longitudinal axis (A').
  • this membrane 20 ' is secured to the substrate 3 by means of two connecting arms 22a', 22b 'connecting said membrane 20' to two anchoring studs 23a ', 23b' arranged symmetrically on either side of the membrane 20 'and its axis (A').
  • the movable contact 21 ' is for example formed on the membrane 20' near the end of the membrane 20 'and faces the surface 30 of the substrate 3.
  • the membrane 20 ' is pivotable relative to the substrate 3 along an axis (P') parallel to the axis described by the contact points of the membrane 20 ' with the electrodes 31, 32, parallel to the surface 30 of the substrate and perpendicular to the longitudinal axis (A ') of the membrane (20').
  • this axis (P ') of pivoting of the membrane 20' is offset with respect to the parallel central axis, which makes it possible to define on the membrane 20 'on either side of its axis (P ') pivoting, two distinct parts, of different volumes.
  • the free end of the larger portion of the membrane 20 carries the contact 21 'for closing an electrical circuit.
  • the linking arms 22a ', 22b' form an elastic connection between the membrane 20 and their respective anchor stud 23a ', 23b'.
  • the pivoting of the membrane 20 ' is thus obtained by twisting the link arms 22a', 22b '.
  • Other configurations can be perfectly adapted.
  • the membrane 20 ' is parallel to the plane formed by the surface 30 of the substrate 3.
  • microactuator 2, 2 Both embodiments of microactuator 2, 2 'are perfectly usable in a microsystem according to the invention.
  • the following description lends itself as well to the microactuator according to the first variant embodiment, as to that according to the second variant embodiment.
  • the microactuator 2, 2 'described in the invention can be realized by a planar duplication technology of MEMS (Micro Electro-Mechanical System) type. Indeed, the realization by deposition of successive layers in an iterative process lends itself well to the manufacture of such objects.
  • the membrane 20, 20 'and the arms 22a, 22b, 22a', 22b 'could be derived from the same layer of material.
  • the connecting arms 22a, 22b, 22a ', 22b' and a lower layer of the membrane 20, 20 ' may be derived from a metal layer. A layer of a material sensitive to magnetic fields is deposited on this metal layer to generate the upper part of the membrane 20, 20 '.
  • Such a configuration can make it possible to optimize the mechanical properties of the connecting arms 22a, 22b, 22a ', 22b' by using, to enable the pivoting of the membrane 20, 20 ', a material which is mechanically more suitable than the material sensitive to the fields. magnetic.
  • the metal layer can act as a contact for closing an electrical circuit.
  • the magnetic field-sensitive material is, for example, of the soft magnetic type and may be, for example, an alloy of iron and nickel ("permalloy" Ni 80 Fe 20 ).
  • FIGS. 3A to 3C in which only the first embodiment of the actuator is shown, in a first extreme position ( Figures 3A and 3B ), the end of the membrane 20 carrying the contact 21 is raised and does not bear against the electrodes 31, 32. The electrical circuit is open. In its second extreme position ( Figures 3C ), the end of the membrane 20 carrying the contact 21 bears against the electrodes 31, 32. In this second position, the electrical circuit is closed.
  • a first magnetic field B 0 preferably as uniform as possible, is applied to the substrate 3 carrying the microactuator 2.
  • This first magnetic field B 0 has field lines perpendicular to the surface 30 of the substrate. As shown on FIGS. 3A to 3C the field lines of this first magnetic field B 0 are directed towards the surface 30 of the substrate 3.
  • This first magnetic field B 0 can be generated by a permanent magnet or by an electromagnet.
  • a magnetic circuit having as its magnetic source a permanent magnet or an electromagnetic coil 5 ' may be used to create this first magnetic field B 0 .
  • this magnetic circuit consists of a permanent magnet ( Figure 4A ) or a 5 'electromagnetic coil ( Figure 4B ) and two air gap pieces 50, 51 arranged parallel to each other on either side of the permanent magnet or the coil 5 'and between which the first magnetic field B 0 is generated.
  • the use of such a magnetic circuit makes it possible to generate a first uniform magnetic field B 0 in the gap.
  • a solenoid type excitation coil 4 as shown in FIG. figure 1 connected to a current source, surrounds the substrate 3 and the microactuator 2 supported by the substrate 3 to control the movement of the membrane 20 between its two positions.
  • the microactuator 2 is placed in the center of the excitation coil 4, in its central channel.
  • the passage of a current in the coil 4 excitation causes the pivoting of the membrane 20 from one of its positions to the other of its positions.
  • the direction of the current flowing through the excitation coil 4 decides on the pivoting of the membrane 20 toward one or other of its extreme positions.
  • FIGS. 3A to 3C do not show the excitation coil 4. However, it should be considered that in these figures the excitation coil 4 surrounds the magnetic actuator 2 as shown in FIG. figure 1 .
  • the substrate 3 supporting the microactuator 2 and surrounded by the solenoid excitation coil is placed under the effect of the first magnetic field B 0 , for example in the gap of the magnetic circuit described above in connection with the Figures 4A and 4B .
  • the first magnetic field B 0 initially generates a magnetic component BP 0 in the membrane 20 along its longitudinal axis (A).
  • the magnetic torque resulting from the magnetic field B 0 and the component BP 0 generated in the membrane 20 holds the membrane 20 in one of its extreme positions, for example in the first position ( figure 3A ) or in the second position ( figure 3C ).
  • the contact portion of the membrane 20 is raised and the electrical circuit is open.
  • the contact 21 carried by the membrane 20 electrically connects the two electrodes 31, 32 and the circuit is closed.
  • the second magnetic field BS 1 created by the excitation coil 4 is only transient and is only useful for pivoting the membrane 20 from one position to the other.
  • the membrane 20 is then maintained in its second position under the effect of the only first magnetic field B 0 , creating a new magnetic component BP 2 in the membrane 20.
  • the new magnetic torque created between the first magnetic field B 0 and the component BP 2 generated in the membrane 20 requires the membrane 20 to remain in its second position.
  • the contact 21 carried by the membrane 20 is electrically connect the two electrodes 31, 32 present on the substrate 3. The electrical circuit is then closed.
  • the membrane 20 To open the electrical circuit, the membrane 20 must again be rotated to its first position. A current is delivered in the excitation coil 4 in a direction opposite to that defined above. The magnetic field created by the excitation coil 4 is therefore oriented in a direction opposite to the previous magnetic field BS 1 . This magnetic field generates along the longitudinal axis (A) a magnetic component in the membrane 20, opposite the BP 2 component. If this new magnetic component is of greater intensity than the component BP 2 , the magnetic torque resulting from the first magnetic field B 0 and this new magnetic component causes the tilting of the membrane 20 to its first position.
  • the intensity of the current to be delivered in the excitation coil 4 for pivoting the membrane 20 depends on the number of turns constituting the excitation coil 4 as well as the density of the magnetic field along the excitation coil 4.
  • the solenoid-type excitation coil 4 has a variable coil density 40 along its length.
  • the number of turns 40 is greater at the ends than at the center of the excitation coil 4.
  • the magnetic field generated in the solenoid is thus perfectly uniform over the entire length of the excitation coil 4.
  • the uniformity of the magnetic field (BS 1 for example on the figure 3B ) generated by the excitation coil 4 is important because it allows to increase the useful volume inside the solenoid.
  • the solenoid type excitation coil 4 may be manufactured by printed circuit techniques or by winding a copper wire.
  • the magnetic torque existing between the first magnetic field B 0 and the component generated in the membrane 20 is increased.
  • the angle x existing between the direction of the first magnetic field B 0 and the surface 30 of the substrate 3 (see Figures 5A and 5B ). This angle x must be different from 90 °.
  • the angle x formed between the direction of the field lines and the surface of the substrate supporting the microactuator can be fixed either by inclining the substrate 3 with respect to the direction of the permanent field ( Figure 5A ) or by conferring a particular shape on the two gap pieces 50, 51 for generating a magnetic field in the gap whose direction would have an inclination of the angle x with respect to the surface 30 of the substrate 3 ( Figure 5B ). With reference to the Figure 5B it may be to bevel each gap piece or, in another variant not shown, to fold each of these parts 50, 51.
  • a microsystem according to the invention is used for the control of two separate electrical circuits.
  • a first substrate 3a carries the electrodes 31a of a first electrical circuit and a second substrate 3b, for example disposed above, parallel to the first substrate 3a, carries the electrodes 31b of a second electric circuit.
  • the electrodes 31a, 31b are arranged symmetrically with respect to the longitudinal axis (A) of the membrane 20 of a microactuator 2 according to the invention when the latter is at rest.
  • the two substrates are for example connected by connecting elements.
  • the microactuator 2 according to the invention is integral with at least one of the substrates 3a, 3b.
  • the pivoting diaphragm 20 can therefore pivot between its two extreme positions to close in each of its extreme positions one or the other of the electrical circuits.
  • a balanced position solid line on the figure 7
  • the two electrical circuits are open and the membrane 20 is parallel to the two substrates 3a, 3b.
  • a first extreme position dashed on the figure 7
  • the membrane 20 comes into contact with the first electrode 31a to close the first electrical circuit while in its second opposite extreme position (in dotted lines on the figure 7 ), the membrane 20 comes into contact with the second electrode 31b to close the second electrical circuit.
  • a microsystem according to the invention may comprise a plurality of identical microactuators 2, 2 'as described above forming a matrix placed in the center of the solenoid type excitation coil 4.
  • the microactuators 2, 2 ' are for example organized along several parallel lines.

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  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Micromachines (AREA)
  • Reciprocating, Oscillating Or Vibrating Motors (AREA)
  • Electromagnets (AREA)
  • Linear Motors (AREA)
  • Developing Agents For Electrophotography (AREA)
  • Electrochromic Elements, Electrophoresis, Or Variable Reflection Or Absorption Elements (AREA)
  • Magnetic Treatment Devices (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)

Claims (12)

  1. Mikrosystem, das enthält:
    - einen magnetischen Mikroaktuator (2, 2'), der ein bewegliches Element enthält, das von einem Substrat (3) getragen und durch Magnetwirkung zwischen einer ersten und einer zweiten Stellung gesteuert wird, um mindestens einen elektrischen Schaltkreis zu schalten,
    - einen Dauermagnet oder einen Elektromagnet, der das bewegliche Element einem ersten Magnetfeld (B0) aussetzt, um es in der ersten Stellung zu halten,
    - eine außerhalb des Substrats (3) befindliche Erregerspule (4), wobei die Erregerspule (4), wenn sie gespeist wird, das bewegliche Element einem zweiten Magnetfeld (BS1) aussetzen kann, um das bewegliche Element von der ersten Stellung in die zweite Stellung übergehen zu lassen,
    dadurch gekennzeichnet, dass
    die Erregerspule (4) vom Solenoid-Typ ist und dass sie das das bewegliche Element tragende Substrat (3) umgibt.
  2. Mikrosystem nach Anspruch 1, dadurch gekennzeichnet, dass das bewegliche Element eine auf das Substrat (3) montierte Membran (20, 20') aufweist, die eine Längsachse (A, A') hat und zwischen ihren verschiedenen Stellungen gemäß einer Achse (P, P') lotrecht zur Längsachse (A, A') schwenken kann, wobei die Membran (20, 20') mindestens eine Schicht aus einem magnetischen Material aufweist.
  3. Mikrosystem nach Anspruch 1 oder 2, dadurch gekennzeichnet, dass das erste Magnetfeld (B0) gleichförmig und lotrecht zu einer ebenen Fläche (30) des Substrats (3) ausgerichtet ist, auf die das bewegliche Element montiert ist.
  4. Mikrosystem nach einem der Ansprüche 1 bis 3, dadurch gekennzeichnet, dass das den Mikroaktuator (2, 2') tragende Substrat (3) in einem Magnetkreis angeordnet ist, der einen Luftspalt (50, 51) und eine Magnetquelle aufweist, die das erste Magnetfeld (B0) erzeugen kann.
  5. Mikrosystem nach Anspruch 4, dadurch gekennzeichnet, dass die Magnetquelle ein Dauermagnet (5) ist.
  6. Mikrosystem nach Anspruch 4, dadurch gekennzeichnet, dass die Magnetquelle eine elektromagnetische Spule (5') ist.
  7. Mikrosystem nach einem der Ansprüche 1 bis 6, dadurch gekennzeichnet, dass die Erregerspule (4) über ihre Länge eine variable Windungsdichte (40) aufweist.
  8. Mikrosystem nach Anspruch 7, dadurch gekennzeichnet, dass die Erregerspule (4) an jedem ihrer Enden eine größere Anzahl von Windungen (40) aufweist.
  9. Mikrosystem nach einem der Ansprüche 1 bis 8, dadurch gekennzeichnet, dass das erste gleichförmige Magnetfeld (B0) Feldlinien in einer Richtung nicht lotrecht zu der Ebene aufweist, die von einer Fläche (30) des Substrats (3) definiert wird, die den magnetischen Mikroaktuator (2, 2') trägt.
  10. Mikrosystem nach einem der Ansprüche 1 bis 9, dadurch gekennzeichnet, dass es das Öffnen und Schließen von zwei elektrischen Schaltkreisen steuert.
  11. Mikrosystem nach einem der Ansprüche 1 bis 10, dadurch gekennzeichnet, dass es gemäß einer Technologie vom Typ MEMS hergestellt wird.
  12. Mikrosystem nach einem der Ansprüche 1 bis 11, dadurch gekennzeichnet, dass das Substrat (3) mehrere gleiche magnetische Mikroaktuatoren (2, 2') trägt, die gleichzeitig von der Erregerspule (4) gesteuert werden können.
EP06700703A 2005-01-10 2006-01-06 Mikrosystem mit elektromagnetischer steuerung Not-in-force EP1836714B1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FR0550085A FR2880729B1 (fr) 2005-01-10 2005-01-10 Microsysteme a commande electromagnetique
PCT/EP2006/050074 WO2006072627A1 (fr) 2005-01-10 2006-01-06 Microsysteme a commande electromagnetique

Publications (2)

Publication Number Publication Date
EP1836714A1 EP1836714A1 (de) 2007-09-26
EP1836714B1 true EP1836714B1 (de) 2010-03-03

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EP06700703A Not-in-force EP1836714B1 (de) 2005-01-10 2006-01-06 Mikrosystem mit elektromagnetischer steuerung

Country Status (9)

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US (1) US7724111B2 (de)
EP (1) EP1836714B1 (de)
JP (1) JP4519921B2 (de)
KR (1) KR101023581B1 (de)
CN (1) CN101138060B (de)
AT (1) ATE459974T1 (de)
DE (1) DE602006012620D1 (de)
FR (1) FR2880729B1 (de)
WO (1) WO2006072627A1 (de)

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FR2911675B1 (fr) * 2007-01-19 2009-08-21 Schneider Electric Ind Sas Initiateur electro-pyrotechnique a commande magnetique
FR2911719B1 (fr) * 2007-01-19 2009-02-27 Schneider Electric Ind Sas Dispositif d'interruption/enclenchement d'un circuit electrique
WO2010035184A1 (en) * 2008-09-23 2010-04-01 Nxp B.V. Device with a micro electromechanical structure
DE102008042346A1 (de) * 2008-09-25 2010-04-01 Robert Bosch Gmbh Magnetjoch, mikromechanisches Bauteil und Herstellungsverfahren für ein Magnetjoch und ein mikromechanisches Bauteil
US8581679B2 (en) * 2010-02-26 2013-11-12 Stmicroelectronics Asia Pacific Pte. Ltd. Switch with increased magnetic sensitivity
IT201700088417A1 (it) * 2017-08-01 2019-02-01 Hike S R L Dispositivo elettromeccanico integrato.
CN110739808B (zh) * 2019-10-23 2021-07-20 西安工程大学 一种便于集成的微型电磁致动器及其驱动方法

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Also Published As

Publication number Publication date
US7724111B2 (en) 2010-05-25
EP1836714A1 (de) 2007-09-26
ATE459974T1 (de) 2010-03-15
FR2880729A1 (fr) 2006-07-14
JP4519921B2 (ja) 2010-08-04
CN101138060B (zh) 2010-12-15
KR20070117546A (ko) 2007-12-12
KR101023581B1 (ko) 2011-03-21
FR2880729B1 (fr) 2009-02-27
US20080106360A1 (en) 2008-05-08
JP2008527642A (ja) 2008-07-24
DE602006012620D1 (de) 2010-04-15
WO2006072627A1 (fr) 2006-07-13
CN101138060A (zh) 2008-03-05

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