EP0869519B1 - Planarer magnetischer Motor und magnetischer Microantrieb mit einem solchen Motor - Google Patents

Planarer magnetischer Motor und magnetischer Microantrieb mit einem solchen Motor Download PDF

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Publication number
EP0869519B1
EP0869519B1 EP98400763A EP98400763A EP0869519B1 EP 0869519 B1 EP0869519 B1 EP 0869519B1 EP 98400763 A EP98400763 A EP 98400763A EP 98400763 A EP98400763 A EP 98400763A EP 0869519 B1 EP0869519 B1 EP 0869519B1
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EP
European Patent Office
Prior art keywords
magnetic
micro
substrate
planar
motor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
EP98400763A
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English (en)
French (fr)
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EP0869519A1 (de
Inventor
Enzo Fullin
Raymond Vuilleumier
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Safran Colibrys SA
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Colibrys SA
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Publication of EP0869519A1 publication Critical patent/EP0869519A1/de
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Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H50/00—Details of electromagnetic relays
    • H01H50/005—Details of electromagnetic relays using micromechanics
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H50/00—Details of electromagnetic relays
    • H01H50/005—Details of electromagnetic relays using micromechanics
    • H01H2050/007—Relays of the polarised type, e.g. the MEMS relay beam having a preferential magnetisation direction

Definitions

  • the present invention relates to a planar motor magnetic as well as a micro-actuator comprising a such engine.
  • the invention finds a particularly application advantageous in the field of actuators, such as example micro-valves, micro-relays, micro-motors and more generally all micro-systems having a movement function.
  • micro-actuators existing work on the principles of electrostatic, piezoelectric or thermal.
  • the field of micro-actuators magnetic remains little exploited. This can be explained by the fact that the technologies for making devices effective magnets are relatively new, especially the control of thick layers with "aspect ratio ", or ratio of height to width, high.
  • the micro-actuators existing relay type are not fully satisfactory, especially the currents necessary for actuation are often relatively high by the fact that the number of turns of the coils that make them up is small.
  • EP 0 573 267A shows a motor according to the preamble of claim 1.
  • a first technical problem to be solved by the object of the present invention is to provide a magnetic planar motor which would increase the magnetic force developed while keeping a reasonable surface.
  • the solution to this first technical problem consists, according to the present invention, in that said motor planar magnetic has a plurality of poles magnetic ferromagnetic material placed at center of planar coils made up of at least one layer of turns formed on the surface of a substrate made of ferromagnetic material, said turns being wound and connected together so that add the magnetic fluxes generated by said magnetic poles.
  • a second technical problem to be solved by the object of the present invention is to provide a micro-actuator magnetic with planar motor magnetic according to the invention, which would have in particular a compact mobile mechanical element in order to reduce the size of the system.
  • said magnetic microactuator also includes a mechanical element with movable contact, comprising a support frame placed on said surface of the substrate magnetic through a spacer, a blade flexible arranged substantially parallel to the surface of said substrate and one end of which is fixed said support frame, a material core ferromagnetic carried by said flexible blade, and a movable contact secured to said ferromagnetic core, located next to a fixed contact fitted on the surface of the substrate of said magnetic planar motor.
  • a mechanical element with movable contact comprising a support frame placed on said surface of the substrate magnetic through a spacer, a blade flexible arranged substantially parallel to the surface of said substrate and one end of which is fixed said support frame, a material core ferromagnetic carried by said flexible blade, and a movable contact secured to said ferromagnetic core, located next to a fixed contact fitted on the surface of the substrate of said magnetic planar motor.
  • the magnetic micro-actuator according to the invention has a number of advantages. On the one hand, it constitutes a miniature and planar device little bulky with the possibility of adding a circuit integrated. On the other hand, the thickness of the spacer allows direct control of the insulation voltage of the micro-actuator acting as a relay. Moreover, the mobile and fixed contacts can be made in thin, integrated layer.
  • said spacer is produced by deposition on the substrate surface of the magnetic planar motor of a conductive material, said support frame being attached to said spacer through conductive protrusions.
  • the embodiment implements the technology so-called "flip-chip” (flip-chip in English), well known in the field of connector technology semiconductor pads, or “chips”.
  • said spacer is made of insulating material and integrated into said support frame, said flexible blade being conductive and electrically connected to the substrate surface of the magnetic planar motor by its end fixed on the support frame.
  • FIG. 1 is shown in side view a motor planar magnetic 100 made up of planar coils 110, 120 each comprising four layers of turns, structured on the surface of a ferromagnetic substrate 130.
  • Each coil 110, 120 has in its center a magnetic pole 111, 121 made of ferromagnetic material such as ferronickel FeNi.
  • This structure is actually a magnetic circuit with air interval.
  • the passage of a current through the coils 110, 120 between an input terminal 141 and an output terminal 142 generates a flow 150 in the magnetic circuit which results in a force of attraction at the air gap.
  • the circuit magnetic consists of two poles 111, 121 surrounded by coils 110, 120 whose turns are wound and connected together so that add the magnetic fluxes generated by said magnetic poles.
  • the coupling of this motor part with an element mobile forms a micro-actuator, for example a valve, relay or levitation motor, etc.
  • a micro-actuator for example a valve, relay or levitation motor, etc.
  • the Figures 2 and 6 show the special case of production of a mechanical element 200 with movable contact for a micro-relay.
  • This structure comprises a support frame 210 which, as shown in Figure 3, is intended to be placed on the surface of the ferromagnetic substrate 130 of the planar motor 100 via a spacer 211.
  • the spacer 211 is produced by depositing on the surface of the substrate 130 a conductive material.
  • the height of the spacer 211 allows to control the air gap between the contact fixed 150 fitted on the surface of the planar motor 100 and a movable contact 220 integral with a core ferromagnetic 230, in FeNi for example, carried by a flexible blade 240 which must be made of a material ferromagnetic, for example nickel.
  • An extremity of said flexible blade 240 is fixed to the support frame 210 and acts as a fixed point for the arm of lever constituted by the blade 240.
  • the support frame 210 is surmounted by a substrate 260, which can be made of silicon when it is intended to accommodate a integrated circuit.
  • the substrate 260 can, depending on the applications, be a transparent (glass) or ferromagnetic material (FeNi or FeSi).
  • ferromagnetic material as a substrate shielding of the two parts of the motor and actuator magnetic device is assured.
  • substrates can serve as connection terminals electric.
  • said support frame 210 is attached to the spacer 211 via protuberances conductive 250 according to the "chip” method inverted “or” flip-chip “.
  • Assembly can be done by welding or gluing techniques, the condition being that this part is electrically conductive so as to make one of the contacts of the micro-relay on the other part.
  • this assembly positioned all around the device allows to isolate the contact of the micro-relay, to create a sealed cavity in which the atmosphere and the pressure are controlled. There is therefore no need to provide a cover, this part integral to the system due to the assembly by protuberances.
  • the electrical contact is done, not through contacts individuals but through the poles magnetic 111 and 121.
  • the connections with the outside are done through ferromagnetic substrates.
  • Figures 4 and 5 show a variant of realization of the mechanical element with movable contact obtained from a thin ferromagnetic substrate on which is structured a spacer 311 made of insulating material as well as the flexible metal blade 340 carrying movable contacts 320.
  • a spacer 311 made of insulating material as well as the flexible metal blade 340 carrying movable contacts 320.
  • the electrical continuity between contacts 150 and 320 of the micro-relay is provided by the fact that the flexible conductive blade 340 is electrically connected to the surface of the substrate 130 of the magnetic planar motor 100 by its fixed end to the support frame 310.
  • relay control can be obtained by current continuous applied to planar coils 110, 120 or by magnetic induction produced by a magnet permanent.
  • the use of permanent magnets, or of a locally magnetizable material by means of a coil can be provided to make the system bistable; that is to say having a stable state in activated position and a stable state in position rest.

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  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Micromachines (AREA)
  • Reciprocating, Oscillating Or Vibrating Motors (AREA)

Claims (10)

  1. Planarer Magnetmotor (100) mit mehreren magnetischen Polen (111, 121) aus ferromagnetischem Material, dadurch gekennzeichnet, daß die Pole im Zentrum planarer Spulen (110, 120) angeordnet sind, die aus wenigstens einer Lage Windungen gebildet sind, die an der Oberfläche eines Substrats (130) aus ferromagnetischem Material realisiert sind, wobei die Windungen derart gewickelt und miteinander verbunden sind, daß die durch die magnetischen Pole (111, 121) hindurch generierten magnetischen Flüsse gekoppelt werden.
  2. Mikromagnetantrieb mit einem planaren Magnetmotor (100) nach Anspruch 1, dadurch gekennzeichnet, daß er auch ein mechanisches Bauteil (200; 300) mit einem beweglichen Kontakt umfaßt, das einen Tragrahmen (210; 310), der über der Oberfläche des ferromagnetischen Substrats (130) mittels eines Abstandshalters (211; 311) angeordnet ist, ein flexibles Blatt (240; 340), das im wesentlichen parallel zur Oberfläche des Substrats angeordnet ist und dessen eines Ende an dem Tragrahmen (210; 310) befestigt ist, einen Kern (230; 330) aus ferromagnetischem Material, der von der flexiblen Lamelle (240; 340) getragen ist, und einen mit dem ferromagnetischen Kern (230; 330) fest verbundenen, beweglichen Kontakt (220; 320) aufweist, der einem ortsfesten Kontakt gegenüberliegt, der über der Oberfläche des Substrats (130) des magnetischen, planaren Motors (100) angebracht ist.
  3. Mikromagnetantrieb nach Anspruch 2, dadurch gekennzeichnet, daß der Tragrahmen (210, 310) über einem Substrat (260) angeordnet ist
  4. Mikromagnetantrieb nach Anspruch 3, dadurch gekennzeichnet, daß beide Substrate (130, 260) aus ferromagnetischem Material sind.
  5. Mikromagnetantrieb nach Anspruch 2, 3 oder 4, dadurch gekennzeichnet, daß der Abstandshalter (211) durch Aufbringen eines Leitermaterials auf die Oberfläche des Substrats (130) des magnetischen, planaren Motors (100) realisiert ist, wobei der Tragrahmen (210) auf dem Abstandhalter (211) über leitfähige Vorsprünge (250) aufgebracht ist.
  6. Mikromagnetantrieb nach Anspruch 4, dadurch gekennzeichnet, daß die magnetischen Pole (111, 121) als elektrische Kontakte verwendet sind und nach außen über die ferromagnetischen Substrate verbunden sind.
  7. Mikromagnetantrieb nach Anspruch 5, dadurch gekennzeichnet, daß der Abstandhalter aus einem Isoliermaterial ist und einstückig mit dem Tragrahmen (310) ausgebildet ist, wobei das flexible Blatt (340) leitfähig und mit seinem am Tragrahmen (310) befestigten Ende mit der Oberfläche des Substrats (130) des magnetischen, planaren Motors (100) elektrisch verbunden ist.
  8. Mikromagnetantrieb nach einem der Ansprüche 2 bis 7, dadurch gekennzeichnet, daß der bewegliche Kontakt (220) des mechanischen Bauteils (200) auf einer verformbaren Membran (270) angeordnet ist.
  9. Mikromagnetantrieb nach einem der Ansprüche 2 bis 8, dadurch gekennzeichnet, daß er von einem kontinuierlichen Strom gesteuert ist, der den planaren Spulen (110, 120) zugeführt ist.
  10. Mikromagnetantrieb nach einem der Ansprüche 2 bis 8, dadurch gekennzeichnet, daß er durch eine magnetische, von einem Dauermagneten hervorgerufene Induktion gesteuert ist.
EP98400763A 1997-04-01 1998-03-31 Planarer magnetischer Motor und magnetischer Microantrieb mit einem solchen Motor Expired - Lifetime EP0869519B1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FR9703961A FR2761518B1 (fr) 1997-04-01 1997-04-01 Moteur planaire magnetique et micro-actionneur magnetique comportant un tel moteur
FR9703961 1997-04-01

Publications (2)

Publication Number Publication Date
EP0869519A1 EP0869519A1 (de) 1998-10-07
EP0869519B1 true EP0869519B1 (de) 2002-02-20

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Application Number Title Priority Date Filing Date
EP98400763A Expired - Lifetime EP0869519B1 (de) 1997-04-01 1998-03-31 Planarer magnetischer Motor und magnetischer Microantrieb mit einem solchen Motor

Country Status (4)

Country Link
US (1) US6084281A (de)
EP (1) EP0869519B1 (de)
DE (1) DE69803893T2 (de)
FR (1) FR2761518B1 (de)

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JP2006524880A (ja) 2002-09-18 2006-11-02 マグフュージョン， インコーポレイテッド 積層電気機械構造の組み立て方法
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Also Published As

Publication number Publication date
DE69803893T2 (de) 2002-10-10
US6084281A (en) 2000-07-04
EP0869519A1 (de) 1998-10-07
FR2761518B1 (fr) 1999-05-28
DE69803893D1 (de) 2002-03-28
FR2761518A1 (fr) 1998-10-02

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