EP1425764B1 - Bistabiler magnetischer aktuator - Google Patents

Bistabiler magnetischer aktuator Download PDF

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Publication number
EP1425764B1
EP1425764B1 EP02735523A EP02735523A EP1425764B1 EP 1425764 B1 EP1425764 B1 EP 1425764B1 EP 02735523 A EP02735523 A EP 02735523A EP 02735523 A EP02735523 A EP 02735523A EP 1425764 B1 EP1425764 B1 EP 1425764B1
Authority
EP
European Patent Office
Prior art keywords
magnetic
mobile
actuator
actuator according
circuit
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
EP02735523A
Other languages
English (en)
French (fr)
Other versions
EP1425764A2 (de
Inventor
Jérôme Delamare
Claire Divoux
Pierre Gaud
Frédéric LEPOITEVIN
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Commissariat a lEnergie Atomique et aux Energies Alternatives CEA
Original Assignee
Commissariat a lEnergie Atomique CEA
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Publication of EP1425764A2 publication Critical patent/EP1425764A2/de
Application granted granted Critical
Publication of EP1425764B1 publication Critical patent/EP1425764B1/de
Anticipated expiration legal-status Critical
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Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
    • H01F7/00—Magnets
    • H01F7/06—Electromagnets; Actuators including electromagnets
    • H01F7/08—Electromagnets; Actuators including electromagnets with armatures
    • H01F7/081—Magnetic constructions
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
    • H01F7/00—Magnets
    • H01F7/06—Electromagnets; Actuators including electromagnets
    • H01F7/08—Electromagnets; Actuators including electromagnets with armatures
    • H01F7/18—Circuit arrangements for obtaining desired operating characteristics, e.g. for slow operation, for sequential energisation of windings, for high-speed energisation of windings
    • H01F7/1872—Bistable or bidirectional current devices
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H1/00—Contacts
    • H01H1/0036—Switches making use of microelectromechanical systems [MEMS]
    • H01H2001/0042—Bistable switches, i.e. having two stable positions requiring only actuating energy for switching between them, e.g. with snap membrane or by permanent magnet
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H50/00—Details of electromagnetic relays
    • H01H50/005—Details of electromagnetic relays using micromechanics
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H51/00—Electromagnetic relays
    • H01H51/22—Polarised relays

Definitions

  • the present invention relates to a bistable magnetic actuator and in particular a microactuator. It finds an application in the production of microrelays (electrical or optical), microvalves, micropumps, etc.
  • WO 97/39468 discloses a magnetic actuator that can take the form illustrated in Figure 1 attached. As shown, this actuator comprises a magnetic circuit consisting of a central pole piece 12 surrounded by a conductive coil 14 and two symmetrical pole pieces 16. A movable magnetic piece 18 is arranged facing the central pole piece 12.
  • Such an actuator is unidirectional in that the force F exerted on the moving part can be directed in one direction only.
  • This actuator is not bistable, but monostable, the only stable working position being that where the moving part 18 is pressed against the contact 19.
  • bistable magnetic actuators are known.
  • the article of M.Sc. Ren Ren et al. entitled "A Bistable Microfabricated Magnetic Cantilever Microactuator with Permanent Magnet” published in the Proceedings of the 5th International Microsystem Technologies Conference 96, Potsdam, September 17-19, 1996, pages 799-801. describes an actuator shown in Figure 2 attached.
  • This actuator comprises a permanent magnet 20 extended by two magnetic branches 22, 24 each surrounded by a conductive coil, respectively 23, 25.
  • a flexible beam 26, made of magnetic material completes the magnetic circuit. This therefore has two air gaps defined by the end of the beam 26 and each of the ends of the branches 22 and 24. The magnetic flux present in each of these air gaps results from the sum of the fluxes due to the permanent magnet 20 and the currents possibly flowing in one or other of windings 23 and 25.
  • the magnetic forces F1 and F2 applied to the end of the beam 26 are exerted either in one direction or in the other depending on whether one or the other of the conductive windings 23, 25 is traversed by a current.
  • Such an actuator is bidirectional or, if you will, bistable.
  • This bistable actuator has a disadvantage. Indeed, since the moving part 26 is an integral part of the magnetic circuit, its movement is limited. Moreover, its mobility is reduced because it results from a bending of a magnetic part.
  • the present invention precisely aims to overcome this disadvantage.
  • the invention proposes a bistable actuator in which the displacement of the moving part is increased and its mobility improved. This object is achieved by the fact that the moving part is fixed to flexible means which are no longer part of the magnetic circuit.
  • the conductive coils and the magnetic circuits can be made according to techniques borrowed from microelectronics.
  • the actuator is then a micro actuator.
  • the coils can consist of layers of conductive strips deposited in engraved boxes.
  • the magnetic circuit can be made using layers of "soft" or “hard” magnetic materials or hysteresis materials.
  • the soft materials are magnetized linearly depending on the magnetic field applied to them (iron, nickel, iron-nickel, iron-cobalt, iron-silicon, ).
  • Hard materials have a fixed magnetization that does not depend on the applied field (ferrite, samarium-cobalt, neodymium-iron-boron, platinum-cobalt).
  • Hysteresis materials have properties ranging from those of soft materials to those of hard materials. They can become magnetized and keep a magnetization after the field of excitation is gone.
  • the two magnetic structures can take various forms, and be for example symmetrical with respect to a plane or with respect to a point.
  • the displacement of the moving part it can be a translation (or quasi-translation) or a rotation.
  • the embodiment illustrated in FIG. 3 corresponds to a device having a plane of symmetry.
  • the first magnetic structure comprises a first conductive coil 32 1 surrounding a first open magnetic circuit comprising a circular portion 34 1 and a straight portion 30 located in the plane of symmetry.
  • the second structure comprises, in the same way, a second conductive winding 32 2 surrounding a second open magnetic circuit comprising a circular portion 34 2 and the straight part 30 already mentioned, which is therefore common to both structures.
  • the first magnetic structure has a first end 1 with a face perpendicular to the plane of the figure
  • the second magnetic structure has a first end 2 with a face perpendicular to the plane of the figure.
  • These two structures have second ends which, in the example shown, coincide with the end 35 'of the right part 30. The face of this second end is perpendicular to the plane of the faces of the first ends.
  • the device is completed by a movable magnetic piece 36 placed between the first ends 35 1 and 35 2 of the first and second magnetic circuits and the second ends 35 'of these circuits.
  • This piece 36 is fixed to two flexible non-magnetic beams 38 and 39, embedded in a base 40. Naturally, one could use only one beam or use more than two.
  • this device is as follows. As shown in Figure 3, the microactuator is at rest. When the left coil 32 1 is traversed by a current, the left magnetic circuit 34 1 is excited and the movable portion 36 is drawn to the left. It then closes the gap on the left that it defined with the first magnetic circuit. When it is the right winding 32 2 which is traversed by a current, it is the right magnetic circuit 34 2 which is excited and the moving part is attracted to the right. It then closes the gap on the right that it defined with the second magnetic circuit.
  • the microactuator described therefore has two stable working positions. Depending on the composition of the materials of the magnetic windings, the moving part can keep one or the other of these positions even if the power supply of the windings is interrupted (case of hysteresis materials). But the moving part can also resume its rest position (case of soft materials). In the case of hysteresis materials, it will be necessary to demagnetize the magnetic circuit by supplying the appropriate winding with a current of correct direction so that the moving part returns to its initial position.
  • Figures 4A to 41 illustrate a method of producing a microactuator according to the present invention.
  • a substrate 50 for example silicon ( Figure 4A); caissons are engraved and filled with conducting material to obtain a layer of conductors 52 situated on a first level; we planarise the whole; an insulating layer 54 is deposited on which is formed an insulating layer 56 (for example of SiO 2 ) so-called sacrificial layer.
  • a layer of resin 58 is then deposited (FIG. 4B).
  • a layer of magnetic material is deposited (FIG. 4C) to form the magnetic circuit 60 and the future mobile part 62; then the patterns are isolated (FIG. 4D).
  • a new layer of resin 66 is then deposited (FIG. 4E) and the assembly is planarized (FIG. 4F).
  • An insulating layer 70 (FIG. 4G) and a resin layer are then deposited; new boxes are etched in the latter, which are filled with conducting material to obtain a second layer of conductors 74 on a second level. Unrepresented connections make it possible to join the two layers conductors to obtain a winding surrounding the magnetic part.
  • the sacrificial layer 56 (FIG. 4I) is then etched to clear a free space 78 and to release the mobile part 62.
  • FIG. 5 illustrates an application of the invention to the production of an electric microrelay.
  • This device comprises the means already shown in Figure 4 and which have the same references. It further comprises electrical contacts 80 and 82 disposed on the faces of the first ends 35 1 and 35 2 of the magnetic circuits, three contact pads 91, 92, 93 and three tracks 94, 95, 96 connecting the pads to the contacts. 80 and 82 and the base 40.
  • the second ends of the two magnetic circuits are, as in the previous example, coincident with the end 35 'of the common part 30.
  • the mobile part 36 When the left coil 32 1 is energized, the mobile part 36 is attracted to the left and closes the electrical circuit 91, 93. When the right coil 32 2 is energized, the mobile part is drawn to the right and closes again. the electric circuit 92, 93.
  • the electrical contacts are only shown schematically in FIG. 5. In reality, the tracks make it possible to postpone the contact pads towards the periphery of the microrelais where may also include the contacts for controlling the actuator.
  • FIG. 6 illustrates another embodiment of a microactuator according to the invention wherein the central branches of the magnetic circuits are not combined into a single branch 30, as in Figure 3, but consist of two independent branches 30 1 , 2 with second ends 35 ' 1 and 35' 2 whose faces are in planes parallel to each other and perpendicular to the planes of the faces of the first ends 35 1 and 35 2 . Magnetic leakage is thus reduced.
  • FIG. 7 shows an embodiment where the movable magnetic piece 36 is rotatable about an axis 98. It can be pressed either under the end 1 or under the end 2 of the two magnetic circuits 34 1 and 34 2 depending on whether the current flows in the winding 32 1 or in the winding 32 2 .
  • Figure 8 finally, illustrates an embodiment with central symmetry.
  • the two structures (30 1 , 32 1 , 34 1 ) (30 2 , 32 2 , 34 2 ) are symmetrical with respect to a point which is the center of the device.
  • the movable portion 36 can then be connected symmetrically to two bases 40 1 , 40 2 by two sets of two flexible beams (38 1 , 39 1 ) (38 2 , 39 2 ).

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  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Micromachines (AREA)
  • Electromagnets (AREA)
  • Reciprocating, Oscillating Or Vibrating Motors (AREA)

Claims (8)

  1. Bistabiler magnetischer Aktuator, umfassend:
    - eine erste feste magnetische Struktur mit einer ersten leitfähigen Wicklung (321), die einen ersten offenen Magnetkreis (341) mit einem ersten Ende (351) und einem zweiten Ende (35'1, 35'2, 35') umgibt;
    - eine zweite feste magnetische Struktur mit einer zweiten leitfähigen Wicklung (322), die einen zweiten offenen Magnetkreis (342) mit einem ersten Ende (352) und einem zweiten Ende (35'2) umgibt, wobei die ersten Enden (351, 352) des ersten und des zweiten Magnetkreises sich gegenüberstehen;
    - ein bewegliches magnetisches Teil (36), das eine erste oder eine zweite stabile Arbeitsposition in Abhängigkeit davon einnehmen kann, ob die erste oder die zweite leitfähige Wicklung (321, 322) erregt wird;
    - Stirnflächen des ersten Endes und des zweiten Endes jedes Magnetkreises, die sich in zueinander senkrechten Ebenen befinden, wobei die zweiten Enden des ersten und zweiten Magnetkreises in einer selben Ebene befindliche oder zusammenfallende Stirnflächen haben,
    dadurch gekennzeichnet, dass
    - das bewegliche magnetische Teil (36) in der Nähe des ersten Endes (351) des ersten Magnetkreises und des ersten Endes (352) des zweiten Magnetkreises lokalisiert ist,
    - das bewegliche Teil (36) an nichtmagnetischen Einrichtungen (38, 39) befestigt ist, welche die Verschiebung des beweglichen Teils (36) in Richtung des ersten Endes (351) des ersten Magnetkreises und in Richtung des ersten Endes (352) des zweiten Magnetkreises ermöglichen.
  2. Aktuator nach Anspruch 1, bei dem die erste (321, 341) und die zweite (322, 342) magnetische Struktur symmetrisch in Bezug auf eine Ebene angeordnet sind.
  3. Aktuator nach Anspruch 2, bei dem die Einrichtungen, an dem das bewegliche Teil befestigt ist, wenigstens einen nichtmagnetischen flexiblen Träger (38, 39) umfassen.
  4. Aktuator nach Anspruch 2, bei dem der erste und der zweite Magnetkreis einen in der Symmetrieebene befindlichen gemeinsamen Zweig (30) haben.
  5. Aktuator nach Anspruch 1, bei dem die erste und die zweite magnetische Struktur symmetrisch in Bezug auf einen Punkt angeordnet sind.
  6. Aktuator nach Anspruch 5, bei dem die Einrichtungen, an denen das bewegliche magnetische Teil (36) befestigt ist, wenigstens zwei symmetrische flexible Träger (381, 391) (382, 392) umfassen.
  7. Aktuator nach Anspruch 1, bei dem das bewegliche magnetische Teil (36) um eine Achse (98) drehbar ist.
  8. Aktuator nach einem der Ansprüche 1 bis 7, bei dem die leitfähigen Wicklungen (321, 322) und die Magnetkreise (341, 342, 30, 301, 302) aus einem in Schichten abgeschiedenen Material realisiert sind und der Aktuator also ein Mikroaktuator ist.
EP02735523A 2001-05-03 2002-04-29 Bistabiler magnetischer aktuator Expired - Lifetime EP1425764B1 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
FR0105909 2001-05-03
FR0105909A FR2824417B1 (fr) 2001-05-03 2001-05-03 Actionneur magnetique bistable
PCT/FR2002/001487 WO2002091402A2 (fr) 2001-05-03 2002-04-29 Actionneur magnetique bistable

Publications (2)

Publication Number Publication Date
EP1425764A2 EP1425764A2 (de) 2004-06-09
EP1425764B1 true EP1425764B1 (de) 2007-11-14

Family

ID=8862933

Family Applications (1)

Application Number Title Priority Date Filing Date
EP02735523A Expired - Lifetime EP1425764B1 (de) 2001-05-03 2002-04-29 Bistabiler magnetischer aktuator

Country Status (6)

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US (1) US7049915B2 (de)
EP (1) EP1425764B1 (de)
JP (1) JP4034657B2 (de)
DE (1) DE60223566T2 (de)
FR (1) FR2824417B1 (de)
WO (1) WO2002091402A2 (de)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6621135B1 (en) * 2002-09-24 2003-09-16 Maxim Integrated Products, Inc. Microrelays and microrelay fabrication and operating methods
US7463125B2 (en) * 2002-09-24 2008-12-09 Maxim Integrated Products, Inc. Microrelays and microrelay fabrication and operating methods
FR3050339B1 (fr) 2016-04-15 2020-08-28 Enerbee Generateur d'electricite comprenant un convertisseur magneto-electrique et son procede de fabrication
US10969186B2 (en) 2017-03-08 2021-04-06 Strum, Ruger & Company, Inc. Fast action shock invariant magnetic actuator for firearms
US10458736B2 (en) 2017-03-08 2019-10-29 Sturm, Ruger & Company, Inc. Dynamic variable force trigger mechanism for firearms
US11300378B2 (en) 2017-03-08 2022-04-12 Sturm, Ruger & Company, Inc. Electromagnetic firing system for firearm with interruptable trigger control
US10240881B1 (en) 2017-03-08 2019-03-26 Louis M. Galie Fast action shock invariant magnetic actuator for firearms
US10670361B2 (en) 2017-03-08 2020-06-02 Sturm, Ruger & Company, Inc. Single loop user-adjustable electromagnetic trigger mechanism for firearms
US10900732B2 (en) 2017-03-08 2021-01-26 Sturm, Ruger & Company, Inc. Electromagnetic firing system for firearm with firing event tracking
US10228208B2 (en) 2017-03-08 2019-03-12 Sturm, Ruger & Company, Inc. Dynamic variable force trigger mechanism for firearms

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3858135A (en) * 1973-08-14 1974-12-31 S Gray Push-pull linear motor
US5724015A (en) * 1995-06-01 1998-03-03 California Institute Of Technology Bulk micromachined inductive transducers on silicon
US5847631A (en) 1995-10-10 1998-12-08 Georgia Tech Research Corporation Magnetic relay system and method capable of microfabrication production
US5793272A (en) * 1996-08-23 1998-08-11 International Business Machines Corporation Integrated circuit toroidal inductor
DE19714413A1 (de) * 1997-04-08 1998-10-15 Braunewell Markus Elektromagnetischer Antrieb
EP0970296A1 (de) * 1997-03-24 2000-01-12 LSP Innovative Automotive Systems GmbH Elektromagnetische stellvorrichtung
US5818131A (en) * 1997-05-13 1998-10-06 Zhang; Wei-Min Linear motor compressor and its application in cooling system
JP3684118B2 (ja) * 1999-09-03 2005-08-17 キヤノン株式会社 電磁アクチュエータ、光スキャナ
JP3492288B2 (ja) * 2000-06-16 2004-02-03 キヤノン株式会社 電磁アクチュエータ、該電磁アクチュエータの作製方法、該電磁アクチュエータを用いた光偏向器
US6803843B2 (en) * 2001-02-22 2004-10-12 Canon Kabushiki Kaisha Movable-body apparatus, optical deflector, and method of fabricating the same
FR2826504B1 (fr) * 2001-06-25 2003-09-12 Commissariat Energie Atomique Actionneur magnetique a temps de reponse reduit

Also Published As

Publication number Publication date
FR2824417A1 (fr) 2002-11-08
US20040113732A1 (en) 2004-06-17
JP4034657B2 (ja) 2008-01-16
DE60223566D1 (de) 2007-12-27
EP1425764A2 (de) 2004-06-09
JP2004534494A (ja) 2004-11-11
FR2824417B1 (fr) 2004-05-14
WO2002091402A2 (fr) 2002-11-14
US7049915B2 (en) 2006-05-23
WO2002091402A3 (fr) 2004-03-25
DE60223566T2 (de) 2008-10-23

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