EP1525595B1 - Magnetschwebebetätiger - Google Patents

Magnetschwebebetätiger Download PDF

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Publication number
EP1525595B1
EP1525595B1 EP03756515A EP03756515A EP1525595B1 EP 1525595 B1 EP1525595 B1 EP 1525595B1 EP 03756515 A EP03756515 A EP 03756515A EP 03756515 A EP03756515 A EP 03756515A EP 1525595 B1 EP1525595 B1 EP 1525595B1
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EP
European Patent Office
Prior art keywords
magnetic
magnetic part
mobile
supports
substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
EP03756515A
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English (en)
French (fr)
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EP1525595A2 (de
Inventor
Hervé ROSTAING
Jérôme Delamare
Orphée CUGAT
Christel Dieppedale
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Centre National de la Recherche Scientifique CNRS
Institut Polytechnique de Grenoble
Commissariat a lEnergie Atomique et aux Energies Alternatives CEA
Original Assignee
Centre National de la Recherche Scientifique CNRS
Commissariat a lEnergie Atomique CEA
Institut Polytechnique de Grenoble
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Publication of EP1525595A2 publication Critical patent/EP1525595A2/de
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Publication of EP1525595B1 publication Critical patent/EP1525595B1/de
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
    • H01F7/00—Magnets
    • H01F7/06—Electromagnets; Actuators including electromagnets
    • H01F7/08—Electromagnets; Actuators including electromagnets with armatures
    • H01F7/16—Rectilinearly-movable armatures
    • H01F7/1638—Armatures not entering the winding
    • H01F7/1646—Armatures or stationary parts of magnetic circuit having permanent magnet
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H50/00—Details of electromagnetic relays
    • H01H50/005—Details of electromagnetic relays using micromechanics
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
    • H01F7/00—Magnets
    • H01F7/06—Electromagnets; Actuators including electromagnets
    • H01F7/08—Electromagnets; Actuators including electromagnets with armatures
    • H01F7/121—Guiding or setting position of armatures, e.g. retaining armatures in their end position
    • H01F7/122—Guiding or setting position of armatures, e.g. retaining armatures in their end position by permanent magnets
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
    • H01F7/00—Magnets
    • H01F7/06—Electromagnets; Actuators including electromagnets
    • H01F7/08—Electromagnets; Actuators including electromagnets with armatures
    • H01F7/121—Guiding or setting position of armatures, e.g. retaining armatures in their end position
    • H01F7/124—Guiding or setting position of armatures, e.g. retaining armatures in their end position by mechanical latch, e.g. detent
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H37/00—Thermally-actuated switches
    • H01H2037/008—Micromechanical switches operated thermally
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H3/00—Mechanisms for operating contacts
    • H01H3/22—Power arrangements internal to the switch for operating the driving mechanism
    • H01H3/24—Power arrangements internal to the switch for operating the driving mechanism using pneumatic or hydraulic actuator
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H37/00—Thermally-actuated switches
    • H01H37/02—Details
    • H01H37/32—Thermally-sensitive members
    • H01H37/58—Thermally-sensitive members actuated due to thermally controlled change of magnetic permeability
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H51/00—Electromagnetic relays
    • H01H51/22—Polarised relays
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H67/00—Electrically-operated selector switches
    • H01H67/22—Switches without multi-position wipers

Definitions

  • the present invention relates to a magnetic actuator and in particular a magnetic microactuator achievable by microtechnology techniques, that is to say micromachining techniques used in microelectronics.
  • Such an actuator can be used in various systems, for example, as an electric microrelay for controlling the opening, closing or switching of an electrical contact, for example for controlling transistors, as an optical microrelay for controlling the passage, closing, switching or switching of an optical ray, as a micro valve or micro valve for controlling the passage, sealing or switching of a fluid, as a shock sensor or displacement, as a micro-pump, as a positioner for magnetic or optical heads, to perform AFM (Atomic Force Microscope or Atomic Force Microscope) or thermal recording in positioning tables .
  • AFM Atomic Force Microscope or Atomic Force Microscope
  • Electrostatic actuators are currently the most studied. Lucent sells an optical multiplexer known as "lambda router" having electrostatic actuators. It is capable of directing an optical beam from an optical fiber to another optical fiber selected from a group of optical fibers. Its principle is based on the displacement of micro mirrors in pivot connection with a substrate. This multiplexer has a relatively slow switching time. In addition, such actuators pose a significant problem of power supply. Indeed, they must be powered by voltages of several tens or hundreds of volts. It is therefore necessary to add a specific power supply which is problematic in stand-alone applications. Another disadvantage is that the movements are limited in relation to the size of the object.
  • magnetic actuators operate on the principle of the electromagnet and essentially use magnetic circuits based on iron and an excitation coil. They comprise a fixed magnetic part and a movable magnetic part which is mechanically connected to the fixed magnetic part. An electrical circuit is used to excite the moving magnetic part to make it take a working position by moving it relative to the fixed magnetic part. In the absence of excitation, the moving magnetic part is in a rest position.
  • microactuator Another type of magnetic magnet microactuator has been described on the website of the IBM Research Laboratory in Zurich ( www.zurich.ibm.com ) under the title "Electromagnetic scanner” in April 2001.
  • the microactuator operates on the principle of the speaker.
  • Flat coils placed on a substrate control the displacement of magnets integral with a plate, the latter being mechanically suspended by flexible beams to a fixed frame secured to the substrate.
  • the movable magnetic part is mechanically connected to the fixed magnetic part.
  • This mechanical connection is difficult to achieve by collective manufacturing techniques.
  • this connection limits the mobility of the mobile magnetic part, this mobility results from a deformation of one of the elements connecting the moving part to the fixed part. This deformation can induce, during displacements, a fatigue of the element connecting the moving magnetic part to the fixed magnetic part. The speed performance of such magnetic actuators is low.
  • the driving forces of the mobile magnetic part are due to the magnetic field created by at least one coil.
  • Gold at constant current density a microbobine creates a force much lower than a coil of the same shape but larger. The performance of such actuators therefore remain poor.
  • the mass forces they are likely to provide are small relative to their size.
  • actuators must be electrically powered when in the working position. In the absence of power, they return to the rest position. Their power consumption is not negligible.
  • the present invention is intended to provide a magnetic actuator that does not have the disadvantages mentioned above.
  • This actuator uses the principle of magnetic guidance of a moving magnetic part, that is to say movement without mechanical contact other than that of the ambient air, when used in air.
  • the magnetic actuator of the present invention is particularly suited to a realization in microtechnology.
  • the present invention is a magnetic actuator comprising a movable magnetic part, a fixed magnetic part and means for triggering the displacement of the part.
  • magnetic movable with respect to the fixed magnetic portion. It comprises at least two non-magnetic supports placed in different planes, delimiting between them a space, the fixed magnetic part being integral with at least one of the supports, the supports each having an abutment zone for the moving magnetic part, the stop and the fixed magnetic part being distinct.
  • the mobile magnetic part is levitated in the space between the two supports thanks to a magnetic guidance due to the fixed magnetic part when it is not in abutment with the abutment zone of one of the supports, the magnetic part mobile is likely to take several stable magnetic positions and in these positions it is against a support.
  • stable magnetic position is meant a stable position in which there is a magnetic interaction between the movable magnetic part and the fixed magnetic part and which does not require a power supply for maintaining this position.
  • the moving magnetic part is not mechanically connected to the fixed magnetic part and there is no mechanical guidance between the movable magnetic part and the fixed magnetic part.
  • the mobile magnetic part comprises a magnet.
  • the fixed magnetic part may comprise at least one magnetic part.
  • the magnetic piece can be a magnet. It can be thermomagnetic.
  • the fixed magnetic portion may include at least one pair of magnetic pieces on a support.
  • the interaction between the fixed magnetic part and the movable magnetic part makes a centering of the mobile magnetic part on the abutment zone, but this centering can be reinforced.
  • the mobile magnetic part and at least one of the supports may comprise mechanical centering means of the mobile magnetic part on the abutment zone of said support.
  • the magnetic centering means may be substantially beveled or chamfered reliefs carried by both the support and the movable magnetic part, these reliefs having conjugate shapes.
  • the fixed magnetic part contributes to defining at least one of the abutment zones.
  • the means for triggering the displacement of the mobile magnetic part can be carried by at least one of the supports.
  • They can have a magnetic effect.
  • the means for triggering the displacement of the mobile magnetic part can heat the fixed magnetic part and modify its magnetic properties.
  • the means for triggering the displacement of the mobile magnetic part can create a magnetic field in the vicinity of the moving magnetic part.
  • they can be made by at least one driver able to be traversed by an electric current. The energy consumption is zero when the moving magnetic part abuts against one of the non-magnetic supports, ie in the working position.
  • the means for controlling the current to be circulated in the conductor at the position of the movable magnetic part so that it can take a plurality of stable levitation positions.
  • the magnetic actuator can then serve as a positioner.
  • the means for triggering the displacement of the mobile magnetic part may be pneumatic or hydraulic means.
  • the fixed magnetic part may be made of a material selected from the group of soft magnetic materials, hard magnetic materials, hysteresis materials, supra-conductive materials, diamagnetic materials, these materials being taken alone or in combination.
  • the supports may be made based on semiconductor material, dielectric material or conductive material, these materials being taken alone or in combination.
  • At least one zone of stop comprises a pair of electrical contacts and the movable magnetic part comprises at least one electrical contact, the moving magnetic part coming to connect the two electrical contacts of the pair of electrical contacts, when it abuts against the abutment zone.
  • At least one of the supports comprises, in the abutment zone, a hole for the passage of a fluid.
  • the movable magnetic part comprises a mirror intended to pass through a slot of one of the supports.
  • the present invention also relates to a matrix of magnetic actuators, it comprises a plurality of magnetic actuators thus characterized, these magnetic actuators sharing at least one same support.
  • the method may include a step of inserting at least one spacer between the first and the second substrate at the time of assembly.
  • the space may be formed by fusible material balls, inserted between the first and second substrate at the time of assembly and annealing said beads after assembly.
  • the method may include a step of magnetizing the moving magnetic part and possibly the fixed magnetic part before the step of releasing the moving magnetic part.
  • the first substrate is thinned before the etching step of the first substrate, the etched portion having a mirror function.
  • the first substrate and the second substrate may be made based on semiconductor material or dielectric material.
  • Figures 1A, 1B show schematically an example of a magnetic actuator according to the invention in two different stable positions in abutment. It is assumed that in this embodiment, the actuator is a valve.
  • This actuator comprises a first nonmagnetic support 1 and a second support 2, arranged in layers in different planes, and delimiting between them a space 3 in which a movable magnetic part 4 is able to move. It may be noted that there is no notion of verticality or horizontality because the mass of the actuator is very small compared to the magnetic forces involved.
  • the supports are shown in the form of plates arranged substantially parallel, one above the other, the first support 1 being at the top and the second support 2 at the bottom. Another orientation and / or another formed of the supports is possible.
  • the supports 1, 2 may be made for example based on semiconductor material such as silicon or gallium arsenide, dielectric material such as ceramic, glass, or a plastic material, conductive material such as 'aluminum. Combinations of several of these materials are possible.
  • the supports 1, 2 are preferably electrically insulating, at least locally, insofar as they carry both magnetic parts and electrical conductors.
  • This actuator also comprises a fixed magnetic part 5 integral with at least one of the supports 1, 2.
  • the fixed magnetic part 5 is formed of two magnetic parts 51, 52 which are integral with the first support 1. These magnetic parts may be magnets but this is not an obligation. It is assumed in the rest of the description that they are magnets unless otherwise mentioned. They are placed on one of its main faces, that which is opposite to the space 3.
  • the second support 2 does not carry a fixed magnetic part.
  • the magnets 51, 52 could be integral with its other main face, on the side of the space 3 as are the magnets 51, 52 shown in FIG. Figures 5A, 5B described later
  • the magnets 51, 52 are included in the support 1, they are embedded therein.
  • the fixed magnetic part 5 associated with one of the supports and the moving magnetic part 4, in abutment are offset, that is to say in different planes. If, however, the fixed magnetic part is on the side of the space 3, the magnets of the fixed magnetic part and the movable magnetic part will preferably be given different thicknesses in order to obtain this offset.
  • the movable magnet will be thicker than the fixed magnet or magnets.
  • the mobile magnetic part 4 comprises a magnet 40. It has no mechanical connection with the fixed magnetic part 5.
  • the non-magnetic supports 1, 2 each comprise an abutment zone 10, 20 for the mobile magnetic part 4.
  • the fixed magnetic part 5 contributes to delimit the abutment areas 10, 20.
  • the two magnets 51, 52 are on either side of the abutment zone 10. In all cases the abutment zone 10, 11 and the fixed magnetic part 5 are distinct but close so that the interaction can take place.
  • the abutment zone 20 of the second support 2 is opposite the abutment zone 10 of the first support 1.
  • the movable magnetic part 4 is either abutting against one of the supports 1, 2 or levitating in space 3 between the two supports 1, 2, without any contact, guided magnetically by the fixed magnetic part 5 at least.
  • the magnetic actuator also comprises means 6 for triggering the displacement of the mobile magnetic part 4.
  • the function of the means 6 for triggering the displacement of the mobile magnetic part 4 is to modify the forces interacting on the mobile magnetic part 4 and therefore to modify the equilibrium of the set magnetic part fixed-moving magnetic part. They initiate the displacement of the mobile magnetic part 4. Then the displacement is due to the interactions between the fixed magnetic part 5 and the mobile magnetic part 4.
  • the means 6 to trigger the displacement of the part mobile magnetic have a mechanical effect. They are pneumatic or hydraulic type.
  • the first support 1 is provided with an orifice 7 located in the abutment zone 10. It is sought that in a stable magnetic position the movable magnetic part 4 should be pressed into the abutment zone 10 against the first support 1. to the interaction exerted on it the fixed magnetic part 5. It then closes the orifice 7. None can enter the space 3 through the orifice 7. When a fluid f is injected through the 7 to the space 3 and that it has a sufficient pressure to move the movable magnetic part 4, the latter is placed in the abutment zone 20 plated on the second support 2 (FIG. Figure 1A ).
  • the fluid f can then enter the space 3 and flow laterally according to the dashed arrows.
  • the movable magnetic part 4 remains in interaction with the fixed magnetic part 5. If the pressure of the fluid f is no longer sufficient or the pressure of the fluid f reverses, the mobile magnetic part 4 returns to the upper position, abuts against the first support 1 and closes the orifice 7 ( Figure 1B ). This occurs when the geometrical characteristics of the magnets, their magnetization and their relative positions in space are adjusted correctly.
  • the interaction between the fixed magnetic part and the moving magnetic part has the effect of centering the moving magnetic part in the abutment zone.
  • 20 of at least one of the supports 1, 2 may be provided mechanical centering means 8 of the movable magnetic part 4 at the abutment zone 10, 20 of at least one of the supports 1, 2.
  • the embedding means are located on the first support 1.
  • the displacement of the movable magnetic part 4 can then be from a perfectly centered high position to a low position and vice versa.
  • the moving magnet be carried by a base and that it is this base which comprises the centering means.
  • These reliefs can easily be made by chemical machining especially when using techniques used in microelectronics to achieve the magnetic actuator.
  • the centering means 8 also have a function of sealing the fluid when the movable magnetic part 4 is in the high position.
  • the fluid can not enter the space 3 until its pressure is sufficient.
  • means 6 instead of using means 6 to trigger the displacement of the mobile magnetic part 4 in pneumatic form with mechanical effect, it is possible to use means whose effect is magnetic. These means can generate a localized increase in temperature and thus modify the magnetic characteristics of the fixed magnetic part 5.
  • the figure 2 illustrates this characteristic.
  • the fixed magnetic part 5 is distributed over the two supports 1, 2. It comprises two pairs of magnets referenced respectively 51, 52, 53, 54 and each pair of magnets is integral with one of the supports 1, 2. distributing on the two supports 1, 2 the fixed magnetic part 5, it is easier to control the positioning of the moving magnetic part 4 in abutment. More generally, the magnetic parts, grouped in pairs are located on either side of an abutment zone.
  • the mobile magnetic part 4 is capable of taking up several stable magnetic positions, in each of these positions it abuts against a support 1, 2. These stable magnetic positions do not require a power supply, the moving magnetic part is in magnetic interaction with the fixed magnetic part 5.
  • the figure 2 shows that the magnets 51 to 54 of the fixed magnetic part 5 are each equipped, on one of their face, with a heating resistor R. These resistances can be realized by a conductive metal deposition for example based on copper, silver, aluminum, polysilicon.
  • the means 6 for triggering the displacement of the mobile magnetic part 4 are distributed on the two supports 1, 2. It could be envisaged that they are located on one of them only as on the Figure 4A .
  • a fixed magnetic part 51 to 54 provided with such resistors R is made of a thermomagnetic material whose magnetic properties depend on the temperature. It is possible to use a material whose Curie point is low, for example less than or equal to 100 ° C. This material is magnetic for a temperature below its Curie point and non-magnetic for a higher temperature. It is also possible to use a material whose ferromagnetism properties are obtained above a so-called transition temperature.
  • the heating must not disturb the magnetic properties of the mobile magnetic part 4. It will be possible for example to realize the magnet 40 of the mobile magnetic part 4 in a material whose Curie point is greater than that of the magnets 51, 52 of the fixed magnetic part 5 or thermally isolating it from the fixed magnetic part 5.
  • the heating can be interrupted, there is no more energy consumption.
  • the movable magnetic part 4 abuts on one of the supports 1, 2, the energy consumption is also zero.
  • the magnetic actuator is a micro-valve.
  • Each of the supports 1, 2 comprises an orifice 7 intended to allow a fluid f1, f2 to enter or leave the space 3 between the two supports 1, 2.
  • the mobile magnetic part 4 Depending on the position of the mobile magnetic part 4 only one of the fluids f1 or f2 can penetrate into or out of space 3. The magnetic part prevents the penetration of the other fluid.
  • the means 6 for triggering the displacement of the mobile magnetic part 4 modify the magnetic characteristics of the fixed magnetic part 5, it is possible that they create a magnetic field that modifies the magnetic balance. established between the fixed magnetic part 5 and the moving magnetic part 4 and consequently the equilibrium position of the movable magnetic part 4.
  • the figure 3 shows, in top view, the magnetic field lines which are established around the magnet 40 of the movable magnetic part 4 whose direction of magnetization is shown schematically by an arrow. It is assumed that the magnet 4 abuts on the second support 2. It has, in this example, a rectangular parallelepiped shape and its poles are located at the ends of its long sides.
  • the means 6 for triggering the displacement of the mobile magnetic part 4 are formed of two separate conductors 61, 62, each surrounding a pole of the magnet 40. Arrows show the flow direction of the current I in the conductors 61, 62, for a force to be applied to the magnet 40 for detaching it from the second support 2.
  • each at one end of the magnet 40 one could have used one or more loop conductors, with one or more turns, to obtain the same flow of current. It is assumed that this is the case on Figures 4B, 4C with a pair of windings (610, 620), (630, 640) integral with each of the supports 1, 2. In the example of the figure 3 maximum efficiency is obtained when each pole of the magnet 40 is bordered by a substantially semicircular conductor. To obtain a desired effort, one adjusts the positioning and the shape of the conductor, the intensity of the current and its direction. The conductor can be made as well as the resistance by conductive metal deposition.
  • the magnetic actuator of the Figure 4A is an electrical relay.
  • One of the supports 1, 2 comprises, in the abutment zone 10, a pair of electrical contacts C1, C2 isolated from one another.
  • the mobile magnetic part 4 comprises, it, an electrical contact C which comes electrically connect the two electrical contacts C1, C2 of the pair when the movable magnetic part 4 is in abutment against the support 1 thus equipped.
  • the pair of electrical contacts C1, C2 is included in an electric circuit (not shown) which is closed when the mobile magnetic part 4 is in abutment with the support 1 thus equipped and open when the mobile magnetic part 4 is in abutment. against the other support 2.
  • the other support 2 does not comprise a fixed magnetic part, nor means for triggering the displacement of the mobile magnetic part 4.
  • a double electrical relay or an electrical switch is then produced if an electrical contact of one of the pairs is connected to an electrical contact of the other pair.
  • the Figures 5A, 5B now show a magnetic actuator having a relay function or optical switch respectively in levitation position and in stable working position.
  • the mobile magnetic part 4 is provided with a mirror 50.
  • the mirror 50 When the mobile magnetic part 4 abuts on the second support 2, the mirror 50 is confined in the space 3 between the two supports 1, 2.
  • mobile 4 is in abutment against the first support 1, the mirror 50 passes through a slot 501 carried by the first support 1 and out of the space 3, it arises on the other side of the first support 1.
  • This mirror 50 when 'he is in a high position can then deflect an optical beam that is not deflected when the mirror is in the down position.
  • the optical beam is not shown so as not to overload the figures.
  • the supports 1, 2 each accommodate a single fixed magnetic piece 51, 51, instead of several in the previous examples.
  • This magnetic piece can completely or partially surround the abutment area of the support. Only one of the supports could have been equipped with such a magnetic part.
  • FIG. 6A which is a section, there are two magnetic pieces 51, 53 substantially ring. Each magnetic piece surrounds a stop zone 10, 20. Another difference with respect to what has been previously described is that the moving magnetic portion 4 is now substantially cylindrical.
  • the means 6 for triggering the displacement of the mobile magnetic part 4 take, in the example of the Figure 6A the shape of a coil whose winding axis is parallel to that of the moving magnetic part 4.
  • the direction of magnetization of the fixed and moving magnetic parts is the same, but instead of being in the plane of the supports 1, 2 substantially perpendicular to the displacement as in the examples above, it is substantially perpendicular to the plane of the supports and substantially parallel to the displacement.
  • the fixed magnetic parts 51, 53 are embedded in the supports 1.2 and in the abutment areas 10, 20, the supports are thinned.
  • a magnetic part 51 substantially U. It is embedded on the side of its upper face.
  • Another magnetic piece 53 is secured to the other support 2. It is assumed that it is also substantially U-shaped. This second magnetic piece 53 could have been omitted.
  • one of the supports 1, 2 is thinned at a stop zone 10.
  • the means 6 for triggering the displacement of the mobile magnetic part 4 are integral with the support 1.
  • the magnetic actuator according to the invention can have a positioner function.
  • the means 6 for triggering the displacement of the movable magnetic part also serve to keep the moving magnetic part 4 in a fixed levitating position. Instead of sending a current pulse in the conductors 61 to 64, the current can be slaved according to the position of the moving magnetic part 4.
  • figure 7 illustrates this variant.
  • the device 65 which detects the position of the mobile magnetic part 4 can take the form of two capacitive sensors 65.1, 65.2 each located on one of the supports 1, 2. They measure the capacitances between the capacitor 1 and 2. concerned support 1, 2 and the movable magnetic part 4.
  • a differentiator device 65.3 receives the signals from the two capacitive sensors 65.1, 65.2, makes the difference and delivers the signal representative of the position of the movable magnetic part 4 to the comparator 66 .
  • magnetic material 5 soft magnetic materials, hard magnetic materials, magnetic hysteresis materials, diamagnetic materials, superconductive materials, these materials being taken alone or in combination.
  • Soft magnetic materials such as iron, nickel, iron-nickel alloys, iron-cobalt, iron-silicon, are magnetized according to an inductive field to which they are subjected.
  • Hard magnetic materials correspond to magnets such as ferrite magnets, samarium-cobalt magnets, neodymium-iron-boron magnets, platinum-cobalt magnets. Their magnetization depends little on the external magnetic field.
  • Hysteresis materials for example of aluminum-nickel-cobalt (AlNiCo) type, have properties that are between those of soft magnetic materials and those of hard magnetic materials. They are sensitive to the magnetic field in which they are. As for diamagnetic materials such as bismuth or pyrolitic graphite, their magnetization is collinear with the inducing magnetic field but in the opposite direction.
  • the superconducting materials could be nobium-titanium alloys (NbTi), yttrium-barium-copper-oxygen (YBaCuO) for example.
  • the mobile magnetic part 4 can be made for example of ferrite, samarium-cobalt, neodymium-iron-boron, platinum-cobalt.
  • the low Curie magnetic materials which are suitable for producing the fixed magnetic part are, for example, manganese-arsenic (MnAs), cobalt-manganese-phosphorus (CoMnP), erbium-iron-boron (ErFeB) alloys.
  • MnAs manganese-arsenic
  • CoMnP cobalt-manganese-phosphorus
  • ErFeB erbium-iron-boron
  • the iron-rhodium alloys (FeRh) are also suitable for the fixed magnetic part 5, they become ferro-magnetic above a transition temperature. This transition is frank and therefore requires little warm-up energy.
  • the transition temperature can be adjusted by adapting the chemical composition of the alloy.
  • the different actuators are optical relays like those of Figures 5A, 5B they are arranged in matrix M and their first support 1 is common to all. An optical multiplexer is thus obtained.
  • the magnetic actuators are visible only by their mirror 50 when it emerges from the space between the two supports, otherwise their position is materialized by the slot 501. They are at the intersection between n conductors of columns i1 to i5 and m drivers of lines j1 to j5 (n and m are integers, n and m can be different or not). In this way, signals propagating on a sheet formed of n column conductors i1 to i5 can be switched to the m line conductors j1, j2, j3, j4, j5.
  • Line and column conductors can be electrical conductors, optical fibers or simply optical beams. Due to the bistability of the actuators of the matrix M, the latter can be programmed and keep its configuration without the need to power it electrically.
  • the actuators A can be grouped into a particular matrix B as on the Figure 8B with a line driver there and several column conductors j1 to j3. By connecting a bus to the line conductor i1, the signals it conveys can be directed to the different column conductors j1 to j3 according to the state of the various actuators A. It is assumed that in this configuration the actuators are electrical relays like that of the Figure 4A .
  • FIG. 9A An example of a magnetic actuator according to the invention will now be described giving geometric characteristics and explaining a possible method for positioning its fixed and mobile magnetic parts.
  • the magnetic actuator is shown on the Figure 9A .
  • a minimum value of the force Fz that is applied to the mobile magnetic part 4 to hold it abutting against one of the supports 1, 2 is imposed so that the actuator can have, for example, sufficient impact resistance . It is desired that the mobile magnetic part 4 always take the same stable and centered magnetic position relative to the fixed magnetic part 5 when it comes into abutment against one of the supports 1, 2. It is not desired during the displacement, that the movable magnetic part 4 deviates along the x axis or along the y axis . The x, y and z axes are shown in the figure. If it is shifted in the direction x or in the direction y, the movable magnetic part 4 must oppose this movement and resume its stable magnetic position and centered in the abutment zone 10, 20. The movable magnetic part must have a good lateral stability in high or low position.
  • the inventors have realized that for a fixed magnetic part 5 and a mobile magnetic part 4 of given characteristics, for a holding force Fz against one of the supports 1, 2 given, to obtain this stable and centered magnetic position, it was necessary to adjust correctly, both the interval sep separating, according to x, the fixed magnetic part of the moving magnetic part and the interval gapz separating, according to z, the fixed magnetic part 4 of the mobile magnetic part 5, when the magnetic part mobile is in abutment against the support 1.
  • the fixed magnetic part 5 is distributed over the two supports and comprises two pairs of identical magnets (51, 52), (53, 54).
  • the mobile magnetic part 4 comprises a magnet 40. It is assumed for simplicity that the magnetization directions of all the magnets are collinear and in the same direction. It is of course possible that it is not not the case but the positioning of the magnets becomes more complicated.
  • the means for triggering the displacement of the movable magnet are not shown so as not to overload the figure.
  • the force Fz is not in the imposed range, one modifies sep and / or gapz and / or the geometrical characteristics of the magnets and / or their magnetization to adjust its value. The more one decreases gapz and sep the more the force Fz increases.
  • the magnets 53, 54 of the other pair will be disposed with the same intervals sep and gapz.
  • tests were made with fixed magnets 51-54 having a volume of 60x40x5 micrometers cubed, a movable magnet 40 of 160x40x5 microns cubed and a magnetization of 0.6 T.
  • the weight of the part magnetic magnetic field is about 2.10 -8 N
  • the force Fz stable magnetic position of the movable magnet against the first support 1 is about 4.10 -7 N.
  • the efforts provided by the means for triggering the displacement of the moving magnetic part are worth a few 10 -6 N
  • the switching time is a few milliseconds and the stroke of the moving magnetic part of 200 micrometers.
  • FIGS. 9C, 9D show variations of the force Fx as a function of x when the actuator has the desired stable magnetic position and when it does not have it.
  • the fixed magnetic part 5 of the actuator comprises two pairs of magnets (51, 52), (53, 54), one secured to the first support 1 and the other secured to the second support 2.
  • the mobile magnetic part 4 the actuator comprises a magnet 40 integral with one face of a base 41, this base 41 carries on its other side a mirror 50.
  • the means 6 for triggering the displacement of the mobile magnetic part 4 are made by two pairs of conductors (61, 62), (63, 64), each pair being integral with one of the supports 1, 2.
  • first nonmagnetic substrate 90 for example a semiconductor material such as silicon or gallium arsenide ( figure 10A ).
  • This first substrate 90 after treatment will lead to the first support 1 amagnetic, the top one.
  • a sacrificial layer 91 for example made of titanium, is deposited on the silicon. This sacrificial layer 91 will serve to delimit the base 41 of the mobile magnetic part 40. It is etched to leave only a frame 910 along the perimeter of the base ( figure 10B ). This frame 910 is called thereafter sacrificial frame.
  • a first dielectric layer 92 for example made of silicon oxide, is deposited which will be used to produce one of the pairs of magnets 51, 52 of the fixed magnetic part. 5 ( Figure 10C ). This first dielectric layer 92 is then planarized.
  • the geometry of the pair of magnets 51, 52 is delimited by photolithography.
  • a resin (not referenced) is used.
  • Graves 93 are etched in the first dielectric layer 92 for the pair of magnets 51, 52 ( figure 10D ).
  • the boxes are located on either side of the sacrificial frame 910.
  • the etching can be a dry etching.
  • the etching stops on the first substrate 90.
  • the resin is removed.
  • the magnets 51, 52 are deposited in the caissons 93 ( figure 10E ). This deposit can be done electrolytically.
  • the material used may be cobalt-platinum.
  • a step of planarization of the fixed magnets is carried out.
  • a second dielectric layer 94 for example made of silicon oxide, is then deposited on the first dielectric layer 92 in which the pair of conductors and the magnet of the mobile magnetic part ( figure 10F ). After planarization of this second dielectric layer 94, the geometry of the conductors and the ends which terminate them and the magnet of the mobile magnetic part are defined by photolithography. For this purpose a resin (not shown) is used. In the second dielectric layer 94, a box 95 is etched the magnet of the fixed magnetic part and boxes 96 for the conductors of the pair ( Figures 10G1 and 10G2 ) and 96.1 caissons for the studs that terminate them ( figure 10G2 ).
  • the casings 96 for the conductors are on either side of the casing 95 for the magnet of the movable magnetic part.
  • the boxes 96 for the conductors are substantially above the magnets 51, 52 of the pair.
  • the engraving can be a dry etching.
  • the boxes 96.1 for the pads are on either side of the boxes 96 for drivers.
  • the magnet 40 is deposited in the appropriate casing 95 of the mobile magnetic part. We end with a planarization step of magnet 40 ( FIG. 10H1 and FIG. 10H2 ).
  • the conductors 61, 62 are deposited in the appropriate caissons 96 and the studs 62.1, 62.2 in the caissons 96.1. We end with a planarization step of the conductors 61, 62 and pads 61.1, 62.1. This deposit can be done electrolytically with copper ( FIG. 10I1 and FIG. 10I2 ).
  • One or more trenches 97 are etched in the two dielectric layers 92, 94 until reaching the sacrificial frame 910. These trenches delimit the flanks of the base of the movable magnet 40 ( FIG. 10I1 and FIG. 10I2 ). This engraving can be a chemical attack. These trenches 97 can configure the flanks of the base with the reliefs of the centering means.
  • a second nonmagnetic substrate 100 made of a semiconductor material, such as the silicon, covered with a first dielectric layer 101, for example silicon oxide.
  • This second substrate 100 after treatment will lead to the second nonmagnetic support 2 that of the bottom.
  • a solid silicon substrate can be used which is oxidized or used directly with an SOI substrate.
  • boxes 102 are etched to receive the other pair of magnets of the fixed magnetic part ( figure 11A ).
  • the second pair of magnets 53, 54 is deposited in the same manner as the first pair. We end with a step of planarization of the magnets ( Figure 11B ).
  • a second dielectric layer 103 for example made of silicon oxide, is then deposited on the first layer 101, this second dielectric layer 103 having to accommodate the conductors of the second pair of conductors.
  • caissons 104 are etched for the conductors of the second pair of conductors ( figure 11C1 ) and boxes 104.1 for studs terminating the conductors ( figure 11C2 ).
  • the conductors 63, 64 are deposited in the caissons 104 in the same manner as for the first substrate ( figure 11D1 ).
  • Plots 63.1, 64.1 are also deposited ( figure 11D2 ). We end with a step of planarization of the conductors 63, 64 and pads 63.1, 64.1 ( Figure 11D1 and Figure 11D2 ).
  • the first substrate 90 as obtained at figure 10I1 , by turning it over, to the second substrate 100 as obtained at figure 11D1 , interposing between the two dielectric spacers 110 which contribute to delimit a space 3 in which the movable magnetic part will be able to move ( figure 12A1 ).
  • the dielectric layers 92, 94 and 101, 103 face each other while the semiconductor substrates 90, 100 are opposite. It is arranged that the magnets 51, 52 and 53, 54 of the two pairs are aligned in pairs and so that the conductors 61, 62 and 63, 64 of the two pairs are aligned in pairs.
  • This first semiconductor substrate 90 makes it possible to produce the mirror 50. Its thickness, which can be adjusted, will correspond to the height of the mirror 50.
  • An etching of one or more trenches 111 is carried out in the first semiconductor substrate 90. to define the flanks of the mirror 50 and form the slot in which it will slip when the moving magnetic part will be pressed against the first support. This etching stops on the first dielectric layer 92.
  • the sacrificial frame 910 is then etched off, which leads to releasing the base 41 of the mobile magnet 40 and the mirror 50 (FIG. Figures 12B1 and 12B2 ).
  • the first substrate is thinned so that the mirror in the upper position protrudes above the surrounding substrate and is hidden in the low position.
  • the magnet 40 and its base 41 are able to move in the space 3.
  • the magnets 40 51 to 54 are suitably magnetized because otherwise no appropriate interaction would be obtained between the movable magnet 40 and the magnet pairs 51, 52 and 53, 54 of the magnet. fixed magnetic part 5. If it is necessary to intervene, the magnetization can be done by circulating a current in the conductors 61 to 64.
  • the magnetic actuator according to the invention if it occupies a volume greater than about one cubic centimeter, may be sensitive to the external environment such as vibrations or shocks. Its performance may not be optimal in such disturbed environments. On the other hand, against all odds, with smaller dimensions, its performances are greatly improved whatever the environment.
  • the interaction between the movable magnetic part and the fixed magnetic part is favorable and does not bring performance degradation as in the case of a larger actuator.
  • the main characteristics of an actuator according to the invention are to have a relatively high movement speed, an ability to exert significant mass forces and large displacements relative to its size.
  • the movable magnetic part in stable magnetic position abuts against one of the substrates resists shocks.
  • the actuator consumes very little energy and only during the movements of the part movable magnet and not in a stable magnetic position when the movable magnetic part abuts against one of the substrates.

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  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Reciprocating, Oscillating Or Vibrating Motors (AREA)
  • Micromachines (AREA)
  • Magnetic Treatment Devices (AREA)
  • Permanent Field Magnets Of Synchronous Machinery (AREA)
  • Hard Magnetic Materials (AREA)
  • Electromagnets (AREA)
  • Magnetic Heads (AREA)

Claims (31)

  1. Magnetbetätiger, umfassend einen mobilen magnetischen Teil (4), einen stationären magnetischen Teil (5) und Mittel (6) zur Auslösung der Verschiebung des mobilen magnetischen Teils (4) in Bezug auf den stationären magnetischen Teil (5),
    dadurch gekennzeichnet, dass er wenigstens zwei unmagnetische Träger (1, 2) umfasst, die in verschiedenen Ebenen angeordnet sind und zwischen sich einen Raum (3) abgrenzen, wobei der stationäre magnetische Teil (5) mit wenigstens einem der Träger (1, 2) verbunden ist, jeder der Träger (1, 2) eine Anschlagszone (10, 20) für den mobilen magnetischen Teil (4) aufweist, die Anschlagszone (10, 20) und der stationäre magnetische Teil verschieden sind, der mobile magnetische Teil (4) sich in dem Raum (3) zwischen den beiden Trägern (1, 2) dank einer magnetischen Führung durch den stationären magnetischen Teil (5) im Schwebezustand befindet, wenn er nicht im Anschlag gegen die Anschlagszone (10, 20) eines der Träger (1, 2) ist,
    und dadurch, dass der mobile magnetische Teil (4) fähig ist, mehrere stabile magnetische Positionen einzunehmen, wobei er sich in jeder dieser Positionen im Anschlag gegen einen Träger (1, 2) befindet.
  2. Magnetbetätiger nach Anspruch 1, dadurch gekennzeichnet, dass der mobile magnetische Teil (4) einen Magneten (40) umfasst.
  3. Magnetbetätiger nach einem der Ansprüche 1 oder 2, dadurch gekennzeichnet, dass der stationäre magnetische Teil (5) wenigstens ein magnetisches Stück (51, 52, 53, 54) umfasst.
  4. Magnetbetätiger nach Anspruch 3, dadurch gekennzeichnet, dass das magnetische Stück ein Magnet ist.
  5. Magnetbetätiger nach Anspruch 3, dadurch gekennzeichnet, dass das magnetische Stück thermomagnetisch ist.
  6. Magnetbetätiger nach einem der Ansprüche 1 bis 5, dadurch gekennzeichnet, dass der stationäre magnetische Teil wenigstens ein Paar magnetischer Stücke ((51,52), (53,54)) auf einem Träger (1, 2) umfasst.
  7. Magnetbetätiger nach einem der Ansprüche 1 bis 6, dadurch gekennzeichnet, dass der mobile magnetische Teil (4) und wenigstens einer der Träger (1, 2) Zentriereinrichtungen (8) umfassen, um den mobilen magnetischen Teil (4) in der Anschlagszone (10, 20) des genannten Trägers zu zentrieren.
  8. Magnetbetätiger nach Anspruch 7, dadurch gekennzeichnet, dass die jeweils zugleich durch den Träger (1, 2) und den mobilen magnetischen Teil (4) getragenen Zentriereinrichtungen (8) im Wesentlichen angefaste Reliefs (80, 81) aufweisen, wobei diese Reliefs (80, 81) konjugierte bzw. einander zugeordnete Formen haben.
  9. Magnetbetätiger nach einem der Ansprüche 1 bis 8, dadurch gekennzeichnet, dass der stationäre magnetische Teil (5) dazu beiträgt, wenigstens eine der Anschlagszonen (10) abzugrenzen.
  10. Magnetbetätiger nach einem der Ansprüche 1 bis 9, dadurch gekennzeichnet, dass die Mittel (6) zur Auslösung der Verschiebung des mobilen magnetischen Teils (4) durch wenigstens einen der Träger (1, 2) getragen werden.
  11. Magnetbetätiger nach Anspruch 10, dadurch gekennzeichnet, dass die Mittel (6) zur Auslösung der Verschiebung des mobilen magnetischen Teils (4) eine magnetische Wirkung haben.
  12. Magnetbetätiger nach Anspruch 11, dadurch gekennzeichnet, dass die Mittel (6) zur Auslösung der Verschiebung des mobilen magnetischen Teils Heizeinrichtungen (R) sind, die fähig sind, die magnetischen Eigenschaften des stationären magnetischen Teils (5) zu modifizieren.
  13. Magnetbetätiger nach Anspruch 12, dadurch gekennzeichnet, dass die Mittel (6) zur Auslösung der Verschiebung des mobilen magnetischen Teils (4) in der Nähe des mobilen magnetischen Teils (4) ein Magnetfeld erzeugen.
  14. Magnetbetätiger nach Anspruch 13, dadurch gekennzeichnet, dass die Mittel (6) zur Auslösung der Verschiebung des mobilen magnetischen Teils (4) durch wenigstens einen Leiter (61, 62, 63, 64) in der Nähe des mobilen magnetischen Teils (4) realisiart sind, wobei in diesem Leiter ein elektrische Strom fließen kann.
  15. Magnetbetätiger nach Anspruch 14, dadurch gekennzeichnet, dass er Einrichtungen (65, 66, 67) zur Regelung des in dem Leiter (61, 62, 63, 64) zur Positionierung des mobilen magnetischen Teils (4) fließenden Stroms umfasst, so dass er eine Vielzahl stabiler Schwebepositionen einnehmen kann.
  16. Magnetbetätiger nach einem der Ansprüche 1 bis 9, dadurch gekennzeichnet, dass die Mittel (6) zur Auslösung der Verschiebung des mobilen magnetischen Teils pneumatische oder hydraulische Mittel (f) sind.
  17. Magnetbetätiger nach einem der Ansprüche 1 bis 16, dadurch gekennzeichnet, dass der stationäre magnetische Teil (5) aus einem Material ist, das ausgewählt wird aus der Gruppe der weichmagnetischen Materialien, der hartmagnetischen Materialien, der Supraleiter, der diamagnetischen Materialien, wobei diese Materialien einzeln oder kombiniert verwendet werden.
  18. Magnetbetätiger nach einem der Ansprüche 1 bis 17, dadurch gekennzeichnet, dass die Magnetisierungen des stationären magnetischen Teils (5) und des mobilen magnetischen Teils (4) dieselbe Richtung haben.
  19. Magnetbetätiger nach einem der Ansprüche 1 bis 18, dadurch gekennzeichnet, dass wenigstens eine Anschlagszone (10) ein Paar elektrischer Kontakte (C1, C2) umfasst, und dadurch, dass der mobile magnetische Teil (4) wenigstens einen elektrischen Kontakt (C) umfasst, wobei der mobile magnetische Teil (4) die beiden elektrischen Kontakte (C1, C2) des Kontaktpaars verbindet, wenn er sich im Anschlag gegen die Anschlagszone (10) befindet.
  20. Magnetbetätiger nach einem der Ansprüche 1 bis 18, dadurch gekennzeichnet, dass wenigstens einer der Träger (1, 2) in der Anschlagszone (10) eine Einlassöffnung (7) für Fluid (f) aufweist.
  21. Magnetbetätiger nach einem der Ansprüche 1 bis 18, dadurch gekennzeichnet, dass der mobile magnetische Teil (4) einen durch einen Schlitz (501) eines der Träger (1) hindurchpassenden Spiegel (50) umfasst.
  22. Magnetbetätiger nach einem der Ansprüche 1 bis 21, dadurch gekennzeichnet, dass die Träger (1, 2) auf der Basis von Halbleitermaterialien, dielektrischen Materialien oder leitfähigen Materialien realisiert sind, wobei diese Materialien einzeln oder kombiniert verwendet werden.
  23. Magnetbetätiger-Matrix, dadurch gekennzeichnet, dass sie eine Vielzahl Magnetbetätiger nach einem der Ansprüche 1 bis 22 umfasst, wobei diese Magnetbetätiger wenigstens einen gemeinschaftlichen Träger (1) umfassen.
  24. Verfahren zur Realisierung eines Magnetbetätigers, dadurch gekennzeichnet, dass es die folgenden Schritte umfasst:
    Realisierung - auf einem ersten Substrat (90) - eines Opferrahmens (910) gemäß der Kontur einer Basis (41) eines mobilen magnetischen Teils (4),
    Abscheidung einer ersten dielektrischen Schicht (92) auf dem ersten Substrat (90) und Realisierung von wenigstens einer Senke (93) zur Aufnahme eines stationären magnetischen Teils (51, 52),
    Abscheidung des stationären magnetischen Teils (51, 52) in der Senke (93),
    Abscheidung einer zweiten dielektrischen Schicht (94) auf der ersten dielektrischen Schicht (92) und Realisierung von Senken (95, 96) zur Aufnahme von mobilen magnetischen Teilen (4) und wenigstens einem Leiter (61, 62) von Mitteln (6) zur Auslösung der Verschiebung des mobilen magnetischen Teils (4),
    Abscheidung des mobilen magnetischen Teils (4) und des Leiters (61, 62) in den Senken (95,96),
    Ätzung eines Grabens oder mehrerer Gräben (97) in die dielektrischen Schichten (92, 94) bis zum Erreichen des Opferrahmens (910),
    Zusammenbau des ersten, umgekehrten Substrats (90) mit einem zweiten, unmagnetischen Substrat (100, 120), um zwischen den beiden Substraten (90, 100) einen Raum (3) abzugrenzen, wobei dieser Raum (3) zur Verschiebung des mobilen magnetischen Teils (4) bestimmt ist,
    Ätzung des ersten Substrats (90) und Eliminierung des Opferrahmens (910), um den mobilen magnetischen Teil (4) und die Basis (41) frei zu machen.
  25. Verfahren nach Anspruch 24, dadurch gekennzeichnet, dass der Raum (3) ausgebildet wird mit Hilfe wenigstens eines Abstandshalterelements (110), eingefügt zwischen dem ersten und dem zweiten Substrat während des Zusammenbaus.
  26. Verfahren nach Anspruch 24, dadurch gekennzeichnet, dass der Raum (3) ausgebildet wird mit Hilfe von Kugeln (112) aus schmelzbarem Material, eingefügt zwischen dem ersten und dem zweiten Substrat während des Zusammenbaus, und einer Temperung der genannten Kugeln (112) nach dem Zusammenbau.
  27. Verfahren nach einem der Ansprüche 24 bis 26, dadurch gekennzeichnet, dass es vor dem Zusammenbau der beiden Substrate (90, 100) einen Schritt zur Realisierung in einer dielektrischen Schicht (101) auf dem zweiten Substrat (100) von wenigstens einer Senke (102) zur Aufnahme des stationären magnetischen Teils (53, 54) umfasst,
    Abscheidung des stationären magnetischen Teils (53, 54) in der Senke (102),
    Abscheidung einer zweiten dielektrischen Schicht (103) auf der ersten dielektrischen Schicht (101) und Realisierung von wenigstens einer Senke (104) zur Aufnahme von wenigstens einem Leiter (63, 64) der Mittel (6) zur Auslösung der Verschiebung des mobilen magnetischen Teils (4),
    Abscheidung des Leiters (63, 64) in der Senke (104).
  28. Verfahren nach einem der Ansprüche 24 bis 27, dadurch gekennzeichnet, 0dass es einen Schritt zur Magnetisierung des mobilen magnetischen Teils (4) und eventuell des stationären magnetischen Teils (5) vor dem Schritt zur Freimachung des mobilen magnetischen Teil (4) umfasst.
  29. Verfahren nach einem der Ansprüche 24 bis 28, dadurch gekennzeichnet, dass das erste Substrat (90) dünner gemacht wird vor dem Ätzungsschritt des ersten Substrats, wobei der geätzte Teil die Funktion eines Spiegels (50) hat.
  30. Verfahren nach einem der Ansprüche 24 bis 29, dadurch gekennzeichnet, dass das erste Substrat (90) auf der Basis eines halbleitenden oder dielektrischen Materials realisiert wird.
  31. Verfahren nach einem der Ansprüche 24 bis 30, dadurch gekennzeichnet, dass das zweite Substrat (100) auf der Basis eines halbleitenden oder dielektrischen Materials realisiert wird.
EP03756515A 2002-08-02 2003-07-30 Magnetschwebebetätiger Expired - Lifetime EP1525595B1 (de)

Applications Claiming Priority (3)

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FR0209882A FR2843230B1 (fr) 2002-08-02 2002-08-02 Actionneur magnetique a levitation
FR0209882 2002-08-02
PCT/FR2003/002410 WO2004015725A2 (fr) 2002-08-02 2003-07-30 Actionneur magnetique a levitation

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Families Citing this family (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7476327B2 (en) 2004-05-04 2009-01-13 Idc, Llc Method of manufacture for microelectromechanical devices
US7527998B2 (en) 2006-06-30 2009-05-05 Qualcomm Mems Technologies, Inc. Method of manufacturing MEMS devices providing air gap control
US7684106B2 (en) 2006-11-02 2010-03-23 Qualcomm Mems Technologies, Inc. Compatible MEMS switch architecture
US7715079B2 (en) 2007-12-07 2010-05-11 Qualcomm Mems Technologies, Inc. MEMS devices requiring no mechanical support
TW200929196A (en) * 2007-12-28 2009-07-01 Univ Nat Chiao Tung Micro-optical pickup
FR2938112A1 (fr) * 2008-10-31 2010-05-07 Constance Guisset Dispositif formant interrupteur comportant un mobile pouvant leviter.
WO2011102471A1 (ja) 2010-02-19 2011-08-25 新日本製鐵株式会社 トランスバース方式の誘導加熱装置
CN102834761A (zh) 2010-04-09 2012-12-19 高通Mems科技公司 机电装置的机械层及其形成方法
US9134527B2 (en) 2011-04-04 2015-09-15 Qualcomm Mems Technologies, Inc. Pixel via and methods of forming the same
US8963159B2 (en) 2011-04-04 2015-02-24 Qualcomm Mems Technologies, Inc. Pixel via and methods of forming the same
JP5619830B2 (ja) * 2011-08-24 2014-11-05 パナソニック株式会社 樹脂−反磁性物質複合構造体、その製造方法、およびそれを用いた半導体装置
US9741918B2 (en) 2013-10-07 2017-08-22 Hypres, Inc. Method for increasing the integration level of superconducting electronics circuits, and a resulting circuit
FR3050339B1 (fr) 2016-04-15 2020-08-28 Enerbee Generateur d'electricite comprenant un convertisseur magneto-electrique et son procede de fabrication
CN105929530A (zh) * 2016-07-05 2016-09-07 全普光电科技(上海)有限公司 具有浮动平衡环的微型扫描仪及包含该微型扫描仪的激光投影装置
US10354785B2 (en) * 2017-05-10 2019-07-16 Toyota Jidosha Kabushiki Kaisha Passive thermal switch devices having thermal switch material that passively switches between a thermal insulating state and a thermal conducting state and vehicles having the same
CN114826406B (zh) * 2021-05-27 2024-01-09 中航光电科技股份有限公司 一种基于磁悬浮技术的超宽带射频光纤稳相传输系统

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3634735A (en) * 1969-04-03 1972-01-11 Mikio Komatsu Self-holding electromagnetically driven device
DE2020371B2 (de) 1970-04-25 1972-09-28 Siemens AG, 1000 Berlin u. 8000 München Schaltungsanordnung zur erfassung des istwertes der drehzahl eines kollektorlosen gleichstrommotors
CS213709B1 (en) * 1979-03-13 1982-04-09 Vaclav Landa Anizotropous permanent magnets
US4533890A (en) * 1984-12-24 1985-08-06 General Motors Corporation Permanent magnet bistable solenoid actuator
EP0193664A1 (de) * 1985-03-05 1986-09-10 Levitron International, Limited Magnetisches Schwebegerät
DE3530127A1 (de) * 1985-08-23 1987-02-26 Elco Oel & Gasbrenner Oelbrenner fuer heizungsanlagen
US4883025A (en) * 1988-02-08 1989-11-28 Magnavox Government And Industrial Electronics Company Potential-magnetic energy driven valve mechanism
US4928028A (en) * 1989-02-23 1990-05-22 Hydraulic Units, Inc. Proportional permanent magnet force actuator
US5144982A (en) * 1990-10-12 1992-09-08 Milliken Research Corporation Electro-pneumatic valve card assemblies
US5883557A (en) * 1997-10-31 1999-03-16 General Motors Corporation Magnetically latching solenoid apparatus
US6180928B1 (en) * 1998-04-07 2001-01-30 The Boeing Company Rare earth metal switched magnetic devices
US6842226B2 (en) * 2001-09-21 2005-01-11 Nikon Corporation Flexure supported wafer table
DE20203718U1 (de) * 2002-03-07 2002-07-04 Eto Magnetic Kg Elektromagnetische Stellvorrichtung

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DE60325597D1 (de) 2009-02-12
US7142078B2 (en) 2006-11-28
FR2843230A1 (fr) 2004-02-06
FR2843230B1 (fr) 2005-04-29
WO2004015725A3 (fr) 2004-04-29
US20050237140A1 (en) 2005-10-27
WO2004015725A2 (fr) 2004-02-19
ATE419631T1 (de) 2009-01-15
EP1525595A2 (de) 2005-04-27

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