EP1836713B1 - Mikrosystem mit integrierter rückhaltemagnetschaltung - Google Patents

Mikrosystem mit integrierter rückhaltemagnetschaltung Download PDF

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Publication number
EP1836713B1
EP1836713B1 EP06707675A EP06707675A EP1836713B1 EP 1836713 B1 EP1836713 B1 EP 1836713B1 EP 06707675 A EP06707675 A EP 06707675A EP 06707675 A EP06707675 A EP 06707675A EP 1836713 B1 EP1836713 B1 EP 1836713B1
Authority
EP
European Patent Office
Prior art keywords
circuit
movable contact
magnetic
membrane
current
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Not-in-force
Application number
EP06707675A
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English (en)
French (fr)
Other versions
EP1836713A1 (de
Inventor
Laurent Chiesi
Christian Bataille
Sylvain Paineau
Caroline Coutier
Amalia Garnier
Benoit Grappe
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Schneider Electric Industries SAS
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Schneider Electric Industries SAS
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from FR0550085A external-priority patent/FR2880729B1/fr
Priority claimed from FR0550666A external-priority patent/FR2883274B1/fr
Application filed by Schneider Electric Industries SAS filed Critical Schneider Electric Industries SAS
Publication of EP1836713A1 publication Critical patent/EP1836713A1/de
Application granted granted Critical
Publication of EP1836713B1 publication Critical patent/EP1836713B1/de
Not-in-force legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H7/00—Devices for introducing a predetermined time delay between the initiation of the switching operation and the opening or closing of the contacts
    • H01H7/16—Devices for ensuring operation of the switch at a predetermined point in the ac cycle
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H1/00—Contacts
    • H01H1/50—Means for increasing contact pressure, preventing vibration of contacts, holding contacts together after engagement, or biasing contacts to the open position
    • H01H1/54—Means for increasing contact pressure, preventing vibration of contacts, holding contacts together after engagement, or biasing contacts to the open position by magnetic force
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H50/00—Details of electromagnetic relays
    • H01H50/005—Details of electromagnetic relays using micromechanics
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H50/00—Details of electromagnetic relays
    • H01H50/005—Details of electromagnetic relays using micromechanics
    • H01H2050/007—Relays of the polarised type, e.g. the MEMS relay beam having a preferential magnetisation direction

Definitions

  • the present invention relates to a microsystem integrating a reluctant magnetic circuit.
  • This reluctant magnetic circuit makes it possible in particular, by creating an additional contact force, to be able to make an opening of an electric circuit without generating an electric arc.
  • the patent US 4,427,957 discloses a switching device comprising a magnetic circuit consisting of a movable part consisting of a pivoting blade and a fixed part. A coil is wound around the fixed part of the magnetic circuit.
  • An electrical circuit for supplying a load comprises in particular an electrical contact piece integral with the pivoting blade and initially spaced apart from a second electrical contact piece. The first electrical contact piece also acts as a mechanical spring for the pivoting blade.
  • the magnetic circuit Upon passage of a current in the coil, the magnetic circuit is magnetized and generates a first attraction force to attract the pivoting blade.
  • the blade pivots to the connection between the two electrical contact parts, causing the closure of the electrical circuit but also that of the magnetic circuit.
  • the first attraction force is canceled. Only the additional force of attraction keeps the blade in the closed position of the circuit. Since the intensity of this force follows the oscillations of the current through the electric circuit, it takes a value of zero to one given moment. When the current reaches a value below a threshold value, the additional magnetic force becomes less than the mechanical force of return exerted by the spring on the pivoting blade. Under the action of this mechanical force, the pivoting blade deviates from the closed position which opens the electrical circuit.
  • the current threshold value is for example close to zero, which makes it possible to cut the circuit when the current is low and thus to avoid the generation of an electric arc.
  • the mechanical restoring force must be large enough to take off the contacts, generate a magnetic force of the same order of magnitude with a current flowing in a turn does not seem suitable for threshold currents of a few milliamperes.
  • the object of the invention is to propose a microsystem making it possible to respond to the different requirements defined above, in which the breaking of the circuit with a current having a value lower than a threshold value is reliable and perfectly stable over time.
  • the additional contact force generated is proportional to the square of the intensity of the current flowing through the microactuator. This force therefore follows successive positive oscillations.
  • the device according to the invention is a question of directly opposing magnetic forces between them, that is to say the magnetic torque generated by the field of the excitation coil against the main contact force generated by the first magnetic field and the contact force additional generated during the passage of the current in the electrical circuit. It is therefore easier to adjust the level of the threshold current because the level of forces involved is similar.
  • the magnetic forces generated are independent of the wear phenomena of the microsystem and variations in its assembly process.
  • the movable contact piece is bistable.
  • the first magnetic field is permanent and maintains the membrane in each of its positions.
  • the second magnetic field created by the excitation coil is only transient and is only activated for the tilting of the membrane from one of its positions to the other of its positions.
  • the first magnetic field is uniform and oriented perpendicularly to the substrate.
  • the excitation coil is of the solenoid type and it surrounds the substrate and the movable contact piece.
  • the threshold value corresponds to the value of intensity of appearance of an electric arc.
  • the ferromagnetic layer forms with a ferromagnetic reinforcement circuit the magnetic circuit reluctant during the passage of the alternating current in the electric circuit.
  • the magnetic reinforcement circuit is integrated in the substrate.
  • the ferromagnetic reinforcement circuit consists of two symmetrical wings joined by a perpendicular central core, defining a U-shaped cross section.
  • the ferromagnetic reinforcement circuit is oriented so as, in its longitudinal direction, to be parallel to the direction followed by the current when the electric circuit is closed.
  • the wings of the ferromagnetic reinforcement circuit comprise two surfaces each defining an air gap with a parallel surface of the ferromagnetic layer of the movable contact piece located vis-a-vis.
  • the movable contact piece consists of a ferromagnetic membrane pivotally mounted on the substrate and carrying a movable contact adapted in the closed position to electrically connect two fixed conductive tracks arranged on the substrate for closing the electrical circuit.
  • the principle of the invention consists in integrating in a switch electrical apparatus of an electrical circuit a reluctant magnetic circuit to provide the aforementioned advantages.
  • a reluctant magnetic circuit created by the passage of an alternating current in the closed electrical circuit allows applying to the movable contact piece an additional contact or crushing force F '.
  • the intensity of the additional contact force F ' varies as a function of the intensity of the alternating current flowing in the electric circuit and follows successive positive oscillations ( figure 8 ). More specifically, the intensity of this additional contact force F 'is proportional to the square of the current 1 passing through the switch when the reluctant magnetic circuit is not saturated.
  • the invention consists in using the variations of this additional contact force F 'to allow the opening of the electric circuit when the current is at an intensity lower than a threshold value.
  • This threshold value may correspond to the intensity of appearance of an electric arc.
  • the additional contact force F ' may make it possible to prevent the switch from opening as long as the current flowing in it is greater than the threshold current.
  • This threshold value is, for example, 0.2 Ampere.
  • the main contact force F is generated by magnetic or electromagnetic closure means.
  • the opening force is generated by electromagnetic opening means.
  • a microsystem may be a device comprising at least one microactuator that can be manufactured using MEMS type technologies or conventional PCB or kapton PCB technologies.
  • a microactuator such as that described below is a microswitch or microswitch current used in a micro-contactor, a micro-relay or a micro-reed.
  • a microactuator such as that described below is a microswitch or microswitch current used in a micro-contactor, a micro-relay or a micro-reed.
  • microactuator we will use the general term "microactuator" to refer to these different applications.
  • a microsystem may comprise a microactuator 2 mounted on a flat surface 30 of a substrate 3 made of materials such as silicon, glass, ceramics or in the form of printed circuits.
  • the substrate 3 carries on its surface 30, for example, at least two identical planar conductive tracks 31, 32 spaced apart and intended to be electrically connected in order to obtain the closure of the electrical circuit.
  • the magnetic microactuator 2 carries at least one movable contact 21 capable of effecting the electrical junction between the two tracks 31, 32 when the microactuator 2 is activated.
  • the electrical circuit is closed, the current I follows a direction located in the plane of the conductive tracks 31, 32.
  • Such a microactuator 2 is provided with a movable contact piece carrying the movable contact 21 and consisting of a membrane 20 having a longitudinal axis (A) connected by one of its ends to an anchor stud 23 secured to the substrate 3 by means of two link arms 22a, 22b.
  • the movable contact 21 is for example formed on the membrane 20 near the free end of the membrane 20 and faces the surface 30 of the substrate 3.
  • the membrane 20 consists for example of a layer 200 ( Figures 1 and 2 ) of ferromagnetic material having on its surface facing the substrate 3 a recess in which is disposed the contact 21.
  • the microactuator 2 described in the invention can be realized by a planar duplication technology of MEMS (Micro Electro-Mechanical System) type. Indeed, the realization by deposition of successive layers in an iterative process lends itself well to the manufacture of such objects.
  • the membrane 20 as well as the arms 22a, 22b are for example derived from the same layer of ferromagnetic material.
  • the connecting arms 22a, 22b and a lower layer of the membrane 20 may be derived from a metal layer. A layer of a ferromagnetic material is deposited on this metal layer to generate the part 20.
  • Such a configuration can make it possible to optimize the mechanical properties of the linking arms 22a, 22b by using, to enable the pivoting of the membrane 20, a material which is mechanically more suitable than the ferromagnetic material.
  • the metal layer can act as a contact for closing an electrical circuit.
  • the ferromagnetic material is for example of the soft magnetic type and can be for example an alloy of iron and nickel ("permalloy" Ni 80 Fe 20 ).
  • the membrane 20 is pivotable relative to the substrate 3 along an axis (P) parallel to the axis described by the contact points of the membrane 20 with the conductive tracks and perpendicular to the longitudinal axis (A) of the membrane 20.
  • the connecting arms 22a, 22b form an elastic connection between the membrane 20 and the anchor stud 23. In such a configuration, the pivoting of the membrane 20 is thus obtained by bending the connecting arms 22a, 22b.
  • An electromagnet is able to drive by magnetic effect the pivoting movement of the membrane 20 between at least two positions, a closed position of the electrical circuit and an open position of the electric circuit.
  • Another magnetic field generated for example by a permanent magnet or an electromagnet can be used to apply a main contact force F to the membrane 20 in its closed position.
  • the membrane 20 is therefore possible to pivot the membrane 20 about its pivot axis (P) by subjecting the membrane 20 to a magnetic field produced by an external excitation coil 6 solenoid type or planar.
  • the membrane 20 is therefore able to take two distinct extreme positions. With reference to Figures 6A to 6C in a first extreme position ( Figure 6C ), the end of the membrane 20 carrying the contact 21 is raised and does not bear against the conductive tracks 31, 32. The electrical circuit is open. In its second extreme position ( Figures 6A and 6B ), the end of the membrane 20 carrying the contact 21 is in abutment against the conductive tracks 31, 32. In this second position, the electrical circuit is closed.
  • a first magnetic field B 0 preferably as uniform as possible, is applied to the microactuator 2.
  • This first magnetic field B 0 has field lines perpendicular to the surface 30 of the substrate 3. As shown in FIGS. Figures 6A to 6C , the field lines of this first magnetic field B 0 are directed towards the surface 30 of the substrate 3.
  • This first magnetic field B 0 can be generated by a permanent magnet or an electromagnet.
  • a magnetic circuit having as its magnetic source a permanent magnet or an electromagnetic coil 5 ' may be used to create this first magnetic field B 0 .
  • this magnetic circuit consists of a permanent magnet ( Figure 7A ) or a 5 'electromagnetic coil ( Figure 7B ) and two air gap pieces 50, 51 arranged parallel to each other on either side of the permanent magnet or the coil 5 'and between which the first magnetic field B 0 is generated.
  • the use of such a magnetic circuit makes it possible to generate a first uniform magnetic field B 0 in the gap.
  • An electromagnet comprising an external excitation coil 6 of the solenoid type as represented in FIG. figure 5 , connected to a current source, surrounds the substrate 3 and the microactuator 2 supported by the substrate 3.
  • the microactuator 2 is placed in the center of the excitation coil 6, in the central channel of the coil 6.
  • the passage a current in the excitation coil 6 generates a magnetic field direction parallel to the substrate 3 and perpendicular to the axis of pivoting (P) of the membrane to control the pivoting of the membrane 20 of one of its positions towards the other of his positions.
  • the direction of the current flowing through the excitation coil 6 decides the pivoting of the membrane 20 towards one or other of its extreme positions.
  • the solenoid-type excitation coil 6 may be manufactured by printed circuit techniques or by winding a copper wire.
  • the microsystem can comprise several microactuators organized in a matrix and subjected to the influence of the first magnetic field B 0 and that of the second temporary magnetic field created by the coil 6 to control the switching of the microactuators.
  • the matrix is placed in the center of the excitation coil 6.
  • the substrate 3 supporting the microactuator 2 and surrounded by the solenoid excitation coil 6 is placed under the effect of the first magnetic field B 0 , for example in the gap of the magnetic circuit described above in connection with the Figures 7A and 7B .
  • the first magnetic field B 0 initially generates a magnetic component BP 0 in the membrane 20 along its longitudinal axis (A).
  • the magnetic torque resulting from the first magnetic field B 0 and the component BP 0 generated in the membrane 20 holds the membrane 20 in one of its extreme positions, for example in the second extreme position ( Figure 6A ).
  • the contact 21 carried by the membrane 20 electrically connects the two tracks 31, 32 and the conductive circuit is closed.
  • the first extreme position ( Figure 6C )
  • the movable contact 21 of the membrane 20 is raised and spaced from the fixed contacts 31, 32.
  • the electrical circuit is open.
  • the invention consists in creating a reluctant magnetic circuit by using the ferromagnetic layer 200 of the membrane 20 and by integrating into the substrate 3 a reinforcement circuit 4 also made of ferromagnetic material.
  • the ferromagnetic material used for this reinforcing circuit 4 and for the layer 200 of the membrane 20 is, for example, of the soft magnetic type and may be a FeNi type alloy ("permalloy").
  • the reinforcing circuit 4 is disposed under the two conductive tracks 31, 32 and extends at the space between the two tracks 31, 32 to act on the membrane 20 above, in the vertical. Seen from the side, this reinforcing circuit 4 has the shape of a U ( figure 2 ), and therefore has two symmetrical parallel wings 41, 42 joined by a central core 40 perpendicular to the two wings 41, 42. The central core 40 is disposed under the tracks 31, 32 and the two conductive wings 41, 42 extend. perpendicularly on both sides of the two tracks 31, 32 conductors.
  • the reinforcing circuit 4 is oriented so as, in its longitudinal direction, to be parallel to the direction followed by the current I in the conductive tracks 31, 32 when the electric circuit is closed.
  • the wings 41, 42 of the reinforcement circuit 4 each terminate in a surface 43 situated in a plane parallel to the plane of the conductive tracks 31, 32 so as to define each an air gap E 1 , E 2 with a parallel surface of the ferromagnetic layer. 200 of the membrane 20 located vis-à-vis.
  • the two conductive tracks 31, 32 are slightly raised relative to the surfaces 43 of the wings 41, 42 so as to always leave a gap E 1 , E 2 residual between the reinforcing circuit and the ferromagnetic layer 200 of the membrane 20 even when the contact 21 of the membrane 20 is pressed against the tracks 31, 32 conductors.
  • the actuation of the membrane 20 closes the electrical circuit.
  • the reluctant magnetic circuit is then created so that the current I, crossing the conductive tracks 31, 32 and the mobile contact 21 effecting the junction, generates a magnetic field B whose field lines encircle the conductive tracks 31, 32 and the movable contact 21.
  • These field lines are formed transversely to the direction of the current 1 passing through the tracks 31, 32 and follow the U-shape of the reinforcement circuit 4, pass through a first gap E 1 , follow the ferromagnetic layer 200 of the membrane 20 and pass by the second gap E 2 before joining the reinforcement circuit 4 ( Figures 1 and 2 ).
  • the meaning of these lines of field is determined by the known rule of the corkscrew or the amp-man.
  • the magnetic field B generates an additional contact force F 'of the movable contact 21 of the membrane 20 against the conductive tracks 31, 32 whose intensity varies as a function of the intensity of the current I passing through the microactuator 2.
  • a threshold current is for example the current of appearance of an electric arc.
  • the additional contact force F ' may make it possible to prevent the opening of the microactuator as long as the current flowing in it is greater than the threshold current.
  • This threshold value is, for example, 0.2 Ampere.
  • the membrane 20 is pressed against the conductive tracks 31, 32 by a main contact force F ( figure 8 ) permanent generated for example by the action of a permanent magnetic field such as the first magnetic field B 0 .
  • the passage of the current I through the microactuator 2 creates an additional positive contact force F ', variable according to the oscillations of the current I.
  • F ORV of opposite direction and intensity equal to the sum of the intensity of the main contact force F and the intensity of the additional contact force F 'when it corresponds at an intensity value of the alternating current lower than the threshold value of the electric arc flash current.
  • Such opening force F OUV can be generated by energizing an electromagnet such as that comprising the excitation coil 6.
  • the excitation coil 6 generates the second magnetic field BS 1 of sufficient intensity to create the opening force F OUV .
  • the additional force that can be obtained with such a reluctant magnetic circuit, for a current of 0.2 A through the microactuator 2 is of the order of one hundred ⁇ N. If the main contact force F is 500 ⁇ N and the additional force F 'of 100 ⁇ N for a current of 0.2A, it will be sufficient to generate an opening force F OUV greater than 500 ⁇ N and less than 600 ⁇ N, by example of 520 ⁇ N to be sure to cause the opening of the microactuator 2 without generating an electric arc ( figure 8 ).
  • the reluctant magnetic circuit B 1 thus passes through the reinforcement circuit 4 and the ferromagnetic layer 200 'so as, as before, to generate an additional contact force F'.
  • the movable contact piece 20 ' can be actuated by various means and in particular by closing means, for example magnetic or electromagnetic type generating the first magnetic field B 0 described above and by means of opening for example of the electromagnetic type such as the excitation coil 6 described above.
  • closing means for example magnetic or electromagnetic type generating the first magnetic field B 0 described above
  • opening for example of the electromagnetic type such as the excitation coil 6 described above.

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  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Micromachines (AREA)
  • Semiconductor Integrated Circuits (AREA)
  • Magnetic Treatment Devices (AREA)

Claims (10)

  1. Mikrosystem, das aufweist:
    - ein bewegliches Kontaktteil (20, 20'), das eine Schicht (200, 200') aus ferromagnetischem Material aufweist und beweglich auf ein Substrat (3) montiert ist, um einen elektrischen Schaltkreis zwischen einer offenen und einer geschlossenen Stellung umzuschalten,
    - Schließeinrichtungen, die eine Hauptkontaktkraft (F) auf das bewegliche Kontaktteil in der geschlossenen Stellung ausüben können,
    - einen reluktanten Magnetkreis, der an das bewegliche Kontaktteil in der geschlossenen Stellung eine zusätzliche Kontaktkraft (F') anwendet, deren Stärke in Abhängigkeit von einem Wechselstrom (I) variiert, der den elektrischen Schaltkreis durchquert,
    - Öffnungseinrichtungen, die nach einem Öffnungsbefehl an das bewegliche Kontaktteil eine Öffnungskraft (FOUV) des elektrischen Schaltkreises anwenden, deren Stärke gleich der Summe der Stärke der Hauptkontaktkraft (F) und der Stärke der zusätzlichen Kontaktkraft (F') ist, wenn diese einem Wert des Wechselstroms unterhalb eines Schwellwerts entspricht,
    dadurch gekennzeichnet, dass
    - die Schließeinrichtungen vom magnetischen oder elektromagnetischen Typ sind und ein erstes Magnetfeld (B0) erzeugen, das eine magnetische Komponente (BP0) in der Schicht (200, 200') aus ferromagnetischem Material des beweglichen Kontaktteils (20, 20') erzeugt, um es in der geschlossenen Stellung zu halten,
    - die Öffnungseinrichtungen einen mit einer Erregerspule (6) versehenen Elektromagnet enthalten, die mit einem temporären Strom gespeist werden kann, um ein zweites Magnetfeld (BS1) zu produzieren und eine inverse magnetische Komponente (BP1) in der Schicht (200, 200') aus ferromagnetischem Material des beweglichen Kontaktteils (20, 20') mit einer ausreichenden Stärke zu erzeugen, um den Übergang des beweglichen Kontaktteils von der geschlossenen Stellung in die offene Stellung zu steuern.
  2. Mikrosystem nach Anspruch 1, dadurch gekennzeichnet, dass das erste Magnetfeld (B0) gleichförmig und lotrecht zum Substrat (3) ausgerichtet ist.
  3. Mikrosystem nach Anspruch 1 oder 2, dadurch gekennzeichnet, dass die Erregerspule (6) vom Solenoid-Typ ist, und dass sie das Substrat (3) und das bewegliche Kontaktteil umgibt.
  4. Mikrosystem nach einem der Ansprüche 1 bis 3, dadurch gekennzeichnet, dass der Schwellwert dem Stärkewert des Auftretens eines Lichtbogens entspricht.
  5. Mikrosystem nach einem der Ansprüche 1 bis 4, dadurch gekennzeichnet, dass die ferromagnetische Schicht (200, 200') mit einem ferromagnetischen Verstärkungsschaltkreis (4) den reluktanten Magnetkreis beim Durchgang des Wechselstroms (I) durch den elektrischen Schaltkreis bildet.
  6. Mikrosystem nach Anspruch 5, dadurch gekennzeichnet, dass der magnetische Verstärkungsschaltkreis (4) in das Substrat (3) integriert ist.
  7. Mikrosystem nach Anspruch 5 oder 6, dadurch gekennzeichnet, dass der ferromagnetische Verstärkungsschaltkreis (4) aus zwei symmetrischen Schenkeln (41, 42) besteht, die von einem lotrechten Mittelsteg (40) verbunden werden, wodurch ein U-förmiger Querschnitt definiert wird.
  8. Mikrosystem nach einem der Ansprüche 5 bis 7, dadurch gekennzeichnet, dass der ferromagnetische Verstärkungsschaltkreis (4) so ausgerichtet ist, dass er in seiner Längsrichtung parallel zu der Richtung ist, der der Strom (I) folgt, wenn der elektrische Schaltkreis geschlossen ist.
  9. Mikrosystem nach Anspruch 7 oder 8, dadurch gekennzeichnet, dass die Schenkel (41, 42) des ferromagnetischen Verstärkungsschaltkreises (4) zwei Flächen (43, 44) aufweisen, die je einen Luftspalt (E1, E2, E3, E4) mit einer parallelen Fläche der ferromagnetischen Schicht (200, 200') des beweglichen Kontaktteils (20, 20') bilden, die gegenüber angeordnet ist.
  10. Mikrosystem nach einem der Ansprüche 1 bis 9, dadurch gekennzeichnet, dass das bewegliche Kontaktteil aus einer ferromagnetischen Membran (20, 20') besteht, die schwenkbar auf das Substrat (3) montiert ist und einen beweglichen Kontakt (21, 21') trägt, der in der geschlossenen Stellung zwei feste Leiterbahnen (31, 32) elektrisch verbinden kann, die auf dem Substrat (3) angeordnet sind, um den elektrischen Schaltkreis zu schließen.
EP06707675A 2005-01-10 2006-01-06 Mikrosystem mit integrierter rückhaltemagnetschaltung Not-in-force EP1836713B1 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
FR0550085A FR2880729B1 (fr) 2005-01-10 2005-01-10 Microsysteme a commande electromagnetique
FR0550666A FR2883274B1 (fr) 2005-03-15 2005-03-15 Microsysteme integrant un circuit magnetique reluctant
PCT/EP2006/050075 WO2006072628A1 (fr) 2005-01-10 2006-01-06 Microsysteme integrant un circuit magnetique reluctant

Publications (2)

Publication Number Publication Date
EP1836713A1 EP1836713A1 (de) 2007-09-26
EP1836713B1 true EP1836713B1 (de) 2010-03-03

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Application Number Title Priority Date Filing Date
EP06707675A Not-in-force EP1836713B1 (de) 2005-01-10 2006-01-06 Mikrosystem mit integrierter rückhaltemagnetschaltung

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EP (1) EP1836713B1 (de)
AT (1) ATE459970T1 (de)
DE (1) DE602006012619D1 (de)
WO (1) WO2006072628A1 (de)

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57119419A (en) * 1981-01-16 1982-07-24 Omron Tateisi Electronics Co Switching device
DE8225595U1 (de) * 1982-09-10 1989-06-15 Ranco Inc., Columbus, Ohio, Us
US5070317A (en) * 1989-01-17 1991-12-03 Bhagat Jayant K Miniature inductor for integrated circuits and devices
US6469602B2 (en) * 1999-09-23 2002-10-22 Arizona State University Electronically switching latching micro-magnetic relay and method of operating same
WO2002095896A2 (en) * 2001-05-18 2002-11-28 Microlab, Inc. Apparatus utilizing latching micromagnetic switches
CN100565740C (zh) * 2002-09-18 2009-12-02 麦克弗森公司 层压机电系统

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WO2006072628A1 (fr) 2006-07-13
ATE459970T1 (de) 2010-03-15
DE602006012619D1 (de) 2010-04-15
EP1836713A1 (de) 2007-09-26

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