EP1901325B1 - Schalteinrichtung mit in matrixform angeordneten magnetischen Mikroschalter - Google Patents

Schalteinrichtung mit in matrixform angeordneten magnetischen Mikroschalter Download PDF

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Publication number
EP1901325B1
EP1901325B1 EP07115791A EP07115791A EP1901325B1 EP 1901325 B1 EP1901325 B1 EP 1901325B1 EP 07115791 A EP07115791 A EP 07115791A EP 07115791 A EP07115791 A EP 07115791A EP 1901325 B1 EP1901325 B1 EP 1901325B1
Authority
EP
European Patent Office
Prior art keywords
membrane
magnetic
microswitch
substrate
tracks
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Not-in-force
Application number
EP07115791A
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English (en)
French (fr)
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EP1901325A1 (de
Inventor
Laurent Chiesi
Benoît Grappe
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Schneider Electric Industries SAS
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Schneider Electric Industries SAS
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Application filed by Schneider Electric Industries SAS filed Critical Schneider Electric Industries SAS
Publication of EP1901325A1 publication Critical patent/EP1901325A1/de
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Publication of EP1901325B1 publication Critical patent/EP1901325B1/de
Not-in-force legal-status Critical Current
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H50/00—Details of electromagnetic relays
    • H01H50/005—Details of electromagnetic relays using micromechanics
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H67/00—Electrically-operated selector switches
    • H01H67/22—Switches without multi-position wipers
    • H01H67/24—Co-ordinate-type relay switches having an individual electromagnet at each cross-point
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H50/00—Details of electromagnetic relays
    • H01H50/005—Details of electromagnetic relays using micromechanics
    • H01H2050/007—Relays of the polarised type, e.g. the MEMS relay beam having a preferential magnetisation direction

Definitions

  • the present invention relates to a switching device composed of a matrix of magnetic microswitches.
  • the invention relates more particularly to a principle of addressing a microswitch within the matrix.
  • microswitches are often organized in matrix so as to form a switching device in which each microswitch can be controlled separately through the planar coil associated therewith.
  • the multiplication of the number of coils on the substrate of the matrix requires a large substrate surface which therefore limits the possibilities of miniaturization of the device.
  • EP 1 241 697 and EP 1 331 656 individually controlling each microswitch of a matrix of microswitches using a network of interwoven conductive lines.
  • a microswitch is placed at each intersection of a line and a column and can be controlled individually by sending a current in the two conductive lines corresponding to this line and this column.
  • the micro-switches used in the matrix are particularly bulky because they comprise a magnetic circuit provided with portions passing through the substrate and placed under the substrate.
  • the microswitches each require the use of a particular magnet disposed under the substrate to bias the magnetic circuit.
  • the object of the invention is to propose a switching device comprising magnetic micro-switches organized in matrix, which can be controlled separately without occupying a substantial space on the substrate, under the substrate and through the substrate.
  • the conductive lines are electrical tracks made in the substrate.
  • the network consists of a first series of rectilinear and parallel electrical tracks formed in a first plane and oriented in a first direction and a second series of parallel electrical tracks formed in a second plane parallel to the foreground and oriented in a second direction.
  • the second direction is for example orthogonal to the first direction.
  • the movable element of each microswitch consists of a ferromagnetic membrane having a longitudinal axis along which the magnetic field induces a magnetic component.
  • the longitudinal axis of the membrane of each microswitch is oriented along the bisector of the angle formed between the two conductive lines which intersect under the membrane. If the conductive lines are orthogonal to each other, the longitudinal axis of each microswitch will therefore be oriented at 45 ° with respect to the two conductive lines which intersect under their membrane.
  • the membrane of each microswitch has an axis of rotation perpendicular to its longitudinal axis, in which it is adapted to pivot between its two positions by reversing the magnetic torque.
  • the ferromagnetic membrane has two torsion arms anchored on the substrate and inscribed in the membrane. This characteristic contributes to make the matrix particularly compact since the torsion arms no longer project outwardly.
  • the device comprises an electronic control device associated with the matrix for controlling the injection of current into the appropriate conductive lines of the network as a function of the microswitch to be addressed.
  • a magnetic microswitch 2 as shown in FIG. figure 1 comprises a bistable mobile element mounted on a substrate 3 made of materials such as silicon, glass, ceramics or in the form of printed circuits.
  • the substrate 3 carries on its surface 30 at least two contacts or conductive tracks 31, 32 plane, identical and spaced, intended to be electrically connected by a movable electrical contact 21 to obtain the closure of an electrical circuit (not shown) .
  • the movable element is composed of a deformable membrane 20 having at least one layer of ferromagnetic material.
  • the membrane has a longitudinal axis (A) and is integral with the substrate 3 by means of two linking arms 22a, 22b connecting said membrane 20 to two anchoring studs 23a, 23b arranged symmetrically on both sides of its longitudinal axis (A).
  • the membrane 20 is able to pivot between an open position and a closed position along an axis of rotation (R) parallel to the axis described by the contact points of the membrane 20 with the electric tracks 31, 32 and perpendicular to its longitudinal axis (A).
  • the movable electrical contact 21 is disposed under the membrane 20, at the distal end thereof relative to its axis (R) of rotation.
  • the movable contact 21 When the membrane is in the closed position, the movable contact 21 electrically connects the two fixed conductive tracks 31, 32 disposed on the substrate, to close the electrical circuit. When the membrane is in the open position, the movable contact 21 is moved away from the two conductive tracks so as to open the electric circuit.
  • Such a microswitch 2 can be realized by a planar duplication technology of the MEMS type (for "Micro Electro-Mechanical System”).
  • the membrane 20 and the connecting arms 22a, 22b are for example derived from the same layer of ferromagnetic material.
  • the ferromagnetic material is for example of the soft magnetic type and can be for example an alloy of iron and nickel ("permalloy" Ni 80 Fe 20 ).
  • the torsion arms 22a, 22b and the anchoring studs 23a, 23b are inscribed in the perimeter of the membrane 20.
  • the torsion arms 22a, 22b are not therefore extend further outwardly of the membrane 20 but inwardly. They are inscribed in the membrane 20 and join the anchoring studs 23a, 23b located directly under the membrane 20.
  • the integration of the anchoring studs 23a, 23b and torsion arms 22a, 22b in the perimeter of the membrane 20 has the advantage of reducing the bulk of the component and therefore its manufacturing cost (by reducing the substrate surface necessary and increasing yields).
  • the magnetic actuation of a microswitch 2 as shown in FIG. figure 1 or 10 consists in subjecting the membrane 20 to a permanent magnetic field B 0 , preferably uniform and for example in a direction perpendicular to the surface of the substrate 3 to maintain the membrane 20 in each of its positions, and to apply a temporary magnetic control field to control the passage of the membrane 20 from one position to the other, by reversing the magnetic torque exerted on the membrane.
  • a permanent magnetic field B 0 preferably uniform and for example in a direction perpendicular to the surface of the substrate 3 to maintain the membrane 20 in each of its positions, and to apply a temporary magnetic control field to control the passage of the membrane 20 from one position to the other, by reversing the magnetic torque exerted on the membrane.
  • a permanent magnet (not shown) is used, for example fixed under the substrate 3.
  • the Temporary magnetic field is generated using a planar excitation coil 4 associated with microswitch 2 ( figure 2 ).
  • the passage of a current in the planar excitation coil 4 generates a temporary magnetic field direction parallel to the substrate 3 and parallel to the longitudinal axis (A) of the membrane 20 to control, in the direction of the current in the coil , the tilting of the membrane 20 from one of its positions to the other of its positions.
  • planar excitation coils for separately controlling a plurality of microswitches distributed on a matrix as represented in FIG. figure 3 greatly increases the surface of the substrate hosting the microswitches.
  • the planar coil 4 associated with a microswitch 2 is thus replaced by two superposed rectilinear conductive lines electrically insulated from one another and forming an intersection therebetween ( figure 4 ).
  • the two conductive lines are for example electric tracks Ci, Lj formed in the substrate 3 and for example orthogonal to each other.
  • the membrane 20 of the microswitch is positioned on the substrate 3 at the intersection of the two tracks Ci, Lj.
  • the longitudinal axis (A) of the membrane 20 is oriented along the bisector of the angle formed between the two tracks Ci, Lj.
  • the longitudinal axis (A) of the membrane 20 is therefore oriented at 45 ° with respect to each of the two tracks Ci, Lj ( figure 5 ).
  • the axis of rotation (R) of the microswitch 2 is located in a parallel plane greater than the planes of the electrical tracks.
  • a control current I 1 , I 2 for example of identical amplitude is injected into each of the two tracks Ci, Lj.
  • the direction of passage of the control current I 1 , I 2 in the tracks fixes the direction of rotation of the diaphragm 20.
  • the control current I 1 , I 2 injected into each track Ci, Lj generates respectively a magnetic field B 1 and B 2 running perpendicularly around the track ( figure 4 ).
  • the superposition of the two magnetic fields B 1 , B 2 generates a resulting magnetic field Br oriented at 45 ° with respect to the tracks as represented in FIG. figure 5 .
  • This resulting magnetic field Br induces a magnetic component BP 3 in the membrane 20 of sufficient intensity to control the tilting of the membrane 20 towards its other position ( figure 7 ).
  • the principle of actuation of a magnetic microswitch is detailed below:
  • the substrate 3 supporting the membrane 20 is placed under the effect of the permanent magnetic field B 0 already defined above.
  • the first magnetic field B 0 initially generates a magnetic component BP 2 in the membrane 20 along its longitudinal axis (A).
  • the magnetic torque resulting from the first magnetic field B 0 and the BP component 2 generated in the membrane 20 holds the membrane 20 in one of its positions, for example the closed position on the figure 6 .
  • the passage of a control current I 1 , I 2 in a defined direction in each of the two electrical tracks Ci, Lj crossing under the membrane 20, makes it possible to generate the resulting magnetic field Br defined above whose direction is parallel to the substrate 3 and oriented at 45 ° with respect to the two tracks Ci, Lj, its direction depending on the direction of the current I 1 , I 2 delivered in each of the tracks Ci, Lj.
  • the resulting magnetic field Br generates the magnetic component BP 3 in the magnetic layer of the membrane 20. If the control current I 1 , I 2 is delivered in each track Ci, Lj in a suitable direction, this new magnetic component BP 3 s is opposed to the component BP 2 generated in the magnetic layer of the membrane 20 by the first magnetic field B 0 .
  • the BP component 3 is of greater intensity than that generated by the first magnetic field B 0 , the magnetic torque resulting from the first magnetic field B 0 and this BP 3 component is reversed and causes the membrane 20 to tilt. closing position to its open position ( figure 7 ).
  • the resulting magnetic field Br is generated only transiently to tilt the membrane 20 from one position to another.
  • the membrane 20 is then held in its open position under the effect of the only first magnetic field B 0 creating a new magnetic component BP 4 in the membrane 20 and a new magnetic torque imposing on the membrane 20 to remain in its position. opening position ( figure 6 ).
  • the passage of an electric current I 1 , I 2 in two conductive lines Ci, Lj thus controls, by inversion of the magnetic torque applying to the membrane 20, the change of position of the membrane 20 of the microphone magnetic switch located at the intersection of the two conductive lines Ci, Lj.
  • this control and actuation principle can be used to individually address each magnetic microswitch within the matrix.
  • the permanent magnetic field B 0 is for example common to all microswitches 2 of the matrix.
  • a network of electrically insulated electrical tracks is constructed between them under the matrix of microswitches 2.
  • the network consists of a first series of rectilinear and parallel electrical tracks (C1, C2, C3, C4, C5, C6) formed in a first plane and oriented in a first direction and a second series of parallel electrical tracks (L1, L2, L3, L4, L5, L6) formed in a second plane parallel to the first plane and oriented in a direction orthogonal to the first direction.
  • the first series of electrical tracks (C1-C6) is for example organized in columns and the second series of electric tracks (L1-L6) is organized in lines ( figure 9 ).
  • Magnetic microswitches 2 as defined above and represented in FIG. figure 1 or 10 are positioned near each intersection of two electrical tracks from the first series and the second series.
  • the membranes 20 of each microswitch 2 are all oriented at 45 ° as defined above.
  • the axis of rotation (R) of each microswitch 2 is located in a parallel plane greater than the two planes containing the electrical tracks C1-C6, L1-L6 of the network.
  • a control current of equal amplitude for example, is injected into the two tracks which intersect under the membrane 20 to be tilted.
  • the membrane will switch in one or the other of its positions according to the principle described above.
  • the use of such a network therefore makes it easy to address each microswitch 2 identified for example by coordinates within the network. These coordinates are the references of the electrical tracks intersecting under the membrane of the microswitch 2 controlled.
  • the amplitude of the resulting field Br makes it possible to switch the membrane of the addressed microswitch.
  • the magnetic fields B1, B2 generated around the tracks by the injection of the control current I1, I2 are insufficient to control the tilting of the membranes of the other microswitches located on the network.
  • An electronic control device (not shown) will for example be associated with the matrix for controlling the injection of a control current into the appropriate electrical tracks of the network according to the microswitch or 2 to be addressed.

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  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Micromachines (AREA)
  • Push-Button Switches (AREA)

Claims (9)

  1. Vorrichtung zum elektrischen Umschalten, die mehrere magnetische Mikrounterbrecher (2) umfasst, die auf einem Substrat (3) matrixförmig organisiert sind und jeweils ein zwischen zwei Positionen gesteuertes bewegliches Element (20), das auf einer Oberfläche des Substrats montiert ist, aufweisen, wobei die Vorrichtung ein Netz aus miteinander gekreuzten Leitern (C1-C6, L1-L6) aufweist, wobei die magnetischen Mikrounterbrecher (2) in der Nähe der Schnittpunkte, die von den Leitern (C1-C6, L1-L6) gebildet werden, positioniert sind, wobei die Vorrichtung dadurch gekennzeichnet ist, dass:
    - das bewegliche Element in jeder seiner zwei Positionen unter der ausschließlichen Wirkung eines ständigen Magnetfeldes (B0), das gemeinsam für alle Mikrounterbrecher (2) erzeugt wird, stabil gehalten werden kann,
    - der Durchgang eines elektrischen Steuerstroms (I1, I2) in einer bestimmten Richtung in zwei Leitern (Ci, Lj) die Änderung der Position des beweglichen Elements (20) des magnetischen Mikrounterbrechers, der sich am Schnittpunkt dieser zwei Leiter (Ci, Lj) befindet, steuert.
  2. Vorrichtung nach Anspruch 1, dadurch gekennzeichnet, dass die Leiter elektrische Bahnen sind, die in dem Substrat (3) hergestellt sind.
  3. Vorrichtung nach Anspruch 2, dadurch gekennzeichnet, dass das Netz aus einer ersten Reihe geradliniger und paralleler elektrischer Bahnen (C1-C6), die in einer ersten Ebene gebildet und längs einer ersten Richtung orientiert sind, und aus einer zweiten Reihe paralleler elektrischer Bahnen (L1, L6), die in einer zweiten Ebene parallel zu der ersten Ebene gebildet sind und längs einer zweiten Richtung orientiert sind, gebildet ist.
  4. Vorrichtung nach Anspruch 3, dadurch gekennzeichnet, dass die zweite Richtung zu der ersten Richtung senkrecht ist.
  5. Vorrichtung nach einem der Ansprüche 1 bis 4, dadurch gekennzeichnet, dass das bewegliche Element jedes Mikrounterbrechers (2) aus einer ferromagnetischen Membran (20) gebildet ist, die eine Längsachse (A) aufweist, längs derer das Magnetfeld (B0) eine magnetische Komponente (BP2, BP4) induziert.
  6. Vorrichtung nach Anspruch 5, dadurch gekennzeichnet, dass die Längsachse (A) der Membran (20) jedes Mirkounterbrechers (2) längs der Winkelhalbierenden des Winkels, der zwischen den zwei Leitern (Ci, Lj) gebildet wird, die sich unter der Membran (20) kreuzen, orientiert ist.
  7. Vorrichtung nach Anspruch 5 oder 6, dadurch gekennzeichnet, dass die Membran (20) jedes Mikrounterbrechers (2) eine zu der Längsachse (A) senkrechte Drehachse (R) aufweist, längs derer sie durch Umkehrung des magnetischen Moments zwischen ihren zwei Positionen schwenken kann.
  8. Vorrichtung nach einem der Ansprüche 5 bis 7, dadurch gekennzeichnet, dass die ferromagnetische Membran (20) zwei Torsionsarme (22a, 22b) aufweist, die an dem Substrat (3) verankert und in der Membran (20) festgehalten sind.
  9. Vorrichtung nach einem der Ansprüche 1 bis 8, dadurch gekennzeichnet, dass sie eine elektronische Steuervorrichtung umfasst, die der Matrix zugeordnet ist, um die Einleitung eines Stroms in die geeigneten Leiter des Netzes als Funktion des zu adressierenden Mikrounterbrechers (2) zu steuern.
EP07115791A 2006-09-15 2007-09-06 Schalteinrichtung mit in matrixform angeordneten magnetischen Mikroschalter Not-in-force EP1901325B1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US84466706P 2006-09-15 2006-09-15
FR0654230A FR2907258A1 (fr) 2006-10-12 2006-10-12 Dispositif de commutation incluant des micro-interrupteurs magnetiques organises en matrice

Publications (2)

Publication Number Publication Date
EP1901325A1 EP1901325A1 (de) 2008-03-19
EP1901325B1 true EP1901325B1 (de) 2011-10-19

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EP07115791A Not-in-force EP1901325B1 (de) 2006-09-15 2007-09-06 Schalteinrichtung mit in matrixform angeordneten magnetischen Mikroschalter

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US (1) US7750768B2 (de)
EP (1) EP1901325B1 (de)
AT (1) ATE529876T1 (de)
FR (1) FR2907258A1 (de)

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3365701A (en) * 1965-01-27 1968-01-23 Navigation Computer Corp Reed relay matrix having printed circuit relay control
US3845430A (en) * 1973-08-23 1974-10-29 Gte Automatic Electric Lab Inc Pulse latched matrix switches
US6496612B1 (en) * 1999-09-23 2002-12-17 Arizona State University Electronically latching micro-magnetic switches and method of operating same
WO2002058092A1 (en) * 2001-01-18 2002-07-25 Arizona State University Micro-magnetic latching switch with relaxed permanent magnet alignment requirements
AU784864B2 (en) * 2001-03-15 2006-07-13 Micro Relay Holdings Pty Ltd Telecommunication relay array for DSL network configuration
US6639493B2 (en) * 2001-03-30 2003-10-28 Arizona State University Micro machined RF switches and methods of operating the same
US20020196110A1 (en) * 2001-05-29 2002-12-26 Microlab, Inc. Reconfigurable power transistor using latching micromagnetic switches
US6750745B1 (en) * 2001-08-29 2004-06-15 Magfusion Inc. Micro magnetic switching apparatus and method
US20030169135A1 (en) * 2001-12-21 2003-09-11 Jun Shen Latching micro-magnetic switch array
EP1331656A1 (de) * 2002-01-23 2003-07-30 Alcatel Verfahren zur Herstellung eines ADSL Relaismatrix
US20030222740A1 (en) * 2002-03-18 2003-12-04 Microlab, Inc. Latching micro-magnetic switch with improved thermal reliability
US7142743B2 (en) * 2002-05-30 2006-11-28 Corning Incorporated Latching mechanism for magnetically actuated micro-electro-mechanical devices
KR100631204B1 (ko) * 2005-07-25 2006-10-04 삼성전자주식회사 Ｍｅｍｓ 스위치 및 그 제조방법

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Publication number Publication date
ATE529876T1 (de) 2011-11-15
FR2907258A1 (fr) 2008-04-18
EP1901325A1 (de) 2008-03-19
US7750768B2 (en) 2010-07-06
US20080068115A1 (en) 2008-03-20

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