EP1818958A1 - Mikrosystem mit Anschlagvorrichtung - Google Patents

Mikrosystem mit Anschlagvorrichtung Download PDF

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Publication number
EP1818958A1
EP1818958A1 EP20070101218 EP07101218A EP1818958A1 EP 1818958 A1 EP1818958 A1 EP 1818958A1 EP 20070101218 EP20070101218 EP 20070101218 EP 07101218 A EP07101218 A EP 07101218A EP 1818958 A1 EP1818958 A1 EP 1818958A1
Authority
EP
European Patent Office
Prior art keywords
membrane
movable element
stop device
microsystem according
microsystem
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP20070101218
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English (en)
French (fr)
Inventor
Laurent Chiesi
Benoît Grappe
Mathias Lamien
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Schneider Electric Industries SAS
Original Assignee
Schneider Electric Industries SAS
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Schneider Electric Industries SAS filed Critical Schneider Electric Industries SAS
Publication of EP1818958A1 publication Critical patent/EP1818958A1/de
Withdrawn legal-status Critical Current

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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H1/00—Contacts
    • H01H1/0036—Switches making use of microelectromechanical systems [MEMS]
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H9/00—Details of switching devices, not covered by groups H01H1/00 - H01H7/00
    • H01H9/0066—Auxiliary contact devices
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H36/00—Switches actuated by change of magnetic field or of electric field, e.g. by change of relative position of magnet and switch, by shielding
    • H01H2036/0093—Micromechanical switches actuated by a change of the magnetic field

Definitions

  • the present invention relates to a microsystem comprising a movable element between at least two positions.
  • This type of microsystem is for example a MEMS acting as a microswitch or a microswitch current used for example in a micro-contactor, a micro-relay or a micro-reed.
  • a magnetic microswitch comprising a pivoting movable element movable between a stable closing position of an electrical circuit and an unstable opening position defined by a stopper.
  • the movable element is placed under the influence of a permanent magnetic field maintaining it in each of its positions and is controlled to switch between its two positions by passing an electric current in an electrical conductor. In the absence of current flowing through the conductor, the movable element is in the stable position of closure. When a current is injected into the conductor, the movable element tilts in its unstable position of opening of the electrical circuit. This unstable position is delimited by the stopper which prevents the movable element from taking a second stable position. If the current flowing through the conductor is cut off, the movable element, under the sole influence of the permanent magnetic field automatically returns to its stable position of closure of the electric circuit.
  • the stopper is used to make the microswitch monostable.
  • MEMS switch device comprising a substrate and a movable member.
  • the movable element is actuated between two positions to come into contact with an electrical contact in each of its positions.
  • a MEMS-type microsystem acting as a microswitch or current microswitch in which a movable element pivots between two stable positions the mobile element is made to perform a large number of maneuvers during its lifetime. biasing his arms in flexion or torsion to pivot. These connecting arms are therefore particularly stressed, affecting over time the deformation of the movable element and therefore in particular the electrical insulation distance between the open position and the closed position.
  • the upper substrate ensures the stopping of the movable element in a high position but it is not used to prevent early wear of the movable element.
  • the object of the invention is to propose a microsystem in which the mobile element is less stressed over time during its operation, resulting in an increase in its life and in which the deformation of the movable element is controlled from to be able to follow the evolution of its deformation over time.
  • a microsystem comprising a substrate and a mobile element mounted on the substrate, said mobile element being provided with at least one electrical contact and being controlled between at least two positions, a closed position of an electrical circuit and an open position of the electric circuit, said open position being delimited by a device for stopping the travel of the movable element, characterized in that the stop device is connected to an electrical detection circuit and comprises detection means adapted to detect whether the movable element is in the open position and in that the stop device is implanted in the substrate.
  • the stopping device comprises at least one electrode of the electrical detection circuit and in that the movable element comprises at least one electrically conductive part resting against the electrode to close the electrical circuit. detection when in the open position.
  • the stop device comprises a single electrode connected to a first power supply terminal of the detection electric circuit and the conductive part of the mobile element is connected to a second terminal of power supply of the detection electric circuit.
  • the electrode traverses for example the movable element and has for example an end secured to the substrate and a mushroom-shaped head against which the movable element abuts in the open position.
  • the stop device comprises two electrodes each connected to a supply terminal of the electrical detection circuit, said electrodes being spaced apart and able to be connected. electrically through the conductive portion of the movable member when in the open position.
  • the stop device comprises two electrodes connected in parallel to a first power supply terminal of an electrical detection circuit, and the conductive part of the mobile element is connected to a second power supply terminal of the detection electric circuit, said electrodes being spaced apart and able to be both electrically connected to the conductive part of the movable element when it is in the open position.
  • the electrodes are positioned symmetrically on either side of the movable element. Each electrode then has an end secured to the substrate and a free end shaped hook. According to another configuration of these two embodiments, the electrodes can pass through the movable element. In this case, each electrode has for example an integral end of the substrate and a mushroom shaped head having the function of stopping the movable member in the open position. This second configuration makes it possible to save space.
  • the detection means are associated with current or voltage detectors.
  • the detection means are associated with means for measuring the capacitance between at least one electrode and the conductive part of the mobile element.
  • the microsystem comprises additional stopping devices of the movable element in the open position, distributed along the movable element.
  • the movable element is a ferromagnetic membrane anchored to the substrate and controlled by magnetic effect between its two positions.
  • the membrane is for example rotatable about an axis defining a front portion carrying the electrical contact and a rear portion.
  • the microsystem according to the invention may comprise a second stop device acting on the rear part of the membrane to delimit the closed position of the membrane.
  • the microsystem may be manufactured using a MEMS (Micro-ElectroMechanical System) type of technology.
  • MEMS Micro-ElectroMechanical System
  • a microprocessor 2, 2 'of microswitch or microswitch type is provided with at least one mobile element, for example consisting of a membrane 20, 20' made of ferromagnetic material mounted on a surface planar 30 of a substrate 3 made of materials such as silicon, glass, ceramics or in the form of printed circuits.
  • microsystem 2, 2 ' is described with a single membrane 20, 20' but the description must be understood as if the microsystem 2, 2 'can comprise on the same support 3 a plurality of mobile membranes that can be actuated simultaneously by a single actuating means such as a permanent magnet.
  • the membrane 20, 20 ' carries at one of its ends an electrical contact 21, 21' and the substrate 3 carries on its surface 30 at least two spaced identical identical conductive tracks 31, 32, intended to be electrically connected by the contact. mobile 21, 21 'of the membrane 20, 20' to obtain the closure of a main electrical circuit (not schematized).
  • the membrane 20 has a longitudinal axis (A) and is connected at one of its ends to an anchor stud 23 secured to the substrate 3 by the intermediate two arms 22a, 22b of connection.
  • the membrane 20 is pivotable relative to the substrate 3 along an axis (P) parallel to the axis described by the contact points of the membrane 20 with the conductive tracks 31 , 32 and perpendicular to its longitudinal axis (A).
  • the link arms 22a, 22b form an elastic connection between the membrane 20 and the anchor stud 23. The pivoting of the membrane 20 is thus obtained by flexing the connecting arms 22a, 22b.
  • the membrane 20 ' also having a longitudinal axis (A'), is secured to the substrate 3 by means of two linking arms 22a ', 22b' said membrane 20 'with two anchoring studs 23a', 23b 'arranged symmetrically on both sides else of the longitudinal axis (A ') of the membrane 20'.
  • the movable contact 21 ' is for example formed on the membrane 20' near the end of the membrane 20 'and faces the surface 30 of the substrate 3.
  • the membrane 20 ' is pivotable relative to the substrate 3 along an axis (P') parallel to the axis described by the points of contact of the membrane 20 'with the electrodes 31, 32 and perpendicular to its longitudinal axis ( AT').
  • the connecting arms 22a ', 22b' form an elastic connection between the membrane 20 and their respective anchor stud 23a ', 23b' and the pivoting of the membrane 20 'is thus obtained by twisting the arms 22a', 22b 'of link.
  • the pivot axis (P ') of the diaphragm 20' is offset with respect to the parallel central axis, which makes it possible to define on the diaphragm 20 ', on either side of its axis (P ') of pivoting, two distinct parts, a front part carrying the electrical contact 21' and a rear part.
  • the microsystem 2, 2 'of the invention can be realized by a planar duplication technology of MEMS (for "Micro Electro-Mechanical System") or LEMS (for "Laminated Electro-Mechanical System", see patent application US 2005/057329 ).
  • MEMS Micro Electro-Mechanical System
  • LEMS Long-Mechanical System
  • the membrane 20, 20 'and the connecting arms 22a, 22b, 22a', 22b ' are for example derived from the same layer of ferromagnetic material.
  • the connecting arms 22a, 22b, 22a ', 22b' and a lower layer of the membrane 20, 20 ' may be derived from a metal layer.
  • a layer of a ferromagnetic material is deposited on this metal layer to generate the upper portion of the membrane 20, 20 '.
  • Such a configuration can make it possible to optimize the mechanical properties of the connecting arms 22a, 22b, 22a ', 22b' by using, for the pivoting of the membrane 20, 20 ', a material that is mechanically more suitable than the ferromagnetic material.
  • the metal layer can act as a contact for closing the main electrical circuit.
  • the ferromagnetic material is for example of the soft magnetic type and can be for example an alloy of iron and nickel ("permalloy" Ni 80 Fe 20 ).
  • the ferromagnetic membrane 20, 20 ' is controlled by magnetic effect between two distinct end positions.
  • a first extreme position (FIG. 2A or 8A)
  • the end of the membrane 20, 20 'carrying the contact 21, 21' is raised and does not bear against the conductive tracks 31, 32 of the substrate 3.
  • the main electrical circuit associated with the tracks 31, 32 is thus open.
  • the end of the membrane 20, 20 'carrying the contact 21, 21' bears against the conductive tracks 31, 32.
  • the main electrical circuit is closed.
  • the membrane 20, 20 ' is kept parallel to the surface 30 of the substrate 3 (FIGS. 1 and 7).
  • the permanent magnet 10 creates a magnetic field having L field lines whose orientation generates a magnetic component BP 0 , BP 1 in the ferromagnetic layer of the membrane 20, 20 'of the microsystem along its longitudinal axis (A), ( AT').
  • the opening position of the membrane 20, 20 ' is delimited by a main stop device intended to limit the deformation of the membrane 20, 20' in its open position and therefore to increase the duration of life of the microsystem 2, 2 '.
  • this main stop device comprises detection means for determining whether the membrane 20, 20 'is in abutment against the stop device and therefore in the open position.
  • the main arresting device thus comprises one or more detection electrodes 4a, 4b, 5a, 5b, 5 interacting with the membrane 20, 20 'in the open position to pass an electric current in an electrical detection circuit D separate from the main electrical circuit.
  • the electrical detection circuit D makes it possible to determine whether the membrane 20, 20 'is in its open position. It comprises at least one power source S in current, means M for measuring current or voltage and means T for processing the current or currents measured or the voltage or voltages measured.
  • the processing means T are for example associated with a signaling member (not shown) responsible for alerting a fault in the microsystem 2, 2 '. According to the invention, when the diaphragm 20, 20 'is in the open position, it closes the detection electric circuit D. The detection of a current or a voltage in the electrical detection circuit D makes it possible to deduce that it is then well in its opening position.
  • the membrane 20, 20 ' has a layer of ferromagnetic material which is electrically conductive and which thus allows the closing of the electrical detection circuit D.
  • the membrane 20, 20' can carry on its upper layer one or two metal parts 24 conducting electricity.
  • the membrane 20, 20 ' is shown with such a conductive portion 24, but it must be understood that, given the electrical conductivity of its ferromagnetic layer, it can be freed from it.
  • the electrode or the electrodes 4a, 4b, 5a, 5b, 5 of the main stop device are for example implanted directly in the substrate 3 during the manufacture of the microsystem 2, 2 '.
  • the stop device comprises at least two identical metal electrodes 4a, 4b disposed on either side of the membrane 20 symmetrically with respect to its longitudinal axis (A) and integral with the substrate 3.
  • the electrodes 4a, 4b each have an inverted L shape comprising a rod 40 anchored in the substrate 3 and a free end shaped for example in a hook 41 ( Figure 10).
  • Other forms of the electrode 4 can also be envisaged.
  • the electrodes 4a, 4b have a height adapted so that the conductive portion of the membrane 20 comes into contact with the hooks 41 in an open position which must be sufficiently spaced from the position of closing to respect a minimum electrical isolation distance between the movable contact 21 and the conductive tracks 31, 32, but not too far apart to avoid forcing too much on the connecting arms 22a, 22b.
  • the two electrodes 4a, 4b are each connected to a terminal of the supply source S in current to form the electric detection circuit D.
  • the conductive portion 24 of the membrane 20 electrically connects the two electrodes 4a, 4b to close the electric detection circuit D.
  • the measuring means M associated with the processing means T the detection of a current in the electrical detection circuit D or a voltage across the electrodes 4a, 4b makes it possible to determine whether the membrane 20 is in abutment against the hooks 41 of the electrodes 4a, 4b and therefore in the open position.
  • the conductive portion 24 of the membrane 20 is connected to a terminal of the power supply S while the two electrodes 4a, 4b are connected by two branches in parallel to the other terminal of the supply source S of the detection electric circuit D.
  • the means M for measuring current or voltage associated with the processing means T make it possible to determine whether the membrane 20 is in the open position.
  • the detection of a current or a voltage on only one of the branches makes it possible to deduce that the membrane 20 bears against only one of the electrodes 4a, 4b of the stop device.
  • the membrane 20 has undergone abnormal deformation caused by its wear or by a variation of the magnetic field.
  • the variation of the magnetic field may result, for example, from irregularities in positioning the permanent magnet 10 with respect to the membrane 20.
  • the measuring means M current and / or voltage may be replaced or supplemented by capacitive type measuring means C to measure the variation of the capacitance between each of the electrodes 4a, 4b and the conductive portion 24 of the membrane 20 (FIG. 5A).
  • the hooks of the electrodes 4a, 4b then have a large determined surface, located opposite the conductive portion 24 of the membrane 20.
  • the two electrodes 4a, 4b are for example at a common potential while the part conductive 24 of the membrane 20 is at a potential different from this common potential.
  • the determination of the capacitance between the conductive portion 24 of the membrane 20 and each of the electrodes 4a, 4b separately makes it possible to deduce the distance between the membrane 20 and each of the electrodes 4a, 4b and thus to determine the position of the membrane 20 relative to at each of the electrodes 4a, 4b. If the measured capacitances are zero, this means that the membrane 20 bears against the two electrodes 4a, 4b.
  • two electrodes 5a, 5b are not arranged on either side of the membrane 20 but pass through the membrane 20 symmetrically with respect to its longitudinal axis (A ) which allows in particular to gain space.
  • the electrodes 5a, 5b are integral with the substrate 3 have a rod 50 and end for example with a head 51 in the form of mushroom ( Figure 11).
  • the membrane 20 When the membrane 20 is in the open position, it is supported by its conductive portion 24 against the metal heads 51 of the electrodes to electrically connect the two electrodes and close the electrical detection circuit.
  • the two configurations described above for the first embodiment are perfectly applicable with electrodes 5a, 5b of this variant.
  • the stop device comprises a single electrode 5.
  • This electrode 5 has, for example, a mushroom shape as described above with reference to FIG. and passes through the membrane 20 substantially along its longitudinal axis (A).
  • the height of the electrode 5 is determined to stop the membrane 20 in an open position of the electrical circuit sufficiently spaced from the closed position to respect a sufficient electrical insulation distance but not too far apart to avoid forcing too much on the connecting arm 22a, 22b.
  • a terminal of the power source S of the detection electric circuit D is connected to the conductive portion 24 of the membrane 20, while the other terminal of the power source S is connected to the electrode 5.
  • the membrane 20 is in the open position, the membrane 20 is in abutment against the head 51 of the electrode 5 which causes the closing of the detection circuit D.
  • the detection of a current in the circuit electrical detection D or a voltage by the measuring means M can be deduced that the membrane 20 is in the open position bearing against the stop device. If no current or voltage is detected, it means that the membrane 20 is worn or that the magnetic field imposing on the membrane 20 to assume its open position has varied.
  • a variant of this second embodiment represented in FIG. 5B consists in using a capacitive detector C making it possible to determine the variation of the capacitance between the conductive portion 24 of the membrane and the electrode 5.
  • the determination of the ability between the conductive portion 24 of the membrane and the electrode 5 allows to know the position of the membrane 20 relative to the main stop device. If the capacity is zero, this means that the membrane 20 is in the open position bearing against the stop device.
  • the capacitive detector can replace the measuring means M current or voltage or simply complete them.
  • the processing means T associated with the measuring means M, make it possible, for example, to determine the electrical resistance of contact between the electrode or electrodes 4a, 4b, 5a, 5b, 5 and the conductive part 24 of the membrane 20 in the position of opening according to the current measured in the detection electric circuit D and / or the measured voltage or voltages. Determination of resistance electrical connection between the conductive portion 24 of the membrane 20 and the electrode or electrodes 4a, 4b, 5a, 5b, 5 allows to deduce the contact force of the membrane 20 against the electrodes. If the determined electrical resistance is low, the contact force is important. On the other hand, if the electrical resistance is strong, the contact force between the membrane 20 and the electrode or electrodes is low. From the variation of the electrical resistance of contact over time, it is therefore possible to deduce the deformation and the wear of the membrane 20 over time, or the variation of the magnetic field imposing on the membrane 20 to take the open position .
  • the stop device can be implanted near the axis of rotation (P) of the membrane 20 to limit in particular its size in height.
  • the stop device composed of one or more electrodes 4a, 4b, 5a, 5b, 5 may be completed by additional stop devices 8 distributed along the membrane (FIG. 9).
  • additional stop devices 8 do not include detection means and are therefore not intended to determine the position of the membrane 20. They are used to help the main stop device to mechanically stop the membrane 20 thus avoiding to solicit him too much.
  • These additional stop devices 8 are preferably non-metallic so as not to disturb the operation of the main stop device. They may have a shape according to one of the embodiments described above, that is to say in hook (Figure 10) distributed on either side of the membrane 20 or mushroom-shaped ( Figure 11). ) through the membrane 20.
  • the height of the additional stop devices 8 is designed to define the opening position of the membrane 20 at different points, different from the breakpoint or points the main stop device.
  • the main stop device comprising the detection means is for example positioned to stop the membrane 20 near the axis of rotation (P) of the membrane 20 while an additional stop device 8b is positioned to stop the membrane 20 near the end of the membrane 20 carrying the contact 21 and another 8a in an intermediate position between these two devices.
  • the stop devices are shaped hook but the other forms or configurations can be fully envisaged.
  • the rear part of the membrane 20' can also carry a movable contact intended to electrically connect two fixed contacts arranged in vis-à-vis the substrate 3 when the membrane 20 'is in the open position.
  • These two fixed contacts are associated with a second electric detection circuit making it possible to deduce, according to the intensity of the measured current, the amplitude of deformation of the membrane 20 'in the open position. This information can be coupled with the other information collected at the main stop device to understand the deformation of the membrane 20 'in the open position.
  • a stop device 9 integral with the substrate 3 can be mounted to delimit the closed position of the membrane 20' and thus avoid the bouncing of the movable contact 20 against the fixed conductive tracks 31, 32 at closing.
  • This stop device 9 is not necessarily provided with detection means. It may consist for example of one or two symmetrical hooks or have the form of a hoop ( Figure 7) framing the rear portion of the membrane 20 '.
  • the height of this stop device 9 is determined to allow both a closing of the main electrical circuit with a sufficient contact pressure and to prevent rebounds of the membrane 20 'at the closing of the main electrical circuit.

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  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
EP20070101218 2006-02-13 2007-01-26 Mikrosystem mit Anschlagvorrichtung Withdrawn EP1818958A1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR0650502A FR2897349B1 (fr) 2006-02-13 2006-02-13 Microsysteme incluant un dispositif d'arret

Publications (1)

Publication Number Publication Date
EP1818958A1 true EP1818958A1 (de) 2007-08-15

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EP20070101218 Withdrawn EP1818958A1 (de) 2006-02-13 2007-01-26 Mikrosystem mit Anschlagvorrichtung

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EP (1) EP1818958A1 (de)
FR (1) FR2897349B1 (de)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2682971A1 (de) * 2012-07-03 2014-01-08 ABB Technology Ltd Vorrichtung zum Anzeigen des Status einer Schaltvorrichtung

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0874379A1 (de) * 1997-04-23 1998-10-28 Asulab S.A. Magnetischer Mikroschalter und Herstellungsverfahren
DE10004393C1 (de) * 2000-02-02 2002-02-14 Infineon Technologies Ag Mikrorelais
US20020021860A1 (en) * 1999-09-23 2002-02-21 Meichun Ruan Optical MEMS switching array with embedded beam-confining channels and method of operating same
US20020153583A1 (en) * 2000-11-09 2002-10-24 Frazier Gary A. Nanomechanical switches and circuits
US20030179058A1 (en) * 2002-01-18 2003-09-25 Microlab, Inc. System and method for routing input signals using single pole single throw and single pole double throw latching micro-magnetic switches
US20030223174A1 (en) * 2002-05-29 2003-12-04 Prophet Eric M. Spring loaded bi-stable MEMS switch
US20040040828A1 (en) * 2002-08-28 2004-03-04 Ivanciw Dan A. Micro-electromechanical switch performance enhancement

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0874379A1 (de) * 1997-04-23 1998-10-28 Asulab S.A. Magnetischer Mikroschalter und Herstellungsverfahren
US20020021860A1 (en) * 1999-09-23 2002-02-21 Meichun Ruan Optical MEMS switching array with embedded beam-confining channels and method of operating same
DE10004393C1 (de) * 2000-02-02 2002-02-14 Infineon Technologies Ag Mikrorelais
US20020153583A1 (en) * 2000-11-09 2002-10-24 Frazier Gary A. Nanomechanical switches and circuits
US20030179058A1 (en) * 2002-01-18 2003-09-25 Microlab, Inc. System and method for routing input signals using single pole single throw and single pole double throw latching micro-magnetic switches
US20030223174A1 (en) * 2002-05-29 2003-12-04 Prophet Eric M. Spring loaded bi-stable MEMS switch
US20040040828A1 (en) * 2002-08-28 2004-03-04 Ivanciw Dan A. Micro-electromechanical switch performance enhancement

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2682971A1 (de) * 2012-07-03 2014-01-08 ABB Technology Ltd Vorrichtung zum Anzeigen des Status einer Schaltvorrichtung
WO2014005746A1 (en) * 2012-07-03 2014-01-09 Abb Technology Ltd A device for indicating the state of a switching apparatus
AU2013286233B2 (en) * 2012-07-03 2015-05-28 Hitachi Energy Ltd A device for indicating the state of a switching apparatus
US9218923B2 (en) 2012-07-03 2015-12-22 Abb Technology Ltd Device for indicating the state of a switching apparatus
RU2598897C2 (ru) * 2012-07-03 2016-10-10 Абб Текнолоджи Лтд Устройство для индикации состояния переключающего устройства

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FR2897349B1 (fr) 2008-06-13
FR2897349A1 (fr) 2007-08-17

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