EP0780858B1 - Miniaturvorrichtung zur Durchführung einer vorbestimmten Funktion, insbesondere Mikro-Relais - Google Patents

Miniaturvorrichtung zur Durchführung einer vorbestimmten Funktion, insbesondere Mikro-Relais Download PDF

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Publication number
EP0780858B1
EP0780858B1 EP96402827A EP96402827A EP0780858B1 EP 0780858 B1 EP0780858 B1 EP 0780858B1 EP 96402827 A EP96402827 A EP 96402827A EP 96402827 A EP96402827 A EP 96402827A EP 0780858 B1 EP0780858 B1 EP 0780858B1
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EP
European Patent Office
Prior art keywords
lever
substrate
magnetic circuit
armature
magnetic
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Expired - Lifetime
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EP96402827A
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English (en)
French (fr)
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EP0780858A1 (de
Inventor
Raymond Vuilleumier
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Centre Suisse dElectronique et Microtechnique SA CSEM
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Centre Suisse dElectronique et Microtechnique SA CSEM
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H50/00—Details of electromagnetic relays
    • H01H50/005—Details of electromagnetic relays using micromechanics
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H1/00—Contacts
    • H01H1/12—Contacts characterised by the manner in which co-operating contacts engage
    • H01H1/14—Contacts characterised by the manner in which co-operating contacts engage by abutting
    • H01H1/20—Bridging contacts
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H50/00—Details of electromagnetic relays
    • H01H50/005—Details of electromagnetic relays using micromechanics
    • H01H2050/007—Relays of the polarised type, e.g. the MEMS relay beam having a preferential magnetisation direction

Definitions

  • the present invention relates to devices miniaturized intended to ensure a predetermined function and obtained by techniques usually used for the manufacture of integrated circuits. Such devices can in particular be used in the field of microrelais.
  • relays for a long time miniaturized composed of separate spare parts such that the magnetic circuit, the excitation coil, the contacts, springs and possibly the permanent magnet. These parts are assembled using high-performance robots. which allows the manufacturer to supply a relay whose cost is very weak.
  • microrelays must meet a certain number of mechanical and electrical criteria in order to be used in practice, for example in telecommunications and in many other fields.
  • Table 1 sets out and situates some values that must be respected by relay manufacturers in order for their product to pass, for example, the standards imposed for automatic test equipment (ATE-SECURITY) and in telecommunications.
  • ATE-SECURITY automatic test equipment
  • the required value of the insulation requires a large distance between contacts and on the other hand, the contact force requires the creation in the air gap between armature and magnetic circuit of a very strong magnetic induction B 0 , as can be seen from Table 2 below: B 0 (T) 0.2 0.3 0.4 0.5 p 0 (g / mm 2 ) 1.6 3.6 6.4 9.9 Ni / d 0 (A-turns / ⁇ m) 0.16 0.24 0.32 0.40
  • p 0 is the force generated per unit area of the air gap.
  • the invention aims to provide a dispsoitif miniaturized manufactured by micro-machining which is compatible with both with the above requirements and with its association to a nearby integrated control circuit.
  • the subject of the invention is therefore a miniature device for the realization of a predetermined function, this device being obtained by micromachining on a substrate with using electroplating techniques, photolithography and / or the like, in particular for carrying out miniature microrelays, and comprising means forming magnetic circuit, at least one excitation coil and means for ensuring the execution of said function under the action of said magnetic circuit, all these elements being obtained on said substrate by integration operations analogous to those used for the manufacture of integrated circuits, said means for ensuring execution of said function being carried at least partially by an elastically deformable lever attached to a cantilever to said substrate, characterized in that said lever shape rocks and is attached roughly in the middle to the substrate via a deformable bond and that at each free end of said lever is provided a magnetic armature forming part of said means forming magnetic circuit, the latter defining a seat against which said reinforcement can be applied with a first magnetic force generated by said magnetic circuit and opposite to that generated by the elastic deformation of said lever, the coil, associated with each magnetic circuit being selectively excit
  • this device can meet severe conditions above, while being able to be manufactured by integrated circuit technology.
  • the device forms a microrelay comprising at least one fixed contact provided on said substrate and at least one movable contact carried by said lever forming rocker, this movable contact being intended to apply to said fixed contact when said armature is applied to its seat.
  • the lever can keep the mobile contact sufficiently far from the contact fixed when these contacts are opened to ensure the necessary insulation. Furthermore, the magnetic flux permanent applies the moving contact to the fixed contact in when these contacts are closed with pressure sufficient to ensure contact resistance corresponding to the usage requirements. Therefore, the coils do not have to remain permanently energized in any stable positions of the device.
  • the devices according to the invention which will be described are made by a technique called “above chip” ("above above the chip ”) by which it is therefore produced of a substrate 1 preferably made of silicon ( Figure 1 to 3).
  • the longitudinal dimension of the device can be chosen between 2 and 3 mm, approx.
  • the underside 3 of the substrate 1 has two cavities 4 and 5 which, if the substrate is made of silicon, can be machined by an anisotropic attack. These cavities are each intended to receive a permanent magnet, 6a and 6b respectively. These magnets 6a and 6b can be pads fixed in the respective cavities or also be obtained by depositing suitable substances. Each of them has a North Pole and a South Pole near the upper surface 2. In the case shown, these magnets extend along the longitudinal dimension of the device (i.e. in the plane of Figure 1). The bottom of each cavity is formed by a layer 7 of material of the substrate 1 remaining after the formation of the cavity.
  • the upper face 2 is covered with a multi-layer of insulator 8, for example made of silicon oxide.
  • This multi-layer 8 is made up of three layers (not drawn individually) which isolate a coil configuration so that each turn of this configuration is isolated of what surrounds it. In the center of these coils, openings 9 are formed in the substrate 1 from side 2 and they extend into the multi-layer insulation 8.
  • the configuration of coils includes two sets 10 and 11 of two flat coils 10a, 10b, 11a, 11b made by metallic deposits, aluminum by example, appropriately shaped and embedded in the layer insulation 8.
  • Figures 1 to 3 show their location by bold lines.
  • each coil has in plan a generally rectangular shape.
  • Sets 12 and 13 of pole pieces 12a, 12b and 13a, 13b consist of FeNi deposits of form rectangular which fill the openings 9 and which slightly exceed the multi-layer of insulation 8. Each pole piece is surrounded by its corresponding coil.
  • Flow closing pieces or fittings 20 and 21 are respectively provided at the free ends of this lever 19. They are preferably made of FeNi and have a dimension such that they can cover the game of matching pole pieces when applied on these.
  • Figure 3 shows a cross-sectional view of one of the ends of the lever 19 and makes appear in particular the construction of the means intended to execute the function for which the device according to the invention is designed.
  • these means include electrical contact devices as well that this is a microrelay.
  • Two double contacts 22 and 23 are thus provided respectively for each of the ends of lever 19, which electrically can make a reversing contactor of this microrelay.
  • the embodiment preferred microrelais provides two fixed double contacts 22 and 23, FIG. 3 showing the double contact 22, the contact 23 being exactly the same.
  • Lever 19 carries the movable contacts of the reverser thus formed.
  • each frame 20, 21 includes side extensions 24 and 25 elastically deformable that came from forming.
  • Pavers 26 in a metal that conducts electricity well, such as gold are provided at the end of each of these extensions, and intended to cooperate respectively with fixed contacts 27 deposited on either side of one of the pole pieces, 12a, 13b in this case, in order to minimize the contact resistance.
  • fixed contacts 27 deposited on either side of one of the pole pieces, 12a, 13b in this case, in order to minimize the contact resistance.
  • Figure 1 one of his contacts fixed 27 is visible behind the pole piece 13b.
  • the lateral extensions 24 and 25 can be made of a material other than that of the associated reinforcement.
  • elasticity of these extensions is essential so that contact pads 26 and contacts 27 can be applied to each other under mechanical stress and that possible wear can be compensated for.
  • the elastic deformation of these extensions stores the forces applied to the contacts in the form of energies mechanical potentials which generate dynamic forces opposite to those applied to the contacts when they are opening. These dynamic forces are used to defeat the adhesion forces of the contacts.
  • the coils 10a, 10b, 11a, 11b are preferably of the flat type and can include a few dozen turns each.
  • the magnetic properties of the magnets 6a and 6b are of decisive importance for the functioning of the microrelay according to the invention.
  • a first mode of operation which involves the use of magnets in a "very hard” material such as samarium-cobalt, platinum-cobalt, ferrite-strontium and other similar materials.
  • very hard materials is understood to mean those which are pre-magnetized during manufacture and have linear curves, with a slope close to ⁇ 0 (see the line B (H) in FIG. 4).
  • F 1 F o + F m
  • F m is the sum of the mechanical forces (forces exerted on the lever 19 by its attachments and by the elastic deformation), the reinforcement which was applied at the time considered on the pole pieces the will remain until an intervention on the corresponding coils is carried out.
  • the demagnetization field must however remain limited to a value such that the magnet will not be demagnetized (In other words P 1 'can move on the demagnetization line beyond the point P o without going too far).
  • Hard and semi-hard magnetic materials are in additionally advantageous due to the fact that they allow themselves better deposit by galvanic methods currently known. In furthermore, they do not have to be magnetized during manufacture. he it should be noted that among other materials, cobalt-tungsten, cobalt-iron and cobalt-nickel-phosphorus are well suited for this use.
  • materials with fields are preferred fairly weak coercives, for example of the order of 10 kA / m, or approximately 125 Oersteds. We can thus magnetize or demagnetize by choosing the appropriate direction of current in the relevant coils of the microrelay.
  • an induction value magnetization field can be 2 to 3 times the coercive fields.
  • FIG. 5 represents the magnetization / demagnetization curve used in this case.
  • the application force produced is then that defined in equation (4) above. Unlike in the case of FIG. 4, the force F 0 , on the right side of the device, is nonexistent, because the magnet 6b is only weakly magnetized. Consequently, like F1 >> Fm, after the magnetization on the left side, the armature 20 on the left remains applied to its pole pieces 12a and 12b.
  • the lever 19 has two very thick zones forming the reinforcements 20 and 21 and a thin blade 28 which connects these two frames.
  • the torsion arms 17 and 18 are attached to this blade 28 approximately in the middle.
  • the thickness of the reinforcements 20 and 21 is determined by the magnetic flux which must be able to cross them. As shown in Figure 1, this thickness is relatively important compared to that of the blade 28. This results that the frames 20 and 21 are relatively rigid.
  • FIGS 7 to 9 show another embodiment of a microrelay according to the invention which differs from that of Figures 1 to 3 by the arrangement of the contacts.
  • each crosspiece 24 and 25 has at its free end a support bridge 29 which is fixed thereto by means of a insulating layer 30.
  • the support bridge 29 is made of FeNi, for example and carries two contact blocks 31, 32 intended for cooperate with two contacts 33, resp. 34 in the insulation layer 8 of the substrate 1 of which they protrude a certain distance.
  • this embodiment ensures the closing resp. the opening of four electrical circuits to both of which will be isolated from the double lever 19 by the presence of insulating layers 30.
  • Figures 10 and 11 show another mode of realization of the microrelay according to the invention in which it a double lever 35 is provided, itself formed by two blades 36 and 37 extending parallel to each other.
  • These blades are carried by the two mesas 15 and 16, by through the torsion arms 17 and 18. They are in solidarity with each other by means of three blocks of connection 38, 39 and 40 provided respectively at the level of torsion arms 17 and 18 and at both ends of the blades parallel 36 and 37. These blocks are made for example in FeNi and they are isolated from the blades by means of respective insulation layers 41, 42 and 43.
  • each blade carry at each end a separate frame 44 resp. 45 cooperating with parts respective polar 12a, 12b, 13a and 13b.
  • each blade carries two crosspieces 46, 47 which are integral with their tower of support bridges 48 for paving stones 49, 50 cooperating with contacts 51, 52 fixed in the insulating layer 8. The circuits that these sets can establish or interrupt can thus be galvanically separated the each other.
  • Figures 12 and 13 show another mode of realization of the microrelay according to the invention.
  • a substrate 60 is covered with a layer of insulation 61 on one of its faces and has a cavity 62 opening on the other side.
  • This microrelay also has two mesas 63, 64 from which extend torsion arms 65 and 66 supporting a blade 67 in the form of a double fork, only one 67A of its forks being shown in the drawings.
  • a magnet 68 is placed in the cavity 62 and cooperates with two pole pieces 69 and 70 passing through openings 70 made in the substrate 60 and the insulating layer 61. Each of these pole pieces is surrounded by a coil 71 resp. 72 embedded in the insulating layer 61.
  • the free ends of the arms of the fork 67A carry a support bridge 73 fitted with contact blocks 74, 75 provided at its ends. These pavers cooperate with fixed contacts 76, 77.
  • the support bridge 73 is made in one piece with the blade in fork shape 67 and also with three legs connection 78 which extend from the support bridge 73 to the interior between the branches of the fork 67A.
  • these connecting lugs extend these branches so that we can consider that in the present embodiment, the blade 67 is folded over itself, while fulfilling exactly the same functions that the blades described in connection with the previous embodiments.
  • the main advantage of this folded configuration of the blade consists in that the device as a whole takes up less space on the substrate as those described above.
  • connection tabs are attached to a plate armature 79 which, when the corresponding side is closed contacts 76 and 77, is applied to the parts polar 69 and 70 via the support bridge 73.
  • the legs 78 are under elastic stress by acting in the same direction as fork 67A, which is clearly visible in Figure 12. Therefore, the forces elastic with which the fork 67A and the legs 78 are constrained add up to improve the operation of the assembly when the armature 79 is repelled by the magnetic field generated for the opening contacts.
  • FIG. 12 also illustrates that the invention is not not limited to its application to a microrelay.
  • the substrate can itself be produced in a magnetic material, the regions below the coils then being locally magnetized by replacing the permanent magnets.
  • the invention provides a device for producing a predetermined function and in particular a microrelay whose dimensions are close to those of circuit chips integrated current and which allows in particular to respect the strict requirements imposed on the relays used currently in advanced technologies.

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  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Micromachines (AREA)
  • Drying Of Semiconductors (AREA)

Claims (20)

  1. Miniaturisierte Vorrichtung zum Realisieren einer vorgegebenen Funktion, wobei diese Vorrichtung durch Mikrobearbeitung eines Substrates (1) mit Hilfe von Galvanoplastik-, Fotolithografie- und/oder ähnlichen Techniken, insbesondere zum Herstellen von miniaturisierten Mikrorelais, erhalten wird und aufweist: Mittel (6a, 6b, 12a, 12b, 13a, 13b, 20, 21, 44, 45, 68, 69, 70, 79), die einen Magnetkreis bilden, mindestens eine Erregerspule (10a, 10b, 11a, 11b, 71, 72) und Mittel (25, 26, 27, 29, 31 bis 34, 46 bis 51, 74 bis 77, CR) zum Sicherstellen der Durchführung dieser Funktion unter der Wirkung des Magnetkreises, wobei alle diese Elemente auf dem Substrat (1) durch Integrationsvorgänge entsprechend denen, die für die Herstellung von integrierten Schaltungen verwendet werden, erhalten werden, wobei die Mittel zum Sicherstellen der Durchführung dieser Funktion mindestens teilweise von einem Hebel (19, 35, 67) getragen werden, der elastisch verformbar und auskragend am Substrat (1) angebracht ist, dadurch gekennzeichnet, daß der Hebel (19, 35, 67) ein Kippglied bildet und nahezu in seiner Mitte an dem Substrat (1) über eine verformbare Verbindung (17, 18, 65, 66) befestigt ist und daß an jedem freien Ende des Hebels (19, 35, 67) ein magnetischer Anker (20, 21, 44, 45, 79) vorgesehen ist, der einen Teil der den Magnetkreis bildenden Mittel (6a, 6b, 12a, 12b, 13a, 13b, 20, 21, 44, 45, 68, 69, 70, 79) bildet, wobei der Magnetkreis einen Sitz definiert, gegen den der Anker mit einer ersten magnetischen Kraft angedrückt werden kann, die von dem Magnetkreis erzeugt wird und derjenigen entgegengesetzt ist, die durch die elastische Verformung des Hebels (19, 35, 67) erzeugt wird, wobei die jedem Magnetkreis zugeordnete Spule (10a, 10b, 11a, 11b, 71, 72) wahlweise erregbar und in der Lage ist, ein zweite Magnetkraft zu erzeugen, die der des Magnetkreises entgegengesetzt ist, um den dieser Spule zugeordneten Anker (20, 21, 44, 45, 79), wenn er gegen seinen Sitz angedrückt wird, abzuheben und den anderen Anker durch Kippen des Hebels (19, 35, 67) gegen seinen Sitz anzudrükken.
  2. Vorrichtung nach Anspruch 1, dadurch gekennzeichnet, daß sie ein Mikrorelais bildet und daß die Mittel zum Durchführen der Funktion mindestens einen auf dem Substrat vorgesehenen festliegenden Kontakt (27, 33, 34, 51, 52, 76, 77) und mindestens einen beweglichen Kontakt (26, 31, 32, 49, 50, 74, 75) aufiveisen, der von dem das Kippglied bildenden Hebel (19, 35, 67) getragen wird, wobei der bewegliche Kontakt gegen den festliegenden Kontakt andrückbar ist, wenn der Anker (20, 21, 44, 45, 79) gegen seinen Sitz angedrückt wird.
  3. Vorrichtung nach einem der Ansprüche 1 und 2, dadurch gekennzeichnet, daß jeder Magnetkreis einen Permanentmagneten (6a, 6b, 68) aus einem sehr harten Material aufweist.
  4. Vorrichtung nach einem der Ansprüche 1 und 2, dadurch gekennzeichnet, daß jeder Magnetkreis einen Magneten (6a, 6b, 68) aus einem harten oder halbharten Material aufweist.
  5. Vorrichtung nach einem der Ansprüche 3 und 4, dadurch gekennzeichnet, daß der Magnet die Form einer am Substrat angebrachten Pille hat.
  6. Vorrichtung nach einem der Ansprüche 3 und 4, dadurch gekennzeichnet, daß das Substrat aus einem magnetischen Material hergestellt ist und daß der Magnet aus einem magnetisierten Bereich des Substrates besteht.
  7. Vorrichtung nach einem der Ansprüche 4 bis 6, dadurch gekennzeichnet, daß die Spulen (10a, 10b, 11a, 11b, 71, 72) außerdem zum Erzeugen der ersten magnetischen Kraft erregbar sind.
  8. Vorrichtung nach einem der Ansprüche 2 bis 7, dadurch gekennzeichnet, daß mindestens ein beweglicher elektrischer Kontakt (26, 31, 32, 49, 50, 74, 75) an jedem der Enden des Hebels (19, 35, 67) vorgesehen ist.
  9. Vorrichtung nach einem der Ansprüche 2 bis 8, dadurch gekennzeichnet, daß jeder der beweglichen elektrischen Kontakte (26, 31, 32, 49, 50, 74, 75) von einem Verbindungselement (24, 25, 46, 47, 73) getragen wird, das mit dem Hebel fest verbunden ist und quer zu diesem verläuft.
  10. Vorrichtung nach Anspruch 9, dadurch gekennzeichnet, daß das Verbindungselement (24, 25, 46, 47) elastisch verformbar und einer elastischen Druckspannung aussetzbar ist, wenn der bewegliche Kontakt (26, 31, 32, 49, 50) unter der Wirkung der ersten Kraft gegen den festliegenden Kontakt (27, 33, 34, 51) angedrückt wird.
  11. Vorrichtung nach einem der Ansprüche 9 und 10, dadurch gekennzeichnet, daß das Verbindungselement (24, 25) bezüglich des Hebels elektrisch isoliert ist.
  12. Vorrichtung nach einem der Ansprüche 8 bis 10, dadurch gekennzeichnet, daß an mindestens einem der Enden des Hebels (35) mindestens zwei bewegliche Kontakte (31, 32) vorgesehen sind, die beidseitig zu diesem angeordnet sind, und daß der Hebel (35) aus zwei länglichen Teilen besteht, die Seite an Seite parallel zueinander verlaufen und gegeneinander elektrisch isoliert sind.
  13. Vorrichtung nach einem der Ansprüche 8 bis 12, dadurch gekennzeichnet, daß der Hebel (35) gegenüber dem Substrat elektrisch isoliert ist.
  14. Vorrichtung nach einem der vorhergehenden Ansprüche, dadurch gekennzeichnet, daß der Hebel (67) beidseitig zu seinem Befestigungspunkt an dem Substrat (1) auf sich selbst gefaltet ist.
  15. Vorrichtung nach einem der vorhergehenden Ansprüche, dadurch gekennzeichnet, daß der Magnetkreis Polstücke (12a, 12b, 13a, 13b, 69, 70) aufweist, die den Sitz zum Andrücken des entsprechenden Ankers (20, 21, 44, 45, 79) bilden.
  16. Vorrichtung nach Anspruch 15, dadurch gekennzeichnet, daß jedes der Polstücke (12a, 12b, 13a, 13b, 69, 70) von einer Erregerspule (10a, 10b, 11a, 11b, 71, 72) umgeben ist.
  17. Vorrichtung nach einem der vorhergehenden Ansprüche, dadurch gekennzeichnet, daß der Hebel (19, 35, 67) an dem Substrat (1) über mindestens einen Torsionsarm (17, 18, 65, 66) befestigt ist.
  18. Vorrichtung nach Anspruch 5, dadurch gekennzeichnet, daß der Magnetkreis Polstücke (12a, 12b, 13a, 13b, 69, 70) aufweist, die den Sitz zum Andrücken des entsprechenden Ankers (20, 21, 44, 45, 79) bilden, daß jedes der Polstücke (12a, 12b, 13a, 13b, 69, 70) von einer Erregerspule (10, 10b, 11a, 11b, 71, 72) umgeben ist und daß das Substrat (1) an einer seiner Flächen (3) Hohlräume (4, 62) zur Aufnahme der Magneten (6a, 6b, 68) aufweist und daß der Rest jedes Magnetkreises an der gegenüberliegenden Fläche (2) des Substrates (1) angeordnet ist.
  19. Vorrichtung nach Anspruch 18, dadurch gekennzeichnet, daß diese gegenüberliegende Fläche (2) des Substrates (1) mit einer Isolierschicht (8) versehen ist, in der die Spulen (10a, 10b, 11a, 11b, 71, 72) und die Polstücke (12a, 12b, 13a, 13b, 69) eingebettet sind.
  20. Vorrichtung nach einem der Ansprüche 1, 5 bis 7 und 14 bis 18, dadurch gekennzeichnet, daß die besagte Funktion aus einem Einwirken auf ein Lichtstrahlbündel (FL) besteht und daß der Magnetkreis einen beweglichen Anker (79) aufweist, der dieses Bündel schneiden kann, um es in Abhängigkeit von der Stellung des Hebels (67) zu unterbrechen und/oder zur reflektieren.
EP96402827A 1995-12-22 1996-12-19 Miniaturvorrichtung zur Durchführung einer vorbestimmten Funktion, insbesondere Mikro-Relais Expired - Lifetime EP0780858B1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FR9515371A FR2742917B1 (fr) 1995-12-22 1995-12-22 Dispositif miniature pour executer une fonction predeterminee, notamment microrelais
FR9515371 1995-12-22

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EP0780858A1 EP0780858A1 (de) 1997-06-25
EP0780858B1 true EP0780858B1 (de) 2000-02-23

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US (1) US5889452A (de)
EP (1) EP0780858B1 (de)
JP (1) JPH09198983A (de)
DE (1) DE69606760T2 (de)
FR (1) FR2742917B1 (de)

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FR2742917B1 (fr) 1998-02-13
DE69606760T2 (de) 2000-10-12
DE69606760D1 (de) 2000-03-30
FR2742917A1 (fr) 1997-06-27
US5889452A (en) 1999-03-30
JPH09198983A (ja) 1997-07-31
EP0780858A1 (de) 1997-06-25

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