EP1399938B1 - Magnetischer betätiger mit vermindertem zeitverhalten - Google Patents

Magnetischer betätiger mit vermindertem zeitverhalten Download PDF

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Publication number
EP1399938B1
EP1399938B1 EP02758514A EP02758514A EP1399938B1 EP 1399938 B1 EP1399938 B1 EP 1399938B1 EP 02758514 A EP02758514 A EP 02758514A EP 02758514 A EP02758514 A EP 02758514A EP 1399938 B1 EP1399938 B1 EP 1399938B1
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EP
European Patent Office
Prior art keywords
magnetic
mobile
air gap
actuator according
magnetic part
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
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EP02758514A
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English (en)
French (fr)
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EP1399938A1 (de
Inventor
Claire Divoux
Pierre Gaud
Jérôme Delamare
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Commissariat a lEnergie Atomique et aux Energies Alternatives CEA
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Commissariat a lEnergie Atomique CEA
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Publication of EP1399938A1 publication Critical patent/EP1399938A1/de
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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B43/00—Machines, pumps, or pumping installations having flexible working members
    • F04B43/02—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
    • F04B43/04—Pumps having electric drive
    • F04B43/043—Micropumps
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H50/00—Details of electromagnetic relays
    • H01H50/005—Details of electromagnetic relays using micromechanics
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H50/00—Details of electromagnetic relays
    • H01H50/16—Magnetic circuit arrangements
    • H01H50/36—Stationary parts of magnetic circuit, e.g. yoke
    • H01H50/42—Auxiliary magnetic circuits, e.g. for maintaining armature in, or returning armature to, position of rest, for damping or accelerating movement
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49002—Electrical device making
    • Y10T29/4902—Electromagnet, transformer or inductor
    • Y10T29/49075—Electromagnet, transformer or inductor including permanent magnet or core

Definitions

  • the present invention relates to magnetic actuators whether they be miniature or larger size. We talk about micro-actuators when they are miniature. The realization of such actuators uses machining techniques from mechanical structures, micro-machining or techniques used in microelectronics.
  • actuators are used in particular to make electrical, optical, power, high frequency, switches, but also to realize pumps, valves, engines.
  • switch is meant a device with several contacts that can be closed separately while the relay has only one or more close at the same time. These contacts can be in open or closed position.
  • Electromagnetic relays and switches are widely employees in many applications such as telecommunications in transmission or reception, in optical telecommunications, in equipment of automatic tests, in automobile, in aeronautics and in consumer electronics.
  • Pumps, valves, motors can be used in broad areas of application and including microbiology, medicine, optics etc.
  • Known types of actuators include a fixed magnetic part 1 and a magnetic part mobile 2 who cooperate.
  • the fixed magnetic part 1 is magnetically connected to the moving magnetic part.
  • FIG. 1 shows a example of magnetic actuator of known type to a single gap.
  • the fixed magnetic part 1 and the part movable magnet 2 form a magnetic circuit 6 closed on itself able to guide a magnetic flux.
  • the fixed magnetic part 1 and the moving magnetic part 2 are stacked on top of each other.
  • the circuit magnetic 6 cooperates with means 7 to generate the magnetic flux.
  • the fixed magnetic part and the part mobile magnet 2 each comprise a portion 12, 8 respectively, helping to delimit an air gap 9 so that a force can be exerted at the level of the portion 8 of the movable part 2 to move it under the effect of the magnetic field.
  • the fixed magnetic part 1 comprises a base or breech 10 which is extended by a first stud 11 and a second magnetic stud 12.
  • second magnetic stud 12 helps delimit the gap 9.
  • the cylinder head 10 is connected magnetically to the mobile magnetic part 2 via the first stud 11. It also has a role of mechanical maintenance of the part mobile magnetic 2 with respect to the magnetic part fixed 1.
  • the fixed magnetic part 1 and the part mobile magnetic 2 extend one above the other, in substantially parallel planes when the actuator is in the open position.
  • the magnetic circuit 6 in closed loop follows each other in one of the direction of circulation of the magnetic flux: the yoke 20, the first magnetic stud 11, the mobile part 2, the gap 9 and the second magnetic pad 12.
  • Sa reference 6 schematizes the path traveled by the flow magnetic when crossing the different elements who compose it.
  • the mobile magnetic part 2 is in the example shaped arm with a support end 13 connected to the first magnetic stud 11 and another free end that corresponds in the example to the portion 8 helping to delimit the gap 9.
  • the end free serves as an electrical contact that the arm is made of electrically conductive material or that the arm is equipped with an electrical contact. No contact electric was not shown.
  • Means 7 to generate the flow Magnetic may include one or more coils surrounding one or more pieces of the game fixed magnet 1 and / or mobile magnetic part 2 and / or possibly one or more magnets permanent. When an electric current flows in a coils a magnetic flux is produced. It is materialized by the closed loop with arrows.
  • a winding 7 was represented around the first magnetic pad 11.
  • Several coils could be used, they could be around breech 10, around the second magnetic stud 12 or even around the part movable magnetic 2.
  • Magnetic flux available in the air gap 9 corresponds to the one that is guided by the magnetic circuit 6 on both sides of the air gap 9.
  • the maximum magnetic flux that can be guided by a piece of magnetic material is function magnetic material and section of the workpiece.
  • the section of the magnetic circuit 6 can be substantially homogeneous throughout its length. In this case the mechanical performance of the actuator is mediocre.
  • the section of the game mobile magnet 2 is lower than that of the part fixed magnet 5 for mechanical reasons. Indeed it is sought that the stiffness of the movable part 2 not too important for her to bend easily.
  • One of the ways to reduce the stiffness of the moving part is to reduce its section. This reduction of the section of the moving part is done at detriment of the possibility of flow passage magnetic element in the moving magnetic part, which leads to a decrease in the force at the level of the air gap and an increased response time of the part mobile.
  • Figure 2 illustrates a micro-relay in view On top. This micro-relay is realized in form planar and no longer in stacked form. He was described in the article: "Fully Batch Fabricated Magnetic Microactuators Using A Two Layer LIGA Process "by B. ROGGE, J. SCHULZ, J. MOHR, A. THOMMES and W. MENZ in TRANDUSCERS '95 - EUROSENSORS IX pages 320 to 323.
  • the movable magnetic part 2 corresponds to a free end 17 of a mobile arm 5 whose other end 13 is a bearing end secured to the support 3.
  • the arm 5 and the part Magnetic fixed 1 are located next to each other substantially in the same plane, parallel to the plane of the support 3. The movement is in the plane of the arm 5 and the fixed magnetic part 1.
  • the free end 17 ends with a mobile electrical contact 16 intended to come against a fixed electrical contact 15 carried by the support 3.
  • the fixed magnetic part 1 has in this example a cylinder head 10 secured to one side of a magnetic block 12 which contributes to delimit the gap principal 9 with the mobile magnetic part 2. From the other side, the bolt 10 is integral with a magnetic extension 14, in this example in the form of arm, which comes opposite the magnetic stud 12. This magnetic stud 12 and the magnetic extension 14 delimit an auxiliary air gap 18.
  • the magnetic circuit 6 then comprises the cylinder head 10, the first magnetic pad 12, the second air gap 18, magnetic extension 14 and bypass the gap 9 and the mobile magnetic part 2.
  • the low rigidity of the arm 5 implies a restoring force weak which slows down the movement in repulsion of the arms.
  • the magnetic circuit 6 cooperates with means 7 to generate the flow magnetic. They were represented by a winding around breech 10 and another around his extension 14.
  • this relay is of stacked construction.
  • the mobile magnetic part 2 is a portion of a larger moving part 5 but this last is only sketched in the figures. It's missing its connection to a fixed element which can be for example a support on which would rest the magnetic part 1. The reason for this absence is that the link to the fixed element plays no magnetic role.
  • the fixed magnetic part 1 comprises, in this example, a breech 10 which is prolonged, in a central zone, by a central magnetic block 12 helping to delineate with the magnetic part mobile 2 the main airgap 9. It is assumed that the mobile magnetic part 2 corresponds substantially to the hatched portion of Figure 3A and that it takes the shape of a plate.
  • the cylinder head 10 is also integral, on either side of the central block 12, two magnetic extensions 14 that project to the movable magnetic part 2. These extensions 14 are end in opposite, near the party mobile magnet 2, they each contribute to delimit with the moving magnetic part 2 a auxiliary air gap 18.
  • the magnetic circuit 6 then comprises, at following each other, breech 10, one of the extensions 14, the auxiliary air gap 18, the part mobile magnet 2, the main air gap 9 and the stud magnetic 12 central.
  • the extensions 14 allow only better guidance of the magnetic flux at vicinity of the moving magnetic part 2. This is the only way of guiding the flow and creating a additional air gap. There is no direct way flow guidance.
  • the magnetic flux flowing in the magnetic circuit 6 follows two closed loops that get join in the central stud 12. These two loops are symmetrical if the magnetic circuit is symmetrical with respect to a median axis passing through the central stud 12 in the direction of movement.
  • the magnetic part mobile 2 is a conductor of electricity, it plays the role of an electrical contact that when it gets closer of the central stud 12 under the effect of the induced force comes close an electrical circuit.
  • This circuit electrical ends with two fixed contacts 15 inserted between the central magnetic block 12 and the movable magnetic part 2. These electrical contacts fixtures increase the size of the gap.
  • the magnetic circuit 6 cooperates with means 7 to generate the flow magnetic. They were represented by a winding surrounding the central magnetic block 12.
  • the flow magnetic in the main air gap 9 is not optimum, because when looking to close the actuator, the magnetic flux in the cylinder head 10 is well guided towards the extensions 14 but all this flow does not pass through the mobile magnetic part 2 towards the main air gap 9, leaks occur significant flow between the extensions 14 and the breech 10, through the central stud 12, without passing neither by the mobile magnetic part 2 nor by the gap principal 9.
  • the present invention aims to realize an electromagnetic actuator whose strength applying on the moving part and the speed are increased compared to conventional actuators and which avoids a damping of the magnetic part mobile.
  • Such an actuator makes it possible to have a significant displacement force while retaining the moving part a reduced section so that it has compatible mechanical properties with the reduction of the mechanical response time.
  • the present invention proposes a magnetic actuator having a circuit closed magnet, able to guide a magnetic flux, this magnetic circuit having a magnetic part fixed with a cylinder head and a moving magnetic part magnetically connected to each other and moreover, at least a main air gap delimited by at least one portion of the moving magnetic part and by the breech and in which the magnetic flux closes in establishing itself substantially across the mobile magnetic.
  • the fixed magnetic part comprises more ways of recovering flows that help to delineate with the magnetic part mobile, an auxiliary air gap in which the flow Magnetic is established laterally to the part mobile magnetic field, the magnetic flux being contained in either side of the main air gap on one side the breech and the other jointly by the party mobile magnetic and by means of recovery of flow via the portion contributing to delimit the gap principal, the auxiliary airgap having a dimension in the flow setting direction that is minimum at the level of at least one zone of the portion helping to delimit the main air gap.
  • At least a first magnetic stud allows to mechanically and magnetically connect the cylinder head to the moving magnetic part.
  • At least one second magnetic pad helps to delimit the main gap, this stud magnetic being from either the breech or the mobile magnetic part.
  • this stud magnet is made of a hysteresis material.
  • At least one other magnetic pad allows mechanically and magnetically connect the cylinder head to flow recovery means.
  • the actuator comprises means for generate the magnetic flux in the magnetic circuit closed, these means for generating the magnetic flux can be made by at least one winding.
  • the mobile magnetic part can overall take the form of at least one arm to a or several non-parallel branches, connected between they at the level of the portion contributing to delimit the main air gap.
  • the means of recovery of flow can overall take the form of at least one arm to a or more branches.
  • the moving magnetic part could take the form of a star with several branches.
  • the means flow recovery present, in the direction displacement of the moving magnetic part, a thicker than that presented by the party movable magnetic in the direction of movement, so that the auxiliary air gap is delimited by surfaces that remain opposite when the displacement.
  • the main air gap is defined by two surfaces opposite, the first belonging to the portion of the moving magnetic part and the second belonging to the breech, the first surface area is greater than the second surface and exceeds around the second surface.
  • the dimension of the auxiliary air gap in the sense of establishing the magnetic flux, which is almost maximal near the portion helping to delimit the main air gap and that it decreases the more one moves away from it.
  • the mobile magnetic part may comprise at least one through opening, in the sense of a displacement, in the moving magnetic part of to further reduce the depreciation.
  • the actuator can be stacked type, the cylinder head forming a first level and the whole formed by the flow recovery means and by the part mobile magnetic a second level.
  • At least one of the levels has a form oblong substantially rounded at both ends.
  • At least one of the levels may have at least one central opening therethrough.
  • the actuator can be substantially symmetrical with respect to a median plane passing through the substantially movable magnetic part perpendicular to the direction of movement.
  • the actuator can be used to close or open an electrical circuit.
  • the portion contributing to delimit the main airgap may include at least an electrical contact for contacting at least one other electrical contact when the actuator is closed.
  • the mobile magnetic part can end with at least an electrical contact offset from the portion helping to delimit the main air gap, this electrical contact being intended to contact at least another electrical contact when the actuator is closed.
  • the electrical contact can be isolated electrically of the moving magnetic part.
  • the moving magnetic part can be in magnetic material conducive to electricity.
  • the present invention also relates to a relay having a magnetic actuator as well defined.
  • the present invention also relates to a switch having at least one actuator magnetic so defined to present several main air gaps.
  • the present invention also relates to a pump comprising a magnetic actuator thus defined, in which the mobile magnetic part is secured of a membrane helping to delimit a cavity for circulate a fluid.
  • Figures 4A to 4D respectively show in top view, in cross section along the axis BB, in cross section along the axis CC, in view from below a magnetic actuator according to the invention.
  • Such an actuator may for example be a micro-relay used in particular in devices portable telephones. It is feasible in micro-technology with stacked layers.
  • circuit magnetic closed 26 able to guide a magnetic flux, is shown schematically by the bold arrows. It has a fixed magnetic part 21 and a magnetic part mobile 22 magnetically connected to each other.
  • the fixed magnetic part 21 has a substantially flat cylinder head or base 30 which extends on one side by a first magnetic stud 31 for magnetically connect the fixed magnetic part 21 and the moving magnetic part 22. It is extended by the other side by a second magnetic pad 32 which helps delineate a main air gap 29 between the fixed magnetic portion 21 and a portion 28 of the movable magnetic part 22. It furthermore comprises 40 stream recovery means that will be detailed thereafter.
  • the moving magnetic part 22 is shaped substantially plane arm having an end 33 of solidarity support of the first magnetic stud 31 and ending with a free end.
  • the free end corresponds to the portion 28 that helps to delimit the main air gap 29.
  • This portion 28 has a maximum amplitude during a displacement of the mobile magnetic part 22.
  • This portion 28 is opposite the second stud magnetic 32, it is on this portion that applies the force generated during the actuation.
  • the first magnetic pad 31 also has a role of mechanical anchoring of the magnetic part mobile 22 to the fixed magnetic part 21. This anchoring can be done by embedding or by articulation.
  • the first magnetic block can be realized in totality in magnetic material or only in part.
  • the second magnetic pad 32 which contributes to delimit the main air gap 29 may have a role of electrical contact in the application of a relay electric.
  • the two magnetic studs 31, 32 are located at both ends of the bolt 30.
  • the flow magnetic closes by establishing itself transversely in the plane of the moving magnetic part 22.
  • the fixed magnetic part 21 comprises means for flux recovery 40, magnetically connected with the cylinder head 30 which delimit with the magnetic part mobile 22 at least one auxiliary air gap 38 lateral wherein the magnetic flux settles laterally to the moving part 22.
  • the connection between the cylinder head 30 and the means of stream recovery 40 is done through the first magnetic stud 31.
  • the means to generate the magnetic flux 27 can be made by one or more windings placed around the magnetic circuit 26 closed.
  • One or several permanent magnets can be provided in supplement or instead of coils.
  • FIGS. 4 the means for generating the magnetic flux are not represented, in a for the sake of clarity, but they are visible in the figures 5 described later. They can be placed around of the breech, magnetic studs, means of flux recovery or even the magnetic part mobile, if they do not interfere with the movement.
  • the means of stream recovery 40 are represented such an arm to two branches 41, substantially flat with one end 40.1 magnetically unrelated and a support end 40.2 connected magnetically and mechanically to the cylinder head 30 via the first magnetic stud 31.
  • 40 flow recovery means are located substantially in the same plane as the magnetic part mobile 22.
  • the two branches 41 are joined to two ends of the arm 40.
  • the two branches delimit a space in which the part takes place
  • the magnetic mobile magnetic part 22 and the means of 40 flux recovery are integral to the same first magnetic stud 31, but several studs could to be present.
  • the means of recovery of flows 40 surround the fixed magnetic part 22 and the gap lateral auxiliary 38, which they help to delimit, borders the mobile magnetic part 22 since its flush mounting end 33 up to portion 28 helping to delimit the main air gap 29.
  • the means of recovery of flows 40 cooperate with the moving magnetic part 22. They recover some of the magnetic flux established in the main air gap 29 which, when the part magnetic magnet 22 is in a saturated state, can not be guided by it. This may be the case when the main air gap 29 is low, when the relay is being closed for example, especially for deposited thin-film materials electrolytic for example, for which the value of the saturation induction is weak.
  • FIGS. 4 flow circulation magnetic has been shown.
  • the magnetic flux that settles in the auxiliary gap 38 is directed substantially transversely to that which is established in the main gap 29 and therefore substantially transversely to the movement.
  • the closed magnetic circuit 26 includes a section comprising the means of flux recovery 40 and the moving magnetic part 22 mounted in parallel, this section being in series with another section including the first magnetic block 31, the cylinder head 30, the second magnetic pad 32 and the main air gap 29 mounted in series.
  • the means of recovery of flows 40 allow to increase the section of the magnetic circuit in the part corresponding to the magnetic part mobile and therefore to guide a more magnetic flux important that the one that could be guided in the lack of recovery means. These means of 40 stream recovery are used before, during, and after the movement of the moving magnetic part 22.
  • the reluctance of the magnetic circuit 26 is decreased by the magnetic elements put in place and the gain of Magnetic flux and force are appreciable.
  • the reluctance of a magnetic circuit is the equivalent of the resistance of an electrical circuit.
  • the strength gain magnetic drive causes a decrease in the time of mechanical switching.
  • the distance between the magnetic part mobile 22 and the flow recovery means 40 characterizes the auxiliary airgap 38. It can be substantially constant as shown in Figure 4A. However, it is best to adjust to adjust the passage of the flow and optimize the force exerted on the maximum amplitude portion 28 and avoid depreciation. It is better that the dimension D1 of the auxiliary air gap 38, in the direction the magnetic flux, which is minimal at level of at least one area of the contributing portion 28 to delimit the main air gap.
  • the flow recovery means 40 have, in the direction of movement, a thickness E1 greater than that E2 of the mobile magnetic part 22 so that the surfaces delimiting the air gap auxiliary 38 remain in opposite.
  • the main air gap 29 is delimited by the portion 28 of the moving magnetic portion 22 which has a surface S1 and the second stud magnetic 32 of the cylinder head 30 which has a surface S2 facing the surface S1.
  • the surface S1 is more large than the S2 surface and that it exceeds around the surface S2.
  • the surface S1 exceeds a distance P1 the surface S2.
  • the magnetic flux contained in the means recovery 40 then goes more willingly into the portion 28 of the moving magnetic portion 22 that in the second stud 32.
  • Figures 5A and 5B are two variants, seen from above, of a magnetic actuator according to the invention. These figures are comparable to Figure 4A with respect to the overall shape of the mobile magnetic part 22 and the magnetic flux recovery means 40.
  • FIG. 5A shows the means to generate the magnetic flux 27 in the form of one or several windings 27.1 to 27.3.
  • windings 27.1 to 27.3 There are a large number of possibilities to dispose of them and to realize them.
  • Windings 27.1 the studs 31, 32 are spiral windings. This guy winding, compatible with micro-technologies, is easy to achieve. Windings 27.2, 27.3 around arm and branches were represented as type solenoid. One or more windings 27.4 of the latter type for example, can be associated with the breech 30 as shown in Figure 6B.
  • These means 42.1 may consist in providing along the moving magnetic part 22 one or several first zones Z1 at which the 40 magnetic flux recovery means are more only in one or more Z2 zones.
  • the auxiliary air gap 38 has a dimension in the direction of establishment of the magnetic flux that is minimum in at least one area of the 28th helping to delimit the main air gap. is therefore larger in at least one area outside of said portion 28.
  • the mobile magnetic part 22 is an arm that ends 28, the latter being enlarged by relative to the width of the arm.
  • the distance D2 between the flow recovery means 40 and the part magnetic magnet 22 is near maximum in the vicinity of the 28th portion and it decreases more away from it. At level of the portion 28 the distance D1 is minimal as we saw earlier. In FIGS. 5A, 5B, the minimum dimension D1 exists all around the portion 28.
  • auxiliary airgap If the size of the auxiliary airgap is substantially constant, air is likely to remain trapped at the moving magnetic part 22, which dampens his movement.
  • These means to promote the exhaust may also consist of providing the magnetic part mobile 22 through apertures 42.2 in the direction of the movement. This configuration is illustrated in Figure 5B in combination with adjusting the distance between the magnetic part mobile 22 and the flux recovery means 40. find a series of openings 42.2 along the arm from the bearing end 33 to the portion 28 and two sets of openings along the portion 28.
  • Figures 5C and 5D show two more configurations of the auxiliary air gap 38, they are derived from Figures 5A and 5B.
  • the magnetic part mobile 22 may move sideways in the plan of the auxiliary airgap 38 to come to contact the flow recovery means 40, because of a mechanical instability due to magnetic forces between the mobile magnetic part 22 and the flux recovery means 40.
  • the magnetic part mobile 22 may come crashing against the means 40. This generates a disfunction and wear of the actuator.
  • first magnetic pad 31 and the second magnetic pad 32 are derived from the moving magnetic part 22 instead from the fixed magnetic part 21.
  • the 40 stream recovery means are always connected magnetically and mechanically at the breech 30 by the first magnetic stud 31.
  • the second magnetic stud 32 is then part of portion 28 of the game movable magnet 22.
  • the main air gap is delimited by the second magnetic pad 32 and by the portion of the breech that is opposite with this second stud magnetic.
  • the bolt 30 exceeds the entire mobile magnetic part 22-means of stream recovery 40 on much of his periphery. It can also provide at least one through opening on at least one of the levels for reduce the areas facing each other. In the example, the breech 30 is provided with a large opening 43 substantially central. This configuration is not others are possible.
  • relay has been made by conventional technologies assembly and machining of mechanical structures by opposition to micro-technologies.
  • Such a relay relatively massive is particularly suitable for the high powers.
  • This relay is shown in top view in Figure 7A and in section in Figure 7B.
  • the fixed magnetic part 21 with the bolt 30 magnetically and electrically connected to the part mobile magnet 22 via the first holding stud 31.
  • the second stud 32 which contributes to delimit the main air gap 29 is massive.
  • the means for generating the magnetic flux 27 are made by a winding arranged around the second stud 32.
  • the mobile magnetic part 22 is an arm with a bearing end 33 connected to the first stud 31 and a free end forming the portion 28 which comes into opposite the second stud 32 to delimit the gap principal 29.
  • the flow recovery means 40 are made by a massive arm mechanically connected and magnetically by one of its ends 35 at the cylinder head 30 via a third stud 34. Like the other two studs, this third stud 34 is a protuberance with respect to the breech 30. On could consider that this third stud 34 is issued 40 flow recovery means instead of doing part of the breech.
  • the other end 36 of the arm is not connected magnetically, she comes close to the mobile magnetic part 22 and contributes with this the last to delimit the auxiliary airgap 38.
  • the mobile magnetic part and the flow recovery means were directed substantially in the same direction while in this configuration their directions are substantially perpendicular. Their magnetic binding points with the breech are distinct.
  • the mobile magnetic part 22 and the second stud magnetic 32 are electrically conductive and make part of an electrical circuit that is open when the actuator is open and that is closed when the actuator is closed.
  • FIG. 7C illustrates this configuration.
  • the magnetic part mobile 22 is now connected by its end 33 supporting a breech with two branches 30.1, 30.2 substantially parallel and this connection is made by first two studs 31.1, 31.2 in the extension one of the other. It is the same for the means of 40 flux recovery. They are magnetically connected each to a branch 30.1, 30.2 of the bolt 30 via two third studs that are not visible on the Figure 7C but which are in the extension one of the other.
  • the second magnetic studs 32.1, 32.2 are made of a hysteresis material, one can obtain two stable states of the actuator.
  • Figure 7D illustrates a relay having substantially the same structure but realized in micro-technology.
  • a substrate 70 for example in silicon.
  • An opening 71 is etched in the substrate to realize the means to generate the flow magnetic 27 in the form of a spiral winding.
  • a sacrificial layer made of silicon oxide for example, it is engraved at the level of magnetic bonding pads 31, 34.
  • a resin is deposited photolithographically at through a mask and developed to create a box in which we will deposit the moving magnetic part 22 and the flux recovery means 40.
  • the layer sacrificial is then released under the party mobile magnetic to give him his freedom to movement.
  • the sacrificial layer is not shown in Figure 7D but its location is found between the substrate 70 and the magnetic part 22. The latter masks the means of stream recovery.
  • the moving magnetic part 22 is prolonged beyond the main air gap 29 to come into screws of the two electrical contacts 75 carried by the 70.
  • both electrical contacts 75 are electrically connected via the free end of the movable magnetic part 22.
  • the magnetic part mobile or at least its free end is carried out in magnetic material conducive to electricity.
  • breech 30 which is supported by a support 80 which can be glass, ceramic or in silicon for example.
  • Figure 8B it has a first single stud 31 which ensures both its connection magnetic with the mobile magnetic part 22 and with the flow recovery means 40 and a second plot 32 which helps to delimit the main air gap 29.
  • Figure 8C it has a pair of first pads 31.1, 31.2 which ensures both its magnetic connection with the moving magnetic part 22 and with the flow recovery means 40 and a second stud 32 which helps to delimit the main air gap 29.
  • the auxiliary air gap has a dimension in the direction of establishment of the flow which is minimal at the level of at least one zone of the portion helping to delimit the gap main.
  • the mobile magnetic part 22 is always in the form of substantially plane arms but instead of being massive arm consists of two branches 22.1, 22.2 not parallel. On one side branches 22.1, 22.2 are magnetically and mechanically connected to either the first single stud 31, at one of the studs 31.1, 31.2 of the pair and on the other they come together to form the portion 28 which helps to delimit the gap principal 29.
  • the flow recovery means 40 are shaped like a substantially plane arm which is housed between the two branches 22.1, 22.2 of the mobile magnetic part 22 substantially in the same plan.
  • the branches 22.1, 22.2 are substantially symmetrical with respect to a longitudinal axis of the arm flow recovery means 40.
  • This arm is magnetically and mechanically connected to one side, either to the first single pad 31, or to the pair of first pads 31.1, 31.2, and on the other side is free. he is approaching the portion 28. It delimits with the movable magnet 22 the auxiliary air gap 38.
  • the means 27 to generate the flow take the form of a or several windings.
  • Figure 8B we have represented a single winding 27 around the first stud 31 single while in Figure 8C is shown a winding 27.1, 27.2 around each of the pads 31.1, 31.2 of the pair. We could have added a winding around the second stud 32.
  • the cylinder head is electrolytically deposited.
  • the depot is then planarized to keep the breech 30 only in the box 130 ( Figure 13B).
  • a dielectric layer is then deposited 81, for example, silicon oxide, and is etched at least one box 132 to delimit the means 27 for generate the flux in the form of winding with their studs electrical control.
  • This engraving is preceded a lithography step. It does not reach the the cylinder head 30.
  • the conductive tracks of the coils 27, for example copper, are deposited by electrolysis, this step is preceded by the deposition of an underlayer driver and is followed by a planarization step ( Figure 13C).
  • a new dielectric layer is deposited 82.
  • the two dielectric layers 81, 82 are etched caissons 133 for delimiting the studs 31, 32. This engraving is preceded by a step of lithography.
  • the boxes 133 reach the breech 30.
  • the magnetic studs 31, 32 are deposited electrolysis, this step is preceded by the deposit of a conductive underlayer and is followed by a step planarization ( Figure 13D).
  • a sacrificial layer is then deposited 83 for example in silicon oxide, and it is serious to clear the first magnetic stud 31 and ensure a separation between the moving magnetic part and the fixed magnetic part with recovery means flows that will be deposited ( Figure 13E).
  • a layer of material is then deposited magnetic to achieve the fixed magnetic part with the flow recovery means 40 and the part movable magnet 22 and by a lithography step and engraving they are delimited. Finally, the layer sacrificial 83 is removed, for example by etching chemical, under the moving magnetic part 22 for the free ( Figure 13F).
  • the electric control pads coils 27 are exposed (not shown).
  • the actuator can be covered with a cover of protection (not shown).
  • FIG 9A we see in top view an electric relay comparable to that of the figure 4A.
  • the yoke 30 is supported by a substrate 90.
  • 40 flow recovery means are visible they take the form of an arm with two branches.
  • the part movable magnet 22 protrudes beyond the second stud magnetic 32 and its end ends with a mobile electrical contact 91 offset from the main air gap 29.
  • the substrate 90 on which rests the cylinder head 30 has a conductive track 92 discontinuous.
  • the discontinuity 93 is at the level of movable electrical contact 91. When the actuator is in the closed state, the movable electrical contact 91 comes contact the conductive track 92 on either side of the discontinuity 93 so as to restore continuity.
  • the track 92 has a contact zone 94 of material different from that of the track.
  • This material can be in gold, for example, to improve the quality of contact.
  • the conductive track 92 can be a simple conductive line or a microstrip line by example. It's this last configuration that is represented.
  • the movable electrical contact 91 can be disposed at any part of the game mobile magnet and it is dimensioned independently dimensions of it. We have space to adjust the level of the track 91 on the substrate 90. It is an advantageous construction to increase the closing force of the relay.
  • a movable electrical contact 97 is attached to the mobile magnetic part 22 at the level of the portion 28 seat of the force generated by the magnetic flux.
  • This mobile electrical contact 97 is electrically isolated of the mobile magnetic part 22 by a layer insulation 95.
  • This insulating layer 95 can be removed if the mobile magnetic part 22 is electrically conductive and that this property is used. In this case, we can electrically isolate the part movable magnetic 22 of the rest of the actuator magnetic. It can thus serve itself to the transmission of an electrical signal, contact mobile electric coming to close an electric circuit integrating the mobile magnetic part.
  • a discontinuous conducting track 96 is represented next to the mobile contact 97. It is found between the second magnetic pad 32 and the contact In this configuration, we do not have represented from contact areas on the runway for improve the quality of the contact. With such configuration, the main air gap 29 is increased the more we add electrically conductive layers or insulation between the moving magnetic part 22 and the second magnetic pad 32, while the spacing between the electrical contacts is substantially constant. Despite the increase in the air gap, the process to realize the actuator can be more simple.
  • the actuator can function as a switch, that the mobile magnetic part 22 is equipped with two movable electrical contacts 97.1, 97.2. These contacts are placed substantially symmetrically with respect to a median plane of the moving magnetic part 22 substantially perpendicular to the direction of the movement. They are each intended to come close a electrical circuit, schematized by a contact zone 96.1, 96.2, these circuits being arranged on the else of the mobile magnetic part 22.
  • the mobile magnetic part 22 is move in one direction or in the opposite direction and one of the mobile electrical contacts 97.1 or 97.2 just shut down one of the electrical circuits.
  • the contact zone fixed 96.1 is located between the second magnetic pad 32 and the movable electrical contact 97.1.
  • the insulating layer between the part movable magnet 22 and the electrical contacts mobiles 97.1, 97.2 is omitted.
  • FIGS 11A and 11B illustrate this variant.
  • the part movable magnet 22 is in balance with two free ends 37.1, 37.2. It has two portions 28.1, 28.2 which help to delimit each a main air gap 29.1, 29.2 and these portions find on the side of its two free ends 37.1, 37.2.
  • the breech 30 is now equipped with a first central magnetic anchor pad 31 and a pair of second pads 32.1, 32.2 which contribute each to delimit one of the main air gaps 29.1, 29.2. It is made of a magnetic material electrically conductive. It is assumed that in this example the first central magnetic pad 31 serves also to magnetically connect the means of recovery of flux 40 at the cylinder head 30. The means of stream recovery 40 are comparable to those represented in FIGS. 6.
  • the means for generating the magnetic flux 27 take the form of a pair of windings 27.1, 27.2, each of them surrounding one of the second pads. References 100.1 and 100.2 represent the electrical terminals for the power supply windings.
  • terminals 100.1 are electrically connected directly to one end of the driver of a winding 27.1, 27.2 while terminals 100.2 are connected via a 100.3 conductor and via one of the seconds magnetic studs 32.1, 32.2 at the other end of the conductor of a winding 27.1, 27.2.
  • the windings 27.1, 27.2 are isolated electrically of the cylinder head 30 by a layer dielectric 101 which also extends between the first magnetic stud 31 and the cylinder head.
  • the mobile magnetic part 22 comprises at level of its free ends 37.1, 37.2 a zone 28.1, 28.2 on which the force is exerted during the actuation of the switch.
  • This area 28.1, 28.2 is located opposite each of the second pads 32.1, 32.2, it helps to delimit the main air gap 29.1, 29.2.
  • the two free ends 37.1, 37.2 are terminate with a contact area, electrical 102.1, 102.1 mobile. It is assumed that the magnetic part mobile 22 is conducting electricity as well as the first magnetic stud 31. The latter is connected to a input conductor E for routing a signal electrical to the mobile magnetic part 22.
  • a fixed electrical contact 104.1, 104.2 electrically isolated from the second magnetic pad 32.1, 32.2 by a dielectric layer 101. This contact electrical supply is extended by an output conductor S1, S2.
  • the mobile magnetic part comes to contact one fixed electrical contacts 104.1, 104.2, the signal electrical power can be collected on any of the output conductors S1 or S2.
  • the windings 27.1, 27.2 are also electrically isolated from output conductors S1, S2.
  • windings can be independent or be electrically connected in series, for example opposite windings can be in series in the case use of materials with remanent magnetization or of hysteresis materials.
  • FIGS 12A, 12B illustrate now an actuator according to the invention in an application of pump and more particularly micro-pump.
  • the center 28 of the star helps to delineate the main air gap 29. It may take the form of a magnetic block bearing the same reference 28.
  • the ends of branches 22.1, 22.2, 22.3 are support ends connected magnetically and mechanically at the single breech 30.
  • the breech can for example in the form of a disc.
  • the breech is with a series of first pads 31.1, 31.2, 31.3 to connect it to the mobile magnetic part 22.
  • It also comprises a second central stud 32 which helps delineate the main air gap 29 and a series of third pads 34.1, 34.2, 34.3 for the magnetically and mechanically connect to the means of stream recovery 40.1, 40.2, 40.3.
  • These means of stream recovery help to delineate a auxiliary airgap 38.1, 38.2, 38.3 with the part 22. They occupy the space between two contiguous branches remaining spaced branches.
  • the membrane 120 helps delimit on one side with the breech 30 a first cavity 121.
  • the auxiliary air gaps 38.1, 38.2, 38.3 may serve as contributing orifices to the circulation of the fluid, for its ejection of or its suction in an actuating cavity 122 included between the other side of the membrane 120 and the means of flux recovery 40.
  • At least one other orifice 44 also contributing to fluid circulation could cross the crown and lead into the actuating cavity 122.
  • a valve system (no represented) would be used for the fluid to circulate appropriately.
  • the means to generate the magnetic flux are represented in the form of coils 27 encircling the first magnetic studs 31.1, 31.2, 31.3 and the second magnetic pad 32.
  • a layer seal 123 coats the coils 27 between the cylinder head 30 and the magnetic studs 31.1, 31.2, 31.3, 32, 34.1, 34.2, 34.3 so as to isolate them from the cavity 121.

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Electromagnets (AREA)

Claims (24)

  1. Magnetischer Betätiger mit einem geschlossenen Magnetkreis (26), fähig einen Magnetfluss zu leiten, wobei dieser Magnetkreis (26) einen festen magnetischen Teil (30, 31, 32) mit einem Joch (30) und ein bewegliches magnetisches Stück (22), die magnetisch miteinander verbunden sind, sowie wenigstens einen Hauptspalt (29) umfasst, der abgegrenzt wird durch wenigstens einen Teil des beweglichen magnetischen Stücks (22) und durch das Joch (30) und in dem sich der Magnetfluss schließt, wobei er sich im Wesentlichen quer zu dem beweglichen magnetischen Stück (22) aufbaut, in der Bewegungsrichtung des beweglichen magnetischen Stücks (22),
    dadurch gekennzeichnet, dass der feste magnetische Teil (30, 31, 32) Fluss-Rekuperationseinrichtungen (40) umfasst, die dazu beitragen, mit dem beweglichen magnetischen Stück (22) einen Hilfsspalt (38) abzugrenzen, in dem der Magnetfluss sich seitlich zu dem beweglichen magnetischen Stück (22) und folglich im Wesentlichen quer zu der Bewegung des beweglichen magnetischen Stück (22) aufbaut, wobei der Magnetfluss beiderseits des Hauptspalts (29) sowohl einerseits durch das Joch (30) und andererseits durch das bewegliche magnetische Stück (22) als auch durch die Fluss-Rekuperationseinrichtungen (40) verläuft, über einen Teil (28) des beweglichen magnetischen Teils (22), der dazu beiträgt, den Hauptspalt (29) abzugrenzen, wobei der Hilfsspalt (38) in der Aufbaurichtung des Magnetflusses eine Dimension hat, die minimal ist in Höhe wenigstens einer Zone des Teils (28), die dazu beiträgt, den Hauptspalt (29) abzugrenzen.
  2. Magnetischer Betätiger nach Anspruch 1, dadurch gekennzeichnet, dass wenigstens ein magnetisches Element (31) ermöglicht, das Joch (30) mechanisch und magnetisch mit dem beweglichen magnetischen Teil (22) zu verbinden.
  3. Magnetischer Betätiger nach einem der Ansprüche 1 oder 2, dadurch gekennzeichnet, dass wenigstens ein zweites magnetisches Element (32) dazu beiträgt, den Hauptspalt (29) abzugrenzen, wobei dieses magnetische Element (32) durch ein Hysterese-Material gebildet wird.
  4. Magnetischer Betätiger nach einem der Ansprüche 1 bis 3, dadurch gekennzeichnet, dass wenigstens ein weiteres magnetisches Element (34) ermöglicht, das Joch (30) mechanisch und magnetisch mit den Fluss-Rekuperationseinrichtungen (40) zu verbinden.
  5. Magnetischer Betätiger nach einem der Ansprüche 1 bis 4, dadurch gekennzeichnet, dass er Einrichtungen (27) zur Erzeugung des Magnetflusses in dem geschlossenen Magnetkreis (26) umfasst, wobei diese Einrichtungen zur Erzeugung des Magnetflusses durch wenigstens eine Wicklung gebildet werden.
  6. Magnetischer Betätiger nach einem der Ansprüche 1 bis 5, dadurch gekennzeichnet, dass das bewegliche magnetische Stück (22) global die Form wenigstens eines Arms mit einem oder mehreren nicht-parallelen Zweigen aufweist, die in Höhe des Teils miteinander verbunden sind, das dazu beiträgt, den Hauptspalt (29) abzugrenzen.
  7. Magnetischer Betätiger nach einem der Ansprüche 1 bis 6, dadurch gekennzeichnet, dass das bewegliche magnetische Stück (22) sternförmig mehrere Zweigen (22.1, 22.2, 22.3) aufweist.
  8. Magnetischer Betätiger nach einem der Ansprüche 1 bis 7, dadurch gekennzeichnet, dass die Fluss-Rekuperationseinrichtungen (40) in der Richtung einer Verschiebung des beweglichen magnetischen Stücks (22) eine Dicke (E1) aufweisen, die größer ist als die Dicke (E2), welche das bewegliche magnetische Stück (22) in der Verschiebungsrichtung aufweist, so dass der Hilfsspalt (38) durch Flächen abgegrenzt wird, die sich auch während der Verschiebung des beweglichen magnetischen Teils (22) gegenüberstehen.
  9. Magnetischer Betätiger nach einem der Ansprüche 1 bis 8, dadurch gekennzeichnet, dass der Hauptspalt (29) durch zwei sich gegenüberstehende Flächen (S1, S2) definiert wird, wobei die erste Fläche (S1) zu dem Teil (28) des beweglichen magnetischen Stücks (22) gehört und die zweite Fläche (S2) zu dem Joch (30) gehört, wobei die erste Fläche (S1) größer ist als die zweite Fläche (S2) und um die zweite Fläche (S2) herum vorsteht.
  10. Magnetischer Betätiger nach einem der Ansprüche 1 bis 9, dadurch gekennzeichnet, dass die Dimension (D2) des Hilfsspalts (38) in der Aufbaurichtung des Magnetflusses in der Nähe des zur Abgrenzung des Hauptspalts (29) beitragenden Teils (28) quasi maximal ist und immer mehr abnimmt, je weiter man sich davon entfernt.
  11. Magnetischer Betätiger nach einem der Ansprüche 1 bis 10, dadurch gekennzeichnet, dass das bewegliche magnetische Stück (22) wenigstens eine Durchgangsöffnung (42.2) in der Richtung der Bewegung umfasst.
  12. Magnetischer Betätiger nach einem der Ansprüche 1 bis 11, dadurch gekennzeichnet, dass das Joch (30) ein erstes Niveau des Betätigers bildet und das durch die Fluss-Rekuperationseinrichtungen (40) und durch das bewegliche magnetische Stück (22) gebildete Ganze ein zweites Niveau, wobei die beiden Niveaus gestapelt sind bzw. übereinandeniegen.
  13. Magnetischer Betätiger nach Anspruch 12, dadurch gekennzeichnet, dass wenigstens eines der Niveaus eine längliche und an den beiden Enden im Wesentlichen gerundete Form aufweist.
  14. Magnetischer Betätiger nach einem der Ansprüche 12 oder 13, dadurch gekennzeichnet, dass die beiden Niveaus sich überlappen bzw. überschneiden.
  15. Magnetischer Betätiger nach einem der Ansprüche 12 bis 14, dadurch gekennzeichnet, dass wenigstens eines der Niveaus mindestens eine zentrale Durchgangsöffnung (43) aufweist.
  16. Magnetischer Betätiger nach einem der Ansprüche 1 bis 15, dadurch gekennzeichnet, dass er im Wesentlichen symmetrisch ist in Bezug auf eine Mittelebene (P), die in dem beweglichen magnetischen Stück (22) im Wesentlichen senkrecht zu der Richtung der Bewegung verläuft.
  17. Magnetischer Betätiger nach einem der Ansprüche 1 bis 16, dadurch gekennzeichnet, dass der zur Abgrenzung des Hauptspalts (29) beitragende Teil (28) mindestens einen elektrischen Kontakt (97) umfasst, wobei dieser elektrische Kontakt (97) dazu bestimmt ist, mit wenigstens einem anderen elektrischen Kontakt (96) Kontakt zu haben, wenn der Betätiger geschlossen ist.
  18. Magnetischer Betätiger nach einem der Ansprüche 1 bis 16, dadurch gekennzeichnet, dass das bewegliche magnetische Stück (22) mit wenigstens einem elektrischen Kontakt (91) endet, versetzt in Bezug auf den zur Abgrenzung des Hauptspalts (29) beitragenden Teil (28), dazu bestimmt, Kontakt zu haben mit wenigstens einem anderen elektrischen Kontakt, wenn der Betätiger geschlossen ist.
  19. Magnetischer Betätiger nach einem der Ansprüche 17 oder 18, dadurch gekennzeichnet, dass der elektrische Kontakt (97) elektrisch isoliert ist von dem beweglichen magnetischen Stück (22).
  20. Magnetischer Betätiger nach einem der Ansprüche 17 bis 19, dadurch gekennzeichnet, dass das bewegliche magnetische Stück (22) aus einem elektrisch leitenden magnetischen Material ist und als elektrischer Kontakt dient.
  21. Verfahren zur Herstellung eines magnetischen Betätigers nach einem der Ansprüche 1 bis 20,
    dadurch gekennzeichnet, dass es die folgenden Schritte umfasst:
    Ätzen einer mit einem magnetischen Material zu füllenden Vertiefung (130) in ein Substrat (80), um ein Joch (30) eines festen magnetischen Teils (30, 31, 32) zu realisieren,
    Abscheiden einer ersten dielektrischen Schicht (81) auf dem Substrat (80) mit dem Joch (30),
    Ätzen wenigstens einer Vertiefung (132), um Erzeugungseinrichtungen (27) eines Magnetflusses abzugrenzen, und Abscheiden der genannten Einrichtungen (27),
    Abscheiden einer zweiten dielektrischen Schicht (82) auf der ersten Schicht (81),
    Ätzen von Vertiefungen (133), durch die beiden Schichten (81, 82) hindurch bis zu dem Joch (30), um wenigstens ein erstes magnetisches Element (31) und wenigstens ein zweites magnetisches Element (32) abzugrenzen, wobei das zweite Element (32) dazu beiträgt, wenigstens einen Hauptspalt (29) abzugrenzen,
    Abscheiden des ersten und zweiten magnetischen Elements (31, 32) in den Vertiefungen (133),
    Abscheiden einer Opferschicht (83) auf der zweiten dielektrischen Schicht (82) und Ätzen der Opferschicht (83), um das erste magnetische Element (31) freizulegen und eine Trennung zwischen einem beweglichen magnetischen Stück (22) und Fluss-Rekuperationseinrichtungen (40) und dem später abgeschiedenen festen magnetischen Teil vorzusehen,
    Abscheiden von magnetischem Material auf der Opferschicht (83), um das bewegliche magnetische Stück (22) und die Fluss-Rekuperationseinrichtungen (40) zu realisieren, und dann Ätzen des magnetischen Materials, um sie abzugrenzen,
    Beseitigen der Opferschicht (83) unter dem beweglichen magnetischen Stück (22), um es frei zu machen und den Hauptspalt (29) zu realisieren.
  22. Relais, dadurch gekennzeichnet, dass es einen magnetischen Betätiger nach einem der Ansprüche 1 bis 20 umfasst.
  23. Umschalter, dadurch gekennzeichnet, dass er wenigstens einen magnetischen Betätiger nach einem der Ansprüche 1 bis 20 umfasst, sodass er mehrere Hauptspalte (29.1, 29.2) aufweist.
  24. Pumpe, dadurch gekennzeichnet, dass sie wenigstens einen magnetischen Betätiger nach einem der Ansprüche 1 bis 16 umfasst, bei dem das bewegliche magnetische Stück (22) fest mit einer Membran (120) verbunden ist, die dazu beiträgt, einen Hohlraum (122) abzugrenzen, um ein Fluid fließen zu lassen.
EP02758514A 2001-06-25 2002-06-24 Magnetischer betätiger mit vermindertem zeitverhalten Expired - Fee Related EP1399938B1 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
FR0108324A FR2826504B1 (fr) 2001-06-25 2001-06-25 Actionneur magnetique a temps de reponse reduit
FR0108324 2001-06-25
PCT/FR2002/002176 WO2003001548A1 (fr) 2001-06-25 2002-06-24 Actionneur magnetique a temps de reponse reduit

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EP1399938B1 true EP1399938B1 (de) 2005-01-26

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EP (1) EP1399938B1 (de)
DE (1) DE60202769T2 (de)
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WO (1) WO2003001548A1 (de)

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FR2824417B1 (fr) * 2001-05-03 2004-05-14 Commissariat Energie Atomique Actionneur magnetique bistable
JP2006223081A (ja) * 2005-01-14 2006-08-24 Matsushita Electric Ind Co Ltd アクチュエータ構造およびそれを用いたアクチュエータブロック、ならびに電子機器
US9284183B2 (en) 2005-03-04 2016-03-15 Ht Microanalytical, Inc. Method for forming normally closed micromechanical device comprising a laterally movable element
US7839242B1 (en) * 2006-08-23 2010-11-23 National Semiconductor Corporation Magnetic MEMS switching regulator
US8665041B2 (en) * 2008-03-20 2014-03-04 Ht Microanalytical, Inc. Integrated microminiature relay
US8378766B2 (en) * 2011-02-03 2013-02-19 National Semiconductor Corporation MEMS relay and method of forming the MEMS relay
EP2492928A3 (de) * 2011-02-22 2017-08-30 ASML Netherlands BV Elektromagnetisches Stellglied, Gestellvorrichtung und lithografische Vorrichtung
EP2963497B1 (de) * 2014-06-30 2019-10-16 Dr. Johannes Heidenhain GmbH Antrieb für einen XY-Tisch sowie XY-Tisch
FR3050339B1 (fr) 2016-04-15 2020-08-28 Enerbee Generateur d'electricite comprenant un convertisseur magneto-electrique et son procede de fabrication

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JPH0287435A (ja) * 1988-09-22 1990-03-28 Fujitsu Ltd 有極電磁継電器
US5847631A (en) * 1995-10-10 1998-12-08 Georgia Tech Research Corporation Magnetic relay system and method capable of microfabrication production
US6094116A (en) * 1996-08-01 2000-07-25 California Institute Of Technology Micro-electromechanical relays
US6124650A (en) * 1999-10-15 2000-09-26 Lucent Technologies Inc. Non-volatile MEMS micro-relays using magnetic actuators

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EP1399938A1 (de) 2004-03-24
FR2826504B1 (fr) 2003-09-12
DE60202769D1 (de) 2005-03-03
DE60202769T2 (de) 2006-01-12
FR2826504A1 (fr) 2002-12-27
US6859122B2 (en) 2005-02-22
US20040246082A1 (en) 2004-12-09
WO2003001548A1 (fr) 2003-01-03

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