EP1537056A1 - Schutzschicht sowie verfahren und anordnung zur herstellung von schutzschichten - Google Patents

Schutzschicht sowie verfahren und anordnung zur herstellung von schutzschichten

Info

Publication number
EP1537056A1
EP1537056A1 EP03757837A EP03757837A EP1537056A1 EP 1537056 A1 EP1537056 A1 EP 1537056A1 EP 03757837 A EP03757837 A EP 03757837A EP 03757837 A EP03757837 A EP 03757837A EP 1537056 A1 EP1537056 A1 EP 1537056A1
Authority
EP
European Patent Office
Prior art keywords
coating
layer
protective layer
metal
oxide
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP03757837A
Other languages
German (de)
English (en)
French (fr)
Inventor
Christoph MÖLLE
Lars Bewig
Frank Koppe
Thomas Küpper
Stefan Geisler
Stefan Bauer
Jürgen DZICK
Lutz Klippe
Christian Henn
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Schott AG
Original Assignee
Schott AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Schott AG filed Critical Schott AG
Publication of EP1537056A1 publication Critical patent/EP1537056A1/de
Withdrawn legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/20—Filters
    • G02B5/28—Interference filters
    • G02B5/285—Interference filters comprising deposited thin solid films
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
    • C03C17/3411—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions with at least two coatings of inorganic materials
    • C03C17/3417—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions with at least two coatings of inorganic materials all coatings being oxide coatings
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
    • C03C17/36—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/0021—Reactive sputtering or evaporation
    • C23C14/0036—Reactive sputtering
    • C23C14/0073—Reactive sputtering by exposing the substrates to reactive gases intermittently
    • C23C14/0078—Reactive sputtering by exposing the substrates to reactive gases intermittently by moving the substrates between spatially separate sputtering and reaction stations
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/02—Pretreatment of the material to be coated
    • C23C14/021—Cleaning or etching treatments
    • C23C14/022—Cleaning or etching treatments by means of bombardment with energetic particles or radiation
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34—Sputtering
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
    • C23C28/04—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings of inorganic non-metallic material
    • C23C28/042—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings of inorganic non-metallic material including a refractory ceramic layer, e.g. refractory metal oxides, ZrO2, rare earth oxides
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
    • C23C28/40—Coatings including alternating layers following a pattern, a periodic or defined repetition
    • C23C28/42—Coatings including alternating layers following a pattern, a periodic or defined repetition characterized by the composition of the alternating layers
    • G02B1/105—
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B1/00—Optical elements characterised by the material of which they are made; Optical coatings for optical elements
    • G02B1/10—Optical coatings produced by application to, or surface treatment of, optical elements
    • G02B1/14—Protective coatings, e.g. hard coatings
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C2217/00—Coatings on glass
    • C03C2217/70—Properties of coatings
    • C03C2217/73—Anti-reflective coatings with specific characteristics
    • C03C2217/734—Anti-reflective coatings with specific characteristics comprising an alternation of high and low refractive indexes
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C2218/00—Methods for coating glass
    • C03C2218/10—Deposition methods
    • C03C2218/15—Deposition methods from the vapour phase
    • C03C2218/154—Deposition methods from the vapour phase by sputtering
    • C03C2218/156—Deposition methods from the vapour phase by sputtering by magnetron sputtering
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C2218/00—Methods for coating glass
    • C03C2218/30—Aspects of methods for coating glass not covered above
    • C03C2218/32—After-treatment
    • C03C2218/322—Oxidation
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/12—All metal or with adjacent metals
    • Y10T428/12493—Composite; i.e., plural, adjacent, spatially distinct metal components [e.g., layers, joint, etc.]
    • Y10T428/12535—Composite; i.e., plural, adjacent, spatially distinct metal components [e.g., layers, joint, etc.] with additional, spatially distinct nonmetal component
    • Y10T428/12576—Boride, carbide or nitride component
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/12—All metal or with adjacent metals
    • Y10T428/12493—Composite; i.e., plural, adjacent, spatially distinct metal components [e.g., layers, joint, etc.]
    • Y10T428/12535—Composite; i.e., plural, adjacent, spatially distinct metal components [e.g., layers, joint, etc.] with additional, spatially distinct nonmetal component
    • Y10T428/12611—Oxide-containing component

Definitions

  • the invention relates to a protective layer, in particular to a hard material layer with high scratch resistance and temperature resistance, as well as a method and a device for producing protective layers.
  • the invention relates in particular to a protective layer for glass ceramic plates and a method and an arrangement for coating them, which preferably serve as cooking surfaces in hobs and have a protective layer on at least one side with an increased scratch resistance compared to the uncoated glass ceramic.
  • Modern hobs have a glass ceramic plate as the cooking surface, the glass ceramic plate being typically flat, but can also be deformed two or three-dimensionally. Both glass ceramic plates are known in writing or on the market, which are undecorated or decorated with temperature-stable colors, for example ceramic colors.
  • the cooking surface has individual cooking zones that are heated inductively, with electrically operated radiant heaters, with gas radiant heating elements or with an alternative heating system (e.g. DHS from SCHOTT).
  • Glass ceramic plates typically have a Mohs hardness with a degree of hardness of 5-6, which is comparable to that of steel, from which the cookware is typically made. Everyday use, ie parking or moving the cookware as well as cleaning the cooking surfaces with abrasive cleaning agents and sponges or a scraper, places a high mechanical load on the hob, which can lead to signs of wear on the hob.
  • the cooking surface is often used as an additional serving surface when cold.
  • the glass ceramic plates of the earlier generation had a typical orange peel-like surface structure. Although these panels were also scratched by the operations described above, they offered due to the additional ones
  • EP 0 716 270 B1 describes a cooking surface made of glass ceramic, on the top of which a decor is provided, which has a protective layer in the form of enamel flows or a silicate coating with an increased scratch resistance compared to the glass ceramic to avoid scratches or signs of wear, this protective layer ''
  • the glass ceramic cooktop is closed or covered as closed as possible, and a decor is printed on this protective layer or directly on the glass ceramic surface.
  • the protective layer is preferably formed from a dark material. This protective layer increases the mechanical resilience of the glass ceramic cooktops in principle, so that in use the cooktop is less susceptible to scratching than an unprotected cooktop, but the enamel flow or silicate protective layers disclosed in EP document do not yet offer optimal mechanical long-term protection.
  • the protective layer itself is a decor that is applied by means of screen printing.
  • These decor colors are usually based on the same flows as the decor colors used for the optical design. With regard to abrasion, they are therefore subject to the same restrictions.
  • the minimum dimension of such decors is of the order of 0.5 mm, which is definitely noticeable visually and is therefore disruptive in terms of design, especially when glasses or glass ceramics with smooth surfaces are desired.
  • DE 100 00 663 AI describes a method and the associated device with which an optically transparent body with a scratch protection layer made of A1 2 0 3 is provided over the entire surface by means of a modified PICVD method, in such a way that a hard material layer is formed since it has shown that the known methods cannot produce a sufficiently hard, dense, scratch-resistant and temperature-resistant layer, in particular made of aluminum oxide.
  • a disadvantage is the large outlay in terms of process, especially when large-area coatings are used. must be applied homogeneously. So far, inhomogeneities have been unavoidable, which also has a lasting impact on the visual appearance.
  • WO 96/31995 describes an inductively heated glass or glass ceramic cooktop with integrated coils, on which a hard material layer made of A1 2 0 3 is applied in a layer thickness between 50 to 200 ⁇ m by means of the plasma spraying technique.
  • the disadvantage here is that such thick layers are very rough. are and thus the usage properties, such as pot abrasion, hand abrasion and cleaning behavior are adversely affected.
  • the appearance of the cooking surfaces changes completely with such a layer. The surface appears matt and gray.
  • the hard material layers described here are suitable for applications in the room temperature range, but change their properties at high temperatures, such as are common, for example, on cooking surfaces, which makes them unsuitable for use at high temperatures.
  • a protective layer for cooking surfaces requires materials that are temperature-resistant up to 800 ° C and that can withstand the high thermo-mechanical stresses that occur between the glass ceramic and the protective layer.
  • Glass ceramic plate has become known as a cooking surface, which is provided with a transparent scratch protection layer, which, among other things. can be formed by a hard material layer.
  • the materials for this transparent layer include Metal oxides such as aluminum oxide, zirconium oxide, yttrium oxide,
  • the separation of the materials can, for example, according to this document by means of the SOL GEL technique, the CVD process, in particular the PICVD process and sputtering.
  • the layers are typically deposited amorphously or in a partially crystalline structure. Such layers can be disadvantageous when used for a long time in the hot areas or in the event of maximum thermal stress
  • the layers can discolor due to thermally induced compacting or become cloudy due to crystallization, with the result that the hot areas become optically conspicuous.
  • roughening in the range from 1 to 1000 nm can occur. The roughening itself can already cause an optical conspicuity, the recesses that are created additionally leading to difficult cleaning.
  • the problem of crystallization in the hot areas exacerbates mechanical failure of the scratch protection layer.
  • Rough and porous surfaces get dirty quickly and are difficult to clean. In addition, they are not optically clearly transparent, but are highly scattering and are not suitable for applications with optically appealing surfaces.
  • the scratch protection problems are similar to those of cooking surfaces.
  • the invention is based on the object of forming the protective layer of a body with industrially customary, economically advantageous coating processes in such a way that it is scratch and wear-resistant, remains structurally stable under thermal loads and does not change optically and has a permanently smooth and optically appealing surface.
  • the protective layer of a body according to the invention has at least one hard material layer, comprising a metal oxide and / or metal nitride and / or metal carbide and / or metal oxonitride and / or metal carbonitride and / or metal oxocarbonitride, at least one of these hard material layers being characterized by at least one intermediate layer different from the hard material layer
  • Metal oxide and / or metal nitride and / or metal carbide and / or metal oxonitride and / or metal carbonitride and / or metal oxocarbonitride is interrupted.
  • the hard material layers form a basic building block for the function and properties of the protective layer and are referred to below as functional layers.
  • the intermediate layers which interrupt the functional layers are very thin layers in relation to the functional layers.
  • the intermediate layers interrupt the morphology of the functional layer.
  • the positive properties of the layer can e.g. Hardness, temperature resistance and high scratch resistance, are reinforced.
  • the state of solid bodies with the arrangement of their particles in a three-dimensional spatial lattice with pronounced long-range order is generally referred to as crystalline.
  • the crystalline body here the functional layer, can consist of many small, irregularly arranged crystallites or the lattice structure can continue through the entire layer.
  • the crystalline columns that form in the functional layer with interrupting intermediate layers are column structures lying closely next to one another, which form predominantly perpendicular to the substrate. The crystals have primarily orientations that show only slight tendencies to broaden with columnar growth.
  • Typical layer thicknesses for scratch protection layers are in the range from 100 to 20,000 nm, typical coatings for glass and glass ceramics in the range up to 5,000 nm.
  • intermediate layers with a thickness of less than 10 nm, preferably from 1 to 5 nm, which contain the functional layers Intervals from 30 to 500 nm, preferably from 50 to 250 nm interrupt, particularly effective to achieve the desired properties such as Scratch and wear resistance, structural stability under thermal loads and optically non-changing, permanently smooth, optically appealing surfaces.
  • the functional layer and the interlayers interrupting it are preferably designed such that the lateral extension of the columns is less than 1 ⁇ m. In a particularly advantageous embodiment, the lateral extent of the columns is less than 200 nm.
  • the densely packed column structures also make it possible to achieve largely unimpeded optical transmission and to avoid disruptive effects from light scattering.
  • functional layers according to the invention made of metal oxides, in particular of zirconium oxide, with a stabilizing component of 0.5 to 50 mol% Y 2 0 3 , preferably 1 to 10 mol% Y 2 0 3 and particularly preferably 1.0 to 7.5 mol% Y 2 0 3 ⁇ with intermediate layers of silicon oxide, especially for transparent, optically particularly appealing and highly temperature-stable (up to max. 800 ° C) protective layers are suitable.
  • intermediate layers made of zirconium nitride are used.
  • the zirconium nitride can be converted into zirconium oxide by means of a temperature aftertreatment step.
  • the intermediate layer thus has the same refractive index as the functional layer and is not optically effective regardless of its thickness.
  • Another advantage is that the reactive deposition of the layers only requires a reactive gas change.
  • zircon can also be replaced by other metals.
  • n in the range from 1.55 n n 2,5 2.50 can be set by adjusting the quantitative ratio of titanium to aluminum and, if necessary, adapted to that of a functional layer.
  • Intermediate layers of this type offer the possibility of varying the layer thickness of the intermediate layers, since they have no influence on the optical appearance in relation to the functional layer.
  • intermediate layers offer the possibility, within narrow limits, of specifically influencing the visual appearance.
  • intermediate layers can be selected that differ from the functional layer
  • the thickness is selected so that they can be optically active. By varying the distances, further effects can be achieved. There is also the possibility that the protective layers have further hard material layers, in particular transparent hard material layers.
  • Hard material layers made of metal oxide and / or metal nitride and / or metal carbide and / or metal oxonitride and / or metal carbonitride and / or metal oxocarbonitride have different layer morphologies and properties depending on the process conditions. In order to achieve good temperature resistance, the layer should be grown as crystalline as possible.
  • the interruption with very thin intermediate layers, preferably less than 10 nm, at intervals of 30 to 500 nm, preferably from 50 to 250 nm, enables a dense columnar, preferably dense columnar, crystalline growth of the functional layers in narrow columnar structures, the columns only show slight tendencies towards broadening, preferably have on average only a lateral extent of less than 200 nm. This gives these hard material layers a dense, smooth and visually appealing surface and is structurally stable under mechanical and thermal loads.
  • the protective layers according to the invention are for coating a wide variety of bodies, which are above all high
  • Scratch resistance and temperature resistance must be suitable. Furthermore, they enable an attractive visual appearance and, depending on the layer material, also transparency. They are particularly suitable, but not limited to, as protective layers for glass, glass ceramic or bodies made from other non-metallic crystalline materials. For example, intermediate layers can be chosen so that they are not optically effective in optical layer systems and improve the structural, mechanical and thermal properties of optical layer systems.
  • the protective layer is particularly advantageously suitable for coating glass ceramic cooktops.
  • the focus here is on requirements of high scratch resistance, temperature resistance and a visually appealing appearance, which can be met with the coating according to the invention.
  • the glass ceramic cooking surfaces or other bodies to be coated can be additionally decorated below or within the protective layer.
  • the glass ceramic cooking surfaces can also be decorated above the protective layer.
  • the method according to the invention for coating a body with a protective layer according to the invention essentially comprises providing the body and the laminates in a vacuum system and coating the body by means of a reactive physical vapor deposition process, wherein laminates are atomic
  • ⁇ are generated and grow as a functional layer in columnar structures, essentially perpendicular to the body surface on the body.
  • the growth of a functional layer is interrupted at least once by depositing a very thin intermediate layer which, unaffected by the functional layer that has already grown, has a different morphology than this, so that the tendency to widen columnar structures in the functional layer is interrupted.
  • Another method according to the invention for coating a body made of glass, glass ceramic or another non-metallic crystalline material, preferably for coating a cooking surface, with a protective layer according to the invention essentially comprises transferring the body into a vacuum system for coating immediately after its production and providing the laminates and coating the body by means of a reactive physical vapor deposition process, laminates being produced in atomic dimensions and growing on the body as a functional layer in columnar structures, essentially perpendicular to the body surface.
  • the growth of a functional layer is interrupted at least once by depositing a very thin intermediate layer, which, unaffected by the functional layer that has already grown, has a different morphology than this, so that the tendency to widen columnar structures in the functional layer is interrupted.
  • Physical vapor deposition processes with high energy inputs and process temperatures are particularly suitable for generating crystalline, column-like layer morphologies.
  • magnetron methods are particularly suitable for the coatings according to the invention. Magnetron sputtering systems enable high coating rates in the low pressure range with relatively low substrate heating and are easy to control in the • process parameters.
  • Evaporation processes with electron beam evaporators are also suitable for industrial production of layers, since good coating rates can also be achieved here and the process parameters can be mastered well.
  • a supporting bombardment with ions is additionally required here for coating processes according to the invention in order to obtain the required high energy inputs.
  • the energy of the ions of the supporting ion beam is between 1 to 2500 eV, preferably between 1 to 800 eV, and particularly preferably between 20 to 450 eV.
  • Another advantage of this method is that the ion source can be used simultaneously for cleaning and activating the substrate.
  • Metal oxides are particularly suitable for coating a body with transparent protective layers.
  • the layer source materials are then in solid form as metallic components or as metal oxides.
  • oxidic layers that were not completely oxidized due to the process and therefore have a disturbed crystal structure can be oxidized by a subsequent thermal treatment in an oxidizing atmosphere and thus healed.
  • Temperature treatment can be carried out in a recipient in which the coated body can be heated to temperatures up to 800 ° C., preferably to 400 ° C. to 700 ° C.
  • oxygen can be introduced into the recipient.
  • the oxygen partial pressures which are set are preferably between 10 ⁇ 2 and 1000 mbar.
  • the duration of the temperature treatment should be between 1 minute and 10 hours, preferably between 10 and 60 minutes.
  • the objects to be coated can be cleaned by using at least one suitable cleaning bath with subsequent drying in order to remove dirt from the surface to be coated.
  • a suitable cleaning bath with subsequent drying in order to remove dirt from the surface to be coated.
  • ions possibly include, for example, bombarding the substrate with ions from an ion source, "bathing" the sample in the plasma of a glow discharge), the energy of which is preferably in the range from 1 to 2500 eV, preferably from 50 to 1600 eV, and particularly preferably from 100 to 500 eV, which results in a particularly intensive cleaning of the surface from foreign atoms and adsorbates.
  • Useful cleaning times are between a few seconds and a few minutes.
  • Activation can also be carried out in a vacuum chamber by plasma treatment of the surface as described above. The cleaning and activation can then optionally be carried out in one process step. ⁇
  • the body to be coated Before and during coating, the body to be coated can be heated to the process temperature in the vacuum chamber. Suitable heating elements are installed in the vacuum chambers.
  • the body temperature can be selected between room temperature and 800 ° C. at the start of the process, preferably between 50 ° C. and 550 ° C., particularly preferably between 100 ° C. and 350 ° C.
  • the surface can be reworked in one or more polishing steps which are suitable for improving the low remaining surface roughness up to an R a value of 1 nm.
  • the coating of a body made of glass, glass ceramic or another non-metallic crystalline material, in particular a glass ceramic hotplate, with a protective layer, in particular with a protective layer according to the invention is achieved according to the invention with a coating system and with it via an entry lock (2.2) and substrate transfer station (2.1 ) directly connected manufacturing plant (1), in which the substrate (8) to be coated was produced immediately beforehand.
  • the coating system comprises at least one coating chamber (4.n), which is a vacuum chamber, these targets with the layer starting materials, excitation sources for producing layer starting materials in atomic dimensions, at least one process gas
  • the excitation source can be a magnetron sputtering source (13) or one or more electron beam evaporation sources. With these excitation sources, high coating rates for large-area coatings are possible. In particular with double magnetrons (MF magnetrons), the coating can be carried out with high precision and stability.
  • MF magnetrons double magnetrons
  • the coating system has a cleaning / activation chamber (3), which is a vacuum chamber and has at least one cleaning / activation ion beam source (11) for cleaning and / or activation of the substrate (8) between the entrance lock (2.2) and the coating chamber (4.1) is arranged and connected to them via shutter (7).
  • Layer starting materials it is possible either to arrange several targets A (14) in only one coating chamber (4.1) or to correspondingly arrange further coating chambers (4.n).
  • the coating system has an aftertreatment chamber (5), which is also a vacuum chamber and contains at least one oxygen supply valve (16) and heating elements (9) and is connected to the coating chamber (4.1) or a further coating chamber (Shutter (7)). 4.n) is connected.
  • an aftertreatment chamber (5) which is also a vacuum chamber and contains at least one oxygen supply valve (16) and heating elements (9) and is connected to the coating chamber (4.1) or a further coating chamber (Shutter (7)). 4.n) is connected.
  • the coating chambers (4.1, 4.n) and the cleaning / activation chamber (3) preferably contain heating elements (9) for heating the substrate (8) and realizing one optimal heating concept during the coating of the substrate (8).
  • exit lock (6.1) is connected to the last vacuum chamber in the processing chain via a shutter (7).
  • Figure 1 a magnetron sputtering system
  • protective layers in particular transparent, optically appealing, structurally and temperature-stable scratch protection layers, for example made of zirconium oxide in a temperature-stable crystal phase, in particular yttrium-zirconium oxide, can be applied to a glass ceramic hotplate over a large area and using an industrially manageable method ,
  • the substrate (8) for example a CERAN plate for cooktops with a dimension of 60 cm * 60 cm, is produced immediately after its production, following the last hot step of the ceramization
  • the coating system is a vertical system which enables the substrates (8) to be coated without a border.
  • the Substrates (8) are transferred individually to the coating system.
  • the substrate transfer station (2.1) After transferring a substrate (8) to the substrate transfer station (2.1), the latter is closed and a pressure of ⁇ 1 mbar is set. The substrate (8) is then transferred into the entrance lock (2.2) via a shutter (7). The entrance lock (2.2) is evacuated so that a pressure of ⁇ 10 ⁇ 2 mbar is set in it.
  • the further transfer of the substrate (8) from one process unit to the next takes place within the sputtering system via the shutter (7).
  • the substrate is then transferred to the cleaning / activation chamber (3).
  • the cleaning and activation chamber (3) is also a vacuum chamber in which there are heating elements (9) for heating the substrate (8) and cleaning / activation ion beam sources (11).
  • the substrate (8) can be cleaned in one step with the activation of the surface of the substrate (8).
  • the cleaning / activation chamber (3) is first evacuated to the process pressure ⁇ 5 * 10 "5 mbar and the substrate (8) is heated to a temperature of up to approximately 700 ° C. Since the substrate (8) directly after the last hot step the Ceramization was transferred to the coating, the heating to these high temperatures is possible with far less effort than with the known methods.
  • the first coating chamber (4.1) is also one
  • Vacuum chamber and is used for coating with a first starting material for a functional layer. This is followed by a further coating chamber (4.2). This serves to interrupt the coating with the functional layer, here the coating with the intermediate layer takes place. If the coating should include further layers of different starting materials or if the coating of several substrates (8) should run in parallel, further coating chambers (4.n) can also follow.
  • Magnetron sputter sources (13) arranged, the
  • Magnetron sputter sources (13) are.
  • the substrate (8) is kept at the desired process temperature with the heating elements (9).
  • the layer starting material of the target A (14) for the functional layer is metallic zirconium yttrium. This is atomized using the magnetron sputter sources (13).
  • the magnetron sputter sources (13) are MF magnetrons (length 1 m, 40 kHz, 20 kW), which are operated in transition mode.
  • the process gas inlet valve (15) is integrated in the magnetron sputter source (13) and consists of several valves which are distributed over the length of the MF magnetron.
  • the supply of oxygen causes the magnetron sputter source (13) to work in the so-called “transition mode” by means of a special control known to the person skilled in the art.
  • Oxygen is supplied via the process gas inlet valves (15), so that an yttrium Forms zirconium oxide film on the substrate (8), the screens (10) defining a coating window over the entire length of the substrate (8) with a width of 40 cm.
  • the substrate (8) is then homogeneously coated with a layer thickness of 150 nm by suitable movements over the coating window. Then the transfer takes place in the second coating chamber (4.2), in which an intermediate layer made of silicon oxide with a layer thickness of 5 nm
  • a pulsed DC magnetron (pulse frequency 100 kHz, power 10 kW) with a silicon target B (12) is used as the magnetron sputter source (13).
  • the silicon oxide film is formed by suitable oxygen additions via a process gas inlet valve (15).
  • the process gas inlet valve (15) is also coupled to the magnetron sputter source (13).
  • the substrate (8) is transferred back into the first coating chamber (4.1) and the coating process with yttrium zirconium oxide is continued.
  • the substrate (8) is transferred into the aftertreatment chamber (5).
  • the aftertreatment chamber (5) is a vacuum chamber with
  • the substrate (8) is heated to temperatures> 400 ° C. and an increased oxygen partial pressure of> 10 "2 mbar is set in the chamber in order to ensure complete oxidation of the layer.
  • the substrate (8) is transferred to the exit lock (6.1), which is then aerated to atmospheric pressure.
  • the finished coated substrate (8) leaves the coating system via the substrate delivery station (6.2).
  • the CERAN cooktop coated in this way has a significantly increased scratch resistance compared to an uncoated cooktop.
  • the coating is resistant to mechanical loads, structurally stable at temperatures up to 800 ° C and has an attractive optical design.

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
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  • Metallurgy (AREA)
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  • General Chemical & Material Sciences (AREA)
  • Geochemistry & Mineralogy (AREA)
  • Optics & Photonics (AREA)
  • General Physics & Mathematics (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Ceramic Engineering (AREA)
  • Inorganic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
  • Surface Treatment Of Glass (AREA)
  • Optical Elements Other Than Lenses (AREA)
  • Optical Filters (AREA)
  • Laminated Bodies (AREA)
  • Application Of Or Painting With Fluid Materials (AREA)
  • Chemical Vapour Deposition (AREA)
  • Chemical Treatment Of Metals (AREA)
  • Chemically Coating (AREA)
  • Formation And Processing Of Food Products (AREA)
EP03757837A 2002-09-14 2003-09-13 Schutzschicht sowie verfahren und anordnung zur herstellung von schutzschichten Withdrawn EP1537056A1 (de)

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DE10242848 2002-09-14
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EP03750543A Withdrawn EP1546053A1 (de) 2002-09-14 2003-09-13 Titan-aluminium-oxidschicht umfassendes schichtsystem
EP10004380A Ceased EP2243751A3 (de) 2002-09-14 2003-09-13 Beschichteter Gegenstand
EP03757838A Expired - Lifetime EP1537057B1 (de) 2002-09-14 2003-09-13 Verfahren zur herstellung von schichten und schichtsystemen sowie beschichtetes substrat
EP03757837A Withdrawn EP1537056A1 (de) 2002-09-14 2003-09-13 Schutzschicht sowie verfahren und anordnung zur herstellung von schutzschichten
EP03757836A Ceased EP1537055A1 (de) 2002-09-14 2003-09-13 Beschichteter gegenstand

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EP10004380A Ceased EP2243751A3 (de) 2002-09-14 2003-09-13 Beschichteter Gegenstand
EP03757838A Expired - Lifetime EP1537057B1 (de) 2002-09-14 2003-09-13 Verfahren zur herstellung von schichten und schichtsystemen sowie beschichtetes substrat

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CN (3) CN100465116C (ko)
AT (1) ATE394353T1 (ko)
AU (4) AU2003273874A1 (ko)
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KR100909905B1 (ko) 2009-07-30
WO2004026782A1 (de) 2004-04-01
EP1537057B1 (de) 2008-05-07
AU2003273872A1 (en) 2004-04-08
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JP2005538255A (ja) 2005-12-15
EP1546053A1 (de) 2005-06-29
CN100575290C (zh) 2009-12-30
WO2004026786A1 (de) 2004-04-01
US20060093840A1 (en) 2006-05-04
EP2243751A2 (de) 2010-10-27
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EP1537055A1 (de) 2005-06-08
KR20050057312A (ko) 2005-06-16
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