EP1525947B1 - Verfahren zum abschliessenden Polieren - Google Patents

Verfahren zum abschliessenden Polieren Download PDF

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Publication number
EP1525947B1
EP1525947B1 EP03292647A EP03292647A EP1525947B1 EP 1525947 B1 EP1525947 B1 EP 1525947B1 EP 03292647 A EP03292647 A EP 03292647A EP 03292647 A EP03292647 A EP 03292647A EP 1525947 B1 EP1525947 B1 EP 1525947B1
Authority
EP
European Patent Office
Prior art keywords
polishing
finishing
polished
polishing element
deformable
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
EP03292647A
Other languages
English (en)
French (fr)
Other versions
EP1525947A1 (de
Inventor
Jean-Jacques Fermé
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Europeenne de Systemes Optiques S E S O Ste
Original Assignee
Europeenne de Systemes Optiques S E S O Ste
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Europeenne de Systemes Optiques S E S O Ste filed Critical Europeenne de Systemes Optiques S E S O Ste
Priority to DE60304579T priority Critical patent/DE60304579T2/de
Priority to AT03292647T priority patent/ATE322957T1/de
Priority to DK03292647T priority patent/DK1525947T3/da
Priority to EP03292647A priority patent/EP1525947B1/de
Priority to ES03292647T priority patent/ES2262958T3/es
Priority to US10/705,017 priority patent/US20050101226A1/en
Publication of EP1525947A1 publication Critical patent/EP1525947A1/de
Application granted granted Critical
Publication of EP1525947B1 publication Critical patent/EP1525947B1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B13/00—Machines or devices designed for grinding or polishing optical surfaces on lenses or surfaces of similar shape on other work; Accessories therefor
    • B24B13/015—Machines or devices designed for grinding or polishing optical surfaces on lenses or surfaces of similar shape on other work; Accessories therefor of television picture tube viewing panels, headlight reflectors or the like
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B13/00—Machines or devices designed for grinding or polishing optical surfaces on lenses or surfaces of similar shape on other work; Accessories therefor
    • B24B13/02—Machines or devices designed for grinding or polishing optical surfaces on lenses or surfaces of similar shape on other work; Accessories therefor by means of tools with abrading surfaces corresponding in shape with the lenses to be made
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00—Lapping machines or devices; Accessories

Definitions

  • the present invention relates to a polishing method of finishing a surface with a polishing element and an abrasive.
  • polishing element for example a felt
  • abrasive for example of colloidal silica
  • the technique generally used is to stick the felt on a metal tool possibly interposing a flexible material such as foam. This technique has the disadvantage of deforming the surface to be polished, so that the results obtained are not optimal.
  • US-A-2002102925 discloses a method of finishing polishing a surface with a polishing member and a deformable support.
  • the support is brought into contact with the surface to be polished to conform to the contour, then the polishing element is interposed between the surface of the cured support and the surface to be polished and set in motion with respect to these two surfaces so as to perform finishing polishing.
  • the subject of the present invention is a method which makes it possible to remedy at least in part the aforementioned problem.
  • Said material is advantageously deformable by creep and / or curable. It may for example be pitch which is heated to a temperature which allows it to creep and which, after b and before c, is then cooled to obtain a hardening, or else an adhesive which is in the form of a gel which, after b, and before c is cured for example by polymerization or application of a particular ultraviolet radiation.
  • the material can also be plaster ..
  • the polishing element may be a felt or any polishing material suitable for finishing polishing leading to low roughness (of the order of 1 ⁇ to a few ⁇ for example).
  • the polishing material is advantageously carried by a polishing support.
  • Finishing polishing may in particular be carried out using a machine providing a relative translation displacement between the polishing element and the surface to be polished in two perpendicular directions and possibly rotating about an axis parallel to a said perpendicular directions.
  • the finishing polishing is particularly applicable to the case of surfaces having a generatrix, the surface being arranged in such a way that the direction of the generator is parallel to that of the two aforementioned directions which is parallel to the axis of rotation.
  • the method is particularly applicable to surfaces which before polishing finishing, have been previously subjected to a pre-polishing (or coarse polishing) and polishing itself.
  • the surface has a roughness of, for example, between 3 ⁇ and 15 ⁇ , then after finishing polishing, the roughness can be between 1 ⁇ and 5 ⁇ , and more particularly between 1 ⁇ and 3 ⁇ for glass, silica, silicon and ceramic surfaces (even between 1 ⁇ and 2 ⁇ for glass or silica surfaces) and between 3 ⁇ and 5 ⁇ for a nickel surface coated with a metal surface.
  • the invention relates to finishing polishing surfaces of low roughness (including mirrors) whose shape is for example rectangular. It is based on the use of polishing machines with kinematics with 2 perpendicular linear axes.
  • the shapes generated on surfaces can be planes, spheres, cylinders according to their large dimension (southern cylinder) or their small dimension (sagittal cylinder), mirrors with an elliptic or parabolic southern profile, parabolic or elliptical mirrors representing a piece a mirror of revolution.
  • One of the applications of these surfaces is the production of mirrors used to shape and focus the X-ray beams emitted by the synchrotron or free-electron laser light sources.
  • the polishing element 2 (of thickness for example between 0.1 mm and 2 mm) is glued on of the pitch 3 which is secured to a support 4 for example cylindrical which serves as a polishing tool.
  • the polishing element 2 may be a porous material such as a felt, in particular a microcellular polyurethane foam from RHODES (Bierkeek - Belgium) or a porous synthetic material ("Finishing Pad") from the Company -RODEL, or polishing supports (or "drops -") of the BUEHLER Company.
  • the tool 4 After heating the pitch until it gives a viscosity that allows it to flow without sinking (for example by heating it to a temperature of the order of 60 ° C.), the tool 4 is pressed onto a surface to be polished. the optical part 1 with sufficient pressure so that the creep deformation of the pitch allows the felt 2 in contact with the surface 6 to marry locally the shape of the surface 6.
  • the felt 2 which can be in one or more pieces a preferably a surface 5 equal to plus or minus 20% to that of the surface 6.
  • the pressure P applied during finishing polishing is of the order of 5 to 100 grams / cm 2 .
  • FIG. 1b illustrates the method in the case of a plane surface or a mirror having a generatrix G in the plane of section.
  • FIG. 2 represents a machine that can be used for carrying out the finishing polishing process, as well as for the preceding steps of grinding, pre-polishing and polishing proper.
  • Each of the sliders carries an arm 17 and 18 extending for example in a direction Y perpendicular to the direction X, with a height adjustment 17 ', 18' along Z (perpendicular to X and Y).
  • Each of the arms has a housing 19 and 20 for receiving an axis of rotation 21 and 22 of a workpiece holder 23 carrying the part 1
  • the tool 4 is disposed on a support 25 integral with a table 27 having means for translating the tool 4 and thus the felt 2 in the direction Y perpendicular to the direction X.
  • These translation means are for example slides 26.
  • the polishing rates in each of the X and Y directions can be chosen for example between 0.05 m / s and 0.5 m / s.
  • Figures 3a and 3b on the one hand and 4a and 4b on the other hand illustrate two modes of implementation of finishing polishing (after hardening of the support of deformable material such as pitch or glue).
  • the displacement along X (for example between 5 and 200 mm) allows a polishing parallel to the direction of the generatrices of the surface, while the translational movement along Y (for example between 1 and 100 mm) and the rotation along the axis (21, 22) allows the surface 6 to be polished to follow by turning the polishing element 2 as the displacement along Y.
  • the combination of these three movements (X translation, Y translation and rotation) allows to ensure the polishing of the surface on its contour and throughout its length.
  • the part 1 of cylindrical or planar section is carried by the workpiece holder 23 and the tool 4 is integral with the support 25.
  • the cylindrical or plane part 1 is integral with the support 25 and it is the tool 4 which is carried by the holder 23.
  • Shaping Element 2 improves performance over the surface with the nearest generator.

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Grinding And Polishing Of Tertiary Curved Surfaces And Surfaces With Complex Shapes (AREA)
  • Polishing Bodies And Polishing Tools (AREA)
  • Mechanical Treatment Of Semiconductor (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)

Claims (13)

  1. Verfahren zum Feinpolieren einer Oberfläche (6) mit Hilfe eines Polierelementes (2) und eines Abrasivs, dadurch gekennzeichnet, daß es anwendet:
    a) vor dem Polieren das Aufkleben des Polierelementes (2) auf einen Träger (3, 4) aus einem permanent verformbaren Material, und;
    b) Anwenden eines Druckes auf den verformbaren Träger (3, 4), sobald sich das Polierelement (2) in Anlage an der zu polierenden Oberfläche (6) befindet, wodurch das Polierelement (2) so geformt wird, daß es sich an eine Kontur der Oberfläche (6) anpaßt,
    c) Durchführen des Feinpolierens mit Hilfe des auf diese Weise geformten Polierelementes (2).
  2. Verfahren nach Anspruch 1, dadurch gekennzeichnet, daß das Material (3) durch Fließen verformbar und/oder aushärtbar ist.
  3. Verfahren nach Anspruch 2, dadurch gekennzeichnet, daß das Material (3) Pech ist, das auf eine Temperatur erwärmt wird, die sein Fließen ermöglicht, und das nach dem Formen des Polierelementes (2) anschließend abgekühlt wird, um eine Aushärtung zu erzielen.
  4. Verfahren nach Anspruch 2, dadurch gekennzeichnet, daß das Material (3) ein Klebstoff vom Gel-Typ ist, das nach dem Formen des Polierelementes (2) beispielsweise durch Polymerisieren oder durch Anwenden einer Strahlung, insbesondere Ultraviolett-Strahlung, ausgehärtet wird.
  5. Verfahren nach Anspruch 2 dadurch gekennzeichnet, daß das Material (3) Gips ist.
  6. Verfahren nach einem der vorhergehenden Ansprüche, dadurch gekennzeichnet, daß das Polierelement (2) ein Filz ist.
  7. Verfahren nach einem der vorhergehenden Ansprüche, dadurch gekennzeichnet, daß das verformbare Material (3) von einem Polierträger (4) getragen ist.
  8. Verfahren nach einem der vorhergehenden Ansprüche, dadurch gekennzeichnet, daß das Feinpolieren mit Hilfe einer Maschine durchgeführt wird, die eine Bewegungsvorrichtung aufweist, welche eine Relativbewegung zwischen dem Polierelement (2) und der zu polierenden Oberfläche (6) in zwei zueinander senkrechten Richtungen (X, Y) ausführt.
  9. Verfahren nach Anspruch 8, dadurch gekennzeichnet, daß die Bewegungsvorrichtung dazu ausgelegt ist, des weiteren eine Relativdrehbewegung um eine Achse (21, 22) zu erzeugen, die zu einer der beiden zueinander senkrechten Richtungen parallel ist.
  10. Verfahren nach einem der Ansprüche 8 oder 9, dadurch gekennzeichnet, daß die Oberfläche (6) eine Generatrix aufweist, deren Richtung zu einer der beiden zueinander senkrechten Richtungen parallel ist.
  11. Verfahren, dadurch gekennzeichnet, daß die Oberfläche (6), an der das Feinpolieren vorgenommen wird, vorausgehend
    - einem Vorpolieren oder Grobpolieren
    - einem Polieren
    unterzogen wurde
  12. Verfahren nach Anspruch 11, dadurch gekennzeichnet, daß die Oberfläche (6) nach dem Polieren eine Rauhigkeit von zwischen 3 Å und 15 Å aufweist, und nach dem Feinpolieren eine Rauhigkeit von zwischen 1 Å und 5 Å aufweist
  13. Verfahren nach Anspruch 12, dadurch gekennzeichnet, daß die Rauhigkeit nach dem Feinpolieren bei Oberflächen (6) aus Glas, aus Silica, aus Silizium und aus Keramik zwischen 1 Å und 3 Å liegt, und bei einer Oberfläche (6) aus Nickel, die eine metallische Oberfläche bedeckt, zwischen 3 Å und 5 Å liegt.
EP03292647A 2003-10-23 2003-10-23 Verfahren zum abschliessenden Polieren Expired - Lifetime EP1525947B1 (de)

Priority Applications (6)

Application Number Priority Date Filing Date Title
DE60304579T DE60304579T2 (de) 2003-10-23 2003-10-23 Verfahren zum abschliessenden Polieren
AT03292647T ATE322957T1 (de) 2003-10-23 2003-10-23 Verfahren zum abschliessenden polieren
DK03292647T DK1525947T3 (da) 2003-10-23 2003-10-23 Fremgangsmåde ved slutpolering
EP03292647A EP1525947B1 (de) 2003-10-23 2003-10-23 Verfahren zum abschliessenden Polieren
ES03292647T ES2262958T3 (es) 2003-10-23 2003-10-23 Procedimiento de pulido de acabado.
US10/705,017 US20050101226A1 (en) 2003-10-23 2003-11-11 Finishing polishing method

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
EP03292647A EP1525947B1 (de) 2003-10-23 2003-10-23 Verfahren zum abschliessenden Polieren
US10/705,017 US20050101226A1 (en) 2003-10-23 2003-11-11 Finishing polishing method

Publications (2)

Publication Number Publication Date
EP1525947A1 EP1525947A1 (de) 2005-04-27
EP1525947B1 true EP1525947B1 (de) 2006-04-12

Family

ID=34712591

Family Applications (1)

Application Number Title Priority Date Filing Date
EP03292647A Expired - Lifetime EP1525947B1 (de) 2003-10-23 2003-10-23 Verfahren zum abschliessenden Polieren

Country Status (6)

Country Link
US (1) US20050101226A1 (de)
EP (1) EP1525947B1 (de)
AT (1) ATE322957T1 (de)
DE (1) DE60304579T2 (de)
DK (1) DK1525947T3 (de)
ES (1) ES2262958T3 (de)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7988534B1 (en) * 2004-05-19 2011-08-02 Sutton Stephen P Optical polishing pitch formulations
DE102008043600A1 (de) * 2008-11-10 2010-05-12 Carl Zeiss Smt Ag Glättungswerkzeug und Verfahren zum Glätten einer optischen Oberfläche
TWI584914B (zh) * 2013-07-22 2017-06-01 佳能股份有限公司 元件製造方法及拋光裝置
CN109079646A (zh) * 2018-08-10 2018-12-25 杨斯晨 一种陶瓷加工用釉面抛光装置

Family Cites Families (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US1651181A (en) * 1924-12-06 1927-11-29 Continental Optical Corp Tool for treating ophthalmic lenses and process of making same
US2822647A (en) * 1955-12-16 1958-02-11 Younger Mfg Company Method and apparatus for forming bifocal lenses
US3583111A (en) * 1966-08-22 1971-06-08 David Volk Lens grinding apparatus
US3594963A (en) * 1969-07-17 1971-07-27 Univis Inc Grinding pad
US4979337A (en) * 1986-10-03 1990-12-25 Duppstadt Arthur G Polishing tool for contact lenses and associated method
US4989316A (en) * 1987-03-09 1991-02-05 Gerber Scientific Products, Inc. Method and apparatus for making prescription eyeglass lenses
US4974368A (en) * 1987-03-19 1990-12-04 Canon Kabushiki Kaisha Polishing apparatus
DE3801969A1 (de) * 1988-01-23 1989-07-27 Zeiss Carl Fa Verfahren und vorrichtung zum laeppen bzw. polieren optischer flaechen
DE3911986A1 (de) * 1989-04-12 1990-10-18 Benzinger Carl Gmbh & Co Verfahren und vorrichtung zur formgebenden bearbeitung von werkstuecken
US5205083A (en) * 1991-10-24 1993-04-27 Pettibone Dennis R Method and apparatus for polishing optical lenses
DE4442181C1 (de) * 1994-11-26 1995-10-26 Loh Optikmaschinen Ag Werkzeug zur Feinbearbeitung optischer Flächen
JP2003503223A (ja) * 1999-06-25 2003-01-28 コーニング インコーポレイテッド 酸化セリウムを用いる微細リソグラフィ用フッ化物結晶光学レンズ及びプリフォームの研磨
WO2001050464A1 (en) * 2000-01-05 2001-07-12 Schott Glass Technologies, Inc. Glass substrates for magnetic media and magnetic media based on such glass substrates
US6589102B2 (en) * 2001-01-30 2003-07-08 Larsen Equipment Design, Inc. Surface polishing method and apparatus
FR2843711B1 (fr) * 2002-08-22 2005-05-13 Europ De Systemes Optiques Soc Procede de polissage de finition

Also Published As

Publication number Publication date
ES2262958T3 (es) 2006-12-01
ATE322957T1 (de) 2006-04-15
DE60304579D1 (de) 2006-05-24
US20050101226A1 (en) 2005-05-12
DE60304579T2 (de) 2007-05-10
EP1525947A1 (de) 2005-04-27
DK1525947T3 (da) 2006-07-31

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