EP1525947B1 - Method for finish-polishing - Google Patents

Method for finish-polishing Download PDF

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Publication number
EP1525947B1
EP1525947B1 EP03292647A EP03292647A EP1525947B1 EP 1525947 B1 EP1525947 B1 EP 1525947B1 EP 03292647 A EP03292647 A EP 03292647A EP 03292647 A EP03292647 A EP 03292647A EP 1525947 B1 EP1525947 B1 EP 1525947B1
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EP
European Patent Office
Prior art keywords
polishing
finishing
polished
polishing element
deformable
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Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
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EP03292647A
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German (de)
French (fr)
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EP1525947A1 (en
Inventor
Jean-Jacques Fermé
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Europeenne de Systemes Optiques S E S O Ste
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Europeenne de Systemes Optiques S E S O Ste
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Application filed by Europeenne de Systemes Optiques S E S O Ste filed Critical Europeenne de Systemes Optiques S E S O Ste
Priority to ES03292647T priority Critical patent/ES2262958T3/en
Priority to AT03292647T priority patent/ATE322957T1/en
Priority to DE60304579T priority patent/DE60304579T2/en
Priority to DK03292647T priority patent/DK1525947T3/en
Priority to EP03292647A priority patent/EP1525947B1/en
Priority to US10/705,017 priority patent/US20050101226A1/en
Publication of EP1525947A1 publication Critical patent/EP1525947A1/en
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Publication of EP1525947B1 publication Critical patent/EP1525947B1/en
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B13/00—Machines or devices designed for grinding or polishing optical surfaces on lenses or surfaces of similar shape on other work; Accessories therefor
    • B24B13/015—Machines or devices designed for grinding or polishing optical surfaces on lenses or surfaces of similar shape on other work; Accessories therefor of television picture tube viewing panels, headlight reflectors or the like
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B13/00—Machines or devices designed for grinding or polishing optical surfaces on lenses or surfaces of similar shape on other work; Accessories therefor
    • B24B13/02—Machines or devices designed for grinding or polishing optical surfaces on lenses or surfaces of similar shape on other work; Accessories therefor by means of tools with abrading surfaces corresponding in shape with the lenses to be made
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00—Lapping machines or devices; Accessories

Definitions

  • the present invention relates to a polishing method of finishing a surface with a polishing element and an abrasive.
  • polishing element for example a felt
  • abrasive for example of colloidal silica
  • the technique generally used is to stick the felt on a metal tool possibly interposing a flexible material such as foam. This technique has the disadvantage of deforming the surface to be polished, so that the results obtained are not optimal.
  • US-A-2002102925 discloses a method of finishing polishing a surface with a polishing member and a deformable support.
  • the support is brought into contact with the surface to be polished to conform to the contour, then the polishing element is interposed between the surface of the cured support and the surface to be polished and set in motion with respect to these two surfaces so as to perform finishing polishing.
  • the subject of the present invention is a method which makes it possible to remedy at least in part the aforementioned problem.
  • Said material is advantageously deformable by creep and / or curable. It may for example be pitch which is heated to a temperature which allows it to creep and which, after b and before c, is then cooled to obtain a hardening, or else an adhesive which is in the form of a gel which, after b, and before c is cured for example by polymerization or application of a particular ultraviolet radiation.
  • the material can also be plaster ..
  • the polishing element may be a felt or any polishing material suitable for finishing polishing leading to low roughness (of the order of 1 ⁇ to a few ⁇ for example).
  • the polishing material is advantageously carried by a polishing support.
  • Finishing polishing may in particular be carried out using a machine providing a relative translation displacement between the polishing element and the surface to be polished in two perpendicular directions and possibly rotating about an axis parallel to a said perpendicular directions.
  • the finishing polishing is particularly applicable to the case of surfaces having a generatrix, the surface being arranged in such a way that the direction of the generator is parallel to that of the two aforementioned directions which is parallel to the axis of rotation.
  • the method is particularly applicable to surfaces which before polishing finishing, have been previously subjected to a pre-polishing (or coarse polishing) and polishing itself.
  • the surface has a roughness of, for example, between 3 ⁇ and 15 ⁇ , then after finishing polishing, the roughness can be between 1 ⁇ and 5 ⁇ , and more particularly between 1 ⁇ and 3 ⁇ for glass, silica, silicon and ceramic surfaces (even between 1 ⁇ and 2 ⁇ for glass or silica surfaces) and between 3 ⁇ and 5 ⁇ for a nickel surface coated with a metal surface.
  • the invention relates to finishing polishing surfaces of low roughness (including mirrors) whose shape is for example rectangular. It is based on the use of polishing machines with kinematics with 2 perpendicular linear axes.
  • the shapes generated on surfaces can be planes, spheres, cylinders according to their large dimension (southern cylinder) or their small dimension (sagittal cylinder), mirrors with an elliptic or parabolic southern profile, parabolic or elliptical mirrors representing a piece a mirror of revolution.
  • One of the applications of these surfaces is the production of mirrors used to shape and focus the X-ray beams emitted by the synchrotron or free-electron laser light sources.
  • the polishing element 2 (of thickness for example between 0.1 mm and 2 mm) is glued on of the pitch 3 which is secured to a support 4 for example cylindrical which serves as a polishing tool.
  • the polishing element 2 may be a porous material such as a felt, in particular a microcellular polyurethane foam from RHODES (Bierkeek - Belgium) or a porous synthetic material ("Finishing Pad") from the Company -RODEL, or polishing supports (or "drops -") of the BUEHLER Company.
  • the tool 4 After heating the pitch until it gives a viscosity that allows it to flow without sinking (for example by heating it to a temperature of the order of 60 ° C.), the tool 4 is pressed onto a surface to be polished. the optical part 1 with sufficient pressure so that the creep deformation of the pitch allows the felt 2 in contact with the surface 6 to marry locally the shape of the surface 6.
  • the felt 2 which can be in one or more pieces a preferably a surface 5 equal to plus or minus 20% to that of the surface 6.
  • the pressure P applied during finishing polishing is of the order of 5 to 100 grams / cm 2 .
  • FIG. 1b illustrates the method in the case of a plane surface or a mirror having a generatrix G in the plane of section.
  • FIG. 2 represents a machine that can be used for carrying out the finishing polishing process, as well as for the preceding steps of grinding, pre-polishing and polishing proper.
  • Each of the sliders carries an arm 17 and 18 extending for example in a direction Y perpendicular to the direction X, with a height adjustment 17 ', 18' along Z (perpendicular to X and Y).
  • Each of the arms has a housing 19 and 20 for receiving an axis of rotation 21 and 22 of a workpiece holder 23 carrying the part 1
  • the tool 4 is disposed on a support 25 integral with a table 27 having means for translating the tool 4 and thus the felt 2 in the direction Y perpendicular to the direction X.
  • These translation means are for example slides 26.
  • the polishing rates in each of the X and Y directions can be chosen for example between 0.05 m / s and 0.5 m / s.
  • Figures 3a and 3b on the one hand and 4a and 4b on the other hand illustrate two modes of implementation of finishing polishing (after hardening of the support of deformable material such as pitch or glue).
  • the displacement along X (for example between 5 and 200 mm) allows a polishing parallel to the direction of the generatrices of the surface, while the translational movement along Y (for example between 1 and 100 mm) and the rotation along the axis (21, 22) allows the surface 6 to be polished to follow by turning the polishing element 2 as the displacement along Y.
  • the combination of these three movements (X translation, Y translation and rotation) allows to ensure the polishing of the surface on its contour and throughout its length.
  • the part 1 of cylindrical or planar section is carried by the workpiece holder 23 and the tool 4 is integral with the support 25.
  • the cylindrical or plane part 1 is integral with the support 25 and it is the tool 4 which is carried by the holder 23.
  • Shaping Element 2 improves performance over the surface with the nearest generator.

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Grinding And Polishing Of Tertiary Curved Surfaces And Surfaces With Complex Shapes (AREA)
  • Polishing Bodies And Polishing Tools (AREA)
  • Mechanical Treatment Of Semiconductor (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)

Abstract

Workpiece polishing and finishing procedure uses polishing material with abrasive stuck permanently to deformable backing material : The procedure for polishing and finishing a workpiece (1) surface uses a polishing material (2) such as felt with an abrasive, e.g. cerium oxide, stuck permanently to a backing material (3), applying pressure to the latter when the polishing element is in contact with the surface to be polished so that the polishing material adapts to the shape of the polished surface. The backing material can be deformable by plastic flow and/or is hardenable. It can be of pitch that is heated and then cooled, or a gel-type adhesive that can be hardened by polymerisation or UV radiation.

Description

La présente invention a pour objet un procédé de polissage de finition d'une surface à l'aide d'un élément de polissage et d'un abrasif.The present invention relates to a polishing method of finishing a surface with a polishing element and an abrasive.

Il est déjà connu de réaliser un polissage de finition d'une surface à l'aide d'un élément de polissage, par exemple un feutre, et d'un abrasif, par exemple de la silice colloïdale. La technique généralement utilisée consiste à coller le feutre sur un outil métallique en intercalant éventuellement un matériau souple par exemple de type mousse. Cette technique présente l'inconvénient de déformer la surface à polir, ce qui fait que les résultats obtenus ne sont pas optimaux.It is already known to carry out finishing polishing of a surface by means of a polishing element, for example a felt, and an abrasive, for example of colloidal silica. The technique generally used is to stick the felt on a metal tool possibly interposing a flexible material such as foam. This technique has the disadvantage of deforming the surface to be polished, so that the results obtained are not optimal.

Le document US-A-2002102925 divulgue un procédé de polissage de finition d'une surface à l'aide d'un élément de polissage et d'un support déformable. Dans une première étape, le support est mis en contact avec la surface à polir pour en épouser le contour, ensuite l'élément de polissage est interposé entre la surface du support durci et la surface à polir et mis en mouvement par rapport à ces deux surfaces de manière à effectuer un polissage de finition.US-A-2002102925 discloses a method of finishing polishing a surface with a polishing member and a deformable support. In a first step, the support is brought into contact with the surface to be polished to conform to the contour, then the polishing element is interposed between the surface of the cured support and the surface to be polished and set in motion with respect to these two surfaces so as to perform finishing polishing.

La présente invention a pour objet un procédé qui permette de remédier au moins en partie au problème précité.The subject of the present invention is a method which makes it possible to remedy at least in part the aforementioned problem.

L'invention concerne ainsi un procédé de polissage de finition d'une surface à l'aide d'un élément de polissage et d'un abrasif, caractérisé en ce qu'il met en oeuvre :

  • a) avant ledit polissage, le collage de l'élément de polissage sur un support en un matériau déformable de manière permanente et ;
  • b) l'application d'une pression sur le support déformable une fois que l'élément de polissage est en contact avec la surface à polir de sorte que l'élément de polissage soit mis en forme pour épouser un contour de ladite surface,
  • c) réaliser le polissage de finition à l'aide de l'élément de polissage ainsi mis en forme.
The invention thus relates to a method of finishing polishing a surface with the aid of a polishing element and an abrasive, characterized in that it uses:
  • a) prior to said polishing, bonding the polishing element on a support of permanently deformable material and;
  • b) applying a pressure on the deformable support once the polishing element is in contact with the surface to be polished so that the polishing element is shaped to fit a contour of said surface,
  • c) polishing finishing with the polishing element thus shaped.

Ledit matériau est avantageusement déformable par fluage et/ou durcissable. Il peut s'agir par exemple de poix qui est chauffée à une température qui permet son fluage et qui, après b et avant c, est ensuite refroidie pour obtenir un durcissement, ou bien encore d'une colle qui se présente sous forme d'un gel et qui, après b, et avant c est durcie par exemple par polymérisation ou application d'un rayonnement notamment ultra-violet. Le matériau peut être également du plâtre..Said material is advantageously deformable by creep and / or curable. It may for example be pitch which is heated to a temperature which allows it to creep and which, after b and before c, is then cooled to obtain a hardening, or else an adhesive which is in the form of a gel which, after b, and before c is cured for example by polymerization or application of a particular ultraviolet radiation. The material can also be plaster ..

L'élément de polissage peut être un feutre ou tout matériau de polissage convenant à un polissage de finition conduisant à de faibles rugosités (de l'ordre de 1Å à quelques Å par exemple). Le matériau de polissage est avantageusement porté par un support de polissage.The polishing element may be a felt or any polishing material suitable for finishing polishing leading to low roughness (of the order of 1Å to a few Å for example). The polishing material is advantageously carried by a polishing support.

Le polissage de finition peut être en particulier réalisé à l'aide d'une machine assurant un déplacement relatif de translation entre l'élément de polissage et la surface à polir selon deux directions perpendiculaires et éventuellement de rotation autour d'un axe parallèle à une desdites directions perpendiculaires. Le polissage de finition s'applique particulièrement bien au cas de surfaces ayant une génératrice, la surface étant disposée de manière telle que la direction de la génératrice soit parallèle à celle des deux directions précitées qui est parallèle à l'axe de rotation.Finishing polishing may in particular be carried out using a machine providing a relative translation displacement between the polishing element and the surface to be polished in two perpendicular directions and possibly rotating about an axis parallel to a said perpendicular directions. The finishing polishing is particularly applicable to the case of surfaces having a generatrix, the surface being arranged in such a way that the direction of the generator is parallel to that of the two aforementioned directions which is parallel to the axis of rotation.

Le procédé s'applique notamment à des surfaces qui avant polissage de finition, ont été préalablement soumises à un pré-polissage (ou polissage dit grossier) et à un polissage proprement dit.The method is particularly applicable to surfaces which before polishing finishing, have been previously subjected to a pre-polishing (or coarse polishing) and polishing itself.

Après le polissage proprement dit qui peut être réalisé notamment par toute technique connue, la surface présente une rugosité comprise par exemple entre 3Å et 15Å, alors après polissage de finition, la rugosité peut être comprise entre 1Å et 5Å, et plus particulièrement entre 1Å et 3Å pour des surfaces en verre, en silice, en silicium et en céramique (voire entre 1Å et 2Å pour des surfaces en verre ou en silice) et entre 3Å et 5Å pour une surface en nickel revêtant une surface métallique.After the actual polishing which can be carried out in particular by any known technique, the surface has a roughness of, for example, between 3Å and 15Å, then after finishing polishing, the roughness can be between 1Å and 5Å, and more particularly between 1Å and 3Å for glass, silica, silicon and ceramic surfaces (even between 1Å and 2Å for glass or silica surfaces) and between 3Å and 5Å for a nickel surface coated with a metal surface.

D'autres caractéristiques et avantages de l'invention apparaîtront mieux à la lecture de la description ci-après, donnée à titre d'exemple non limitatif, en liaison avec les dessins dans lesquels :

  • les figures 1a et 1b illustrent en coupe la mise en oeuvre du procédé de polissage de finition selon l'invention,
  • la figure 2 représente une machine assurant le polissage de finition d'une surface dans le cadre de la présente invention et les figures 3a et 3b d'une part et 4a et 4b d'autre part illustrent deux modes de mise en oeuvre de la machine.
Other features and advantages of the invention will appear better on reading the following description, given by way of non-limiting example, in conjunction with the drawings in which:
  • FIGS. 1a and 1b illustrate in section the implementation of the finishing polishing method according to the invention,
  • FIG. 2 represents a finishing polishing machine of a surface in the context of the present invention and FIGS. 3a and 3b on the one hand and 4a and 4b on the other hand illustrate two modes of implementation of the machine. .

L'invention se rapporte au polissage de finition de surfaces à basse rugosité (notamment des miroirs) dont la forme est par exemple rectangulaire. Il repose sur l'utilisation de machines de polissage ayant une cinématique à 2 axes linéaires perpendiculaires.The invention relates to finishing polishing surfaces of low roughness (including mirrors) whose shape is for example rectangular. It is based on the use of polishing machines with kinematics with 2 perpendicular linear axes.

Les formes générées sur des surfaces peuvent être des plans, des sphères, des cylindres suivant leur grande dimension (cylindre méridional) ou leur petite dimension (cylindre sagittal), des miroirs à profil méridional elliptique ou parabolique, des miroirs paraboliques ou elliptiques représentant un morceau d'un miroir de révolution.The shapes generated on surfaces can be planes, spheres, cylinders according to their large dimension (southern cylinder) or their small dimension (sagittal cylinder), mirrors with an elliptic or parabolic southern profile, parabolic or elliptical mirrors representing a piece a mirror of revolution.

Une des applications de ces surfaces est la réalisation de miroirs utilisés pour mettre en forme et focaliser les faisceaux de lumière X émis par les sources de lumière de type synchrotron ou laser à électrons libres.One of the applications of these surfaces is the production of mirrors used to shape and focus the X-ray beams emitted by the synchrotron or free-electron laser light sources.

Les différentes étapes sont par exemple :

  1. 1. Ebauche : cette étape est conventionnelle pour le travail des matériaux de type verre ou céramique ou silicium et elle consiste à mettre en forme le support sur lequel sera réalisée la surface à basse rugosité.
    Pour cela on utilise des fraiseuses ou des centres d'usinage équipés d'outils spécifiques au travail de ces matériaux. Ces outils sont constitués habituellement d'un laiton sur lequel sont déposées de fines particules de diamant fixées sur l'outil par un liant. Ces opérations se font sous arrosage d'eau ou d'autres liquides en fonction des matériaux usinés. La mise en forme de la surface est aussi réalisée par cette technique.
  2. 2. Doucissage : on utilise pour cela des outils ayant la forme de plans ou de cylindre ou d'un profil complémentaire de la surface à polir.
    Les dimensions de ces outils sont proches de celle de la surface à polir. Ces outils peuvent être obtenus par un usinage traditionnel en mécanique. La matière utilisée peut être de l'aluminium, du laiton, et dans certains cas des morceaux de verre recollés sur un support mécanique.
    On procède à l'aide d'une machine de polissage ayant une cinématique à 2 axes linéaires, à la mise en forme relative de l'outil et de la surface à polir.
    Pour cela, on applique la surface à doucir sur l'outil et on induit un mouvement relatif entre la surface et l'outil parallèle à la grande longueur de la surface et un mouvement perpendiculaire pour la largeur.
    Soit l'outil soit la surface sont fixes et la pièce complémentaire est mobile et entraînée par les deux mouvements de translation. Alternativement l'outil est entraîné selon un mouvement de translation et la surface est entraînée selon le mouvement de translation perpendiculaire. De plus soit l'outil, soit la surface est libre de rotuler autour d'un axe parallèle à la grande longueur.
    L'opération de rodage utilise des abrasifs classiques de doucissage et l'on fait décroître la taille du grain jusqu'à obtenir une surface ayant l'aspect d'un douci fin.
    Durant toute cette phase, l'outil est retouché jusqu'à ce que l'on obtienne sur la surface à polir la forme géométrique finale à quelques microns près.
  3. 3. Pré-polissage à la poix ou au feutre de polissage grossier et un abrasif de polissage classique tel que l'oxyde de cérium en utilisant la machine décrite précédemment. Le mouvement suivant la longueur (direction X) a une amplitude comprise par exemple entre 5 et 200 mm, et suivant la largeur (direction Y), il a une amplitude comprise par exemple entre 1 et 100 mm.
  4. 4. Polissage proprement dit avec correction itérative de la forme jusqu'à obtenir les spécifications d'écart par rapport à la forme théorique. Le matériau de polissage est de la poix qui est coulée sur l'outil puis mise en forme avec la surface à polir par chauffage.
    Des dégarnis de la poix sont effectués localement là où des bosses on été mesurées. L'abrasif utilisé est par exemple de l'oxyde de cérium. Les pressions de polissage sont comprises entre 5 et 100 grammes par centimètre carré. Ce polissage est terminé lorsque la surface à polir a la bonne forme et qu'il n'y a plus de points ou de défauts correspondant aux étapes précédentes. La rugosité à ce stade est comprise entre 3 et 15Å pour des zones carré d'analyse de 1 à 1000 microns de largeur.
  5. 5. La finition super polie est faite en utilisant un abrasif de type silice colloïdale associé à un feutre.
    Cette opération, si elle est réalisée de manière classique, déforme généralement la surface à polir.
    Selon l'invention, on colle directement le feutre sur la poix et on met à profit son fluage pour mettre en forme la surface du feutre de façon à ce qu'elle soit complémentaire de la surface à polir. La mise en forme est effectuée en chauffant la poix, l'outil ou le substrat de la surface à polir, le moule étant la surface à polir elle-même. Ce chauffage est réalisé à une température de l'ordre de 60°C à laquelle la poix a une viscosité suffisante pour se déformer en fluant sans couler. Les mouvements et les pressions appliqués sont similaires à celles mises en oeuvre lors du polissage proprement dit (étape 4 ci-dessus), c'est-à-dire entre 5 et 100 g/cm2.
    L'état de l'art normalement connu pour cette phase est de coller le feutre sur un outil métallique en intercalant éventuellement un matériau souple de type par exemple mousse. L'avantage du procédé selon l'invention est de disposer d'un outil dur (poix à la température de 20°C) ayant un contour qui épouse la forme de la surface à polir. A ce stade, la rugosité obtenue est généralement comprise entre 1 et 2Å sur les matières de type verre et silice. Elle est généralement comprise entre 1Å et 3Å sur le silicium et les céramiques, et entre 3Å et 5Å sur les surfaces métalliques revêtues de nickel.
The different stages are for example:
  1. 1. Roughing: this step is conventional for the work of materials of glass or ceramic or silicon type and it consists in shaping the support on which the low roughness surface will be made.
    For this we use milling machines or machining centers equipped with specific tools to work with these materials. These tools are usually made of a brass on which are deposited fine diamond particles fixed on the tool by a binder. These operations are done under water or other liquids depending on the machined materials. The shaping of the surface is also performed by this technique.
  2. 2. Smoothing: Tools are used in the form of planes or cylinders or a profile complementary to the surface to be polished.
    The dimensions of these tools are close to that of the surface to be polished. These tools can be obtained by traditional mechanical machining. The material used may be aluminum, brass, and in some cases pieces of glass glued on a mechanical support.
    A polishing machine with a kinematics with 2 linear axes is used, with the relative shaping of the tool and the surface to be polished.
    For this, the surface to be smeared on the tool is applied and a relative movement is induced between the surface and the tool parallel to the great length of the surface and a perpendicular movement for the width.
    Either the tool or the surface are fixed and the complementary part is movable and driven by the two translational movements. Alternatively the tool is driven in a translation movement and the surface is driven according to the perpendicular translation movement. In addition either the tool or the surface is free to rotate around an axis parallel to the long length.
    The honing operation utilizes conventional grinding abrasives, and the grain size is decreased to a surface having the appearance of a fine plaster.
    Throughout this phase, the tool is retouched until the final geometrical shape is obtained on the surface to be polished to within a few microns.
  3. 3. Pre-polishing with pitch or coarse polishing felt and conventional polishing abrasive such as cerium oxide using the machine described above. The movement along the length (X direction) has an amplitude of, for example, between 5 and 200 mm, and depending on the width (Y direction), it has an amplitude of, for example, between 1 and 100 mm.
  4. 4. Proper polishing with iterative shape correction until the deviation specification is obtained from the theoretical form. The polishing material is pitch which is cast on the tool and then shaped with the surface to be polished by heating.
    Deprecated pitch is made locally where bumps have been measured. The abrasive used is, for example, cerium oxide. The polishing pressures are between 5 and 100 grams per square centimeter. This polishing is completed when the surface to be polished has the good shape and there are no more points or defects corresponding to the previous steps. The roughness at this stage is between 3 and 15Å for square analysis areas of 1 to 1000 microns in width.
  5. 5. The super polished finish is made using a colloidal silica-type abrasive associated with a felt.
    This operation, if performed in a conventional manner, generally deforms the surface to be polished.
    According to the invention, the felt is directly adhered to the pitch and its creep is used to shape the surface of the felt so that it is complementary to the surface to be polished. The shaping is done by heating the pitch, tool or substrate of the surface to be polished, the mold being the surface to be polished itself. This heating is carried out at a temperature of the order of 60 ° C at which the pitch has a viscosity sufficient to deform by fluant without pouring. The movements and pressures applied are similar to those used during the polishing itself (step 4 above), that is to say between 5 and 100 g / cm 2 .
    The state of the art normally known for this phase is to stick the felt on a metal tool possibly interposing a flexible material such as foam. The advantage of the process according to the invention is to have a hard tool (pitch at a temperature of 20 ° C) having a contour that matches the shape of the surface to be polished. At this stage, the roughness obtained is generally between 1 and 2Å on glass and silica materials. It is generally between 1Å and 3Å on silicon and ceramics, and between 3Å and 5Å on nickel-coated metal surfaces.

Selon la figure 1a, qui concerne le cas d'une pièce optique 1 à polir qui est un cylindre ou un tore, l'élément de polissage 2 (d'épaisseur par exemple entre 0,1 mm et 2 mm) est collé sur de la poix 3 qui est solidaire d'un support 4 par exemple cylindrique qui sert d'outil de polissage. L'élément de polissage 2 peut être un matériau poreux tel qu'un feutre, notamment une mousse de polyuréthane microcellulaire de la Société RHODES (Bierkeek - Belgique) ou un matériau synthétique poreux (« Finishing Pad ») de la Société -RODEL, ou des supports (ou « drops -») de polissage de la Société BUEHLER. Après chauffage de la poix jusqu'à lui conférer une viscosité lui permettant de fluer sans couler (par exemple en la chauffant à une température de l'ordre de 60°C), on appuie l'outil 4 sur une surface à polir 6 de la pièce optique 1 avec une pression suffisante pour que la déformation par fluage de la poix permette au feutre 2 en contact avec la surface 6 d'épouser localement la forme de la surface 6. Le feutre 2 qui peut être en un ou plusieurs morceaux a de préférence une surface 5 égale, à plus ou moins 20% à celle de la surface 6.According to FIG. 1a, which relates to the case of an optical part 1 to be polished which is a cylinder or a torus, the polishing element 2 (of thickness for example between 0.1 mm and 2 mm) is glued on of the pitch 3 which is secured to a support 4 for example cylindrical which serves as a polishing tool. The polishing element 2 may be a porous material such as a felt, in particular a microcellular polyurethane foam from RHODES (Bierkeek - Belgium) or a porous synthetic material ("Finishing Pad") from the Company -RODEL, or polishing supports (or "drops -") of the BUEHLER Company. After heating the pitch until it gives a viscosity that allows it to flow without sinking (for example by heating it to a temperature of the order of 60 ° C.), the tool 4 is pressed onto a surface to be polished. the optical part 1 with sufficient pressure so that the creep deformation of the pitch allows the felt 2 in contact with the surface 6 to marry locally the shape of the surface 6. The felt 2 which can be in one or more pieces a preferably a surface 5 equal to plus or minus 20% to that of the surface 6.

La pression P appliquée lors du polissage de finition est de l'ordre de 5 à 100 grammes/cm2.The pressure P applied during finishing polishing is of the order of 5 to 100 grams / cm 2 .

La figure 1b illustre le procédé dans le cas d'une surface plane ou d'un miroir ayant une génératrice G dans le plan de coupe.FIG. 1b illustrates the method in the case of a plane surface or a mirror having a generatrix G in the plane of section.

La figure 2 représente une machine utilisable pour la mise en oeuvre du procédé de polissage de finition, ainsi que pour les étapes précédentes de doucissage, de pré-polissage et de polissage proprement dit.FIG. 2 represents a machine that can be used for carrying out the finishing polishing process, as well as for the preceding steps of grinding, pre-polishing and polishing proper.

Elle présente deux barres de coulissement parallèles 11 et 12 le long de laquelle peuvent se translater dans une première direction X deux coulisseaux 14 et 15 reliés par une barre d'attelage 16. Chacun des coulisseaux porte un bras 17 et 18 s'étendant par exemple dans une direction Y perpendiculaire à la direction X, avec un réglage en hauteur 17', 18' selon Z (perpendiculaire à X et Y).It has two parallel sliding bars 11 and 12 along which can slide in a first direction X two slides 14 and 15 connected by a drawbar 16. Each of the sliders carries an arm 17 and 18 extending for example in a direction Y perpendicular to the direction X, with a height adjustment 17 ', 18' along Z (perpendicular to X and Y).

Chacun des bras présente un logement 19 et 20 permettant de recevoir un axe de rotation 21 et 22 d'un porte-pièce 23 portant la pièce 1Each of the arms has a housing 19 and 20 for receiving an axis of rotation 21 and 22 of a workpiece holder 23 carrying the part 1

dont la surface 6 doit être soumise au polissage de finition. L'outil 4 est disposé sur un support 25 solidaire d'une table 27 présentant des moyens de translation de l'outil 4 et donc du feutre 2 dans la direction Y perpendiculaire à la direction X. Ces moyens de translation sont par exemple des glissières 26.whose surface 6 must be subjected to finishing polishing. The tool 4 is disposed on a support 25 integral with a table 27 having means for translating the tool 4 and thus the felt 2 in the direction Y perpendicular to the direction X. These translation means are for example slides 26.

Les vitesses de polissage dans chacune des directions X et Y peuvent être choisies par exemple entre 0,05 m/s et 0,5 m/s.The polishing rates in each of the X and Y directions can be chosen for example between 0.05 m / s and 0.5 m / s.

Les figures 3a et 3b d'une part et 4a et 4b d'autre part illustrent deux modes de mise en oeuvre du polissage de finition (après durcissement du support en matériau déformable par exemple de la poix ou de la colle). Le déplacement selon X (par exemple entre 5 et 200 mm) permet un polissage parallèle à la direction des génératrices de la surface, alors que le mouvement de translation selon Y (par exemple entre 1 et 100 mm) et la rotation selon l'axe (21, 22) permet à la surface 6 à polir de suivre en tournant l'élément de polissage 2 au fur et à mesure du déplacement selon Y. Ainsi, la combinaison de ces trois mouvements (translation X, translation Y et rotation) permet d'assurer le polissage de la surface sur son contour et sur toute sa longueur.Figures 3a and 3b on the one hand and 4a and 4b on the other hand illustrate two modes of implementation of finishing polishing (after hardening of the support of deformable material such as pitch or glue). The displacement along X (for example between 5 and 200 mm) allows a polishing parallel to the direction of the generatrices of the surface, while the translational movement along Y (for example between 1 and 100 mm) and the rotation along the axis (21, 22) allows the surface 6 to be polished to follow by turning the polishing element 2 as the displacement along Y. Thus, the combination of these three movements (X translation, Y translation and rotation) allows to ensure the polishing of the surface on its contour and throughout its length.

Selon les figures 3a et 3b, la pièce 1 de section cylindrique ou plane est portée par le porte-pièce 23 et l'outil 4 est solidaire du support 25. Selon les figures 4a et 4b, la pièce 1 cylindrique ou plane est solidaire du support 25 et c'est l'outil 4 qui est porté par le porte-pièce 23.According to FIGS. 3a and 3b, the part 1 of cylindrical or planar section is carried by the workpiece holder 23 and the tool 4 is integral with the support 25. According to FIGS. 4a and 4b, the cylindrical or plane part 1 is integral with the support 25 and it is the tool 4 which is carried by the holder 23.

Le procédé s'applique également à des surfaces ne présentant pas de génératrice. La mise en forme de l'élément 2 améliore les performances par rapport à la surface ayant la génératrice la plus proche.The method also applies to surfaces that do not have a generator. Shaping Element 2 improves performance over the surface with the nearest generator.

Claims (13)

  1. A method of finishing polishing a surface (6) using a polishing element (2) and an abrasive, the method being characterized in that it implements the following steps:
    a) prior to said polishing, sticking the polishing element (2) in permanent manner on a support (3, 4) of deformable material;
    b) applying pressure on the deformable support (3, 4) once the polishing element (2) is in contact with the surface (6) to be polished so that the polishing element (2) is shaped to match an outline of said surface (6); and
    c) performing finishing polishing using the polishing element (2) shaped in this way.
  2. A method according to claim 1, characterized in that said material (3) is deformable in creep and/or is hardenable.
  3. A method according to claim 2, characterized in that said material (3) is pitch which is heated to a temperature enabling it to creep and which, once the polishing element (2) has been shaped, is sufficiently cooled in order to harden it.
  4. A method according to claim 2, characterized in that said material (3) is an adhesive of the gel type which, once the polishing element (2) has been shaped, is hardened, e.g. by being polymerized or by applying radiation, in particular ultraviolet radiation.
  5. A method according to claim 2, characterized in that the material (3) is plaster.
  6. A method according to any preceding claim, characterized in that the polishing element (2) is a felt.
  7. A method according to any preceding claim, characterized in that said deformable material (3) is carried by a polishing support (4).
  8. A method according to any preceding claim, characterized in that the finishing polishing operation is performed using a machine comprising a displacement device for imparting relative movement between the polishing element (2) and the surface (6) to be polished along two mutually perpendicular directions (X, Y).
  9. A method according to claim 8, characterized in that the displacement device is arranged also to produce relative rotary movement about an axis (21, 22) parallel to one of said two perpendicular directions.
  10. A method according to claim 8 or claim 9, characterized in that the surface (6) presents a generator line of direction parallel to one of said two perpendicular directions.
  11. A method, characterized in that the surface (6) on which the finishing polishing is performed has previously been subjected to:
    - pre-polishing or coarse polishing; and
    - polishing.
  12. A method according to claim 11, characterized in that after polishing, the surface (6) presents roughness lying in the range 3 Å to 15 Å, and after finishing polishing it presents roughness in the range 1 Å to 5 Å.
  13. A method according to claim 12, characterized in that said roughness after finishing polishing lies in the range 1 Å to 3 Å for surfaces (6) of glass, silica, silicon, or ceramic, and in the range 3 Å to 5 Å for a nickel coating on a metal surface.
EP03292647A 2003-10-23 2003-10-23 Method for finish-polishing Expired - Lifetime EP1525947B1 (en)

Priority Applications (6)

Application Number Priority Date Filing Date Title
ES03292647T ES2262958T3 (en) 2003-10-23 2003-10-23 FINISH POLISHING PROCEDURE.
AT03292647T ATE322957T1 (en) 2003-10-23 2003-10-23 PROCESS FOR FINAL POLISHING
DE60304579T DE60304579T2 (en) 2003-10-23 2003-10-23 Process for final polishing
DK03292647T DK1525947T3 (en) 2003-10-23 2003-10-23 Process of final polishing
EP03292647A EP1525947B1 (en) 2003-10-23 2003-10-23 Method for finish-polishing
US10/705,017 US20050101226A1 (en) 2003-10-23 2003-11-11 Finishing polishing method

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
EP03292647A EP1525947B1 (en) 2003-10-23 2003-10-23 Method for finish-polishing
US10/705,017 US20050101226A1 (en) 2003-10-23 2003-11-11 Finishing polishing method

Publications (2)

Publication Number Publication Date
EP1525947A1 EP1525947A1 (en) 2005-04-27
EP1525947B1 true EP1525947B1 (en) 2006-04-12

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EP03292647A Expired - Lifetime EP1525947B1 (en) 2003-10-23 2003-10-23 Method for finish-polishing

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US (1) US20050101226A1 (en)
EP (1) EP1525947B1 (en)
AT (1) ATE322957T1 (en)
DE (1) DE60304579T2 (en)
DK (1) DK1525947T3 (en)
ES (1) ES2262958T3 (en)

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7988534B1 (en) * 2004-05-19 2011-08-02 Sutton Stephen P Optical polishing pitch formulations
DE102008043600A1 (en) * 2008-11-10 2010-05-12 Carl Zeiss Smt Ag Smoothing tool for smoothing optical surfaces within spatial frequency range between one micrometer and two thousand micrometer, has polishing agent carrier made of synthetic, matting-type material
TWI584914B (en) 2013-07-22 2017-06-01 佳能股份有限公司 Component manufacturing method and polishing apparatus
CN109079646A (en) * 2018-08-10 2018-12-25 杨斯晨 A kind of Ceramic manufacturing glaze paint burnishing device

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Publication number Priority date Publication date Assignee Title
US1651181A (en) * 1924-12-06 1927-11-29 Continental Optical Corp Tool for treating ophthalmic lenses and process of making same
US2822647A (en) * 1955-12-16 1958-02-11 Younger Mfg Company Method and apparatus for forming bifocal lenses
US3583111A (en) * 1966-08-22 1971-06-08 David Volk Lens grinding apparatus
US3594963A (en) * 1969-07-17 1971-07-27 Univis Inc Grinding pad
US4979337A (en) * 1986-10-03 1990-12-25 Duppstadt Arthur G Polishing tool for contact lenses and associated method
US4989316A (en) * 1987-03-09 1991-02-05 Gerber Scientific Products, Inc. Method and apparatus for making prescription eyeglass lenses
US4974368A (en) * 1987-03-19 1990-12-04 Canon Kabushiki Kaisha Polishing apparatus
DE3801969A1 (en) * 1988-01-23 1989-07-27 Zeiss Carl Fa Method and apparatus for lapping or polishing optical surfaces
DE3911986A1 (en) * 1989-04-12 1990-10-18 Benzinger Carl Gmbh & Co METHOD AND DEVICE FOR MOLDING WORKPIECES
US5205083A (en) * 1991-10-24 1993-04-27 Pettibone Dennis R Method and apparatus for polishing optical lenses
DE4442181C1 (en) * 1994-11-26 1995-10-26 Loh Optikmaschinen Ag Tool for fine working of optical lenses
US6375551B1 (en) * 1999-06-25 2002-04-23 Corning Incorporated Angstrom polishing of calcium fluoride optical VUV microlithography lens elements and preforms
DE10194790T1 (en) * 2000-01-05 2003-12-04 Schott Glass Tech Inc Alkaline earth-free boralkali silicate glass
US6589102B2 (en) * 2001-01-30 2003-07-08 Larsen Equipment Design, Inc. Surface polishing method and apparatus
FR2843711B1 (en) * 2002-08-22 2005-05-13 Europ De Systemes Optiques Soc FINISH POLISHING PROCESS

Also Published As

Publication number Publication date
DE60304579T2 (en) 2007-05-10
US20050101226A1 (en) 2005-05-12
DE60304579D1 (en) 2006-05-24
ATE322957T1 (en) 2006-04-15
DK1525947T3 (en) 2006-07-31
ES2262958T3 (en) 2006-12-01
EP1525947A1 (en) 2005-04-27

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