EP1525947A1 - Method for finish-polishing - Google Patents

Method for finish-polishing Download PDF

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Publication number
EP1525947A1
EP1525947A1 EP03292647A EP03292647A EP1525947A1 EP 1525947 A1 EP1525947 A1 EP 1525947A1 EP 03292647 A EP03292647 A EP 03292647A EP 03292647 A EP03292647 A EP 03292647A EP 1525947 A1 EP1525947 A1 EP 1525947A1
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EP
European Patent Office
Prior art keywords
polishing
finishing
polished
polishing element
deformable
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Granted
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EP03292647A
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German (de)
French (fr)
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EP1525947B1 (en
Inventor
Jean-Jacques Fermé
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Europeenne de Systemes Optiques S E S O Ste
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Europeenne de Systemes Optiques S E S O Ste
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Application filed by Europeenne de Systemes Optiques S E S O Ste filed Critical Europeenne de Systemes Optiques S E S O Ste
Priority to DK03292647T priority Critical patent/DK1525947T3/en
Priority to EP03292647A priority patent/EP1525947B1/en
Priority to ES03292647T priority patent/ES2262958T3/en
Priority to AT03292647T priority patent/ATE322957T1/en
Priority to DE60304579T priority patent/DE60304579T2/en
Priority to US10/705,017 priority patent/US20050101226A1/en
Publication of EP1525947A1 publication Critical patent/EP1525947A1/en
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Publication of EP1525947B1 publication Critical patent/EP1525947B1/en
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B13/00—Machines or devices designed for grinding or polishing optical surfaces on lenses or surfaces of similar shape on other work; Accessories therefor
    • B24B13/015—Machines or devices designed for grinding or polishing optical surfaces on lenses or surfaces of similar shape on other work; Accessories therefor of television picture tube viewing panels, headlight reflectors or the like
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B13/00—Machines or devices designed for grinding or polishing optical surfaces on lenses or surfaces of similar shape on other work; Accessories therefor
    • B24B13/02—Machines or devices designed for grinding or polishing optical surfaces on lenses or surfaces of similar shape on other work; Accessories therefor by means of tools with abrading surfaces corresponding in shape with the lenses to be made
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00—Lapping machines or devices; Accessories

Definitions

  • the present invention relates to a polishing process finishing a surface with a polishing element and an abrasive.
  • a polishing element for example a felt
  • a abrasive for example colloidal silica
  • the technique generally used consists in sticking the felt on a metal tool by possibly interposing a flexible material such as foam. This technique presents the disadvantage of deforming the surface to be polished, so that the results obtained are not optimal.
  • the subject of the present invention is a process which makes it possible to remedy at least part of the problem mentioned above.
  • Said material is advantageously deformable by creep and / or curable. It may for example be pitch which is heated to a temperature which allows it to creep and which, after b and before c, is then cooled to obtain a hardening, or else an adhesive which is in the form of a gel which, after b, and before c is cured for example by polymerization or application of a particular ultraviolet radiation.
  • the material can also be plaster ..
  • the polishing element can be a felt or any material polishing suitable for finishing polishing leading to low roughness (of the order of 1 ⁇ to some A for example).
  • the material of polishing is advantageously carried by a polishing support.
  • Finishing polishing can in particular be carried out using of a machine ensuring a relative displacement of translation between the element of polishing and the surface to be polished in two perpendicular directions and possibly rotating about an axis parallel to one of said directions perpendicular. Finishing polishing is particularly applicable to cases of surfaces having a generator, the surface being arranged so such that the direction of the generator is parallel to that of the two directions above which is parallel to the axis of rotation.
  • the method applies in particular to surfaces that before finishing polishing, have been previously subjected to pre-polishing (or polishing said coarse) and polishing itself.
  • the surface has a roughness for example between 3 ⁇ and 15 ⁇ , so after finishing polishing, the roughness can be between 1A and 5A, and more particularly between 1 ⁇ and 3 ⁇ for glass, silica, silicon and ceramic surfaces (see between 1 ⁇ and 2 ⁇ for glass or silica surfaces) and between 3 ⁇ and 5 ⁇ for a nickel surface coated with a metal surface.
  • the invention relates to polishing finishing of surfaces with low roughness (including mirrors) whose shape is for example rectangular. It is based on the use of polishing machines having a kinematic with 2 perpendicular linear axes.
  • the shapes generated on surfaces can be planes, spheres, cylinders according to their large size (cylinder southern) or their small size (sagittal cylinder), profile mirrors southern elliptical or parabolic, parabolic or elliptical mirrors representing a piece of a mirror of revolution.
  • One of the applications of these surfaces is the realization of mirrors used to shape and focus beams of light X emitted by synchrotron or electron laser light sources free.
  • This operation if performed in a conventional manner, generally deforms the surface to be polished.
  • the felt is directly adhered to the pitch and its creep is used to shape the surface of the felt so that it is complementary to the surface to be polished.
  • the shaping is done by heating the pitch, tool or substrate of the surface to be polished, the mold being the surface to be polished itself. This heating is carried out at a temperature of the order of 60 ° C at which the pitch has a viscosity sufficient to deform by fluant without pouring.
  • the movements and pressures applied are similar to those used during the polishing itself (step 4 above), that is to say between 5 and 100 g / cm 2 .
  • the state of the art normally known for this phase is stick the felt on a metal tool, possibly inserting a flexible material such as foam.
  • the advantage of the process according to the invention is to have a hard tool (pitch at a temperature of 20 ° C) having an outline that matches the shape of the surface to be polished.
  • the roughness obtained is generally between 1 and 2 ⁇ on glass and silica. It is generally between 1 ⁇ and 3 ⁇ on silicon and ceramics, and between 3 ⁇ and 5 ⁇ on metal surfaces coated with nickel.
  • the polishing element 2 (thickness by example between 0.1 mm and 2 mm) is stuck on the pitch 3 which is integral with a support 4 for example cylindrical which serves as a polishing tool.
  • the element of polishing 2 may be a porous material such as a felt, especially a microcellular polyurethane foam from RHODES (Bierkeek - Belgium) or a porous synthetic material ("Finishing Pad") of the Company RODEL, or polishing supports (or “drops”) of the Company Buehler.
  • the tool 4 After heating the pitch until it gives it a viscosity to flow without flowing (for example by heating it to a temperature of the order of 60 ° C), the tool 4 is pressed on a surface to be polished 6 of the optical part 1 with sufficient pressure so that the deformation by creep of the pitch allows the felt 2 in contact with the surface 6 to marry locally the shape of the surface 6.
  • the felt 2 which can be in one or more pieces preferably has a surface equal to, more or less 20% to that of surface 6.
  • the pressure P applied during finishing polishing is of the order of 5 to 100 grams / cm 2 .
  • Figure 1b illustrates the process in the case of a surface plane or mirror having a generatrix G in the plane of section.
  • FIG. 2 represents a machine that can be used to implement finishing polishing process, as well as for the steps previous smoothing, pre-polishing and polishing itself.
  • Each of the sliders carries an arm 17 and 18 extending for example in one direction Y perpendicular to the X direction, with height adjustment 17 ', 18' according to Z (perpendicular to X and Y).
  • Each arm has a housing 19 and 20 allowing to receive an axis of rotation 21 and 22 of a workpiece carrier 23 carrying the part 1 whose surface 6 must be subjected to finishing polishing.
  • Tool 4 is disposed on a support 15 integral with a table 27 having means for translation of the tool 4 and therefore the felt 2 in the direction Y perpendicular to the direction X.
  • These translation means are for example slides 26.
  • the polishing speeds in each of the X and Y directions can be chosen for example between 0.05 m / s and 0.5 m / s.
  • Figures 3a and 3b on the one hand and 4a and 4b on the other hand illustrate two modes of implementation of finishing polishing (after hardening of the support of deformable material for example pitch or glue).
  • the displacement along X (for example between 5 and 200 mm) allows a polishing parallel to the direction of the generatrices of the surface, whereas the translation movement along Y (for example between 1 and 100 mm) and the rotation along the axis (21, 22) allows the surface 6 to be polished to follow while rotating the polishing element 2 as it moves along Y.
  • the combination of these three movements ensures the polishing of the surface on its contour and on all its length.
  • the part 1 of cylindrical section or plane is carried by the workpiece holder 23 and the tool 4 is secured to the support 25.
  • the cylindrical or plane part 1 is integral with the support 25 and it is the tool 4 which is carried by the holder 23.
  • the method also applies to surfaces presenting no generator.
  • the formatting of element 2 improves the performance relative to the surface with the nearest generator.

Abstract

Workpiece polishing and finishing procedure uses polishing material with abrasive stuck permanently to deformable backing material : The procedure for polishing and finishing a workpiece (1) surface uses a polishing material (2) such as felt with an abrasive, e.g. cerium oxide, stuck permanently to a backing material (3), applying pressure to the latter when the polishing element is in contact with the surface to be polished so that the polishing material adapts to the shape of the polished surface. The backing material can be deformable by plastic flow and/or is hardenable. It can be of pitch that is heated and then cooled, or a gel-type adhesive that can be hardened by polymerisation or UV radiation.

Description

La présente invention a pour objet un procédé de polissage de finition d'une surface à l'aide d'un élément de polissage et d'un abrasif.The present invention relates to a polishing process finishing a surface with a polishing element and an abrasive.

Il est déjà connu de réaliser un polissage de finition d'une surface à l'aide d'un élément de polissage, par exemple un feutre, et d'un abrasif, par exemple de la silice colloïdale. La technique généralement utilisée consiste à coller le feutre sur un outil métallique en intercalant éventuellement un matériau souple par exemple de type mousse. Cette technique présente l'inconvénient de déformer la surface à polir, ce qui fait que les résultats obtenus ne sont pas optimaux.It is already known to perform a finishing polishing of a surface using a polishing element, for example a felt, and a abrasive, for example colloidal silica. The technique generally used consists in sticking the felt on a metal tool by possibly interposing a flexible material such as foam. This technique presents the disadvantage of deforming the surface to be polished, so that the results obtained are not optimal.

La présente invention a pour objet un procédé qui permette de remédier au moins en partie au problème précité.The subject of the present invention is a process which makes it possible to remedy at least part of the problem mentioned above.

L'invention concerne ainsi un procédé de polissage de finition d'une surface à l'aide d'un élément de polissage et d'un abrasif, caractérisé en ce qu'il met en oeuvre :

  • a) avant ledit polissage, le collage de l'élément de polissage sur un support en un matériau déformable de manière permanente et ;
  • b) l'application d'une pression sur le support déformable une fois que l'élément de polissage est en contact avec la surface à polir de sorte que l'élément de polissage soit mis en forme pour épouser un contour de ladite surface,
  • c) réaliser le polissage de finition à l'aide de l'élément de polissage ainsi mis en forme.
    • The invention thus relates to a method of finishing polishing a surface with the aid of a polishing element and an abrasive, characterized in that it uses:
  • a) prior to said polishing, bonding the polishing element on a support of permanently deformable material and;
  • b) applying a pressure on the deformable support once the polishing element is in contact with the surface to be polished so that the polishing element is shaped to fit a contour of said surface,
  • c) polishing finishing with the polishing element thus shaped.

    • Ledit matériau est avantageusement déformable par fluage et/ou durcissable. Il peut s'agir par exemple de poix qui est chauffée à une température qui permet son fluage et qui, après b et avant c, est ensuite refroidie pour obtenir un durcissement, ou bien encore d'une colle qui se présente sous forme d'un gel et qui, après b, et avant c est durcie par exemple par polymérisation ou application d'un rayonnement notamment ultra-violet. Le matériau peut être également du plâtre..Said material is advantageously deformable by creep and / or curable. It may for example be pitch which is heated to a temperature which allows it to creep and which, after b and before c, is then cooled to obtain a hardening, or else an adhesive which is in the form of a gel which, after b, and before c is cured for example by polymerization or application of a particular ultraviolet radiation. The material can also be plaster ..

    L'élément de polissage peut être un feutre ou tout matériau de polissage convenant à un polissage de finition conduisant à de faibles rugosités (de l'ordre de 1Å à quelques A par exemple). Le matériau de polissage est avantageusement porté par un support de polissage. The polishing element can be a felt or any material polishing suitable for finishing polishing leading to low roughness (of the order of 1Å to some A for example). The material of polishing is advantageously carried by a polishing support.

    Le polissage de finition peut être en particulier réalisé à l'aide d'une machine assurant un déplacement relatif de translation entre l'élément de polissage et la surface à polir selon deux directions perpendiculaires et éventuellement de rotation autour d'un axe parallèle à une desdites directions perpendiculaires. Le polissage de finition s'applique particulièrement bien au cas de surfaces ayant une génératrice, la surface étant disposée de manière telle que la direction de la génératrice soit parallèle à celle des deux directions précitées qui est parallèle à l'axe de rotation.Finishing polishing can in particular be carried out using of a machine ensuring a relative displacement of translation between the element of polishing and the surface to be polished in two perpendicular directions and possibly rotating about an axis parallel to one of said directions perpendicular. Finishing polishing is particularly applicable to cases of surfaces having a generator, the surface being arranged so such that the direction of the generator is parallel to that of the two directions above which is parallel to the axis of rotation.

    Le procédé s'applique notamment à des surfaces qui avant polissage de finition, ont été préalablement soumises à un pré-polissage (ou polissage dit grossier) et à un polissage proprement dit.The method applies in particular to surfaces that before finishing polishing, have been previously subjected to pre-polishing (or polishing said coarse) and polishing itself.

    Après le polissage proprement dit qui peut être réalisé notamment par toute technique connue, la surface présente une rugosité comprise par exemple entre 3Å et 15Å, alors après polissage de finition, la rugosité peut être comprise entre 1A et 5A, et plus particulièrement entre 1Å et 3Å pour des surfaces en verre, en silice, en silicium et en céramique (voire entre 1Å et 2Å pour des surfaces en verre ou en silice) et entre 3Å et 5Å pour une surface en nickel revêtant une surface métallique.After the actual polishing that can be done by any known technique, the surface has a roughness for example between 3Å and 15Å, so after finishing polishing, the roughness can be between 1A and 5A, and more particularly between 1Å and 3Å for glass, silica, silicon and ceramic surfaces (see between 1Å and 2Å for glass or silica surfaces) and between 3Å and 5Å for a nickel surface coated with a metal surface.

    D'autres caractéristiques et avantages de l'invention apparaítront mieux à la lecture de la description ci-après, donnée à titre d'exemple non limitatif, en liaison avec les dessins dans lesquels :

    • les figures 1a et 1b illustrent en coupe la mise en oeuvre du procédé de polissage de finition selon l'invention,
    • la figure 2 représente une machine assurant le polissage de finition d'une surface dans le cadre de la présente invention et les figures 3a et 3b d'une part et 4a et 4b d'autre part illustrent deux modes de mise en oeuvre de la machine.
    Other features and advantages of the invention will appear better on reading the following description, given by way of non-limiting example, in connection with the drawings in which:
    • FIGS. 1a and 1b illustrate in section the implementation of the finishing polishing method according to the invention,
    • FIG. 2 represents a finishing polishing machine of a surface in the context of the present invention and FIGS. 3a and 3b on the one hand and 4a and 4b on the other hand illustrate two modes of implementation of the machine. .

    L'invention se rapporte au polissage de finition de surfaces à basse rugosité (notamment des miroirs) dont la forme est par exemple rectangulaire. Il repose sur l'utilisation de machines de polissage ayant une cinématique à 2 axes linéaires perpendiculaires.The invention relates to polishing finishing of surfaces with low roughness (including mirrors) whose shape is for example rectangular. It is based on the use of polishing machines having a kinematic with 2 perpendicular linear axes.

    Les formes générées sur des surfaces peuvent être des plans, des sphères, des cylindres suivant leur grande dimension (cylindre méridional) ou leur petite dimension (cylindre sagittal), des miroirs à profil méridional elliptique ou parabolique, des miroirs paraboliques ou elliptiques représentant un morceau d'un miroir de révolution. The shapes generated on surfaces can be planes, spheres, cylinders according to their large size (cylinder southern) or their small size (sagittal cylinder), profile mirrors southern elliptical or parabolic, parabolic or elliptical mirrors representing a piece of a mirror of revolution.

    Une des applications de ces surfaces est la réalisation de miroirs utilisés pour mettre en forme et focaliser les faisceaux de lumière X émis par les sources de lumière de type synchrotron ou laser à électrons libres.One of the applications of these surfaces is the realization of mirrors used to shape and focus beams of light X emitted by synchrotron or electron laser light sources free.

    Les différentes étapes sont par exemple :

  • 1. Ebauche : cette étape est conventionnelle pour le travail des matériaux de type verre ou céramique ou silicium et elle consiste à mettre en forme le support sur lequel sera réalisée la surface à basse rugosité. Pour cela on utilise des fraiseuses ou des centres d'usinage équipés d'outils spécifiques au travail de ces matériaux. Ces outils sont constitués habituellement d'un laiton sur lequel sont déposées de fines particules de diamant fixées sur l'outil par un liant. Ces opérations se font sous arrosage d'eau ou d'autres liquides en fonction des matériaux usinés. La mise en forme de la surface est aussi réalisée par cette technique.
  • 2. Doucissage : on utilise pour cela des outils ayant la forme de plans ou de cylindre ou d'un profil complémentaire de la surface à polir. Les dimensions de ces outils sont proches de celle de la surface à polir. Ces outils peuvent être obtenus par un usinage traditionnel en mécanique. La matière utilisée peut être de l'aluminium, du laiton, et dans certains cas des morceaux de verre recollés sur un support mécanique.On procède à l'aide d'une machine de polissage ayant une cinématique à 2 axes linéaires, à la mise en forme relative de l'outil et de la surface à polir.Pour cela, on applique la surface à doucir sur l'outil et on induit un mouvement relatif entre la surface et l'outil parallèle à la grande longueur de la surface et un mouvement perpendiculaire pour la largeur.Soit l'outil soit la surface sont fixes et la pièce complémentaire est mobile et entraínée par les deux mouvements de translation. Alternativement l'outil est entraíné selon un mouvement de translation et la surface est entraínée selon le mouvement de translation perpendiculaire. De plus soit l'outil, soit la surface est libre de rotuler autour d'un axe parallèle à la grande longueur.L'opération de rodage utilise des abrasifs classiques de doucissage et l'on fait décroítre la taille du grain jusqu'à obtenir une surface ayant l'aspect d'un douci fin. Durant toute cette phase, l'outil est retouché jusqu'à ce que l'on obtienne sur la surface à polir la forme géométrique finale à quelques microns près.
  • 3. Pré-polissage à la poix ou au feutre de polissage grossier et un abrasif de polissage classique tel que l'oxyde de cérium en utilisant la machine décrite précédemment. Le mouvement suivant la longueur (direction X) a une amplitude comprise par exemple entre 5 et 200 mm, et suivant la largeur (direction Y), il a une amplitude comprise par exemple entre 1 et 100 mm.
  • 4. Polissage proprement dit avec correction itérative de la forme jusqu'à obtenir les spécifications d'écart par rapport à la forme théorique. Le matériau de polissage est de la poix qui est coulée sur l'outil puis mise en forme avec la surface à polir par chauffage. Des dégarnis de la poix sont effectués localement là où des bosses on été mesurées. L'abrasif utilisé est par exemple de l'oxyde de cérium. Les pressions de polissage sont comprises entre 5 et 100 grammes par centimètre carré. Ce polissage est terminé lorsque la surface à polir a la bonne forme et qu'il n'y a plus de points ou de défauts correspondant aux étapes précédentes. La rugosité à ce stade est comprise entre 3 et 15Å pour des zones carré d'analyse de 1 à 1000 microns de largeur.
  • 5. La finition super polie est faite en utilisant un abrasif de type silice colloïdale associé à un feutre.
    • The different stages are for example:
  • 1. Roughing: this step is conventional for the work of materials of glass or ceramic or silicon type and it consists in shaping the support on which the low roughness surface will be made. For this we use milling machines or machining centers equipped with specific tools to work with these materials. These tools are usually made of a brass on which are deposited fine diamond particles fixed on the tool by a binder. These operations are done under water or other liquids depending on the machined materials. The shaping of the surface is also performed by this technique.
  • 2. Smoothing: Tools are used in the form of planes or cylinders or a profile complementary to the surface to be polished. The dimensions of these tools are close to that of the surface to be polished. These tools can be obtained by traditional mechanical machining. The material used can be aluminum, brass, and in some cases pieces of glass glued on a mechanical support. A polishing machine with a kinematics with 2 linear axes is used. relative to the tool and the surface to be polished.For this, the surface to be smeared on the tool is applied and a relative movement is induced between the surface and the tool parallel to the great length of the surface and a perpendicular motion for the width.Either the tool is the surface are fixed and the complementary part is movable and driven by the two translational movements. Alternatively the tool is driven according to a translational movement and the surface is driven according to the perpendicular translation movement. In addition, either the tool or the surface is free to swivel about an axis parallel to the long length. The lapping operation uses conventional abrasives for grinding and decreases the size of the grain to obtain a surface with the appearance of a fine plaster. Throughout this phase, the tool is retouched until the final geometrical shape is obtained on the surface to be polished to within a few microns.
  • 3. Pre-polishing with pitch or coarse polishing felt and conventional polishing abrasive such as cerium oxide using the machine described above. The movement along the length (X direction) has an amplitude of, for example, between 5 and 200 mm, and depending on the width (Y direction), it has an amplitude of, for example, between 1 and 100 mm.
  • 4. Proper polishing with iterative shape correction until the deviation specification is obtained from the theoretical form. The polishing material is pitch which is cast on the tool and then shaped with the surface to be polished by heating. Deprecated pitch is made locally where bumps have been measured. The abrasive used is, for example, cerium oxide. The polishing pressures are between 5 and 100 grams per square centimeter. This polishing is completed when the surface to be polished has the good shape and there are no more points or defects corresponding to the previous steps. The roughness at this stage is between 3 and 15Å for square analysis areas of 1 to 1000 microns in width.
  • 5. The super polished finish is made using a colloidal silica-type abrasive associated with a felt.

    • Cette opération, si elle est réalisée de manière classique, déforme généralement la surface à polir.This operation, if performed in a conventional manner, generally deforms the surface to be polished.

    Selon l'invention, on colle directement le feutre sur la poix et on met à profit son fluage pour mettre en forme la surface du feutre de façon à ce qu'elle soit complémentaire de la surface à polir. La mise en forme est effectuée en chauffant la poix, l'outil ou le substrat de la surface à polir, le moule étant la surface à polir elle-même. Ce chauffage est réalisé à une température de l'ordre de 60°C à laquelle la poix a une viscosité suffisante pour se déformer en fluant sans couler. Les mouvements et les pressions appliqués sont similaires à celles mises en oeuvre lors du polissage proprement dit (étape 4 ci-dessus), c'est-à-dire entre 5 et 100 g/cm2.According to the invention, the felt is directly adhered to the pitch and its creep is used to shape the surface of the felt so that it is complementary to the surface to be polished. The shaping is done by heating the pitch, tool or substrate of the surface to be polished, the mold being the surface to be polished itself. This heating is carried out at a temperature of the order of 60 ° C at which the pitch has a viscosity sufficient to deform by fluant without pouring. The movements and pressures applied are similar to those used during the polishing itself (step 4 above), that is to say between 5 and 100 g / cm 2 .

    L'état de l'art normalement connu pour cette phase est de coller le feutre sur un outil métallique en intercalant éventuellement un matériau souple de type par exemple mousse. L'avantage du procédé selon l'invention est de disposer d'un outil dur (poix à la température de 20°C) ayant un contour qui épouse la forme de la surface à polir. A ce stade, la rugosité obtenue est généralement comprise entre 1 et 2Å sur les matières de type verre et silice. Elle est généralement comprise entre 1Å et 3Å sur le silicium et les céramiques, et entre 3Å et 5Å sur les surfaces métalliques revêtues de nickel.The state of the art normally known for this phase is stick the felt on a metal tool, possibly inserting a flexible material such as foam. The advantage of the process according to the invention is to have a hard tool (pitch at a temperature of 20 ° C) having an outline that matches the shape of the surface to be polished. At this stage, the roughness obtained is generally between 1 and 2Å on glass and silica. It is generally between 1Å and 3Å on silicon and ceramics, and between 3Å and 5Å on metal surfaces coated with nickel.

    Selon la figure 1 a, qui concerne le cas d'une pièce optique 1 à polir qui est un cylindre ou un tore, l'élément de polissage 2 (d'épaisseur par exemple entre 0,1 mm et 2 mm) est collé sur de la poix 3 qui est solidaire d'un support 4 par exemple cylindrique qui sert d'outil de polissage. L'élément de polissage 2 peut être un matériau poreux tel qu'un feutre, notamment une mousse de polyuréthane microcellulaire de la Société RHODES (Bierkeek - Belgique) ou un matériau synthétique poreux (« Finishing Pad ») de la Société RODEL, ou des supports (ou « drops ») de polissage de la Société BUEHLER. Après chauffage de la poix jusqu'à lui conférer une viscosité lui permettant de fluer sans couler (par exemple en la chauffant à une température de l'ordre de 60°C), on appuie l'outil 4 sur une surface à polir 6 de la pièce optique 1 avec une pression suffisante pour que la déformation par fluage de la poix permette au feutre 2 en contact avec la surface 6 d'épouser localement la forme de la surface 6. Le feutre 2 qui peut être en un ou plusieurs morceaux a de préférence une surface 5 égale, à plus ou moins 20% à celle de la surface 6.According to Figure 1a, which concerns the case of an optical part 1 to be polished which is a cylinder or a torus, the polishing element 2 (thickness by example between 0.1 mm and 2 mm) is stuck on the pitch 3 which is integral with a support 4 for example cylindrical which serves as a polishing tool. The element of polishing 2 may be a porous material such as a felt, especially a microcellular polyurethane foam from RHODES (Bierkeek - Belgium) or a porous synthetic material ("Finishing Pad") of the Company RODEL, or polishing supports (or "drops") of the Company Buehler. After heating the pitch until it gives it a viscosity to flow without flowing (for example by heating it to a temperature of the order of 60 ° C), the tool 4 is pressed on a surface to be polished 6 of the optical part 1 with sufficient pressure so that the deformation by creep of the pitch allows the felt 2 in contact with the surface 6 to marry locally the shape of the surface 6. The felt 2 which can be in one or more pieces preferably has a surface equal to, more or less 20% to that of surface 6.

    La pression P appliquée lors du polissage de finition est de l'ordre de 5 à 100 grammes/cm2.The pressure P applied during finishing polishing is of the order of 5 to 100 grams / cm 2 .

    La figure 1b illustre le procédé dans le cas d'une surface plane ou d'un miroir ayant une génératrice G dans le plan de coupe.Figure 1b illustrates the process in the case of a surface plane or mirror having a generatrix G in the plane of section.

    La figure 2 représente une machine utilisable pour la mise en oeuvre du procédé de polissage de finition, ainsi que pour les étapes précédentes de doucissage, de pré-polissage et de polissage proprement dit.FIG. 2 represents a machine that can be used to implement finishing polishing process, as well as for the steps previous smoothing, pre-polishing and polishing itself.

    Elle présente deux barres de coulissement parallèles 11 et 12 le long de laquelle peuvent se translater dans une première direction X deux coulisseaux 14 et 15 reliés par une barre d'attelage 16. Chacun des coulisseaux porte un bras 17 et 18 s'étendant par exemple dans une direction Y perpendiculaire à la direction X, avec un réglage en hauteur 17', 18' selon Z (perpendiculaire à X et Y). It has two parallel sliding bars 11 and 12 along which can translate in a first direction X two slides 14 and 15 connected by a drawbar 16. Each of the sliders carries an arm 17 and 18 extending for example in one direction Y perpendicular to the X direction, with height adjustment 17 ', 18' according to Z (perpendicular to X and Y).

    Chacun des bras présente un logement 19 et 20 permettant de recevoir un axe de rotation 21 et 22 d'un porte-pièce 23 portant la pièce 1 dont la surface 6 doit être soumise au polissage de finition. L'outil 4 est disposé sur un support 15 solidaire d'une table 27 présentant des moyens de translation de l'outil 4 et donc du feutre 2 dans la direction Y perpendiculaire à la direction X. Ces moyens de translation sont par exemple des glissières 26.Each arm has a housing 19 and 20 allowing to receive an axis of rotation 21 and 22 of a workpiece carrier 23 carrying the part 1 whose surface 6 must be subjected to finishing polishing. Tool 4 is disposed on a support 15 integral with a table 27 having means for translation of the tool 4 and therefore the felt 2 in the direction Y perpendicular to the direction X. These translation means are for example slides 26.

    Les vitesses de polissage dans chacune des directions X et Y peuvent être choisies par exemple entre 0,05 m/s et 0,5 m/s.The polishing speeds in each of the X and Y directions can be chosen for example between 0.05 m / s and 0.5 m / s.

    Les figures 3a et 3b d'une part et 4a et 4b d'autre part illustrent deux modes de mise en oeuvre du polissage de finition (après durcissement du support en matériau déformable par exemple de la poix ou de la colle). Le déplacement selon X (par exemple entre 5 et 200 mm) permet un polissage parallèle à la direction des génératrices de la surface, alors que le mouvement de translation selon Y (par exemple entre 1 et 100 mm) et la rotation selon l'axe (21, 22) permet à la surface 6 à polir de suivre en tournant l'élément de polissage 2 au fur et à mesure du déplacement selon Y. Ainsi, la combinaison de ces trois mouvements (translation X, translation Y et rotation) permet d'assurer le polissage de la surface sur son contour et sur toute sa longueur.Figures 3a and 3b on the one hand and 4a and 4b on the other hand illustrate two modes of implementation of finishing polishing (after hardening of the support of deformable material for example pitch or glue). The displacement along X (for example between 5 and 200 mm) allows a polishing parallel to the direction of the generatrices of the surface, whereas the translation movement along Y (for example between 1 and 100 mm) and the rotation along the axis (21, 22) allows the surface 6 to be polished to follow while rotating the polishing element 2 as it moves along Y. Thus, the combination of these three movements (X translation, Y translation and rotation) ensures the polishing of the surface on its contour and on all its length.

    Selon les figures 3a et 3b, la pièce 1 de section cylindrique ou plane est portée par le porte-pièce 23 et l'outil 4 est solidaire du support 25. Selon les figures 4a et 4b, la pièce 1 cylindrique ou plane est solidaire du support 25 et c'est l'outil 4 qui est porté par le porte-pièce 23.According to FIGS. 3a and 3b, the part 1 of cylindrical section or plane is carried by the workpiece holder 23 and the tool 4 is secured to the support 25. According to FIGS. 4a and 4b, the cylindrical or plane part 1 is integral with the support 25 and it is the tool 4 which is carried by the holder 23.

    Le procédé s'applique également à des surfaces ne présentant pas de génératrice. La mise en forme de l'élément 2 améliore les performances par rapport à la surface ayant la génératrice la plus proche.The method also applies to surfaces presenting no generator. The formatting of element 2 improves the performance relative to the surface with the nearest generator.

    Claims (13)

    Procédé de polissage de finition d'une surface à l'aide d'un élément de polissage et d'un abrasif, caractérisé en ce qu'il met en oeuvre : a) avant ledit polissage, le collage de l'élément de polissage sur un support en un matériau déformable de manière permanente et ; b) l'application d'une pression sur le support déformable une fois que l'élément de polissage est en contact avec la surface à polir de sorte que l'élément de polissage soit mis en forme pour épouser un contour de ladite surface. c) réalisation du polissage de finition à l'aide de l'élément de polissage ainsi mis en forme. A method of finishing polishing a surface with the aid of a polishing element and an abrasive, characterized in that it uses: a) prior to said polishing, bonding the polishing element on a support of permanently deformable material and; b) applying a pressure on the deformable support after the polishing element is in contact with the surface to be polished so that the polishing element is shaped to fit a contour of said surface. c) performing finishing polishing with the polishing element thus shaped. Procédé selon la revendication 1, caractérisé en ce que ledit matériau est déformable par fluage et/ou durcissable.Method according to claim 1, characterized in that said material is deformable by creep and / or curable. Procédé selon la revendication 2, caractérisé en ce que ledit matériau est de la poix qui est chauffée à une température permettant son fluage et qui après mise en forme de l'élément de polissage est ensuite refroidie pour obtenir un durcissement.Process according to claim 2, characterized in that said material is pitch which is heated to a temperature permitting its creep and which after shaping of the polishing element is then cooled to obtain hardening. Procédé selon la revendication 2, caractérisé en ce que ledit matériau est une colle de type gel qui après mise en forme de l'élément de polissage est durcie par exemple par polymérisation ou application d'un rayonnement, notamment ultra-violet.Process according to Claim 2, characterized in that the said material is a gel-type adhesive which after shaping of the polishing element is hardened, for example by polymerization or application of a radiation, in particular ultraviolet radiation. Procédé selon la revendication 2 caractérisé en ce que le matériau est du plâtre.Process according to Claim 2, characterized in that the material is plaster. Procédé selon une des revendications précédentes, caractérisé en ce que l'élément de polissage est un feutre.Method according to one of the preceding claims, characterized in that the polishing element is a felt. Procédé selon une des revendications précédentes, caractérisé en ce que ledit matériau déformable est porté par un support de polissage.Method according to one of the preceding claims, characterized in that said deformable material is carried by a polishing support. Procédé selon une des revendications précédentes, caractérisé en ce que le polissage de finition est réalisé à l'aide d'une machine comportant un dispositif de déplacement assurant un mouvement relatif entre l'élément de polissage et la surface à polir selon deux directions perpendiculaires.Method according to one of the preceding claims, characterized in that the finishing polishing is carried out with the aid of a machine comprising a displacement device ensuring a relative movement between the polishing element and the surface to be polished in two perpendicular directions. Procédé selon la revendication 8, caractérisé en ce que le dispositif de déplacement est agencé pour produire également un mouvement de rotation relatif autour d'un axe parallèle à l'une desdites deux directions perpendiculaires.Method according to claim 8, characterized in that the displacement device is arranged to also produce a relative rotational movement about an axis parallel to one of said two perpendicular directions. Procédé selon une des revendications 8 ou 9, caractérisé en ce que la surface présente une génératrice dont la direction est parallèle à l'une desdites deux directions perpendiculaires.Method according to one of claims 8 or 9, characterized in that the surface has a generatrix whose direction is parallel to one of said two perpendicular directions. Procédé caractérisé en ce que la surface sur laquelle le polissage de finition est réalisé a été préalablement soumise à : un pré-polissage ou polissage grossier un polissage. Process characterized in that the surface on which the finishing polishing is carried out has previously been subjected to: pre-polishing or coarse polishing polishing. Procédé selon la revendication 11 caractérisé en ce qu'après polissage, la surface présente une rugosité entre 3Å et 15Å et après polissage de finition, une rugosité entre 1Å et 5Å.Process according to Claim 11, characterized in that after polishing the surface has a roughness of between 3Å and 15Å and after finishing polishing a roughness between 1Å and 5Å. Procédé selon la revendication 12, caractérisé en ce que ladite rugosité après polissage de finition est comprise entre 1Å et 3Å pour les surfaces en verre, en silice, en silicium et en céramique, et entre 3Å et 5Å pour une surface en nickel revêtant une surface métallique.A process according to claim 12, characterized in that said roughness after finish polishing is between 1Å and 3Å for glass, silica, silicon and ceramic surfaces, and between 3Å and 5Å for a nickel surface coating a surface metallic.
    EP03292647A 2003-10-23 2003-10-23 Method for finish-polishing Expired - Lifetime EP1525947B1 (en)

    Priority Applications (6)

    Application Number Priority Date Filing Date Title
    DK03292647T DK1525947T3 (en) 2003-10-23 2003-10-23 Process of final polishing
    EP03292647A EP1525947B1 (en) 2003-10-23 2003-10-23 Method for finish-polishing
    ES03292647T ES2262958T3 (en) 2003-10-23 2003-10-23 FINISH POLISHING PROCEDURE.
    AT03292647T ATE322957T1 (en) 2003-10-23 2003-10-23 PROCESS FOR FINAL POLISHING
    DE60304579T DE60304579T2 (en) 2003-10-23 2003-10-23 Process for final polishing
    US10/705,017 US20050101226A1 (en) 2003-10-23 2003-11-11 Finishing polishing method

    Applications Claiming Priority (2)

    Application Number Priority Date Filing Date Title
    EP03292647A EP1525947B1 (en) 2003-10-23 2003-10-23 Method for finish-polishing
    US10/705,017 US20050101226A1 (en) 2003-10-23 2003-11-11 Finishing polishing method

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    EP1525947A1 true EP1525947A1 (en) 2005-04-27
    EP1525947B1 EP1525947B1 (en) 2006-04-12

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    EP (1) EP1525947B1 (en)
    AT (1) ATE322957T1 (en)
    DE (1) DE60304579T2 (en)
    DK (1) DK1525947T3 (en)
    ES (1) ES2262958T3 (en)

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    TWI584914B (en) 2013-07-22 2017-06-01 佳能股份有限公司 Component manufacturing method and polishing apparatus

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    Publication number Publication date
    ATE322957T1 (en) 2006-04-15
    DK1525947T3 (en) 2006-07-31
    DE60304579T2 (en) 2007-05-10
    DE60304579D1 (en) 2006-05-24
    ES2262958T3 (en) 2006-12-01
    EP1525947B1 (en) 2006-04-12
    US20050101226A1 (en) 2005-05-12

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