EP1466097B1 - Flüssigkeitspumpe - Google Patents
Flüssigkeitspumpe Download PDFInfo
- Publication number
- EP1466097B1 EP1466097B1 EP03729208A EP03729208A EP1466097B1 EP 1466097 B1 EP1466097 B1 EP 1466097B1 EP 03729208 A EP03729208 A EP 03729208A EP 03729208 A EP03729208 A EP 03729208A EP 1466097 B1 EP1466097 B1 EP 1466097B1
- Authority
- EP
- European Patent Office
- Prior art keywords
- piezo
- piston
- movement
- pump
- liquid pump
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000007788 liquid Substances 0.000 title claims description 26
- 238000005086 pumping Methods 0.000 claims description 7
- 230000000694 effects Effects 0.000 claims description 4
- 230000003014 reinforcing effect Effects 0.000 claims description 4
- 230000002787 reinforcement Effects 0.000 claims description 3
- 230000009471 action Effects 0.000 description 1
- 230000006978 adaptation Effects 0.000 description 1
- 239000005557 antagonist Substances 0.000 description 1
- 238000013459 approach Methods 0.000 description 1
- 238000005452 bending Methods 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 230000006835 compression Effects 0.000 description 1
- 238000007906 compression Methods 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 230000001066 destructive effect Effects 0.000 description 1
- 230000005284 excitation Effects 0.000 description 1
- 239000012530 fluid Substances 0.000 description 1
- 230000017525 heat dissipation Effects 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
Images
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B17/00—Pumps characterised by combination with, or adaptation to, specific driving engines or motors
- F04B17/003—Pumps characterised by combination with, or adaptation to, specific driving engines or motors driven by piezoelectric means
Definitions
- the invention relates to a liquid pump according to the preamble of claim 1.
- Such a pump is known from JP60098181 A.
- a liquid pump in which the with Inlet and outlet valves provided partially from a pump housing cup-shaped biased piezoelectric element, which is deformed upon application of a voltage such that the volume of Pump chamber is reduced, whereby the pumping effect is achieved.
- a liquid pump according to DE 8704314 U1 presses a piezoelectric actuator externally on a pump chamber equipped with a flexible pump membrane, whereby also their volume at each stroke of the piezoelectric actuator is reduced, whereby the liquid is squeezed out, that is pumped.
- DE 39 10 331 A1 discloses an arrangement with a liquid pump from a Pump housing enclosing Pumpengereheatuäse with attached Inlet and exhaust valves that the pump with each movement of the piston performs a pumping effect.
- the piston is characterized by two excitation coils directly moved.
- a disadvantage of pumps according to DE 39 10 331 A1 affects that a Electromagnetic drive requires a lot of energy at low pumping power and also when using Piezostellelementen as a drive, the pump power proportional to the piezo volume remains, reducing the cost and weight issues can not be solved.
- the object is in a liquid pump of the type described above solved by the fact that the piezo-actuator elements transverse to the direction of movement of the Piston with amplifier frame for the implementation of the stroke of the piezo actuator elements are arranged.
- Such amplifier or conversion frames change the direction of movement of the hub.
- the movement with high power and low lift which distinguishes a piezoelectric element, converted into a movement with lower power, but higher lift.
- This is especially true for liquid pumps advantageous, since here also a reduced force sufficient for pumping, the higher stroke but directly increases the pump power.
- the liquid pump according to the invention has a higher power density as conventional liquid pumps with piezo drive.
- the piezo-actuator elements are in antagonist arrangement placed.
- the so differentially working piezoelectric elements are biased over the pump housing and the respective opponent. This prevents the piezo-actuator elements from being subjected to tensile loading be claimed, resulting in a reduction in the burden of these components leads.
- the frequency of the piezo actuator elements can be adapted to the flow rate become.
- the piezoelectric elements are preferred in their resonance frequency operated.
- An adaptation to the respective desired flow rate can here ensured by the size of the piston or the stroke of the piezo actuator elements become.
- the resonance mode of the piezo actuator ensures a higher energy coupling, which reduces the necessary piezo volume can.
- the valves which regulate the flow in and out of the pump chamber, can be actively controlled in dependence on the frequency of the piezo-actuator elements, Preferably, the inlet and outlet valves but passive valves. Especially it is preferably spring-mass oscillator. With these is that Ratio of spring constant to mass to the frequency of the piezo actuator elements Voted.
- the valves respond to the different pressure conditions in the liquid and open and close independently. In addition, the time required by the valve opening and closing time on the Frequency of the pump adjusted.
- the pump chamber 10 is through the pump housing 11 limited. This can increase the inherent rigidity and to improve heat dissipation, contain outer fins which however, are not shown.
- the pump chamber is defined by the piston 20 divided into two sub-chambers. These sub-chambers each have an inflow with an inlet valve 12, 13 and a respective outlet with an outlet valve 14, 15th
- the piston which by conventional means against the pump housing is sealed, is by a first and second piezoelectric actuator 21, 22 such moves that one sub-chamber is enlarged while the other sub-chamber simultaneously reduced in volume.
- a first and second piezoelectric actuator 21, 22 such moves that one sub-chamber is enlarged while the other sub-chamber simultaneously reduced in volume.
- the left sub-chamber when the piston is moved in the figure to the right. in this connection the inlet valve 12 is open and the outlet valve 14 is closed while the inlet valve 13 is closed and the outlet valve 15 is opened.
- the inlet valve 12 is open and the outlet valve 14 is closed while the inlet valve 13 is closed and the outlet valve 15 is opened.
- the open valves are closed and the closed Valves open, causing the first sucked into the left sub-chamber liquid is now pumped out, while the right sub-chamber fills again.
- the different access lines can be supplied by a central line as well as the pumped liquid in an overall line can be united. This ensures that every movement the piston 20 a pumping operation is performed.
- the movement of the piston 20 in the pump chamber 10 is by a first Piezo actuator 21 and a second piezoelectric actuator 22 ensures.
- the piezoelectric elements 21, 22 with their stroke transverse to the direction of movement of the Piston 20 installed.
- the implementation of the direction of movement takes place via a first and a second reinforcing frame 21 a, 22 a.
- Such reinforcing frames For example, consist of solid frame parts, the one Octagon, where on two opposite sides the force of the Piezostellelements attacks, wherein the frame parts at the corners of the octagon are flexibly configured via bending elements.
- a lifting movement of the first piezoelectric element 21 causes a Extension of the frame in the direction of the stroke and thus a pulling movement on Piston 20, whereby the second reinforcing frame 22a along the direction of movement of the piston 20 stretched and the second piezoelectric actuator 22 compressed becomes.
- the piezoelectric elements 21, 22 are biased and become not burdened with tension during the return movement.
- the intake valves 12, 13 and the exhaust valves 14, 15 are passive valves, according to the spring-mass principle.
- the closure part of the valve (not shown) to a with a characteristic frequency oscillating spring-mass component coupled. This frequency is on the frequency of the piezo-actuator elements so that the lowest possible switching or opening or closing times arise.
Landscapes
- Engineering & Computer Science (AREA)
- Reciprocating Pumps (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
Description
- Fig. 1
- einen schematischen Aufbau einer erfindungsgemäßen Flüssigkeitspumpe mit Piezostellelementen, deren Hub mittels achtseitigen Verstärkungsrahmen umgesetzt werden.
Claims (6)
- Flüssigkeitspumpe (1) aus einem eine Pumpenkammer (10) umschließenden Pumpengehäuse (11) mit in der Pumpenkammer (10) einen Kolben (20) bewegenden Piezostellelementen (21,22) und derart angebrachten Einlassventilen (12, 13) und Auslassventilen (14, 15), dass die Flüssigkeitspumpe (1) bei jeder Bewegung des Kolbens (20) einen Pumpeffekt durchführt, wobei die Piezoelemente (21, 22) quer zur Bewegungsrichtung des Kolbens (20) mit Verstärkerrahmen (21a, 22a) zur Umsetzung des Hubs der Piezostellelemente (21, 22) angeordnet sind,
dadurch gekennzeichnet, das
eine Hubbewegung des ersten Piezostellelementes (21) eine Streckung des Verstärkungsrahmens (21a) in Richtung des Hubes und damit eine Zugbewegung am Kolben (20) bewirkt, wodurch der zweite Verstärkungsrahmen (22a) entlang der Bewegungsrichtung des Kolbens (20) gedehnt und das zweite Piezostellelement (22) gestaucht wird. - Flüssigkeitspumpe (1) nach Anspruch 1, dadurch gekennzeichnet, dass die Piezostellelemente (21, 22) senkrecht zur Bewegungsrichtung des Kolbens (20) verlaufend angeordnet sind.
- Flüssigkeitspumpe (1) nach Anspruch 1oder 2, dadurch gekennzeichnet, dass die in Gegenspieleranordnung platzierten Piezostellelemente (21,22) über das Pumpengehäuse (11) vorgespannt sind.
- Flüssigkeitspumpe (1) nach einem oder mehreren der vorangegangenen Ansprüche, dadurch gekennzeichnet, dass die Piezostellelemente (21,22) in ihrer Resonanzfrequenz schwingen.
- Flüssigkeitspumpe (1) nach einem oder mehreren der vorangegangenen Ansprüche, dadurch gekennzeichnet, dass die Einlassventile (12,13) und Auslassventile (14,15) passive Ventile sind.
- Flüssigkeitspumpe (1) nach Anspruch 5, dadurch gekennzeichnet, dass die passiven Ventile auf die Frequenz der Piezostellelemente (21,22) abgestimmte Feder-Masse-Schwinger sind.
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE10201027 | 2002-01-11 | ||
DE10201027A DE10201027C1 (de) | 2002-01-11 | 2002-01-11 | Flüssigkeitspumpe |
PCT/DE2003/000021 WO2003058066A1 (de) | 2002-01-11 | 2003-01-08 | Flüssigkeitspumpe |
Publications (2)
Publication Number | Publication Date |
---|---|
EP1466097A1 EP1466097A1 (de) | 2004-10-13 |
EP1466097B1 true EP1466097B1 (de) | 2005-07-27 |
Family
ID=7712029
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP03729208A Expired - Lifetime EP1466097B1 (de) | 2002-01-11 | 2003-01-08 | Flüssigkeitspumpe |
Country Status (3)
Country | Link |
---|---|
EP (1) | EP1466097B1 (de) |
DE (2) | DE10201027C1 (de) |
WO (1) | WO2003058066A1 (de) |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE102004049171A1 (de) * | 2004-10-08 | 2006-04-13 | J. Eberspächer GmbH & Co. KG | Dosierpumpe insbesondere Kraftstoffdosierpumpe für ein Fahrzeugheizgerät oder ein Reformersystem |
GB0700114D0 (en) | 2007-01-04 | 2007-02-14 | Qinetiq Ltd | Subsea chemical injection system and pumps therefor |
EP3529665B1 (de) | 2016-10-20 | 2022-04-13 | ASML Netherlands B.V. | Druckregelventil, flüssigkeitshandhabungsstruktur für lithografische vorrichtung und lithografische vorrichtung |
CN110761965B (zh) * | 2019-12-11 | 2024-09-20 | 潍坊聚德电子有限公司 | 微流量泵 |
CN112196754B (zh) * | 2020-10-04 | 2022-06-17 | 长春工业大学 | 一种基于菱形放大机构的一体阀压电泵 |
Family Cites Families (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE3320443C2 (de) * | 1983-06-06 | 1994-08-18 | Siemens Ag | Flüssigkeitspumpe |
JPS6098182A (ja) * | 1983-11-04 | 1985-06-01 | Asahi Okuma Ind Co Ltd | ダイヤフラムポンプ |
JPS6098181A (ja) * | 1983-11-04 | 1985-06-01 | Asahi Okuma Ind Co Ltd | ダイヤフラムポンプ |
DE8704314U1 (de) * | 1987-03-23 | 1987-06-25 | Siemens AG, 1000 Berlin und 8000 München | Membranpumpe |
DE3910331A1 (de) * | 1989-03-30 | 1990-10-04 | Infus Hospitalbedarf Gmbh & Co | Elektromagnetisch steuerbare membranpumpe sowie deren anwendung |
JPH05164052A (ja) * | 1991-12-13 | 1993-06-29 | Olympus Optical Co Ltd | 圧電ポンプ |
US5892314A (en) * | 1994-08-29 | 1999-04-06 | Oceaneering International, Inc. | Piezoelectric circuit |
JPH0885436A (ja) * | 1994-09-19 | 1996-04-02 | Nissan Motor Co Ltd | 液圧制御用アクチュエータ、及び車両の走行制御装置 |
US6074178A (en) * | 1997-04-15 | 2000-06-13 | Face International Corp. | Piezoelectrically actuated peristaltic pump |
JPH11182421A (ja) * | 1997-12-24 | 1999-07-06 | Nissan Motor Co Ltd | ポンプ |
US6514047B2 (en) * | 2001-05-04 | 2003-02-04 | Macrosonix Corporation | Linear resonance pump and methods for compressing fluid |
-
2002
- 2002-01-11 DE DE10201027A patent/DE10201027C1/de not_active Expired - Fee Related
-
2003
- 2003-01-08 WO PCT/DE2003/000021 patent/WO2003058066A1/de active IP Right Grant
- 2003-01-08 DE DE50300855T patent/DE50300855D1/de not_active Expired - Lifetime
- 2003-01-08 EP EP03729208A patent/EP1466097B1/de not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
EP1466097A1 (de) | 2004-10-13 |
DE10201027C1 (de) | 2003-08-07 |
DE50300855D1 (de) | 2005-09-01 |
WO2003058066A1 (de) | 2003-07-17 |
WO2003058066B1 (de) | 2003-11-13 |
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