EP1408237A1 - Turbomolekularpumpe - Google Patents

Turbomolekularpumpe Download PDF

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Publication number
EP1408237A1
EP1408237A1 EP03356142A EP03356142A EP1408237A1 EP 1408237 A1 EP1408237 A1 EP 1408237A1 EP 03356142 A EP03356142 A EP 03356142A EP 03356142 A EP03356142 A EP 03356142A EP 1408237 A1 EP1408237 A1 EP 1408237A1
Authority
EP
European Patent Office
Prior art keywords
skirt
rotor
section
downstream
zone
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP03356142A
Other languages
English (en)
French (fr)
Inventor
Lionel Favre-Felix
Olivier Dauvillier
André Bouille
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Alcatel Lucent SAS
Original Assignee
Alcatel CIT SA
Alcatel SA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Alcatel CIT SA, Alcatel SA filed Critical Alcatel CIT SA
Publication of EP1408237A1 publication Critical patent/EP1408237A1/de
Withdrawn legal-status Critical Current

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/02—Selection of particular materials
    • F04D29/023—Selection of particular materials especially adapted for elastic fluid pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/044—Holweck-type pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05D—INDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
    • F05D2300/00—Materials; Properties thereof
    • F05D2300/10—Metals, alloys or intermetallic compounds
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05D—INDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
    • F05D2300/00—Materials; Properties thereof
    • F05D2300/40—Organic materials
    • F05D2300/43—Synthetic polymers, e.g. plastics; Rubber
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05D—INDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
    • F05D2300/00—Materials; Properties thereof
    • F05D2300/60—Properties or characteristics given to material by treatment or manufacturing
    • F05D2300/603—Composites; e.g. fibre-reinforced

Definitions

  • the present invention relates to vacuum pumps rapid rotation used to generate a high vacuum in a pipe and / or vacuum enclosure.
  • Vacuum generation requires the use of pumps able to quickly generate and maintain a high vacuum suitable for the machining or treatment process.
  • turbomolecular type pumps composed of a pump body in which a rotor is rotated fast, for example a rotation at more than thirty thousand revolutions per minute.
  • the rotor acquires very high kinetic energy, and undergoes high mechanical stresses which justify the choice of materials appropriate.
  • the rotor of a turbomolecular vacuum pump consists an upstream section (in the direction of gas flow) of the rotor with turbo-type blades and a downstream section (in the direction of gas flow) rotor in the form of a HOLWECK type skirt.
  • upstream and downstream respectively designate the parts of the pump unladen traveled first and last by the gases pumped into the direction of their flow, in operation.
  • the upstream section with turbo blades has a shape complex, which is made of a suitable metal such as aluminum or an aluminum alloy.
  • the shape is too complex to allow economical production of a composite material.
  • the downstream section in the form of a HOLWECK type skirt, is a thin wall of revolution, largely cylindrical, driven in rotation in a downstream section of stator having grooves helical with progressively reduced section.
  • downstream section in the shape of a HOLWECK skirt is in one composite material with organic matrix, based on resin charged with fibers.
  • This solution offers the advantage of using a material having better mechanical properties.
  • the downstream section is connects to the upstream section according to an annular connection zone. In this annular connection zone, the matrix composite material organic component of the HOLWECK skirt is joined to the section upstream metal.
  • the problem proposed by the present invention is to design a new turbo pump rotor structure molecular which allows, without risk of degradation of the rotor, withstand higher rotational speeds or exhibit a larger HOLWECK skirt diameter, in order to increase the pumping characteristics of the pump.
  • Another object of the invention is to design such a rotor structure which can be manufactured at low cost, with an industrializable process.
  • the pump according to the invention must support the conditions of usual operation, especially in temperature: the rotor must be able to withstand temperatures down to -20 ° C during transport, and rising up to + 150 ° C in operation.
  • the rotor must have good qualities of centering, avoiding any risk of contact between the rotor skirt and the stator during operation at nominal speed.
  • the idea behind the invention is to design a HOLWECK skirt in an organic matrix composite material, the mechanical characteristics vary depending on the area longitudinal view of the skirt.
  • the structure of reinforcement includes long fibers wound in a helix according to constant pitch and coated with resin, the rate of resin being variable according to the longitudinal zone considered of the skirt.
  • the structure of reinforcement includes long fibers wound in a helix and coated with resin at a constant rate, the pitch of the propeller being variable according to the longitudinal zone considered of the skirt.
  • the structure of reinforcement includes long fibers wound in a helix and coated with resin, the pitch of the propeller and the rate of resin being both variables according to the longitudinal area considered in the skirt.
  • the step variation associated with the variation of the proportion of quantity of resin to quantity of fiber is likely, if no precaution is taken elsewhere, cause variations in diameter or thickness of the skirt composite.
  • suitable manufacturing tools are necessary. For example, and without limitation, a mandrel obtained by machining can be used.
  • the propeller can advantageously have an angle close to 0 ° in the downstream area of the skirt, and have an angle greater than 0 °, for example 20 to 30 °, in and near the annular connection zone.
  • the skirt can be cylindrical.
  • the skirt may include an annular connection zone, a downstream section of cylindrical skirt larger in diameter than the annular connection zone and a zone intermediate connection between the annular connection zone and the downstream section of skirt.
  • This increases the speed in rotation tangential of the skirt relative to the stator, which increases the compression ratio of the HOLWECK stage of the pump.
  • the increase in diameter makes it possible to accommodate a greater number of grooves in the HOLWECK part of the stator, increasing the pump flow.
  • FIG. 1 illustrating a turbomolecular pump structure 1 secured to the wall 2 a vacuum chamber 3.
  • the turbomolecular pump 1 comprises a pump body 4 or stator in which a rotor 5 rotates at high speed axial rotation along the axis of rotation I.
  • the pump body 4 has a coaxial suction port 6, through which penetrate the gases pumped 7, and a discharge orifice 8 through which are evacuated the outlet gas 9.
  • the rotor 5 is rotated in the pump body 4 by an internal motor 10, and is guided laterally by magnetic or mechanical bearings 11 and 12.
  • the wall 2 of the vacuum enclosure 3 includes an orifice outlet 13, corresponding to the suction port 6 of the vacuum 1, and generally constitutes a closed enclosure isolated from outside and in which the vacuum pump 1 can create a vacuum control.
  • the rotor 5 comprises an upstream section of rotor 5a comprising blades such as the blade 5b, and comprises a section downstream of rotor 5c in the form of a HOLWECK type skirt. Facing the stretch upstream 5a of rotor, stator 4 comprises an upstream section of stator 4a with blades such as the blade 4b. Facing the downstream section of rotor 5c with HOLWECK skirt the stator 4 has a downstream section of stator 4c with helical grooves 4d of HOLWECK type tel as more apparent in Figure 6.
  • FIG. 2 illustrating a rotor sector according to the present invention
  • the upstream rotor section 5a is made of a metal or alloy suitable, for example aluminum or aluminum alloy.
  • the downstream section of rotor 5c with HOLWECK skirt is made of a material composite with organic matrix, based on resin filled with fibers reinforcement.
  • the downstream section with HOLWECK 5c skirt is connected to the upstream section 5a along an annular connection zone 5d.
  • the reinforcing fibers can advantageously be glass fibers or carbon fibers, occurring under wick shape (up to several thousand filaments per wick) long wound continuously on a reel by a process filament winding.
  • Resins can be resins thermoplastics (for example polyester ether ketone PEEK) or thermosets (eg epoxy).
  • the downstream section of rotor 5c with skirt HOLWECK in organic matrix composite material includes a internal fiber reinforcement structure which gives the skirt mechanical characteristics varying depending on the area longitudinal view of the skirt.
  • a greater flexibility and greater expansion capacity thermal in the annular connection zone 5d to follow the deformations which occur in the upstream section of rotor 5a in metal during the rapid rotation of the rotor and during its warming up.
  • the material organic matrix composite of the HOLWECK skirt has mechanical and thermal characteristics close to those of metal or alloy making up the upstream rotor section 5a.
  • the material organic matrix composite has more characteristics suitable for holding in this downstream area of the 5th skirt the mechanical stresses resulting from the rapid rotation of the rotor in operation.
  • the fiber reinforcement structure of the downstream section with skirt type HOLWECK 5c includes long fibers helically wound at the periphery of the skirt.
  • the fibers are embedded in resin, the resin being polymerized.
  • Figure 11 illustrates schematically a process for making a resin skirt armed with long fibers wound in a helix: a mandrel 14 is rotated around a shaft 15, and the mandrel has an external surface whose shape conditions that of the skirt to achieve.
  • the reinforcing fibers are in the form of a wick wound on a reel 16.
  • the wick is unwound from the reel 16, passes through a resin tank 17, is guided by a wire guide 18 which the helical winding on the mandrel 14 during the rotation of the mandrel.
  • the wick is arranged on the mandrel 14 according to a propeller whose the pitch can be chosen by the operator.
  • FIG. 4 illustrates a first embodiment of a rotor 5 according to the present invention.
  • the rotor 5 comprises the upstream section of metal rotor 5a with the blades such as the blade 5b, and includes the downstream section of rotor 5c, in the form of a skirt cylindrical tubular type HOLWECK.
  • the 5d annular connection zone and an intermediate zone of connection 5g which is adjacent to it have an internal structure reinforcement such as their mechanical characteristics and are close to those of the metal or alloy composing the upstream section of rotor 5a.
  • the reinforcement structure includes long fibers wound in a helix at a pitch relatively large, the fibers making with the transverse plane an angle greater than 0 °, for example from 5 ° to 20 ° depending on the desired mechanical properties.
  • the long fibers are wound in a helix with an angle close to 0 °, forming contiguous turns which significantly improve the mechanical resistance of the skirt.
  • FIG. 5 illustrates a preferred embodiment of rotor 5 of a turbomolecular pump according to the present invention.
  • the upstream section of rotor 5a for example identical structure to that of the embodiment of the figure 4, and a downstream section of rotor 5c whose diameter varies in depending on the position considered along the longitudinal axis: the skirt of the downstream section of rotor 5c comprises the annular zone of link 5d, the downstream section of skirt 5th cylindrical with larger diameter as the annular connection area 5d, and an area connection intermediate 5g with diameter gradually crescent that links the 5d annular bond area cylindrical and the downstream section of skirt 5th cylindrical.
  • the annular zone of 5d bond has reinforcing fibers at an angle not zero with the transverse plane, while the downstream section of skirt 5e and possibly the intermediate connection area 5g have contiguous fibers forming with the transverse plane a angle close to 0 °.
  • the downstream section of 5th cylindrical skirt may have a diameter significantly higher, which increases the tangential speed of the skirt relative to the stator for the same angular speed of rotation of the rotor, and this allows the number of grooves 4d in the stator section HOLWECK 4c ( Figure 6).
  • Figures 9 and 10 illustrate the effect of the angle the fibers relative to the transverse plane of the skirt, on the one hand on the mechanical resistance evaluated by the YOUNG module longitudinal, on the other hand on the coefficient of expansion thermal.
  • the YOUNG module is at a maximum A2 for an angle of 0 °, i.e. when the fibers are in a transverse plane.
  • the YOUNG module decreases sharply when the fiber angle increases to an angle of 20 ° approximately, then it decreases more slowly as increasing the angle.
  • a fiber angle greater than 0 ° is chosen, for example a 10 ° angle to position at point A1 of curve A in the figure 9, and to go to point B1 of curve B in figure 10: relatively low YOUNG modulus and coefficient of expansion relatively high thermal.
  • a fiber angle close to 0 ° we choose a fiber angle close to 0 °, so that we place our at point A2 of curve A of figure 9 and at point B2 of curve B in FIG. 10: maximum YOUNG modulus, and minimum coefficient of thermal expansion.
  • a difficulty lies in the fact that the skirt section having to present mechanical characteristics of flexibility occupies one end of the skirt, namely the annular connection zone 5d. Indeed, in this area, the fibers must have a non-zero angle by in relation to the transverse plane, and these fibers must be wound in several layers to achieve sufficient reinforcement. So, when a helical fiber is wound in the direction of the upstream end of the annular connection zone 5d, this makes an angle to the end of the skirt, and you have to move the thread guide in the other direction as soon as the fiber reaches this end. Reversing the winding direction is not easy, and it a way must be found to facilitate this operation.
  • the fibers wound in a helix at an angle greater than 0 ° in said central zone 22 are cut. It does not affect the qualities mechanical of the skirt obtained. On the contrary, it allows great regularity of winding of the fibers, and therefore a great regularity mechanical properties of the skirt in the annular zone of link.
  • the mechanical properties of the composite material are obtained in modulating the pitch of the fiber winding helix, i.e. the angle that the turns of fibers make in relation to the plane transverse.
  • long fibers are helically wound and coated with resin, the helix having a pitch constant.

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Structures Of Non-Positive Displacement Pumps (AREA)
EP03356142A 2002-10-11 2003-10-02 Turbomolekularpumpe Withdrawn EP1408237A1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FR0212693 2002-10-11
FR0212693A FR2845737B1 (fr) 2002-10-11 2002-10-11 Pompe turbomoleculaire a jupe composite

Publications (1)

Publication Number Publication Date
EP1408237A1 true EP1408237A1 (de) 2004-04-14

Family

ID=32011548

Family Applications (1)

Application Number Title Priority Date Filing Date
EP03356142A Withdrawn EP1408237A1 (de) 2002-10-11 2003-10-02 Turbomolekularpumpe

Country Status (4)

Country Link
US (1) US6887032B2 (de)
EP (1) EP1408237A1 (de)
JP (1) JP2004278512A (de)
FR (1) FR2845737B1 (de)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2420379A (en) * 2004-11-18 2006-05-24 Boc Group Plc Vacuum pump having a motor combined with an impeller
EP2565463A2 (de) 2011-09-05 2013-03-06 Pfeiffer Vacuum GmbH Vakuumpumpe
DE102011119506A1 (de) 2011-11-26 2013-05-29 Pfeiffer Vacuum Gmbh Schnell drehender Rotor für eine Vakuumpumpe
EP4155550A1 (de) * 2022-12-30 2023-03-29 Pfeiffer Vacuum Technology AG Vakuumpumpe und verfahren zum betreiben einer vakuumpumpe
EP4151860A3 (de) * 2022-12-22 2023-04-05 Pfeiffer Vacuum Technology AG Vakuumpumpe
US11739764B2 (en) 2018-02-12 2023-08-29 Edwards Limited Reinforced vacuum system component

Families Citing this family (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7938627B2 (en) * 2004-11-12 2011-05-10 Board Of Trustees Of Michigan State University Woven turbomachine impeller
JP2007309245A (ja) * 2006-05-19 2007-11-29 Boc Edwards Kk 真空ポンプ
JP4935509B2 (ja) * 2007-06-05 2012-05-23 株式会社島津製作所 ターボ分子ポンプ
GB0901872D0 (en) * 2009-02-06 2009-03-11 Edwards Ltd Multiple inlet vacuum pumps
US8182213B2 (en) * 2009-04-22 2012-05-22 Pratt & Whitney Canada Corp. Vane assembly with removable vanes
ITTO20100070A1 (it) * 2010-02-01 2011-08-02 Varian Spa Pompa da vuoto, in particolare pompa da vuoto turbomolecolare.
JP5735963B2 (ja) * 2010-06-24 2015-06-17 エドワーズ株式会社 真空ポンプ
CN102933853B (zh) * 2010-07-02 2015-11-25 埃地沃兹日本有限公司 真空泵
JP6047091B2 (ja) 2011-06-16 2016-12-21 エドワーズ株式会社 ロータ及び真空ポンプ
JP6126002B2 (ja) * 2011-06-30 2017-05-10 エドワーズ株式会社 円筒体の製造方法及び真空ポンプの製造方法
TWI586893B (zh) 2011-11-30 2017-06-11 Edwards Japan Ltd Vacuum pump
JP2014031734A (ja) 2012-08-01 2014-02-20 Edwards Kk 真空ポンプ用部品および真空ポンプ
JP6077804B2 (ja) * 2012-09-06 2017-02-08 エドワーズ株式会社 固定側部材及び真空ポンプ
CN104541063B (zh) 2012-09-26 2018-08-31 埃地沃兹日本有限公司 转子及具备该转子的真空泵
US10193430B2 (en) 2013-03-15 2019-01-29 Board Of Trustees Of Michigan State University Electromagnetic device having discrete wires
DE202013006436U1 (de) * 2013-07-17 2014-10-22 Oerlikon Leybold Vacuum Gmbh Rotorelement für eine Vakuumpumpe
US10393124B2 (en) * 2015-06-08 2019-08-27 Leybold Gmbh Vacuum-pump rotor
GB201715151D0 (en) 2017-09-20 2017-11-01 Edwards Ltd A drag pump and a set of vacuum pumps including a drag pump
GB2600506B (en) * 2018-02-12 2022-09-14 Edwards Ltd Reinforced vacuum system component
FR3093544B1 (fr) * 2019-03-05 2021-03-12 Pfeiffer Vacuum Pompe à vide turbomoléculaire et procédé de purge

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EP0603694A1 (de) * 1992-12-24 1994-06-29 BALZERS-PFEIFFER GmbH Vakuumpumpsystem
DE19915307A1 (de) * 1999-04-03 2000-10-05 Leybold Vakuum Gmbh Reibungsvakuumpumpe mit aus Welle und Rotor bestehender Rotoreinheit
US20020054815A1 (en) * 1999-03-23 2002-05-09 Ebara Corporation Turbo-molecular pump

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JP3961273B2 (ja) * 2001-12-04 2007-08-22 Ｂｏｃエドワーズ株式会社 真空ポンプ

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0603694A1 (de) * 1992-12-24 1994-06-29 BALZERS-PFEIFFER GmbH Vakuumpumpsystem
US20020054815A1 (en) * 1999-03-23 2002-05-09 Ebara Corporation Turbo-molecular pump
DE19915307A1 (de) * 1999-04-03 2000-10-05 Leybold Vakuum Gmbh Reibungsvakuumpumpe mit aus Welle und Rotor bestehender Rotoreinheit

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2420379A (en) * 2004-11-18 2006-05-24 Boc Group Plc Vacuum pump having a motor combined with an impeller
EP2565463A2 (de) 2011-09-05 2013-03-06 Pfeiffer Vacuum GmbH Vakuumpumpe
DE102011112691A1 (de) 2011-09-05 2013-03-07 Pfeiffer Vacuum Gmbh Vakuumpumpe
DE102011119506A1 (de) 2011-11-26 2013-05-29 Pfeiffer Vacuum Gmbh Schnell drehender Rotor für eine Vakuumpumpe
EP2597313A2 (de) 2011-11-26 2013-05-29 Pfeiffer Vacuum Gmbh Schnell drehender Rotor für eine Vakuumpumpe
EP2597313A3 (de) * 2011-11-26 2014-11-12 Pfeiffer Vacuum Gmbh Schnell drehender Rotor für eine Vakuumpumpe
US11739764B2 (en) 2018-02-12 2023-08-29 Edwards Limited Reinforced vacuum system component
EP4151860A3 (de) * 2022-12-22 2023-04-05 Pfeiffer Vacuum Technology AG Vakuumpumpe
EP4155550A1 (de) * 2022-12-30 2023-03-29 Pfeiffer Vacuum Technology AG Vakuumpumpe und verfahren zum betreiben einer vakuumpumpe

Also Published As

Publication number Publication date
JP2004278512A (ja) 2004-10-07
US6887032B2 (en) 2005-05-03
US20040076510A1 (en) 2004-04-22
FR2845737A1 (fr) 2004-04-16
FR2845737B1 (fr) 2005-01-14

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