EP4151860A3 - Vakuumpumpe - Google Patents
Vakuumpumpe Download PDFInfo
- Publication number
- EP4151860A3 EP4151860A3 EP22216232.3A EP22216232A EP4151860A3 EP 4151860 A3 EP4151860 A3 EP 4151860A3 EP 22216232 A EP22216232 A EP 22216232A EP 4151860 A3 EP4151860 A3 EP 4151860A3
- Authority
- EP
- European Patent Office
- Prior art keywords
- rotor
- holweck
- component
- collar
- vacuum pump
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D19/00—Axial-flow pumps
- F04D19/02—Multi-stage pumps
- F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D19/00—Axial-flow pumps
- F04D19/02—Multi-stage pumps
- F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
- F04D19/042—Turbomolecular vacuum pumps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D19/00—Axial-flow pumps
- F04D19/02—Multi-stage pumps
- F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
- F04D19/044—Holweck-type pumps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D19/00—Axial-flow pumps
- F04D19/02—Multi-stage pumps
- F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
- F04D19/046—Combinations of two or more different types of pumps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D29/00—Details, component parts, or accessories
- F04D29/02—Selection of particular materials
- F04D29/023—Selection of particular materials especially adapted for elastic fluid pumps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D29/00—Details, component parts, or accessories
- F04D29/26—Rotors specially for elastic fluids
- F04D29/32—Rotors specially for elastic fluids for axial flow pumps
- F04D29/321—Rotors specially for elastic fluids for axial flow pumps for axial flow compressors
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
- F05D—INDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
- F05D2300/00—Materials; Properties thereof
- F05D2300/10—Metals, alloys or intermetallic compounds
- F05D2300/17—Alloys
- F05D2300/173—Aluminium alloys, e.g. AlCuMgPb
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Non-Positive Displacement Air Blowers (AREA)
Abstract
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
EP22216232.3A EP4151860A3 (de) | 2022-12-22 | 2022-12-22 | Vakuumpumpe |
EP24166455.6A EP4390144A3 (de) | 2022-12-22 | 2022-12-22 | Vakuumpumpe |
EP24166459.8A EP4390145A2 (de) | 2022-12-22 | 2022-12-22 | Vakuumpumpe |
JP2023076120A JP2024091224A (ja) | 2022-12-22 | 2023-05-02 | 真空ポンプ |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
EP22216232.3A EP4151860A3 (de) | 2022-12-22 | 2022-12-22 | Vakuumpumpe |
Related Child Applications (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP24166459.8A Division EP4390145A2 (de) | 2022-12-22 | 2022-12-22 | Vakuumpumpe |
EP24166455.6A Division EP4390144A3 (de) | 2022-12-22 | 2022-12-22 | Vakuumpumpe |
Publications (2)
Publication Number | Publication Date |
---|---|
EP4151860A2 EP4151860A2 (de) | 2023-03-22 |
EP4151860A3 true EP4151860A3 (de) | 2023-04-05 |
Family
ID=84569606
Family Applications (3)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP24166459.8A Pending EP4390145A2 (de) | 2022-12-22 | 2022-12-22 | Vakuumpumpe |
EP24166455.6A Pending EP4390144A3 (de) | 2022-12-22 | 2022-12-22 | Vakuumpumpe |
EP22216232.3A Pending EP4151860A3 (de) | 2022-12-22 | 2022-12-22 | Vakuumpumpe |
Family Applications Before (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP24166459.8A Pending EP4390145A2 (de) | 2022-12-22 | 2022-12-22 | Vakuumpumpe |
EP24166455.6A Pending EP4390144A3 (de) | 2022-12-22 | 2022-12-22 | Vakuumpumpe |
Country Status (2)
Country | Link |
---|---|
EP (3) | EP4390145A2 (de) |
JP (1) | JP2024091224A (de) |
Citations (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4806075A (en) * | 1983-10-07 | 1989-02-21 | Sargent-Welch Scientific Co. | Turbomolecular pump with improved bearing assembly |
DE10113329A1 (de) * | 2001-03-20 | 2002-09-26 | Leybold Vakuum Gmbh | Turbomolekularpumpe |
JP2004019493A (ja) * | 2002-06-13 | 2004-01-22 | Fujitsu Ltd | 排気装置 |
EP1408237A1 (de) * | 2002-10-11 | 2004-04-14 | Alcatel | Turbomolekularpumpe |
DE10354204A1 (de) * | 2003-11-20 | 2005-06-23 | Leybold Vakuum Gmbh | Molekularpumpe |
DE102006031965A1 (de) * | 2005-07-15 | 2007-01-18 | Leybold Vacuum Gmbh | Rotoren einer Turbomolekularpumpe |
EP1330606B1 (de) * | 2000-10-28 | 2011-07-13 | Oerlikon Leybold Vacuum GmbH | Mechanische kinetische vakuumpumpe |
EP3002459A1 (de) * | 2014-10-02 | 2016-04-06 | Pfeiffer Vacuum GmbH | Verfahren zur herstellung einer rotor- oder statorscheibe für eine vakuumpumpe sowie rotor- oder statorscheibe für eine vakuumpumpe |
KR101758033B1 (ko) * | 2013-11-30 | 2017-07-14 | 라이볼트 게엠베하 | 진공 펌프를 위한 로터 디스크 및 로터 |
US20200378857A1 (en) * | 2019-05-30 | 2020-12-03 | Shimadzu Corporation | Vacuum pump and leak detector |
WO2021245345A1 (fr) * | 2020-06-04 | 2021-12-09 | Constellium Issoire | Utilisation de produits en alliage aluminium cuivre magnesium performants a haute temperature |
EP4006349A1 (de) * | 2019-07-22 | 2022-06-01 | Edwards Japan Limited | Vakuumpumpe, rotor und drehschieber zur verwendung in einer vakuumpumpe |
Family Cites Families (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP3650702B1 (de) | 2018-11-12 | 2020-09-16 | Pfeiffer Vacuum Gmbh | Verwendung eines synthetischen öls in einer vakuumpumpe und vakuumpumpe |
-
2022
- 2022-12-22 EP EP24166459.8A patent/EP4390145A2/de active Pending
- 2022-12-22 EP EP24166455.6A patent/EP4390144A3/de active Pending
- 2022-12-22 EP EP22216232.3A patent/EP4151860A3/de active Pending
-
2023
- 2023-05-02 JP JP2023076120A patent/JP2024091224A/ja active Pending
Patent Citations (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4806075A (en) * | 1983-10-07 | 1989-02-21 | Sargent-Welch Scientific Co. | Turbomolecular pump with improved bearing assembly |
EP1330606B1 (de) * | 2000-10-28 | 2011-07-13 | Oerlikon Leybold Vacuum GmbH | Mechanische kinetische vakuumpumpe |
DE10113329A1 (de) * | 2001-03-20 | 2002-09-26 | Leybold Vakuum Gmbh | Turbomolekularpumpe |
JP2004019493A (ja) * | 2002-06-13 | 2004-01-22 | Fujitsu Ltd | 排気装置 |
EP1408237A1 (de) * | 2002-10-11 | 2004-04-14 | Alcatel | Turbomolekularpumpe |
DE10354204A1 (de) * | 2003-11-20 | 2005-06-23 | Leybold Vakuum Gmbh | Molekularpumpe |
DE102006031965A1 (de) * | 2005-07-15 | 2007-01-18 | Leybold Vacuum Gmbh | Rotoren einer Turbomolekularpumpe |
KR101758033B1 (ko) * | 2013-11-30 | 2017-07-14 | 라이볼트 게엠베하 | 진공 펌프를 위한 로터 디스크 및 로터 |
EP3002459A1 (de) * | 2014-10-02 | 2016-04-06 | Pfeiffer Vacuum GmbH | Verfahren zur herstellung einer rotor- oder statorscheibe für eine vakuumpumpe sowie rotor- oder statorscheibe für eine vakuumpumpe |
US20200378857A1 (en) * | 2019-05-30 | 2020-12-03 | Shimadzu Corporation | Vacuum pump and leak detector |
EP4006349A1 (de) * | 2019-07-22 | 2022-06-01 | Edwards Japan Limited | Vakuumpumpe, rotor und drehschieber zur verwendung in einer vakuumpumpe |
WO2021245345A1 (fr) * | 2020-06-04 | 2021-12-09 | Constellium Issoire | Utilisation de produits en alliage aluminium cuivre magnesium performants a haute temperature |
Also Published As
Publication number | Publication date |
---|---|
EP4390144A3 (de) | 2024-07-10 |
EP4390144A2 (de) | 2024-06-26 |
EP4151860A2 (de) | 2023-03-22 |
EP4390145A2 (de) | 2024-06-26 |
JP2024091224A (ja) | 2024-07-04 |
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Ipc: F04D 29/32 20060101ALI20230228BHEP Ipc: F04D 29/02 20060101ALI20230228BHEP Ipc: F04D 19/04 20060101AFI20230228BHEP |
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RBV | Designated contracting states (corrected) |
Designated state(s): AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC ME MK MT NL NO PL PT RO RS SE SI SK SM TR |
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Effective date: 20230728 |