EP4151860A3 - Vacuum pump - Google Patents

Vacuum pump Download PDF

Info

Publication number
EP4151860A3
EP4151860A3 EP22216232.3A EP22216232A EP4151860A3 EP 4151860 A3 EP4151860 A3 EP 4151860A3 EP 22216232 A EP22216232 A EP 22216232A EP 4151860 A3 EP4151860 A3 EP 4151860A3
Authority
EP
European Patent Office
Prior art keywords
rotor
holweck
component
collar
vacuum pump
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
EP22216232.3A
Other languages
German (de)
French (fr)
Other versions
EP4151860A2 (en
Inventor
Sönke Gilbrich
Jan Hofmann
Bernd Koci
Mirko Mekota
Thilo Wille
Michael Schweighöfer
Tobias Stoll
Bernhard Koch
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Pfeiffer Vacuum Technology AG
Original Assignee
Pfeiffer Vacuum Technology AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Pfeiffer Vacuum Technology AG filed Critical Pfeiffer Vacuum Technology AG
Priority to EP22216232.3A priority Critical patent/EP4151860A3/en
Publication of EP4151860A2 publication Critical patent/EP4151860A2/en
Publication of EP4151860A3 publication Critical patent/EP4151860A3/en
Pending legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/044—Holweck-type pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/046—Combinations of two or more different types of pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/02—Selection of particular materials
    • F04D29/023—Selection of particular materials especially adapted for elastic fluid pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/26—Rotors specially for elastic fluids
    • F04D29/32—Rotors specially for elastic fluids for axial flow pumps
    • F04D29/321—Rotors specially for elastic fluids for axial flow pumps for axial flow compressors
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05D—INDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
    • F05D2300/00—Materials; Properties thereof
    • F05D2300/10—Metals, alloys or intermetallic compounds
    • F05D2300/17—Alloys
    • F05D2300/173—Aluminium alloys, e.g. AlCuMgPb

Abstract

Die Erfindung betrifft eine Vakuumpumpe, insbesondere Turbomolekularpumpe, mit einer während des Betriebs um eine Drehachse rotierenden Rotorwelle und mit wenigstens einem auf der Rotorwelle befestigten Rotorbauteil, wobei das Rotorbauteil eine Rotorscheibe ist, die einen radial innen liegenden Bund, über den die Rotorscheibe auf der Rotorwelle befestigt ist, und mehrere Rotorschaufeln umfasst, die jeweils integral mit dem Bund verbunden sind und die sich jeweils ausgehend von einem Schaufelgrund am Bund radial nach außen erstrecken und radial außen ein freies Schaufelende aufweisen, oder wobei das Rotorbauteil ein Holweckbauteil ist, insbesondere eine Holwecknabe oder eine Holweckhülse, und wobei die Rotorscheibe und/oder das Holweckbauteil aus einer Aluminiumlegierung gefertigt sind bzw. ist, die folgende Elemente in Gewichts-% aufweist: Cu: 3,6-4,4; Mg: 1,2-1,4; Mn : 0,5-0,8; Zr: < 0,16; Ti : 0,01 -0,05; Si < 0,21; Fe < 0,21; Zn < 0,26; andere Elemente < 0,06; Rest Aluminium.The invention relates to a vacuum pump, in particular a turbomolecular pump, with a rotor shaft that rotates about an axis of rotation during operation and with at least one rotor component fastened to the rotor shaft, the rotor component being a rotor disk which has a radially inner collar via which the rotor disk is mounted on the rotor shaft is attached, and comprises a plurality of rotor blades which are each integrally connected to the collar and which each extend radially outwards from a blade base on the collar and have a free blade end radially on the outside, or wherein the rotor component is a Holweck component, in particular a Holweck hub or a Holweck sleeve, and wherein the rotor disk and/or the Holweck member is made of an aluminum alloy having the following elements in % by weight: Cu: 3.6-4.4; Mg: 1.2-1.4; Mn : 0.5-0.8; Zr: <0.16; Ti : 0.01 -0.05; Si<0.21; Fe<0.21; Zn < 0.26; other elements < 0.06; remainder aluminum.

EP22216232.3A 2022-12-22 2022-12-22 Vacuum pump Pending EP4151860A3 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
EP22216232.3A EP4151860A3 (en) 2022-12-22 2022-12-22 Vacuum pump

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
EP22216232.3A EP4151860A3 (en) 2022-12-22 2022-12-22 Vacuum pump

Publications (2)

Publication Number Publication Date
EP4151860A2 EP4151860A2 (en) 2023-03-22
EP4151860A3 true EP4151860A3 (en) 2023-04-05

Family

ID=84569606

Family Applications (1)

Application Number Title Priority Date Filing Date
EP22216232.3A Pending EP4151860A3 (en) 2022-12-22 2022-12-22 Vacuum pump

Country Status (1)

Country Link
EP (1) EP4151860A3 (en)

Citations (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4806075A (en) * 1983-10-07 1989-02-21 Sargent-Welch Scientific Co. Turbomolecular pump with improved bearing assembly
DE10113329A1 (en) * 2001-03-20 2002-09-26 Leybold Vakuum Gmbh Turbo-molecular pump stator radiate heat to rotor
JP2004019493A (en) * 2002-06-13 2004-01-22 Fujitsu Ltd Exhaust system
EP1408237A1 (en) * 2002-10-11 2004-04-14 Alcatel Turbomolecular pump
DE10354204A1 (en) * 2003-11-20 2005-06-23 Leybold Vakuum Gmbh molecular pump
DE102006031965A1 (en) * 2005-07-15 2007-01-18 Leybold Vacuum Gmbh Rotor for turbo molecular pump has rotor blades made from an aluminium alloy comprising aluminium, copper, manganese, magnesium cut and shaped by reforming
EP1330606B1 (en) * 2000-10-28 2011-07-13 Oerlikon Leybold Vacuum GmbH Mechanical kinetic vacuum pump
EP3002459A1 (en) * 2014-10-02 2016-04-06 Pfeiffer Vacuum GmbH Method for manufacturing a rotor or stator disc for a vacuum pump and rotor or stator disc for a vacuum pump
KR101758033B1 (en) * 2013-11-30 2017-07-14 라이볼트 게엠베하 Rotor disc and rotor for a vacuum pump
US20200378857A1 (en) * 2019-05-30 2020-12-03 Shimadzu Corporation Vacuum pump and leak detector
WO2021245345A1 (en) * 2020-06-04 2021-12-09 Constellium Issoire Use of products made from aluminium copper magnesium alloy that perform well at high temperature
EP4006349A1 (en) * 2019-07-22 2022-06-01 Edwards Japan Limited Vacuum pump, and rotor and rotary vane for use in vacuum pump

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP3650702B1 (en) 2018-11-12 2020-09-16 Pfeiffer Vacuum Gmbh Use of a synthetic oil in a vacuum pump and vacuum pump

Patent Citations (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4806075A (en) * 1983-10-07 1989-02-21 Sargent-Welch Scientific Co. Turbomolecular pump with improved bearing assembly
EP1330606B1 (en) * 2000-10-28 2011-07-13 Oerlikon Leybold Vacuum GmbH Mechanical kinetic vacuum pump
DE10113329A1 (en) * 2001-03-20 2002-09-26 Leybold Vakuum Gmbh Turbo-molecular pump stator radiate heat to rotor
JP2004019493A (en) * 2002-06-13 2004-01-22 Fujitsu Ltd Exhaust system
EP1408237A1 (en) * 2002-10-11 2004-04-14 Alcatel Turbomolecular pump
DE10354204A1 (en) * 2003-11-20 2005-06-23 Leybold Vakuum Gmbh molecular pump
DE102006031965A1 (en) * 2005-07-15 2007-01-18 Leybold Vacuum Gmbh Rotor for turbo molecular pump has rotor blades made from an aluminium alloy comprising aluminium, copper, manganese, magnesium cut and shaped by reforming
KR101758033B1 (en) * 2013-11-30 2017-07-14 라이볼트 게엠베하 Rotor disc and rotor for a vacuum pump
EP3002459A1 (en) * 2014-10-02 2016-04-06 Pfeiffer Vacuum GmbH Method for manufacturing a rotor or stator disc for a vacuum pump and rotor or stator disc for a vacuum pump
US20200378857A1 (en) * 2019-05-30 2020-12-03 Shimadzu Corporation Vacuum pump and leak detector
EP4006349A1 (en) * 2019-07-22 2022-06-01 Edwards Japan Limited Vacuum pump, and rotor and rotary vane for use in vacuum pump
WO2021245345A1 (en) * 2020-06-04 2021-12-09 Constellium Issoire Use of products made from aluminium copper magnesium alloy that perform well at high temperature

Also Published As

Publication number Publication date
EP4151860A2 (en) 2023-03-22

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