EP1330606B1 - Mechanical kinetic vacuum pump - Google Patents
Mechanical kinetic vacuum pump Download PDFInfo
- Publication number
- EP1330606B1 EP1330606B1 EP01974146A EP01974146A EP1330606B1 EP 1330606 B1 EP1330606 B1 EP 1330606B1 EP 01974146 A EP01974146 A EP 01974146A EP 01974146 A EP01974146 A EP 01974146A EP 1330606 B1 EP1330606 B1 EP 1330606B1
- Authority
- EP
- European Patent Office
- Prior art keywords
- vacuum pump
- mechanical kinetic
- rotor
- pump
- alloy
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D19/00—Axial-flow pumps
- F04D19/02—Multi-stage pumps
- F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D29/00—Details, component parts, or accessories
- F04D29/02—Selection of particular materials
- F04D29/023—Selection of particular materials especially adapted for elastic fluid pumps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D29/00—Details, component parts, or accessories
- F04D29/26—Rotors specially for elastic fluids
- F04D29/32—Rotors specially for elastic fluids for axial flow pumps
- F04D29/321—Rotors specially for elastic fluids for axial flow pumps for axial flow compressors
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
- F05D—INDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
- F05D2230/00—Manufacture
- F05D2230/20—Manufacture essentially without removing material
- F05D2230/22—Manufacture essentially without removing material by sintering
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
- F05D—INDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
- F05D2300/00—Materials; Properties thereof
- F05D2300/10—Metals, alloys or intermetallic compounds
- F05D2300/12—Light metals
- F05D2300/125—Magnesium
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
- F05D—INDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
- F05D2300/00—Materials; Properties thereof
- F05D2300/10—Metals, alloys or intermetallic compounds
- F05D2300/17—Alloys
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
- F05D—INDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
- F05D2300/00—Materials; Properties thereof
- F05D2300/10—Metals, alloys or intermetallic compounds
- F05D2300/17—Alloys
- F05D2300/173—Aluminium alloys, e.g. AlCuMgPb
Definitions
- the invention relates to a mechanical kinetic vacuum pump with a rotor consisting of an aluminum alloy.
- the mechanical kinetic vacuum pumps by definition include gas ring pumps, turbo vacuum pumps (axial, radial) and molecular / turbomolecular pumps. They are able to mechanically transport the gas particles to be delivered in the area of the molecular flow (pressures less than 10 -3 mbar). In addition, molecular pumps are still capable of conveying gases in the region of the Knudsen flow (10 -3 to 1 mbar). Preferably used mechanical kinetic vacuum pumps often have a turbomolecular pumping stage and an adjoining molecular pumping stage (compound or hybrid pump), since such a pump is capable of compressing gases up to the region of the viscous flow.
- Turbomolecular vacuum pumps and compound pumps are used in manufacturing processes in the semiconductor industry.
- the procedures used here - etching, coating or the like - can only be carried out in a vacuum.
- the vacuum pumps mentioned have the task of evacuating the vacuum chambers before the start of the processes and maintain the desired low pressures during the course of the processes.
- Turbomolecular vacuum pumps are operated at high speeds (up to 100,000 revolutions / min).
- the rotors are made of a light metal, usually from a melt-metallurgically produced aluminum alloy ( DE 2923632 A1 ).
- the alloy is adjusted so that the rotors have the highest possible heat resistance and creep rupture strength.
- the creep rupture strength decreases with increasing rotor temperature. In the aluminum alloys used so far, an acceptable creep rupture strength results if the rotor temperatures do not exceed the value of 120 ° C.
- the semiconductor components located in the vacuum chamber assume elevated temperatures. Associated with this is an increase in temperature of the gases to be delivered by the vacuum pumps. These gases in particular cause a temperature increase of the rotors of the connected vacuum pumps. This increase in temperature adversely affects the creep strength mentioned.
- the bearings must not take high temperatures due to the presence of a lubricant.
- the operation of mechanical bearings itself is associated with heat generation.
- the drive motor of the pump is part of the stator and arranged in the vicinity of the bearings. In the phases in which it is operated under load, it forms itself a source of heat. In this case, a partial transport of heat between the rotor and stator via the gas is possible due to the increased density. The removal of significant amounts of heat through the mechanical bearings would only be possible with intensive cooling of the stator bearing parts.
- the present invention has for its object to improve the hot and creep strength of a friction vacuum pump of the type mentioned. According to the invention this object is achieved by the characterizing features of the claims.
- Aluminum alloys powder-metallurgically are known per se. They are produced in such a way that the melt consisting of the alloy constituents by means of Dü sprayed on a cold surface. Compared to the production of aluminum alloys by fusion metallurgy, a very rapid solidification of the melt takes place, as a result of which the alloy acquires a new microstructure with altered properties. In particular, spray-compacted aluminum alloys, the main alloying constituent of which is copper, have a substantially higher strength than a molten-metallurgically produced aluminum alloy.
- DISPAL Materials of the type according to the invention are marketed under the name DISPAL (eg DISPAL S 690 and S 691).
- DISPAL eg DISPAL S 690 and S 691.
- copper In addition to the aluminum they contain 3.8 to 5.6% by weight of copper and further alloying constituents, such as magnesium, manganese, zirconium, silver and / or titanium with proportions between 0.1 and 1 wt .-%.
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Non-Positive Displacement Air Blowers (AREA)
- Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
Abstract
Description
Die Erfindung bezieht sich auf eine mechanische kinetische Vakuumpumpe mit einem aus einer Aluminium-Legierung bestehenden Rotor.The invention relates to a mechanical kinetic vacuum pump with a rotor consisting of an aluminum alloy.
Zu den mechanischen kinetischen Vakuumpumpen gehören definitionsgemäß Gasringpumpen, Turbovakuumpumpen (axial, radial) und Molekular-/Turbomolekularpumpen. Sie sind in der Lage, im Bereich der Molekularströmung (Drücke kleiner 10-3 mbar) die zu fördernden Gasteilchen mechanisch zu transportieren. Molekularpumpen sind darüber hinaus noch in der Lage, Gase im Bereich der Knudsenströmung (10-3 bis 1 mbar) zu fördern. Bevorzugt eingesetzte mechanische kinetische Vakuumpumpen weisen häufig eine Turbomolekularpumpstufe und eine sich daran anschließende Molekularpumpstufe auf (Compound- oder Hybridpumpe), da eine solche Pumpe in der Lage ist, Gase bis in den Bereich der viskosen Strömung zu verdichten.The mechanical kinetic vacuum pumps by definition include gas ring pumps, turbo vacuum pumps (axial, radial) and molecular / turbomolecular pumps. They are able to mechanically transport the gas particles to be delivered in the area of the molecular flow (pressures less than 10 -3 mbar). In addition, molecular pumps are still capable of conveying gases in the region of the Knudsen flow (10 -3 to 1 mbar). Preferably used mechanical kinetic vacuum pumps often have a turbomolecular pumping stage and an adjoining molecular pumping stage (compound or hybrid pump), since such a pump is capable of compressing gases up to the region of the viscous flow.
Turbomolekularvakuumpumpen und Compoundpumpen werden bei Fertigungsprozessen in der Halbleiterindustrie eingesetzt. Die dabei angewendeten Verfahren - Ätzen, Beschichten o. dgl. - können nur im Vakuum durchgeführt werden. Die genannten Vakuumpumpen haben die Aufgabe, die Vakuumkammern vor dem Beginn der Prozesse zu evakuieren und während des Ablaufs der Prozesse die gewünschten niedrigen Drücke aufrechtzuerhalten.Turbomolecular vacuum pumps and compound pumps are used in manufacturing processes in the semiconductor industry. The procedures used here - etching, coating or the like - can only be carried out in a vacuum. The vacuum pumps mentioned have the task of evacuating the vacuum chambers before the start of the processes and maintain the desired low pressures during the course of the processes.
Turbomolekularvakuumpumpen werden mit hohen Drehzahlen betrieben (bis zu 100000 Umdrehungen/min). Aus rotordynamischen Gründen bestehen die Rotoren aus einem Leichtmetall, üblicherweise aus einer schmelzmetallurgisch hergestellten Aluminiumlegierung (
Während der Durchführung der Halbleiterprozesse nehmen die sich in der Vakuumkammer befindenden Halbleiterbauteile erhöhte Temperaturen an. Damit verbunden ist eine Temperaturerhöhung der von den Vakuumpumpen zu fördernden Gase. Diese Gase bewirken insbesondere eine Temperaturerhöhung der Rotoren der angeschlossenen Vakuumpumpen. Diese Temperaturerhöhung beeinträchtigt die erwähnte Zeitstandfestigkeit.During the execution of the semiconductor processes, the semiconductor components located in the vacuum chamber assume elevated temperatures. Associated with this is an increase in temperature of the gases to be delivered by the vacuum pumps. These gases in particular cause a temperature increase of the rotors of the connected vacuum pumps. This increase in temperature adversely affects the creep strength mentioned.
Die Kühlung der Rotoren einer Molekular- oder Turbomolekularvakuumpumpe ist mit Schwierigkeiten verbunden. Zum einen befinden sich die Rotoren im Vakuum, so dass eine Wärmeabfuhr über die geförderten, ohnehin heissen Gase nicht stattfindet. Sind die Rotoren magnetgelagert, berühren sich ihre Lagerteile nicht. Eine Wärmeabfuhr über die Magnetlager ist deshalb ebenfalls nicht möglich. Sind mechanische Lager vorgesehen, kann Rotorwärme über die Lager abfliessen. Diesem Weg der Wärmeabfuhr sind jedoch enge Grenzen gesetzt. Zum einen sind die einander über die Wälzkörper berührenden Flächenbereiche von Rotor und Stator auf die nahezu punktförmigen Berührungsflächen der Wälzköprer in ihren Lagerringen beschränkt. Weiterhin dürfen die Lager wegen des Vorhandenseins eines Schmiermittels keine hohen Temperaturen annehmen. Auch ist der Betrieb mechanischer Lager selbst mit einer Wärmeerzeugung verbunden. Schließlich ist in aller Regel der Antriebsmotor der Pumpe Bestandteil des Stators und in der Nähe der Lager angeordnet. In den Phasen, in denen er unter Last betrieben wird, bildet er selbst eine Wärmequelle. In diesem Fall ist ein Teiltransport der Wärme zwischen Rotor und Stator über das Gas durch die erhöhte Dichte möglich. Die Abfuhr maßgebliche Wärmemengen über die mechanischen Lager wäre nur bei einer intensiven Kühlung der statorseitigen Lagerteile möglich.The cooling of the rotors of a molecular or turbomolecular vacuum pump is associated with difficulties. On the one hand, the rotors are in a vacuum, so that heat dissipation via the conveyed, anyway hot gases does not take place. Are the rotors magnetically stored, their bearing parts do not touch. A heat dissipation via the magnetic bearings is therefore also not possible. If mechanical bearings are provided, rotor heat can flow off the bearings. However, this way of heat removal are set narrow limits. On the one hand, the surface areas of the rotor and the stator which touch one another via the rolling bodies are limited to the almost punctiform contact surfaces of the rolling bodies in their bearing rings. Furthermore, the bearings must not take high temperatures due to the presence of a lubricant. Also, the operation of mechanical bearings itself is associated with heat generation. Finally, as a rule, the drive motor of the pump is part of the stator and arranged in the vicinity of the bearings. In the phases in which it is operated under load, it forms itself a source of heat. In this case, a partial transport of heat between the rotor and stator via the gas is possible due to the increased density. The removal of significant amounts of heat through the mechanical bearings would only be possible with intensive cooling of the stator bearing parts.
Aus der
Aus der internationalen Patentanmeldung
Zum Stand der Technik gehört noch der Inhalt der
Der vorliegenden Erfindung liegt die Aufgabe zugrunde, die Warm- und Zeitstandfestigkeit einer Reibungsvakuumpumpe der eingangs genannten Art zu verbessern. Erfindungsgemäß wird diese Aufgabe durch die kennzeichnenden Merkmale der Patentansprüche gelöst.The present invention has for its object to improve the hot and creep strength of a friction vacuum pump of the type mentioned. According to the invention this object is achieved by the characterizing features of the claims.
Pulvermetallurgisch (oder auch durch Sprühkompaktieren) hergestellte Aluminiumlegierungen sind an sich bekannt. Ihre Herstellung erfolgt in der Weise, dass die aus den Legierungsbestandteilen bestehende Schmelze mittels Dü sen auf eine kalte Oberfläche gesprüht wird. Im Vergleich zur schmelzmetallurgischen Herstellung von Aluminium-Werkstoffen findet ein sehr schnelles Erstarren der Schmelze statt, wodurch die Legierung ein neues Gefüge mit veränderten Eigenschaften erhält. Durch Sprühkompaktieren hergestellte Aluminiumlegierungen, deren Hauptlegierungsbestandteil Kupfer ist, haben vor allem eine wesentlich höhere Festigkeit als eine schmelzmetallurgisch hergestellte Aluminiumlegierung.Aluminum alloys powder-metallurgically (or also spray-compacted) are known per se. They are produced in such a way that the melt consisting of the alloy constituents by means of Dü sprayed on a cold surface. Compared to the production of aluminum alloys by fusion metallurgy, a very rapid solidification of the melt takes place, as a result of which the alloy acquires a new microstructure with altered properties. In particular, spray-compacted aluminum alloys, the main alloying constituent of which is copper, have a substantially higher strength than a molten-metallurgically produced aluminum alloy.
Die Verwendung des beschriebenen Werkstoffes für Rotoren der hier betroffenen Vakuumpumpen erlaubt die Herstellung von Pumpen dieser Art mit höherer Zeitstandfestigkeit. Wenn die vorerwähnte Temperaturgrenze (120°C) nicht überschritten wird, können die (bisher) maximalen Drehzahlen maßgeblich erhöht werden. Darüber hinaus besteht die Möglichkeit, die bisherige, maximal zulässige Temperatur zu erhöhen, z.B. bis auf 135° C und mehr, ohne die Drehzahlen reduzieren zu müssen, die bisher bis 120° C zulässig waren.The use of the described material for rotors of the vacuum pumps involved here makes it possible to produce pumps of this type with a higher creep rupture strength. If the above-mentioned temperature limit (120 ° C) is not exceeded, the (so far) maximum speeds can be significantly increased. In addition, it is possible to increase the previous maximum allowable temperature, e.g. up to 135 ° C and more, without having to reduce the speeds that were previously allowed to 120 ° C.
Es ist bekannt, die aus schmelzmetallurgisch hergestellten Aluminium-Legierungen bestehenden Rotoren und Statoren von bei Halbleiterprozessen eingesetzten Molekular-/Turbomolekularpumpen zum Zwecke des Korrosionsschutzes mit Konversionsschichten (Umwandlung des oberflächennahen Aluminiums in Al2O3 z. B. durch Anodierung) auszurüsten. Da die Legierungsanteile des neuen Werkstoffs metallisch und relativ klein sind, besteht nach wie vor die vorteilhafte Möglichkeit der Aufbringung geschlossener Konversionsschichten. Der in der oben erwähnten internationalen Patentanmeldung vorgeschlagene Werkstoff lässt die Aufbringung zuverlässiger Konversionsschichten nicht mehr zu.It is known to equip the rotors and stators of melt-metallurgically produced aluminum alloys of molecular / turbomolecular pumps used in semiconductor processes for the purpose of corrosion protection with conversion layers (conversion of the near-surface aluminum into Al 2 O 3, eg by anodization). Since the alloying proportions of the new material are metallic and relatively small, there is still the advantageous possibility of applying closed conversion layers. The one proposed in the above-mentioned international patent application Material no longer allows the application of reliable conversion coatings.
Werkstoffe der erfindungsgemäßen Art werden unter dem Namen DISPAL (z. B. DISPAL S 690 und S 691) auf dem Markt angeboten. Neben dem Aluminium enthalten sie
3,8 bis 5,6 Gew.-% Kupfer
sowie weitere Legierungsbestandteile, wie Magnesium, Mangan, Zirkon, Silber und/oder Titan mit Anteilen zwischen 0,1 und 1 Gew.-%.Materials of the type according to the invention are marketed under the name DISPAL (eg DISPAL S 690 and S 691). In addition to the aluminum they contain
3.8 to 5.6% by weight of copper
and further alloying constituents, such as magnesium, manganese, zirconium, silver and / or titanium with proportions between 0.1 and 1 wt .-%.
Claims (2)
- Mechanical kinetic vacuum pump comprising a rotor made of an aluminum alloy, characterized in that the rotor material is an aluminum alloy manufactured by powder metallurgy, the main alloy constituent being copper, and that the share of copper amounts to 3 to 7 percent in weight.
- Pump according to claim 1, characterized in that the rotor material contains further alloy constituents, specifically magnesium, manganese, zircon, silver at shares of between 0.1 and 1 percent in weight.
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE10053664 | 2000-10-28 | ||
DE10053664A DE10053664A1 (en) | 2000-10-28 | 2000-10-28 | Mechanical kinetic vacuum pump |
PCT/EP2001/009193 WO2002035100A1 (en) | 2000-10-28 | 2001-08-09 | Mechanical kinetic vacuum pump |
Publications (2)
Publication Number | Publication Date |
---|---|
EP1330606A1 EP1330606A1 (en) | 2003-07-30 |
EP1330606B1 true EP1330606B1 (en) | 2011-07-13 |
Family
ID=7661493
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP01974146A Expired - Lifetime EP1330606B1 (en) | 2000-10-28 | 2001-08-09 | Mechanical kinetic vacuum pump |
Country Status (5)
Country | Link |
---|---|
US (1) | US7097431B2 (en) |
EP (1) | EP1330606B1 (en) |
JP (1) | JP2004512463A (en) |
DE (1) | DE10053664A1 (en) |
WO (1) | WO2002035100A1 (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP4151860A3 (en) * | 2022-12-22 | 2023-04-05 | Pfeiffer Vacuum Technology AG | Vacuum pump |
Families Citing this family (12)
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JP2003254285A (en) * | 2002-02-28 | 2003-09-10 | Boc Edwards Technologies Ltd | Pump device |
DE102004049543A1 (en) * | 2004-10-12 | 2006-04-13 | Man B & W Diesel Ag | Rotor for radial compressor has outer region consisting of basic and additional materials forming gradient material |
EP2013483B1 (en) * | 2006-04-29 | 2010-03-03 | Oerlikon Leybold Vacuum GmbH | Method for producing rotors or stators of a turbomolecular pump |
JP5718906B2 (en) * | 2009-05-20 | 2015-05-13 | エドワーズ リミテッド | Side channel pump with symmetrical rotor disk that pumps in parallel |
US9335296B2 (en) | 2012-10-10 | 2016-05-10 | Westinghouse Electric Company Llc | Systems and methods for steam generator tube analysis for detection of tube degradation |
DE102013219043A1 (en) | 2013-09-23 | 2015-03-26 | Oerlikon Leybold Vacuum Gmbh | Alloys of rotors of a turbomolecular pump |
DE102013219050B3 (en) * | 2013-09-23 | 2015-01-22 | Oerlikon Leybold Vacuum Gmbh | High-performance rotors of a turbomolecular pump |
EP3085964B1 (en) * | 2015-04-21 | 2019-12-11 | Pfeiffer Vacuum Gmbh | Production of a vacuum pump part by metallic additive manufacturing |
US11935662B2 (en) | 2019-07-02 | 2024-03-19 | Westinghouse Electric Company Llc | Elongate SiC fuel elements |
US11662300B2 (en) | 2019-09-19 | 2023-05-30 | Westinghouse Electric Company Llc | Apparatus for performing in-situ adhesion test of cold spray deposits and method of employing |
GB2592043A (en) * | 2020-02-13 | 2021-08-18 | Edwards Ltd | Axial flow vacuum pump |
FR3111143B1 (en) * | 2020-06-04 | 2022-11-18 | Constellium Issoire | High temperature performance aluminum copper magnesium alloy products |
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JPH0334699U (en) * | 1989-08-07 | 1991-04-04 | ||
DE10210404A1 (en) * | 2002-03-08 | 2003-09-18 | Leybold Vakuum Gmbh | Method for manufacturing the rotor of a friction vacuum pump and rotor manufactured using this method |
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-
2000
- 2000-10-28 DE DE10053664A patent/DE10053664A1/en not_active Withdrawn
-
2001
- 2001-08-09 JP JP2002538053A patent/JP2004512463A/en active Pending
- 2001-08-09 EP EP01974146A patent/EP1330606B1/en not_active Expired - Lifetime
- 2001-08-09 WO PCT/EP2001/009193 patent/WO2002035100A1/en active Application Filing
- 2001-08-09 US US10/415,029 patent/US7097431B2/en not_active Expired - Fee Related
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DE2923632A1 (en) * | 1979-06-11 | 1980-12-18 | Leybold Heraeus Gmbh & Co Kg | METHOD FOR PRODUCING A VAN RING FOR THE ROTOR OF A TUBOMOLECULAR PUMP AND A ROTOR EQUIPPED WITH VAN RINGS OF THIS TYPE |
JPH0334699U (en) * | 1989-08-07 | 1991-04-04 | ||
DE10210404A1 (en) * | 2002-03-08 | 2003-09-18 | Leybold Vakuum Gmbh | Method for manufacturing the rotor of a friction vacuum pump and rotor manufactured using this method |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP4151860A3 (en) * | 2022-12-22 | 2023-04-05 | Pfeiffer Vacuum Technology AG | Vacuum pump |
Also Published As
Publication number | Publication date |
---|---|
DE10053664A1 (en) | 2002-05-08 |
WO2002035100A1 (en) | 2002-05-02 |
JP2004512463A (en) | 2004-04-22 |
US7097431B2 (en) | 2006-08-29 |
EP1330606A1 (en) | 2003-07-30 |
US20040013529A1 (en) | 2004-01-22 |
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