EP1330606B1 - Mechanical kinetic vacuum pump - Google Patents

Mechanical kinetic vacuum pump Download PDF

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Publication number
EP1330606B1
EP1330606B1 EP01974146A EP01974146A EP1330606B1 EP 1330606 B1 EP1330606 B1 EP 1330606B1 EP 01974146 A EP01974146 A EP 01974146A EP 01974146 A EP01974146 A EP 01974146A EP 1330606 B1 EP1330606 B1 EP 1330606B1
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EP
European Patent Office
Prior art keywords
vacuum pump
mechanical kinetic
rotor
pump
alloy
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Expired - Lifetime
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EP01974146A
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German (de)
French (fr)
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EP1330606A1 (en
Inventor
Heinrich Engländer
Michael Froitzheim
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Leybold GmbH
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Oerlikon Leybold Vacuum GmbH
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Publication of EP1330606A1 publication Critical patent/EP1330606A1/en
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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/02—Selection of particular materials
    • F04D29/023—Selection of particular materials especially adapted for elastic fluid pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/26—Rotors specially for elastic fluids
    • F04D29/32—Rotors specially for elastic fluids for axial flow pumps
    • F04D29/321—Rotors specially for elastic fluids for axial flow pumps for axial flow compressors
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05D—INDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
    • F05D2230/00—Manufacture
    • F05D2230/20—Manufacture essentially without removing material
    • F05D2230/22—Manufacture essentially without removing material by sintering
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05D—INDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
    • F05D2300/00—Materials; Properties thereof
    • F05D2300/10—Metals, alloys or intermetallic compounds
    • F05D2300/12—Light metals
    • F05D2300/125—Magnesium
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05D—INDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
    • F05D2300/00—Materials; Properties thereof
    • F05D2300/10—Metals, alloys or intermetallic compounds
    • F05D2300/17—Alloys
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05D—INDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
    • F05D2300/00—Materials; Properties thereof
    • F05D2300/10—Metals, alloys or intermetallic compounds
    • F05D2300/17—Alloys
    • F05D2300/173—Aluminium alloys, e.g. AlCuMgPb

Definitions

  • the invention relates to a mechanical kinetic vacuum pump with a rotor consisting of an aluminum alloy.
  • the mechanical kinetic vacuum pumps by definition include gas ring pumps, turbo vacuum pumps (axial, radial) and molecular / turbomolecular pumps. They are able to mechanically transport the gas particles to be delivered in the area of the molecular flow (pressures less than 10 -3 mbar). In addition, molecular pumps are still capable of conveying gases in the region of the Knudsen flow (10 -3 to 1 mbar). Preferably used mechanical kinetic vacuum pumps often have a turbomolecular pumping stage and an adjoining molecular pumping stage (compound or hybrid pump), since such a pump is capable of compressing gases up to the region of the viscous flow.
  • Turbomolecular vacuum pumps and compound pumps are used in manufacturing processes in the semiconductor industry.
  • the procedures used here - etching, coating or the like - can only be carried out in a vacuum.
  • the vacuum pumps mentioned have the task of evacuating the vacuum chambers before the start of the processes and maintain the desired low pressures during the course of the processes.
  • Turbomolecular vacuum pumps are operated at high speeds (up to 100,000 revolutions / min).
  • the rotors are made of a light metal, usually from a melt-metallurgically produced aluminum alloy ( DE 2923632 A1 ).
  • the alloy is adjusted so that the rotors have the highest possible heat resistance and creep rupture strength.
  • the creep rupture strength decreases with increasing rotor temperature. In the aluminum alloys used so far, an acceptable creep rupture strength results if the rotor temperatures do not exceed the value of 120 ° C.
  • the semiconductor components located in the vacuum chamber assume elevated temperatures. Associated with this is an increase in temperature of the gases to be delivered by the vacuum pumps. These gases in particular cause a temperature increase of the rotors of the connected vacuum pumps. This increase in temperature adversely affects the creep strength mentioned.
  • the bearings must not take high temperatures due to the presence of a lubricant.
  • the operation of mechanical bearings itself is associated with heat generation.
  • the drive motor of the pump is part of the stator and arranged in the vicinity of the bearings. In the phases in which it is operated under load, it forms itself a source of heat. In this case, a partial transport of heat between the rotor and stator via the gas is possible due to the increased density. The removal of significant amounts of heat through the mechanical bearings would only be possible with intensive cooling of the stator bearing parts.
  • the present invention has for its object to improve the hot and creep strength of a friction vacuum pump of the type mentioned. According to the invention this object is achieved by the characterizing features of the claims.
  • Aluminum alloys powder-metallurgically are known per se. They are produced in such a way that the melt consisting of the alloy constituents by means of Dü sprayed on a cold surface. Compared to the production of aluminum alloys by fusion metallurgy, a very rapid solidification of the melt takes place, as a result of which the alloy acquires a new microstructure with altered properties. In particular, spray-compacted aluminum alloys, the main alloying constituent of which is copper, have a substantially higher strength than a molten-metallurgically produced aluminum alloy.
  • DISPAL Materials of the type according to the invention are marketed under the name DISPAL (eg DISPAL S 690 and S 691).
  • DISPAL eg DISPAL S 690 and S 691.
  • copper In addition to the aluminum they contain 3.8 to 5.6% by weight of copper and further alloying constituents, such as magnesium, manganese, zirconium, silver and / or titanium with proportions between 0.1 and 1 wt .-%.

Abstract

The invention relates to a mechanical kinetic vacuum pump comprising a rotor made of an alloy. The aim of the invention is to increase the resistance thereof to heat and creep. The rotor material is a light metal alloy produced from a powder metallurgical light metal alloy.

Description

Die Erfindung bezieht sich auf eine mechanische kinetische Vakuumpumpe mit einem aus einer Aluminium-Legierung bestehenden Rotor.The invention relates to a mechanical kinetic vacuum pump with a rotor consisting of an aluminum alloy.

Zu den mechanischen kinetischen Vakuumpumpen gehören definitionsgemäß Gasringpumpen, Turbovakuumpumpen (axial, radial) und Molekular-/Turbomolekularpumpen. Sie sind in der Lage, im Bereich der Molekularströmung (Drücke kleiner 10-3 mbar) die zu fördernden Gasteilchen mechanisch zu transportieren. Molekularpumpen sind darüber hinaus noch in der Lage, Gase im Bereich der Knudsenströmung (10-3 bis 1 mbar) zu fördern. Bevorzugt eingesetzte mechanische kinetische Vakuumpumpen weisen häufig eine Turbomolekularpumpstufe und eine sich daran anschließende Molekularpumpstufe auf (Compound- oder Hybridpumpe), da eine solche Pumpe in der Lage ist, Gase bis in den Bereich der viskosen Strömung zu verdichten.The mechanical kinetic vacuum pumps by definition include gas ring pumps, turbo vacuum pumps (axial, radial) and molecular / turbomolecular pumps. They are able to mechanically transport the gas particles to be delivered in the area of the molecular flow (pressures less than 10 -3 mbar). In addition, molecular pumps are still capable of conveying gases in the region of the Knudsen flow (10 -3 to 1 mbar). Preferably used mechanical kinetic vacuum pumps often have a turbomolecular pumping stage and an adjoining molecular pumping stage (compound or hybrid pump), since such a pump is capable of compressing gases up to the region of the viscous flow.

Turbomolekularvakuumpumpen und Compoundpumpen werden bei Fertigungsprozessen in der Halbleiterindustrie eingesetzt. Die dabei angewendeten Verfahren - Ätzen, Beschichten o. dgl. - können nur im Vakuum durchgeführt werden. Die genannten Vakuumpumpen haben die Aufgabe, die Vakuumkammern vor dem Beginn der Prozesse zu evakuieren und während des Ablaufs der Prozesse die gewünschten niedrigen Drücke aufrechtzuerhalten.Turbomolecular vacuum pumps and compound pumps are used in manufacturing processes in the semiconductor industry. The procedures used here - etching, coating or the like - can only be carried out in a vacuum. The vacuum pumps mentioned have the task of evacuating the vacuum chambers before the start of the processes and maintain the desired low pressures during the course of the processes.

Turbomolekularvakuumpumpen werden mit hohen Drehzahlen betrieben (bis zu 100000 Umdrehungen/min). Aus rotordynamischen Gründen bestehen die Rotoren aus einem Leichtmetall, üblicherweise aus einer schmelzmetallurgisch hergestellten Aluminiumlegierung ( DE 2923632 A1 ). Die Legierung ist so eingestellt, dass die Rotoren eine möglichst hohe Warmfestigkeit und Zeitstandfestigkeit haben. Die Zeitstandfestigkeit nimmt mit zunehmender Rotortemperatur ab. Bei den bisher eingesetzten Aluminiumlegierungen ergibt sich eine akzeptable Zeitstandfestigkeit, wenn die Rotortemperaturen den Wert von 120°C nicht überschreiten.Turbomolecular vacuum pumps are operated at high speeds (up to 100,000 revolutions / min). For rotordynamischen reasons, the rotors are made of a light metal, usually from a melt-metallurgically produced aluminum alloy ( DE 2923632 A1 ). The alloy is adjusted so that the rotors have the highest possible heat resistance and creep rupture strength. The creep rupture strength decreases with increasing rotor temperature. In the aluminum alloys used so far, an acceptable creep rupture strength results if the rotor temperatures do not exceed the value of 120 ° C.

Während der Durchführung der Halbleiterprozesse nehmen die sich in der Vakuumkammer befindenden Halbleiterbauteile erhöhte Temperaturen an. Damit verbunden ist eine Temperaturerhöhung der von den Vakuumpumpen zu fördernden Gase. Diese Gase bewirken insbesondere eine Temperaturerhöhung der Rotoren der angeschlossenen Vakuumpumpen. Diese Temperaturerhöhung beeinträchtigt die erwähnte Zeitstandfestigkeit.During the execution of the semiconductor processes, the semiconductor components located in the vacuum chamber assume elevated temperatures. Associated with this is an increase in temperature of the gases to be delivered by the vacuum pumps. These gases in particular cause a temperature increase of the rotors of the connected vacuum pumps. This increase in temperature adversely affects the creep strength mentioned.

Die Kühlung der Rotoren einer Molekular- oder Turbomolekularvakuumpumpe ist mit Schwierigkeiten verbunden. Zum einen befinden sich die Rotoren im Vakuum, so dass eine Wärmeabfuhr über die geförderten, ohnehin heissen Gase nicht stattfindet. Sind die Rotoren magnetgelagert, berühren sich ihre Lagerteile nicht. Eine Wärmeabfuhr über die Magnetlager ist deshalb ebenfalls nicht möglich. Sind mechanische Lager vorgesehen, kann Rotorwärme über die Lager abfliessen. Diesem Weg der Wärmeabfuhr sind jedoch enge Grenzen gesetzt. Zum einen sind die einander über die Wälzkörper berührenden Flächenbereiche von Rotor und Stator auf die nahezu punktförmigen Berührungsflächen der Wälzköprer in ihren Lagerringen beschränkt. Weiterhin dürfen die Lager wegen des Vorhandenseins eines Schmiermittels keine hohen Temperaturen annehmen. Auch ist der Betrieb mechanischer Lager selbst mit einer Wärmeerzeugung verbunden. Schließlich ist in aller Regel der Antriebsmotor der Pumpe Bestandteil des Stators und in der Nähe der Lager angeordnet. In den Phasen, in denen er unter Last betrieben wird, bildet er selbst eine Wärmequelle. In diesem Fall ist ein Teiltransport der Wärme zwischen Rotor und Stator über das Gas durch die erhöhte Dichte möglich. Die Abfuhr maßgebliche Wärmemengen über die mechanischen Lager wäre nur bei einer intensiven Kühlung der statorseitigen Lagerteile möglich.The cooling of the rotors of a molecular or turbomolecular vacuum pump is associated with difficulties. On the one hand, the rotors are in a vacuum, so that heat dissipation via the conveyed, anyway hot gases does not take place. Are the rotors magnetically stored, their bearing parts do not touch. A heat dissipation via the magnetic bearings is therefore also not possible. If mechanical bearings are provided, rotor heat can flow off the bearings. However, this way of heat removal are set narrow limits. On the one hand, the surface areas of the rotor and the stator which touch one another via the rolling bodies are limited to the almost punctiform contact surfaces of the rolling bodies in their bearing rings. Furthermore, the bearings must not take high temperatures due to the presence of a lubricant. Also, the operation of mechanical bearings itself is associated with heat generation. Finally, as a rule, the drive motor of the pump is part of the stator and arranged in the vicinity of the bearings. In the phases in which it is operated under load, it forms itself a source of heat. In this case, a partial transport of heat between the rotor and stator via the gas is possible due to the increased density. The removal of significant amounts of heat through the mechanical bearings would only be possible with intensive cooling of the stator bearing parts.

Aus der JP-U-3034699 ist es bekannt, die pumpaktiven Flächen einer mechanisch kinetischen Vakuumpumpe teilweise mit einem Überzug hoher Wärmeimmission zu beschichten. Maßnahmen dieser Art sind aufwendig und deshalb kostspielig.From the JP-U-3034699 It is known to partially coat the pump-active surfaces of a mechanical kinetic vacuum pump with a coating of high heat immission. Measures of this type are complex and therefore expensive.

Aus der internationalen Patentanmeldung WO 99/57441 ist eine gattungsbildende für den Einsatz bei Halbleiterprozessen bestimmte mechanisch kinetische Vakuumpumpe bekannt. Sie ist als Turbomolekularvakuumpumpe ausgebildet. Um das Ziel zu erreichen, die Dauer von Halbleiterprozessen zu reduzieren, wird die Aufgabe gestellt, das Saugvermögen der Pumpe zu verbessern. Dabei soll sich die Größe der Pumpe nicht ändern. Zur Lösung dieser Aufgabe wird die Verwendung eines festeren und für höhere Temperaturen geeigneten Werkstoffes vorzugsweise für den Rotor vorgeschlagen, und zwar ein Werkstoff, bestehend aus einem Metall als Basismaterial und nicht-metallischen, der Verstärkung des Basismateriales dienenden Zusätzen, wie z.B. Keramik. Dieser Werkstoff soll es erlauben, die Drehzahl der Rotoren zu erhöhen, um dadurch die mit einer Steigerung der Wärmebelastung verbundene Erhöhung des Saugvermögens zu erreichen, ohne die Größe der Pumpe zu ändern. Die spanende Bearbeitung der vorgeschlagenen Werkstoffe ist jedoch wegen ihres erhöhten Anteils an Hartstoffpartikeln mit Problemen verbunden. Rotoren für Turbomolekularvakuumpumpen einschließlich der Vielzahl ihrer Schaufeln werden üblicherweise aus dem vollen gedreht/gefräst. Der mit der Herstellung eines Rotors verbundene Zerspanungsgrad liegt bei bis zu 80 %. Die Herstellung der Rotoren aus dem vorgeschlagenen Werkstoff ist deshalb aufwendig und kostspielig.From the international patent application WO 99/57441 is a generic forming intended for use in semiconductor processes mechanical kinetic vacuum pump known. It is designed as a turbomolecular vacuum pump. In order to achieve the goal of reducing the duration of semiconductor processes, the task is set, the pumping speed of the Pump to improve. The size of the pump should not change. To solve this problem, the use of a firmer and more suitable for higher temperatures material is preferably proposed for the rotor, namely a material consisting of a metal as a base material and non-metallic, the reinforcement of the base material serving additives, such as ceramic. This material should allow to increase the speed of the rotors, thereby achieving the increase of the pumping capacity associated with an increase of the heat load, without changing the size of the pump. However, the machining of the proposed materials is associated with problems because of their increased proportion of hard material particles. Rotors for turbomolecular vacuum pumps, including the multiplicity of their blades, are usually rotated / milled from the solid one. The degree of machining associated with the manufacture of a rotor is up to 80%. The production of the rotors from the proposed material is therefore complicated and expensive.

Zum Stand der Technik gehört noch der Inhalt der US-A-5 529 748 . Sie offenbart eine Aluminiumlegierung, deren mit Herstellprozessen verbundene Bearbeitbarkeit durch den Wegfall von Magnesiumbestandteilen wesentlich verbessert wird.To the state of the art is still the content of US-A-5 529 748 , It discloses an aluminum alloy whose workability associated with manufacturing processes is substantially improved by the elimination of magnesium constituents.

Der vorliegenden Erfindung liegt die Aufgabe zugrunde, die Warm- und Zeitstandfestigkeit einer Reibungsvakuumpumpe der eingangs genannten Art zu verbessern. Erfindungsgemäß wird diese Aufgabe durch die kennzeichnenden Merkmale der Patentansprüche gelöst.The present invention has for its object to improve the hot and creep strength of a friction vacuum pump of the type mentioned. According to the invention this object is achieved by the characterizing features of the claims.

Pulvermetallurgisch (oder auch durch Sprühkompaktieren) hergestellte Aluminiumlegierungen sind an sich bekannt. Ihre Herstellung erfolgt in der Weise, dass die aus den Legierungsbestandteilen bestehende Schmelze mittels Dü sen auf eine kalte Oberfläche gesprüht wird. Im Vergleich zur schmelzmetallurgischen Herstellung von Aluminium-Werkstoffen findet ein sehr schnelles Erstarren der Schmelze statt, wodurch die Legierung ein neues Gefüge mit veränderten Eigenschaften erhält. Durch Sprühkompaktieren hergestellte Aluminiumlegierungen, deren Hauptlegierungsbestandteil Kupfer ist, haben vor allem eine wesentlich höhere Festigkeit als eine schmelzmetallurgisch hergestellte Aluminiumlegierung.Aluminum alloys powder-metallurgically (or also spray-compacted) are known per se. They are produced in such a way that the melt consisting of the alloy constituents by means of Dü sprayed on a cold surface. Compared to the production of aluminum alloys by fusion metallurgy, a very rapid solidification of the melt takes place, as a result of which the alloy acquires a new microstructure with altered properties. In particular, spray-compacted aluminum alloys, the main alloying constituent of which is copper, have a substantially higher strength than a molten-metallurgically produced aluminum alloy.

Die Verwendung des beschriebenen Werkstoffes für Rotoren der hier betroffenen Vakuumpumpen erlaubt die Herstellung von Pumpen dieser Art mit höherer Zeitstandfestigkeit. Wenn die vorerwähnte Temperaturgrenze (120°C) nicht überschritten wird, können die (bisher) maximalen Drehzahlen maßgeblich erhöht werden. Darüber hinaus besteht die Möglichkeit, die bisherige, maximal zulässige Temperatur zu erhöhen, z.B. bis auf 135° C und mehr, ohne die Drehzahlen reduzieren zu müssen, die bisher bis 120° C zulässig waren.The use of the described material for rotors of the vacuum pumps involved here makes it possible to produce pumps of this type with a higher creep rupture strength. If the above-mentioned temperature limit (120 ° C) is not exceeded, the (so far) maximum speeds can be significantly increased. In addition, it is possible to increase the previous maximum allowable temperature, e.g. up to 135 ° C and more, without having to reduce the speeds that were previously allowed to 120 ° C.

Es ist bekannt, die aus schmelzmetallurgisch hergestellten Aluminium-Legierungen bestehenden Rotoren und Statoren von bei Halbleiterprozessen eingesetzten Molekular-/Turbomolekularpumpen zum Zwecke des Korrosionsschutzes mit Konversionsschichten (Umwandlung des oberflächennahen Aluminiums in Al2O3 z. B. durch Anodierung) auszurüsten. Da die Legierungsanteile des neuen Werkstoffs metallisch und relativ klein sind, besteht nach wie vor die vorteilhafte Möglichkeit der Aufbringung geschlossener Konversionsschichten. Der in der oben erwähnten internationalen Patentanmeldung vorgeschlagene Werkstoff lässt die Aufbringung zuverlässiger Konversionsschichten nicht mehr zu.It is known to equip the rotors and stators of melt-metallurgically produced aluminum alloys of molecular / turbomolecular pumps used in semiconductor processes for the purpose of corrosion protection with conversion layers (conversion of the near-surface aluminum into Al 2 O 3, eg by anodization). Since the alloying proportions of the new material are metallic and relatively small, there is still the advantageous possibility of applying closed conversion layers. The one proposed in the above-mentioned international patent application Material no longer allows the application of reliable conversion coatings.

Werkstoffe der erfindungsgemäßen Art werden unter dem Namen DISPAL (z. B. DISPAL S 690 und S 691) auf dem Markt angeboten. Neben dem Aluminium enthalten sie
3,8 bis 5,6 Gew.-% Kupfer
sowie weitere Legierungsbestandteile, wie Magnesium, Mangan, Zirkon, Silber und/oder Titan mit Anteilen zwischen 0,1 und 1 Gew.-%.Materials of the type according to the invention are marketed under the name DISPAL (eg DISPAL S 690 and S 691). In addition to the aluminum they contain
3.8 to 5.6% by weight of copper
and further alloying constituents, such as magnesium, manganese, zirconium, silver and / or titanium with proportions between 0.1 and 1 wt .-%.

Claims (2)

  1. Mechanical kinetic vacuum pump comprising a rotor made of an aluminum alloy, characterized in that the rotor material is an aluminum alloy manufactured by powder metallurgy, the main alloy constituent being copper, and that the share of copper amounts to 3 to 7 percent in weight.
  2. Pump according to claim 1, characterized in that the rotor material contains further alloy constituents, specifically magnesium, manganese, zircon, silver at shares of between 0.1 and 1 percent in weight.
EP01974146A 2000-10-28 2001-08-09 Mechanical kinetic vacuum pump Expired - Lifetime EP1330606B1 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE10053664A DE10053664A1 (en) 2000-10-28 2000-10-28 Mechanical kinetic vacuum pump
DE10053664 2000-10-28
PCT/EP2001/009193 WO2002035100A1 (en) 2000-10-28 2001-08-09 Mechanical kinetic vacuum pump

Publications (2)

Publication Number Publication Date
EP1330606A1 EP1330606A1 (en) 2003-07-30
EP1330606B1 true EP1330606B1 (en) 2011-07-13

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US (1) US7097431B2 (en)
EP (1) EP1330606B1 (en)
JP (1) JP2004512463A (en)
DE (1) DE10053664A1 (en)
WO (1) WO2002035100A1 (en)

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WO2002035100A1 (en) 2002-05-02
EP1330606A1 (en) 2003-07-30
JP2004512463A (en) 2004-04-22
US7097431B2 (en) 2006-08-29
DE10053664A1 (en) 2002-05-08
US20040013529A1 (en) 2004-01-22

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